阅读说明：本技术 陀螺仪 (Gyroscope ) 是由 占瞻 马昭 谭秋喻 洪燕 李杨 黎家健 张睿 于 2020-04-30 设计创作，主要内容包括：一种陀螺仪,其特征在于,所述陀螺仪包括锚点、以所述锚点为轴心且经第一连接部固定于所述锚点周向的环状结构及与所述环状结构间隔设置的驱动电极,所述环状结构包括多个形成有第一角部的第一环状结构及多个呈圆环形的第二环状结构,所述第一环状结构与所述第二环状结构同轴设置,所述第一环状结构与所述第二环状结构间隔设置于所述锚点外周且所述第一环状结构与所述第二环状结构经第二连接部相连接,所述第一环状结构的外轮廓为正8N角星。使得本发明的陀螺仪拥有两个振型相同的振动模态,通过将所述第一环状结构的外轮廓限定为正8N角星,使得本发明的陀螺仪同时具备高频率、高品质因数、驱动/检测模态频率相差较小的优点。(The utility model provides a gyroscope, its characterized in that, the gyroscope includes the anchor point, uses the anchor point is fixed in as the axle center and through first connecting portion anchor point circumference's annular structure and with the drive electrode that the annular structure interval set up, the annular structure includes a plurality of first annular structures that are formed with first bight and a plurality of annular second annular structures that are, first annular structure with the coaxial setting of second annular structure, first annular structure with the annular structure interval of second set up in the anchor point periphery just first annular structure with the annular structure of second is connected through the second connecting portion, the outline of first annular structure is positive 8N angle star. The gyroscope provided by the invention has two vibration modes with the same vibration mode, and the outer contour of the first annular structure is defined as a positive 8N star, so that the gyroscope provided by the invention has the advantages of high frequency, high quality factor and small difference of drive/detection mode frequency.)

1. The gyroscope is characterized by comprising an anchor point, an annular structure and a driving electrode, wherein the annular structure takes the anchor point as an axis and is fixed in the circumferential direction of the anchor point through a first connecting part, the driving electrode is arranged at an interval with the annular structure, the annular structure comprises a plurality of first annular structures and a plurality of second annular structures, first corners are formed on the first annular structures, the second annular structures are annular, the first annular structures and the second annular structures are coaxially arranged, the first annular structures and the second annular structures are arranged on the periphery of the anchor point at intervals, the first annular structures and the second annular structures are connected through a second connecting part, the outline of the first annular structures is a positive 8N star, N is an integer, and N is not less than 1.

2. The gyroscope of claim 1, wherein: the first annular structure is fixedly connected with the anchor point through the first connecting part.

3. The gyroscope of claim 1, wherein: the second annular structure is fixedly connected with the anchor point through the first connecting part.

4. The gyroscope of claim 1, wherein: the first annular structures are arranged at intervals, and the adjacent first annular structures are connected through a third connecting part.

5. The gyroscope of claim 1, wherein: and the second annular structures are arranged at intervals and adjacent to each other and are connected through a fourth connecting part.

6. The gyroscope of claim 1, wherein: the driving electrode comprises a first electrode arranged on the periphery of the first annular structure or a second electrode arranged on the periphery of the second annular structure.

7. The gyroscope of claim 1, wherein: the driving electrode comprises a first electrode arranged on the periphery of the first annular structure and a second electrode arranged corresponding to the first electrode and positioned on the periphery of the second annular structure.

8. The gyroscope of claim 7, wherein: the first electrode is arranged between the first annular structure and the second annular structure, and the second electrode is arranged at one end, far away from the anchor point, of the annular structure.

9. The gyroscope of claim 1, wherein: the anchor point is a star-shaped structure with a plurality of symmetrically arranged second corners.

10. The gyroscope of claim 1, wherein: the anchor point, the first annular structure, the second annular structure, the first connecting part and the second connecting part are integrally formed by etching of semiconductor materials.

[ technical field ] A method for producing a semiconductor device

The invention relates to a gyroscope, in particular to an MEMS gyroscope.

