阅读说明：本技术 一种元素检测装置、标样及元素检测装置校准方法 (Element detection device, standard sample and element detection device calibration method ) 是由 任晓艳 于 2018-08-24 设计创作，主要内容包括：本发明提供一种元素检测装置、标样及元素检测装置校准方法,所述元素检测装置的测试台面上设置有检测口,所述测试台面上还设有距离标识,所述距离标识用于标识所述测试台面上的目标点距所述检测口的中心的距离；所述标样的非测试面上设有角度标识,所述角度标识用于标识所述标样上的目标点转动至所述标样上的基准点的角度。这样,通过在元素检测装置上设置距离标识,并在标样上设置角度标识,可以实现将标样上的目标校准点精确对准检测口,从而不仅不易出现校准测试失败的现象,还能保证充分利用标样的测试面,避免造成标样的浪费；且由于元素检测装置得以精确校准,从而能够有效提高使用该元素检测装置进行元素检测时的精确性。(The invention provides an element detection device, a standard sample and an element detection device calibration method, wherein a detection port is arranged on a test table top of the element detection device, a distance mark is also arranged on the test table top and is used for marking the distance from a target point on the test table top to the center of the detection port; and an angle mark is arranged on the non-test surface of the standard sample and used for marking the angle of the target point on the standard sample rotating to the reference point on the standard sample. Thus, by arranging the distance mark on the element detection device and arranging the angle mark on the standard sample, the target calibration point on the standard sample can be accurately aligned to the detection port, so that the phenomenon of calibration test failure is not easy to occur, the test surface of the standard sample can be fully utilized, and the waste of the standard sample is avoided; and because the element detection device can be accurately calibrated, the accuracy of the element detection device in element detection can be effectively improved.)

1. The element detection device is characterized in that a detection port is formed in a test table board of the element detection device, a distance mark is further arranged on the test table board, and the distance mark is used for marking the distance between a target point on the test table board and the center of the detection port.

2. The element detecting device according to claim 1, wherein the distance mark is a mark directed in a direction along a center of the detection port toward an edge of the test table.

3. The element detection device of claim 1 wherein the distance indicia is identified using a scale, arc, line, dot, or color.

4. The element detecting device according to any one of claims 1 to 3, wherein the diameter of the detection port is 2.5mm, and the distance mark is identified with a position where a target point having a distance of 3jmm from the center of the detection port is located, where j is an integer greater than or equal to 1.

5. A standard sample for calibrating the element detection device of any one of claims 1 to 4, the standard sample having an angle marker on a non-test surface thereof, the angle marker being used to identify an angle at which a target point on the standard sample rotates to a reference point on the standard sample.

6. The standard according to claim 5, wherein the angular markings are distributed at the edges of the non-test face of the standard.

7. The standard according to claim 5, wherein the angle markings are marked with a scale, a line, a dot or a color.

8. The standard according to any one of claims 5 to 7, wherein the standard has a diameter of 32mm and the angular markings identify the positions of target points rotated to the reference point by angles of 15k ° and 18k °, respectively, where k is an integer greater than or equal to 1, 15k ° <360 °, 18k ° <360 °.

9. The standard sample according to any one of claims 5 to 7, wherein the non-testing surface of the standard sample is further provided with a ring mark for marking the position of each calibration ring on the standard sample, wherein the distance between adjacent calibration rings is larger than the diameter of the detection port of the element detection device.

10. The standard sample is characterized in that the standard sample is used for calibrating an element detection device, calibration point marks are arranged on a non-test surface of the standard sample and used for marking positions of target calibration points on the standard sample, and the target calibration points are not overlapped.

11. An element detection apparatus calibration method, wherein the element detection apparatus of any one of claims 1 to 4 is calibrated using the standard of any one of claims 5 to 9, the method comprising:

determining a target calibration point on the test surface of the standard sample according to the size of the standard sample and the size of the detection port;

and sequentially moving the target calibration point to a position aligned with the detection port by using the distance mark on the test table surface and the angle mark on the non-test surface of the standard sample so as to perform calibration test on the element detection device.

12. The method of claim 11, wherein determining the target calibration point on the test surface of the standard based on the dimensions of the standard and the size of the detection port comprises:

according to the diameter D of the standard sample₁And the diameter D of the detection port₂Determining the distances from the edge of the standard sample to the test surface of the standard sample to be S₁、S₂、…、S_nTo obtain the diameter R of each calibration loop_nWherein S is_n＝S_edge+D₂/2+(n-1)d，R_n＝D₁-2S_n，S_n<D₁/2-d，d>D₂，S_edgeExcluding distance for the edge of the standard sample, and d is the distance between the calibration loop lines;

determining the angular separation A between the target calibration points on each calibration loop_nAnd obtaining the position of the target calibration point on each calibration loop.

13. The method of claim 12, wherein the first and second light sources are selected from the group consisting of,wherein determining the angular separation A between the target calibration points on each calibration loop_nThe method comprises the following steps:

according to formula A_n＝90°/INT(πR_n/4d), calculating the angular interval A between the target calibration points on each calibration loop_nWherein INT is a floor function.

