阅读说明：本技术 用于制造设施的带有部件机架系统的折叠梯子 (Folding ladder with component rack system for a manufacturing facility ) 是由 米格尔·本杰明·瓦斯克斯 达明·斯莱文 于 2018-07-06 设计创作，主要内容包括：提供了一种梯子组件,其包括：安装板,所述安装板连接至制造设施中的模块的侧面；折叠梯子,所述折叠梯子包括具有在第一接头处连接至安装板的臂的梯子框架,其中折叠梯子围绕第一接头在降低位置和升高位置之间旋转,降低位置通过将折叠梯子搁置在制造设施的地板上来限定,并且升高位置通过将折叠梯子悬离地板并且悬在模块大致上方来限定；连接至梯子框架的多个台阶板,所述台阶板在折叠梯子处于降低位置时为用户限定台阶面。套筒在折叠梯子的台阶板中的一个下方延伸,以容纳在制造设施中使用的电子设备。(A ladder assembly is provided, comprising: a mounting plate connected to a side of a module in a manufacturing facility; a folding ladder comprising a ladder frame having arms connected to a mounting plate at a first joint, wherein the folding ladder rotates about the first joint between a lowered position and a raised position, the lowered position defined by resting the folding ladder on a floor of a manufacturing facility, and the raised position defined by suspending the folding ladder off the floor and substantially above the module; a plurality of step plates connected to the ladder frame, the step plates defining a step face for a user when the folding ladder is in the lowered position. The sleeve extends under one of the step plates of the folding ladder to accommodate electronic equipment used in the manufacturing facility.)

1. A ladder assembly, comprising:

a mounting plate connected to a side of a module that handles, transfers, stores, and/or processes substrates in a manufacturing facility;

a folding ladder, the folding ladder comprising:

a ladder frame having arms connected to the mounting plate at a first joint, wherein the folding ladder rotates about the first joint between a lowered position and a raised position, the lowered position defined by resting the folding ladder on a floor of the manufacturing facility, and the raised position defined by suspending the folding ladder off the floor and substantially above the module, wherein rotation of the folding ladder from the lowered position to the raised position comprises a center of gravity of the folding ladder moving through a vertical plane that intersects an axis of rotation of the first joint;

a plurality of step plates connected to the ladder frame, the step plates defining a step face for a user when the folding ladder is in the lowered position.

2. The ladder assembly of claim 1, wherein rotation of the folding ladder from the lowered position to the raised position includes movement of the center of gravity of the folding ladder from a position lateral to the module to a position above the module.

3. The ladder assembly of claim 1, further comprising:

a gas spring connected between the mounting plate and the arm, the gas spring configured to apply a tensile force that reduces an amount of force required to raise the folding ladder from the lowered position to the raised position.

4. The ladder assembly of claim 3, wherein the tensile force resists rotation of the folding ladder toward the lowered position when the folding ladder is in the raised position, and wherein the tensile force resists rotation of the folding ladder toward the raised position when the folding ladder is in the lowered position.

5. The ladder assembly of claim 4, wherein the gas spring rotates about a second joint connecting the gas spring and the mounting plate as the folding ladder rotates between the lowered position and the raised position, wherein the second joint is horizontally offset from the first joint connecting the arm to the mounting plate.

6. The ladder assembly of claim 5, wherein as the folding ladder rotates from the lowered position toward the raised position, the tensile force of the gas spring rotates about the second joint from a first side directed toward the first joint, through being directed toward and aligned with the first joint, to a second side directed toward the first joint opposite the first side of the first joint.

7. The ladder assembly of claim 6, wherein the arm includes a body length and a connector defined along the body length, the connector forming the second joint with the gas spring at a location offset from the body length of the arm.

8. The ladder assembly of claim 1, wherein the mounting plate includes a central opening that enables a viewing window defined along the side of the module to be visually viewed.

9. The ladder assembly of claim 1, further comprising:

a sleeve connected to the ladder frame, the sleeve extending below one of the step plates of the folding ladder, the sleeve configured to house electronic equipment used in the manufacturing facility.

10. The ladder assembly of claim 9, wherein the one of the step plates below which the sleeves extend is defined by a substantially transparent material that allows viewing of the electronic equipment.

11. The ladder assembly of claim 10, wherein the electronic equipment includes at least one power source for a process module in the manufacturing facility.

