Device for reducing ignition of ion source gas supply pipeline and ion source hydrogen pipeline
阅读说明:本技术 用于减轻离子源供气管路打火的装置与离子源氢气管路 (Device for reducing ignition of ion source gas supply pipeline and ion source hydrogen pipeline ) 是由 侯世刚 于 2019-12-09 设计创作,主要内容包括:本发明涉及一种用于减轻离子源供气管路打火的装置与离子源氢气管路,装置包括浮栅电极头及接地极座。浮栅电极头具有开设有气孔的腔壁,腔壁上设置有若干个紧密排列的浮栅电极柱;接地极座具有开设有气孔的接地面,经由管路绝缘壳结合接地极座与浮栅电极头,使浮栅电极柱容纳于由管路绝缘壳、接地面与腔壁构成的腔室中,且浮栅电极柱的悬浮端部与接地极座的接地面之间形成有促使打火的间隙距离,以预先释放掉所述第一气体管路中的集聚电荷。本发明具有针对离子源设备附加装置防止在后端管路打火放电的效果。(The invention relates to a device for reducing the ignition of an ion source gas supply pipeline and an ion source hydrogen pipeline. The floating gate electrode head is provided with a cavity wall provided with an air hole, the cavity wall is provided with a plurality of floating gate electrode columns which are tightly arranged, the grounding electrode seat is provided with a grounding surface provided with the air hole, the grounding electrode seat and the floating gate electrode head are combined through the pipeline insulating shell, so that the floating gate electrode columns are accommodated in a cavity formed by the pipeline insulating shell, the grounding surface and the cavity wall, and a gap distance for promoting ignition is formed between the suspension end part of the floating gate electrode column and the grounding surface of the grounding electrode seat so as to release accumulated charges in the first gas pipeline in advance. The invention has the effect of preventing the sparking discharge of the back end pipeline aiming at the ion source equipment additional device.)
1. An apparatus for mitigating arcing in an ion source gas supply line, comprising:
a floating gate electrode tip (10) having a cavity wall (11), the cavity wall (11) being opened with a first air hole (12) for communicating with a first gas pipeline (31), the cavity wall (11) of the floating gate electrode tip (10) being provided with a plurality of floating gate electrode pillars (13) arranged closely, and,
the grounding electrode holder (20) is provided with a grounding surface (21), a second air hole (22) is formed in the grounding surface (21) and used for being communicated with a second gas pipeline (32), and a pipeline insulating shell (40) is arranged between the grounding electrode holder (20) and the floating gate electrode head (10);
wherein the floating gate electrode column (13) is accommodated in a cavity formed by the pipeline insulating shell (40), the ground plane (21) and the cavity wall (11) by combining the grounding electrode holder (20) and the floating gate electrode head (10) through the pipeline insulating shell (40), and the depth of the pipeline insulating shell (40) in the length direction of the pipeline on the ground plane (21) is slightly larger than the height of the floating gate electrode column (13) on the cavity wall (11), so that a gap distance for promoting ignition is formed between the floating end part (14) of the floating gate electrode column (13) and the ground plane (21) of the grounding electrode holder (20), so as to release accumulated charges in the first gas pipeline (31) in advance.
2. The apparatus for mitigating arcing of an ion source gas supply line according to claim 1, wherein the second gas line (32) is a ground connection that is not directly electrically connected to the ground plane (21).
3. The apparatus for mitigating the ion source gas supply pipe sparking of claim 1, wherein a gap distance formed between the floating gate electrode column (13) floating end portion (14) and the ground plane (21) of the ground electrode holder (20) is smaller than a pipe inner diameter of the second gas pipe (32).
4. The apparatus for mitigating the ion source gas supply line sparking of claim 1, wherein the gap of the floating gate electrode column (13) is larger than a gap distance formed between the floating end portion (14) of the floating gate electrode column (13) and the ground plane (21) of the ground electrode holder (20) and smaller than a tube inner diameter of the first gas line (31).
5. The apparatus for mitigating arcing in an ion source gas supply line according to claim 1, wherein the floating gate electrode columns (13) are arranged in a square matrix arrangement or a hexagonal matrix arrangement at equal intervals on the chamber wall (11).
