阅读说明：本技术 基板处理用通电装置 (Energizing device for substrate processing ) 是由 白承大 金成烨 于 2021-04-16 设计创作，主要内容包括：本发明涉及基板处理用通电装置,本发明可包括：腔室部,进行接地；转轴部,安装于所述腔室部,并且与所述腔室部通电；操作台部,安装于所述转轴部并旋转,并且与所轴部通电；固定部,沿着所述操作台部的圆周方向安装有多个,并且与基板通电；以及驱动部,用于使所述固定部旋转并与所述固定部通电,所述驱动部与所述操作台部通电,在基板处理过程中,可消除在基板产生的静电来防止基板不良。(The present invention relates to a substrate processing energization apparatus, and may include: a chamber part for grounding; a rotating shaft part mounted on the chamber part and electrically connected with the chamber part; an operation table unit that is attached to the rotary shaft unit, rotates, and is energized with the shaft unit; a plurality of fixing portions mounted along a circumferential direction of the table portion and electrically connected to the substrate; and a driving part for rotating the fixing part and electrifying the fixing part, wherein the driving part is electrified with the operating platform part, and static electricity generated on the substrate can be eliminated in the substrate processing process to prevent the substrate defect.)

1. A power-on device for substrate processing, comprising:

a chamber part for grounding;

a rotating shaft part mounted on the chamber part and electrically connected with the chamber part;

an operation table section that is attached to the rotating shaft section, rotates, and is electrically connected to the rotating shaft section;

a plurality of fixing portions mounted along a circumferential direction of the table portion and electrically connected to the substrate; and

a driving portion for rotating the fixing portion, the driving portion being in electrical communication with the fixing portion and with the console portion.

2. The energizing device for substrate processing according to claim 1, wherein said chamber part comprises:

a chamber housing part which is grounded; and

and a chamber base part mounted on the chamber housing part and combined with the rotating shaft part.

3. The energizing device for substrate processing according to claim 1, wherein said stage part includes:

a central console part combined with the rotating shaft part;

a lower console section coupled to the center console section;

an upper console section coupled with the lower console section to cover an upper portion of the lower console section; and

and a plurality of support table sections arranged along a circumferential direction of the upper table section, on which the substrate is placed.

4. The substrate processing energization device according to claim 1, wherein said fixing portion includes:

a fixed rotation unit rotatably attached to the console unit and configured to rotate by linear movement of the driving unit; and

and a fixed clamp part protruding above the fixed rotation part and closely attached to or detached from the edge of the substrate with the rotation of the fixed rotation part.

5. The substrate processing energization device according to claim 1, wherein said driving portion includes:

a drive adjusting part which is arranged on the rotating shaft part and can adjust the vertical length of the drive adjusting part;

a drive lifting unit which is attached to the console unit and can be moved up and down by the drive adjusting unit;

a driving rotation unit rotatably attached to the console unit and configured to rotate by vertical movement of the driving elevating unit; and

and a driving link part having both ends connected to the driving rotating part and the fixing part, and pushing the fixing part to rotate the fixing part as the driving rotating part rotates.

6. The substrate processing energization device according to claim 5, wherein said drive adjustment portion includes:

an adjusting cylinder part which is arranged in the rotating shaft part, and the length of the adjusting cylinder part is lengthened or shortened along the vertical direction; and

and one or more adjustment pins which are formed above the adjustment cylinder part and which are inserted into the console part to move the driving elevating part up and down.

7. The substrate processing energization device according to claim 5, wherein said driving elevating portion includes:

a lifting plate portion which is built in the console portion and moves upward by the drive adjusting portion inserted in the console portion;

a lifting side plate portion extending upward from an inner side of the lifting lower plate portion;

a lifting upper plate portion extending from the lifting side plate portion toward a side and disposed to face the lifting lower plate portion; and

and a lifting restoration unit that is placed on the lifting lower plate portion, that penetrates the lifting upper plate portion, and that elastically supports the console unit.

