阅读说明：本技术 一种具有摩擦层双面微结构的摩擦纳米发电机及其制备方法 (Friction nano generator with friction layer double-sided microstructure and preparation method thereof ) 是由 苗倩倩 顾豪杰 张楠 卢柯宇 张健 周晓峰 于 2020-03-23 设计创作，主要内容包括：本发明公开了一种具有摩擦层双面微结构的摩擦纳米发电机及制备方法,其特点是该摩擦纳米发电机的第一摩擦层或第二摩擦层表面具有微结构,第一电极层与第一摩擦层或第二电极层与第二摩擦层界面具有微结构；所述第一摩擦层与第二摩擦层面对面设置,在外力的作用下,其互相摩擦使第一电极层与第二电极层之间产生电能；所述摩擦纳米发电机的制备包括：电极、摩擦层及其贴合界面上刻蚀微结构。本发明与现有技术相比摩擦层表面以及电极层与摩擦层界面具有微结构,在外加机械力作用下,可以产生较高且较为稳定的电信号输出,制备工艺简单且可重复,尺寸可调控,设备要求和制作成本低。(The invention discloses a friction nano generator with a friction layer double-sided microstructure and a preparation method, and is characterized in that the surface of a first friction layer or a second friction layer of the friction nano generator is provided with a microstructure, and the interface of the first electrode layer and the first friction layer or the interface of the second electrode layer and the second friction layer is provided with a microstructure; the first friction layer and the second friction layer are arranged in a face-to-face mode and rub with each other under the action of external force, and electric energy is generated between the first electrode layer and the second electrode layer; the preparation of the friction nano generator comprises the following steps: and etching microstructures on the electrode, the friction layer and the joint interface of the electrode and the friction layer. Compared with the prior art, the friction layer surface and the interface of the electrode layer and the friction layer are provided with the microstructures, so that higher and more stable electric signal output can be generated under the action of external mechanical force, the preparation process is simple and repeatable, the size can be regulated and controlled, and the equipment requirement and the manufacturing cost are low.)

1. A friction nano generator with a friction layer double-sided microstructure comprises a first generating component consisting of a first electrode layer and a first friction layer, and a second generating component consisting of a second electrode layer and a second friction layer, and is characterized in that the upper surface and the lower surface of the second friction layer of the second generating component are provided with microstructures, and the microstructure is arranged on the joint interface of the second electrode layer and the second friction layer; the upper surface and the lower surface of the first friction layer of the first power generation component are provided with microstructures, and the interface where the first electrode layer is attached to the first friction layer is provided with microstructures; the first power generation component is either only a first electrode layer and doubles as a friction layer; the first friction layer of the first power generation component and the second friction layer of the second power generation component can be divided into a vertical contact-separation mode, a horizontal sliding mode, a single electrode mode or an independent layer mode friction nano-generator according to the contact arrangement of the two friction layers.

2. The triboelectric nanogenerator having a double-sided microstructure with friction layers as claimed in claim 1, wherein the triboelectric nanogenerator is in a vertical contact-separation mode, wherein the first friction layer of the first power generation component and the second friction layer of the second power generation component are arranged in vertical and face-to-face contact, and when a periodic vertical external force acts on the friction surfaces, the first friction layer and the second friction layer are periodically contacted and separated, so that an alternating current signal is generated between the first electrode layer and the second electrode layer.

3. The triboelectric nanogenerator comprising a double-sided microstructure with friction layers as claimed in claim 1, wherein the triboelectric nanogenerator comprises a first friction layer of a first power generation component and a second friction layer of a second power generation component, which are disposed in face-to-face contact, and when a periodic horizontal external force is applied to the friction surfaces, the first friction layer and the second friction layer slide relatively to each other to generate triboelectric charges, such that an ac signal is generated between the first electrode layer and the second electrode layer.

4. The triboelectric nanogenerator having a double-sided microstructure of friction layers as claimed in claim 1, wherein the single-electrode mode triboelectric nanogenerator has a first power generation component consisting of only a first friction layer, the first friction layer of the first power generation component is disposed in vertical and face-to-face contact with a second friction layer of a second power generation component, and the second electrode layer is grounded via an external load, and the first friction layer and the second friction layer are periodically brought into and out of contact with each other as a periodic vertical external force applied to the friction layers, and electrons flow between the ground and the second electrode layer via the external load, thereby generating an alternating current signal.

