Device and method for processing SiC material optical element
阅读说明：本技术 一种用于SiC材料光学元件加工的装置及方法 (Device and method for processing SiC material optical element ) 是由 张志刚 韩保辉 江希龙 肖正航 张迪 潘浩 刘志刚 郭成达 赵亨 于 2019-10-30 设计创作，主要内容包括：本发明公开了一种用于SiC材料光学元件加工的装置及方法,其中,该方法包括如下步骤：(1)将SiC材料光学元件镜坯放置到回转工作台上,镜面筋位置朝上；(2)通过专用工装给SiC材料光学元件镜坯定位；(3)根据SiC材料光学元件镜坯选择金刚石砂带的砂带型号、磨削接触力、砂带线速度和机器人的进给速度；(4)根据偶次项非球面方程得到三维模拟加工轨迹；(5)将金刚石砂带安装在末端执行器砂带机上,使镜面筋与金刚石砂带接触,并按步骤(3)中的磨削接触力、砂带线速度和机器人的进给速度及步骤(4)中的三维模拟加工轨迹对镜面筋进行磨削加工。本发明解决了加工过程风险大,易产生崩边、裂纹等质量缺陷、加工可靠性差,加工效率低的技术问题。(The invention discloses a device and a method for processing an optical element made of SiC material, wherein the method comprises the following steps: (1) placing the SiC material optical element mirror blank on a rotary worktable, wherein the position of mirror ribs is upward; (2) positioning the SiC material optical element mirror blank through a special tool; (3) selecting the abrasive belt type, the grinding contact force, the abrasive belt linear speed and the feeding speed of the robot of the diamond abrasive belt according to the SiC material optical element mirror blank; (4) obtaining a three-dimensional simulation processing track according to an even-order term aspheric equation; (5) and (3) mounting the diamond abrasive belt on an end effector abrasive belt machine to enable the mirror gluten to be in contact with the diamond abrasive belt, and grinding the mirror gluten according to the grinding contact force, the abrasive belt linear speed, the feeding speed of the robot and the three-dimensional simulation processing track in the step (4). The invention solves the technical problems of high risk, easy generation of quality defects such as edge breakage, cracks and the like, poor processing reliability and low processing efficiency in the processing process.)
1. A method for processing an optical element of SiC material, characterized in that it comprises the steps of:
(1) placing the SiC material optical element mirror blank on a rotary worktable (4), wherein the position of mirror ribs is upward;
(2) positioning the SiC material optical element mirror blank through a special tool;
(3) selecting the abrasive belt type, the grinding contact force, the abrasive belt linear speed and the feeding speed of the robot of the diamond abrasive belt according to the SiC material optical element mirror blank;
(4) obtaining a three-dimensional simulation processing track according to an even-order term aspheric equation;
(5) the method comprises the steps of installing a diamond abrasive belt on an end effector abrasive belt machine (2), starting a flexible processing device of an industrial robot, enabling mirror gluten to be in contact with the diamond abrasive belt, and grinding the mirror gluten according to the grinding contact force in the step (3), the linear velocity of the abrasive belt, the feeding speed of the robot and the three-dimensional simulation processing track in the step (4), wherein a rotary worktable (4) rotates in a coordinated mode, a force control floating flange (3) controls constant force processing, and a cooling and dust removing system (5) cools a processed part.
2. A method for SiC material optical element processing according to claim 1, characterized in that: in the step (2), the special tool comprises a fixing nut (100), a stud (800), a lateral support plate (200), an adjusting frame (300), a first connecting screw (410), a second connecting screw (420), a lateral support column (500), a back adjustable tool (600) and a bottom gasket (700); wherein the content of the first and second substances,
processing mounting point screw holes at the position corresponding to the maximum outer diameter of the SiC material optical element mirror blank on the rotary worktable;
the fixing nut (100) and the stud (800) are used for installing and fixing the lateral supporting column (500) and the lateral supporting plate (200) on the rotary worktable, and the inner side surface of the lateral supporting plate (200) is in contact with the maximum outer diameter of the SiC material optical element mirror blank;
one wall of the adjusting frame (300) is connected with the lateral supporting plate (200) through a first connecting screw (410), the other wall of the adjusting frame (300) is connected with the lateral supporting column (500) through a second connecting screw (420), and the adjusting frame (300) is adjusted by tightness of the first connecting screw (410) so as to limit the axial position of the lateral supporting plate (200) laterally;
a bottom gasket (700) is arranged between the rotary worktable and the SiC material optical element mirror blank, and the back adjustable tool (600) is contacted with the bottom of the SiC material optical element mirror blank.
