阅读说明：本技术 等离子体感测装置、等离子体监测系统和等离子体工艺控制方法 (Plasma sensing device, plasma monitoring system and plasma process control method ) 是由 朴宪勇 裴祥佑 李瑟琪 朱愿暾 于 2019-06-26 设计创作，主要内容包括：一种等离子体监测系统包括执行等离子体工艺的等离子体室、第一等离子体感测装置和第二等离子体感测装置以及控制器。第一等离子体感测装置和第二等离子体感测装置分别位于相对于等离子体室中的监测等离子体平面的中心点彼此垂直的第一水平方向和第二水平方向上。第一等离子体感测装置和第二等离子体感测装置基于在第一水平方向上从监测等离子体平面照射的第一入射光束和在第二水平方向上从监测等离子体平面照射的第二入射光束,产生关于监测等离子体平面的第一检测信号和第二检测信号。控制器通过基于第一检测信号和第二检测信号执行卷积运算来检测关于监测等离子体平面的二维等离子体分布信息,并基于二维等离子体分布信息控制等离子体工艺。(A plasma monitoring system includes a plasma chamber that performs a plasma process, first and second plasma sensing devices, and a controller. The first and second plasma sensing devices are respectively located in first and second horizontal directions perpendicular to each other with respect to a center point of a monitored plasma plane in the plasma chamber. The first and second plasma sensing devices generate first and second detection signals with respect to the monitoring plasma plane based on a first incident light beam irradiated from the monitoring plasma plane in a first horizontal direction and a second incident light beam irradiated from the monitoring plasma plane in a second horizontal direction. The controller detects two-dimensional plasma distribution information about a monitored plasma plane by performing a convolution operation based on the first detection signal and the second detection signal, and controls the plasma process based on the two-dimensional plasma distribution information.)

1. A plasma monitoring system, comprising:

a plasma chamber for performing a plasma process;

a first plasma sensing device located in a first horizontal direction from a center point of a monitoring plasma plane in the plasma chamber, the first plasma sensing device generating a first detection signal with respect to the monitoring plasma plane based on a first incident light beam irradiated from the monitoring plasma plane in the first horizontal direction;

a second plasma sensing device located in a second horizontal direction from the center point of the monitoring plasma plane, the second plasma sensing device generating a second detection signal with respect to the monitoring plasma plane based on a second incident light beam irradiated from the monitoring plasma plane in the second horizontal direction, wherein the second horizontal direction is perpendicular to the first horizontal direction; and

a controller that detects two-dimensional plasma distribution information about the monitored plasma plane by performing a convolution operation based on the first detection signal and the second detection signal, and controls the plasma process based on the two-dimensional plasma distribution information.

2. The plasma monitoring system of claim 1 wherein the first detection signal represents a one-dimensional plasma distribution in the second horizontal direction of the monitored plasma plane and the second detection signal represents a one-dimensional plasma distribution in the first horizontal direction of the monitored plasma plane.

3. The plasma monitoring system of claim 1, wherein each of the first detection signal and the second detection signal comprises:

intensity data representing a one-dimensional overall intensity distribution as a function of position on the monitored plasma plane in each of the first and second horizontal directions; and

spectral data representing a one-dimensional per-wavelength intensity distribution as a function of the location on the monitored plasma plane in each of the first and second horizontal directions.

4. The plasma monitoring system of claim 1, wherein each of the first plasma sensing device and the second plasma sensing device comprises:

a beam receiver that filters each of the first incident beam and the second incident beam to generate a line beam corresponding to the monitored plasma plane;

a splitter that splits the line beam to produce two split line beams;

a one-dimensional detector that generates intensity data based on one of the two split line beams, the intensity data representing a one-dimensional overall intensity distribution as a function of position on the monitored plasma plane in each of the first and second horizontal directions;

a diffraction grating that splits the other of the two split line beams to produce a diffracted beam per wavelength; and

an image sensor that generates spectral data based on the per-wavelength diffracted beam, the spectral data representing a one-dimensional per-wavelength intensity distribution as a function of the location on the monitored plasma plane in each of the first and second horizontal directions.

5. The plasma monitoring system of claim 1, wherein:

the first detection signal comprises first intensity data representing a one-dimensional overall intensity distribution as a function of position on the monitored plasma plane in the second horizontal direction,

the second detection signal includes second intensity data representing a one-dimensional overall intensity distribution according to a position on the monitored plasma plane in the first horizontal direction, and

the controller generates a two-dimensional bulk intensity distribution of bulk gas species in the monitored plasma plane as the two-dimensional plasma distribution information by performing a convolution operation based on the first intensity data and the second intensity data.

6. The plasma monitoring system of claim 1, wherein:

the first detection signal comprises first spectral data representing a one-dimensional per-wavelength intensity distribution as a function of position on the monitored plasma plane in the second horizontal direction,

the second detection signal includes second spectral data representing a one-dimensional per-wavelength intensity distribution according to a position on the monitored plasma plane in the first horizontal direction, and

the controller generates a two-dimensional per-wavelength intensity distribution of each gas species in the monitored plasma plane as the two-dimensional plasma distribution information by performing a convolution operation based on the first spectral data and the second spectral data.

7. The plasma monitoring system of claim 1, wherein the first plasma sensing device comprises:

a first beam receiver that filters the first incident beam to generate a first line beam corresponding to the monitored plasma plane;

a first splitter that splits the first line beam to produce a first split line beam and a second split line beam;

a first one-dimensional detector that generates first intensity data based on the first split line beam, the first intensity data representing a one-dimensional overall intensity distribution as a function of position on the monitored plasma plane in the second horizontal direction; and

a first two-dimensional detector that generates first spectral data based on the second split line beam, the first spectral data representing a one-dimensional per-wavelength intensity distribution as a function of the location on the monitored plasma plane in the second horizontal direction.

8. The plasma monitoring system of claim 7, wherein the first optical beam receiver comprises:

a first lens unit condensing the first incident light beam; and

a first filter having a slit to pass the first ray beam among the converging beams of the first lens unit.

9. The plasma monitoring system of claim 7, wherein the first two-dimensional detector comprises:

a first diffraction grating that splits the second split off-line beam to produce a first per-wavelength diffracted beam; and

a first image sensor that generates first spectral data based on the first per-wavelength diffracted beam.

10. The plasma monitoring system of claim 7, wherein the second plasma sensing device comprises:

a second beam receiver that filters the second incident beam to generate a second line beam corresponding to the monitored plasma plane;

a second splitter that splits the second line beam to produce a third split line beam and a fourth split line beam;

a second one-dimensional detector that generates second intensity data based on the third split off-line beam, the second intensity data representing a one-dimensional overall intensity distribution as a function of position on the monitored plasma plane in the first horizontal direction; and

a second two-dimensional detector that generates second spectral data based on the fourth split line beam, the second spectral data representing a one-dimensional per-wavelength intensity distribution as a function of the location on the monitored plasma plane in the first horizontal direction.