5. The triboelectric nanogenerator having a double-sided microstructure of a friction layer as claimed in claim 1, wherein the triboelectric nanogenerator has a single layer mode, the first power generation means is composed of only two first electrode layers, the second power generation means is disposed above the first power generation means, and the second friction layer is disposed in face-to-face contact with the two first electrode layers, respectively, as a periodic horizontal external force applied to the friction surface, so that an ac signal is generated between the left and right first electrode layers.

6. The friction nano generator with the friction layer double-sided microstructure as claimed in claim 1, wherein the microstructure is a rough structure prepared by a chemical etching process and having a thickness of 1-200 microns, 1 nm-1 micron or a combination of the two.

7. The preparation method of the friction nano-generator with the friction layer double-sided microstructure as claimed in claim 1, wherein the specific preparation of the friction nano-generator comprises the following steps:

step 1: preparation of the electrodes

Cutting a metal film of aluminum, copper, silver or iron with the thickness of 100-1000 um into a first electrode layer of a first power generation component according to design requirements, and polishing the first electrode layer to prepare a second electrode layer of a second power generation component;

step 2: microstructure preparation on electrodes

Chemically etching a microstructure of 1-200 microns, 1 nanometer-1 micron or a composite of the two on the upper surface of the second electrode layer, ultrasonically cleaning the second electrode layer for 1-2 min by using deionized water after etching, and drying the second electrode layer by using nitrogen to prepare an electrode layer with a microstructure on the surface;

and step 3: preparation of the protective layer

At room temperature, placing the electrode layer with the microstructure on the surface prepared in the step 2 on a prepolymer mixed by a high molecular polymer and a curing agent, and then curing in an oven at the temperature of 60-80 ℃ for 1-1.5 h to obtain an electrode protection layer;

and 4, step 4: setting of friction layer

Spin-coating a prepolymer mixed by a high-molecular polymer and a curing agent on the upper surface of the electrode layer with the microstructure on the surface in the step 3 to obtain a friction layer;

and 5: pre-curing of friction layer

Vacuumizing the friction layer prepared in the step 4 for 20-30 min, and treating the friction layer in an oven at the temperature of 60-80 ℃ for 20-25 min to obtain a pre-cured high polymer coating;

step 6: preparation of the Friction layer

Attaching the microstructure of the other electrode layer prepared in the step 2 to the pre-cured friction layer prepared in the step 5, pressing a weight with the mass of 1.5-2 KG, and curing the weight in an oven at the temperature of 60-80 ℃ for 1-1.5 h to obtain a cured friction layer;

and 7: microstructure preparation on a tribological layer

Etching the other electrode layer in the step 6 by adopting chemical corrosion until the electrode is completely corroded, then ultrasonically cleaning the electrode layer for 1-2 min by using deionized water, and drying the electrode layer by using nitrogen to prepare a friction layer with a microstructure on the surface;

and 8: preparation of the second Power Generation component

Peeling the electrode protection layer in the step 7 from the electrode layer with the microstructure on the surface to prepare a second power generation component or a first power generation component with the microstructure on the attaching interface, wherein the electrode layer with the microstructure on the surface is a second or first electrode layer, and the friction layer with the microstructure on the surface is a second or first friction layer;

and step 9: preparation of the first Power Generation component

Attaching a first friction layer on the first electrode layer to form a first power generation component;

step 10: preparation of friction nano-generator

And leading the first electrode layer in the first power generation component and the second electrode layer in the second power generation component by using a lead and a conductive adhesive tape to prepare the friction nano-generator with a double-layer structure.

8. The method for preparing the friction nano-generator with the friction layer double-sided microstructure according to claim 7, wherein the chemical etching is performed by using hydrochloric acid, sulfuric acid, nitric acid, ferric chloride, potassium ferricyanide or oxalic acid solution.