3. A method for SiC material optical element processing according to claim 1, characterized in that: in the step (3), the abrasive belt substrate of the diamond abrasive belt is a polyester resin film substrate, the thickness is 2 mm-2.5 mm, and the breaking strength is 1200N/5 cm-3000N/5 cm; the diamond abrasive belt adopts a wavy butt joint, and the breaking strength is more than or equal to 1800N/5 cm.
4. A method for SiC material optical element processing according to claim 1, characterized in that: in the step (3), the type of the abrasive belt of the diamond abrasive belt is 40-200 meshes, the grinding contact force is 0-800N, the linear speed of the abrasive belt is 10-3000N/min, and the feeding speed of the robot is 1-30 mm/s.
5. A method for SiC material optical element processing according to claim 1, characterized in that: in step (4), the even-term aspheric equation is:
wherein Z is the concavity of the mirror surface, r is the aperture radius of the mirror surface,
6. A method for SiC material optical element processing according to claim 1, characterized in that: in the step (5), the industrial robot flexible processing device comprises a heavy-duty industrial robot (1), an end effector abrasive belt machine (2), a force control floating flange (3), a numerical control rotary worktable (4), a cooling and dust removing system (5) and a control system; wherein the content of the first and second substances,
the heavy-duty industrial robot (1) is provided with 6-axis adjusting mechanical arms, the tail end interfaces of the adjusting mechanical arms are provided with adapter supports, and the end effector abrasive belt machine (2) and the force control floating flange (3) are connected with the adjusting mechanical arms through the adapter supports;
the control system is used for controlling the track motion and the pose of the heavy-duty industrial robot (1) and the end effector abrasive belt machine (2), and controlling the force control value of the force control floating flange (3) at the same time;
the numerical control rotary worktable (4) is used for placing an SiC material optical element mirror blank;
the diamond abrasive belt is arranged on the end effector abrasive belt machine (2);
the cooling and dust removing system (5) is connected with the numerical control rotary worktable (4), and the cooling and dust removing system (5) is used for cooling a diamond abrasive belt of the end effector abrasive belt machine (2) and a contact processing area of a SiC material optical element mirror blank.
7. An apparatus for processing an optical element of SiC material, comprising: the device comprises a heavy-duty industrial robot (1), an end effector abrasive belt machine (2), a force control floating flange (3), a numerical control rotary worktable (4), a cooling and dust removing system (5) and a control system; wherein the content of the first and second substances,
the heavy-duty industrial robot (1) is provided with 6-axis adjusting mechanical arms, the tail end interfaces of the adjusting mechanical arms are provided with adapter supports, and the end effector abrasive belt machine (2) and the force control floating flange (3) are connected with the adjusting mechanical arms through the adapter supports;
the control system is used for controlling the track motion and the pose of the heavy-duty industrial robot (1) and the end effector abrasive belt machine (2), and controlling the force control value of the force control floating flange (3) at the same time;
the numerical control rotary worktable (4) is used for placing an SiC material optical element mirror blank;
the diamond abrasive belt is arranged on the end effector abrasive belt machine (2);
the cooling and dust removing system (5) is connected with the numerical control rotary worktable (4), and the cooling and dust removing system (5) is used for cooling a diamond abrasive belt of the end effector abrasive belt machine (2) and a contact processing area of a SiC material optical element mirror blank.
8. An apparatus for processing an optical element of SiC material according to claim 7, characterized in that: the base material of the abrasive belt of the diamond abrasive belt is a polyester resin film base material, the thickness is 2 mm-2.5 mm, and the breaking strength is 1200N/5 cm-3000N/5 cm; the diamond abrasive belt adopts a wavy butt joint, and the breaking strength is more than or equal to 1800N/5 cm.
9. An apparatus for processing an optical element of SiC material according to claim 7, characterized in that: the abrasive belt type of the diamond abrasive belt is 40-200 meshes, the grinding contact force is 0-800N, the linear speed of the abrasive belt is 10-3000N/min, and the feeding speed of the robot is 1-30 mm/s.