11. The plasma monitoring system of claim 10, wherein the second optical beam receiver comprises:

a second lens unit condensing the second incident light beam; and

a second filter having a slit to pass the second line beam among the condensed beams of the second lens unit.

12. The plasma monitoring system of claim 10, wherein the second two-dimensional detector comprises:

a second diffraction grating that splits the fourth split line beam to produce a second per-wavelength diffracted beam; and

a second image sensor that generates second spectral data based on the second per-wavelength diffracted beam.

13. The plasma monitoring system of claim 1, further comprising:

a third plasma sensing device located in an opposite direction of the first horizontal direction from the center point of the monitoring plasma plane and generating a third detection signal with respect to the monitoring plasma plane based on a third incident light beam irradiated from the monitoring plasma plane in the opposite direction of the first horizontal direction; and

a fourth plasma sensing device located in an opposite direction of the second horizontal direction from the center point of the monitoring plasma plane and generating a fourth detection signal with respect to the monitoring plasma plane based on a fourth incident light beam irradiated from the monitoring plasma plane in the opposite direction of the second horizontal direction.

14. The plasma monitoring system of claim 13, wherein the controller detects a one-dimensional plasma distribution according to a position on the monitored plasma plane in the second direction based on the first detection signal and the third detection signal, and detects a one-dimensional plasma distribution according to a position on the monitored plasma plane in the first direction based on the second detection signal and the fourth detection signal.

15. The plasma monitoring system of claim 1, further comprising:

a third plasma sensing device located in a third horizontal direction from a center point of another monitoring plasma plane having a vertical height different from the monitoring plasma plane and generating a third detection signal with respect to the another monitoring plasma plane based on a third incident light beam irradiated from the another monitoring plasma plane in the third horizontal direction; and

a fourth plasma sensing device located in a fourth horizontal direction from the center point of the other monitored plasma plane and generating a fourth detection signal with respect to the other monitored plasma plane based on a fourth incident light beam irradiated from the other monitored plasma plane in the fourth horizontal direction, wherein the fourth horizontal direction is perpendicular to the third horizontal direction.

16. The plasma monitoring system of claim 15, wherein the controller detects three-dimensional plasma distribution information about a plasma space in the plasma chamber by performing a convolution operation based on the first detection signal and the second detection signal and by performing a convolution operation based on the third detection signal and the fourth detection signal, and controls the plasma process based on the three-dimensional plasma distribution information.

17. The plasma monitoring system of claim 1, further comprising:

a mounting device to which the first and second plasma sensing devices are attached; and

an actuator controlling the vertical position of the mounting device to sequentially vary the vertical height of the monitored plasma plane.

18. The plasma monitoring system of claim 17, wherein the controller detects three-dimensional plasma distribution information about a plasma space in the plasma chamber by performing a convolution operation a plurality of times based on the first and second detection signals corresponding to the sequentially changing vertical heights of the monitored plasma plane, and controls the plasma process based on the three-dimensional plasma distribution information.

19. A plasma sensing device located in a first horizontal direction from a center point of a monitoring plasma plane in a plasma chamber, the plasma sensing device comprising:

a light beam receiver that filters an incident light beam that is illuminated from the monitoring plasma plane in the first horizontal direction to generate a line light beam corresponding to the monitoring plasma plane;

a splitter that splits the line beam to produce two split line beams;

a one-dimensional detector that generates intensity data based on one of the two split line beams, the intensity data representing a one-dimensional overall intensity distribution as a function of position on the monitored plasma plane in a second horizontal direction perpendicular to the first horizontal direction;

a diffraction grating that splits the other of the two split line beams to produce a diffracted beam per wavelength; and

an image sensor that generates spectral data based on the per-wavelength diffracted beam, the spectral data representing a one-dimensional per-wavelength intensity distribution as a function of the location on the monitored plasma plane in the second horizontal direction.

20. A method of controlling a plasma process, the method comprising:

generating a first detection signal with respect to a first horizontal direction based on a first incident light beam irradiated from a monitoring plasma plane in the first horizontal direction from a center point of the monitoring plasma plane;

generating a second detection signal with respect to the second horizontal direction based on a second incident light beam irradiated from the monitoring plasma plane in a second horizontal direction from the center point of the monitoring plasma plane, the second horizontal direction being perpendicular to the first horizontal direction;

detecting two-dimensional plasma distribution information on the monitoring plasma plane by performing a convolution operation based on the first detection signal and the second detection signal; and is

Controlling a plasma process of the plasma chamber based on the two-dimensional plasma distribution information.

Technical Field

Example embodiments relate generally to plasma processing, and more particularly, to a plasma sensing device, a plasma monitoring system including the same, and a method of controlling a plasma process.

Background

Deposition and etching in a plasma environment are the two most common plasma processes used to form patterned layers in integrated circuit fabrication. The key point for successful implementation of these processes is to control the chemistry and impurity levels in the plasma chamber or process chamber. To ensure that the correct amount of film is deposited or etched, it is necessary to monitor the plasma conditions in the process chamber during the plasma process. Optical Emission Spectrometers (OES) are a commercially available device for detecting the presence and relative concentration of various gas species in a plasma chamber. For example, OES may be used to determine process endpoints. However, OES typically provide the bulk plasma characteristics in the plasma chamber, thereby making the sensitivity low.

Disclosure of Invention

According to an exemplary embodiment, a plasma monitoring system includes a plasma chamber, a first plasma sensing device, a second plasma sensing device, and a controller. The plasma chamber performs a plasma process. The first plasma sensing device is located in a first horizontal direction from a center point of a monitoring plasma plane in the plasma chamber, and generates a first detection signal with respect to the monitoring plasma plane based on a first incident light beam irradiated from the monitoring plasma plane in the first horizontal direction. The second plasma sensing device is located in a second horizontal direction from a center point of the monitoring plasma plane, wherein the second horizontal direction is perpendicular to the first horizontal direction, and generates a second detection signal with respect to the monitoring plasma plane based on a second incident light beam irradiated from the monitoring plasma plane in the second horizontal direction. The controller detects two-dimensional plasma distribution information about a monitored plasma plane by performing a convolution operation based on the first detection signal and the second detection signal, and controls the plasma process based on the two-dimensional plasma distribution information.