8. The substrate processing energization device according to claim 5, wherein said driving rotation portion includes:

a rotation support portion attached to the console portion;

a rotation shaft portion formed on the rotation support portion; and

and a rotation converting part rotatably mounted on the rotation shaft part and rotated by the vertical movement of the driving elevating part, wherein the rotation converting part guides the horizontal movement of the driving link part.

9. The substrate processing energization device according to claim 5, wherein said driving portion further includes:

and a drive holding unit which is built in the console unit and which restricts the drive link unit so that the substrate is held in a clamped state.

Technical Field

The present invention relates to a substrate processing current-carrying device, and more particularly, to a substrate processing current-carrying device capable of preventing a substrate from being defective by blocking static electricity generated during a substrate processing process.

Background

In general, a substrate processing apparatus used in a manufacturing process of a semiconductor device, a liquid crystal display device, or the like is provided with a single-wafer type processing unit including: a rotary clamp for supporting the substrate almost horizontally to rotate the substrate; and a nozzle for supplying the processing liquid to the substrate supported by the rotating gripper.

The processing unit for scrubbing and cleaning the substrate is provided with a brush for scrubbing and cleaning the substrate supported by the rotary clamp.

However, conventionally, there has been a problem that if static electricity is generated in a substrate during substrate processing, a substrate failure is caused. Therefore, it is necessary to improve it.

The background art of the present invention is disclosed in Korean laid-open patent publication No. 2015-0015346 (2015.02.10. discloses, title of the invention: substrate processing apparatus).

Disclosure of Invention

Technical problem to be solved

The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a substrate processing energization apparatus capable of preventing a substrate from being defective by blocking static electricity generated during a substrate processing process.

Means for solving the problems

The substrate processing energization apparatus according to the present invention includes: a chamber part for grounding; a rotating shaft part mounted on the chamber part and electrically connected with the chamber part; an operation table unit that is attached to the rotary shaft unit, rotates, and is energized with the shaft unit; a plurality of fixing portions mounted along a circumferential direction of the table portion and electrically connected to the substrate; and a driving unit configured to rotate the fixed unit and to be electrically connected to the fixed unit, the driving unit being electrically connected to the console unit.

The present invention is characterized in that the chamber portion includes: a chamber housing part which is grounded; and a chamber base part mounted on the chamber housing part and combined with the rotating shaft part.

In the present invention, the console section includes: a central console part combined with the rotating shaft part; a lower console section coupled to the center console section; an upper console section coupled with the lower console section to cover an upper portion of the lower console section; and a plurality of supporting table sections arranged along a circumferential direction of the upper table section, on which the substrate is placed.

The present invention is characterized in that the fixing portion includes: a fixed rotation unit rotatably attached to the console unit and configured to rotate by linear movement of the driving unit; and a fixed clamp part protruding above the fixed rotation part and closely attached to or detached from an edge of the substrate with rotation of the fixed rotation part.

The present invention is characterized in that the driving unit includes: a drive adjustment unit which is disposed on the rotating shaft unit and is capable of adjusting the vertical length; a drive lifting unit which is attached to the console unit and can be moved up and down by the drive adjusting unit; a driving rotation unit rotatably attached to the console unit and configured to rotate by vertical movement of the driving elevating unit; and a driving link part having both ends connected to the driving rotating part and the fixing part, and pushing the fixing part to rotate the fixing part as the driving rotating part rotates.

The present invention is characterized in that the drive adjusting portion includes: an adjusting cylinder part which is arranged in the rotating shaft part, and the length of the adjusting cylinder part is lengthened or shortened along the vertical direction; and one or more adjustment pins formed above the adjustment cylinder part and inserted into the console part to move the driving elevating part up and down.

In the present invention, the driving elevating unit includes: a lifting plate portion which is built in the console portion and moves upward by the drive adjusting portion inserted in the console portion; a lifting side plate portion extending upward from an inner side of the lifting lower plate portion; a lifting upper plate portion extending from the lifting side plate portion toward a side and disposed to face the lifting lower plate portion; and a lifting restoration unit that is placed on the lifting lower plate portion, that penetrates the lifting upper plate portion, and that elastically supports the console unit.