10. The utility model provides a special frock which characterized in that includes: the device comprises a fixing nut (100), a stud (800), a lateral support plate (200), an adjusting frame (300), a first connecting screw (410), a second connecting screw (420), a lateral support column (500), a back adjustable tool (600) and a bottom gasket (700); wherein the content of the first and second substances,
processing mounting point screw holes at the position corresponding to the maximum outer diameter of the SiC material optical element mirror blank on the rotary worktable;
the fixing nut (100) and the stud (800) are used for installing and fixing the lateral supporting column (500) and the lateral supporting plate (200) on the rotary worktable, and the inner side surface of the lateral supporting plate (200) is in contact with the maximum outer diameter of the SiC material optical element mirror blank;
one wall of the adjusting frame (300) is connected with the lateral supporting plate (200) through a first connecting screw (410), the other wall of the adjusting frame (300) is connected with the lateral supporting column (500) through a second connecting screw (420), and the adjusting frame (300) is adjusted by tightness of the first connecting screw (410) so as to limit the axial position of the lateral supporting plate (200) laterally;
a bottom gasket (700) is arranged between the rotary worktable and the SiC material optical element mirror blank, and the back adjustable tool (600) is contacted with the bottom of the SiC material optical element mirror blank.
Technical Field
The invention belongs to the technical field of optical manufacturing, and particularly relates to a device and a method for processing an optical element made of SiC material.
Background
Spatial optical elements generally refer to airborne and satellite-borne planar, spherical and aspheric optical elements in the air, space and air environments. The SiC optical element has the characteristics of low density, good radiation resistance, stable thermal property, high specific strength, high specific rigidity and the like, greatly reduces the weight of the optical element main mirror, and is one of the most ideal ultra-light main mirror optical element mirror body materials. However, since the SiC optical element has characteristics such as brittleness and hardness of the material as compared with conventional optical glass, it is difficult to efficiently, reliably, and precisely process the SiC optical element. In particular to the processing of large-caliber, light and thin space optical elements, has high precision, great difficulty and long period, and is a research hotspot in the technical field of world advanced optical manufacturing.
The SiC material optical element, especially the reflector is generally manufactured and formed by adopting a sintering process, the process is complex, the precision of the sintered surface shape is low, the machining allowance of 3-5 mm is always reserved on the reflection surface of the mirror blank, and meanwhile, in order to prevent cracking in the sintering and forming process, a plurality of process ribs are distributed on the large-diameter mirror blank to meet the forming requirement. Due to the limitation of the forming process method, the optical element cannot be directly used as a part after being formed, and a large amount of machining is needed to remove allowance so as to meet the use requirement of the high-precision optical element. In particular, in the application of the aerospace field, the requirements on the structural form, the dimensional accuracy and the form and position accuracy of an optical element are strict, the mechanical processing workload of the element after the material preparation is more, the processing period is long, the existing processing method mainly adopts rigid processing, and the problems of low efficiency, high risk, high difficulty and the like exist in the processing process.
In the technical field of large-caliber aspheric optical element processing, novel technologies such as ultra-precise grinding wheel grinding technology, determined plane surface numerical control polishing technology, aspheric surface small tool numerical control polishing technology, magnetofluid polishing technology, plasma polishing technology, ion beam polishing technology and the like are developed in sequence, and related process equipment, single process technology and applied process technology are mastered. However, these techniques involve high equipment costs and great operational difficulties, which require operators with high technical levels and considerable technical experience in industry.
In the technical field of processing of large-caliber aspheric optical elements in China, manufacturing equipment is generally laggard, a single-shaft pendulum type classical grinding system is largely adopted in a rough processing stage, the processing precision extremely depends on the experience of operators, the product precision repeatability is poor, the efficiency is low, and more than half a year is needed for processing one phi 500mm aspheric mirror. In the finish machining stage, along with the introduction of a grinding and polishing system of a numerical control machine tool, an ultra-precise grinding wheel grinding technology is utilized, the aspheric surface can be processed by milling, polishing and machining, but the requirements on the rigidity and the strength of the machine tool are high, particularly large-caliber optical elements are limited by the numerical control machine tool, the requirements on the performance of the equipment are extremely high, the equipment is expensive, the universality is not strong, meanwhile, special processing equipment with special protection is required, and the requirements on the skill level of operators are also high.
