阅读说明：本技术 使用原子层沉积的外覆倾斜表面浮雕结构 (Overcoated inclined surface relief structures using atomic layer deposition ) 是由 尼哈尔·兰詹·莫汉蒂 于 2019-12-26 设计创作，主要内容包括：公开了用于外覆倾斜结构的技术和使用该技术获得的设备。在一些实施例中,在衬底上的表面浮雕结构上形成外覆层的方法包括接收具有表面浮雕结构的衬底。表面浮雕结构包括相对于衬底倾斜的多个脊,以及每个在两个相邻脊之间的多个槽。该方法还包括在多次循环的每次循环中,在多个脊的表面和多个槽的底部上沉积外覆材料的均匀层。外覆材料的沉积层和多个脊共同在衬底上形成光耦合结构。外覆层的表面是平坦的。(Techniques for coating oblique structures and devices obtained using the techniques are disclosed. In some embodiments, a method of forming an overcoat layer on a surface relief structure on a substrate includes receiving a substrate having a surface relief structure. The surface relief structure includes a plurality of ridges that are inclined relative to the substrate, and a plurality of grooves each between two adjacent ridges. The method also includes depositing a uniform layer of overcoat material on the surfaces of the plurality of ridges and the bottoms of the plurality of grooves in each of the plurality of cycles. The deposited layer of overcoat material and the plurality of ridges collectively form a light coupling structure on the substrate. The surface of the outer cover is flat.)