The present invention is characterized in that the driving and rotating unit includes: a rotation support portion attached to the console portion; a rotation shaft portion formed on the rotation support portion; and a rotation converting unit rotatably attached to the rotation shaft unit and rotated by the vertical movement of the driving elevating unit, the rotation converting unit guiding the horizontal movement of the driving link unit.

The present invention is characterized in that the driving unit further includes: and a drive holding unit which is built in the console unit and which restricts the drive link unit so that the substrate is held in a clamped state.

ADVANTAGEOUS EFFECTS OF INVENTION

The invention provides a substrate processing electrifying device which can prevent substrate defect by rapidly eliminating static electricity generated in the substrate processing process.

Drawings

Fig. 1 is a diagram schematically illustrating a substrate processing system according to an embodiment of the present invention.

Fig. 2 is a diagram schematically showing a transfer unit according to an embodiment of the present invention.

Fig. 3 is a diagram schematically showing a waiting section according to an embodiment of the present invention.

Fig. 4 is a diagram schematically showing an antistatic part according to an embodiment of the present invention.

Fig. 5 is a diagram schematically showing a processing unit according to an embodiment of the present invention.

Fig. 6 is a perspective view schematically showing an operation table portion of an embodiment of the present invention.

Fig. 7 is a sectional view schematically showing an operator station portion of an embodiment of the present invention.

Fig. 8 is a diagram schematically showing a driving unit according to an embodiment of the present invention.

Fig. 9 is an exploded perspective view of the console section and the rotating shaft section according to the embodiment of the present invention.

Fig. 10 is a sectional view schematically showing a rotary shaft portion according to an embodiment of the present invention.

Fig. 11 is a plan view schematically showing a substrate holding state according to an embodiment of the present invention.

Fig. 12 is a plan view schematically showing a non-clamped state according to an embodiment of the present invention.

Description of the reference numerals

10: a transfer section; 11: a transfer main body part; 12: a transfer work section; 13: a transfer gripping section; 20: a waiting section; 21: a waiting base part; 22: a waiting bracket part; 23: waiting for the support portion; 30: a processing unit; 40: an antistatic part; 50: a chamber portion; 51: a chamber housing portion; 52: a chamber base section; 60: a shaft portion; 70: an operator station section; 71: a central console section; 72: a lower console section; 73: an upper console section; 74: a support table section; 80: a fixed part; 81: a stationary rotating part; 82: a fixed clamp portion; 90: a drive section; 91: a drive adjusting section; 92: a drive lifting unit; 93: driving the rotating part; 94: a drive link section; 95: the holding portion is driven.

Detailed Description

Hereinafter, an embodiment of the energization device for substrate processing according to the present invention will be described with reference to the drawings. In this process, the thickness of a plurality of lines or the size of structural elements shown in the drawings may be exaggerated for clarity and convenience of description. Also, a plurality of terms described below are terms defined in consideration of functions in the present invention, and may be different according to intentions or conventions of users and application persons. Accordingly, these terms should be defined in accordance with the contents throughout the specification.

Fig. 1 is a diagram schematically illustrating a substrate processing system according to an embodiment of the present invention. Referring to fig. 1, a substrate processing system according to an embodiment of the present invention includes a transfer unit 10, a waiting unit 20, and a processing unit 30.

The plurality of transfer units 10 transfer the substrate 100 to an additional process or a subsequent process. The transfer unit 10 is electrically connected to the substrate 100 and can be grounded. For example, the transfer unit 10 may be formed of a material that can be electrically connected to the substrate 100, and the transfer unit 10 may be installed on the ground to form a transfer robot in a grounded state.

The waiting units 20 are disposed between the adjacent transfer units 10. The substrate 100 may be waiting at the waiting part 20 before being transferred to the following transfer part 10. The waiting section 20 is electrically connected to the substrate 100 and can be grounded. For example, the waiting unit 20 is made of a material that can be electrically connected to the substrate 100, and the waiting unit 20 may be grounded by being installed on the ground. The number of the waiting sections 20 may be proportional to the number of the transfer sections 20.