[ background of the invention ]

With the development of electronic technology, gyroscopes are commonly used in various portable electronic devices, such as mobile phones and IPADs, to detect the rotation angular velocity of a physical quantity during deflection and tilt, so as to implement 3D motion, which is popular among consumers. The MEMS gyroscope is a miniature angular velocity sensor manufactured by applying micromachining technology and microelectronic process. MEMS circular gyroscopes and MEMS star gyroscopes are typical representatives of vibrating MEMS gyroscopes. The MEMS circular gyroscope has high natural frequency and strong anti-vibration capability, but has low quality factor and large drive/detection mode frequency difference, while the MEMS star gyroscope has high quality factor and small drive/detection mode frequency difference, but has low natural frequency and poor anti-vibration capability compared with circular nesting. Therefore, it is necessary to provide a gyroscope that achieves high frequency, high quality factor, and small difference in drive/detection modal frequencies.

[ summary of the invention ]

The invention aims to provide a gyroscope which realizes high frequency, high quality factor and small difference of driving/detecting modal frequency.

The technical scheme of the invention is as follows: a gyroscope comprises an anchor point, an annular structure and a driving electrode, wherein the annular structure takes the anchor point as an axis and is fixed in the circumferential direction of the anchor point through a first connecting portion, the driving electrode is arranged at an interval with the annular structure, the annular structure comprises a plurality of first annular structures and a plurality of second annular structures, first corners are formed on the first annular structures, the second annular structures are annular, the first annular structures and the second annular structures are coaxially arranged, the first annular structures and the second annular structures are arranged on the periphery of the anchor point at intervals, the first annular structures and the second annular structures are connected through a second connecting portion, the outline of the first annular structures is a positive 8N star, N is an integer, and N is more than or equal to 1. The first annular structure is fixedly connected with the anchor point through the first connecting part.

More preferably, the second annular structure is fixedly connected with the anchor point through the first connecting part.

Preferably, the plurality of first annular structures are arranged at intervals, and the adjacent first annular structures are connected through a third connecting part.

Preferably, the second annular structures are arranged at intervals, and adjacent second annular structures are connected through a fourth connecting portion.

Preferably, the driving electrode includes one of a first electrode disposed at an outer periphery of the first annular structure or a second electrode disposed at an outer periphery of the second annular structure.

Preferably, the driving electrode includes a first electrode disposed at an outer periphery of the first annular structure and a second electrode disposed at an outer periphery of the second annular structure, wherein the first electrode corresponds to the second electrode.

Preferably, the first electrode is disposed between the first annular structure and the second annular structure, and the second electrode is disposed at an end of the annular structure away from the anchor point.

More preferably, the anchor point is a star-shaped structure having a plurality of symmetrically disposed second corners.

Preferably, the anchor point, the first annular structure, the second annular structure, the first connection portion and the second connection portion are integrally formed by etching semiconductor materials.

The invention has the beneficial effects that: the gyroscope has two vibration modes with the same vibration mode by arranging the first annular structure with the first corner part easy to deform and the second annular structure with high symmetry and annular shape on the periphery of the anchor point, wherein the first mode is a driving mode along 0/90 degrees; the second mode is a detection mode along 45 degrees/135 degrees, and the outer contour of the first annular structure is defined as a positive 8N star, so that the gyroscope provided by the invention has the advantages of high frequency, high quality factor and small frequency difference of the driving/detection modes.

[ description of the drawings ]

FIG. 1 is a schematic perspective view of a gyroscope according to the present invention;

FIG. 2 is an exploded view of a gyroscope according to the present invention;

FIG. 3 is a plan view of a gyroscope structure of the present invention;

FIG. 4 is a plan view of a gyroscope ring structure of the present invention;

FIG. 5 is a plan view of a first ring structure of the present invention;

FIG. 6 is a plan view of a second ring structure of the present invention;

FIG. 7 is a schematic diagram of a gyroscope drive mode of the present invention;

FIG. 8 is a schematic diagram of the gyroscope detection mode of the present invention;

FIG. 9 is a schematic diagram of a MEMS star gyroscope with 10 first ring structures;

FIG. 10 is a schematic diagram of a MEMS ring gyroscope with 10 second ring structures;

FIG. 11 is a graph of a thermo-elastic quality factor QTED comparison between a gyroscope of the present invention and the gyroscopes of FIGS. 9 and 10;

FIG. 12 is a comparison of the frequency difference between the gyroscope of the present invention and the gyroscopes of FIGS. 9 and 10;

fig. 13 is a graph of modal frequency comparison between the gyroscope of the present invention and the gyroscopes of fig. 9 and 10.