According to an exemplary embodiment, a plasma sensing device located in a first horizontal direction from a center point of a monitoring plasma plane in a plasma chamber includes: a beam receiver filtering an incident beam irradiated from the monitoring plasma plane in a first horizontal direction to generate a line beam corresponding to the monitoring plasma plane; a splitter for splitting the line beam to produce two split line beams; a one-dimensional detector for generating intensity data based on one of the two split line beams, the intensity data representing a one-dimensional overall intensity distribution according to a position on a monitored plasma plane in a second horizontal direction perpendicular to the first horizontal direction; a diffraction grating for dividing the other of the two split line beams to produce diffracted beams per wavelength; and an image sensor that generates spectral data based on the diffracted light beams per wavelength, the spectral data representing a one-dimensional intensity distribution per wavelength according to a position on the monitored plasma plane in the second horizontal direction.

According to an exemplary embodiment, a method of controlling a plasma process includes: generating a first detection signal with respect to a first horizontal direction based on a first incident light beam irradiated from a monitoring plasma plane in the first horizontal direction from a center point of the monitoring plasma plane; generating a second detection signal with respect to a second horizontal direction based on a second incident light beam irradiated from the monitor plasma plane in a second horizontal direction from a center point of the monitor plasma plane, the second horizontal direction being perpendicular to the first horizontal direction; detecting two-dimensional plasma distribution information on a monitoring plasma plane by performing a convolution operation based on the first detection signal and the second detection signal; and controlling a plasma process of the plasma chamber based on the two-dimensional plasma distribution information.

Drawings

Various features will become apparent to those skilled in the art by describing in detail exemplary embodiments with reference to the attached drawings, wherein:

FIG. 1 shows a diagram of a plasma monitoring system according to an example embodiment.

Fig. 2 illustrates a cross-sectional view of a plasma monitoring system according to an exemplary embodiment.

Fig. 3 illustrates a perspective view of a plasma monitoring system according to an exemplary embodiment.

Fig. 4 shows a plan view of the plasma monitoring system of fig. 3.

Fig. 5 and 6 show side views of the plasma monitoring system of fig. 3.

Fig. 7 shows a perspective view of an exemplary embodiment of a light beam receiver included in a plasma sensing device according to an exemplary embodiment.

Fig. 8 shows a side view of the light beam receiver of fig. 7.

FIG. 9 shows a diagram of a plasma sensing device, according to an example embodiment.

Fig. 10 shows a diagram of an example of intensity data produced by a one-dimensional detector included in a plasma sensing device according to an example embodiment.

Fig. 11 shows a diagram of an example of a spectral image produced by a two-dimensional detector included in a plasma sensing device according to an example embodiment.

Fig. 12 shows a diagram of an example of spectral data generated by a two-dimensional detector included in a plasma sensing device according to an example embodiment.

Fig. 13 shows a flow diagram of a method of controlling a plasma process according to an example embodiment.

Fig. 14 and 15 show diagrams of examples of intensity data produced by a one-dimensional detector included in a plasma sensing device according to an example embodiment.

Fig. 16 shows a diagram of a two-dimensional plasma distribution obtained by a convolution operation based on the data of fig. 14 and 15.

Fig. 17A and 17B show diagrams of examples of spectral data generated by a two-dimensional detector included in a plasma sensing device according to an example embodiment.

Fig. 18 shows a diagram of a two-dimensional plasma distribution obtained by a convolution operation based on the data of fig. 17A and 17B.

Fig. 19, 20, and 21 show perspective views of a plasma monitoring system according to an exemplary embodiment.

Detailed Description

Various exemplary embodiments will be described more fully hereinafter with reference to the accompanying drawings, in which some exemplary embodiments are shown. In the drawings, like numbering represents like elements throughout. Duplicate descriptions may be omitted.

For ease of illustration and description, the exemplary embodiments are described using orthogonal sets of X, Y, and Z axes. The X-axis, Y-axis, and Z-axis are used for three perpendicular directions along the three directions, and are not limited to a specific direction.

The X-direction corresponds to a first horizontal direction, the Y-direction corresponds to a second horizontal direction, and the Z-direction corresponds to a vertical direction. If no exception is given, the Z-direction represents a vertical direction perpendicular to the wafer surface in the plasma chamber or perpendicular to the plane of the monitored plasma. In the present disclosure, X, Y and Z may be used to indicate directions, and alternatively indicate positions or coordinates in the respective directions.

Fig. 1 is a diagram illustrating a plasma monitoring system according to an exemplary embodiment, and fig. 2 is a sectional view of the plasma monitoring system according to an exemplary embodiment. Referring to fig. 1 and 2, the plasma monitoring system 10 may include a plasma chamber 100, a first plasma sensing device PSN 1200, a second plasma sensing device PSN2300, and a controller CTRL 400.

The first plasma sensing device 200 is located in a first horizontal direction X from a center point CP of a monitoring plasma plane MPN in the plasma chamber 100. The second plasma sensing device 300 is located in a second horizontal direction Y from the center point CP of the monitoring plasma plane MPN. In other words, the first plasma sensing device 200 and the second plasma sensing device 300 are positioned perpendicular to each other with respect to the center point CP of the monitoring plasma plane MPN. The observation windows VW1 and VW2 may be provided corresponding to the vertical positions.

The first plasma sensing device 200 generates a first detection signal PDI1 with respect to the monitoring plasma plane MPN based on the first incident light beam BX irradiated from the monitoring plasma plane MPN in the first horizontal direction X. The first detection signal PDI1 may represent a one-dimensional plasma distribution according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y.

The second plasma sensing device 300 generates a second detection signal PDI2 with respect to the monitoring plasma plane MPN based on the second incident light beam BY irradiated from the monitoring plasma plane MPN in the second horizontal direction Y. The second detection signal PDI2 may represent a one-dimensional plasma distribution according to a position X on the monitored plasma plane MPN in the first horizontal direction X.

Each of the first detection signal PDI1 and the second detection signal PDI2 may include intensity data and spectral data. The intensity data may represent a one-dimensional overall intensity distribution according to each of a position X in the first horizontal direction X and a position Y in the second horizontal direction Y on the monitor plasma plane MPN. The spectral data may represent a one-dimensional per-wavelength intensity distribution according to each of a position X in the first horizontal direction X and a position Y in the second horizontal direction Y on the monitoring plasma plane MPN. One-dimensional plasma distributions of the first detection signal PDI1 and the second detection signal PDI2 will be described with reference to fig. 10, 11, and 12.

To provide the first and second detection signals PDI1 and PDI2, each of the first and second plasma sensing devices 200 and 300 can include a beam receiver, a splitter, a one-dimensional detector, and a two-dimensional detector. The two-dimensional detector may include a diffraction grating and an image sensor. These elements will be described with reference to fig. 3 to 6.

