阅读说明：本技术 泵 (Pump and method of operating the same ) 是由 藤崎雅章 于 2018-12-03 设计创作，主要内容包括：本发明提供一种泵,该泵具备泵壳体、振动板、驱动体以及供电板(40),供电板(40)具有第一导电部(41)以及与第一导电部(41)电绝缘的第二导电部(42),驱动体具有第一面和第二面,第一导电部(41)包含第一外部端子部(411)、与驱动体的第二面电连接的第一连接端子部(412)、以及连结第一外部端子部和第一连接端子部(412)的第一连结部,第二导电部(42)包含：第二外部端子部(421)和与第二外部端子部(421)和驱动体的第一面电连接的第二连接端子部(422)。(The present invention provides a pump, the pump comprises a pump housing, a vibration plate, a power supply plate (40), the power supply plate (40) comprises a first conductive part (41) and a second conductive part (42) electrically insulated from the first conductive part (41), the power supply plate comprises a first surface and a second surface, the first conductive part (41) comprises a first external terminal part (411), a first connecting terminal part (412) electrically connected with the second surface of the power supply plate, and a first connecting part for connecting the first external terminal part and the first connecting terminal part (412), the second conductive part (42) comprises: a second external terminal portion (421), and a second connection terminal portion (422) electrically connected to the second external terminal portion (421) and the first surface of the driving body.)

1. A pump is provided with:

a pump housing having a pump chamber;

a diaphragm having a first main surface and disposed facing the pump chamber;

a driver provided on the first main surface and configured to vibrate the vibrating plate; and

a power supply plate having a first conductive portion provided with a part exposed from the pump housing and a second conductive portion electrically insulated from the first conductive portion,

the driving body includes: a first surface facing the first main surface, and a second surface located on the opposite side of the first main surface,

the first conductive part includes: a first external terminal portion located outside the pump housing, a first connection terminal portion electrically connected to the second surface of the drive body, and a first connection portion connecting the first external terminal portion and the first connection terminal portion,

the second conductive part includes: a second external terminal portion located outside the pump housing, and a second connection terminal portion electrically connected to the second external terminal portion and the first surface of the drive body.

2. The pump of claim 1,

the power supply plate includes a holding portion that integrally holds the first conductive portion and the second conductive portion.

3. The pump of claim 2,

the second conductive portion includes a second connecting portion for connecting the second external terminal portion and the second connection terminal portion,

the first coupling portion and the second coupling portion include portions arranged along an outer periphery of the holding portion.

4. The pump of claim 3,

in the first coupling portion and the second coupling portion, a portion arranged along an outer periphery of the holding portion has a protruding portion extending outward from the holding portion.

5. The pump according to claim 3 or 4,

the holding portion has an opening portion penetrating in a thickness direction to expose the driving body,

the first connection terminal portion has a bent portion extending from an inner peripheral surface of the holding portion defining the opening toward the opening.

6. The pump according to any one of claims 3 to 5,

the holding portion is formed of a cured resin member,

a through hole is formed in a portion of the first connecting portion and the second connecting portion which overlaps with the holding portion in a plan view,

the cured resin member covers the front and back surfaces of the portion overlapping the holding portion, and fills the through hole.

7. The pump of claim 1,

the second conductive portion has an exposed portion, and the second conductive portion is electrically connected by being in contact with the first main surface of the vibration plate.

8. The pump of claim 7,

the power supply plate includes a holding portion for integrally holding the first conductive portion and the second conductive portion,

the exposed portion is provided so as to be surrounded by the holding portion in a plan view.

9. The pump according to claim 7 or 8,

a plurality of the exposed portions are provided.

10. The pump according to any one of claims 1 to 9,

the first external terminal portion and the second external terminal portion are provided on the same plane.

11. The pump according to any one of claims 1 to 10,

the diaphragm is provided with a reinforcing plate disposed on the power supply plate on the side opposite to the side on which the diaphragm is located.

12. The pump of claim 1,

further comprises a reinforcing plate disposed on the power supply plate on the side opposite to the side on which the vibration plate is located,

the power supply plate includes a holding portion for integrally holding the first conductive portion and the second conductive portion,

the difference in linear expansion coefficient between the reinforcing plate and the holding portion is substantially equal to the linear expansion coefficient between the vibrating plate and the holding portion.

Technical Field

The present invention relates to a positive displacement pump using flexural vibration of a vibration plate, and more particularly to a piezoelectric pump using a piezoelectric element as a drive body for driving the vibration plate.

Background

Conventionally, a piezoelectric pump is known as one of positive displacement pumps. The piezoelectric pump is a pump in which at least a part of a pump chamber is defined by a diaphragm to which a piezoelectric element is attached, and the diaphragm is driven at a resonance frequency by applying an alternating voltage of a predetermined frequency to the piezoelectric element, whereby pressure fluctuation is generated in the pump chamber and fluid can be sucked and discharged.

As documents disclosing such a piezoelectric pump, for example, japanese patent laid-open No. 2013-147965 (patent document 1) and international publication No. 2016/175185 (patent document 2) are cited.