[ detailed description ] embodiments

The invention is further described with reference to the following figures and embodiments.

Referring to fig. 1 to 4, a gyroscope 100 of the present invention includes an anchor point 10, a ring structure 20, and a driving electrode 30.

The anchor 10 may be formed by photo-etching a semiconductor material, in this embodiment, the anchor 10 and the ring structure 20 are integrally formed by etching a semiconductor material, the anchor 10 is a star-shaped structure having a plurality of symmetrically disposed second corners 11, in this embodiment, the number of the second corners 11 is 8, the tips of the second corners 11 are respectively provided with a first connection portion 41, the first connection portion 41 is connected with the ring structure 20, and the first connection portion 41 is integrally formed with the anchor 10 and the ring structure 20.

Referring to fig. 1 to 4, in the present embodiment, the ring structure 20 is fixed to the periphery of the anchor point 10 by taking the center of the anchor point 10 as an axis, the ring structure 20 is fixed to the anchor point 10 through a first connection portion 41, the ring structure 20 includes a first ring structure 21 and a second ring structure 22, the first ring structure 21 and the second ring structure 22 are disposed at the periphery of the anchor point at intervals, and the first ring structure 21 and the second ring structure 22 are connected through a second connection portion 42. In this embodiment, each of the first annular structures 21 is disposed at an interval, and the adjacent first annular structures 21 are connected via a third connecting portion 43; the second annular structures 22 are disposed at intervals, and adjacent second annular structures 22 are connected via a fourth connection portion 43. In this embodiment, the anchor point 10, the first annular structure 21, the second annular structure 22, the first connection portion 41, the second connection portion 42, and the third connection portion 43 are integrally formed by etching a semiconductor material.

Specifically, referring to fig. 5, the number of the first annular structures 21 is plural, and the first annular structures 21 include at least one pair of first corner portions 211 that are symmetrical about the anchor point 10.

Preferably, the outer contour of the first annular structure is a positive 8N star, wherein N is an integer and is greater than or equal to 1, and when the outer contour is a positive 8N star, N is an integer and is greater than or equal to 1, the first annular structure has the characteristic of easy deformation and also has good symmetry. In this embodiment, the number of the first annular structures 21 is 6, the 6 first annular structures 21 are sequentially connected from inside to outside, two adjacent first annular structures 21 are connected through a plurality of third connection portions 43, each first annular structure 21 is correspondingly provided with 16 first corner portions 211 with the same shape and size, and the 16 first corner portions 211 form central symmetry with respect to the center of the anchor point 10.

Referring to fig. 6, the second annular structure 22 is a circular ring, and in this embodiment, the second annular structure 22 is a circular ring structure coaxial with the first annular structure 21. The number of the second annular structures 22 is plural, in this embodiment, the number of the second annular structures 22 is 4, 4 the second annular structures 22 are sequentially connected from inside to outside, and two adjacent second annular structures 22 are connected via a plurality of the fourth connecting portions 44.

Preferably, the first connection portion 41 is connected to the loop structure 20, the relative positions of the first loop structure 21 and the second loop structure 22 with respect to the anchor point 10 are not limited, either, the first loop structure 21 is fixedly connected to the anchor point 10 through the first connection portion 41, the second loop structure 21 is fixed to the end of the first loop structure 21 away from the anchor point 10 through the second connection portion 42, the first connection portion 41 further enables the anchor point 10 to be connected to the whole loop structure 20, that is, the first loop structure 21 closest to the anchor point 10 is connected to the anchor point 10 through the first connection portion 41, and the second loop structure 22 closest to the anchor point 10 is connected to the first loop structure 21 farthest from the anchor point 10 through the second connection portion 42; the second annular structure 22 may be fixedly connected to the anchor point 10 through the first connection portion 41, the first annular structure 21 is fixed to an end of the second annular structure 42 away from the anchor point 10 through the second connection portion 42, the first connection portion 41 further enables the anchor point 10 to be connected to the entire annular structure 20, that is, the second annular structure 22 closest to the anchor point 10 is connected to the anchor point 10 through the first connection portion 41, and the first annular structure 21 closest to the anchor point 10 is connected to the second annular structure 22 farthest from the anchor point 10 through the second connection portion 42. In this embodiment, the first loop structure 21 closest to the anchor point 10 and the anchor point 10 are connected by a first connection portion 41, 6 sequentially adjacent first loop structures 21 are connected by a third connection portion 43, the second loop structure 22 closest to the anchor point 10 and the first loop structure 21 farthest from the anchor point 10 are connected by a second connection portion 42, and 4 sequentially adjacent second loop structures 22 are connected by a fourth connection portion 44.