9. The method for preparing a triboelectric nanogenerator having a double-sided microstructure of a friction layer according to claim 7, wherein the high molecular polymer is a polydimethylsiloxane, polymethyl methacrylate, polyvinyl acetate, polyacrylamide or polyvinylidene fluoride curable polymer.

10. The method for preparing a friction nanogenerator having a double-sided microstructure of a friction layer as claimed in claim 7, wherein the first friction layer and the second friction layer are made of a metal material such as gold, silver, copper or iron, or a polyimide, polyvinyl chloride, polydimethylsiloxane or polytetrafluoroethylene polymer material, which generates a triboelectric effect, and the first friction layer and the second friction layer are made of different materials to ensure that the friction layers have different electron gaining and losing capacities.

Technical Field

The invention relates to the technical field of friction nano power generation, in particular to a friction nano generator with a friction layer double-sided microstructure and a preparation method thereof.

Background

At present, most of electronic equipment is powered by batteries, and along with the development of the internet of things technology, the electronic equipment is gradually becoming miniaturized, multifunctional and mobile. There are many difficulties in using batteries, such as environmental pollution and difficulty in recycling. Therefore, there is an urgent need to find a suitable energy source for electronic equipment, and energy collection from renewable natural environment is an effective method for alleviating energy crisis. A triboelectric nanogenerator (TENG) is an energy device that can convert mechanical energy, including but not limited to wind energy, human motion energy, ocean energy, and mechanical energy triggering/vibration, etc., into electrical energy. The basic working mechanism of the device is the coupling effect of frictional electrification and electrostatic induction, and the device has the advantages of high energy efficiency under low frequency, small volume, low cost, multiple working modes, multiple material choices, wide application fields and the like, and can be applied to driving wearable electronic equipment.

Disclosure of Invention

The invention aims to design a friction nano generator with a friction layer double-sided microstructure and a preparation method thereof aiming at the defects of the prior art, the friction nano generator adopts an electrode layer and friction layer interface and a friction layer or an electrode layer with microstructures, thereby greatly improving the charge density and transfer efficiency of the friction nano generator, remarkably increasing the output electric energy, having simple and repeatable preparation process, adjustable size and low equipment requirement and preparation cost, generating higher and more stable electric signal output under the action of external mechanical force, better driving a tiny electronic device to work, and having good application prospect in the field of microelectronics.

The purpose of the invention is realized as follows: a friction nano generator with a friction layer double-sided microstructure comprises a first power generation component and a second power generation component, wherein the first power generation component is composed of a first electrode layer and a first friction layer, the second power generation component is composed of a second electrode layer and a second friction layer, the friction nano generator is characterized in that the upper surface and the lower surface of the second friction layer of the second power generation component are provided with microstructures, and the microstructures are arranged on the joint interface of the second electrode layer and the second friction layer; the upper surface and the lower surface of the first friction layer of the first power generation component are provided with microstructures, and the interface where the first electrode layer is attached to the first friction layer is provided with microstructures; the first power generation component or the first electrode layer only doubles as an electrode layer and a friction layer; the first friction layer of the first power generation component and the second friction layer of the second power generation component can be divided into a vertical contact-separation mode, a horizontal sliding mode, a single electrode mode or an independent layer mode friction nano-generator according to the contact arrangement of the two friction layers.

The friction nano generator with the vertical contact-separation mode is characterized in that a first friction layer of a first power generation component and a second friction layer of a second power generation component are arranged in vertical and face-to-face contact, and when a periodic vertical external force acts on the friction surfaces, the first friction layer and the second friction layer are in periodic contact and separation, so that an alternating current signal is generated between a first electrode layer and a second electrode layer.

The first friction layer of the first power generation component and the second friction layer of the second power generation component are arranged in face-to-face contact, and when a periodic horizontal external force acts on the friction surfaces, the first friction layer and the second friction layer slide relatively to generate friction charges, so that an alternating current signal is generated between the first electrode layer and the second electrode layer.

The single-electrode-mode friction nano-generator is characterized in that a first generating component only consists of a first friction layer, the first friction layer of the first generating component and a second friction layer of a second generating component are arranged in vertical and face-to-face contact, the second electrode layer is grounded through an external load, the first friction layer and the second friction layer are in periodic contact and separation when a periodic vertical external force acts on the friction surfaces, electrons flow between the ground and the second electrode layer through the external load, and therefore an alternating current signal is generated.