The light beam receiver may filter each of the first incident light beam BX and the second incident light beam BY to generate a line beam corresponding to the monitoring plasma plane MPN. The splitter splits the line beam to produce two split line beams. The one-dimensional detector may generate intensity data based on one of the two separate line beams. The intensity data may represent a one-dimensional overall intensity distribution according to each position on the monitored plasma plane MPN in each of the first horizontal direction X and the second horizontal direction Y. The diffraction grating may split the other of the two split line beams to produce a diffracted beam per wavelength. The image sensor may generate spectral data based on each wavelength of the diffracted beam. The spectral data may represent a one-dimensional per-wavelength intensity distribution according to each position on the monitored plasma plane MPN in each of the first horizontal direction X and the second horizontal direction Y.

The controller 400 may detect two-dimensional plasma distribution information about the monitored plasma plane MPN by performing a convolution operation based on the first detection signal PDI1 and the second detection signal PDI 2. The controller may control the plasma process of the plasma chamber 100 based on the two-dimensional plasma distribution information.

In some exemplary embodiments, the first detection signal PDI1 may include first intensity data representing a one-dimensional overall intensity distribution according to position Y on the monitored plasma plane MPN in the second horizontal direction Y, and the second detection signal PDI2 may include second intensity data representing a one-dimensional overall intensity distribution according to position X on the monitored plasma plane MPN in the first horizontal direction X. In this case, the controller 400 may perform a convolution operation based on the first intensity data and the second intensity data, thereby generating a two-dimensional overall intensity distribution of the overall gas species in the monitor plasma plane MPN as two-dimensional plasma distribution information.

In some exemplary embodiments, the first detection signal PDI1 may include first spectral data representing a one-dimensional per-wavelength intensity distribution according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y, and the second detection signal PDI2 may include second spectral data representing a one-dimensional per-wavelength intensity distribution according to a position X on the monitored plasma plane MPN in the first horizontal direction X. In this case, the controller 400 may perform a convolution operation based on the first spectral data and the second spectral data, thereby generating two-dimensional per-wavelength intensity distributions of the respective gas species in the monitoring plasma plane MPN as two-dimensional plasma distribution information.

Accordingly, the plasma sensing device and the plasma monitoring system including the same according to example embodiments may provide two-dimensional or three-dimensional plasma distribution information in real time using orthogonality of detection signals, thereby improving productivity of a plasma process.

As shown in fig. 2, the plasma monitoring system 10 may include a support 110, the support 110 having a lower electrode, an upper electrode 130, and a showerhead 140 included in the plasma chamber 100.

The support 110 may support a target (e.g., a wafer W) within the plasma chamber 100. The support 110 may include a stage having a lower electrode, and the target is disposed on the stage.

In an exemplary embodiment, the plasma monitoring system 10 may be an apparatus that processes plasma on a surface of a target (e.g., a substrate or a wafer W) in the plasma chamber 100 to form dangling bonds on the substrate surface. The plasma generated by the plasma monitoring system 10 may include inductively coupled plasma, capacitively coupled plasma, microwave plasma, and the like.

The plasma chamber 100 may provide a sealed space (e.g., a vacuum sealed space) in which a plasma etching process is performed on the wafer W. The plasma chamber 100 may be a cylindrical vacuum chamber. The plasma chamber 100 may include a lid 102, the lid 102 covering an open upper end portion of the plasma chamber 100. The lid 102 can hermetically seal (e.g., vacuum seal) an upper end portion of the plasma chamber 100.

A door for opening and closing the loading/unloading port of the wafer W may be provided in a sidewall of the plasma chamber 100. Through the door, the wafer W can be loaded/unloaded onto/from the substrate stage.

An exhaust port 104 may be disposed in the bottom of the plasma chamber 100, and an exhaust unit 106 may be connected to the exhaust port 104 through an exhaust line. The exhaust unit 106 may include a vacuum pump (e.g., a turbo molecular pump, etc.) to control the pressure of the plasma chamber 100 so that the process space within the plasma chamber 100 may be depressurized to a desired vacuum level. Additionally, byproducts of the process and residual process gases may be exhausted through an exhaust port 104.

The upper electrode 130 may be located outside the plasma chamber 100 such that the upper electrode 130 faces the lower electrode in the support 110. The upper electrode 130 may be located on the cover 102. Alternatively, the upper electrode 130 may be disposed above the showerhead 140 within the plasma chamber 100 or in an upper portion of the plasma chamber 100.

The upper electrode 130 may include a radio frequency antenna. The radio frequency antenna may have a planar coil shape. The cover 102 may include a dielectric window in the shape of a circular plate. The dielectric window may comprise a dielectric material. For example, the dielectric window can include aluminum oxide (Al)₂O₃). Power from the antenna may be transferred into the plasma chamber 100 through the dielectric window.

For example, the upper electrode 130 may include a coil having a spiral shape or a concentric shape. The coil may generate an inductively coupled plasma P in the space of the plasma chamber 100. The coils may have various configurations in terms of number, arrangement, and the like.

In an exemplary embodiment, the plasma monitoring system 10 may further include a gas supply unit connected to the showerhead to supply gas into the plasma chamber 100. For example, the gas supply unit may include a gas supply line 152, a flow controller 154, and a gas supply source 156. The gas supply line 152 may be connected to an inner space of the showerhead 140 within the plasma chamber 100.

The showerhead 140 may be disposed above the support 110 to face the entire surface of the wafer W, and may inject plasma gas to the surface of the wafer W through the discharge holes 142On the face. For example, the plasma gas may comprise a gas, such as O₂、N₂、Cl₂And the like.

The gas supply 156 may store a plasma gas, which may be supplied into the plasma chamber 100 through a showerhead connected to the gas supply line 152. The flow controller 154 may control the amount of gas supplied into the plasma chamber 100 through the gas supply line 152. For example, flow controller 154 may include a Mass Flow Controller (MFC).

The first power source 131 may apply plasma source power to the upper electrode 130. For example, the first power source 131 may include a source RF power source 134 and a source RF match 132, such as a plasma source element. The source RF power source 134 may generate an RF signal. The source RF matcher 132 may match the impedance of an RF signal generated by the source RF power source 134, for example, using a coil, to control the generation of plasma.

The second power supply 121 may apply bias source power to the lower electrode in the support 100. For example, the second power supply 121 may include a bias RF power source 124 and a bias RF matcher 122. The bias RF power source 124 may generate an RF signal. The bias RF matcher 122 may match the impedance of the bias RF signal by controlling a bias voltage and a bias current applied to the lower electrode. The bias RF power source 124 and the source RF power source 134 may be synchronized with or desynchronized from each other by a synchronizer of the controller 400.

