阅读说明：本技术 测量辅助平台以及透过率测试方法 (Measurement auxiliary platform and transmittance testing method ) 是由 李欢欢 路淑娟 曹波 许宁 王伦 张萌 于 2020-03-09 设计创作，主要内容包括：本发明提供的一种测量辅助平台以及透过率测试方法,涉及光学设备技术领域,包括：旋转台,所述旋转台包括基体和转动体,所述转动体转动装配在所述基体上；所述转动体的顶部还开设有样品槽；遮光板,所述遮光板安装在所述转动体上,所述遮光板上开设有光路孔。在上述技术方案中,该测量辅助平台能够通过转动体相对于基体的旋转,快速的完成所需大角度透过率的测试工作,大大提高测量效率。(The invention provides a measurement auxiliary platform and a transmittance testing method, which relate to the technical field of optical equipment and comprise the following steps: the rotary table comprises a base body and a rotating body, and the rotating body is rotatably assembled on the base body; the top of the rotating body is also provided with a sample groove; the light screen, the light screen is installed on the rotor, the light path hole has been seted up on the light screen. In the technical scheme, the auxiliary measuring platform can rapidly complete the required large-angle transmittance test work through the rotation of the rotor relative to the substrate, and the measuring efficiency is greatly improved.)

1. A measurement assistance platform, comprising:

the rotary table comprises a base body and a rotating body, and the rotating body is rotatably assembled on the base body; the top of the rotating body is also provided with a sample groove;

the light screen, the light screen is installed on the rotor, the light path hole has been seted up on the light screen.

2. The measurement auxiliary platform according to claim 1, wherein a bearing is arranged at the top of the base body, and a rotating shaft matched with the bearing is arranged at the bottom of the rotating body;

the rotating shaft is rotatably assembled with the bearing.

3. The auxiliary measuring platform according to claim 1, wherein a through hole communicated with the inner wall of the sample groove is formed in the side wall of the rotating body, and an adjusting rod is movably inserted and assembled in the through hole;

one end of the adjusting rod extends into the sample groove.

4. The auxiliary measuring platform according to claim 3, wherein the top of the rotating body is provided with an installation groove, and the bottom of the shading plate is inserted and assembled in the installation groove.

5. The measurement assistance platform according to claim 4, wherein the rotor is of a cylindrical structure;

the sample groove comprises a first through groove which penetrates through the rotating body in the radial direction and an adjusting groove which is formed in the inner wall of the first through groove, an adjusting loose piece is movably assembled in the adjusting groove, the through hole is communicated with the adjusting groove, and the adjusting rod is connected with the adjusting loose piece;

and/or the mounting groove is a second through groove which penetrates through the rotor along the radial direction.

6. The measurement assistance platform according to any one of claims 1 to 5, further comprising:

the base, the base member assembly of revolving stage is in on the base.

7. The auxiliary measuring platform according to claim 6, wherein the base has a positioning groove formed thereon, and the bottom of the base is inserted into the positioning groove.

8. The measurement auxiliary platform according to claim 7, wherein a limiting structure is disposed between the positioning groove and the bottom of the base, and the base and the positioning groove are limited from rotating relative to each other by the limiting structure.

9. The measurement assistance platform of claim 8, wherein the base is of cylindrical configuration and the positioning groove is a cylindrical groove;

the outer side wall of the base body is provided with at least one limiting groove, the inner wall of the positioning groove is provided with at least one limiting bulge matched with the limiting groove, and the limiting bulge and the limiting groove are oppositely spliced and assembled;

the limiting protrusion and the limiting groove form the limiting structure.

10. A transmittance testing method based on the measurement assistant platform of any one of claims 1 to 9, comprising the following steps:

placing a to-be-tested piece in the sample groove and placing the to-be-tested piece in a cavity of a measuring instrument along with the measuring auxiliary platform; and rotating the rotating body to a required angle relative to the base body, so that the test light of the measuring instrument falls on the to-be-tested sheet.

Technical Field

The invention relates to the technical field of optical equipment, in particular to a measurement auxiliary platform and a transmittance testing method.

Background

In the field of optics, with the continuous development of infrared optics, an observation window has requirements on transmittance at normal incidence and also has requirements on transmittance at incidence of certain specific large angles. However, the measurement instrument in the prior art generally has only a bracket with a zero-degree angle vertical incidence, and cannot directly measure the transmittance of a sample at a certain specific incidence angle, so that the increasingly developed use requirements cannot be met.