14. Method according to claim 12 or 13, characterized in that D₁＝32mm，D₂＝2.5mm，d＝3mm，S_edge＝1.75mm。

15. The method of claim 12 or 13, wherein sequentially moving the target calibration point to a position aligned with the detection port using the distance markings on the test table top and the angle markings on the non-test surface of the standard comprises:

using the distance mark on the test table surface and the angle mark on the non-test surface of the standard sample, and based on the calculated S_nAnd A_nSequentially mixing the materials with the diameter of R₁、R₂、…、R_nMoves to a position aligned with the detection port, wherein the diameter is R after each test_nThe calibration loop line of (2) a target calibration point, and rotating the standard sample by an angle A_nEvery time all target calibration points on one calibration loop are tested, the standard sample is moved up by a distance d.

Technical Field

The invention relates to the technical field of detection, in particular to an element detection device, a standard sample and an element detection device calibration method.

Background

Glow Discharge spectroscopy (GD-OES) is a technology for detecting and analyzing solid sample components (such as spray coating, gold-containing coating, semiconductor, organic coating, etc.) based on the principle of Glow Discharge, and the basic principle is as follows: the glow discharge chamber is filled with low-pressure argon, when the voltage applied to the two discharge electrodes reaches a certain value, the energy required for exciting the argon is exceeded, glow discharge can be formed, the discharge gas is dissociated into positive charge ions and free electrons, the positive charge ions bombard the surface of a sample in an accelerating way under the action of an electric field to generate cathode sputtering, in a discharge area, sputtered element atoms and electrons collide with each other and are excited to emit light, the wavelengths of the light emitted by different elements are different, and therefore the concentration of each element can be calculated through the analysis of the spectrum.

Because GD-OES is destructive test, every position on the standard sample can be etched by positive charge ions after once calibration test, therefore, if the position is tested again, the test is failed, and for the transparent standard sample, a tester can easily judge which points on the standard sample belong to the tested points through naked eyes, thereby the problem of test failure is avoided easily. However, for a non-transparent standard (e.g., a metal standard), it is difficult to precisely locate the position on the standard available for testing by naked eyes, and therefore, the test position is overlapped with the previously tested position, so that the test failure is easily caused, for example, the invalid test point 10 shown in fig. 1.

Therefore, the existing calibration test mode is difficult to realize accurate alignment, so that not only the calibration test failure is easily caused, but also the test surface of the standard sample is difficult to be fully utilized, the waste of the standard sample is further caused, and the calibration test cost is increased.

Disclosure of Invention

The embodiment of the invention aims to provide an element detection device, a standard sample and an element detection device calibration method, and solves the problem that the existing calibration test mode is difficult to realize accurate alignment.

In order to achieve the above object, an embodiment of the present invention provides an element detection apparatus, wherein a detection port is disposed on a test table of the element detection apparatus, and a distance identifier is further disposed on the test table, and the distance identifier is used for identifying a distance from a target point on the test table to a center of the detection port.

Optionally, the distance mark is a mark pointing to the edge direction of the test table along the center of the detection port.

Optionally, the distance identifier is identified by a graduated scale, an arc line, a straight line, a dot or a color.

Optionally, the diameter of the detection port is 2.5mm, and the position of a target point with a distance of 3jmm from the center of the detection port is identified on the distance mark, where j is an integer greater than or equal to 1.

The embodiment of the invention also provides a standard sample, which is used for calibrating the element detection device provided by the embodiment of the invention, wherein an angle mark is arranged on the non-test surface of the standard sample, and the angle mark is used for marking the angle of a target point on the standard sample rotating to a reference point on the standard sample.

Optionally, the angle marks are distributed on the edge of the non-test surface of the standard sample.

Optionally, the angle identifier is identified by a graduated scale, a straight line, a dot or a color.

Optionally, the diameter of the standard sample is 32mm, positions of target points rotated to the reference point by 15k ° and 18k ° respectively are marked on the angle mark, where k is an integer greater than or equal to 1, 15k ° <360 °, and 18k ° <360 °.

Optionally, a loop mark is further disposed on the non-test surface of the standard sample, and the loop mark is used to mark the position of each calibration loop on the standard sample, where a distance between adjacent calibration loops is greater than a diameter of the detection port of the element detection device.

The embodiment of the invention also provides a standard sample which is used for calibrating the element detection device, wherein the non-test surface of the standard sample is provided with a calibration point mark, and the calibration point mark is used for marking the position of each target calibration point on the standard sample, wherein each target calibration point is not overlapped.

The embodiment of the invention also provides a calibration method of the element detection device, which is used for calibrating the element detection device provided by the embodiment of the invention by adopting the standard sample provided by the embodiment of the invention, and the method comprises the following steps:

determining a target calibration point on the test surface of the standard sample according to the size of the standard sample and the size of the detection port;

and sequentially moving the target calibration point to a position aligned with the detection port by using the distance mark on the test table surface and the angle mark on the non-test surface of the standard sample so as to perform calibration test on the element detection device.

