阅读说明：本技术 承载机构 (Bearing mechanism ) 是由 周竞辉 高鹏 张风港 顾伟 于 2020-04-09 设计创作，主要内容包括：本公开涉及工件装载技术领域,提出了一种承载机构,用于夹紧基片,承载机构包括主框架和夹紧边部,夹紧边部设置在主框架上,夹紧边部包括夹紧边和弹性元件,夹紧边上设置有安装槽,弹性元件设置在安装槽内,安装槽包括斜边沟槽,斜边沟槽位于安装槽的中部；其中,夹紧边部成对设置,成对的两个夹紧边部相对可移动地设置,以将基片夹紧在相对的两个弹性元件之间。由于两个夹紧边之间的距离可调整,且在装载过程中仅需通过移动夹紧边部就可以完成对基片的夹紧,从而提高了基片的装夹效率,解决了现有技术中的基片装载效率较低的问题。(The bearing mechanism comprises a main frame and a clamping edge part, wherein the clamping edge part is arranged on the main frame and comprises a clamping edge and an elastic element, the clamping edge is provided with a mounting groove, the elastic element is arranged in the mounting groove, the mounting groove comprises an inclined edge groove, and the inclined edge groove is positioned in the middle of the mounting groove; wherein the clamping edge portions are arranged in pairs, and wherein the clamping edge portions of a pair are relatively movably arranged to clamp the substrate between the opposing elastic members. Because the distance between the two clamping edges is adjustable, and the substrate can be clamped only by moving the clamping edges in the loading process, the clamping efficiency of the substrate is improved, and the problem of lower loading efficiency of the substrate in the prior art is solved.)

1. A carrier mechanism for clamping a substrate (1), characterized in that the carrier mechanism comprises:

a main frame (10);

the clamping edge part (20) is arranged on the main frame (10), the clamping edge part (20) comprises a clamping edge (21) and an elastic element (22), an installation groove (23) is formed in the clamping edge (21), the elastic element (22) is arranged in the installation groove (23), the installation groove (23) comprises a bevel edge groove (231), and the bevel edge groove (231) is located in the middle of the installation groove (23);

wherein the clamping edge portions (20) are arranged in pairs, and wherein the clamping edge portions (20) of a pair are arranged relatively movably to clamp the substrate (1) between the two opposing elastic elements (22).

2. The carrying mechanism according to claim 1, wherein the bevel groove (231) comprises two opposite bevel edges (232), the two bevel edges (232) are arranged at intervals, and the included angle between the two bevel edges (232) is an obtuse angle;

wherein portions of the resilient element (22) abut both of the beveled edges (232).

3. The load bearing mechanism of claim 2, wherein said beveled groove (231) is a through slot.

4. The carrying mechanism according to claim 1, characterized in that the width of the top wall of the mounting groove (23) is smaller than the width of the bottom wall of the mounting groove (23);

the main frame (10) is provided with scale marks which are arranged along the moving direction of the clamping edge part (20).

5. The support means according to any one of claims 1 to 4, wherein the spring element (22) is adapted to the mounting groove (23), the spring element (22) having a receiving groove conforming to the shape of the mounting groove (23) for receiving a portion of the substrate (1).

6. The carrier mechanism of claim 1, further comprising:

the lead screw assembly (30), the lead screw assembly (30) includes a lead screw (31) and a lead screw nut pair (32), the lead screw (31) is rotatably arranged on the main frame (10), the lead screw nut pair (32) is arranged on the lead screw (31) and is connected with the clamping edge (21), so that the clamping edge (20) is arranged on the main frame (10) through the lead screw assembly (30);

the screw nut pairs (32) are arranged in pairs, and the two screw nut pairs (32) in pairs are respectively connected with the two clamping edges (21) in pairs, so that when the screw (31) rotates, the two screw nut pairs (32) drive the two clamping edges (20) to move along two opposite directions.

