阅读说明：本技术 步进电机的位置校准装置、射频匹配器及半导体设备 (Position calibration device of stepping motor, radio frequency matcher and semiconductor equipment ) 是由 刘建生 张磊 于 2019-11-08 设计创作，主要内容包括：本发明提供一种可变电容步进电机的位置校准装置、射频匹配器及半导体设备,该可变电容步进电机的位置校准装置包括：校准组件,设置在所述步进电机的转轴上,随所述转轴同轴旋转,且所述校准组件上设置有用于标识所述转轴的单位旋转角度的标识结构,所述单位旋转角度等于所述步进电机的步距角；测控单元,用于检测所述标识结构,根据检测结果生成位移脉冲信号,并根据所述位移脉冲信号确定所述步进电机的位置。通过本发明,提高了匹配器的可靠性。(The invention provides a position calibration device of a variable capacitance stepping motor, a radio frequency matcher and semiconductor equipment, wherein the position calibration device of the variable capacitance stepping motor comprises: the calibration assembly is arranged on a rotating shaft of the stepping motor and coaxially rotates along with the rotating shaft, and an identification structure for identifying a unit rotation angle of the rotating shaft is arranged on the calibration assembly, wherein the unit rotation angle is equal to a stepping angle of the stepping motor; and the measurement and control unit is used for detecting the identification structure, generating a displacement pulse signal according to a detection result and determining the position of the stepping motor according to the displacement pulse signal. The invention improves the reliability of the matcher.)

1. A position calibration device for a variable capacitance stepping motor, comprising:

the calibration assembly is arranged on a rotating shaft of the stepping motor and coaxially rotates along with the rotating shaft, and an identification structure for identifying a unit rotation angle of the rotating shaft is arranged on the calibration assembly, wherein the unit rotation angle is equal to a stepping angle of the stepping motor;

and the measurement and control unit is used for detecting the identification structure, generating a displacement pulse signal according to a detection result and determining the position of the stepping motor according to the displacement pulse signal.

2. The apparatus of claim 1,

the calibration assembly includes: the grating disc is arranged on a rotating shaft of the stepping motor and coaxially rotates along with the rotating shaft;

the identification structure includes: the grating disc comprises a plurality of light holes which are arranged on the grating disc, and the light holes are uniformly distributed on the grating disc in an annular mode, wherein any two adjacent light holes correspond to central angles equal to the unit rotation angle.

3. The apparatus of claim 2, wherein the instrumentation unit comprises: a photoelectric sensor, a photoelectric coupler and a processor, wherein,

the photoelectric sensor is used for emitting optical signals to an area, provided with the light holes, on the grating disc, and the optical signals pass through the light holes or are shielded along with the rotation of the grating disc;

the photoelectric sensor is also used for detecting whether the optical signal passes through the light hole or not and outputting a high level and a low level alternately according to a detection result to form the displacement pulse signal;

the photoelectric coupler is used for converting the displacement pulse signal into a voltage square wave signal and sending the voltage square wave signal to the processor;

the processor is configured to determine whether the displacement pulse signal is detected or not based on a rising edge and/or a falling edge of the voltage square wave signal, and determine a position of the stepping motor based on a detection result, wherein the count of the position of the stepping motor is increased by 1 when a forward driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, the count of the position of the stepping motor is decreased by 1 when a reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, and the count of the position of the stepping motor is not changed when the forward driving pulse or the reverse driving pulse is transmitted to the stepping motor but the displacement pulse signal is not detected.

4. The apparatus of claim 1, wherein the calibration component comprises:

the rotating conductive disc is arranged on a rotating shaft of the stepping motor and coaxially rotates along with the rotating shaft;

the fixed conductive disc is arranged opposite to the rotating conductive disc, is coaxial with the rotating shaft and is fixed when the rotating shaft rotates;

the identification structure includes: (ii) a

The first light holes are uniformly distributed on the rotating conductive disc in an annular shape, and the central angle corresponding to any two adjacent first light holes is equal to the unit rotation angle;

and the second light holes are uniformly distributed on the fixed conductive disc in an annular manner, wherein any two adjacent central angles corresponding to the second light holes are equal to the unit rotation angle.

