阅读说明：本技术 负载传感器及负载传感器一体式多轴执行器 (Load sensor and load sensor integrated multi-shaft actuator ) 是由 李奎 江口功太郎 于 2018-12-26 设计创作，主要内容包括：本发明提供一种负载传感器,其能够准确地检测施加在对象物上的按压力的负载。该负载传感器用于多轴执行器(10),所述多轴执行器(10)具有：驱动杆(12),其以收纳于外壳(11)的状态沿着轴线方向直线移动；及吸附杆(22),其与驱动杆(12)平行地配置,并与驱动杆(12)同时沿着轴线方向直线移动,且当吸附芯片时,前端部(22a)被压在芯片上,负载传感器包括连结构件(30),其用于连结驱动杆(12)与吸附杆(22),连结构件(30)包括：第1连结部(31),其用于连结驱动杆(12)；第2连结部(32),其用于连结吸附杆(22)；及颈部(33),其设置在第1连结部(31)与第2连结部(32)之间,且相对于第1连结部(31)及第2连结部(32)形成得较细,颈部(33)包括安装在其表面的应变仪(41)～(44)。(The invention provides a load sensor which can accurately detect the load of pressing force applied on an object. The load sensor is used for a multi-axis actuator (10), wherein the multi-axis actuator (10) comprises: a drive lever (12) that moves linearly along the axial direction while being housed in the housing (11); and an adsorption rod (22) which is arranged in parallel with the drive rod (12), moves linearly in the axial direction together with the drive rod (12), and when adsorbing a chip, the leading end portion (22a) is pressed against the chip, the load sensor includes a coupling member (30) for coupling the drive rod (12) and the adsorption rod (22), the coupling member (30) includes: a 1 st coupling section (31) for coupling the drive rod (12); a 2 nd coupling part (32) for coupling the adsorption rod (22); and a neck portion (33) which is provided between the 1 st coupling portion (31) and the 2 nd coupling portion (32) and is formed to be thin relative to the 1 st coupling portion (31) and the 2 nd coupling portion (32), the neck portion (33) including strain gauges (41) to (44) mounted on a surface thereof.)

1. A load cell for a multi-axis actuator, the multi-axis actuator having: a 1 st shaft-like member that moves linearly along an axial direction in a state of being housed in a housing; and a 2 nd shaft-like member which is disposed in parallel with the 1 st shaft-like member, linearly moves in the axial direction simultaneously with the 1 st shaft-like member, and when a predetermined object is sucked, a tip end portion of the 2 nd shaft-like member is pressed against the object,

the load sensor includes a coupling member for coupling the 1 st shaft-like member and the 2 nd shaft-like member;

the connecting member has: a 1 st coupling part for coupling the 1 st shaft-like member; a 2 nd connecting portion for connecting the 2 nd shaft-like member; and a neck portion which is provided between the 1 st coupling portion and the 2 nd coupling portion and is formed to be thin with respect to the 1 st coupling portion and the 2 nd coupling portion,

the neck includes a strain gauge mounted on a surface thereof.

2. The load sensor of claim 1,

the strain gauge is stuck on the surface facing a direction perpendicular to the axial direction of the 1 st and 2 nd shaft-like members in the neck portion.

3. The load sensor according to claim 1 or 2,

the neck portion is formed with a through hole penetrating the neck portion.

4. A load cell integrated multi-axis actuator, comprising:

a 1 st shaft-like member that moves linearly along an axial direction in a state of being housed in a housing;

a 2 nd shaft-shaped member which is disposed in parallel with the 1 st shaft-shaped member, linearly moves in the axial direction simultaneously with the 1 st shaft-shaped member, and has a tip end portion pressed against a predetermined object when the object is sucked; and

a coupling member for coupling the 1 st and 2 nd shaft-like members so that the 1 st and 2 nd shaft-like members linearly move in the axial direction at the same time,

the coupling member includes: a 1 st coupling part for coupling the 1 st shaft-like member; a 2 nd connecting portion for connecting the 2 nd shaft-like member; and a neck portion which is provided between the 1 st coupling portion and the 2 nd coupling portion and is formed to be thin with respect to the 1 st coupling portion and the 2 nd coupling portion,

the neck includes a strain gauge mounted on a surface thereof.