According to the friction nano generator in the independent layer mode, the first power generation component is only composed of two first electrode layers, the second power generation component is arranged above the first power generation component, and the second friction layer is in face-to-face contact with the two first electrode layers respectively and serves as a periodic horizontal external force acting on the friction surface, so that an alternating current signal is generated between the left first electrode layer and the right first electrode layer.

The microstructure is a rough structure which is prepared by a chemical etching process and has a thickness of 1-200 micrometers, 1 nanometer-1 micrometer or a composite structure of the two.

A preparation method of a friction nano generator with a friction layer double-sided microstructure is characterized in that the specific preparation of the friction nano generator comprises the following steps:

step 1: preparation of the electrodes

And cutting the metal film of aluminum, copper, silver or iron with the thickness of 100-1000 um into a first electrode layer according to the design requirement, and polishing the first electrode layer to prepare a second electrode layer of the second power generation component.

Step 2: microstructure preparation on electrodes

And chemically etching the upper surface of the second electrode layer by using a microstructure of 1-200 micrometers, 1 nanometer-1 micrometer or a composite of the two, ultrasonically cleaning the etched second electrode layer for 1-2 min by using deionized water, and drying the cleaned second electrode layer by using nitrogen to obtain the electrode layer with the microstructure on the surface.

And step 3: preparation of the protective layer

And (3) at room temperature, placing the electrode layer with the microstructure on the surface prepared in the step (2), placing the lower surface of the electrode layer on a prepolymer mixed by a high molecular polymer and a curing agent, and curing in an oven at the temperature of 60-80 ℃ for 1-1.5 h to obtain the electrode protection layer.

And 4, step 4: setting of friction layer

And (3) spin-coating a prepolymer mixed by a high-molecular polymer and a curing agent on the upper surface of the electrode layer with the microstructure on the surface in the step (3), wherein the obtained coating is a friction layer.

And 5: pre-curing of friction layer

And (4) vacuumizing the friction layer prepared in the step (4) for 20-30 min, and treating the friction layer in an oven at the temperature of 60-80 ℃ for 20-25 min to obtain the pre-cured high polymer coating.

Step 6: preparation of the Friction layer

And (3) attaching the microstructure of the other electrode layer prepared in the step (2) to the pre-cured friction layer prepared in the step (5), pressing a weight with the mass of 1.5-2 KG, and curing the material in an oven at the temperature of 60-80 ℃ for 1-1.5 h to obtain the cured friction layer.

And 7: microstructure preparation on a tribological layer

And (3) etching the other electrode layer in the step (6) by adopting chemical corrosion until the electrode is completely corroded, ultrasonically cleaning the electrode layer for 1-2 min by using deionized water, and drying the electrode layer by using nitrogen to prepare the friction layer with the surface having the microstructure.

And 8: preparation of the second Power Generation component

And (3) peeling the electrode protection layer in the step (7) from the electrode layer with the microstructure on the surface to prepare a second power generation component or a first power generation component with the microstructure on the attaching interface, wherein the electrode layer with the microstructure on the surface is a second or first electrode layer, and the friction layer with the microstructure on the surface is a second or first friction layer.

And step 9: preparation of the first Power Generation component

A first friction layer is attached to the first electrode layer to form a first power generation component.

Step 10: preparation of friction nano-generator

And leading the first electrode layer in the first power generation component and the second electrode layer in the second power generation component by using a lead and a conductive adhesive tape to prepare the friction nano-generator with a double-layer structure.

The chemical etching adopts hydrochloric acid, sulfuric acid, nitric acid, ferric chloride, potassium ferricyanide or oxalic acid solution.

The high molecular polymer is polydimethylsiloxane, polymethyl methacrylate, polyvinyl acetate, polyacrylamide or polyvinylidene fluoride curable polymer material.