Disclosure of Invention

The invention aims to provide a measurement auxiliary platform and a transmittance test method, and aims to solve the technical problem that a measurement instrument in the prior art cannot measure the transmittance of a sample at a specific incident angle.

The invention provides a measurement auxiliary platform, which comprises:

the rotary table comprises a base body and a rotating body, and the rotating body is rotatably assembled on the base body; the top of the rotating body is also provided with a sample groove;

the light screen, the light screen is installed on the rotor, the light path hole has been seted up on the light screen.

Furthermore, a bearing is arranged at the top of the base body, and a rotating shaft matched with the bearing is arranged at the bottom of the rotating body;

the rotating shaft is rotatably assembled with the bearing.

Furthermore, a through hole communicated with the inner wall of the sample groove is formed in the side wall of the rotating body, and an adjusting rod is movably inserted and assembled in the through hole;

one end of the adjusting rod extends into the sample groove.

Furthermore, the top of rotor has seted up the mounting groove, the bottom grafting assembly of light screen is in the mounting groove.

Further, the rotating body is of a cylindrical structure;

the sample groove comprises a first through groove which penetrates through the rotating body in the radial direction and an adjusting groove which is formed in the inner wall of the first through groove, an adjusting loose piece is movably assembled in the adjusting groove, the through hole is communicated with the adjusting groove, and the adjusting rod is connected with the adjusting loose piece;

and/or the mounting groove is a second through groove which penetrates through the rotor along the radial direction.

Further, the measurement auxiliary platform further comprises:

the base, the base member assembly of revolving stage is in on the base.

Furthermore, a positioning groove is formed in the base, and the bottom of the base body is oppositely spliced and assembled with the positioning groove.

Furthermore, the constant head tank with be provided with limit structure between the bottom of base member, the base member with pass through between the constant head tank limit structure the two relative rotations.

Furthermore, the base body is of a cylindrical structure, and the positioning groove is a cylindrical groove;

the outer side wall of the base body is provided with at least one limiting groove, the inner wall of the positioning groove is provided with at least one limiting bulge matched with the limiting groove, and the limiting bulge and the limiting groove are oppositely spliced and assembled;

the limiting protrusion and the limiting groove form the limiting structure.

The invention also provides a transmittance testing method based on the auxiliary measuring platform, which comprises the following steps:

placing a to-be-tested piece in the sample groove and placing the to-be-tested piece in a cavity of a measuring instrument along with the measuring auxiliary platform; and rotating the rotating body to a required angle relative to the base body, so that the test light of the measuring instrument falls on the to-be-tested sheet.

In the technical scheme, the auxiliary measuring platform can rapidly complete the required large-angle transmittance test work through the rotation of the rotor relative to the substrate, and the measuring efficiency is greatly improved.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and other drawings can be obtained by those skilled in the art without creative efforts.

FIG. 1 is an exploded view of a survey assistance platform provided in accordance with one embodiment of the present invention;

FIG. 2 is an assembly view of a survey assistance platform provided in accordance with one embodiment of the present invention;

FIG. 3 is an exploded view of a survey assistance platform provided in accordance with another embodiment of the present invention;

FIG. 4 is an assembly view of a survey assistance platform provided in accordance with another embodiment of the present invention;

FIG. 5 is an enlarged view of a portion of a metrology assistance platform provided in accordance with another embodiment of the present invention;

FIG. 6 is an exploded view of a survey assistance platform provided in accordance with yet another embodiment of the present invention;

FIG. 7 is an assembly view of a survey assistance platform provided in accordance with yet another embodiment of the present invention;

FIG. 8 is an exploded view of a survey assistance platform provided in accordance with yet another embodiment of the present invention;

FIG. 9 is an assembly view of a survey assistance platform provided in accordance with yet another embodiment of the present invention;

FIG. 10 is a plan view of a base provided in accordance with yet another embodiment of the present invention;

FIG. 11 is a graph of a specific large-angle transmittance portion of the same test strip being tested multiple times in the prior art;

FIG. 12 is a graph of a specific large-angle transmittance portion of the same test piece under test of the present invention.

Reference numerals:

1. a rotating table; 2. a visor; 3. a base;

11. a substrate; 12. a rotating body; 13. a sample tank; 14. mounting grooves; 15. a first through groove; 16. an adjustment groove; 17. adjusting a rod; 18. adjusting the loose piece; 19. a through hole; 110. a first marking line groove;

21. an optical path hole;

31. positioning a groove; 32. a limiting bulge; 33. and a second marking groove.