The controller 400 may be connected to the first power source 131 and the second power source 121 to control the operation thereof. The controller 400, having a microcomputer and various interface circuits, may control the operation of the plasma monitoring system 10 based on program and recipe information stored in an external or internal memory.

When radio frequency power having a predetermined frequency is applied to the upper electrode 130, an electromagnetic field induced by the upper electrode 130 is applied to a source gas supplied within the plasma chamber 100 to generate a plasma PLS. When a bias power having a predetermined frequency less than that of the plasma power is applied to the lower electrode, plasma atoms or ions generated within the plasma chamber 100 may be attracted toward the lower electrode of the support 110.

In an exemplary embodiment, the plasma monitoring system 10 may perform a localized plasma process on the surface of the wafer W. The plasma monitoring system 10 can perform plasma processes at different plasma densities along at least a circumferential direction around the center of the surface of the wafer W.

Specifically, the plasma monitoring system 10 may perform processing at a first plasma density in a first direction from the center of the wafer W and at a second plasma density in a second direction oriented at a predetermined angle to the first direction along a circumferential direction around the center of the wafer W.

In the present disclosure, the monitoring plasma plane MPN is a planar portion of the plasma space PLS to be monitored. The monitoring plasma plane MPN can be a very thin space in the form of a plate. The thickness of the monitor plasma plane MPN may be determined according to the performance or resolution of the plasma sensing device. The central point CP of the monitoring plasma plane MPN may overlap and be spaced apart from the center of the wafer W along the vertical direction Z. The monitor plasma plane MPN may extend further along the first horizontal direction X and the second horizontal direction Y than the wafer W.

As shown in fig. 2, the first and second plasma sensing devices 200 and 300 may be disposed at the same height or the same vertical height H in the vertical direction Z as the monitoring plasma plane MPN. In some exemplary embodiments, the vertical height H of the monitoring plasma plane MPN may be fixed. In some exemplary embodiments, the vertical height H of the monitor plasma plane MPN may be varied.

Fig. 3 is a perspective view of a plasma monitoring system according to an exemplary embodiment. Fig. 4 is a plan view of the plasma monitoring system of fig. 3. Fig. 5 and 6 are side views of the plasma monitoring system of fig. 3. For convenience of explanation, the first and second plasma sensing apparatuses 200 and 300 are illustrated in fig. 3 to 6, and other components are omitted.

Referring to fig. 3 to 6, the plasma monitoring system may include a first plasma sensing device 200 and a second plasma sensing device 300.

The first plasma sensing device 200 may include a first light beam receiver 210, a first separator 220, a first one-dimensional detector 230, and a first two-dimensional detector 240.

The first light beam receiver 210 may filter the first incident light beam BX irradiated from the monitoring plasma plane MPN in the first horizontal direction X to generate a first line light beam LBX corresponding to the monitoring plasma plane MPN. First splitter 220 may split first line beam LBX to produce first split line beam LBX1 and second split line beam LBX 2. The first one-dimensional detector 230 may generate first intensity data based on the first split line beam LBX1, wherein the first intensity data represents a one-dimensional overall intensity distribution according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y. The first two-dimensional detector 240 may generate first spectral data based on the second split off-line light beam LBX2, wherein the first spectral data represents a one-dimensional per-wavelength intensity distribution according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y.

The second plasma sensing device 300 may include a second beam receiver 310, a second separator 320, a second one-dimensional detector 330, and a second two-dimensional detector 340.

The second light beam receiver 310 may filter the second incident light beam BY irradiated from the monitoring plasma plane MPN in the second horizontal direction Y to generate the second line light beam LBY corresponding to the monitoring plasma plane MPN. The second splitter 320 may split the second line beam LBY to generate a third split line beam LBY1 and a fourth split line beam LBY 2. The second one-dimensional detector 330 may generate second intensity data based on the third split off-line light beam LBY1, wherein the second intensity data represents a one-dimensional overall intensity distribution according to position X on the monitored plasma plane MPN in the first horizontal direction X. The second two-dimensional detector 340 may generate second spectral data based on the fourth split-line beam LBY2, wherein the second spectral data represents a one-dimensional per-wavelength intensity distribution according to a position X on the monitored plasma plane MPN in the first horizontal direction X.

Fig. 7 is a perspective view of an exemplary embodiment of a light beam receiver included in a plasma sensing device according to an exemplary embodiment, and fig. 8 is a side view of the light beam receiver of fig. 7. As an example, fig. 7 and 8 show the first light beam receiver 210. The second light beam receiver 310 may have the same configuration as the first light beam receiver of fig. 7 and 8.

Referring to fig. 7 and 8, the first beam receiver 210 may include a first lens unit condensing the first incident beam BX and a first filter 215. The first lens unit may include one or more lenses 211, 212, and 213. Lenses 211, 212, and 213 can be various combinations of convex lenses, concave lenses, fresnel lenses, single super lenses (Meta lenses), and the like. The first filter 215 may have a slit to pass the first line beam LBX corresponding to the monitoring plasma plane MPN from the converged line beam of the first lens unit.

The lenses 211, 212, and 213 may have a wide beam acceptance angle in order to receive light corresponding to the diameters Y1 to Y2 of the monitor plasma plane MPN in the second horizontal direction Y. The slit may extend in the second horizontal direction Y and have a thinner width in the vertical direction Z. The length of the slit in the second horizontal direction Y may be determined to correspond to light LT1 and LT1 'irradiated from one end point Y1 of the diameter Y1 to Y2 of the monitor plasma plane MPN and light LT2 and LT 2' irradiated from the other end point Y2 of the diameter Y1 to Y2 of the monitor plasma plane MPN. As shown in fig. 8, the width of the slit in the vertical direction Z may be determined such that light irradiated from the monitoring plasma plane MPN may pass through the slit, and light irradiated from portions located above and below the monitoring plasma plane MPN may be blocked by the first filter 215.

The second light beam receiver 310 may have the same configuration as the first light beam receiver 210 of fig. 7 and 8. That is, the second light beam receiver 310 may include a second lens unit condensing the second incident light beam BY and a second filter. The second lens unit may include one or more lenses, which may be various combinations of convex lenses, concave lenses, fresnel lenses, single superlenses, and the like. The second filter may have a slit to pass a second line beam LBY corresponding to the monitor plasma plane MPN among the condensed beams from the second lens unit.