Optionally, the determining a target calibration point on the test surface of the standard sample according to the size of the standard sample and the size of the detection port includes:

according to the diameter D of the standard sample₁And the diameter D of the detection port₂Determining the distances from the edge of the standard sample to the test surface of the standard sample to be S₁、S₂、...、S_nTo obtain the diameter R of each calibration loop_nWherein S is_n＝S_edge+D₂/2+(n-1)d，R_n＝D₁-2S_n，S_n＜D₁/2-d，d＞D₂，S_edgeExcluding distance for the edge of the standard sample, and d is the distance between the calibration loop lines;

and determining the angle interval An between the target calibration points on each calibration loop to obtain the position of the target calibration point on each calibration loop.

Optionally, the angular interval a between the target calibration points on each calibration loop is determined_nThe method comprises the following steps:

according to formula A_n＝90°/INT(πR_n/4d), calculating the angular interval A between the target calibration points on each calibration loop_nWherein INT is a floor function.

Optionally, D₁＝32mm，D₂＝2.5mm，d＝3mm，S_edge＝1.75mm。

Optionally, the sequentially moving the target calibration point to a position aligned with the detection port by using the distance identifier on the test table and the angle identifier on the non-test surface of the standard sample includes:

using the distance mark on the test table surface and the angle mark on the non-test surface of the standard sample, and based on the calculated S_nAnd A_nSequentially mixing the materials with the diameter of R₁、R₂、…、R_nMoves to a position aligned with the detection port, wherein the diameter is R after each test_nThe calibration loop line of (2) a target calibration point, and rotating the standard sample by an angle A_nEvery time all target calibration points on one calibration loop are tested, the standard sample is moved up by a distance d.

In the embodiment of the invention, the distance mark is arranged on the element detection device, and the angle mark is arranged on the standard sample, so that the target calibration point on the standard sample can be accurately aligned to the detection port, the phenomenon of calibration test failure is not easy to occur, the test surface of the standard sample can be fully utilized, and the waste of the standard sample is avoided; and because the element detection device can be accurately calibrated, the accuracy of the element detection device in element detection can be effectively improved.

Drawings

Fig. 1 is a schematic diagram of an invalid test point on a standard sample according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of a test table provided with distance marks according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a standard sample provided with an angle identifier according to an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a standard sample provided with an angle identifier and a loop identifier according to an embodiment of the present invention;

fig. 5 is a schematic structural diagram of a standard sample provided with calibration point identifiers according to an embodiment of the present invention;

FIG. 6 is a schematic diagram of determining a target calibration point on a standard sample according to an embodiment of the present invention;

FIG. 7a is a schematic diagram of aligning a target calibration point on a standard sample with a detection port of a test platform according to an embodiment of the present invention;

FIG. 7b is a second schematic diagram of aligning the target calibration point on the standard sample with the detection port of the testing platform according to the embodiment of the present invention;

FIG. 7c is a third schematic view of aligning the target calibration point on the standard sample with the detection port of the testing platform according to the embodiment of the present invention;

fig. 7d is a fourth schematic diagram of aligning the target calibration point on the standard sample with the detection port of the testing platform according to the embodiment of the present invention.

Detailed Description

In order to make the technical problems, technical solutions and advantages of the present invention more apparent, the following detailed description is given with reference to the accompanying drawings and specific embodiments.

An embodiment of the present invention provides an element detection apparatus, as shown in fig. 2, a detection port 21 is disposed on a test table 20 of the element detection apparatus, a distance identifier 22 is further disposed on the test table 20, and the distance identifier 22 is used to identify a distance from a target point on the test table 20 to a center of the detection port 21.

In the embodiment of the invention, the element detection device can be a device which is based on the glow discharge principle and can detect and analyze solid sample components (such as spraying, gold-containing coating, semiconductor, organic coating and the like), such as a glow discharge spectrometer.

In this embodiment, as shown in fig. 2, a testing table 20 of the element detecting apparatus is provided with a testing port 21, specifically, the testing port 21 may be provided at the center of the testing table 20; the test table 20 is further provided with a distance identifier 22, the distance identifier 22 is used for identifying a distance from a target point on the test table 20 to a center of the detection port 21, specifically, the distance from the target point on the test table 20 to the center of the detection port 21 may be identified by using a scale, a symbol, or another shape, etc., with the center of the detection port 21 as an origin, and the target point on the test table 20 may be a point on the test table at a preset distance (e.g., 1mm, 3mm, 5mm, etc.) from the center of the detection port 21.

The distance mark 22 may be printed, scribed or sprayed on the test platform 20.

Thus, a tester can align the target calibration point on the target calibration loop on the standard sample to the detection port 21 through the distance mark 22 on the test table 20, so as to perform calibration test on the element detection device by using the target calibration point on the target calibration loop on the standard sample, and can effectively avoid the problem of test failure.

Alternatively, the distance mark 22 is a mark pointing in the direction of the edge of the test stage 20 along the center of the detection port 21.

