阅读说明：本技术 一种谐振式陀螺闭环控制方法与系统 (Closed-loop control method and system for resonant gyroscope ) 是由 肖定邦 吴学忠 许一 李青松 张勇猛 周鑫 侯占强 卓明 王鹏 路阔 孙江坤 于 2020-05-15 设计创作，主要内容包括：本发明公开一种谐振式陀螺闭环控制方法与系统,包括驱动、检测模态下,驱动、检测方向振动位移信号的采集和转换；驱动位移信号经驱动环路生成控制信号输入驱动电极激励谐振子在驱动方向恒幅振动；检测位移信号分两路,一路经正交误差抑制环路输入检测电极；另一路经力平衡环路生成检测信号与校正解调信号叠加；对经两环路解调的信号分别解调和幅值运算；对幅值结果求和与PID控制运算获得标度补偿信号；利用标度补偿信号调控带扰动反馈力信号幅值,并将控幅后的信号输入检测电极,实现陀螺仪标度因数自动补偿。该方法与系统实现了谐振式陀螺完整的闭环控制功能,同时解决现有技术中适应性差且耗时费力等问题,提高陀螺运行状态下标度因数的稳定性。(The invention discloses a closed-loop control method and a closed-loop control system for a resonant gyroscope, which comprises the steps of acquiring and converting vibration displacement signals in driving and detecting directions in driving and detecting modes; the driving displacement signal generates a control signal through a driving loop, and the control signal is input into a driving electrode to excite the harmonic oscillator to vibrate in a constant amplitude manner in the driving direction; the detection displacement signal is divided into two paths, and one path is input into a detection electrode through an orthogonal error suppression loop; the other path generates a detection signal through a force balance loop and is superposed with a correction demodulation signal; demodulating and amplitude-computing the signals demodulated by the two loops respectively; summing the amplitude results and performing PID control operation to obtain a scale compensation signal; and regulating the amplitude of the disturbance feedback force signal by using the scale compensation signal, and inputting the amplitude-controlled signal into the detection electrode to realize the automatic compensation of the scale factor of the gyroscope. The method and the system realize the complete closed-loop control function of the resonant gyroscope, solve the problems of poor adaptability, time consumption, labor consumption and the like in the prior art, and improve the stability of the scale factor in the running state of the gyroscope.)

1. A closed-loop control method for a resonant gyroscope is characterized by comprising the following steps:

step 1, collecting a first signal representing the vibration displacement of a gyroscope in a driving direction and inputting the first signal into a driving loop in a driving mode; in the detection mode, acquiring a second signal representing the vibration displacement of the gyroscope in the detection direction and inputting the second signal into a detection loop;

step 2, the first signal is converted, demodulated, closed-loop controlled and modulated to generate a driving control signal which is input into a driving electrode so as to excite the harmonic oscillator to vibrate in a driving direction at a constant amplitude;

the second signal is divided into two paths, one path generates a control signal after orthogonal demodulation and processing and inputs the control signal into an orthogonal error trimming electrode to inhibit an orthogonal error signal; the other path generates an angular velocity detection signal, namely a gyro output signal, after being demodulated and processed by a force balance loop, and the gyro output signal and a correction demodulation signal are superposed to obtain a feedback force signal with disturbance;

step 3, respectively carrying out signal demodulation and amplitude extraction operation on the signal demodulated by the quadrature error suppression loop and the signal demodulated by the force balance loop; calculating the amplitude to obtain a scale compensation signal; and superposing the angular velocity detection signal and the correction demodulation signal, and then carrying out amplitude calculation on the angular velocity detection signal and the scale compensation signal, inputting the obtained signal into a detection electrode, and controlling the amplitude of the disturbance feedback force signal by the scale compensation signal so as to realize automatic compensation of the scale factor of the gyroscope.

2. A resonant gyro closed-loop control method according to claim 1, characterized in that the step 3 comprises the steps of:

step 31, demodulating the processed second signal by a quadrature demodulator to generate a quadrature input signal, and demodulating the processed second signal by an in-phase demodulator to generate an in-phase input signal;

step 32, simultaneously inputting an in-phase demodulation signal and an orthogonal demodulation signal, and respectively demodulating the orthogonal input signal and the in-phase demodulation signal to generate four amplitude values;

step 33, performing multiplication, filtering and multiplication operation on the four amplitudes respectively, and summing the four amplitudes to obtain a final amplitude;

step 34, performing PID control operation on the amplitude by taking a preset value as a target to obtain a scale compensation signal and outputting the scale compensation signal;

and step 35, multiplying the superposed angular velocity detection signal and the corrected and demodulated signal with the scale factor compensation signal and inputting the multiplied angular velocity detection signal and the scale factor compensation signal into the detection electrode so as to realize automatic compensation of the scale factor of the gyroscope.