In the piezoelectric pump disclosed in patent document 1, a piezoelectric element configured by laminating a plurality of piezoelectric layers having a central portion that expands and contracts in response to voltage application, a peripheral portion that is located outside the central portion and expands and contracts in a phase opposite to that of the central portion in response to voltage application, and a non-driven outer peripheral portion that is located outside the peripheral portion is attached to a diaphragm.

In the piezoelectric pump disclosed in patent document 2, an opposing plate having a first external terminal portion, a vibrating plate to which a piezoelectric element is attached, an insulating plate arranged to surround the piezoelectric element, and a power supply plate having a connection terminal connected to a second external terminal portion and an upper surface of the piezoelectric element are laminated in this order from a lower side.

Patent document 1: japanese patent laid-open publication No. 2013-147965

Patent document 2: international publication No. 2016/175185

However, in patent document 1, it is necessary to connect a plurality of piezoelectric layers at desired positions by via holes or the like, and a plurality of piezoelectric layers must be stacked, which complicates the structure of the piezoelectric element.

In the piezoelectric pump disclosed in patent document 2, a power supply plate having a first external terminal portion is disposed on an upper side and a power supply plate having a second external terminal portion is disposed on a lower side with respect to a vibrating plate to which a piezoelectric element is attached. Since the piezoelectric element is driven by a current flowing in the thickness direction of the piezoelectric element, the structure is simplified.

However, since the first external terminal portions and the second external terminal portions have different height positions to a considerable extent, when the piezoelectric pump disclosed in patent document 2 is mounted on a circuit board or the like, the first external terminal portions and the second external terminal portions may be difficult to be connected to the terminal portions on the circuit board side. Since the first external terminal portions and the second external terminal portions have different heights, for example, when the terminal portions on the circuit board side and the first and second external terminal portions are connected by using wires, there is a concern that vibration may propagate to the wires during driving of the piezoelectric pump and cause abnormal noise.

Disclosure of Invention

The present invention has been made in view of the above-described problems, and an object of the present invention is to provide a pump that can be easily attached.

The pump according to the present invention includes: a pump housing having a pump chamber; a diaphragm having a first main surface and disposed facing the pump chamber; a driver provided on the first main surface and configured to vibrate the vibrating plate; and a power supply plate having a first conductive portion provided with a part exposed to the outside from the pump housing and a second conductive portion electrically insulated from the first conductive portion. The driving body includes: a first surface facing the first main surface, and a second surface located on the opposite side of the first main surface. The first conductive part includes: a first external terminal portion located outside the pump housing, a first connection terminal portion electrically connected to the second surface of the drive body, and a first connection portion connecting the first external terminal portion and the first connection terminal portion. The second conductive part includes: a second external terminal portion located outside the pump housing, and a second connection terminal portion electrically connected to the second external terminal portion and the first surface of the drive body.

In the pump according to the present invention, the power supply plate may include a holding portion that integrally holds the first conductive portion and the second conductive portion.

In the pump according to the present invention, the second conductive portion may include a second coupling portion that couples the second external terminal portion and the second connection terminal portion, and the first coupling portion and the second coupling portion may include portions arranged along an outer periphery of the holding portion.

In the pump according to the present invention, in the first coupling portion and the second coupling portion, a portion disposed along an outer periphery of the holding portion may have a protruding portion extending outward from the holding portion.

In the pump according to the present invention, it is preferable that the holding portion has an opening portion that penetrates in a thickness direction to expose the driving body. In this case, the connection terminal portion may have a bent portion extending from an inner peripheral surface of the holding portion defining the opening toward the opening.

In the pump according to the present invention, the holding portion may be formed of a cured resin member. In this case, it is preferable that a portion of the first coupling portion and the second coupling portion which overlaps with the holding portion in a plan view has a through hole, and the cured resin member covers a front surface and a rear surface of the portion which overlaps with the holding portion and is filled in the through hole.

In the pump according to the present invention, it is preferable that the second conductive portion has an exposed portion and is electrically connected by being in contact with the first main surface of the vibration plate.

In the pump according to the present invention, it is preferable that the power supply plate includes a holding portion that integrally holds the first conductive portion and the second conductive portion, and the exposed portion is provided so as to be surrounded by the holding portion in a plan view.

In the pump according to the present invention, a plurality of the exposed portions may be provided.

In the pump according to the present invention, it is preferable that the first external terminal portion and the second external terminal portion are provided on the same plane.

The diaphragm may further include a reinforcing plate disposed on the power supply plate on a side opposite to a side on which the diaphragm is located.

The pump according to the present invention may further include a reinforcing plate disposed on the power supply plate on a side opposite to a side on which the vibrating plate is located, and the power supply plate may include a holding portion that integrally holds the first conductive portion and the second conductive portion. In this case, the difference in linear expansion coefficient between the reinforcing plate and the holding portion is preferably substantially equal to the linear expansion coefficient between the diaphragm and the holding portion.

According to the present invention, a pump that can be easily mounted can be provided.

Drawings

Fig. 1 is a schematic cross-sectional view of a piezoelectric blower according to embodiment 1.

Fig. 2 is an exploded perspective view of the piezoelectric blower according to embodiment 1.

Fig. 3 is an exploded perspective view of the vibration unit and the flow passage forming section according to embodiment 1.