The lenses of the second lens unit may have a wide beam acceptance angle so as to receive light corresponding to the diameter of the monitoring plasma plane MPN in the first horizontal direction X. The slits of the second filter may extend in the first horizontal direction X and have a thinner width in the vertical direction Z. The length of the slit of the second filter in the first horizontal direction X may be determined to correspond to light irradiated from one end point of the diameter of the monitoring plasma plane MPN in the first horizontal direction X and light irradiated from the other end point of the diameter of the monitoring plasma plane MPN in the first horizontal direction X. As described with reference to fig. 8, the width of the slit of the second filter in the vertical direction Z may be determined such that light irradiated from the monitoring plasma plane MPN may pass through the slit and light irradiated from portions located above and below the monitoring plasma plane MPN may be blocked by the second filter.

By way of example, FIG. 9 illustrates other components of first plasma sensing device 200. The corresponding components of the second plasma sensing device 300 may have the same configuration as the first plasma sensing device 200 of fig. 9.

Referring to fig. 3 to 6 and 9, the first plasma sensing device 200 may further include a first separator 220, a first one-dimensional detector 230, and a first two-dimensional detector 240 in addition to the first beam receiver 210 of fig. 7 and 8.

First splitter 220 may split first line beam LBX to produce first split line beam LBX1 and second split line beam LBX 2. In some exemplary embodiments, the first splitter 220 may be implemented as a beam splitter. A beam splitter is an optical device (e.g., a half mirror, prism, etc.) that transmits one portion of an incident beam and reflects another portion of the incident beam. The portions may have the same intensity or different intensities. The beam splitter may include optics that use birefringence to provide two output beams with perpendicular oscillation directions.

The first one-dimensional detector 230 may generate first intensity data based on the first split line beam LBX1, wherein the first intensity data represents a one-dimensional overall intensity distribution according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y. The first one-dimensional detector 230 may include a line sensor. The line sensors may be implemented as photodetectors or pixels arranged in a row. Also, the line sensor may include two or more rows of pixels. In this case, pixels of the same column are combined to provide information of one coordinate.

The first two-dimensional detector 240 may include a first diffraction grating 241 and a first image sensor 242.

The first diffraction grating 241 may split the second split off-line light beam LBX2 to produce a first per-wavelength diffracted light beam. A diffraction grating is an optical component that separates and diffracts light into light beams that travel in different directions and have different wavelengths. The diffraction grating comprises a plurality of parallel lines or gratings of equal pitch. By using the pitch of the grating and the different diffraction angles according to the wavelength of the incident light beam, the incident light beam can be divided into spectral components, i.e., diffracted light beams corresponding to different wavelengths of the incident light beam.

The first image sensor 242 may generate first spectral data based on the first per-wavelength diffracted light beam, wherein the first spectral data represents a one-dimensional per-wavelength intensity distribution according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y. An image sensor is any device capable of capturing two-dimensional images. As shown in fig. 11, the columns of the two-dimensional image correspond to spectral components, i.e., wavelengths of the diffracted light beams, and the rows of the two-dimensional image correspond to intensity distributions according to horizontal positions for each wavelength.

The second beam receiver 310 may include: a second lens unit configured to condense a second incident light beam BY; and a second filter having a slit to pass a second line beam LBY among the condensed beams from the second lens unit.

The second splitter 320 may split the second line beam LBY to generate a third split line beam LBY1 and a fourth split line beam LBY 2. As described above, the second separator 320 may be implemented as a beam splitter.

The second one-dimensional detector 330 may generate second intensity data based on the third split off-line light beam LBY1, wherein the second intensity data represents a one-dimensional overall intensity distribution according to position X on the monitored plasma plane MPN in the first horizontal direction X. As described above, the second one-dimensional detector 330 may include a line sensor.

The second two-dimensional detector 440 may include a second diffraction grating and a second image sensor. The second diffraction grating may split the fourth split line beam LBY2 to produce a second diffracted beam per wavelength. The second image sensor may generate second spectral data based on the second diffracted light beams per wavelength, wherein the second spectral data represents a one-dimensional intensity distribution per wavelength according to a position X on the monitored plasma plane MPN in the first horizontal direction X.

Fig. 10 illustrates an example of intensity data produced by a one-dimensional detector included in a plasma sensing device according to an example embodiment. Fig. 11 illustrates an example of a spectral image generated by a two-dimensional detector included in a plasma sensing device according to an example embodiment. Fig. 12 shows an example of spectral data generated by a two-dimensional detector included in a plasma sensing device according to an example embodiment.

Fig. 10 shows exemplary intensity data for monitoring the plasma state of the plasma plane MPN. The intensity data represents a one-dimensional overall intensity distribution according to each of the position in the second horizontal direction Y and the position in the first horizontal direction X on the monitor plasma plane MPN.

Fig. 11 shows an exemplary image captured by an image sensor included in a two-dimensional detector. The horizontal line in fig. 11 corresponds to the wavelength of the plasma on the monitored plasma plane MPN. In other words, the horizontal line in fig. 11 corresponds to the intensity distribution per wavelength according to each of the position in the second horizontal direction Y and the position in the first horizontal direction X on the monitoring plasma plane MPN.

Fig. 12 shows spectral data for four main peak wavelengths. In fig. 12, 706.75, 750.75, 777.25, and 811.75 represent nanometer (nm) wavelengths of exemplary four major gas species. In other words, the spectral data of fig. 12 represents the intensity distribution per wavelength according to each of the position in the second horizontal direction Y and the position in the first horizontal direction X on the monitoring plasma plane MPN.

In optical simulations, radiometry based on the overall intensity of an incident light beam and/or photometric measurement based on the color distribution (depending on the wavelength of the incident light beam) can be used to analyze the characteristics of the incident light beam. The results of the radiometric and/or photometric measurements may be obtained from the flux of the gas species.

Fig. 13 is a flowchart illustrating a method of controlling a plasma process according to an example embodiment.

Referring to fig. 13, the first plasma sensing device 200 located in the first horizontal direction X from the center point CP of the monitoring plasma plane MPN in the plasma chamber 100 generates a first detection signal PDI1 with respect to the monitoring plasma plane MPN based on the first incident light beam BX irradiated from the monitoring plasma plane MPN in the first horizontal direction X (S100).

The second plasma sensing device 300, which is located in a second horizontal direction Y from the center point CP of the monitoring plasma plane MPN, generates a second detection signal PDI2 with respect to the monitoring plasma plane MPN based on the second incident light beam BY irradiated from the monitoring plasma plane MPN in the second horizontal direction Y, which is perpendicular to the first horizontal direction X (S200).

Two-dimensional plasma distribution information on the monitored plasma plane MPN may be detected by performing a convolution operation based on the first and second detection signals PDI1 and PDI2 (S300). The convolution operation is disclosed with reference to fig. 16 to 18.

