阅读说明：本技术 一种十字形压电振子驱动微流体阀 (Cross piezoelectric vibrator drives microfluid valve ) 是由 吴越 刘江伟 于 2018-07-26 设计创作，主要内容包括：本发明涉及一种十字形压电振子驱动微流体阀,包括：阀座(1)、柔性支架(2)、阀盖(3)、压电振子(4)、弹性悬架(5)和柔性阀塞(6),其中：所述四个柔性支架布置于阀座的上表面；所述压电振子为十字形,粘接在四个柔性支架的上端面；所述柔性支架内侧均布置有凹槽；所述弹性悬架为十字形,布置于柔性支架上的凹槽内；所述弹性悬架的中心部分布置有柔性阀塞安装孔,将柔性阀塞固定于柔性阀塞安装孔内；当压电振子通电时,在水平方向产生伸缩运动,带动柔性支架上半部分向内侧弯曲变形,经弹性悬架传递到柔性阀塞,引起其沿竖直方向上下运动,达到开闭阀的目的,同时,将压电振子的水平伸缩位移进行了放大,提升了阀的流量调节范围。(The invention relates to a cross piezoelectric vibrator driven microfluid valve, which comprises: disk seat (1), flexible support (2), valve gap (3), piezoelectric vibrator (4), elastic suspension (5) and flexible valve plug (6), wherein: the four flexible supports are arranged on the upper surface of the valve seat; the piezoelectric vibrators are in a cross shape and are bonded to the upper end faces of the four flexible supports; grooves are uniformly distributed on the inner side of the flexible support; the elastic suspension is in a cross shape and is arranged in a groove on the flexible support; a flexible valve plug mounting hole is formed in the central part of the elastic suspension, and the flexible valve plug is fixed in the flexible valve plug mounting hole; when the piezoelectric vibrator is electrified, telescopic motion is generated in the horizontal direction, the upper half part of the flexible support is driven to bend and deform towards the inner side, and the upper half part of the flexible support is transmitted to the flexible valve plug through the elastic suspension to cause the flexible valve plug to move up and down in the vertical direction, so that the purpose of opening and closing a valve is achieved, meanwhile, the horizontal telescopic displacement of the piezoelectric vibrator is amplified, and the flow regulation range of the valve is expanded.)

1. A cross-shaped piezoelectric vibrator actuated microfluidic valve comprising: disk seat (1), flexible support (2), valve gap (3), piezoelectric vibrator (4), elastic suspension (5) and flexible valve plug (6), wherein: a fluid inlet (11) and a fluid outlet (12) are arranged on the valve seat (1), and the fluid inlet (11) is positioned in the central position of the valve seat (1); the valve cover (3) has the same diameter as the valve seat (1) and is connected with the valve seat (1) to form a sealed cavity; the flexible support (2) is a cuboid, the size in the height direction is larger than that in the length direction and is larger than that in the width direction, and a first arc groove (21) and a second arc groove (22) are symmetrically arranged on two side surfaces formed by the length direction and the height direction; the flexible support (2) is provided with a rectangular groove (23), the rectangular groove (23) is positioned at the upper half part of the arc surface of the second arc groove (22), and the bottom surface of the groove is parallel to the side surface of the flexible support (2) formed by the length and the height; the four flexible supports (2) are arranged on the upper surface of the valve seat (1), the central axis of the valve seat (1) is taken as a valve central line, the second arc-shaped groove (22) faces the valve central line, the first arc-shaped groove (21) is far away from the valve central line, and the four flexible supports (2) are uniformly distributed at intervals of 90 degrees along the circumferential direction; the piezoelectric vibrators (4) are in a cross shape and are bonded to the upper end faces of the four flexible supports (2); the elastic suspension (5) is cross-shaped, and four free ends are arranged in rectangular grooves (23) on the four flexible supports (2); a flexible valve plug mounting hole (51) is formed in the central portion of the elastic suspension (5), and the flexible valve plug (6) is fixed in the flexible valve plug mounting hole (51).