For a large-caliber aspheric optical workpiece, due to the brittleness of a processing material, the problem of catastrophic quality such as edge breakage, cracks and the like caused by rigid grinding is avoided in the process of removing the mirror surface allowance of an optical element, and the processing reliability is improved; meanwhile, the problems of long processing period, improvement of production efficiency in the processing stage and reduction of requirements on operators are solved. The existing processing equipment and rigid processing means have poor processing quality stability and low processing efficiency, and a safer and more effective processing method needs to be found.
Disclosure of Invention
The technical problem solved by the invention is as follows: the device and the method overcome the defects of the prior art, integrate a safe and effective flexible processing device with a proper stroke, reasonable grinding parameters and a grinding program according to the components, material characteristics, structural shape and performance of an optical element, and solve the technical problems of high risk, easy edge breakage, crack generation and other quality defects, poor processing reliability and low processing efficiency of the SiC optical element ceramic matrix hard and brittle material processing process through the integration of the device and the selection of a process method, wherein the flexible processing device comprises an abrasive belt characteristic, a grinding contact force, an abrasive belt rotating speed, an industrial robot and abrasive belt grinding end effector movement speed, a robot path and the like.
The purpose of the invention is realized by the following technical scheme: a method for processing an optical element of SiC material, the method comprising the steps of: (1) placing the SiC material optical element mirror blank on a rotary worktable, wherein the position of mirror ribs is upward; (2) positioning the SiC material optical element mirror blank through a special tool; (3) selecting the abrasive belt type, the grinding contact force, the abrasive belt linear speed and the feeding speed of the robot of the diamond abrasive belt according to the SiC material optical element mirror blank; (4) obtaining a three-dimensional simulation processing track according to an even-order term aspheric equation; (5) installing a diamond abrasive belt on an end effector abrasive belt machine, starting an industrial robot flexible processing device to enable the mirror gluten to be in contact with the diamond abrasive belt, and grinding the mirror gluten according to the grinding contact force in the step (3), the linear velocity of the abrasive belt, the feeding speed of the robot and the three-dimensional simulation processing track in the step (4), wherein the rotary worktable rotates in a coordinated mode, the force control floating flange controls constant force processing, and the cooling and dust removal system cools a processing part.
In the method for processing the optical element made of the SiC material, in the step (2), the special tool includes a fixing nut, a stud, a lateral support plate, an adjusting frame, a first connecting screw, a second connecting screw, a lateral support column, a back adjustable tool and a bottom gasket; wherein, the position corresponding to the maximum outer diameter of the SiC material optical element mirror blank on the rotary worktable is processed with a mounting point screw hole; the lateral support column and the lateral support plate are installed and fixed on the rotary worktable by the fixing nut and the stud, and the inner side surface of the lateral support plate is in contact with the maximum outer diameter of the SiC material optical element mirror blank; one wall of the adjusting frame is connected with the lateral supporting plate through a first connecting screw, the other wall of the adjusting frame is connected with the lateral supporting column through a second connecting screw, and the adjusting frame is adjusted by the tightness of the first connecting screw so as to limit the axial position of the lateral supporting plate laterally; a bottom gasket is arranged between the rotary worktable and the SiC material optical element mirror blank, and the back adjustable tool is contacted with the bottom of the SiC material optical element mirror blank.
In the method for processing the SiC material optical element, in the step (3), the abrasive belt substrate of the diamond abrasive belt is a polyester resin film substrate, the thickness is 2 mm-2.5 mm, and the breaking strength is 1200N/5 cm-3000N/5 cm; the diamond abrasive belt adopts a wavy butt joint, and the breaking strength is more than or equal to 1800N/5 cm.
In the method for processing the SiC material optical element, in the step (3), the type of the abrasive belt of the diamond abrasive belt is 40-200 meshes, the grinding contact force is 0-800N, the linear velocity of the abrasive belt is 10-3000N/min, and the feeding speed of the robot is 1-30 mm/s.