The processing unit 30 is used to process the substrate 100 loaded through the transfer unit 10 and to supply power to the substrate 100, and the processing unit 30 may be grounded. For example, a plurality of processing units 30 may be disposed around the transfer unit 10, and the transfer unit 10 may supply the substrate 100 to each processing unit 30.

The processing unit 30 is made of a material that can be electrically connected to the substrate 100, and the processing unit 30 can be grounded by being installed on the ground. The processing unit 30 may clean and dry the substrate 100 using a chemical solution, cleaning water, gas, or the like.

Therefore, in the process of transferring and processing the substrate 100, the substrate 100 may be electrified by the transfer portion 10, the waiting portion 20, and the processing portion 30 and may be rapidly removed even if static electricity is generated. Therefore, the substrate 100 can be prevented from being defective due to static electricity generated in the substrate 100.

Fig. 2 is a diagram schematically showing a transfer unit according to an embodiment of the present invention. Referring to fig. 2, the transfer unit 10 according to an embodiment of the present invention includes a transfer main body 11, a transfer work unit 12, and a transfer gripping unit 13.

The transfer main body 11 is grounded. For example, the transfer main body 11 is installed on the ground and may be made of a material that can be energized. A separate ground line may be connected to the transfer main body 11 to perform grounding.

The transfer work unit 12 is movably attached to the transfer main body unit 11. The transfer working unit 12 is electrically connected to the transfer main body unit 11. For example, the transfer working unit 12 may be mounted on the transfer main body unit 11 to rotate or reciprocate, and the length thereof may vary depending on the work environment.

The transfer gripping unit 13 is attached to the transfer working unit 12 and grips the substrate 100. The transfer gripping unit 13 is electrically connected to the transfer working unit 12. For example, the transfer gripping portion 13 may be made of a material that can be energized.

Therefore, if the transfer gripper 13, the transfer work unit 12, and the transfer main body 11 are kept in a mutually energized state, the substrate 100 is grounded when the transfer gripper 13 grips the substrate 100, and static electricity generated in the substrate 100 can be eliminated.

Fig. 3 is a diagram schematically showing a waiting section according to an embodiment of the present invention. Referring to fig. 3, the waiting part 20 according to an embodiment of the present invention includes a waiting base part 21, a waiting bracket part 22, and a waiting support part 23.

Waiting for the base part 21 to be grounded. For example, the stand-by base part 21 may be installed on the ground and may be made of a material capable of conducting electricity. A separate ground line may be connected to the waiting base part 21 to perform grounding.

The stand-by bracket portion 22 is connected to the upper side of the stand-by base portion 21 and is energized with the stand-by base portion 21. For example, the stand-by bracket portion 22 may be coupled to an upper portion of the stand-by base portion 21 and may be formed as a frame having front and rear surfaces opened. The standby bracket 22 may be made of a material that can be energized.

The standby support portion 23 is connected to the standby bracket portion 22, supports the substrate 100, and is electrically connected to the standby bracket portion 22. For example, the substrates 100 may be stacked by disposing a plurality of standby support portions 23 on the standby bracket portion 22 in the vertical direction. The standby support 23 is in direct contact with the substrate 100 and may be made of a material capable of conducting electricity.

Therefore, if the standby support 23, the standby bracket 22, and the standby base 21 are kept in a state of being energized with each other, the substrate 100 is grounded when the transfer gripper 13 places the substrate 100 on the standby support 23, and static electricity generated in the substrate 100 can be eliminated.

Fig. 4 is a diagram schematically showing an antistatic part according to an embodiment of the present invention. Referring to fig. 4, the substrate processing system according to an embodiment of the present invention may further include an antistatic part 40.