The first friction layer and the second friction layer are made of gold, silver, copper and iron metal materials capable of generating a triboelectric effect, or polyimide, polyvinyl chloride, polydimethylsiloxane, polytetrafluoroethylene high polymer materials, wood, silk or paper, but the first friction layer and the second friction layer are made of different materials so as to ensure that the friction layers have different electron gaining and losing capacities.

Compared with the prior art, the invention has higher charge density and transfer efficiency, hundreds of times of increase of output electric energy, simple and repeatable preparation process, adjustable size, low equipment requirement and preparation cost, can generate higher and more stable electric signal output under the action of external mechanical force, can better drive a tiny electronic device to work, and has good application prospect in the field of microelectronics.

Drawings

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic view of the working mode of the present invention;

FIG. 3 is a schematic diagram of the operation of the present invention;

FIG. 4 is a flow chart of the preparation of the present invention;

FIG. 5 is a schematic structural view of embodiment 1;

FIG. 6 is a graph showing the test results of example 1;

FIG. 7 is a schematic structural view of example 2;

FIG. 8 is a graph showing the test results of example 2.

Detailed Description

Referring to fig. 1 to 2, the present invention includes a first power generation component I composed of a first electrode layer 11 and a first friction layer 16, and a second power generation component II composed of a second electrode layer 13 and a second friction layer 14, wherein a microstructure 15 is disposed on an interface where the second electrode layer 13 and the second friction layer 14 are attached; the surface of the second friction layer 14 is provided with a microstructure 15; the interface between the first electrode layer 11 and the first friction layer 16 is provided with a microstructure 15; the surface of the first friction layer 16 is provided with a microstructure 15; the first friction layer 16 of the first power generation component I and the second friction layer 14 of the second power generation component II can be combined into a friction nano-generator in a separation mode, a horizontal sliding mode, a single electrode mode or an independent layer mode; the first friction layer 16 and the second friction layer 14 are arranged in a face-to-face mode, and during mutual friction, an electric signal is generated between the first electrode layer 11 and the second electrode layer 13; the first friction layer 16 and the second friction layer 14 are disposed to face each other, and during mutual friction, an electric signal is generated between the first electrode layer 11 and the second electrode layer 13.

Referring to fig. 1a, the surface of the second friction layer 14 has microstructures 15, and the interface between the second electrode layer 13 and the second friction layer 14 has microstructures 15.

Referring to fig. 1b, in the first power generation component I, the surface of the first friction layer 16 has microstructures 15, the interface between the first electrode layer 11 and the first friction layer 16 has microstructures 15, in the second power generation component II, the surface of the second friction layer 14 has microstructures 15, and the interface between the second electrode layer 13 and the second friction layer 14 has microstructures 15.

The first friction layer 16 of the first power generation component I and the second friction layer 14 of the second power generation component II can be combined into a vertical contact-separation mode, a horizontal sliding mode, a single electrode mode or an independent layer mode friction nano-generator, which specifically works as follows:

(I) vertical contact-separation mode

Referring to fig. 2a, the vertical contact-separation mode triboelectric nanogenerator with a double-sided microstructure of a friction layer is shown, wherein the surface of the second friction layer 14 has a microstructure 15, and the interface between the second electrode layer 13 and the second friction layer 14 has a microstructure 15. The conductor material in the first power generation component I can simultaneously serve as the first electrode layer 11 and the first friction layer 16. The first friction layer 16 and the second friction layer 14 are vertically arranged in a face-to-face manner, and the first friction layer 16 and the second friction layer 14 can be periodically contacted and separated to generate a potential difference by applying periodic mechanical force. Driven by the potential difference, electrons flow through the external load R to cancel out the potential difference of the triboelectric charges, thereby generating an alternating current signal between the first electrode layer 11 and the second electrode layer 13.

(II) horizontal sliding mode

Referring to fig. 2b, the friction nanogenerator is a horizontal sliding mode friction nanogenerator with a double-sided microstructure of a friction layer, wherein the surface of the second friction layer 14 has a microstructure 15, and the interface between the second electrode layer 14 and the second friction layer 13 has a microstructure 15. The conductor material in the first power generation component I can simultaneously serve as the first electrode layer 11 and the first friction layer 16. The first friction layer 16 and the second friction layer 14 are arranged in a face-to-face manner, and under the driving of an external force parallel to the horizontal direction of the friction film, the first friction layer 16 and the second friction layer 14 slide relatively, and friction charges are generated due to the electrification of sliding friction. The periodic variation of the contact area between the two friction surfaces causes a lateral separation of the charge centres, thus generating a potential difference. Driven by the potential difference, electrons flow through the external load R to cancel out the potential difference of the triboelectric charges, thereby generating an alternating current signal between the first electrode layer 11 and the second electrode layer 13.