Detailed Description

The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1 and fig. 2, the measurement assisting platform provided in this embodiment includes:

the rotary table 1 comprises a base body 11 and a rotating body 12, wherein the rotating body 12 is rotatably assembled on the base body 11; the top of the rotating body 12 is also provided with a sample groove 13;

the light shielding plate 2 is arranged on the rotating body 12, and the light shielding plate 2 is provided with a light path hole 21.

Referring to fig. 1, the measuring aid platform has a rotatable rotary table 1, the rotary table 1 being formed by a base 11 mounted for rotation relative to one another and a rotor 12 on the base 11, the rotor 12 being able to rotate on the base 11 in a fixed axis manner.

When testing, the measurement auxiliary platform can be placed in a cavity of a measuring instrument, a to-be-tested piece is placed in the sample groove 13, and the light path of the light path hole 21 is debugged and aligned. For example, the rotary table 1 can be adjusted to a required large angle, the light shielding plate 2 is used for shielding redundant light, the light shielding plate 2 is adjusted to enable the light to fall on the center of the position where the to-be-tested wafer is located, and the test can be performed after the alignment and the light path are adjusted in place. When the measuring instrument does not have a self-contained laser alignment light path, the laser pen can be placed in the center of the light path hole 21, and the laser pen is excited to perform light path alignment.

After the light path is debugged, the background scanning can be performed first under the condition that the to-be-tested piece is not arranged, and after the scanning is finished, the to-be-tested piece can be placed at the light path hole 21 on the light shielding plate 2 and is correspondingly fixed. And then, scanning the sample, thereby completing the large-angle test work. It should be noted that the outer side wall of the rotor 12 can be provided with a first marking groove 110, and the first marking groove 110 can include four marking lines which are individually or jointly arranged on the base 11 or the rotor 12 and can be respectively marked as 0 degree, 90 degrees, 180 degrees and 270 degrees. There may also be provided uniform scale markings between the four markings on the rotor 12, the minimum scale marking being 1 degree, each 30 degrees being marked with one degree, which may be 0, 30, 60, 90, 120, 150, 180, 210, 240, 270, 300, 330, respectively.

Therefore, the auxiliary measuring platform can rapidly complete the required large-angle transmittance test work through the rotation of the rotor 12 relative to the substrate 11, and the measuring efficiency is greatly improved. Referring to fig. 11 and 12, after the measurement auxiliary platform is used for performing the test operation, compared with the measurement result in the prior art, after the measurement is assisted by the measurement auxiliary platform, the test curves in the curve graph of the transmittance at a large angle of the same to-be-tested piece after multiple measurements can be substantially overlapped, thereby proving that the consistency of the test operation performed by the measurement auxiliary platform is also greatly improved.

Further, a bearing is arranged at the top of the base body 11, and a rotating shaft matched with the bearing is arranged at the bottom of the rotating body 12; the rotating shaft is rotatably assembled with the bearing. Therefore, the rotating body 12 can flexibly and stably rotate in a fixed axis relative to the base body 11 through the matching of the bearing and the rotating shaft. Of course, besides the above, the rotational fitting of the rotating body 12 and the base body 11 can be realized by other structures, such as a stepping motor, a rotating shaft sleeve, and the like.

As shown in fig. 3 to 5, a through hole 19 communicating with the inner wall of the sample groove 13 is formed in the side wall of the rotating body 12, and an adjusting rod 17 is movably inserted and assembled in the through hole 19; one end of the adjusting rod 17 extends into the sample groove 13. Therefore, after the sample is placed in the sample well 13, the movement of the adjustment lever 17 in the through hole 19 is controlled so that the end of the adjustment lever 17 comes into contact with the sample, thereby fixing the sample in the sample well 13.

The adjusting rod 17 can move in the through hole 19 in a threaded screwing mode, namely the adjusting rod 17 adopts a threaded rod, the through hole 19 adopts a threaded hole, the threaded rod rotates in the threaded hole to realize the movement of the adjusting rod 17 in the through hole 19, and the adjusting rod 17 can be accurately adjusted in the threaded hole. Of course, in addition, the adjusting rod 17 can be moved in the through hole 19 by other structures, such as an electric telescopic rod, and will not be described herein again.

Further, the top of the rotating body 12 is provided with an installation groove 14, and the bottom of the shading plate 2 is inserted into the installation groove 14. Therefore, the shading plate 2 and the rotating body 12 can be assembled together in an inserting mode, the assembling mode is convenient to mount and dismount, and the shading plate 2 can be configured as required. In addition, the light shielding plate 2 and the rotating body 12 can be relatively assembled through other structures, such as magnetic connection and the like, and the description is omitted here.