7. The carrier mechanism of claim 6, further comprising:

an optical axis assembly (40), the optical axis assembly (40) including an optical axis (41) and a linear bearing (42), the optical axis (41) being disposed on the main frame (10), the linear bearing (42) being disposed on the optical axis (41);

the screw rod (31) and the optical axis (41) are arranged in parallel, the linear bearings (42) are arranged in pairs, the screw rod nut pairs (32) and the linear bearings (42) are arranged in pairs in a one-to-one correspondence mode, and the screw rod nut pairs (32) and the linear bearings (42) are respectively connected with two ends of the clamping edge (21).

8. The carrying mechanism according to claim 7, wherein the screw assembly (30) further comprises two first sliders (33) in pairs, the two first sliders (33) in pairs being respectively arranged on the two screw nut pairs (32) in pairs and being used for connecting first ends of the two clamping edges (21) in pairs;

the optical axis assembly (40) further comprises two second sliding blocks (43) in pairs, wherein the two second sliding blocks (43) in pairs are respectively arranged on the two linear bearings (42) in pairs and are used for connecting the second ends of the two clamping edges (21) in pairs.

9. The carrier mechanism as claimed in any one of claims 6 to 8, further comprising:

the reverse locking assembly (50), the reverse locking assembly (50) comprises a ratchet wheel (51) and a pawl (52), the ratchet wheel (51) is connected with the lead screw (31), and the pawl (52) is rotatably arranged on the main frame (10);

wherein the pawl (52) comprises a first clamping part (521) and a second clamping part (522), and the first clamping part (521) and the second clamping part (522) can be selectively clamped with the ratchet wheel (51) so as to respectively limit the rotation of the ratchet wheel (51) along two directions.

10. The carrier mechanism of claim 9, wherein the reverse locking assembly (50) further comprises:

a fixing block (55), the fixing block (55) being disposed on the main frame (10);

the elastic piece (54), one end of the said elastic piece (54) is abutted against the said fixed block (55);

and one end of the ejector rod (53) is abutted against the other end of the elastic piece (54), and the other end of the ejector rod (53) is abutted against the pawl (52).

Technical Field

The disclosure relates to the technical field of workpiece loading, in particular to a bearing mechanism.

Background

The graphene film is one of transparent conductive films, and is widely used because of its good conductivity and transparency. The graphene film can be directly grown on the surfaces of substrates such as glass substrates, quartz wafers, sapphire wafers and the like, and the existing graphene film materials are produced in a pilot scale mode, but the quality of the graphene film materials in the market is uneven, so that the quality detection of the graphene film materials is very important. Graphene glass, graphene wafers, and other substrates are generally circular or rectangular sheets of material having different gauge dimensions. The method is realized by rapidly acquiring two indexes of optical transmittance and surface resistance of the substrate aiming at batch detection of the performance of the graphene film material.

In the testing process of substrate, need carry out quick dress card fixed to different appearances and unidimensional substrate, realize the automation for cooperation check out test set, bear the device and require to realize the automatic centering of substrate usually, must fretwork in the middle of bearing the device moreover, can not influence the measurement of optical transmittance, will reduce the area of dress card position as far as possible in addition, reduce the influence to measuring effective area. In semiconductor equipment, for bearing silicon wafers, loading is often realized by manually placing pressing mechanisms on the edges of the substrates, and the technical method has low efficiency and cannot be matched with automatic equipment to improve loading efficiency.

Disclosure of Invention

The present disclosure provides a carrying mechanism to solve the problem of low substrate loading efficiency in the prior art.

The invention provides a bearing mechanism for clamping a substrate, comprising:

a main frame;

the clamping edge part is arranged on the main frame and comprises a clamping edge and an elastic element, a mounting groove is formed in the clamping edge, the elastic element is arranged in the mounting groove, the mounting groove comprises a bevel edge groove, and the bevel edge groove is positioned in the middle of the mounting groove;

wherein the clamping edge portions are arranged in pairs, and wherein the clamping edge portions of a pair are relatively movably arranged to clamp the substrate between the opposing elastic members.

In one embodiment of the invention, the bevel edge groove comprises two opposite bevel edges which are arranged at intervals, and the included angle between the two bevel edges is an obtuse angle;

wherein the elastic element is partially attached to the two oblique edges.

In one embodiment of the invention, the hypotenuse groove is a through groove.