The antistatic part 40 sprays an antistatic medium to the substrate 100 moving through the transfer part 10 to prevent the substrate 100 from generating static electricity. For example, the antistatic part 40 is disposed between the transfer part 10 and the standby part 20, and can prevent the substrate 100 from generating static electricity by spraying an antistatic medium to the substrate 100 moving toward the standby part 20 through the transfer part 10. In addition, the antistatic part 40 may be disposed between the transfer part 10 and the processing part 30, and may spray an antistatic medium to the substrate 100 moving toward the processing part 30 through the transfer part 10 to prevent the substrate 100 from generating static electricity.

Fig. 5 is a diagram schematically showing a processing unit according to an embodiment of the present invention. Referring to fig. 5, the treatment section 30 according to an embodiment of the present invention includes a chamber 50, a rotating shaft 60, an operation table 70, a fixing section 80, and a driving section 90.

The chamber 50 is grounded. For example, the chamber 50 has a box shape with one side opened, and the opened side can be opened and closed by a door. Such a chamber 50 is formed of a material that can be energized. A separate ground line connected to the chamber portion 50 may be grounded.

The rotary shaft portion 60 is attached to the chamber portion 50 and electrically connected to the chamber portion 50. For example, the rotating shaft portion 60 is configured to rotate the object when power is applied thereto, and may be made of a material that can be energized.

The console section 70 is attached to the rotating shaft section 60 and rotates, and is energized to the rotating shaft section 60. For example, the console section 70 may be configured to be placed on the substrate 100 and may include a material capable of conducting electricity.

A plurality of fixing portions 80 are rotatably attached along the circumferential direction of the table portion 70, and are electrically connected to the substrate 100. For example, if no external force is applied to the fixing portion 80, the fixing portion 80 may be in a clamped state of being closely attached to the outer circumferential surface of the substrate 100 and fixing the substrate 100. Further, if an external force is applied to the fixing portion 80, the fixing portion 80 can be rotated to form a non-clamping state spaced apart from the outer circumferential surface of the substrate 100.

The driving part 90 rotates the fixing part 80 and energizes the fixing part 80. The driving unit 90 is electrically connected to the console unit 70. For example, the driving unit 90 may be made of a material that can be energized, and may be connected to the console unit 70. Such a driving part 90 may induce a rotational motion into a linear motion so as to rotate the fixing part 80.

The chamber portion 50 according to an embodiment of the present invention includes a chamber housing portion 51 and a chamber base portion 52.

The chamber housing portion 51 is grounded. For example, the chamber housing portion 51 may be formed in a box shape having one side surface openable and closable. The chamber housing 51 is made of a material that can be energized, and is grounded by being connected to a separate ground line.

The chamber base portion 52 is attached to the chamber housing portion 51 and is coupled to the rotating shaft portion 60. For example, the chamber base portion 52 is coupled to the inside of the chamber housing portion 51, and may be made of a material that can be energized.

On the other hand, the rotating shaft portion 60 is coupled to the chamber base portion 52 and may be made of a material that can be energized.

Fig. 6 is a perspective view schematically showing an operator station portion according to an embodiment of the present invention, fig. 7 is a sectional view schematically showing the operator station portion according to the embodiment of the present invention, and fig. 8 is a view schematically showing a driving portion according to the embodiment of the present invention. Fig. 9 is an exploded perspective view of an operator station unit and a rotary shaft unit according to an embodiment of the present invention, and fig. 10 is a sectional view schematically showing the rotary shaft unit according to the embodiment of the present invention. Fig. 11 is a plan view schematically showing a substrate clamped state according to an embodiment of the present invention, and fig. 12 is a plan view schematically showing a non-clamped state according to an embodiment of the present invention. Referring to fig. 5 to 12, the specific configuration of the console section 70, the fixing section 80, and the driving section 90 is as follows.

The console section 70 of an embodiment of the present invention includes a center console section 71, a lower console section 72, an upper console section 73, and a supporting console section 74.

The center console section 71 is coupled to the rotating shaft section 60. For example, the center console section 71 is made of a material that can be energized, and can be rotated in the axial direction by the rotating shaft section 60.