3. A resonant gyro closed-loop control method as claimed in claim 2, wherein the step 32 comprises the steps of:

step 321, performing in-phase same-frequency demodulation on the orthogonal input signal by the in-phase demodulation signal to generate a first amplitude;

322, the in-phase demodulation signal performs in-phase same-frequency demodulation on the in-phase input signal to generate a second amplitude;

step 323, the orthogonal demodulation signal performs 90-degree phase difference co-frequency demodulation on the orthogonal input signal to generate a third amplitude;

in step 324, the quadrature demodulation signal performs a 90-degree phase difference co-frequency demodulation on the in-phase input signal to generate a fourth amplitude.

4. A resonant gyro closed-loop control method according to claim 3, characterized in that the step 33 comprises the steps of:

step 331, sequentially performing first multiplication, filtering and second multiplication on the first amplitude to obtain a fifth amplitude;

step 332, sequentially performing primary multiplication, filtering and secondary multiplication on the second amplitude to obtain a sixth amplitude;

step 333, sequentially performing primary multiplication, filtering and secondary multiplication on the third amplitude to obtain a seventh amplitude;

step 334, sequentially performing primary multiplication, filtering and secondary multiplication on the fourth amplitude to obtain an eighth amplitude;

and step 335, adding the fifth amplitude, the sixth amplitude, the seventh amplitude and the eighth amplitude to obtain a final amplitude for extraction.

5. A resonant gyro closed-loop control method according to claim 4, characterized in that the step 35 comprises the steps of:

step 351, inputting a modulation excitation signal with the same frequency as the in-phase demodulation signal and the orthogonal demodulation signal, and superposing the modulation excitation signal with the same frequency as the in-phase demodulation signal and the orthogonal demodulation signal with the angular velocity detection signal to obtain a feedback force signal with disturbance;

step 352, multiplying the disturbed feedback force signal by the scale factor compensation signal;

and step 353, inputting the calculated signal to the detection electrode after detection modulation and conversion.

6. A resonant gyro closed-loop control system, comprising:

the driving loop is used for converting and demodulating, controlling and modulating the input first signal in a closed loop mode under a driving mode, and finally generating a driving control signal to be input into the driving electrode so as to excite the harmonic oscillator to vibrate in a constant amplitude mode in the driving direction; the first signal is used for representing the vibration displacement of the gyroscope driving direction;

the detection loop is used for detecting the axial angular velocity input by the gyroscope; the method comprises the following steps:

the orthogonal error suppression loop is used for demodulating and processing the input second signal to generate an orthogonal control signal and inputting the orthogonal control signal into the orthogonal error trimming electrode under the detection mode so as to suppress the orthogonal error signal;

a force balance loop, which is used for demodulating and processing an input second signal to generate a detection signal of the angular velocity in the detection mode, wherein the signal can generate an electrostatic force after being input into the detection electrode, and the electrostatic force is used for offsetting the Coriolis force generated by the input angular velocity, so that the harmonic oscillator maintains a static balance state in the detection direction; the second signal is used for representing the vibration displacement of the gyroscope in the detection direction;

the scale compensation loop is used for respectively carrying out signal demodulation and amplitude calculation on the signal demodulated by the quadrature error suppression loop and the signal demodulated by the force balance loop; carrying out PID control operation with the amplitude value as a target to obtain a scale compensation signal;

and the force balance loop is also used for carrying out amplitude operation on the superposed angular velocity detection signal and the corrected and demodulated signal and the scale compensation signal and inputting the superposed angular velocity detection signal and the corrected and demodulated signal into the detection electrode so as to realize automatic compensation of the scale factor of the gyroscope.

7. A resonant gyro closed loop control system in accordance with claim 6 wherein the force balance loop includes an in-phase demodulator; the quadrature error suppression loop comprises a quadrature demodulator;

a scale compensation loop comprising:

a signal generating source for generating a corrective demodulation signal having a frequency greater than the bandwidth of the quadrature error rejection loop and force balance loop input signals;

the signal demodulation and amplitude extraction module is used for respectively carrying out signal demodulation and amplitude calculation on the input signal demodulated by the quadrature error suppression loop and the input signal demodulated by the force balance loop;

and the scale compensation loop controller is used for carrying out PID control operation on the amplitude to obtain a scale compensation signal and outputting the scale compensation signal.