In one embodiment of the invention, the width of the top wall of the mounting groove is smaller than the width of the bottom wall of the mounting groove;

the main frame is provided with scale marks which are arranged along the moving direction of the clamping edge part.

In one embodiment of the invention, the resilient element is adapted to the mounting slot, the resilient element having a receiving groove conforming to the shape of the mounting slot for receiving a portion of the substrate.

In one embodiment of the present invention, the carrying mechanism further comprises:

the lead screw assembly comprises a lead screw and a lead screw nut pair, the lead screw is rotatably arranged on the main frame, and the lead screw nut pair is arranged on the lead screw and is connected with the clamping edge so that the clamping edge part is arranged on the main frame through the lead screw assembly;

the screw nut pairs are arranged in pairs, and the two paired screw nut pairs are respectively connected with the two paired clamping edges, so that when the screw rotates, the two screw nut pairs drive the two clamping edges to move along two opposite directions.

In one embodiment of the present invention, the carrying mechanism further comprises:

the optical axis assembly comprises an optical axis and a linear bearing, the optical axis is arranged on the main frame, and the linear bearing is arranged on the optical axis;

the screw rod is arranged in parallel with the optical axis, the linear bearings are arranged in pairs, the two paired screw nut pairs and the two paired linear bearings are arranged in a one-to-one correspondence mode, and the two ends of the clamping edge are connected with the screw nut pairs and the linear bearings respectively.

In one embodiment of the invention, the screw assembly further comprises two first sliders in pairs, the two first sliders in pairs are respectively arranged on the two screw nut pairs in pairs and are used for connecting the first ends of the two clamping edges in pairs;

the optical axis assembly further comprises two paired second sliding blocks, the two paired second sliding blocks are respectively arranged on the two paired linear bearings and are used for connecting the second ends of the two paired clamping edges.

In one embodiment of the present invention, the carrying mechanism further comprises:

the reverse locking assembly comprises a ratchet wheel and a pawl, the ratchet wheel is connected with the screw rod, and the pawl is rotatably arranged on the main frame;

wherein, the pawl includes first latch and second latch, and first latch and second latch are optionally with the ratchet joint to the rotation of restriction ratchet along two directions respectively.

In one embodiment of the present invention, the reverse locking assembly further comprises:

the fixing block is arranged on the main frame;

one end of the elastic piece is abutted with the fixed block;

and one end of the ejector rod is abutted with the other end of the elastic piece, and the other end of the ejector rod is abutted with the pawl.

The carrying mechanism can realize rapid clamping of the substrate through the two clamping edge parts which are relatively movably arranged. During the specific loading process, the distance between the two clamping edges is adjusted according to the size of the substrate, and finally the substrate is clamped between the two opposite elastic elements. Because the distance between the two clamping edges is adjustable, and the substrate can be clamped only by moving the clamping edges in the loading process, the clamping efficiency of the substrate is improved, and the problem of lower loading efficiency of the substrate in the prior art is solved.

Drawings

Various objects, features and advantages of the present disclosure will become more apparent from the following detailed description of preferred embodiments thereof, when considered in conjunction with the accompanying drawings. The drawings are merely exemplary illustrations of the disclosure and are not necessarily drawn to scale. In the drawings, like reference characters designate the same or similar parts throughout the different views. Wherein:

FIG. 1 is a schematic structural view from a first perspective of a load bearing mechanism according to an exemplary embodiment;

FIG. 2 is a structural schematic diagram illustrating a second perspective of a load bearing mechanism according to an exemplary embodiment;

FIG. 3 is a schematic illustration of a reverse locking assembly of a load bearing mechanism according to an exemplary embodiment;

FIG. 4 is a cross-sectional schematic view of a load bearing mechanism according to an exemplary embodiment;

FIG. 5 is an enlarged schematic view of the structure at A in FIG. 4;

FIG. 6 is a schematic diagram illustrating the configuration of the clamping edge of one of the load bearing mechanisms according to one exemplary embodiment;

FIG. 7 is a cross-sectional structural view of a clamping edge of a load bearing mechanism according to an exemplary embodiment.