In this embodiment, as shown in fig. 2, the distance mark 22 may be a mark pointing to the edge of the test table 20 along the center of the detection opening 21, such as: when the test table 20 is circular and the detection port 21 is located at the center of the test table 20, a distance mark 22 may be provided on a radius on the test table 20.

Therefore, only by arranging the distance mark 22 on the testing table board 20 along the direction from the center of the detection port 21 to the edge of the testing table board 20, the position of a target point with the target distance from the center of the detection port 21 on the testing table board 20 can be marked, so that a tester can finish the calibration of the standard sample and the detection port 21 through the distance mark 22, and the distance mark 22 has the simple and attractive effect.

Optionally, the distance indicator 22 is marked by a scale, an arc, a line, a dot or a color.

In this embodiment, the distance indicator 22 can be marked with a graduated scale, for example: the distance mark 22 shown in fig. 2 is marked by means of a graduated scale, and the distance from the center of the detection port 21 at each graduation mark is marked by using graduation marks, specifically, a thin and short graduation mark can be used every 1mm, and a thin and long graduation mark can be used every 5 mm. Thus, the target point with the target distance from the center of the detection port 21 can be conveniently located by the scale on the distance mark.

The distance markers 22 may also be identified by arcs, each of which may represent a radius or diameter of a circle at the arc, so that when the standard is circular, the distance markers may more conveniently and accurately align the edge of the standard with the target arc on the test table 20.

The distance markers 22 can also be marked with lines, dots or colors, for example: the target points on the test table top 20, which are away from the center of the detection port 21 by a preset distance, are marked by straight lines, dots or other shapes, and different target points can be marked by different colors, so that testers can clearly and intuitively distinguish the distances from different target points to the center of the detection port 21 by the different color marks.

Optionally, the diameter of the detection port 21 is 2.5mm, and the distance mark 22 identifies the position of a target point with a distance of 3jmm from the center of the detection port 21, where j is an integer greater than or equal to 1.

Since the diameter of the detection opening of the conventional element detection device is generally about 2.5mm, in this embodiment, the diameter of the detection opening 21 may be 2.5mm, and the position of the target point at a distance of 3jmm from the center of the detection opening 21 may be identified on the distance mark 22, for example: 3mm, 6mm, 9mm and 12mm etc. like this, can make things convenient for the tester to aim at the target point that the distance apart from the center of detecting the mouth 21 on test table surface 20 is 3jmm respectively with the edge of trade sample to the target calibration point on the calibration circular line that is 3mm, 6mm, 9mm and 12mm etc. respectively apart from the edge on the trade sample tests, and can guarantee that the target calibration point that lies in on the different calibration circular lines can not overlap each other.

The element detection device in the embodiment can facilitate a tester to align the target calibration point on the standard sample with the detection port on the test table board through the distance mark by setting the distance mark on the test table board, thereby avoiding the problem of calibration test failure and improving the utilization rate of the standard sample.

As shown in fig. 3, an embodiment of the present invention provides a standard sample 30 for calibrating the element detection apparatus provided in the embodiment shown in fig. 2, an angle marker 31 is disposed on a non-testing surface of the standard sample 30, and the angle marker 31 is used for identifying an angle of a target point on the standard sample 30 rotating to a reference point 32 on the standard sample 30.

In this embodiment, the standard sample may be a standard sample used for calibrating the element detection device provided in the embodiment shown in fig. 2, and is a sample with a generally circular surface that is polished. In order to avoid the detection deviation of the element detecting device caused by the accumulation of the test sample and the contamination of the detecting port, the tester usually needs to calibrate the element detecting device at intervals to ensure the accuracy of the test, and the standard sample needs to be used in each calibration test.

As shown in fig. 3, an angle indicator 31 may be disposed on a non-testing surface of the sample 30, where the angle indicator 31 is used to identify an angle of a target point on the sample 30 rotating to a reference point 32 on the sample 30, where the non-testing surface of the sample 30 is a back surface opposite to the testing surface of the sample 30, specifically, a certain point on the sample 30 may be taken as the reference point 32, that is, a point at 0 °, and then an angle of the target point on the sample 30 rotating to the reference point 32 is identified by using a scale, a symbol, or a color, and the target point on the sample 30 may be a point on the sample 30 rotating to the reference point 32 by a preset angle (e.g., 15 °, 18 °, 30 °, 45 °).

The angle mark 31 may be made on the standard sample 30 by printing, scribing or spraying, and the angle mark 31 may be located on a circular line parallel to or coincident with the edge of the standard sample 30 on the non-testing surface of the standard sample 30.

Thus, a tester can sequentially align the target calibration points on the test surface of the standard sample 30 to the detection ports 21 by combining the angle marks 31 on the non-test surface of the standard sample 30 and the distance marks 22 on the test table surface 20, so as to perform calibration test on the element detection device by using the target calibration points on the standard sample 30, and effectively avoid the problem of test failure caused by overlapping of the test points.

Optionally, the angle marks 31 are distributed on the edge of the non-test surface of the standard 30.