The lower table portion 72 is coupled to the center table portion 71, and the upper table portion 73 is coupled to the lower table portion 72 to cover an upper portion of the lower table portion 72. For example, the lower table portion 72 and the upper table portion 73 may be made of a material that can be energized. The inner peripheral surface of the lower table portion 72 is coupled to the center table portion 71 and is rotatable together with the center table portion 71. In addition to this, the upper table section 73 may be directly coupled to the center table section 71.

A plurality of support table sections 74 are arranged along the circumferential direction of the upper table section 73, on which the substrate 100 is placed. For example, the support console section 74 is made of a material that can be energized, and is joined to the upper side of the upper console section 73 so as to protrude upward. The substrate 100 may be placed on the upper end portion of such a supporting table portion 74.

The stationary portion 80 according to an embodiment of the present invention includes a stationary rotating portion 81 and a stationary clamping portion 82.

The fixed rotation portion 81 is rotatably attached to the console portion 70 and rotates by the linear movement of the driving portion 90. For example, the fixed rotation portion 81 is rotatably attached to an edge of the lower table portion 72 and is exposed to the outside through the upper table portion 73. The stationary and rotating portion 81 may be made of a material that can be energized.

The fixed clamp portion 82 protrudes from the upper side of the fixed rotation portion 81, and is brought into close contact with or separated from the edge of the substrate 100 as the fixed rotation portion 81 rotates. For example, the fixed clamp 82 extends upward from the edge of the fixed rotation portion 81 and is made of a material that can be energized, and the fixed clamp 82 can be in direct contact with the substrate 100.

The driving unit 90 according to an embodiment of the present invention includes a driving adjustment unit 91, a driving lifting unit 92, a driving rotation unit 93, and a driving link unit 94. These components are made of materials that can conduct electricity to each other, and can be connected to the console section 70 to maintain the state of conduction of electricity.

The drive adjustment unit 91 is disposed on the rotating shaft unit 60, and is adjustable in vertical length. For example, the drive adjusting unit 91 may be adjustable in length by oil pressure or air pressure, and may be incorporated in the rotating shaft unit 60.

The drive elevating unit 92 is attached to the console unit 70 and can be moved up and down by the drive adjusting unit 91. For example, the driving elevating unit 92 may be disposed between the lower table unit 72 and the upper table unit 73, and may be moved upward by the driving adjusting unit 91.

The driving rotation unit 93 is rotatably attached to the console unit 70 and connected to the driving elevating unit 92. The driving rotation unit 93 rotates by driving the lifting unit 92 to move up and down. For example, the driving rotation unit 93 may convert vertical motion into rotational motion.

The driving link 94 has both ends connected to the driving rotation portion 93 and the fixing portion 80, and pushes the fixing portion 80 to rotate the fixing portion 80 as the driving rotation portion 93 rotates. For example, if the rotational movement is transmitted by driving the rotation portion 93, the driving link portion 94 can move left and right in the direction of the fixed rotation portion 81. In this case, since the driving link portion 94 is connected to the outer peripheral surface of the fixed rotation portion 81, the fixed rotation portion 81 can be rotated by the left and right movement of the driving link portion 94.

The drive adjustment unit 91 according to an embodiment of the present invention includes an adjustment cylinder 911 and an adjustment pin 912.

The adjustment cylinder portion 911 is built in the rotating shaft portion 60, and the length of the adjustment cylinder portion 911 is extended or shortened in the vertical direction. For example, the adjustment cylinder 911 is formed in a pipe (duct) shape and is installed inside the rotating shaft 60, and the length thereof can be adjusted in the vertical direction by oil pressure or air pressure.

One or more adjustment pin portions 912 are formed on the upper side of the adjustment cylinder portion 911, and are inserted into the console portion 70 to move the driving elevating portion 92 up and down. For example, 3 or more adjustment pin portions 912 may be arranged at equal intervals along the circumferential surface of the upper end portion of the adjustment cylinder portion 911. The lift unit 92 can be pushed and driven upward by the pin member 912 passing through the lower table unit 72.