The plasma process of the plasma chamber 100 may be controlled based on the two-dimensional plasma distribution information (S400).

Fig. 14 and 15 are diagrams illustrating examples of intensity data generated by a one-dimensional detector included in a plasma sensing device according to an exemplary embodiment. Fig. 14 shows an example of first intensity data representing a one-dimensional overall intensity distribution according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y. Fig. 15 shows an example of second intensity data representing a one-dimensional overall intensity distribution according to a position X on the monitored plasma plane MPN in the first horizontal direction X. In addition, fig. 14 and 15 show intensity distributions along the Focal Line (FL) of the above-described first beam receiver unit 210.

Fig. 16 is a diagram showing a two-dimensional plasma distribution obtained by a convolution operation based on the data of fig. 14 and 15. The first intensity data of fig. 14 and the second intensity data of fig. 15 may be represented by a function f and a function g, respectively. The functions f and g may be transformed into functions f (x) and g (x) by feature parameter transformation. When the convolution operation of the functions f (x) and g (x) is performed using the orthogonality of the functions f (x) and g (x), a two-dimensional plasma distribution of the monitor plasma plane MPN can be obtained.

As described above, the first detection signal PDI1 may include first intensity data representing a one-dimensional overall intensity distribution according to a position Y on the monitor plasma plane MPN in the second horizontal direction Y, and the second detection signal PDI2 may include second intensity data representing a one-dimensional overall intensity distribution according to a position X on the monitor plasma plane MPN in the first horizontal direction X. In this case, the controller 400 may generate a two-dimensional bulk intensity distribution of bulk gas species in the monitored plasma plane MPN by performing a convolution operation based on the first intensity data of fig. 14 and the second intensity data of fig. 15, as shown in fig. 16.

Fig. 17A and 17B are diagrams illustrating an example of spectral data generated by a two-dimensional detector included in a plasma sensing device according to an exemplary embodiment. Fig. 17A shows an example of first spectral data representing a one-dimensional intensity distribution per wavelength according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y. Fig. 17B shows an example of second spectral data representing a one-dimensional per-wavelength intensity distribution according to a position X on the monitored plasma plane MPN in the first horizontal direction X. In fig. 17A and 17B, 706.75, 750.75, 777.25, and 811.75 represent nanometer (nm) wavelengths of exemplary four major gas species.

Fig. 18 is a diagram showing a two-dimensional plasma distribution obtained by a convolution operation based on the data of fig. 17A and 17B. The first spectral data of fig. 17A and the second spectral data of fig. 17B can be represented by a function f and a function g, respectively, in the same manner as the convolution operation of the intensity data. The functions f and g may be transformed into functions f (x) and g (x) by feature parameter transformation. When the convolution operation of the functions f (x) and G (x1) is performed using the orthogonality of the functions f (x) and G (x), a two-dimensional per-wavelength intensity distribution of the monitoring plasma plane MPN can be obtained.

As described above, the first detection signal PDI1 may include first spectral data representing a one-dimensional per-wavelength intensity distribution according to a position Y on the monitor plasma plane MPN in the second horizontal direction Y, and the second detection signal PDI2 may include second spectral data representing a one-dimensional per-wavelength intensity distribution according to a position X on the monitor plasma plane MPN in the first horizontal direction X. In this case, the controller 400 may generate two-dimensional per-wavelength intensity distributions of the respective gas species in the monitoring plasma plane MPN by performing a convolution operation based on the first spectral data of fig. 17A and the second spectral data of fig. 17B, as shown in fig. 18.

Fig. 19 is a perspective view of a plasma monitoring system according to an exemplary embodiment. For convenience of explanation, components other than the plasma sensing device are omitted in fig. 19.

Referring to fig. 19, a plasma monitoring system 1001 may include a first plasma sensing device 200, a second plasma sensing device 300, a third plasma sensing device 201, and a fourth plasma sensing device 301.

The first plasma sensing device 200 is disposed in a first horizontal direction X from a center point CP of a monitoring plasma plane MPN in the plasma chamber 100, and the second plasma sensing device 300 is disposed in a second horizontal direction Y from the center point CP of the monitoring plasma plane MPN. In other words, the first plasma sensing device 200 and the second plasma sensing device 300 are located at positions perpendicular to each other with respect to the center point CP of the monitoring plasma plane MPN. Viewing windows VW1 and VW2 may be provided at vertical positions.

The third plasma sensing device 201 is located in an opposite direction-X of the first horizontal direction X from the center point CP of the monitoring plasma plane MPN in the plasma chamber 100, and the fourth plasma sensing device 301 is located in an opposite direction-Y of the second horizontal direction Y from the center point CP of the monitoring plasma plane MPN. In other words, the third and fourth plasma sensing devices 201 and 301 are located at positions perpendicular to each other with respect to the central point CP of the monitoring plasma plane MPN.

The first, second, third and fourth plasma sensing devices 200, 300, 201 and 301 are all at the same height in the vertical direction Z as the monitoring plasma plane MPN.

The first plasma sensing device 200 generates a first detection signal with respect to the monitoring plasma plane MPN based on the first incident light beam BX1 irradiated from the monitoring plasma plane MPN in the first horizontal direction X. The first detection signal may represent a one-dimensional plasma distribution according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y.

The second plasma sensing device 300 generates a second detection signal with respect to the monitor plasma plane MPN based on the second incident light beam BY1 irradiated from the monitor plasma plane MPN in the second horizontal direction Y. The second detection signal may represent a one-dimensional plasma distribution according to a position X on the monitored plasma plane MPN in the first horizontal direction X.

The third plasma sensing device 201 generates a third detection signal with respect to the monitoring plasma plane MPN based on the third incident light beam BX2 irradiated from the monitoring plasma plane MPN in the opposite direction-X of the first horizontal direction X. The third detection signal may represent another form of one-dimensional plasma distribution according to the position Y on the monitored plasma plane MPN in the second horizontal direction Y.

The fourth plasma sensing device 301 generates a fourth detection signal with respect to the monitoring plasma plane MPN based on the fourth incident light beam BY2 irradiated from the monitoring plasma plane MPN in the opposite direction-Y of the second horizontal direction Y. The fourth detection signal may represent another form of one-dimensional plasma distribution according to the position X on the monitored plasma plane MPN in the first horizontal direction X.

Accordingly, the first and third detection signals may represent a one-dimensional plasma distribution according to a position Y on the monitor plasma plane MPN in the second horizontal direction Y, and the second and fourth detection signals may represent a one-dimensional plasma distribution according to a position X on the monitor plasma plane MPN in the first horizontal direction X. Using two detection signals for each direction, a more accurate one-dimensional plasma distribution can be obtained.