In this embodiment, as shown in fig. 3, the angle markers 31 are distributed on the edge of the non-test surface of the standard sample 30, specifically, the angle markers 31 may be evenly distributed on the edge of the non-test surface of the standard sample 30, such as uniform scale markers, or may be only target points whose angles rotated to the reference points 32 are target angles (e.g., 15 °, 30 °, etc.), which may be angles required in the test.

Thus, because the angle marks 31 are distributed on the edge of the non-testing surface of the standard sample 30, the alignment of the target calibration point on the standard sample 30 and the detection port 21 can be realized more conveniently by the tester through the angle marks 31 and the distance marks 22, and the problem that the target calibration point on the calibration loop line close to the edge on the standard sample 30 is difficult to align due to the fact that the angle marks 31 are far away from the edge of the standard sample 30 is avoided.

Optionally, the angle mark 31 is marked by a scale, a straight line, a dot or a color.

In this embodiment, the angle indicator 31 may be marked by a scale, for example: the angle indicator 31 shown in fig. 3 is a graduated scale, and the angle rotated from each graduation to the reference point 32 is indicated by using graduation lines, specifically, a thin short line indicator may be used every 1 °, a thin long line indicator may be used every 5 °, a thick long line indicator may be used every 90 °, and the position of the reference point 32 (i.e. 0 °) is indicated by using a thick long line indicator. In this way, the target point rotated to the reference point 32 by the target angle can be easily located by the scale on the angle indicator 31.

The angle indicator 31 may also be marked with lines, dots or colors, such as: the angle of rotation to datum point 32 on sample 30 is the target point of presetting the angle and uses straight line, dot or other shapes to sign, to different target points, can also use different colours to sign to make the tester can distinguish the angle that different target points rotated to datum point 32 more clearly and more directly perceivedly through different colour signs.

Optionally, the diameter of the standard sample 30 is 32mm, and positions of target points rotated to the reference point 32 by 15k ° and 18k ° are marked on the angle mark 31, where k is an integer greater than or equal to 1, 15k ° <360 °, and 18k ° <360 °.

Since the diameter of the existing standard sample is generally about 32mm, in this embodiment, the diameter of the standard sample 30 may be 32mm, and the positions of the target points rotated to the reference point 32 by 15k ° and 18k ° are marked on the angle mark 31, where k is an integer greater than or equal to 1, and 15k ° <360, and 18k ° <360 °. Thus, for the calibration loop lines with the distances from the edge to the test surface of the standard sample 30 being 3mm, 6mm, 9mm and 12mm, the rotation angles between the target calibration points on the calibration loop lines are 15 °, 18 °, 30 ° and 45 °, respectively, and the target calibration points of the calibration loop lines on the test surface of the standard sample 30 can be conveniently aligned to the detection port 21 in sequence through the angle markers 31 without overlapping the test points.

Optionally, as shown in fig. 4, a loop mark 33 is further disposed on the non-testing surface of the sample 30, and the loop mark 33 is used to mark the position of each calibration loop on the sample 30, where a distance between adjacent calibration loops is greater than a diameter of the detection opening 21 of the element detection apparatus.

In this embodiment, as shown in fig. 4, a loop mark 33 may be further disposed on the non-testing surface of the standard sample 30, and is used to mark the position of each calibration loop on the standard sample 30, where each calibration loop is used to mark the position of each target calibration point on the standard sample 30, that is, each target calibration point on the standard sample 30 is respectively distributed on each calibration loop, where a distance between adjacent calibration loops is greater than a diameter of the detection port 21 of the element detection device, so as to ensure that the target calibration points on each adjacent calibration loop do not overlap, thereby avoiding calibration test failure.

Specifically, the position of each calibration loop on the test surface of the sample 30 may be determined according to the diameter of the sample 30 and the diameter of the detection port 21 of the element detection device, so as to ensure that the diameter of each calibration loop is as large as possible, and further ensure that as many target calibration points as possible are on the sample 30, so as to fully utilize the sample 30, and the position of the loop mark 33 on the sample 30 may be determined according to the determined position of each calibration loop.

In this embodiment, since the non-testing surface of the standard sample 30 is further provided with the loop line mark 33, when the standard sample 30 is used to calibrate the element detection apparatus, the distance mark 22 on the testing table of the element detection apparatus, and the angle mark 31 and the loop line mark 33 on the non-testing surface of the standard sample 30 can be combined to calibrate the element detection apparatus more conveniently, and specifically, the target calibration points on each calibration loop line marked by the loop line mark 33 can be sequentially aligned to the detection port 21 of the element detection apparatus, so as to complete the calibration of the element detection apparatus.

The standard sample in the embodiment is provided with the angle identification on the non-testing surface of the standard sample, so that a tester can conveniently align the target calibration point on each calibration loop of the standard sample to the detection port on the testing table board through rotating a specific angle through the angle identification, the calibration and test failure problem is further avoided, and the utilization rate of the standard sample is improved.

As shown in fig. 5, an embodiment of the present invention further provides a standard sample 50, which is used for calibrating the element detection apparatus, a calibration point identifier 51 is disposed on a non-test surface of the standard sample 50, and the calibration point identifier 51 is used for identifying a position of each target calibration point on the standard sample 50, where there is no overlap between the target calibration points.