In the method for processing the optical element made of the SiC material, in the step (4), the even-order term aspheric equation is as follows:
wherein Z is the concavity of the mirror surface, r is the aperture radius of the mirror surface,i.e. the incident height of the light at the aspheric surface, c is the curvatureThe inverse of the radius of the beam of light,
In the method for processing the SiC material optical element, in the step (5), the flexible processing device of the industrial robot comprises a heavy-duty industrial robot, an end effector abrasive belt machine, a force-controlled floating flange, a numerical control rotary worktable, a cooling and dust removing system and a control system; the heavy-duty industrial robot is provided with a shaft adjusting mechanical arm, a switching support is arranged at an end interface of the adjusting mechanical arm, and an end effector abrasive belt machine and a force control floating flange are connected with the adjusting mechanical arm through the switching support; the control system is used for controlling the track motion and the pose of the heavy-duty industrial robot and the end effector abrasive belt machine and controlling the force control value of the force control floating flange; the numerical control rotary worktable is used for placing an SiC material optical element mirror blank; the diamond abrasive belt is arranged on the end effector abrasive belt machine; the cooling and dust removing system is connected with the numerical control rotary worktable and used for cooling a contact processing area of a diamond abrasive belt of the end effector abrasive belt machine and a SiC material optical element mirror blank.
An apparatus for optical element processing of SiC material, comprising: the system comprises a heavy-duty industrial robot, an end effector abrasive belt machine, a force-controlled floating flange, a numerical control rotary worktable, a cooling and dust-removing system and a control system; the heavy-duty industrial robot is provided with a shaft adjusting mechanical arm, a switching support is arranged at an end interface of the adjusting mechanical arm, and an end effector abrasive belt machine and a force control floating flange are connected with the adjusting mechanical arm through the switching support; the control system is used for controlling the track motion and the pose of the heavy-duty industrial robot and the end effector abrasive belt machine and controlling the force control value of the force control floating flange; the numerical control rotary worktable is used for placing an SiC material optical element mirror blank; the diamond abrasive belt is arranged on the end effector abrasive belt machine; the cooling and dust removing system is connected with the numerical control rotary worktable and used for cooling a contact processing area of a diamond abrasive belt of the end effector abrasive belt machine and a SiC material optical element mirror blank.
In the device for processing the SiC material optical element, the abrasive belt substrate of the diamond abrasive belt is a polyester resin film substrate, the thickness is 2 mm-2.5 mm, and the breaking strength is 1200N/5 cm-3000N/5 cm; the diamond abrasive belt adopts a wavy butt joint, and the breaking strength is more than or equal to 1800N/5 cm.
In the device for processing the SiC material optical element, the type of the abrasive belt of the diamond abrasive belt is 40-200 meshes, the grinding contact force is 0-800N, the linear speed of the abrasive belt is 10-3000N/min, and the feeding speed of the robot is 1-30 mm/s.
A special tool comprises: the device comprises a fixing nut, a stud, a lateral supporting plate, an adjusting frame, a first connecting screw, a second connecting screw, a lateral supporting column, a back adjustable tool and a bottom gasket; wherein, the position corresponding to the maximum outer diameter of the SiC material optical element mirror blank on the rotary worktable is processed with a mounting point screw hole; the lateral support column and the lateral support plate are installed and fixed on the rotary worktable by the fixing nut and the stud, and the inner side surface of the lateral support plate is in contact with the maximum outer diameter of the SiC material optical element mirror blank; one wall of the adjusting frame is connected with the lateral supporting plate through a first connecting screw, the other wall of the adjusting frame is connected with the lateral supporting column through a second connecting screw, and the adjusting frame is adjusted by the tightness of the first connecting screw so as to limit the axial position of the lateral supporting plate laterally; a bottom gasket is arranged between the rotary worktable and the SiC material optical element mirror blank, and the back adjustable tool is contacted with the bottom of the SiC material optical element mirror blank.
Compared with the prior art, the invention has the following beneficial effects:
(1) according to the invention, the industrial robot is used for grabbing the abrasive belt grinding end effector, flexible processing tools such as an elastic contact wheel and a flexible abrasive belt on the abrasive belt machine are in contact with the surface of the SiC material optical element, and the abrasive belt runs at a high speed to carry out grinding processing;
(2) according to the invention, aiming at the structural characteristics of the surface to be processed of the optical element, safe and efficient process parameters are summarized through tests, the robot path is optimized, the processing track is removed along the process rib, the integral processing mode is swept layer by layer, and compared with the traditional rigid processing intermittent grinding mode, the processing efficiency can be effectively improved, and the safety and the reliability of the processing process are ensured.