Fig. 4 is a perspective view of the power supply plate shown in fig. 2 as viewed from the side opposite to the vibrating plate side.

Fig. 5 is a perspective view of the power supply plate shown in fig. 2 as viewed from the vibrating plate side.

Fig. 6 is a plan view of the power supply plate according to embodiment 1 as viewed from the vibrating plate side.

Fig. 7 is a diagram showing electrical connection between the power supply plate and the vibration unit according to embodiment 1.

Fig. 8 is a plan view showing a state in which the piezoelectric blower according to embodiment 1 is mounted on a circuit board.

Fig. 9 is a cross-sectional view showing a state in which the piezoelectric blower according to embodiment 1 is mounted on a circuit board.

Fig. 10 is a plan view of a power supply plate provided in the piezoelectric blower according to embodiment 2, as viewed from the vibrating plate side.

Fig. 11 is a plan view of a power supply plate provided in the piezoelectric blower according to embodiment 3, as viewed from the vibrating plate side.

Fig. 12 is an exploded perspective view of a piezoelectric blower according to a modification.

Detailed Description

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The embodiment described below exemplifies a case where the present invention is applied to a piezoelectric blower as a pump for sucking and discharging gas. In the embodiments described below, the same or common portions are denoted by the same reference numerals in the drawings, and description thereof will not be repeated.

(embodiment mode 1)

(piezoelectric blower)

Fig. 1 is a schematic cross-sectional view of a piezoelectric blower according to embodiment 1. Fig. 2 is an exploded perspective view of the piezoelectric blower according to embodiment 1. A piezoelectric blower 100 according to embodiment 1 will be described with reference to fig. 1 and 2.

As shown in fig. 1, a piezoelectric blower 100 according to embodiment 1 includes a pump housing 1 and a vibration unit 30. The pump casing 1 includes a pump chamber 2 and a flow path portion 3 inside. The pump housing 1 is provided with an intake port 110 and an exhaust port 92. The intake holes 110 communicate with the flow path portion 3. The discharge hole 92 communicates with the pump chamber 2.

The vibration unit 30 includes a vibration plate 31 and a piezoelectric element 32 as a driving body. The vibration plate 31 is arranged to face the pump chamber 2. The piezoelectric element 32 is attached to the vibration plate 31. The piezoelectric element 32 vibrates the vibration plate 31.

The vibration plate 31 vibrates by applying a driving voltage to the piezoelectric element 32. As a result, the pressure of the pump chamber 2 fluctuates, and the gas sucked from the intake port 110 passes through the flow path portion 3 and the pump chamber 2 in this order and is discharged from the exhaust port 92.

(detailed construction of piezoelectric blower)

As shown in fig. 2, the piezoelectric blower 100 includes a cover plate 10, a flow path forming portion 20, a vibration unit 30, a power supply plate 40, a reinforcing plate 50, a second reinforcing plate 60, a joining member 70, a diaphragm 80, and a valve housing 90, which are laminated in this order. The pump casing 1 is configured by laminating the cover plate 10, the flow path forming portion 20, the vibration unit 30, the power supply plate 40, the reinforcing plate 50, and the outer wall portion of the valve housing 90.

In the following description, the direction from the cover plate 10 toward the valve housing 90 is referred to as an upward direction, and the direction from the valve housing 90 toward the cover plate 10 is referred to as a downward direction.

The cover plate 10 has a plate-like shape. The cover plate 10 is provided with 3 air intake holes 110. The 3 intake holes 110 are arranged at intervals in the circumferential direction. The 3 intake holes 110 are arranged at substantially equal intervals.

Fig. 3 is an exploded perspective view of the flow channel forming section and the vibration unit according to embodiment 1. The flow path forming unit 20 and the vibration unit 30 will be described with reference to fig. 2 and 3.

As shown in fig. 2 and 3, the flow passage forming portion 20 forms a flow passage portion 3 extending from the intake port 110 to the pump chamber 2. The flow channel forming section 20 includes a first flow channel forming member 21 and a second flow channel forming member 22.

The first channel forming member 21 is provided with channel holes 211, 3 channel holes 210, and 6 adhesive seal holes 213. The flow channel hole 211 has a circular shape and is provided in the center of the first flow channel forming member 21. The 3 flow path holes 210 are provided to extend radially from the flow path hole 211.

The 6 adhesive seal holes 213 are arranged at intervals in the circumferential direction. The 6 adhesive seal holes 213 extend in the circumferential direction so as to face the connection positions of the frame 312 and the connection portion 313 of the vibration plate 31, which will be described later. The lower end side of each adhesive seal hole 213 is covered with the cover plate 10, and the upper end side communicates with an adhesive seal hole 223 of a second flow path forming member 22 described later.

The second channel forming member 22 is provided with 1 channel hole 220 and 6 adhesive sealing holes 223. The flow channel hole 220 is formed in a circular shape at the center of the second flow channel forming member 22 with a smaller diameter than the flow channel hole 211 of the first flow channel forming member 21. The flow channel hole 220 is provided at a position vertically overlapping the flow channel hole 211 and communicates with the flow channel hole 211.