In this embodiment, as shown in fig. 5, calibration point identifiers 51 are disposed on the non-test surface of the standard sample 50 and are used to identify positions of the target calibration points on the standard sample 50, wherein the target calibration points are not overlapped with each other, so as to avoid failure of the calibration test due to the overlapping of the calibration points.

Specifically, the position of each calibration loop on the test surface of the standard sample 30 may be determined first according to the diameter of the standard sample 30 and the diameter of the detection port of the element detection device, and then the position of the target calibration point on each calibration loop is determined, so as to ensure that the diameter of each calibration loop is as large as possible, and ensure that the target calibration points on each calibration loop are as large as possible, thereby ensuring that the standard sample 30 is fully utilized.

In this embodiment, since the calibration point identifier 51 is disposed on the non-test surface of the standard sample 50, when the element detection device is calibrated by using the standard sample 50, the calibration of the element detection device can be conveniently, rapidly and accurately completed only by aligning each target calibration point on the standard sample 50 to the detection port of the element detection device in sequence according to the calibration point identifier 51. It should be noted that, in this embodiment, the distance mark does not need to be arranged on the test table of the element detection apparatus, and the calibration of the element detection apparatus can be completed only by using the calibration point mark 51 on the non-test surface of the standard sample 50.

An embodiment of the present invention further provides a calibration method for an element detection apparatus, where a standard sample provided in the embodiment shown in fig. 3 is used to calibrate the element detection apparatus provided in the embodiment shown in fig. 2, and the method includes:

determining a target calibration point on the test surface of the standard sample according to the size of the standard sample and the size of the detection port;

and sequentially moving the target calibration point to a position aligned with the detection port by using the distance mark on the test table surface and the angle mark on the non-test surface of the standard sample so as to perform calibration test on the element detection device.

In this embodiment, before performing the calibration test, a target calibration point on the standard sample may be determined according to the size of the standard sample and the size of the detection port, where the size of the target calibration point may be consistent with the size of the detection port, and specifically, the position of the calibration loop on the test surface of the standard sample may be determined, for example: the distance between the calibration loop lines can be set to be slightly larger than the diameter of the target calibration point so as to avoid the target calibration points on the adjacent calibration loop lines from overlapping, and the test invalidation caused by uneven grinding and polishing of the edge on the test surface of the standard sample can be avoided, a certain edge distance on the test surface of the standard sample is excluded, the distance from the calibration loop line closest to the edge is determined accordingly, then the distance from the calibration loop line to the edge is determined in sequence from outside to inside, and the position of the calibration loop line on the test surface of the standard sample is obtained.

The position of the target calibration point on each calibration loop may then be determined in turn, for example: setting the distance between the target calibration points on each calibration loop to be slightly larger than the diameter of the target calibration points, dividing the perimeter of each calibration loop by the distance between the set target calibration points to obtain the number of the allowed target calibration points on each calibration loop, and finally dividing the number of the target calibration points by the target angle (such as 90 degrees, 180 degrees, 360 degrees and the like) to determine the relative rotation angle between the target calibration points on each calibration loop.

Thus, by setting a target calibration point on each calibration loop as a reference calibration point, and then according to the relative rotation angle between the target calibration points on each calibration loop, the positions of all the target calibration points on each calibration loop can be determined.

Then, the target calibration points may be sequentially moved to positions aligned with the detection ports by using the distance marks on the test table top and the angle marks on the non-test surface of the standard sample, so as to perform a calibration test on the element detection apparatus, specifically, the target calibration points on one of the calibration loop lines may be sequentially moved to positions aligned with the detection ports, for example: firstly, moving a target calibration point on a calibration loop to a position aligned with the detection port, and then rotating the standard sample by a corresponding angle to align the next adjacent target calibration point with the detection port until all target calibration points on the calibration loop are calibrated and tested; and then sequentially moving the target calibration points on the next calibration loop to the positions aligned with the detection ports until the calibration test of the target calibration points on each calibration loop is finished.

Thus, the target calibration point on the testing surface of the standard sample is determined according to the size of the standard sample and the size of the detection port, and the target calibration point is aligned with the detection port in sequence by using the distance mark on the testing table surface and the angle mark on the non-testing surface of the standard sample. Therefore, when the standard sample is utilized for carrying out calibration test on the element detection device, the phenomenon of failure of the calibration test is not easy to occur, the test surface of the standard sample can be fully utilized, and the waste of the standard sample is avoided.

Optionally, the determining a target calibration point on the test surface of the standard sample according to the size of the standard sample and the size of the detection port includes:

according to the diameter D of the standard sample₁And the diameter D of the detection port₂Determining the distances from the edge of the standard sample to the test surface of the standard sample to be S₁、S₂、...、S_nTo obtain the diameter R of each calibration loop_nWherein S is_n＝S_edge+D₂/2+(n-1)d，R_n＝D₁-2S_n，S_n＜D₁/2-d，d＞D₂，S_edgeExcluding distance for the edge of the standard sample, and d is the distance between the calibration loop lines;

determining the angular separation A between the target calibration points on each calibration loop_nAnd obtaining the position of the target calibration point on each calibration loop.