As shown in fig. 6 and 7, the rotating body 12 has a cylindrical structure; the sample groove 13 comprises a first through groove 15 which penetrates through the rotor 12 in the radial direction and an adjusting groove 16 which is formed in the inner wall of the first through groove 15, an adjusting loose piece 18 is movably assembled in the adjusting groove 16, and a through hole 19 is communicated with the adjusting groove 16 and is connected with the adjusting rod 17 and the adjusting loose piece 18.

Therefore, when the adjusting rod 17 moves in the through hole 19, the adjusting movable block 18 can be synchronously controlled to move in the adjusting groove 16, so that the adjusting movable block 18 is abutted against or separated from the sample placed in the sample groove 13. At this point, the sample may be secured by adjusting the tight abutment between the loose piece 18 and the sample. When the mounting groove 14 is a second through groove penetrating along the radial direction of the rotating body 12. Therefore, after the shading plate 2 is inserted into the second through groove, the position of the shading plate can be adjusted in the length direction of the second through groove, and more measuring requirements are met. The width of the first through groove 15 may be 10mm, and the depth may be 1 mm; the second through groove may have a width of 1mm and a depth of 2 mm.

As shown in fig. 8 and 9, the measurement assisting platform further includes: a base 3, on which the base body 11 of the rotary table 1 is fitted. Therefore, the base 3 supports the whole rotating platform 1, and the stability of the whole measurement auxiliary platform can be improved by the larger area of the base 3. The base 3 may be square or circular, which is not described herein. Also can set up second mark notch 33 on this base 3, this second mark notch 33 can align with first mark notch 110, and second mark notch 33 can play the effect of counterpointing from top to bottom and zero point counterpoint with first mark notch 110 cooperation, can make things convenient for the adjustment work before the test.

Furthermore, a positioning groove 31 is formed in the base 3, and the bottom of the base body 11 and the positioning groove 31 are oppositely assembled in an inserting mode. Therefore, the base 3 and the base body 11 can be assembled together in an inserting mode, the assembling mode is convenient to mount and dismount, and the base body 11 can be configured as required. Besides, the base 3 and the base 11 can be assembled relatively by other structures, such as magnetic connection, and the like, which is not described herein again.

Referring to fig. 10, a limiting structure is disposed between the positioning groove 31 and the bottom of the base 11, and the base 11 and the positioning groove 31 are limited from rotating relative to each other by the limiting structure. Therefore, through the limitation of the limiting structure, when the base 11 is installed on the base 3 and the rotating body 12 rotates relative to the base 11, the problem that the base 11 rotates along with the rotating body does not occur, so that the installation of the base 11 is more stable, and the accuracy of the angle adjustment of the rotating body 12 is ensured.

Further, the base 11 is a cylindrical structure, and the positioning groove 31 is a cylindrical groove; the outer side wall of the base body 11 is provided with at least one limiting groove, the inner wall of the positioning groove 31 is provided with at least one limiting bulge 32 matched with the limiting groove, and the limiting bulge 32 and the limiting groove are oppositely spliced and assembled; the limiting protrusion 32 and the limiting groove form the limiting structure.

Therefore, after the limiting protrusion 32 and the limiting groove are relatively inserted and assembled, the rotation of the substrate 11 in the positioning groove 31 can be stably limited. Besides, the limiting structure can be realized by the positioning groove 31 and the bottom structure of the base body 11, for example, the base body 11 is a prism structure, and the positioning groove 31 is a prism groove, so that the rotation limitation between the base body 11 and the positioning groove 31 can also be realized by the cooperation of the prism structures.

The invention also provides a transmittance testing method based on the auxiliary measuring platform, which comprises the following steps:

placing a to-be-tested piece in the sample groove and placing the to-be-tested piece in a cavity of a measuring instrument along with the measuring auxiliary platform; and rotating the rotating body to a required angle relative to the base body, so that the test light of the measuring instrument falls on the to-be-tested sheet.

Since the specific structure, functional principle and technical effect of the measurement auxiliary platform are detailed in the foregoing, detailed description is omitted here. The transmittance testing method can rapidly and effectively complete the alignment and the debugging work of the light path through the flexible angle adjustment of the rotating body 12 and the base body 11 which can rotate mutually in the measurement work of the transmittance at a large angle (specific angle) through the matching of the measurement auxiliary platform, and further can realize the test work of the transmittance at the large angle.

Finally, it should be noted that: the above embodiments are only used to illustrate the technical solution of the present invention, and not to limit the same; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.