Technical Field

The present invention relates to a load cell and load cell integrated multi-axis actuator (multi-axis actuator) and, for example, to a load cell and load cell integrated multi-axis actuator that detects a pressing force (load) applied to a chip when a tip of a hollow shaft-like member sucks the chip in a pressed state and mounts the chip on a substrate in a multi-axis actuator used as a chip mounter that mounts electronic components (chips) on the substrate.

Background

Conventionally, a linear motor actuator has been used as a multi-axis actuator incorporated in a chip mounter. The linear motor actuator is a member that linearly moves a shaft-like member in an axial direction using a linear thrust generated by a linear motor (see, for example, patent document 1).

(Prior art document)

(patent document)

Patent document 1: JP 2014-18072A.

Disclosure of Invention

(problems to be solved by the invention)

However, in the linear motor actuator described in patent document 1, when the chip is pressed against the tip of the hollow shaft-like member, air is sucked by the vacuum generator and the chip is sucked, but if the pressing force is insufficient, the suction force may be lost, and if the pressing force is too large, the chip may be damaged. That is, in the linear motor actuator, it is necessary to accurately detect the pressing force (load) so that the chip can be pressed with an appropriate pressing force.

In view of the above-described problems, it is an object of the present invention to provide a load sensor and a load-sensor-integrated multi-axis actuator capable of accurately detecting a load of a pressing force applied to an object.

(means for solving the problems)

In order to achieve the above object, a load cell according to the present invention is used for a multi-axis actuator, the multi-axis actuator including: a 1 st shaft-like member that moves linearly along an axial direction in a state of being housed in a housing; and a 2 nd shaft-like member that is disposed in parallel with the 1 st shaft-like member, linearly moves in the axial direction together with the 1 st shaft-like member, and has a tip end portion pressed against a predetermined object when the object is sucked, wherein the load sensor includes a coupling member that couples the 1 st shaft-like member and the 2 nd shaft-like member, the coupling member including: a 1 st coupling part for coupling the 1 st shaft-like member; a 2 nd connecting portion for connecting the 2 nd shaft-like member; and a neck portion that is provided between the 1 st coupling portion and the 2 nd coupling portion, is formed to be thin with respect to the 1 st coupling portion and the 2 nd coupling portion, and includes a strain gauge attached to a surface thereof.

In the present invention, it is preferable that the strain gauge is attached to the surface of the neck portion facing in a direction perpendicular to the axial direction of the 1 st and 2 nd shaft-like members.

In the present invention, the neck portion is preferably formed with a through hole penetrating therethrough.

The load sensor integrated multi-axis actuator of the present invention includes: a 1 st shaft-like member that moves linearly along an axial direction in a state of being housed in a housing; a 2 nd shaft-shaped member which is disposed in parallel with the 1 st shaft-shaped member, linearly moves in the axial direction simultaneously with the 1 st shaft-shaped member, and has a tip end portion pressed against a predetermined object when the object is sucked; and a coupling member that couples the 1 st shaft-like member and the 2 nd shaft-like member so that the 1 st shaft-like member and the 2 nd shaft-like member linearly move in the axial direction at the same time, the coupling member including: a 1 st coupling part for coupling the 1 st shaft-like member; a 2 nd connecting portion for connecting the 2 nd shaft-like member; and a neck portion that is provided between the 1 st coupling portion and the 2 nd coupling portion, that is formed to be thin relative to the 1 st coupling portion and the 2 nd coupling portion, and that includes a strain gauge attached to a surface thereof.

(effect of the invention)

According to the present invention, a load sensor and a load-sensor-integrated multi-axis actuator that can accurately detect a pressing force load applied to an object can be realized.

Drawings

Fig. 1 is an external perspective view showing an entire configuration of a load cell integrated multi-axis actuator according to an embodiment of the present invention.

Fig. 2 is a schematic enlarged perspective view showing an external appearance configuration of the coupling member according to the embodiment of the present invention.

Fig. 3 is a plan view and a side view showing an external appearance configuration of the coupling member according to the embodiment of the present invention.

Fig. 4 is an enlarged perspective view showing a state in which the neck portion of the coupling member according to the embodiment of the present invention is bent.