In this embodiment, the diameter D of the standard sample can be determined₁And the diameter D of the detection port₂Determining the distances from the edge of the standard sample to the test surface of the standard sample to be S₁、S₂、...、S_nCan be in accordance with formula S_n＝S_edge+D₂Calculating the distance of each calibration loop from the edge of the standard sample by 2+ (n-1) d, wherein S_n＜D₁2-d, i.e. S_nMust not exceed D₁/2-d，S_edgeExcluding distances for the edges of the standard sample in order to exclude points on the edges of the test surface of the standard sample which may cause test failures, D is the distance between the calibration loop lines, D > D₂To ensure that the target calibration points on adjacent calibration loops do not overlap.

Determining the distances from the edge of the standard sample to the test surface of the standard sample to be S₁、S₂、...、S_nAfter the calibration loop is performed, the diameter R of each calibration loop can be calculated_nIn particular, R_n＝D₁-2S_nThereby determining the specific position of each calibration loop on the test surface of the standard sample.

The angular separation A between the target calibration points on each calibration loop may then be determined_nIn particular, it can be according to formula A_nθ/INT (not R)_nAnd/4 d), wherein INT is a down-rounding function, and theta can be 90 degrees, 180 degrees, 360 degrees and the like, so as to calculate the angle interval between the target calibration points on the quarter circular arc, the half circular arc and the complete circular arc of the calibration loop line, and further obtain the position of the target calibration point on each calibration loop line.

Thus, in this embodiment, the target calibration points on the test surface of the standard can be determined conveniently and quickly according to the above formula, and as many target calibration points as possible on the test surface of the standard can be determined by setting suitable parameters (e.g., d and 0) to make full use of the standard.

Optionally, the angular interval a between the target calibration points on each calibration loop is determined_nThe method comprises the following steps:

according to formula A_n＝90°/INT(πR_n/4d), calculating the angular interval A between the target calibration points on each calibration loop_nWherein INT is a floor function.

In this embodiment, the formula A can be followed_n＝90°/INT(πR_n/4d), calculating the angular interval A between the target calibration points on each calibration loop_nFor example: as shown in fig. 6, in units of semi-circular arcs, according to formula a_n＝90°/INT(πR_n/4d), respectively calculating the diameter R_nIs measured at a predetermined angle, and the angular interval a between the target calibration points on the calibration loop_nWherein INT is a down-rounding function, such as INT (6.8) ═ 6 and INT (5.2) ═ 5.

Thus, in this embodiment, the formula A can be followed_n＝90°/INT(πR_n/4d) conveniently and rapidly calculating the angle interval A between the target calibration points on each calibration loop_nAnd then the target calibration point on the test surface of the standard sample can be quickly determined.

Optionally, D₁＝32mm，D₂＝2.5mm，d＝3mm，S_edge＝1.75mm。

In this embodiment, D₁＝32mm，D₂＝2.5mm，d＝3mm，S_edge1.75mm, i.e. the diameter of the standard is32mm, when the diameter of the detection port is 2.5mm, the distance between the calibration loop lines can be selected to be 3mm, and the standard sample edge exclusion distance can be selected to be 1.75 mm.

According to the formula S_n＝S_edge+D₂The distances from the four calibration circular lines from the outside to the inside on the test surface of the standard sample to the edge of the standard sample can be calculated to be 3mm, 6mm, 9mm and 12mm respectively according to a formula R_n＝D₁-2S_nThe diameters of the four calibration loop wires can be respectively 26mm, 20mm, 14mm and 8 mm; according to formula A_n＝90°/INT(πR_nAnd/4 d) calculating the angular intervals between the target calibration points on the four calibration loop lines to be 15 °, 18 °, 30 ° and 45 °, respectively.

Thus, in this embodiment, when D₁＝32mm，D₂＝2.5mm，d＝3mm，S_edgeWhen the diameter of each calibration loop line on the test surface of the standard sample is 1.75mm, the diameters of the calibration loop lines on the test surface of the standard sample are respectively 3mm, 6mm, 9mm and 12mm according to a formula, and the angle intervals between the target calibration points on the calibration loop lines are respectively 15 degrees, 18 degrees, 30 degrees and 45 degrees, so that a tester can quickly and accurately align the target calibration points on the test surface of the standard sample by using the distance marks on the test table surface and the angle marks on the non-test surface of the standard sample according to the data.

Optionally, the sequentially moving the target calibration point to a position aligned with the detection port by using the distance identifier on the test table and the angle identifier on the non-test surface of the standard sample includes:

using the distance mark on the test table surface and the angle mark on the non-test surface of the standard sample, and based on the calculated S_nAnd A_nSequentially mixing the materials with the diameter of R₁、R₂、…、R_nMoves to a position aligned with the detection port, wherein the diameter is R after each test_nThe calibration loop line of (2) a target calibration point, and rotating the standard sample by an angle A_nEvery time all target calibration points on one calibration loop are tested, the standard sample is moved up by a distance d.