2. The cross-shaped piezoelectric vibrator driven microfluidic valve of claim 1, wherein: the piezoelectric vibrator (4) is formed by sticking 4 pieces of piezoelectric sheet materials (41) on a cross-shaped elastic substrate (42).

Technical Field

The invention belongs to a flow valve in the field of fluid driving and control, and particularly relates to a cross-shaped piezoelectric vibrator driven microfluidic valve.

Background

In the whole liquid and air pressure system and related application equipment, the valve is used as an important element in the system to realize the control of fluid pressure, flow and flow direction, and directly influences the whole working process and working performance of the liquid and air pressure system. The requirements for valves in traditional applications are mainly to be suitable for high pressure, large flow output and accurate control. However, in the last two decades, with the rapid development of micro (nano) electromechanical systems (MEMS/NEMS), a new field called micro (nano) fluids has been created. Micro-miniature instruments and even micro-nano-scale control and output elements, such as micro (nano) fluid valves, micro (nano) fluid pumps, micro (nano) compressors, etc., are often required in microfluidic technology. The piezoelectric actuators are mainly used in micro-fluid systems and are mainly focused on miniature stop valves or on-off valves. The piezoelectric vibrator has high frequency response, high output precision and low power consumption, but the output displacement is small, and the modulation range of the flow of the valve is greatly limited.

Disclosure of Invention

In order to solve the problem that the flow modulation range of a valve is limited due to small output displacement of a piezoelectric vibrator in the conventional piezoelectric driving type microfluidic valve, a cross-shaped piezoelectric vibrator driving microfluidic valve is provided and comprises a valve seat (1), a flexible support (2), a valve cover (3), a piezoelectric vibrator (4), an elastic suspension (5) and a flexible valve plug (6), when the piezoelectric vibrator is electrified, the piezoelectric vibrator can generate stretching motion in the horizontal direction while vibrating in a reciprocating manner to drive the upper half parts of four flexible supports to bend and deform towards the inner side and transmit the stretching motion to the flexible valve plug through the elastic suspension to cause the flexible valve plug to move up and down in the vertical direction so as to achieve the purpose of opening and closing the valve, meanwhile, the horizontal stretching displacement of the piezoelectric vibrator is amplified, the flow modulation range of the valve is expanded, and the output force is large compared with a single rectangular piezoelectric vibrator, the sealing performance of the valve is improved.

In order to achieve the purpose, the invention adopts the following technical scheme:

the invention discloses a cross-shaped piezoelectric vibrator driven microfluidic valve, which comprises a valve seat (1), a flexible support (2), a valve cover (3), a piezoelectric vibrator (4), an elastic suspension (5) and a flexible valve plug (6), wherein:

a fluid inlet (11) and a fluid outlet (12) are arranged on the valve seat (1), and the fluid inlet (11) is positioned in the central position of the valve seat (1); the valve cover (3) has the same diameter as the valve seat (1) and is connected with the valve seat (1) to form a sealed cavity; the four flexible supports (2) are all cuboids, the length in the height direction is greater than that in the length direction and is greater than that in the width direction, and arc grooves (21) and (22) are uniformly formed in the two side surfaces formed by the length and the height; rectangular grooves (23) are formed in the four flexible supports (2), and the rectangular grooves (23) are located in the upper half positions of the arc surfaces of the arc grooves (22); the four flexible supports (2) are arranged on the upper surface of the valve seat (1), the central axis of the valve seat (1) is taken as a valve central line, the arc grooves (22) face the valve central line, the arc grooves (21) are far away from the valve central line, and the four flexible supports (2) are uniformly distributed at intervals of 90 degrees along the circumferential direction; the piezoelectric vibrators (4) are in a cross shape and are bonded to the upper end faces of the four flexible supports (2); the elastic suspension (5) is in a cross shape and is arranged in rectangular grooves (23) on the four flexible supports (2); a flexible valve plug mounting hole (51) is formed in the central portion of the elastic suspension (5), and the flexible valve plug (6) is fixed in the flexible valve plug mounting hole (51).