(3) By utilizing the device and the method for grinding the end effector by the industrial robot and the abrasive belt, the circumference of the abrasive belt is far longer than that of the abrasive wheel, the area of a processing area is large, the material removal rate is high, and the processing efficiency is high.
Drawings
Various other advantages and benefits will become apparent to those of ordinary skill in the art upon reading the following detailed description of the preferred embodiments. The drawings are only for purposes of illustrating the preferred embodiments and are not to be construed as limiting the invention. Also, like reference numerals are used to refer to like parts throughout the drawings. In the drawings:
fig. 1 is a schematic structural diagram of a dedicated tool provided in an embodiment of the present invention;
FIG. 2 is a schematic diagram of an apparatus for processing an optical element of SiC material according to an embodiment of the present invention;
FIG. 3 is a first schematic perspective view of a flexible processing method according to an embodiment of the present invention;
FIG. 4 is a second schematic perspective view of a flexible processing method according to an embodiment of the present invention;
fig. 5 is a third schematic perspective view of a flexible processing method according to an embodiment of the present invention.
Detailed Description
Exemplary embodiments of the present disclosure will be described in more detail below with reference to the accompanying drawings. While exemplary embodiments of the present disclosure are shown in the drawings, it should be understood that the present disclosure may be embodied in various forms and should not be limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the scope of the disclosure to those skilled in the art. It should be noted that the embodiments and features of the embodiments may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.
Fig. 2 is a schematic diagram of an apparatus for processing an optical element made of SiC material according to an embodiment of the present invention. As shown in fig. 2, the device for processing the optical element of the SiC material comprises a heavy-duty industrial robot 1, an end effector abrasive belt machine 2, a force control floating flange 3, a numerical control rotary table 4, a cooling and dust removing system 5 and a control system; wherein the content of the first and second substances,
the heavy-duty industrial robot 1 is provided with 6-axis adjusting mechanical arms, a switching support is arranged at an end interface of each adjusting mechanical arm, and the end effector abrasive belt machine 2 and the force control floating flange 3 are connected with the adjusting mechanical arms through the switching supports; the control system is used for controlling the track motion and the pose of the heavy-duty industrial robot 1 and the end effector abrasive belt machine 2 and controlling the force control value of the force control floating flange 3; the numerical control rotary worktable 4 is used for placing an SiC material optical element mirror blank; the diamond abrasive belt is arranged on the end effector abrasive belt machine 2; the cooling and dust removing system 5 is connected with the numerical control rotary worktable 4, and the cooling and dust removing system 5 is used for cooling a contact processing area of a diamond abrasive belt of the end effector abrasive belt machine 2 and a SiC material optical element mirror blank.
The heavy-duty industrial robot 1 is provided with a 6-axis adjusting mechanical arm, an end interface of the adjusting mechanical arm is provided with a switching bracket, an end effector abrasive belt machine 2 and a force control floating flange 3 are connected with the mechanical arm through the switching bracket, a control system is used for controlling the track motion and the pose of the industrial robot 1 and the end effector abrasive belt machine 2 and simultaneously controlling the force control numerical value of the force control floating flange 3, the precision can be controlled to be +/-2.2N, a numerical control rotary worktable 4 is used for placing an SiC material optical element mirror blank and can automatically control rotation and can be integrated and linked through the control system, a cooling and dust removing system 5 is distributed on the periphery and is provided with a cooling circulating water tank according to the working positions of the numerical control rotary worktable 4 and the industrial robot 1, a cooling water spray head end of the cooling and dust removing system 5 is connected with the industrial robot 1 and follows the motion track of the industrial robot 1 and the, the cooling water is sprayed on the contact processing area of the abrasive belt of the end effector abrasive belt machine 2 and the mirror blank.
