阅读说明：本技术 用于脆性材料的安全经济蒸发的靶组件 (Target assembly for safe and economical evaporation of brittle materials ) 是由 耶格·科什保尔 H·博瓦蒂 西格弗里德·克拉斯尼策尔 马库斯·埃塞尔巴赫 于 2018-05-30 设计创作，主要内容包括：本发明披露了一种靶组件,其允许安全、无裂且经济的靶材工作,伴随在电弧蒸发工艺以及溅射工艺中的低的断裂韧度和/或抗弯强度。本发明披露了一种用于PVD工艺的靶组件,包括靶和靶保持机构(20),其特征是,该靶(10)包括第一卡口锁,该靶保持机构(20)包括用于靶的第一卡口锁的配对体和用于在沉积室的冷却机构内接合靶组件的第二卡口锁。(The present invention discloses a target assembly that allows safe, crack-free and economical target material operation with low fracture toughness and/or bending strength in arc evaporation processes as well as sputtering processes. A target assembly for PVD processes is disclosed comprising a target and a target retaining mechanism (20), characterized in that the target (10) comprises a first bayonet lock, the target retaining mechanism (20) comprising a counterpart of the first bayonet lock for the target and a second bayonet lock for engaging the target assembly in a cooling mechanism of a deposition chamber.)

1. A target assembly for PVD processes, comprising a target (10) for operation in an arc or sputtering plasma and a target holding mechanism (20),

it is characterized in that the utility model is characterized in that,

the target (10) comprises a first bayonet lock, the target holding mechanism (20) comprises a counterpart of the first bayonet lock for the target and a second bayonet lock for engaging the target assembly on a cooling mechanism of the deposition chamber, wherein,

the target (10) comprises:

a front face of the target to be exposed to an arc or sputtering plasma in operation, which exhibits a first outer diameter D₁Which is the maximum diameter of the target (10) corresponding to a first portion of the target (10), and

a second diameter D corresponding to a second portion of the target₂Which is less than D₁And are and

should contact the target backside of the cooling mechanism, and

-at least two target protrusions (14) in a third portion of the target, said target protrusions protruding along the circumference of the body of said target, radially beyond the inner diameter D₂But do notWith protrusions exceeding the outer diameter D₁Said target projection thereby forming a first part of said first bayonet lock, an

The target holding mechanism (20) includes:

-at least two sets of outer protrusions (22) and inner protrusions (24), wherein the inner protrusions (24) form the counterpart of a first bayonet lock for the target protrusions (14) and the outer protrusions (22) form a second bayonet lock for locking the target within the deposition chamber.

2. Target assembly according to claim 1, wherein the thickness t of the target bulge (14) in the axial direction, i.e. the target thickness direction_bAt the initial target thickness t_sBetween 15% and 85%.

3. Target assembly according to one of the preceding claims, characterized in that the target (10) exhibits a concavity (12) in the radial direction, the depth d of which concavity is_rExpressed as the target outer diameter D₁And an inner diameter D₂Half of the difference, at D₁In the range of 2% to 7.5%.

4. Target assembly according to one of the preceding claims, characterized in that the target (10) exhibits a target nose (11), a target nose thickness t_nAt d_rIn the range of 60% to 150%.

5. Target assembly according to one of the preceding claims, characterized in that the number of inner projections (24) of the target holding means (20) is equal to the number of outer projections (22).

6. Target assembly according to one of the preceding claims, characterized in that the thickness of the inner protrusion (24) is smaller than the height of the target concave surface (12) of the target (10).

7. Target assembly according to one of the preceding claims, characterized in that the target (10) and the target holding means (20) comprise at least two target grooves (16) in said target (10) and at least two seating grooves (26) in said target holding means (20) as receiving portions for a locking means (30).

8. The target assembly of claim 7, wherein the target assembly includes a locking mechanism (30) for locking the target (10) and the target retaining mechanism (20) together against inadvertent reverse rotation.

9. Target assembly according to claim 8, characterized in that the locking mechanism (30) exhibits a fixing lug (32).

10. Target assembly according to one of claims 7 to 9, characterized in that the target holding means (20) exhibits a circumferential cut (28) along the inner side of the target holding means as a receiving portion for a spring (40).

11. The target assembly of claim 10, wherein the target assembly includes a spring (40) as a lock to prevent accidental detachment of the target assembly.