6. The apparatus for mitigating the arcing in the ion source gas supply line as set forth in claim 1, wherein the floating gate electrode column (13) is semi-floating gate connected or disconnected from an external power source.
7. The apparatus for mitigating the arcing in the ion source gas supply line according to any one of claims 1 to 6, wherein the chamber wall (11) is electrically connected to the floating gate electrode column (13) to have the same potential.
8. The apparatus according to claim 7, wherein the first air hole (12) is located at a first corner (51) adjacent to the chamber wall (11), the second air hole (22) is located at a second corner (52) adjacent to the ground plane (21), and the first corner (51) and the second corner (52) are offset from each other.
9. An ion source hydrogen circuit comprising an apparatus for mitigating arcing in an ion source gas supply line as claimed in any one of claims 1 to 8.
10. The ion source hydrogen circuit according to claim 9, wherein said first gas circuit (31) is connected to a negative hydrogen ion source device.
Technical Field
The invention relates to the technical field of additional devices of ion source equipment, in particular to a device for reducing ignition of an ion source gas supply pipeline and an ion source hydrogen pipeline.
Background
The application of ions is more and more important for human life, and corresponding types of ion accelerators are required to be used for emitting proton plasma beams in the applications of treatment, biological conditioning, film coating, implanted film modification, static elimination and the like, and the core device of the ion accelerator is ion source equipment for extracting particle flow at high voltage. In general, a large amount of charges are accumulated in the ion source equipment to generate a spark phenomenon, and the spark may damage an attachment connected to the ion source equipment and even other system equipment connected to the ion source equipment along a gas supply pipeline, cause damage to the attachment or the system equipment, and reduce the use efficiency of the ion source.
In a specific industrial application, for example, a negative hydrogen ion source is often used in therapeutic and bio-conditioning, in order to generate a negative hydrogen particle beam, hydrogen gas and high voltage are required to be supplied to the negative hydrogen ion source, the negative hydrogen particles are lighter in weight and negatively charged compared to other ions, a large amount of charges are more easily accumulated in a hydrogen supply pipeline connected to the negative hydrogen ion source, and there is a greater possibility that an ignition phenomenon is generated in the hydrogen supply pipeline, which may damage an additional device or other system equipment connected to the ion source.
Chinese patent application publication No. CN106683970A discloses an ignition-proof dc ion source for continuous deposition of insulating material, comprising an ion optical assembly, wherein the ion optical assembly comprises a screen grid, an acceleration grid and an ignition-proof grid which are sequentially arranged and aligned with each other in grid holes, positive voltage is applied on the screen grid, negative voltage is applied on the acceleration grid, and the ignition-proof grid is grounded. The purpose of the arrangement is mainly to prevent sparking from occurring on the surface of the grid of the internal equipment of the ion source.
The same applicant discloses a focusing electrode of an ion source for an isotope electromagnetic separator in Chinese patent No. CN106422776B, wherein an extraction electrode of the ion source comprises an extraction slit electrode and a grounding electrode, and the extraction slit electrode is close to an arc discharge chamber; the focusing electrode is arranged between the lead-out seam electrode and the grounding electrode and comprises a supporting plate and a seam panel arranged on the supporting plate, the seam panel is provided with a lead-out seam for leading out ion beams, and the seam panel is made of high-purity graphite to reduce dark current and ignition frequency. The purpose of the arrangement is mainly to prevent the sparking phenomenon from occurring in the focusing electrode of the ion source of the isotope electromagnetic separator in the internal equipment of the ion source.
Disclosure of Invention
One of the objectives of the present invention is to provide a device for reducing the sparking of the ion source gas supply pipeline, so as to solve the problem that the sparking in the ion source gas supply pipeline causes damage to the additional device of the ion source equipment or the system equipment connected with the additional device, and reduces the use efficiency of the ion source.
Another objective of the present invention is to provide a hydrogen pipeline of an ion source, which is used to release the accumulated charges in the gas supply pipeline without damaging the equipment even if the gas supply pipeline is ignited.