The 6 adhesive seal holes 223 are arranged at intervals in the circumferential direction. The 6 adhesive seal holes 223 extend in the circumferential direction so as to face the connection positions of the frame 312 and the connection portion 313 of the vibration plate 31. The lower end side of each adhesive seal hole 223 communicates with the adhesive seal hole 213 of the first flow path forming member 21, and the upper end side faces the adhesive layer (not shown).

The adhesive seal holes 213, 223 prevent the uncured adhesive layer from overflowing to the pump chamber 2 and adhering to the connection portion 313 of the vibration plate 31. This prevents the vibration of the connection portion 313, thereby preventing variations in characteristics for each product.

The front end of the flow passage hole 210 of the first flow passage forming member 21 communicates with the intake port 110. The flow passage hole 210 is covered with the cover plate 10 from the lower side and covered with the second flow passage forming member 22 from the upper side except for the portion communicating with the intake port 110. Thereby, the gas sucked from the gas inlet hole 110 passes through the flow passage hole 210 and is directed toward the flow passage hole 211.

The flow passage hole 211 communicates with the flow passage hole 220 of the second flow passage forming member 22. Thereby, the gas flowing to the flow path hole 211 is directed to the flow path hole 220.

Here, the second flow path forming member 22 is disposed at a distance in the vertical direction from a diaphragm 31 described later. Therefore, the flow passage hole 220 communicates with the pump chamber 2 through a gap between the diaphragm 31 and the second flow passage forming member 22 and a hole 315 of the diaphragm 31 described later. As a result, the gas flowing into the flow passage hole 220 flows into the pump chamber 2 through the slit and the hole 315. In this way, the first flow passage forming member 21 and the second flow passage forming member 22 form a flow passage from the intake port 110 to the pump chamber 2.

As described above, the vibration unit 30 includes the vibration plate 31 and the piezoelectric element 32. The vibrating plate 31 is made of a metal thin plate made of, for example, stainless steel. The outer shape of the vibration plate 31 has a substantially rectangular shape. The diaphragm 31 has a first main surface (upper surface) 31a and a second main surface (lower surface) 31b which are in a front-back relationship with each other.

The vibration plate 31 includes a circular plate portion 311, a frame portion 312, and 3 connection portions 313. In the vibrating plate 31, the plurality of holes 315 are provided so as to be surrounded by the disk portion 311, the frame portion 312, and the connecting portion 313. The frame 312 surrounds the periphery of the circular plate 311 in a state separated from the circular plate 311.

Each connecting portion 313 connects the circular plate portion 311 and the frame portion 312. Each of the connection portions 313 is substantially t-shaped and is arranged at intervals in the circumferential direction. Specifically, the central end of the diaphragm 31 of each connection portion 313 is connected to the disk portion 311, extends in the radial direction from the disk portion 311, and branches into two parts extending in the circumferential direction. The connection portion 313 is bent toward the frame 312 side at a portion extending in the circumferential direction, and is connected to the frame 312.

Since each connection portion 313 has the above-described shape, the edge of the circular plate portion 311 is supported by the frame portion 312 so as to be displaceable in the vertical direction (thickness direction) and substantially not displaceable in the planar direction.

The piezoelectric element 32 is made of a piezoelectric material such as lead zirconate titanate (PZT). The piezoelectric element 32 has a disk shape, and has a first surface 32b facing the first main surface 31a and a second surface 32a located on the opposite side of the first main surface 31a.

The piezoelectric element 32 is attached to the first main surface 31a of the vibration plate 31 by a wire-guide adhesive or the like. More specifically, the piezoelectric element 32 is attached to the first main surface 31a in the circular plate portion 311.

The piezoelectric element 32 performs bending vibration by being applied with an ac voltage, and the bending vibration generated in the piezoelectric element 32 is transmitted to the diaphragm 31, whereby the diaphragm 31 also performs bending vibration. This causes pressure fluctuation in the pump chamber 32.

Again, as shown in fig. 2, the power supply plate 40 is provided so as to surround the piezoelectric element 32 on the first main surface 31a side of the diaphragm 31. The power supply plate 40 includes a first external terminal portion 411 and a second external terminal portion 421 which are located outside the pump housing 1 as described later.

As will be described later, the first external terminal portion 411 is electrically connected to the second surface 32a of the piezoelectric element 32, and the second external terminal portion 421 is electrically connected to the first surface 32b of the piezoelectric element 32. Therefore, a voltage is applied between the first external terminal portion 411 and the second external terminal portion 421, whereby a voltage is applied to the piezoelectric element 32. The detailed configuration of the power supply plate 40 will be described later with reference to fig. 4 to 6.

The reinforcing plate 50 has a frame shape having a circular hole 51 in a plan view. The reinforcing plate 50 is disposed on the power supply plate 40 on the side opposite to the side on which the diaphragm 31 is located. Reinforcing plate 50 is disposed on power supply plate 40 so as to surround inner frame portion 432 (see fig. 4) of power supply plate 40 described later. The reinforcing plate 50 is made of, for example, a metal material. By providing the reinforcing plate 50, the rigidity of the pump casing can be ensured.

The reinforcing plate 50 is preferably made of substantially the same material as the vibration plate 31. Specifically, the difference in the linear expansion coefficient between the reinforcing plate 50 and the holding portion 43 of the power supply plate 40 described later is preferably substantially equal to the difference in the linear expansion coefficient between the vibration plate 31 and the holding portion 43. By having such a relationship, it is possible to suppress the power supply plate 40 from warping due to the temperature difference.

