阅读说明：本技术 用于脆性材料的安全经济蒸发的靶组件 (Target assembly for safe and economical evaporation of brittle materials ) 是由 耶格·科什保尔 H·博瓦蒂 西格弗里德·克拉斯尼策尔 马库斯·埃塞尔巴赫 于 2018-05-30 设计创作，主要内容包括：本发明披露了一种靶组件,其允许安全、无裂且经济的靶材工作,伴随在电弧蒸发工艺以及溅射工艺中的低的断裂韧度和/或抗弯强度。本发明披露了一种用于PVD工艺的靶组件,包括靶和靶保持机构(20),其特征是,该靶(10)包括第一卡口锁,该靶保持机构(20)包括用于靶的第一卡口锁的配对体和用于在沉积室的冷却机构内接合靶组件的第二卡口锁。(The present invention discloses a target assembly that allows safe, crack-free and economical target material operation with low fracture toughness and/or bending strength in arc evaporation processes as well as sputtering processes. A target assembly for PVD processes is disclosed comprising a target and a target retaining mechanism (20), characterized in that the target (10) comprises a first bayonet lock, the target retaining mechanism (20) comprising a counterpart of the first bayonet lock for the target and a second bayonet lock for engaging the target assembly in a cooling mechanism of a deposition chamber.)