Fig. 5 is a plan view showing the arrangement of the strain gauge attached to the neck portion of the coupling member according to the embodiment of the present invention.

Detailed Description

< embodiment >

Hereinafter, embodiments of the present invention will be described with reference to the drawings. Fig. 1 is an external perspective view showing an entire configuration of a load cell integrated multi-axis actuator according to an embodiment of the present invention. Fig. 2 is a schematic enlarged perspective view showing an external appearance configuration of the coupling member according to the embodiment of the present invention. Fig. 3 is a plan view and a side view showing an external appearance configuration of the coupling member according to the embodiment of the present invention. Fig. 4 is an enlarged perspective view showing a state in which the neck portion of the coupling member according to the embodiment of the present invention is bent. Fig. 5 is a plan view showing the arrangement of the strain gauge attached to the neck portion of the coupling member according to the embodiment of the present invention.

Integral construction of load sensor integrated multi-shaft actuator

As shown in fig. 1, the load-sensor-integrated multi-axis actuator 10 is used by being incorporated into a chip mounter for mounting an object such as an electronic component (chip) on a substrate.

The load-sensor integrated multi-axis actuator 10 mainly includes: a housing 11 in which, for example, a three-phase motor (not shown) is disposed; a drive lever 12 as a 1 st shaft-like member that is relatively linearly moved in the axial direction by the three-phase motor; an adsorption rod 22 as a 2 nd shaft-shaped member, which is disposed in parallel with the drive rod 12 and adsorbs a chip by its tip; and a coupling member 30 as a load sensor that integrally couples the drive lever 12 and the adsorption lever 22 at the distal end side thereof and is capable of detecting a load when the distal end of the adsorption lever 22 presses the chip.

The housing 11 is a frame made of metal, resin, or the like, which houses the three-phase motor, and holds the drive lever 12 in a state of being relatively linearly movable in the axial direction. The housing 11 holds the drive lever 12 via a holding plate 24 (described later).

Actually, a three-phase coil (not shown) including a U-phase, a V-phase, and a W-phase is disposed around the drive rod 12 inside the housing 11, and when a current flows through the three-phase coil, the drive rod 12 moves linearly in the axial direction with respect to the housing 11.

The drive rod 12 is a columnar rod-shaped member made of metal, resin, or the like, extending in the axial direction, and linearly moves within a predetermined stroke range while being held by the housing 11 via the holding plate 24.

The adsorption rod 22 is a hollow cylindrical member made of metal, resin, or the like, extending in the axial direction, and is disposed parallel to the drive rod 12, and when adsorbing a chip, the tip portion 22a is pressed against the chip. The suction rod 22 is mounted on the housing 26 via a holding plate 24.

The outer diameter of the adsorption rod 22 is a size corresponding to the chip size, which is smaller than the outer diameter of the drive rod 12. However, the outer diameter of the adsorption rod 22 may be larger than the outer diameter of the drive rod 12, or may be substantially equal to the outer diameter.

The suction rod 22 is connected to a vacuum pump or the like, not shown, via a hose or the like. A suction pad (not shown) for sucking the chip may be attached to the distal end 22a of the suction rod 22.

The housing 26 is made of metal, resin, or the like, and is formed with a through hole 26a that supports the adsorption rod 22 so as to be relatively movable in the axial direction, and supports the adsorption rod 22 so as to be movable in the axial direction in accordance with the movement of the drive lever 12 in the axial direction.

The holding plate 24 is formed of metal, resin, or the like, has a rectangular parallelepiped shape, and is integrally attached to both the housing 11 and the case 26. The holding plate 24 supports the drive lever 12 and the adsorption lever 22 to be movable in the axial direction, and prevents the adsorption lever 22 from rotating about the drive lever 12 while maintaining the positional relationship therebetween.

As shown in fig. 2, the coupling member 30 is a substantially rectangular plate-like member made of metal, resin, or the like, and couples and fixes the distal end portion of the drive lever 12 and the distal end portion of the adsorption lever 22. The coupling member 30 prevents the drive lever 12 from being relatively moved in the axial direction with respect to the coupling member 30, and prevents the adsorption lever 22 from being relatively moved in the axial direction with respect to the coupling member 30.