The second reinforcing plate 60 covers the hole portion 51 of the reinforcing plate 50. The second reinforcing plate 60 is provided with a first hole 61 and a second hole 62 communicating with the hole 51. The engaging member 70 engages the second reinforcing plate 60 and the diaphragm 80. The joint member 70 has a hole 71 communicating with the first hole 61 and the second hole 62.

The diaphragm 80 has a hole portion 81 communicating with the hole portion 71. The hole 81 communicates with an exhaust hole 92 provided in the nozzle portion 91 of the valve housing 90.

As described above, the opening 434 (see fig. 4) of the power supply plate 40, which will be described later, communicates with the hole 51, the first hole 61, the second hole 62, the hole 71, the hole 81, and the exhaust hole 92 to form the pump chamber 2, and the gas from the opening 434 passes through these holes and is discharged from the exhaust hole 92.

(detailed construction of Power supply Board)

Fig. 4 is a perspective view of the power supply plate shown in fig. 2 as viewed from the side opposite to the vibrating plate side. Fig. 5 is a perspective view of the power supply plate shown in fig. 2 as viewed from the vibrating plate side. Fig. 6 is a plan view of the power supply plate according to embodiment 1 as viewed from the vibrating plate side. The detailed structure of the power supply plate 40 will be described with reference to fig. 4 to 6.

As shown in fig. 4 to 6, the power supply plate 40 includes a first conductive member 41 as a first conductive portion, a second conductive member 42 as a second conductive portion, and a holding portion 43.

First conductive member 41 and second conductive member 42 are provided with a portion protruding outward from the pump housing. That is, first conductive member 41 and second conductive member 42 are provided so that a part thereof is exposed to the outside from the pump housing. The first conductive member 41 and the second conductive member 42 are disposed apart from each other. The first conductive member 41 and the second conductive member 42 are electrically insulated. First conductive member 41 and second conductive member 42 are formed of, for example, a metal sheet containing copper. Further, although the first conductive member 41 and the second conductive member 42 are described as being formed of separate members, the present invention is not limited thereto, and the first conductive member 41 and the second conductive member 42 may be integrated as long as they are electrically insulated.

The first conductive member 41 includes a first external terminal portion 411, a first connection terminal portion 412, and a first connection portion 413. The first external terminal portion 411 is located outside the pump housing 1. The first external terminal portion 411 is provided on the front end side of the portion of the first conductive member 41 that protrudes outward from the pump housing 1.

It is preferable that the first external terminal portion 411 is subjected to surface treatment. For example, the first external terminal portion 411 is preferably coated with Sn plating. This makes it possible to improve the adhesion of solder when the first external terminal section 411 is solder-mounted, as will be described later. Further, it is preferable that the plating layer as the surface-treated portion is not in contact with the holding portion 43. This can prevent the solder from contacting the holding portion 43 during solder mounting.

The first connection terminal portion 412 is electrically connected to the second surface 32a of the piezoelectric element 32. Specifically, the front end of the first connection terminal portion 412 is soldered to the second surface 32a of the piezoelectric element 32. The first connecting terminal portion 412 is preferably surface-treated. For example, the first connection terminal portion 412 is coated with Sn plating. This can improve the adhesion of the solder.

The first connection terminal portion 412 extends from an inner peripheral surface of the holding portion 43 defining an opening 434 of the holding portion 43 to be described later toward the opening 434. The first connection terminal portion 412 is provided to have a meandering portion extending toward the opening portion 434. This makes it possible to increase the length of the first connection terminal portion 412 as compared with the case where the connection terminal portion is formed linearly.

As the first connection terminal portion 412 is lengthened, vibration applied to the distal end portion of the first connection terminal portion 412 by displacement of the piezoelectric element 32 and propagated to the base portion of the first connection terminal portion 412 can be attenuated. As a result, the load on the base portion of the first connection terminal portion 412 can be reduced, and the base portion of the first connection terminal portion 412 can be prevented from being broken.

The first connecting portion 413 connects the first external terminal portion 411 and the first connection terminal portion 412, the first connecting portion 413 includes a portion arranged along the outer periphery of the holding portion 43, the first connecting portion 413 is provided along 1 of 4 corners of the holding portion 43 in a plan view, the first connecting portion 413 has a substantially L-shaped shape.

In the first coupling portion 413, a portion arranged along the outer periphery of the holding portion 43 has a protruding portion 413c extending from the holding portion 43 toward the outside. The first connecting portion 413 has a through hole 414 in a portion overlapping with the holding portion in a plan view.

The second conductive member 42 includes a second external terminal portion 421, a second connection terminal portion 422, and a second connection portion 423. The second external terminal portion 421 is located outside the pump housing 1. The second external terminal portion 421 is provided on the front end side of the portion of the second conductive member 42 that protrudes outward from the pump housing.

The second external terminal portion 421 is preferably subjected to surface treatment. For example, the second external terminal portion 421 is preferably coated with Sn plating. Thus, as described later, when the second external terminal portion 421 is solder-mounted, the solder adhesion can be improved. Further, it is preferable that the plating layer as the surface-treated portion is not in contact with the holding portion 43. This can prevent the solder from contacting the holding portion 43 during solder mounting.