The driving elevating unit 92 according to an embodiment of the present invention includes an elevating lower plate section 921, an elevating side plate section 922, an elevating upper plate section 923, and an elevating restoration section 924. The driving elevating unit 92 may be made of a material that can be energized.

The lift plate section 921 is incorporated in the console section 70, and moves upward by the drive adjuster 91 inserted in the console section 70. For example, the vertically movable lower plate 921 may be formed in a circular band shape and placed on the center console section 71, and the center hole 711 through which the adjustment pin 912 passes may be formed in the center console section 71.

The lifting side plate portion 922 extends upward from the inner side of the lifting lower plate portion 921, and the lifting upper plate portion 923 extends laterally from the lifting side plate portion 922 and is disposed to face the lifting lower plate portion 921. For example, the liftable lower plate 921, the liftable side plate 922, and the liftable upper plate 923 may be integrally molded and may have a shape that is open to the outside.

The lifting/lowering restoration unit 924 is placed on the lifting/lowering plate section 921, and elastically supports the console section 70 by penetrating the lifting/lowering upper plate section 923. For example, the lifting/lowering restoring portion 924 is formed as a coil spring, and has an upper end portion capable of supporting the bottom surface of the upper table portion 73 and a lower end portion capable of supporting the upper surface of the lifting/lowering lower plate portion 921. Such an elevation restoration unit 924 can provide a restoration force so that the driving elevation unit 92 that cancels the external force moves downward.

The driving and rotating unit 93 according to an embodiment of the present invention includes a rotation support unit 931, a rotation shaft unit 932, and a rotation conversion unit 933. Such a driving rotation portion 93 may be formed of a material that can be energized.

The rotation support portion 931 is attached to the console portion 70. For example, a plurality of rotation support portions 931 may be disposed along the outer peripheral surface of the driving elevating portion 92 and may be coupled to the lower table portion 72 or the upper table portion 73.

The rotation shaft 932 is formed in the rotation support 931. For example, the rotation shaft 932 may protrude toward the side of the rotation support 931.

The rotation conversion unit 933 is rotatably attached to the rotation shaft unit 932, and rotates by driving the up-and-down movement of the lift unit 92, thereby guiding the left-and-right movement of the drive link unit 94. For example, the rotation converter 933 may include: a first conversion part 9331 which rotates by connecting the center part to the rotation shaft part 932; a second conversion part 9332 which is inserted into the driving elevating part 92 so as to extend laterally from the first conversion part 9331 and is rotatably attached; and a third conversion part 9333 extending upward from the first conversion part 9331 and connected to the drive link part 94.

The driving link portion 94 according to an embodiment of the present invention may include a link rod portion 941 and a link stopper portion 942. The link lever portion 941 may have one end rotatably attached to the third conversion portion 9333 and the other end rotatably attached to the outer peripheral surface of the fixed rotation portion 81. The link stopper 942 is attached to the link lever portion 941 and is caught on the inside of the table portion 70 to regulate the movement of the link lever portion 941. Such a drive link portion 94 may be formed of a material that can be energized.

The driving part 90 according to an embodiment of the present invention may further include a driving maintaining part 95. The drive holding unit 95 is incorporated in the console unit 70, and regulates the movement of the drive link unit 94 so that the substrate 100 is in a clamped (chuking) state in a state where the drive adjusting unit 91 is not activated. Such a drive holding portion 95 may be formed of a material that can be energized.

More specifically, the driving holding portion 95 includes a holding fixing portion 951, a holding rotating portion 952, and a holding load portion 953.

The holding fixing portion 951 is attached to the console portion 70 and is disposed so as to straddle the drive link portion 94. For example, the holding fixture 951 may be attached to the lower table part 72 or the upper table part 73 at both ends.