8. A resonant gyro closed-loop control system in accordance with claim 7, wherein the signal generating source is adapted to generate in-phase demodulation signal, quadrature demodulation signal and correction modulation signal of the same frequency;

the signal demodulation and amplitude extraction module comprises:

four amplitude operation units connected in parallel; each path of amplitude operation unit comprises a first-stage multiplier, a filter and a second-stage multiplier which are sequentially connected in series; the first amplitude value generated by carrying out in-phase and co-frequency demodulation on the in-phase demodulation signal and the orthogonal input signal, the second amplitude value generated by carrying out in-phase and co-frequency demodulation on the in-phase demodulation signal and the orthogonal input signal, the third amplitude value generated by carrying out orthogonal and co-frequency demodulation on the orthogonal input signal and the fourth amplitude value generated by carrying out orthogonal and co-frequency demodulation on the in-phase input signal and the orthogonal demodulation signal are sequentially operated to generate a fifth amplitude value, a sixth amplitude value, a seventh amplitude value and an eighth amplitude value;

and the adder is used for adding the generated fifth amplitude, sixth amplitude, seventh amplitude and eighth amplitude to obtain a final amplitude for extraction.

9. A resonant gyroscope closed-loop control system as claimed in any one of claims 6 to 8 wherein the force balance loop further comprises a detection C-V converter, a detection A-D converter, an in-phase demodulator, a force feedback PID controller, a detection modulator and a detection D-A converter connected in series in sequence;

the quadrature error suppression loop comprises a detection C-V converter, a detection A-D converter, a quadrature demodulator, a quadrature suppression PID controller and a quadrature trimming voltage module which are sequentially connected in series;

the driving loop comprises a driving C-V converter, a driving A-D converter, a driving controller, a driving modulator and a driving D-A converter which are sequentially connected in series; the driving controller is formed by connecting a driving phase controller and a driving amplitude controller in parallel.

Technical Field

The invention relates to the technical field of resonant gyroscopes, in particular to a Micro-Electro-Mechanical System (MEMS) resonant gyroscope closed-loop control method and System.

Background

The gyroscope is a sensor for measuring the rotation motion of a carrier relative to an inertial space, is a core device in the fields of aerospace, satellite navigation, ocean-going diving, attitude measurement and the like, and has very important application value in high-end industrial equipment and accurate percussion weapons such as aerospace, intelligent robots, guided munitions and the like. The traditional gyroscopes comprise a mechanical rotor gyroscope, an electrostatic gyroscope, a hemispherical resonator gyroscope, a laser gyroscope, a fiber optic gyroscope and the like, which have generally higher precision, but have the disadvantages of large volume, high power consumption, high price and the like, and are increasingly difficult to adapt to the requirements of small volume and low power consumption in the information age. The MEMS gyroscope based on the MEMS technology has the characteristics of small volume, low power consumption, long service life, batch production, low price and the like, and has inherent advantages in the application of large-batch and small-volume industrial and weaponry. However, compared with the traditional gyroscope, the precision of the current MEMS gyroscope is not high enough, and the application is mainly limited to the low-end fields of smart phones, micro unmanned planes, automobile stability control systems and the like. The MEMS gyroscope with high performance, small volume, low power consumption and low cost is urgently needed in emerging fields of satellite navigation, anti-interference and anti-cheating, indoor navigation, microminiature underwater unmanned platforms, individual soldier positioning, underground orientation while drilling systems and the like.

The scaling factor refers to the ratio between the gyro output data and the input angular velocity, i.e., the magnitude of the gyro output value corresponding to the unit angular velocity input. For the resonant micro-mechanical gyroscope, no matter in an open-loop control mode or a force balance closed-loop control mode, the change of external environment factors (especially temperature) can generate serious influence on the size of the scale factor, so that the stability and repeatability of the scale factor are poor. For a high-precision navigation system, the instability of the scale factor can cause a great accumulated error, and the exertion of the gyro precision level is limited. The traditional scale factor control method is mainly a fitting compensation method based on test data of scale factors and system parameters changing along with the environment, a large amount of early data tests are needed to determine a fitting compensation function, and meanwhile, the gyroscope is required to keep good stability so as to ensure the overall compensation precision. Such a method is not only time and labor consuming, but also difficult to adapt to a spinning top whose state may change. Therefore, the closed-loop method for researching the scale factor of the gyroscope has important significance and value for improving the stability of the scale factor.

Disclosure of Invention

The invention provides a closed-loop control method and system for a resonant gyroscope and the gyroscope, which are used for overcoming the defects that the prior art is poor in adaptability due to high requirement on the stability of the gyroscope, time and labor are consumed due to the fact that a large amount of early-stage data is needed, and the like.