The coupling member 30 includes a drive lever coupling portion 31, an adsorption lever coupling portion 32, and a neck portion 33, and is integrally formed with the drive lever coupling portion 31 as a 1 st coupling portion, which integrally couples and fixes the distal end portion of the drive lever 12 to a surface 31a thereof, the adsorption lever coupling portion 32 as a 2 nd coupling portion, which integrally couples and fixes the adsorption lever 22 in a state of penetrating through the surface 32a thereof, and the neck portion 33, which integrally couples the drive lever coupling portion 31 and the adsorption lever coupling portion 32.

The drive lever coupling portion 31 is a part of the coupling member 30 positioned on an extension line in the axial direction of the drive lever 12, the suction lever coupling portion 32 is a part of the coupling member 30 positioned on an extension line in the axial direction of the suction lever 22, and the neck portion 33 is a part of the coupling member 30 integrally coupling the drive lever coupling portion 31 and the suction lever coupling portion 32, and the part is not positioned on the extension line in the axial direction of the drive lever 12 and the suction lever 22 but extends in a direction perpendicular to the axial direction. The coupling member 30 may be formed by injection molding or cutting.

The drive lever coupling portion 31 is a fixing portion having a substantially cubic shape and fixing the distal end portion of the drive lever 12. The fixing method may be various methods such as screw fixing or fitting by interference fit.

The suction rod coupling portion 32 is a fixing portion having a substantially rectangular parallelepiped shape and fixing the distal end portion 22a of the suction rod 22 in a penetrating state. This fixing method may be various methods such as screw fixing or fitting by interference fit, similar to the drive rod connecting portion 31.

As shown in fig. 2 and 3, the neck portion 33 is a neck-shaped member that is thinner than the drive lever connecting portion 31 and the suction lever connecting portion 32 and connects the drive lever connecting portion 31 and the suction lever connecting portion 32. Hereinafter, the longitudinal direction of the coupling member 30 is defined as a length L, the short-side direction of the coupling member 30 is defined as a width W, and the axial direction of the drive lever 12 and the suction lever 22 of the coupling member 30 is defined as a height T.

The length L3 of the neck portion 33 is shorter than the length L1 of the drive lever link 31 and the length L2 of the suction lever link 32. The width W3 of the neck portion 33 is shorter than the width W1 of the drive lever link portion 31 and the width W2 of the suction lever link portion 32.

The height T3 of the neck 33 is lower than the height T1 of the drive lever link 31 and the height T2 of the suction lever link 32. Further, the neck portion 33 has a through hole 33h having a predetermined inner diameter in the surface thereof along the width direction perpendicular to the axial direction of the drive lever 12 and the suction lever 22.

That is, as shown in fig. 4, the neck portion 33 is thinner than the drive lever coupling portion 31 and the suction lever coupling portion 32, and the neck portion 33 is more easily bent than the drive lever coupling portion 31 and the suction lever coupling portion 32 due to the presence of the through hole 33 h.

As shown in fig. 5(a) and (B), the neck 33 has strain gauges 41 and 42 attached to an upper side surface 33a of the surface thereof, the upper side surface 33a facing the upper direction in which the housing 11 and the case 26 are present, and strain gauges 43 and 44 attached to a lower side surface 33B, the lower side surface 33B facing the lower direction in which the chip to be sucked is present.

The strain gauges 41-44 utilize the following principle: the resistance value changes by the resistance element provided inside expanding and contracting together with the bending (strain) generated by the neck portion 33, and a so-called bridge circuit is configured. In the bridge circuit, the load according to the bending (strain) can be measured based on the voltage change by the resistance elements of the strain gauges 41 to 44.

In this case, in conjunction with the pressing of the drive lever 12, the suction lever 22 is pressed down together with the coupling member 30, and the tip portion 22a of the suction lever 22 is pressed against the chip, and at this time, the reaction force (load) applied to the suction lever coupling portion 32 by the chip becomes a load on the neck portion 33.

At this time, as shown in FIG. 4, only the neck portion 33 is bent by the reaction force of the chip, and therefore, the strain gauges 41 to 44 are attached to the bent portion. The bent portion is thinned by the through hole 33h of the neck portion 33, and functions as a strain generating body.

