阅读说明：本技术 一种基于声波谐振原理的磁场探测器 (Magnetic field detector based on acoustic wave resonance principle ) 是由 不公告发明人 于 2020-06-02 设计创作，主要内容包括：本发明提供了一种基于声波谐振原理的磁场探测器,压电材料部水平地置于第一电极和第二电极之间,压电材料部中设置感应材料。在待测磁场作用下,感应材料改变力学特性,从而改变压电材料部的共振频率,通过探测该共振频率实现磁场探测。因为压电材料部中的声波的谐振频率对材料的强度或抗弯强度非常敏感,所以本发明具有磁场探测灵敏度高的优点,在磁场探测领域具有良好的应用前景。(The invention provides a magnetic field detector based on the acoustic wave resonance principle. Under the action of a magnetic field to be detected, the induction material changes the mechanical property, so that the resonance frequency of the piezoelectric material part is changed, and the magnetic field detection is realized by detecting the resonance frequency. Because the resonance frequency of the sound wave in the piezoelectric material part is very sensitive to the strength or the bending strength of the material, the invention has the advantage of high magnetic field detection sensitivity and has good application prospect in the field of magnetic field detection.)

1. A magnetic field sensor based on the principle of acoustic resonance, comprising: the sensor comprises a first electrode, a second electrode, a piezoelectric material part, a filling part and an induction material, wherein the piezoelectric material part is horizontally arranged between the first electrode and the second electrode, the filling part is arranged in the piezoelectric material part, and the induction material is arranged in the filling part; when the piezoelectric material part is applied, a radio frequency signal is applied between the first electrode and the second electrode, the mechanical property of the induction material is changed by a magnetic field to be detected, so that the resonance frequency of the piezoelectric material part is changed, and magnetic field detection is realized by detecting the resonance frequency.

2. A magnetic field sensor based on the acoustic resonance principle as claimed in claim 1, characterized in that: the filling part is a gap vertical to the surface of the piezoelectric material part.

3. A magnetic field sensor based on the acoustic resonance principle as claimed in claim 1, characterized in that: the interface between the first electrode and the piezoelectric material portion is an inclined plane, and the interface between the second electrode and the piezoelectric material portion is an inclined plane.

4. A magnetic field sensor based on the acoustic resonance principle according to claim 3, wherein: the filling part is wedge-shaped.

5. A magnetic field sensor based on the acoustic resonance principle according to claim 4, wherein: the filling portion does not penetrate the piezoelectric material portion.

6. A magnetic field sensor based on the acoustic resonance principle according to any one of claims 1 to 5, wherein: the piezoelectric material portion is made of lithium tantalate, lithium niobate or quartz.

7. A magnetic field sensor based on the acoustic resonance principle according to claim 6, wherein: the sensing material is a magnetically hardened material.

8. A magnetic field sensor based on the acoustic resonance principle as claimed in claim 7, characterized in that: the magneto-hardening material is polyurethane resin doped with iron particles.

9. A magnetic field sensor based on the acoustic resonance principle according to claim 8, wherein: the iron particles have a size of 1-5 microns.

Technical Field

The invention relates to the field of magnetic field detection, in particular to a magnetic field detector based on the acoustic wave resonance principle.

Background

The magnetic field detector is widely applied to the fields of industry, medical treatment and health or daily life, such as aerospace, electric power systems, automobile industry, vital sign extraction and the like. In recent years, with the development of micro-electromechanical system technology, new sensors based on micro-electromechanical systems are emerging. The magnetic field detector based on the micro electro mechanical system has the advantages of high sensitivity, flexible design, easy integration and the like. The key of the current magnetic field detection is to explore a magnetic field detector based on a novel sensitive substance or a novel principle and realize the magnetic field detection with higher sensitivity and reduce the device preparation difficulty.

Disclosure of Invention

In order to solve the above problems, the present invention provides a magnetic field detector based on the acoustic wave resonance principle, the magnetic field detector comprising a first electrode, a second electrode, a piezoelectric material portion, a filling portion, and an inductive material, the piezoelectric material portion being horizontally disposed between the first electrode and the second electrode, the piezoelectric material portion being provided with the filling portion, the inductive material being disposed in the filling portion; when the piezoelectric material part is applied, a radio frequency signal is applied between the first electrode and the second electrode, the mechanical property of the induction material is changed by the magnetic field to be detected, so that the resonance frequency of the piezoelectric material part is changed, and the magnetic field detection is realized by detecting the resonance frequency.

Further, the filling part is a slit perpendicular to the surface of the piezoelectric material part.

Furthermore, the interface between the first electrode and the piezoelectric material portion is an inclined plane, and the interface between the second electrode and the piezoelectric material portion is an inclined plane.

Further, the filling part is wedge-shaped.

Further, the filling portion does not penetrate the piezoelectric material portion.

Further, the material of the piezoelectric material portion is lithium tantalate, lithium niobate, or quartz.

Still further, the inductive material is a magnetically stiffened material.

Further, the magneto-hardening material is a urethane resin doped with iron particles.

Further, the iron particles have a size of 1 micron to 5 microns.

The invention has the beneficial effects that: the invention provides a magnetic field detector based on the acoustic wave resonance principle. Under the action of a magnetic field to be detected, the induction material changes the mechanical property, so that the resonance frequency of the piezoelectric material part is changed, and the magnetic field detection is realized by detecting the resonance frequency. Because the sound wave resonant frequency in the piezoelectric material part is very sensitive to the strength or the bending strength of the material, the invention has the advantage of high magnetic field detection sensitivity and has good application prospect in the field of magnetic field detection.

The present invention will be described in further detail below with reference to the accompanying drawings.

Drawings

Fig. 1 is a schematic diagram of a magnetic field probe based on the principle of acoustic resonance.

Fig. 2 is a schematic diagram of yet another magnetic field detector based on the acoustic wave resonance principle.

In the figure: 1. a first electrode; 2. a second electrode; 3. a piezoelectric material portion; 4. a filling section; 5. a sensing material.

Detailed Description

To further explain the technical means and effects of the present invention adopted to achieve the intended purpose, the following detailed description of the embodiments, structural features and effects of the present invention will be made with reference to the accompanying drawings and examples.