The holding and rotating portion 952 is rotatably attached to the holding and rotating portion 951 at a center portion and connected to the driving link portion 94 at one end portion. For example, the holding and rotating portion 952 is disposed to face the holding and fixing portion 951 and is rotatable in accordance with the linear movement of the driving link portion 94. That is, when the driving link portion 94 moves toward the fixed portion 80, the holding and rotating portion 952 can rotate in the clockwise direction. When the driving link 94 moves toward the driving elevating unit 92, the holding and rotating unit 952 can rotate in the counterclockwise direction.

The load holding portion 953 is attached to the other end portion of the holding and rotating portion 952, and rotates the holding and rotating portion 952 in one direction by centrifugal force if the substrate 100 rotates. For example, as the substrate 100 rotates, a centrifugal force acts on the load holding portion 953, and the rotating and holding portion 952 can rotate counterclockwise. However, even if the holding and rotating portion 952 does not rotate due to interference with the console portion 70, the holding and rotating portion 952 and the driving link portion 94 are connected, and thus the driving link portion 94 is blocked from moving toward the fixing portion 80. Thus, the fixing part 80 may maintain the substrate 100 in a clamped state during the rotation of the substrate 100.

Hereinafter, a process of processing the substrate 100 and a process of energizing of the substrate of the present invention will be described.

First, any one of the transfer units 10 holds the substrate 100 and stacks the substrate 100 on the standby unit 20. The other transfer unit 10 supplies the substrates 100 waiting in the waiting unit 20 to the respective processing units 30.

In this case, the transfer unit 10 itself may be electrically connected to the substrate 100, and static electricity generated in the substrate 100 may be removed by maintaining a grounded state with respect to the ground. The standby unit 20 itself can be electrically connected to the substrate 100, and static electricity generated in the substrate 100 can be eliminated by maintaining a grounded state with respect to the ground.

Further, if the antistatic unit 40 is disposed between the transfer unit 10 and the standby unit 20 to spray the antistatic medium, it is possible to prevent static electricity from being generated on the substrate 100 which is held and moved by the transfer unit 10. The antistatic unit 40 may be disposed between the transfer unit 10 and the processing unit 30.

The treatment unit 30 grounds the chamber 50, and the rotary shaft 60 attached to the chamber 50 is electrically connected to the chamber 50, and the operation table unit 70 attached to the rotary shaft 60 and on which the substrate 100 is placed is electrically connected to the rotary shaft 60. The fixing portion 80 rotatably attached to the table portion 70 guides the substrate 100 in a clamped state or a non-clamped state, and the driving portion 90 energized to the fixing portion 80 is energized to the table portion 70. Thus, static electricity generated in the substrate 100 itself can be rapidly removed during the processing of the substrate 100.

On the other hand, if the drive adjusting unit 91 incorporated in the rotating shaft unit 60 is not activated, the drive elevating unit 92 is disposed at the low position by the restoring force. The fixing portion 80 is brought into close contact with the edge of the substrate 100 to form a clamped state in which the substrate 100 is fixed (see fig. 11).

If the rotating shaft portion 60 is driven in the above state, the substrate 100 itself can be rotated by rotating the console portion 70. Then, the substrate 100 processing step is performed by ejecting the processing medium to the rotating substrate 100.

In this case, as the substrate 100 rotates, centrifugal force acts on the driving holding portion 95, and the driving link portion 94 connected to the driving holding portion 95 is restricted from moving, so that the clamped state of the substrate 100 can be stably held.

In order to make the substrate 100 in the unclamped state after the rotation of the substrate 100 is completed, the length of the driving adjustment portion 91 is increased. If the length of the driving adjustment part 91 is long, the driving lifting part 92 is pushed by the driving adjustment part 91 and moves upward, and the driving link part 94 moves toward the fixing part 80 as the driving rotation part 93 connected to the driving lifting part 92 rotates. Thus, the fixing portion 80 is rotated to release the restriction of the substrate 100 (see fig. 12).

While the invention has been described with reference to the embodiments shown in the drawings, it is to be understood that the same is by way of illustration only and that various modifications and equivalent other embodiments may be devised by those skilled in the art. Therefore, the true technical scope of the present invention should be defined according to the appended claims.