The controller 400 of fig. 1 may detect a one-dimensional plasma distribution according to a position Y on the monitor plasma plane MPN in the second direction Y based on the first detection signal and the third detection signal. In addition, the controller 400 may detect a one-dimensional plasma distribution according to a position X on the monitor plasma plane MPN in the first direction X based on the second and fourth detection signals.

In the following, exemplary embodiments of a plasma monitoring system for detecting three-dimensional plasma distribution information are described. Fig. 20 and 21 are perspective views of a plasma monitoring system according to an exemplary embodiment. For convenience of explanation, components other than the plasma sensing device are omitted in fig. 20 and 21.

Referring to fig. 20, the plasma monitoring system 1002 may include first, second, third, fourth, fifth and sixth plasma sensing devices 200a, 300a, 200b, 300b, 200c and 300 c. In fig. 20, the first monitor plasma plane MPN1, the second monitor plasma plane MPN2, and the third monitor plasma plane MPN3 have different heights in the vertical direction Z.

The first plasma sensing device 200a generates a first detection signal with respect to the first monitor plasma plane MPN1 based on the first incident light beam BXa irradiated from the first monitor plasma plane MPN1 in the first horizontal direction X. The first detection signal may represent a one-dimensional plasma distribution according to a position Y on the first monitored plasma plane MPN1 in the second horizontal direction Y.

The second plasma sensing device 300a generates a second detection signal with respect to the first monitor plasma plane MPN1 based on the second incident light beam BYa irradiated from the first monitor plasma plane MPN1 in the second horizontal direction Y. The second detection signal may represent a one-dimensional plasma distribution according to a position X on the first monitored plasma plane MPN1 in the first horizontal direction X.

The third plasma sensing device 200b generates a third detection signal with respect to the second monitor plasma plane MPN2 based on the third incident light beam BXb irradiated from the second monitor plasma plane MPN2 in the opposite direction-X of the first horizontal direction X. The third detection signal may represent a one-dimensional plasma distribution according to a position Y on the second monitored plasma plane MPN2 in the second horizontal direction Y.

The fourth plasma sensing device 300b generates a fourth detection signal with respect to the second monitor plasma plane MPN2 based on the fourth incident light beam BYb irradiated from the second monitor plasma plane MPN2 in the opposite direction-Y of the second horizontal direction Y. The fourth detection signal may represent a one-dimensional plasma distribution according to position X on the second monitored plasma plane MPN2 in the first horizontal direction X.

The fifth plasma sensing device 200c generates a fifth detection signal with respect to the third monitor plasma plane MPN3 based on the fifth incident light beam BXc irradiated from the third monitor plasma plane MPN3 in the first horizontal direction X. The fifth detection signal may represent a one-dimensional plasma distribution according to a position Y on the third monitor plasma plane MPN3 in the second horizontal direction Y.

The sixth plasma sensing device 300c generates a sixth detection signal with respect to the third monitor plasma plane MPN3 based on the sixth incident light beam BYc irradiated from the third monitor plasma plane MPN3 in the second horizontal direction Y. The sixth detection signal may represent a one-dimensional plasma distribution according to position X on the third monitored plasma plane MPN3 in the first horizontal direction X.

Fig. 20 shows that the first, second, third, fourth, fifth and sixth plasma sensing devices 200a, 300a, 200b, 300b, 200c and 300c are disposed in the first horizontal direction X, the second horizontal direction Y, the opposite direction-X of the first horizontal direction X and the opposite direction-Y of the second horizontal direction Y. Alternatively, it may be sufficient to have only two plasma sensing devices in the vertical direction.

The controller 400 of fig. 1 may detect two-dimensional plasma distribution information about the first monitor plasma plane MPN1 by performing a convolution operation on the first detection signal and the second detection signal. In addition, the controller 400 may detect two-dimensional plasma distribution information about the second monitor plasma plane MPN2 by performing a convolution operation on the third detection signal and the fourth detection signal. In addition, the controller 400 may detect two-dimensional plasma distribution information about the third monitor plasma plane MPN3 by performing a convolution operation on the fifth detection signal and the sixth detection signal. The two-dimensional plasma distribution information regarding the two or more monitoring plasma planes MPN1, MPN2, and MPN3 may correspond to three-dimensional plasma distribution information.

Accordingly, the controller 400 may detect the three-dimensional plasma distribution information and control the plasma process of the plasma chamber 100 based on the three-dimensional plasma distribution information.

Referring to fig. 21, the plasma monitoring system 1003 may include a first plasma sensing device 200, a second plasma sensing device 300, a mounting device 700, and an actuator 800.

The first plasma sensing device 200 is located in a first horizontal direction X from a center point CP of a monitoring plasma plane MPN in the plasma chamber 100. The second plasma sensing device 300 is located in a second horizontal direction Y from the center point CP of the monitoring plasma plane MPN. In other words, the first plasma sensing device 200 and the second plasma sensing device 300 are located at positions perpendicular to each other with respect to the center point CP of the monitoring plasma plane MPN.

The first plasma sensing device 200 generates a first detection signal with respect to the monitor plasma plane MPN based on the first incident light beam irradiated from the monitor plasma plane MPN in the first horizontal direction X. The first detection signal may represent a one-dimensional plasma distribution according to a position Y on the monitored plasma plane MPN in the second horizontal direction Y.

The second plasma sensing device 300 generates a second detection signal with respect to the monitor plasma plane MPN based on a second incident light beam irradiated from the monitor plasma plane MPN in the second horizontal direction Y. The second detection signal may represent a one-dimensional plasma distribution according to a position X on the monitored plasma plane MPN in the first horizontal direction X.

The first plasma sensing device 200 and the second plasma sensing device 300 are attached to the mounting device 700. The actuator 800 controls the vertical position of the mounting device 700, thereby sequentially changing the vertical height of the monitoring plasma plane MPN to be monitored by the first plasma sensing device 200 and the second plasma sensing device. For example, the actuator 800 may determine the amount of change in the vertical position of the mounting device 700 and the change timing based on the driving signal SDR provided from the controller 400. According to an exemplary embodiment, the actuator 800 may rotate the mounting device 700 about a vertical axis passing through the center point CP of the monitoring plasma plane MPN.

The controller 400 may detect three-dimensional plasma distribution information about a plasma space in the plasma chamber 100 by performing a convolution operation a plurality of times based on first and second detection signals corresponding to sequentially changing vertical heights of the monitoring plasma plane MPN, and may control a plasma process based on the three-dimensional plasma distribution information.