In this embodiment, the distance mark on the test table and the angle mark on the non-test surface of the standard sample can be used, and the calculated S can be used as the basis_nAnd A_nSequentially mixing the materials with the diameter of R₁、R₂、…、R_nMoves to a position aligned with the detection port, for example: when n is 3, the diameter R may be used first₁The calibration loop line of the detection device is sequentially moved to the position aligned with the detection port, and then the diameter of the target calibration point is R₂Sequentially moving each target calibration point on the calibration loop to a position aligned with the detection port, and finally, moving the target calibration point with the diameter R₃The target calibration points on the calibration loop are sequentially moved to positions aligned with the detection ports.

Wherein, the diameter is R_nThe target calibration points on the calibration loop line may be sequentially moved to the position aligned with the detection port, and the diameter may be R after each test_nThe calibration loop line of (2) rotates the standard sample by an angle A_nUntil said diameter is R_nEach target calibration point on the calibration loop is calibrated and tested; and after testing all the target calibration points on one calibration loop, moving the standard sample up by the distance d until all the target calibration points on the calibration loop are calibrated and tested.

The following describes, by way of example, a calibration method for an element detection apparatus according to an embodiment of the present invention with reference to fig. 7a, 7b, 7c, and 7 d:

let D₁＝32mm，D₂＝2.5mm，d＝3mm，S_edge1.75mm, according to the formula S_n＝S_edge+D₂And 2+ (n-1) d, calculating the distances S from the four calibration circular lines from outside to inside on the test surface of the standard sample to the edge of the standard sample₁、S₂、S₃、S₄3mm, 6mm, 9mm and 12mm, respectively, according to formula A_n＝90°/INT(πR_nAnd/4 d), calculating to obtain each target calibration on four calibration loop lines from outside to inside on the test surface of the standard sampleAngular interval A between points₁、A₂、A₃、A₄15 °, 18 °, 30 °, and 45 °, respectively.

As shown in fig. 7a, 7b, 7c, and 7d, a scale distance mark is provided on the test table 70 of the element detecting apparatus, and an angle mark is provided on the non-test surface of the standard sample 71, as shown in fig. 7a, the edge of the standard sample 71 may be aligned to a scale mark on the test table 70, which is 3mm away from the center of the detection port 72, and then the reference point (position indicated by thick and long lines) on the standard sample 71 may be aligned to the scale distance mark on the test table 70, so as to perform a calibration test on the first target calibration point on the calibration loop line, which is 3mm away from the edge of the standard sample, on the test surface of the standard sample 71.

After testing the first target calibration point on the calibration loop line with the distance of 3mm from the edge of the standard sample on the test surface of the standard sample 71, the standard sample 71 can be rotated 15 degrees anticlockwise to test the next target calibration point on the same calibration loop line, so that each time one target calibration point is tested, the standard sample 71 can be rotated 15 degrees anticlockwise until all the target calibration points on the calibration loop line with the distance of 3mm from the edge of the standard sample on the test surface of the standard sample 71 are tested.

The fiducial mark may then be aligned with the scale distance mark on the test table 70 and the standard 71 moved up 3mm to perform a calibration test on the first target calibration point on the calibration loop at a distance of 6mm from the edge of the standard on the test face of the standard 71, as shown in figure 7 c.

After the first target calibration point on the calibration loop line with the distance of 6mm from the edge of the standard sample on the test surface of the standard sample 71 is tested, the standard sample 71 can be rotated anticlockwise by 18 degrees as shown in fig. 7d so as to test the next target calibration point on the same calibration loop line, and thus, when one target calibration point is tested, the standard sample 71 can be rotated anticlockwise by 18 degrees until the target calibration points on the calibration loop line with the distance of 6mm from the edge of the standard sample on the test surface of the standard sample 71 are all tested.

In a similar manner, the calibration test may be performed on the first target calibration points on the calibration loop at distances of 9mm and 12mm from the edge of the standard sample on the test surface of the standard sample 71, and after the test is completed, the standard sample 71 is rotated counterclockwise by 30 ° and 45 °, respectively, so as to complete the test on the target calibration points on the calibration loop at distances of 9mm and 12mm from the edge of the standard sample on the test surface of the standard sample 71.

According to the element detection device calibration method in the embodiment of the invention, the target calibration point on the test surface of the standard sample can be determined according to the size of the standard sample and the size of the detection port, and because the distance mark is arranged on the test surface of the element detection device and the angle mark is arranged on the non-test surface of the standard sample, the target calibration point and the detection port can be aligned in sequence by utilizing the distance mark on the test surface and the angle mark on the non-test surface of the standard sample. Therefore, when the standard sample is utilized for carrying out calibration test on the element detection device, the phenomenon of failure of the calibration test is not easy to occur, the test surface of the standard sample can be fully utilized, and the waste of the standard sample is avoided.

While the foregoing is directed to the preferred embodiment of the present invention, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the appended claims.