The reference numerals are explained below:

1. a substrate; 10. a main frame; 11. an upper frame; 12. a lower frame; 13. a left frame; 14. a right frame; 20. clamping the edge part; 21. clamping the edge; 22. an elastic element; 23. mounting grooves; 231. a bevel edge groove; 232. a bevel edge; 30. a lead screw assembly; 31. a lead screw; 32. a screw-nut pair; 33. a first slider; 40. an optical axis assembly; 41. an optical axis; 42. a linear bearing; 43. a second slider; 50. a reverse locking assembly; 51. a ratchet wheel; 52. a pawl; 521. a first locking part; 522. a second locking part; 53. a top rod; 54. an elastic member; 55. a fixed block; 60. an external tool.

Detailed Description

Exemplary embodiments that embody features and advantages of the present disclosure are described in detail below in the specification. It is to be understood that the disclosure is capable of various modifications in various embodiments without departing from the scope of the disclosure, and that the description and drawings are to be regarded as illustrative in nature, and not as restrictive.

In the following description of various exemplary embodiments of the disclosure, reference is made to the accompanying drawings, which form a part hereof, and in which are shown by way of illustration various exemplary structures, systems, and steps in which aspects of the disclosure may be practiced. It is to be understood that other specific arrangements of parts, structures, example devices, systems, and steps may be utilized and structural and functional modifications may be made without departing from the scope of the present disclosure. Moreover, although the terms "over," "between," "within," and the like may be used in this specification to describe various example features and elements of the disclosure, these terms are used herein for convenience only, e.g., in accordance with the orientation of the examples in the figures. Nothing in this specification should be construed as requiring a specific three dimensional orientation of structures in order to fall within the scope of this disclosure.

One embodiment of the present invention provides a carrying mechanism for clamping a substrate 1, and referring to fig. 1 to 7, the carrying mechanism includes: a main frame 10; the clamping edge part 20 is arranged on the main frame 10, the clamping edge part 20 comprises a clamping edge 21 and an elastic element 22, an installation groove 23 is formed in the clamping edge 21, the elastic element 22 is arranged in the installation groove 23, the installation groove 23 comprises a bevel edge groove 231, and the bevel edge groove 231 is located in the middle of the installation groove 23; wherein the clamping lips 20 are arranged in pairs, the two clamping lips 20 of a pair being arranged relatively movably for clamping the substrate 1 between two opposing elastic elements 22.

The carrier mechanism according to one embodiment of the invention allows a rapid clamping of the substrate 1 by means of the two clamping lips 20 which are arranged so as to be movable relative to one another. During the specific loading process, the distance between the two clamping edges 21 is adjusted according to the size of the substrate 1, and finally the substrate 1 is clamped between the two opposite elastic elements 22. The distance between the two clamping edges 21 is adjustable, and the substrate 1 can be clamped only by moving the clamping edge 20 in the loading process, so that the clamping efficiency of the substrate 1 is improved, and the problem of low substrate loading efficiency in the prior art is solved.

In one embodiment, as shown in fig. 4 and 5, the clamping edge portion 20 is composed of a clamping edge 21 and an elastic member 22, the elastic member 22 is disposed in the mounting groove 23 of the clamping edge 21, and finally the substrate 1 is clamped between the two elastic members 22, which not only prevents damage to the substrate 1, but also provides clamping force to the substrate 1 in case the elastic member 22 itself is deformed.

In one embodiment, considering that the substrate 1 is not only rectangular in shape, for example, when the substrate 1 is circular in shape, the bevel-side groove 231 is provided such that the contact area of the substrate 1 with the bevel-side groove 231 is large, thereby ensuring stable clamping of the substrate 1.

In one embodiment, as shown in fig. 1 and 2, the main frame 10 has a cavity in which the clamping edge 20 is located so that the substrate 1 is suspended after clamping the substrate 1. The main frame 10 is formed by combining four side frames, namely an upper side frame 11, a lower side frame 12, a left side frame 13 and a right side frame 14. The frames are positioned and connected by fasteners to form a rectangular cavity.