One of the purposes of the invention is realized by the following technical scheme:
a device for reducing the sparking of an ion source gas supply pipeline comprises a floating gate electrode tip and a grounding electrode seat. The floating gate electrode head is provided with a cavity wall, the cavity wall is provided with a first air hole for communicating a first gas pipeline, the cavity wall of the floating gate electrode head is provided with a plurality of floating gate electrode columns which are closely arranged, the grounding electrode seat is provided with a grounding surface, the grounding surface is provided with a second air hole for communicating a second gas pipeline, and a pipeline insulating shell is arranged between the grounding electrode seat and the floating gate electrode head. The floating gate electrode column is accommodated in a cavity formed by the pipeline insulating shell, the grounding surface and the cavity wall by combining the grounding electrode holder and the floating gate electrode tip through the pipeline insulating shell, and the depth of the pipeline insulating shell in the length direction of the pipeline on the grounding surface is slightly larger than the height of the floating gate electrode column on the cavity wall, so that a gap distance for promoting ignition is formed between the floating end part of the floating gate electrode column and the grounding surface of the grounding electrode holder, and accumulated charges in the first gas pipeline are released in advance.
By adopting the technical scheme, by utilizing the design of the cavity between the pipelines, a gap distance for promoting ignition is formed between the floating end part of the floating gate electrode column and the grounding surface of the grounding electrode seat, accumulated charges in the gas pipeline are released in the cavity of the device in advance, and the controllable degree of the ignition position without damage or damage reduction is changed.
The present invention in a preferred example may be further configured to: the second gas line is a ground connection that is not directly electrically connected to the ground plane.
By adopting the above preferred technical scheme, the second gas pipeline is in ground connection without being directly electrically connected with the ground plane, so that the second gas pipeline has the effect of releasing residual charges and does not interfere with the ground electrode holder.
The present invention in a preferred example may be further configured to: a gap distance formed between the floating end of the floating gate electrode pillar and the ground plane of the ground electrode holder is smaller than the pipe inner diameter of the second gas pipe.
By adopting the technical scheme, the gap distance formed between the suspension end part and the grounding surface is smaller than the inner diameter of the pipe of the gas pipeline, so that the inner chamber of the device has higher ignition preference than the gas pipeline.
The present invention in a preferred example may be further configured to: the gap of the floating gate electrode column is larger than the gap distance formed between the floating end of the floating gate electrode column and the grounding surface of the grounding electrode holder and smaller than the pipe inner diameter of the first gas pipeline.
By adopting the technical scheme, the gap configuration mode of the floating gate electrode column is utilized, so that the charge accumulation in the gap between the bottom of the floating gate electrode column and the column before ignition is facilitated, and the potential difference between the floating gate electrode column and the grounding surface is enlarged.
The present invention in a preferred example may be further configured to: the floating gate electrode columns are arranged on the cavity wall in a square matrix arrangement or a hexagonal matrix arrangement at equal intervals.
By adopting the technical scheme, more floating gate electrode columns can be arranged on the cavity wall by utilizing the matrix arrangement of the floating gate electrode columns, so that the controllable ignition of the floating gate electrode columns at the suspension end part is induced.
The present invention in a preferred example may be further configured to: the floating gate electrode column is connected with or not connected with an external power supply through a semi-floating gate.
By adopting the technical scheme, the floating gate electrode column is connected with a semi-floating gate or is not connected with an external power supply, so that the potential of the floating gate electrode column is adjusted or determined by the accumulated charge quantity in the chamber, and the ignition problem optimization without extra management cost in the ion acceleration process is achieved.
In a preferred example combining any of the above technical solutions, the present invention may be further configured to: the cavity wall is electrically connected with the floating gate electrode column and has the same potential.
By adopting the technical scheme, the cavity wall is in conductive connection with the floating gate electrode column, so that the contact area of charge accumulation in the cavity is increased, and the potential difference between the floating gate electrode column and the ground plane is further enlarged.
The present invention in one aspect of a preferred example may be further configured to: the first air hole is positioned at a first corner adjacent to the cavity wall, the second air hole is positioned at a second corner adjacent to the ground plane, and the first corner and the second corner are mutually deviated.
By adopting the technical scheme, the flow path of the charged particles or charges in the cavity is increased by utilizing the position offset design of the first air hole and the second air hole, and the charge neutralization in the cavity is facilitated.