12. The ladder assembly of claim 1, wherein the module is a buffer module of a storage substrate.

13. A ladder assembly, comprising:

a mounting plate connected to a side of a module that handles, transfers, stores, and/or processes substrates in a manufacturing facility;

a folding ladder, the folding ladder comprising:

a ladder frame having an arm connected to the mounting plate at a first joint, wherein the folding ladder rotates about the first joint between a lowered position and a raised position, the lowered position defined by resting the folding ladder on a floor of the manufacturing facility, and the raised position defined by suspending the folding ladder off the floor and substantially above the module, wherein rotation of the folding ladder from the lowered position to the raised position comprises a center of gravity of the folding ladder moving through a vertical plane that intersects an axis of rotation of the first joint;

a plurality of step plates connected to the ladder frame, the step plates defining a step face for a user when the folding ladder is in the lowered position;

a sleeve connected to the ladder frame, the sleeve extending below one of the step plates of the folding ladder, the sleeve configured to house electronic equipment used in the manufacturing facility; a gas spring connected between the mounting plate and the arm, the gas spring configured to apply a tensile force that reduces an amount of force required to raise the folding ladder from the lowered position to the raised position.

14. The ladder assembly of claim 13, wherein the tensile force resists rotation of the folding ladder toward the lowered position when the folding ladder is in the raised position, and wherein the tensile force resists rotation of the folding ladder toward the raised position when the folding ladder is in the lowered position.

15. The ladder assembly of claim 14, wherein the gas spring rotates about a second joint connecting the gas spring and the mounting plate as the folding ladder rotates between the lowered position and the raised position, wherein the second joint is horizontally offset from the first joint connecting the arm to the mounting plate.

16. The ladder assembly of claim 15, wherein as the folding ladder rotates from the lowered position toward the raised position, the tensile force of the gas spring rotates about the second joint from a first side directed toward the first joint, through being directed toward and aligned with the first joint, to a second side directed toward the first joint opposite the first side of the first joint.

17. The ladder assembly of claim 16, wherein the arm includes a body length and a connector defined along the body length, the connector forming the second joint with the gas spring at a location offset from the body length of the arm.

18. The ladder assembly of claim 13, wherein the mounting plate includes a central opening that enables a viewing window defined along the side of the module to be visually viewed.

19. The ladder assembly of claim 13, wherein the one of the step plates below which the sleeves extend is defined by a substantially transparent material that allows viewing of the electronic equipment.

20. The ladder assembly of claim 19, wherein the electronic equipment includes at least one power source for a process module in the manufacturing facility.

Technical Field

Embodiments of the present disclosure relate to a folding ladder (step ladder) for use in a manufacturing facility, and related devices and systems.

Background

Due to the high cost of space in semiconductor manufacturing facilities, manufacturers have sought to maximize space utilization by installing tools and equipment in close proximity to each other. However, equipment that is to be accessed by the manufacturing facility typically requires a worker to use a ladder in order to reach the elevated location. Such ladders must be carried by workers around the floor of the manufacturing facility and can be cumbersome due to tight spacing in the facility and also risk colliding with equipment and generating potentially undesirable particulates.

Summary of The Invention

Embodiments of the present disclosure provide a folding ladder for use in a manufacturing facility. The folding ladder is configured to enable an operator to access equipment in the manufacturing facility, for example, to monitor or service such equipment. The folding ladder is mounted to one side of the module in the manufacturing facility and can be rotated/flipped over the module to properly position (stop) the ladder over the module and to enable access to the area under the module. The folding ladder may be gas spring assisted to facilitate lifting the folding ladder from the manufacturing facility floor, and further may be held in place by an over-center gas spring geometry when lifted and inverted on a module attached thereto. Safety pins may also be used to lock the folding ladder in place.

In some embodiments, a ladder assembly is provided, comprising the following: a mounting plate connected to a side surface of a module that handles, transfers, stores, and/or processes substrates in a manufacturing facility; a folding ladder comprising a ladder frame having arms connected to a mounting plate at a first joint, wherein the folding ladder rotates about the first joint between a lowered position and a raised position, the lowered position defined by resting the folding ladder on a floor of a manufacturing facility, and the raised position defined by suspending the folding ladder off the floor and substantially above the module, wherein rotation of the folding ladder from the lowered position to the raised position comprises a center of gravity of the folding ladder moving through a vertical plane that intersects an axis of rotation of the first joint; a plurality of step plates connected to the ladder frame, the step plates defining a step face for a user when the folding ladder is in the lowered position.