The second connection terminal portion 422 is electrically connected to the second external terminal 421 and the first surface 32b of the piezoelectric element 32. The second connection terminal portion 422 has an exposed portion 422a. The exposed portion 422a is located inside the pump housing and exposed from the holding portion 43 toward the first main surface 31a of the diaphragm 31. A plurality of exposed portions 422a are provided. Specifically, 3 exposed portions 422a are provided. The 3 exposed portions 422a are disposed inside the other 3 corners of the 4 corners of the holding portion 43 in plan view, where the first connecting portion 413 is not disposed.

The exposed portion 422a contacts the first main surface 31a of the diaphragm 31. Thereby, the second conductive member 42 is electrically connected to the first surface 32b of the piezoelectric element 32 through the vibration plate 31. That is, the exposed portion 422a is in contact with the first main surface 32b to be electrically connected, and a conductive path electrically connecting the exposed portion 422a and the first surface 32b of the piezoelectric element 32 is formed by the vibrating plate 31.

Further, by providing a plurality of exposed portions 422a, the exposed portions 422a can be more reliably brought into contact with the diaphragm 31.

The exposed portion 422a is arranged to be surrounded by the holding portion 43 in a plan view. This can prevent the exposed portion 422a from entering the inside of the opening 434 of the holding portion 43. When the exposed portion 422a enters the opening 434, a force acts on the exposed portion 422a due to the movement of the gas in the pump chamber 7, and the exposed portion 422a may be peeled off. In the present embodiment, since the exposed portion 422a does not enter the opening 434, peeling of the exposed portion 422a can be suppressed.

The exposed portion 422a is subjected to surface treatment. For example, the exposed portion 422a is coated with Sn plating. This can suppress rust formation on the exposed portion 422a.

The second connection portion 423 connects the second external terminal portion 421 and the plurality of exposed portions 422a. The second coupling portion 423 includes a portion arranged along the outer periphery of the holding portion 43. Specifically, the second coupling portion 423 includes a portion extending along the outer periphery of the holding portion 43 so as to sequentially pass through the other 3 corner portions, where the first coupling portion 413 is not arranged, of the 4 corner portions of the holding portion 43 in plan view.

In the second coupling portion 423, a portion arranged along the outer periphery of the holding portion 43 has a protruding portion 423c extending from the holding portion 43 toward the outside. The second coupling portion 423 has a through hole 424 at a portion overlapping the holding portion in a plan view.

The holding portion 43 integrally holds the first conductive member 41 and the second conductive member 42. The holding portion 43 is made of a cured resin member. As the resin member, an insulating material is used. The holding portion 43 is formed by molding the first conductive member 41 and the second conductive member 42 so that a part thereof is exposed.

As described above, in the first coupling portion 413 and the second coupling portion 423, a portion arranged along the outer periphery of the holding portion 43 has a protruding portion extending outward from the holding portion 43. Therefore, when the first conductive member 41, the second conductive member 42, and the holding portion 43 are integrally formed by injection molding, the protruding portion can be supported by the outside of the mold.

This eliminates the need for providing a structure for pressing the first conductive member 41 and the second conductive member 42 inside the mold, and the area of the holding portion 43 in a plan view can be increased. This enables the holding portion 43 to be stably joined to the diaphragm, and the joining area to be increased.

The first coupling portion 413 and the second coupling portion 423 have through holes 414 and 424 at portions overlapping with the holding portion 43 in a plan view, and the cured resin member covers the front and back surfaces of the portions overlapping with the holding portion 43 and fills the through holes 414 and 424. This prevents the first conductive member 41 and the second conductive member 42 from coming off the holding portion 43.

The holding portion 43 includes an outer frame portion 431, an inner frame portion 432, and a displacement restricting portion 435. The outer frame portion 431 has a substantially rectangular shape in plan view. The outer frame portion 431 surrounds the inner frame portion 432, and defines the outer shape of the holding portion 43.

The inner frame portion 432 has a substantially circular outer shape in plan view. The inner frame portion 432 is provided with an opening portion 434 that penetrates in the thickness direction so as to expose the piezoelectric element 32. The inner peripheral surface of the inner frame portion 432 defining the opening portion 434 constitutes a part of the pump chamber 2.

A step is provided between the inner frame portion 432 and the outer frame portion 431. The inner frame portion 432 is provided at a higher height position than the outer frame portion 431. The upper surface of the inner frame portion 432 is located higher than the upper surface of the outer frame portion 431, and the lower surface of the inner frame portion 432 is located higher than the lower surface of the outer frame portion 431.

When the second surface 32a of the piezoelectric element 32 is excessively close to the lower surface of the inner frame portion 432, the vibration amplitude is reduced due to air resistance. Therefore, in embodiment 1, the lower surface of the inner frame portion 432 is provided to be distant from the piezoelectric element 32.

The inner frame portion 432 has 3 wavy portions 433 protruding toward the opening portion 434. Each wavy portion 433 continues in a wavy shape in a plan view. The 3 wavy portions 433 are provided in 3 regions of 4 equal regions in the circumferential direction.