In the neck portion 33, the strain gauges 41 and 42 are not limited to the upper side surface 33a and the strain gauges 43 and 44 are attached to the lower side surface 33b, and the strain gauges 41 to 44 may be entirely attached to the upper side surface 33a or the lower side surface 33b, and the attachment positions of the strain gauges 41 to 44 to the neck portion 33 are not particularly limited as long as the load applied to the suction rod coupling portion 32 can be accurately measured. The number of the strain gauges attached to the neck portion 33 is not necessarily four, and at least one strain gauge may be attached to the upper side surface 33a or the lower side surface 33 b.

In the above configuration, the load-sensor-integrated multi-axis actuator 10 includes the coupling member 30 as a load sensor, and the strain gauges 41 to 44 are attached to the surface of the neck portion 33, and the neck portion 33 couples the drive rod coupling portion 31 of the coupling member 30 and the suction rod coupling portion 32, and is thinner than the drive rod coupling portion 31 and the suction rod coupling portion 32.

Since the neck portion 33 of the coupling member 30 is less rigid than the drive lever coupling portion 31 and the suction lever coupling portion 32, when the tip portion 22a of the suction lever 22 is pressed against the chip as shown in fig. 4, only the neck portion 33 is bent by a reaction force (load) of the chip against the suction lever coupling portion 32.

In particular, since the portion having a reduced thickness is most easily bent by the through hole 33h of the neck portion 33 and the strain gauges 41 to 44 are attached to the bent portion (strain generating body), the load cell integrated multi-axis actuator 10 can accurately measure the pressing force (load) of the suction rod 22 against the chip by the strain gauges 41 to 44 of the coupling member 30.

< other embodiments >

In the above embodiment, the through hole 33h is formed in the neck portion 33 of the coupling member 30, but the present invention is not limited to this, and the through hole 33h is not necessarily formed in the neck portion 33, and the through hole 33h may not be formed, and the neck portion 33 may be formed thin, so long as the neck portion 33 is bent before the driving lever coupling portion 31 and the suction lever coupling portion 32 when the reaction force of the chip is applied to the suction lever coupling portion 32.

In the above embodiment, the drive lever coupling portion 31 having a substantially cubic shape and the suction lever coupling portion 32 having a substantially rectangular parallelepiped shape have been described, but the present invention is not limited thereto, and the neck portion 33 may be bent first, and may have other various shapes such as a cylindrical shape.

In the above embodiment, length L3 of neck 33 is shorter than length L1 of drive lever link 31 and length L2 of suction lever link 32, width W3 of neck 33 is shorter than width W1 of drive lever link 31 and width W2 of suction lever link 32, and height T3 of neck 33 is lower than height T1 of drive lever link 31 and height T2 of suction lever link 32. However, the present invention is not limited to this, and the height T3 of the neck 33 may be lower than the height T1 of the drive lever link 31 and the height T2 of the suction lever link 32, the length L3 of the neck 33 may be substantially the same as or longer than the length L1 of the drive lever link 31 and the length L2 of the suction lever link 32, and the width W3 of the neck 33 may be substantially the same as or larger than the width W1 of the drive lever link 31 and the width W2 of the suction lever link 32.

While the preferred embodiments of the present invention have been described above, the present invention is not limited to the load-sensor-integrated multi-axis actuator 10 and the coupling member 30 according to the above-described embodiments, and encompasses all aspects included in the concept of the present invention and claims. Further, the respective configurations may be appropriately selected and combined to achieve at least part of the above-described problems and effects. For example, the shape, material, arrangement, size, and the like of each component of the above embodiments may be appropriately changed according to a specific use form of the present invention.

Description of the reference numerals

10 load cell integrated multi-axis actuator; 11 a housing; 12 drive rod (1 st shaft-like member); 22 an adsorption rod (2 nd shaft-like member); 22a front end portion; 24 a retaining plate; 26a housing; 26a through the hole; 30 a connecting member; 31a drive lever link (1 st link); 32a suction rod coupling part (2 nd coupling part); 33 neck portion (strain generating body); 33a upper side; 33b lower side faces; 33h through holes; L1-L3 length; W1-W3 width; height T1-T3; 41-44 strain gauges.