In order to achieve the above object, the present invention provides a closed-loop control method for a resonant gyroscope, comprising the following steps:

step 1, collecting a first signal representing the vibration displacement of a gyroscope in a driving direction and inputting the first signal into a driving loop in a driving mode; in the detection mode, acquiring a second signal representing the vibration displacement of the gyroscope in the detection direction and inputting the second signal into a detection loop;

step 2, the first signal is converted, demodulated, closed-loop controlled and modulated to generate a driving control signal which is input into a driving electrode so as to excite the harmonic oscillator to vibrate in a driving direction at a constant amplitude;

the second signal is divided into two paths, one path generates a control signal after orthogonal demodulation and processing and inputs the control signal into an orthogonal error trimming electrode to inhibit an orthogonal error signal; the other path generates an angular velocity detection signal, namely a gyro output signal, after being demodulated and processed by a force balance loop, and the gyro output signal and a correction demodulation signal are superposed to obtain a feedback force signal with disturbance;

step 3, respectively carrying out signal demodulation and amplitude extraction operation on the signal demodulated by the quadrature error suppression loop and the signal demodulated by the force balance loop; calculating the amplitude to obtain a scale compensation signal; and superposing the angular velocity detection signal and the correction demodulation signal, and then carrying out amplitude calculation on the angular velocity detection signal and the scale compensation signal, inputting the obtained signal into a detection electrode, and controlling the amplitude of the disturbance feedback force signal by the scale compensation signal so as to realize automatic compensation of the scale factor of the gyroscope.

In order to achieve the above object, the present invention further provides a resonant gyroscope closed-loop control system, including:

the driving loop is used for converting and demodulating, controlling and modulating the input first signal in a closed loop mode under a driving mode, and finally generating a driving control signal to be input into the driving electrode so as to excite the harmonic oscillator to vibrate in a constant amplitude mode in the driving direction; the first signal is used for representing the vibration displacement of the gyroscope driving direction;

the detection loop is used for detecting the axial angular velocity input by the gyroscope; the method comprises the following steps:

the orthogonal error suppression loop is used for demodulating and processing the input second signal to generate an orthogonal control signal and inputting the orthogonal control signal into the orthogonal error trimming electrode under the detection mode so as to suppress the orthogonal error signal;

a force balance loop, which is used for demodulating and processing an input second signal to generate a detection signal of the angular velocity in the detection mode, wherein the signal can generate an electrostatic force after being input into the detection electrode, and the electrostatic force is used for offsetting the Coriolis force generated by the input angular velocity, so that the harmonic oscillator maintains a static balance state in the detection direction; the second signal is used for representing the vibration displacement of the gyroscope in the detection direction;

the scale compensation loop is used for respectively carrying out signal demodulation and amplitude calculation on the signal demodulated by the quadrature error suppression loop and the signal demodulated by the force balance loop; carrying out PID control operation with the amplitude value as a target to obtain a scale compensation signal;

and the force balance loop is also used for carrying out amplitude operation on the superposed angular velocity detection signal and the corrected and demodulated signal and the scale compensation signal and inputting the superposed angular velocity detection signal and the corrected and demodulated signal into the detection electrode so as to realize automatic compensation of the scale factor of the gyroscope.

The closed-loop control method and the system of the resonant gyroscope provided by the invention adjust the output of the gyroscope through the scale compensation loop on the basis of the closed-loop control of the quadrature error suppression loop and the detection of the force balance loop, thereby realizing the control of the scale factor, compensating the variable quantity of the scale factor along with the environment, and ensuring the stability of the scale factor while realizing the detection of the gyro low-noise angular velocity.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.

FIG. 1a is a schematic diagram of a first mode, i.e., a driving mode, in a degenerate mode of a resonant micro-electromechanical gyroscope;

FIG. 1b is a schematic diagram of a second mode, i.e., a detection mode, in the degenerate mode of the resonant micro-electromechanical gyroscope;

fig. 2 is a flow chart of measuring angular velocity in a force balance mode in the resonant gyroscope closed-loop control method according to an embodiment of the present invention;

fig. 3 is a flowchart illustrating a scale factor compensation loop in the resonant gyroscope closed-loop control method according to an embodiment of the present invention;

fig. 4 is a schematic block diagram of a resonant gyro closed-loop control system according to a second embodiment of the present invention;

FIG. 5 is a block diagram showing a detailed structure of a scale compensation loop (scale factor control loop);

FIG. 6 is a simulation result of a drive loop;

FIG. 7 is a simulation result of a quadrature error suppression loop;

FIG. 8 is a simulation result of a force balancing loop;

fig. 9 is a graph of the gyro steady state output at different angular velocities.

The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It should be noted that all directional indicators (such as up, down, left, right, front, and back) in the embodiments of the present invention are only used to explain the relative position relationship between the components, the motion situation, and the like in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.

In addition, the descriptions related to "first", "second", etc. in the present invention are only for descriptive purposes and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "connected," "secured," and the like are to be construed broadly, and for example, "secured" may be a fixed connection, a removable connection, or an integral part; the connection can be mechanical connection, electrical connection, physical connection or wireless communication connection; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

In addition, the technical solutions in the embodiments of the present invention may be combined with each other, but it must be based on the realization of those skilled in the art, and when the technical solutions are contradictory or cannot be realized, such a combination of technical solutions should not be considered to exist, and is not within the protection scope of the present invention.