A displacement restricting portion 435 is provided on the lower surface of the wavy portion 433 facing the piezoelectric element 32 side. The displacement restricting portion 435 is circular in plan view and protrudes toward the piezoelectric element 32. The displacement restricting portion 435 contacts the second surface 32a of the piezoelectric element 32 when an impact load or the like acts, and suppresses the occurrence of excessive extension in the connecting portion 313 of the diaphragm 31. Further, the displacement restricting portion 435 is provided so as not to interfere with the bending vibration of the piezoelectric element 32.

Fig. 7 is a diagram showing electrical connection between the power supply plate and the vibration unit according to embodiment 1. Referring to fig. 7, the electrical connection between power supply plate 40 and vibration unit 30 will be described.

As shown in fig. 7, the first connection terminal portion 412 electrically connected to the first external terminal portion 411 is electrically connected to the second surface 32a of the piezoelectric element 32. The exposed portion 422a electrically connected to the second external terminal portion 421 contacts the first main surface 31a of the vibration plate 31, and is electrically connected to the first surface 32b of the piezoelectric element 32 via the vibration plate 31. Thus, a voltage is applied to the piezoelectric element 32 by applying a voltage to the first external terminal portion 411 and the second external terminal portion 421.

(installation state)

Fig. 8 is a plan view showing a state in which the piezoelectric blower according to embodiment 1 is mounted on a circuit board. Fig. 9 is a cross-sectional view showing a state in which the piezoelectric blower according to embodiment 1 is mounted on a circuit board. The mounting state of piezoelectric blower 100 according to embodiment 1 will be described with reference to fig. 8 and 9.

As shown in fig. 8 and 9, piezoelectric blower 100 is mounted on, for example, circuit board 200 supported by support member 300. The circuit board 200 has an insertion hole 203 for inserting the piezoelectric blower 100, and pads 201, 202 for connecting the first external terminal portion 411 and the second external terminal portion 421. The pads 201 and 202 are provided on the main surface of the circuit board 200 on the side opposite to the supporting member 300.

The piezoelectric blower 100 is attached to the support member 300 in a state where the nozzle portion 91 is inserted into the insertion hole 203 so as to face the support member 300 side. In this state, the first external terminal portion 411 and the second external terminal portion 421 are disposed to face the pads 201 and 202.

In piezoelectric blower 100, since first conductive member 41 and second conductive member 42 are integrally held by holding unit 43, it is possible to suppress variations in the height positions of first conductive member 41 and second conductive member 42. This can suppress the height position deviation of the first external terminal portion 411 included in the first conductive member 41 and the second external terminal portion 421 included in the second conductive member 42. Therefore, the first external terminal portion 411 and the second external terminal portion 421 can be soldered to the pads 201 and 202.

As described above, in the piezoelectric blower 100 according to embodiment 1, the first conductive member 41 having the first connection terminal portion 412 and the first external terminal portion 411 connected to the second surface 32a of the piezoelectric element 32, and the second conductive member 42 having the exposed portion 422a and the second external terminal portion 421 electrically connected to the first surface 32b of the piezoelectric element 32 through the conductive path formed on the diaphragm 31 side with respect to the piezoelectric element 32 are integrally held by the holding portion 43, so that it is possible to suppress variation in the height positions of the first external terminal portion 411 and the second external terminal portion 421 without applying a voltage to the piezoelectric element 32. As a result, piezoelectric blower 100 can be easily mounted on circuit board 200 or the like as described above. Further, by mounting the first external terminal portion 411 and the second external terminal portion 421 to the circuit board using solder without using lead wires, it is possible to prevent the lead wires from vibrating due to vibration caused by expansion and contraction of the piezoelectric element 32 and generating abnormal noise.

In addition, when the first external terminal portion 411 and the second external terminal portion 421 are provided on the same plane, the mounting can be performed more easily.

(embodiment mode 2)

Fig. 10 is a plan view of a power supply plate provided in the piezoelectric blower according to embodiment 2, as viewed from the vibrating plate side. A piezoelectric blower according to embodiment 2 will be described with reference to fig. 10.

As shown in fig. 10, in the piezoelectric blower according to embodiment 2, the shape of the first connection terminal portion 412A of the power supply plate 40 is different from that of the piezoelectric blower 100 according to embodiment 1. The other structures are substantially the same.

The first connection terminal portion 412A has a straight portion 4121 and a protruding portion 4122. The linear portion 4121 linearly extends from the inner peripheral surface of the holding portion 43 defining the opening portion 434 of the holding portion 43 toward the opening portion 434. The protruding portion 4122 protrudes in a direction intersecting the extending direction of the linear portion 4121. The protruding portion 4122 is provided between the front end and the base end of the linear portion 4121.

By providing the protruding portion 4122, the protruding portion 4122 functions as a weight as compared with the case where the connection terminal portion is constituted by only the linear portion 4121. This can attenuate the vibration applied to the distal end portion of the first connection terminal portion 412A by the displacement of the piezoelectric element 32 and propagated to the base portion of the first connection terminal portion 412A. As a result, the load on the base portion of the first connection terminal portion 412A can be reduced, and the base portion of the first connection terminal portion 412A can be prevented from being broken.