In one embodiment, as shown in fig. 5 to 7, the oblique groove 231 includes two opposite oblique edges 232, the two oblique edges 232 are spaced apart, and an included angle between the two oblique edges 232 is an obtuse angle; wherein portions of the resilient member 22 abut the two beveled edges 232. The portions of the mounting grooves 23 which are to be in contact with the substrates 1 are provided with the elastic members 22, and the bevel grooves 231 are also in contact with the substrates when the respective substrates 1 are clamped, so that the elastic members 22 are also provided in the bevel grooves 231.

In one embodiment, as shown in fig. 7, the angle between the two oblique sides 232 of the oblique-side groove 231 is an obtuse angle, so that the range of sizes of the substrates 1 to be loaded in the two oblique-side grooves 231 can be increased, i.e., a larger range of sizes of the substrates 1 can be loaded.

In one embodiment, the hypotenuse groove 231 is a through slot. The bevel groove 231 is a tapered hole cut in the middle of the clamping edge 21, and the large end of the tapered hole is disposed opposite to the substrate 1.

In one embodiment, the width of the top wall of the mounting groove 23 is less than the width of the bottom wall of the mounting groove 23; the main frame 10 is provided with scale marks which are provided along the moving direction of the clamping edge 20. The lower edge of the clamping edge 21 for supporting the substrate 1 is to protrude from the upper edge of the clamping edge 21, i.e. the projection of the upper edge on the lower edge is located inside the lower edge, which not only facilitates the loading of the substrate 1, but also is more stable for clamping the substrate 1.

In one embodiment, the upper edge of the clamping edge 21 is provided with a chamfer.

In one embodiment, the mainframe 10 is provided with scale marks to realize accurate identification and positioning of the substrate 1.

In one embodiment, the upper frame 11, the lower frame 12, the left frame 13 and the right frame 14 of the main frame 10 are respectively provided with scale marks to realize accurate positioning of the substrate 1.

In one embodiment, the elastic member 22 is fitted to the mounting groove 23, and the elastic member 22 has a receiving groove conforming to the shape of the mounting groove 23 for receiving a portion of the substrate 1, i.e., an edge portion of the substrate 1, therein.

In one embodiment, the substrate 1 may be rectangular or circular, and the receiving grooves of the two elastic elements 22 are capable of clamping a rectangular or circular substrate. The two elastic elements 22 only clamp and fix two edges of the substrate 1 and do not block the central areas of the upper and lower surfaces of the substrate 1. The elastic element 22 can compensate for a slight positional difference between the clamping and locking actions, so that the substrate 1 can be maintained in a clamped state without an external force.

In one embodiment, as shown in fig. 1 and 2, the carrying mechanism further comprises: the lead screw assembly 30, the lead screw assembly 30 includes the lead screw 31 and lead screw nut pair 32, the lead screw 31 is set on the main frame 10 rotatably, the lead screw nut pair 32 is set on the lead screw 31, and link with clamping edge 21, so that the clamping edge 20 is set on the main frame 10 through the lead screw assembly 30; the screw nut pairs 32 are arranged in pairs, and the two screw nut pairs 32 are respectively connected to the two clamping edges 21 in pairs, so that when the screw 31 rotates, the two screw nut pairs 32 drive the two clamping edges 20 to move in two opposite directions.

In one embodiment, two ends of the screw 31 are rotatably disposed on the left frame 13 and the right frame 14, respectively, and the screw 31 is driven by the external tool 60 to rotate, so that the two screw nut pairs 32 drive the two clamping edges 20 to move symmetrically toward the center or away from the center simultaneously, thereby realizing centering and clamping of substrates 1 with different sizes. Wherein, two screw nut pairs 32 adopt bidirectional positive and negative teeth screw nut pairs to realize the symmetrical movement of the two screw nut pairs 32.