In some embodiments, rotation of the folding ladder from the lowered position to the raised position includes movement of a center of gravity of the folding ladder from a position lateral to the module to a position above the module.

In some embodiments, the ladder assembly further comprises a gas spring connected between the mounting plate and the arm, the gas spring configured to apply a tensile force that reduces an amount of force required to raise the folding ladder from the lowered position to the raised position.

In some embodiments, the tensile force resists rotation of the folding ladder toward the lowered position when the folding ladder is in the raised position, and wherein the tensile force resists rotation of the folding ladder toward the raised position when the folding ladder is in the lowered position.

In some embodiments, as the folding ladder rotates between the lowered position and the raised position, the gas spring rotates about a second joint connecting the gas spring and the mounting plate, wherein the second joint is horizontally offset from a first joint connecting the arm to the mounting plate.

In some embodiments, as the folding ladder is rotated from the lowered position toward the raised position, the tensile force of the gas spring rotates about the second joint, from a first side directed toward the first joint, through a second side directed toward and aligned with the first joint, to the first joint opposite the first side directed toward the first joint.

In some embodiments, the arm includes a body length and a connector defined along the body length that forms a second joint with the gas spring at a location offset from the body length of the arm.

In some embodiments, the mounting plate includes a central opening that enables visual inspection (service visibility access to) of a viewing window defined along a side of the module.

In some embodiments, the ladder assembly further comprises a sleeve connected to the ladder frame, the sleeve extending below one of the step plates of the folding ladder, the sleeve configured to house electronic equipment used in a manufacturing facility.

In some embodiments, one of the step plates with the sleeve extending thereunder is defined by a substantially transparent material that allows viewing of the electronic device.

In some embodiments, an electronic device includes at least one power supply for a process module in a manufacturing facility.

In some embodiments, the module is a buffer module of the storage substrate.

In some embodiments, a ladder assembly is provided, comprising the following: a mounting plate connected to a side of a module that handles, transfers, stores, and/or processes substrates in a manufacturing facility; a folding ladder comprising a ladder frame having arms connected to a mounting plate at a first joint, wherein the folding ladder rotates about the first joint between a lowered position and a raised position, the lowered position defined by resting the folding ladder on a floor of a manufacturing facility, and the raised position defined by suspending the folding ladder off the floor and substantially above the module, wherein rotation of the folding ladder from the lowered position to the raised position comprises a center of gravity of the folding ladder moving through a vertical plane that intersects an axis of rotation of the first joint; a plurality of step plates connected to the ladder frame, the step plates defining a step face for a user when the folding ladder is in the lowered position; a sleeve connected to the ladder frame, the sleeve extending below one of the step plates of the folding ladder, the sleeve configured to house electronic equipment used in a manufacturing facility; a gas spring connected between the mounting plate and the arm, the gas spring configured to apply a tensile force that reduces an amount of force required to raise the folding ladder from the lowered position to the raised position.

In some embodiments, the tensile force resists rotation of the folding ladder toward the lowered position when the folding ladder is in the raised position, and wherein the tensile force resists rotation of the folding ladder toward the raised position when the folding ladder is in the lowered position.

In some embodiments, as the folding ladder rotates between the lowered position and the raised position, the gas spring rotates about a second joint connecting the gas spring and the mounting plate, wherein the second joint is horizontally offset from a first joint connecting the arm to the mounting plate.

In some embodiments, as the folding ladder is rotated from the lowered position toward the raised position, the tensile force of the gas spring rotates about the second joint, from a first side directed toward the first joint, through a second side directed toward and aligned with the first joint, to the first joint opposite the first side directed toward the first joint.

In some embodiments, the arm includes a body length and a connector defined along the body length that forms a second joint with the gas spring at a location offset from the body length of the arm.

In some embodiments, the mounting plate includes a central opening that enables visual viewing of a viewing window defined along a side of the module.

In some embodiments, one of the step plates with the sleeve extending thereunder is defined by a substantially transparent material that allows viewing of the electronic device.

In some embodiments, an electronic device includes at least one power supply for a process module in a manufacturing facility.