The control system controls the industrial robot, the end effector, the force control floating flange, the numerical control rotary worktable and the cooling system to realize mutual linkage, the optical element mirror blank is placed on the rotary worktable and positioned on the rotary worktable, the control system controls the industrial robot to drive the end effector abrasive belt machine to move on the surface of the optical element according to a running track, a pose and specific process parameters preset by off-line programming, the numerical control rotary worktable rotates coordinately, the allowance such as gluten of the optical element mirror is ground and processed by the self-adaptive force compensation effector force control floating flange and a constant force grinding mode, the cooling system cools a processing part and collects dust generated in the processing process.
The device constructs a numerical control workbench into a fixed position to keep the optical element positioned (or rotates by taking the workbench as a circle center), an end effector capable of driving an abrasive belt to run is arranged at the tail end of a multi-joint adjustable mechanical arm of an industrial robot, the end effector comprises a triangular supporting frame, a driving wheel, a tension wheel, a contact wheel, a driving motor, a tension cylinder and a deviation rectifying mechanism, the driving wheel, the tension wheel and the contact wheel are respectively positioned at three vertexes of a triangle, the abrasive belt is wrapped on the outer circle of the wheel, the wheel train and the abrasive belt are driven to rotate by the driving motor, the tension and deviation rectification of the abrasive belt are controlled by the tension cylinder and the deviation rectifying device, and the abrasive. The device controls the grinding contact force of the contact wheel through the force control floating flange, and cools the device and the optical element in the processing process through a cooling system.
The flexible abrasive belt is driven to rotate at a high speed by the robot and the abrasive belt end effector, and moves relative to the optical element in a layer-by-layer scanning type overall processing mode according to safe and efficient process parameters and an optimized processing track, so that the surface of the optical element is ground by the abrasive belt end effector.
The present implementation also provides a method for processing an optical element of SiC material, the method comprising the steps of:
(1) placing the SiC material optical element mirror blank on a rotary worktable 4, wherein the position of the mirror surface rib is upward;
(2) positioning the SiC material optical element mirror blank through a special tool;
(3) selecting the abrasive belt type, the grinding contact force, the abrasive belt linear speed and the feeding speed of the robot of the diamond abrasive belt according to the SiC material optical element mirror blank;
(4) obtaining a three-dimensional simulation processing track according to an even-order term aspheric equation;
(5) the diamond abrasive belt is installed on an end effector abrasive belt machine 2, an industrial robot flexible processing device is started, mirror gluten is in contact with the diamond abrasive belt, grinding processing is conducted on the mirror gluten according to the grinding contact force in the step 3, the abrasive belt linear speed, the feeding speed of the robot and the three-dimensional simulation processing track in the step 4, the rotary worktable 4 rotates in a coordinated mode, the force control floating flange 3 controls constant force processing, and the cooling and dust removal system 5 cools a processing part.
In step (2), as shown in fig. 1, the special tool includes a
Because the SiC material optical element lens blank is a hard and brittle material, the special tool needs to ensure the position stability of the lens blank in the processing process without obvious vibration and play, and the tool mainly has the functions of limiting and preventing vibration, the special tool for lateral limiting, bottom supporting and vibration prevention is designed on the circumference and the bottom of the lens blank in a non-processing area according to the characteristics of the lens blank.
The diamond abrasive belt has the following characteristic requirements:
1) the base material of the abrasive belt is a polyester resin film base material, the thickness of the base material is 2 mm-2.5 mm, the breaking strength is 1200N/5 cm-3000N/5 cm, and the base material has a waterproof function.
2) The abrasive belt sand material is made of a diamond material with 40-200 meshes, and is attached to the base material in an electroplating mode.
3) The width requirement of the abrasive belt is as follows:
4) the length requirement of the abrasive belt is as follows: the belt sander is matched with a triangular belt sander, and the length tolerance is +/-5 mm.
5) The requirements of the abrasive belt joint are as follows: the wave-shaped butt joint is adopted, the breaking strength is more than or equal to 1800N/5cm, and the waterproof function is realized.
In the step (3), the type of the abrasive belt of the diamond abrasive belt is 40-200 meshes, the grinding contact force is 0-800N, the linear speed of the abrasive belt is 10-3000N/min, and the feeding speed of the robot is 1-30 mm/s.
In step (4), the even-term aspheric equation is:
wherein Z is the concavity of the mirror surface, r is the aperture radius of the mirror surface,
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