Even in the case of the above-described configuration, the piezoelectric blower according to embodiment 2 can obtain substantially the same effects as the piezoelectric blower according to embodiment 1.

(embodiment mode 3)

Fig. 11 is a plan view of a power supply plate provided in the piezoelectric blower according to embodiment 3, as viewed from the vibrating plate side. A piezoelectric blower according to embodiment 3 will be described with reference to fig. 11.

As shown in fig. 11, in the piezoelectric blower according to embodiment 3, the shape of the first connection terminal portion 412B of the power supply plate 40 is different from that of the piezoelectric blower 100 according to embodiment 1. The other structures are substantially the same.

The first connection terminal portion 412B has a tapered shape that tapers from the base portion side toward the leading end. This can improve the rigidity of the base portion of the first connection terminal portion 412B. Therefore, the vibration applied to the distal end portion of the first connection terminal portion 412B by the displacement of the piezoelectric element 32 and propagated to the base portion of the first connection terminal portion 412B can be attenuated. As a result, the load on the base portion of the first connection terminal portion 412B can be reduced, and the base portion of the first connection terminal portion 412B can be prevented from being broken.

Even in the case of the above-described configuration, the piezoelectric blower according to embodiment 3 can obtain substantially the same effects as the piezoelectric blower according to embodiment 1.

(other modification example)

In the piezoelectric blower according to embodiments 1 to 3 described above, the exposed portion 422a of the second conductive member 42 is electrically connected to the first surface 32b of the piezoelectric element 32 through the vibration plate 31, but the present invention is not limited thereto. The exposed portion 422a may be connected to the first surface 32b of the piezoelectric element 32 via a conductive path formed on the diaphragm 31 side with respect to the piezoelectric element 32, and the conductive path may be appropriately changed. For example, in the diaphragm 31, the first surface 32b and the exposed portion 422a may be electrically connected by providing a first hole portion in a portion facing a portion of the first surface 32b of the piezoelectric element 32, providing a second hole portion in a portion facing the exposed portion 422a, and providing a wiring portion so as to pass through the first hole portion and the second hole portion.

In embodiments 1 to 3, the present invention has been described by way of example as applied to a piezoelectric blower that sucks and discharges gas, but the present invention can also be applied to a pump that sucks and discharges liquid, or a pump that uses an element other than a piezoelectric element as a drive body (however, it is needless to say that the present invention is limited to a positive displacement pump that uses flexural vibration of a vibrating plate).

In embodiments 1 to 3, the case where the portion of the diaphragm 31 to which the piezoelectric element 32 is attached is a circular shape in a plan view has been described as an example, but the present invention is not limited to this, and may be a rectangular shape in a plan view or a polygonal shape as long as the piezoelectric element 32 can vibrate.

Fig. 12 is an exploded perspective view of a piezoelectric blower according to a modification example, as shown in fig. 12, in a piezoelectric blower 100B according to a modification example, as described above, the portion to which the piezoelectric element 32 is attached is rectangular in a plan view, in this case, the piezoelectric element 32 is also preferably rectangular, and the positions and/or shapes of the flow path holes 210, the adhesive seal holes 213 and 223, the hole 315, and the connection portions 313 are appropriately changed depending on the shape of the portion to which the piezoelectric element 32 is attached, specifically, the flow path holes 210 are formed in a cross shape, the adhesive seal holes 213 and 223 are arranged at 4 corners of the rectangular shape that surrounds the portion overlapping the portion to which the piezoelectric element 32 is attached separately and is formed in a shape of L, and the connection portions 313 are provided at positions corresponding to the sides of the portion to which the piezoelectric element 32 is attached.

In the piezoelectric blower according to embodiments 1 to 3 and the modification described above, the case where the cover plate 10 is configured independently of the first flow passage forming member 21 and the second flow passage forming member 22 has been described as an example, but the present invention is not limited thereto, and they may be configured integrally.

The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive. The scope of the present invention is indicated by the appended claims, and all changes that come within the meaning and range of equivalency of the claims are intended to be embraced therein.

Description of reference numerals:

a pump housing; a pump chamber; a flow path portion; a cover plate; a flow path forming portion; 21. a flow path forming member; a vibration unit; a vibrating plate; a first major face; a piezoelectric element; a second face; a first face; a power supply board; a first conductive member; a second conductive component; a holding portion; a stiffener plate; a hole portion; a second stiffener plate; 61.. a first aperture portion; a second aperture portion; an engagement member; 71.. aperture; 80.. a septum; a hole portion; 90.. a valve housing; a nozzle portion; 92.. vent holes; a piezoelectric blower; an air inlet hole; 200.. a circuit substrate; 201. 202.. a pad; inserting the hole; 210. a flow path bore; an adhesive sealing the aperture; a flow path bore; an adhesive sealing the aperture; a support member; a disc portion; a frame; a connecting portion; a hole portion; a first external terminal portion; 412. 412A, 412b.. first connecting terminal portions; a first connection portion; an extension; a through hole; a second external terminal portion; a second connecting terminal portion; an exposed portion; a second joint; 423c.. an extension; a via hole; an outer frame portion; an inner frame portion; 433.. a wave portion; 434.. opening; a displacement limiter; a straight portion; a projection.