In one embodiment, the screw assembly 30 is mainly used for external power transmission, and the screw assembly 30 mainly comprises a bidirectional positive and negative threaded screw 31, two screw nut pairs 32 and two first sliding blocks 33. Journals at two ends of the screw 31 are fixed on the left frame 13 and the right frame 14 through bearings, the first sliding blocks 33 are fixed on the screw nut pair 32, the screw nut pair 32 is arranged on the screw 31, and the two first sliding blocks 33 are respectively fixed at one end of each of the two clamping edges 21. Two end faces of the screw rod 31 are provided with counter bores matched with the inner hexagonal wrench. In the using process, the head of the allen key (the external tool 60) is inserted into a counter bore of the head of the screw rod, the screw rod 31 is manually rotated, the two clamping edges 21 move towards the center under the driving of the screw rod 31, the stop positions of the clamping edges 21 are judged according to the scale marks on the frame and the actual size of the substrate 1, and the screw rod 31 continues to be rotated after the substrate 1 is placed until the substrate 1 is clamped without looseness.

In one embodiment, as shown in fig. 1 and 2, the carrying mechanism further comprises: an optical axis assembly 40, the optical axis assembly 40 including an optical axis 41 and a linear bearing 42, the optical axis 41 being disposed on the main frame 10, the linear bearing 42 being disposed on the optical axis 41; the screw 31 is arranged parallel to the optical axis 41, the linear bearings 42 are arranged in pairs, the two screw nut pairs 32 and the two linear bearings 42 are arranged in one-to-one correspondence, and the screw nut pairs 32 and the linear bearings 42 are respectively connected with two ends of the clamping edge 21.

In one embodiment, the two ends of the optical axis 41 are disposed on the left frame 13 and the right frame 14, respectively.

In one embodiment, the screw assembly 30 is a power source, the optical axis assembly 40 is a matching assembly, and the two ends of the clamping edge 20 are stably connected to the screw assembly 30 and the optical axis assembly 40 and move under the driving of the screw assembly 30.

In one embodiment, as shown in fig. 2, the screw assembly 30 further includes two first sliders 33 in pairs, the two first sliders 33 in pairs are respectively disposed on the two screw nut pairs 32 in pairs and are used for connecting first ends of the two clamping edges 21 in pairs; the optical axis assembly 40 further includes two second sliders 43 in pairs, and the two second sliders 43 in pairs are respectively disposed on the two linear bearings 42 in pairs and are used for connecting the second ends of the two clamping edges 21 in pairs. Both ends of the clamping edge 21 are connected to the screw nut pair 32 and the linear bearing 42 via the first slider 33 and the second slider 43, respectively, so that when the screw nut pair 32 moves along the screw 31, the first slider 33 transmits the driving force to the second slider 43 via the clamping edge 21, thereby moving the linear bearing 42 along the optical axis 41.

In one embodiment, as shown in fig. 1 and 3, the carrying mechanism further comprises: the reverse locking assembly 50, the reverse locking assembly 50 includes a ratchet 51 and a pawl 52, the ratchet 51 is connected with the lead screw 31, the pawl 52 is rotatably arranged on the main frame 10; wherein the pawl 52 includes a first latch 521 and a second latch 522, the first latch 521 and the second latch 522 selectively engaging with the ratchet 51 to respectively limit the rotation of the ratchet 51 in both directions. The engagement of the ratchet 51 and the pawl 52 is to prevent the lead screw 31 from malfunctioning after the substrate 1 is clamped, which may cause the clamping edge 21 to loosen, thereby causing a problem that the substrate 1 cannot be clamped.

In one embodiment, as shown in FIG. 3, the first stop 521 of the pawl 52 is engaged with the ratchet wheel 51, and the pawl 52 cannot rotate clockwise, thereby avoiding the problem of loosening the clamping edge 21. When the substrate 1 needs to be removed, the pawl 52 is rotated relative to the main frame 10, so that the first stop portion 521 is separated from the ratchet wheel 51, and the lead screw 31 can drive the ratchet wheel 51 to rotate. Accordingly, when second latch 522 is engaged with ratchet 51, pawl 52 cannot rotate in the counterclockwise direction.

In one embodiment, as shown in FIG. 3, reverse locking assembly 50 further comprises: a fixing block 55, the fixing block 55 being disposed on the main frame 10; an elastic member 54, one end of the elastic member 54 abutting against the fixed block 55; and one end of the push rod 53 is abutted against the other end of the elastic member 54, and the other end of the push rod 53 is abutted against the pawl 52. The elastic member 54 is pressed against the fixed block 55 by the push rod 53, so that the elastic member 54 can provide a driving force to the pawl 52, and the pawl 52 is pressed against the ratchet 51 without an external force.