The present invention in a preferred example may be further configured to: the first gas pipeline is connected to a negative hydrogen ion source device.
By adopting the technical scheme, the first gas pipeline is connected to the negative hydrogen ion source equipment, negative hydrogen ions are accumulated at the combined bottom of the floating gate electrode column, the ignition is performed on the floating end part of the floating gate electrode column, the ignition preferentially occurs in the second gas pipeline, and the charges of the negative hydrogen ions cannot remain in the second gas pipeline.
The other purpose of the invention is realized by the following technical scheme:
an ion source hydrogen pipeline is provided, which comprises the device for relieving the ignition of the ion source gas supply pipeline according to any one of the technical schemes.
In summary, the invention includes at least one of the following beneficial technical effects:
1. mainly aiming at the additional device outside the ion source equipment or the connection system equipment thereof, the combination of the floating gate electrode tip and the grounding electrode seat in the pipeline provides a chamber for promoting ignition so as to eliminate the accumulated charges in the gas supply pipeline and avoid the damage of the additional device or the system equipment caused by the ignition in the ion source gas supply pipeline so as to influence the reduction of the use efficiency of the ion source;
2. by utilizing the cavity wall of the floating gate electrode head and the floating gate electrode column, the device can achieve the effect of preventing the damage caused by ignition without additional power supply and maintenance in equipment, has relatively simple structure, can avoid the need of installing an electric device or a control circuit, and is relatively convenient to manage when being used for a gas supply pipeline.
Drawings
FIG. 1 is an exploded perspective view of an apparatus for mitigating arcing in an ion source gas supply line according to a preferred embodiment of the present invention from a first perspective;
FIG. 2 is an exploded perspective view of an apparatus for mitigating arcing in an ion source gas supply line according to a preferred embodiment of the present invention from a second perspective;
FIG. 3 is a schematic diagram showing an arrangement of floating gate electrode pillars on the wall of the floating gate electrode head according to a preferred embodiment of the present invention;
FIG. 4 is a schematic view showing another arrangement of floating gate electrode pillars on the cavity walls of floating gate electrode taps according to another preferred embodiment of the present invention.
The
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, and back … …) are involved in the embodiment of the present invention, the directional indications are only used to explain the relative positional relationship between the components, the movement situation, and the like in a specific posture (as shown in the drawing), and if the specific posture is changed, the directional indications are changed accordingly.
In order to facilitate understanding of the technical solution of the present invention, the device for mitigating the sparking of the ion source gas supply line and the ion source hydrogen line of the present invention are described in further detail below, but are not to be construed as limiting the scope of the present invention.
Referring to fig. 1 and 2, an apparatus for mitigating arcing in an ion source gas supply line according to one or more embodiments of the present disclosure includes a floating
The floating
The
Wherein, the floating
The implementation principle of the embodiment is as follows: the electric charge accumulated in the bottom of the floating
By adopting the basic technical scheme, by utilizing the design of the cavity between the pipelines, a gap distance for promoting ignition is formed between the floating
Regarding the gap distance between the
Regarding the gap relationship between the floating
With respect to the arrangement of the floating
With regard to the electrical connection relationship between the floating
The
Regarding the potential relationship between the floating
Regarding the position relationship between the
It is to be noted that the type of the accelerator ion source apparatus to which the
In addition, another embodiment of the present invention further provides an ion source hydrogen pipeline, which includes any one of the above-mentioned technical solutions for reducing the ignition of the ion source gas supply pipeline, so as to release the accumulated charges in the gas supply pipeline without damaging the equipment even if the gas supply pipeline is ignited. In the case of gas supply for ionization in the ion acceleration process, a gas source such as hydrogen gas can flow through the floating
When the device is practically used in an ion source hydrogen pipeline of an ion accelerator, the device for relieving the ignition of an ion source air supply pipeline can be specifically installed in the middle section of the hydrogen pipeline connected with a negative hydrogen ion source, and the
The embodiments of the present invention are merely preferred embodiments for easy understanding or implementing of the technical solutions of the present invention, and not intended to limit the scope of the present invention, and all equivalent changes in structure, shape and principle of the present invention should be covered by the claims of the present invention.