In this embodiment, the number of the first annular structures 21 is 6, and the number of the second annular structures 22 is 4, and in other embodiments, the specific numbers of the first annular structures 21 and the second annular structures 22 are not limited.

Specifically, referring to fig. 7 and 8, the driving electrodes 30 are spaced from the ring structure 20, the number of the driving electrodes 30 is several, and the driving electrodes 30 are spaced from the ring structure 20 to form a capacitor, and the capacitor generates an external driving force required to force the gyroscope 100 to vibrate.

More preferably, the driving electrode 30 includes the first electrode 31 or/and the second electrode 32, and it may be that the driving electrode 30 includes only the first electrode 31 disposed on the outer periphery of the first annular structure 21; the driving electrode 30 may only include the second electrode 32 disposed on the outer periphery of the second ring structure 22; the driving electrode 30 may include a first electrode 31 disposed on the outer periphery of the first annular structure 21 and a second electrode 32 disposed on the outer periphery of the second annular structure 22, and in this embodiment, the driving electrode 30 includes a first electrode 31 disposed on the outer periphery of the first annular structure 21 and a second electrode 32 disposed on the outer periphery of the second annular structure 22, and the first electrode 31 and the second electrode 32 are disposed correspondingly.

Specifically, the first electrode 31 is disposed between the first annular structure 21 and the second annular structure 22, the second electrode 32 is disposed at an end of the annular structure 20 away from the anchor point 10, the first electrode 31 and the second electrode 32 are disposed opposite to each other, a capacitor is formed between the first electrode 31 and the first annular structure 21 and the second annular structure 22, a capacitor is formed between the second electrode 32 and the second annular structure 22, the capacitor generates an external driving force required for forcing the gyroscope to drive the modal vibration mode, and the gyroscope 100 of the present invention is driven to drive the modal vibration mode by the external driving force. At this time, referring to fig. 7, when the gyroscope 100 is subjected to an external angular velocity, the angular velocity will generate a resultant coriolis force in the 45 °/135 ° direction according to the coriolis principle, and the resultant coriolis force will force the gyroscope 100 to generate a vibration for detecting the mode shape. Finally, referring to fig. 8, by detecting the vibration displacement of the gyroscope 100 in the 45 °/135 ° direction, the magnitude of the angular velocity can be obtained, and then the vibration displacement of the gyroscope 100 in the 45 °/135 ° direction can be detected to match the driving mode and the frequency between the two modes, thereby suppressing the quadrature error of the gyroscope 100.

Referring to fig. 4, 9 and 10, a star-circle hybrid gyroscope 100 of the present embodiment in which a ring structure 20 is formed by 6 first ring structures 21 and 4 second ring structures 22 is illustrated by a controlled variable method; a star nested gyroscope in which 10 first ring structures 21a constitute a ring structure 20 a; and a circular nested gyroscope with 10 second ring structures 22b forming a ring structure 20b, and counting thermal elastic quality factors QTED, frequency difference and modal frequency of the three under the condition of only changing the thickness of the nested structure of the three. Referring to fig. 11 to 13, it can be known that the star-circle hybrid nested gyroscope of the present invention inherits the advantages of the star-shaped nested gyroscope and the circular nested gyroscope, and has relatively balanced performance in three aspects of the thermo-elastic quality factor QTED, the frequency difference, and the modal frequency.

Therefore, the gyroscope has two vibration modes with the same vibration mode through arranging the first annular structure with the first corner part which is easy to deform and the second annular structure which is highly symmetrical and is annular at the periphery of the anchor point, wherein the first mode is a driving mode along the angle of 0 degree/90 degrees; the second mode is a detection mode along 45 degrees/135 degrees, and the outer contour of the first annular structure is defined as a positive 8N star, so that the gyroscope provided by the invention has the advantages of high frequency, high quality factor and small frequency difference of the driving/detection modes.

While the foregoing is directed to embodiments of the present invention, it will be understood by those skilled in the art that various changes may be made without departing from the spirit and scope of the invention.