(III) Single electrode mode

Referring to fig. 2c, the friction nanogenerator is a single-electrode mode friction nanogenerator with a double-sided microstructure of a friction layer, wherein the surface of the second friction layer 14 has a microstructure 15, and the interface between the second electrode layer 13 and the second friction layer 14 has a microstructure 15. The first power generating component I in this operating mode is only the first friction layer 16 (i.e. without the first electrode layer 11). The first friction layer 16 and the second friction layer 14 are vertically disposed to face each other, and the second power generation layer 13 in the second power generation portion II is grounded through the external load R. When an external force is applied to the generator to bring the two friction layers into contact with each other, the two friction layers will be charged oppositely, and when the two friction layers are separated after the external force is released, electrons will flow from the second electrode layer 13 to ground through the external load R to charge the second electrode layer 13 positively to balance the charge on the surface of the second friction layer 14. When the second friction layer 14 and the second electrode layer 13 are charge-balanced, electrons do not flow. When an external force acts on the generator again, the charge balance is broken, and electrons flow from the ground to the second electrode layer 13 through the external load R, thereby generating an alternating current signal.

(IV) independent layer mode

Referring to fig. 2d, the triboelectric nanogenerator is a free-standing layer mode triboelectric nanogenerator having a double-sided microstructure of a friction layer, wherein the surface of the second friction layer 14 has a microstructure 15, and the interface between the second electrode layer 13 and the second friction layer 14 has a microstructure 15. The first power generation means I in this mode of operation are only two first electrode layers 11 (i.e. without the first friction layer 16). The second power generation component II is arranged above the first power generation component I, the second friction layer 14 and the first electrode layer 11 are arranged in a vertical face-to-face mode, and under the driving of an external force parallel to the horizontal direction of the friction film, the second friction layer 14 and the first electrode layer 11 slide relatively to generate friction charges. When the second friction layer 14 is fully coincident with the left electrode of the first electrode layer 11, the positive charges in all the loops are attracted to the upper surface of the left electrode, and when the second friction layer 14 slides to the right, the positive charges in the loops will flow from the left electrode to the right electrode of the first electrode layer 11 through the load R. When the second friction layer 14 is fully coincident with the right electrode of the first electrode layer 11, all positive charges will flow into the right electrode. When the second friction layer 14 is moved to the left electrode again, the positive charges of the right electrode flow into the left electrode, thereby generating an alternating current signal between the left and right electrodes of the first electrode layer 11.

The operation of the vertical contact-separation mode friction nano-invention machine is further explained in detail as follows:

referring to fig. 3a, since the first friction layer 16 and the second friction layer 14 are made of different materials and have different electron gaining and losing abilities, the first friction layer 16 is more electron gaining than the second friction layer 14. When an external force is applied to the generator, the two friction layers contact each other, and electrons flow from the second friction layer 14 to the first friction layer 16, so that the first friction layer 16 is negatively charged, the second friction layer 14 is positively charged, the charges are the same, and since no charges are generated on the surfaces of the first electrode layer 11 and the second electrode layer 13, no electric potential is generated between the two electrode layers.

Referring to fig. 3 b, when the external force is released, the first friction layer 16 and the second friction layer 14 tend to return to their original positions due to the elasticity of the friction material itself, and during the separation process, the surface of the first electrode layer 11 and the surface of the second electrode layer 13 respectively have positive charges and negative charges due to electrostatic induction, so that a potential difference is formed between the two electrodes, electrons are driven to flow from the first electrode layer 11 to the second electrode layer 13, and a positive transient current is generated.

Referring to fig. 3c, when the first power generation element I and the second power generation element II are completely separated, the charge accumulation reaches an equilibrium state, and no current flows between the two electrode layers.