The piezoelectric vibrator (4) is formed by sticking 4 pieces of piezoelectric sheet materials (41) on a cross-shaped elastic substrate (42).

During the use, when letting in alternating voltage for the piezoelectric vibrator, its reciprocating vibration can produce concertina movement in the horizontal direction simultaneously, drives four flexible support upper parts and to the inboard bending deformation, transmits flexible valve plug through the elasticity suspension, arouses its along vertical direction up-and-down motion, reaches the purpose of opening and closing the valve, simultaneously, has enlargied the flexible displacement of level of piezoelectric vibrator, has promoted the flow control scope of valve, and relative single rectangle piezoelectric vibrator, and the output power is big, has promoted the sealing performance of valve.

Drawings

Fig. 1 is an isometric view of a cross-shaped piezoelectric vibrator actuated microfluidic valve of the present invention with a split valve cover.

Fig. 2 is a top view of the resilient suspension of a cross-shaped piezoelectric vibrator actuated microfluidic valve of the present invention.

Fig. 3 is a front view of a flexible support of a cross-shaped piezoelectric vibrator actuated microfluidic valve of the present invention.

Figure 4 is an isometric view of an elastic suspension of a cross-shaped piezoelectric vibrator actuated microfluidic valve of the present invention.

Figure 5 is an isometric view of a piezoelectric vibrator of a cross-shaped piezoelectric vibrator actuated microfluidic valve of the present invention.

Detailed Description

Referring to fig. 1 and 2, the cross-shaped piezoelectric vibrator driven microfluidic valve of the invention is composed of a valve seat (1), a flexible support (2), a valve cover (3), a piezoelectric vibrator (4), an elastic suspension (5) and a flexible valve plug (6), wherein:

a fluid inlet (11) and a fluid outlet (12) are arranged on the valve seat (1), and the fluid inlet (11) is positioned in the central position of the valve seat (1); the valve cover (3) has the same diameter as the valve seat (1) and is connected with the valve seat (1) to form a sealed cavity; the four flexible supports (2) are all cuboids, the length in the height direction is greater than that in the length direction and is greater than that in the width direction, and arc grooves (21) and (22) are uniformly formed in the two side surfaces formed by the length and the height; rectangular grooves (23) are formed in the four flexible supports (2), and the rectangular grooves (23) are located in the upper half positions of the arc surfaces of the arc grooves (22); the four flexible supports (2) are arranged on the upper surface of the valve seat (1), the central axis of the valve seat (1) is taken as a valve central line, the arc grooves (22) face the valve central line, the arc grooves (21) are far away from the valve central line, and the four flexible supports (2) are uniformly distributed at intervals of 90 degrees along the circumferential direction; the piezoelectric vibrators (4) are in a cross shape and are bonded to the upper end faces of the four flexible supports (2); the elastic suspension (5) is in a cross shape and is arranged in rectangular grooves (23) on the four flexible supports (2); a flexible valve plug mounting hole (51) is formed in the central portion of the elastic suspension (5), and the flexible valve plug (6) is fixed in the flexible valve plug mounting hole (51).

The piezoelectric vibrator (4) is formed by sticking 4 pieces of piezoelectric sheet materials (41) on a cross-shaped elastic substrate (42).

During the use, when letting in alternating voltage for the piezoelectric vibrator, its reciprocating vibration can produce concertina movement in the horizontal direction simultaneously, drives four flexible support upper parts and to the inboard bending deformation, transmits flexible valve plug through the elasticity suspension, arouses its along vertical direction up-and-down motion, reaches the purpose of opening and closing the valve, simultaneously, has enlargied the flexible displacement of level of piezoelectric vibrator, has promoted the flow control scope of valve, and relative single rectangle piezoelectric vibrator, and the output power is big, has promoted the sealing performance of valve.