In one embodiment, the reverse locking assemblies 50 are two, and the two reverse locking assemblies 50 are respectively disposed at both ends of the lead screw 31 to simultaneously restrain both ends of the lead screw 31.

In one embodiment, the elastic member 54 is a spring, and the spring is disposed in a sliding groove of the fixing block 55.

The carrying mechanism of one embodiment of the present invention is a substrate carrying mechanism suitable for circular or rectangular substrates of different sizes, and the substrate carrying mechanism mainly includes a main frame 10, a clamping edge portion 20, a lead screw assembly 30, an optical axis assembly 40, and a reverse locking assembly 50. Both ends of the screw assembly 30 and the optical axis assembly 40 are respectively mounted on the main frame 10, and both ends of the clamping edge portion 20 are respectively fixed on corresponding sliders (the first slider 33 and the second slider 43) of the screw assembly 30 and the optical axis assembly 40.

In one embodiment, a square substrate 1 with a length of 30cm, a width of 30cm and a thickness of 2mm is clamped, an external tool 60 drives a screw 31 to rotate, the screw 31 is a bidirectional positive and negative tooth screw, two screw nut pairs 32 matched with the screw 31 move towards the center simultaneously, and a first sliding block 33 arranged on the screw nut pairs 32 and a clamping edge 20 on the first sliding block follow. The interval between the scales on the upper frame 11 and the lower frame 12 is 25mm, when the distance between the two clamping edges 21 is 300mm, the substrate 1 can be placed, and when the substrate is placed, the substrate 1 is centered according to the scale marks on the clamping edges 21. The screw 31 is rotated continuously, and the clamping state of the substrate 1 is judged according to the scale marks on the upper frame 11 and the lower frame 12 and the elastic element 22. The ratchet wheel 51 is driven to rotate while the screw rod 31 rotates, and the directional movement of the screw rod 31 is limited by the ratchet wheel 51, so that the reverse locking effect is achieved, and the reverse locking can be cancelled by switching the direction of the pawl 52.

In one embodiment, a circular substrate 1 with a diameter of 300mm and a thickness of 2mm is clamped, an external tool 60 drives a screw 31 to rotate, the screw 31 is a bidirectional positive and negative thread screw, two screw nut pairs 32 matched with the screw 31 move towards the center simultaneously, and a first slide block 33 arranged on the screw nut pairs 32 and a clamping edge 20 on the first slide block follow. The position of the clamping edge 21 is judged according to the scale marks on the upper frame 11 and the lower frame 12, the circular substrate 1 is placed, and the bevel edge groove 231 clamps the substrate 1. The ratchet wheel 51 is driven to rotate while the screw rod 31 rotates, and the directional movement of the screw rod 31 is limited by the ratchet wheel 51, so that the reverse locking effect is achieved, and the reverse locking can be cancelled by switching the direction of the pawl 52.

The bearing mechanism can clamp substrates with different sizes, and is suitable for clamping circular or rectangular substrates. In addition, after the substrate is installed and clamped, the bearing mechanism has small influence on the effective area of the substrate in processing or detection. The centering clamping of the substrate can be realized under the external force driving, the substrate bearing device is suitable for the substrate bearing of automatic processing or detection equipment, the accurate positioning of the substrate can be realized, and the improvement of the production efficiency by matching with automatic equipment is facilitated.

Other embodiments of the invention will be apparent to those skilled in the art from consideration of the specification and practice of the invention disclosed herein. This invention is intended to cover any variations, uses, or adaptations of the invention following, in general, the principles of the invention and including such departures from the present disclosure as come within known or customary practice within the art to which the invention pertains. It is intended that the specification and exemplary embodiments be considered as exemplary only, with a true scope and spirit of the invention being indicated by the following claims.

It will be understood that the invention is not limited to the precise arrangements described above and shown in the drawings and that various modifications and changes may be made without departing from the scope thereof. The scope of the invention is limited only by the appended claims.