Referring to fig. 3 d, when the external force is applied again, the first electrode layer 11 has a higher potential than the second electrode layer 13 due to the two power generating parts being close to each other, so that electrons flow from the second electrode layer 13 to the first electrode layer 11, thereby generating a reverse transient current. When first frictional layer 16 is in full contact with second frictional layer 14, all induced charges are neutralized, and no current flows between the two electrode layers (as shown in fig. 3 a).

Referring to fig. 4, the invention takes the example that the surface of the second friction layer has a microstructure, and the interface between the second electrode layer and the second friction layer has a microstructure, and further details the preparation method of the invention, which includes the following specific steps:

s1, cutting the metal film of aluminum, copper, silver or iron with the thickness of 100-1000 um into an electrode 11 (or an electrode of the first electrode layer) according to the design requirement, and polishing the electrode to obtain a polished electrode 12.

S2, adopting a chemical corrosion etching process for the polished electrode 12 obtained in the step S1; and ultrasonically cleaning the obtained electrode for 1-2 min by using deionized water, and drying by using nitrogen to obtain the electrode 13 (namely a second electrode layer) with the surface provided with the microstructure 15.

S3, mixing a high molecular polymer and a curing agent at room temperature, placing the electrode 13 with the microstructure 15 on the surface obtained in the step S2 on the surface of a prepolymer mixed by the high molecular polymer and the curing agent, and placing the electrode into an oven at the temperature of 60-80 ℃ for 1-1.5 h for complete curing treatment, wherein the high molecular polymer coating below the electrode 13 with the microstructure 15 on the surface is a protective electrode layer 14-1, and the protective layer can protect the electrode from being etched in the subsequent chemical etching process.

S4, spin-coating the prepolymer mixed by the high molecular polymer prepolymer and the curing agent on the surface of the electrode 13 with the microstructure 15, which is obtained in the step S3.

S5, carrying out vacuum pumping treatment for 20-30 min on the surface of the electrode 13 with the microstructure 15 on the surface obtained in the step S4, so that no air bubbles exist in the coating, and then putting the coating together into an oven at the temperature of 60-80 ℃ for 20-25 min to carry out pre-curing treatment.

S6, covering the electrode 13 with the microstructure 15 on the surface obtained in the S2 step on the high polymer coating after the pre-curing treatment obtained in the S5 step, pressing the electrode 13 with the microstructure 15 on the surface by using a weight with the mass of 1.5-2 KG, and then putting the electrode 13 with the microstructure 15 on the surface into an oven with the temperature of 60-80 ℃ for 1-1.5 h for complete curing treatment.

S7, chemically etching the electrode 13 covered on the completely cured high polymer coating and provided with the microstructure 15 on the surface until the electrode is completely etched away, then ultrasonically cleaning the electrode for 1-2 min by using deionized water, and drying the electrode by using nitrogen to obtain the high polymer coating with the microstructure 15 on the surface, namely the second friction layer 14.

S8, peeling off the solidified protective electrode layer 14-1 below the electrode 13 with the microstructure 15 on the surface to obtain the second power generation component II, wherein the second friction layer 14 has the microstructure 15 on the surface and the microstructure 15 is arranged at the interface of the second electrode layer 13 and the second friction layer 14.

S9, attaching another electrode 11 (i.e. a first electrode layer) to the first friction layer 16 to form a first power generation component I, where the first friction layer 16 is made of any material capable of generating triboelectric effect, such as: gold, silver, copper, iron metal materials, or polyimide, polyvinyl chloride, polydimethylsiloxane, polytetrafluoroethylene polymer materials, and wood, silk, and paper. However, the materials of the first friction layer 16 and the second friction layer 14 should be different to ensure that the friction layers have different electron-accepting abilities.

S10, conducting lead 17 on the first electrode layer 11 in the first power generation component I and the second electrode layer 13 in the second power generation component II by using conducting wires and conducting adhesive tapes, and manufacturing the friction nano-generator 18 with a double-layer structure.

The present invention is further illustrated by the following specific examples of two perpendicular contact-separation modes of two bilayer microstructures.