5. The apparatus of claim 4, wherein the measurement and control unit comprises:

a power supply for supplying a first alternating voltage;

the capacitance detection circuit is used for converting the first alternating voltage into a second alternating voltage which changes along with the capacitance change between the fixed conductive disc and the rotating conductive disc and converting the second alternating voltage into the displacement pulse signal;

and a processor configured to detect the displacement pulse signal based on a digital-to-analog conversion function and determine a position of the stepping motor according to a detection result, wherein the count of the position of the stepping motor is increased by 1 when a forward driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, the count of the position of the stepping motor is decreased by 1 when a reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, and the count of the position of the stepping motor is not changed when the forward driving pulse or the reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is not detected.

6. The apparatus of claim 5, wherein the capacitance detection circuit comprises:

an operational amplifier, the reverse input end of which is connected with the power supply through a fixed capacitor, the reverse input end of which is also connected with the rotating conductive disc, the forward input end of which is grounded, and the output end of which is connected with the fixed conductive disc, and is used for converting the first alternating voltage into the second alternating voltage which is changed along with the capacitance change between the fixed conductive disc and the rotating conductive disc when the rotating conductive disc rotates;

and the positive end of the diode is connected with the output end of the operational amplifier, and the negative end of the diode is connected with the processor and used for converting the second alternating voltage into the displacement pulse signal and transmitting the displacement pulse signal to the processor.

7. The apparatus of claim 1,

the calibration assembly includes: a conductive plate, a conductive plate;

the identification structure includes: the light holes are uniformly distributed on the conductive disc in an annular shape, and the central angles corresponding to any two adjacent light holes are equal to the unit rotation angle;

the conductive disc and the rotating shaft are coaxially arranged;

the conductive plate and the conductive disc are arranged opposite to each other in the area provided with the light holes, and the size of the conductive plate is the same as that of the light holes;

when the rotating shaft rotates, the conducting plate and the conducting disc move relatively.

8. The apparatus of claim 7, wherein the instrumentation unit comprises:

a power supply for supplying a third alternating voltage;

a capacitance detection circuit for converting the third alternating voltage into a fourth alternating voltage that varies with a change in capacitance between the conductive plate and the conductive plate, and converting the fourth alternating voltage into the displacement pulse signal;

and a processor configured to detect the displacement pulse signal based on a digital-to-analog conversion function and determine a position of the stepping motor according to a detection result, wherein the count of the position of the stepping motor is increased by 1 when a forward driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, the count of the position of the stepping motor is decreased by 1 when a reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, and the count of the position of the stepping motor is not changed when the forward driving pulse or the reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is not detected.

9. A radio frequency matcher, comprising: variable capacitor, step motor, radio frequency sensor, controller, radio frequency sensor is used for gathering the radio frequency power value of radio frequency power, and the controller is used for according to the radio frequency power value control step motor adjusts the capacitance value of variable capacitor, its characterized in that still includes: a position calibration device for a variable capacitance stepping motor according to any one of claims 1 to 8.

10. A semiconductor device comprising the radio frequency matcher as set forth in claim 9.

Technical Field

The invention relates to the field of semiconductor manufacturing, in particular to a position calibration device of a variable capacitance stepping motor, a radio frequency matcher and semiconductor equipment.

Background

Currently, a typical rf discharge plasma generating system is shown in fig. 1, and includes: a radio frequency power supply, an automatic impedance matcher, and an inductive coupling coil or electrostatic chuck (not shown) located in the plasma generation chamber, the inductive coupling coil or electrostatic chuck being connected to the radio frequency power supply; for a plasma generation chamber, the equivalent impedance value of the plasma generation chamber can be changed continuously along with the process, when the characteristic impedance of a radio frequency power supply is not in conjugate matching with the impedance of a load, power reflection can be generated, power waste can be caused, meanwhile, the reflected power supply can damage the radio frequency power supply, the automatic impedance matcher can eliminate the power reflection, and the plasma generation chamber is ensured to obtain the maximum power from the radio frequency power supply.

Fig. 2 shows a conventional automatic impedance matcher, which includes a radio frequency sensor, a controller, a first variable capacitor C1 ', a second variable capacitor C2', a first stepping motor M1 ', a second stepping motor M2', a first stepping motor M1 'driving the first variable capacitor C1' to rotate, and a second stepping motor M2 'driving the second variable capacitor C2' to rotate; after the controller controls the first stepping motor M1 'and the second stepping motor M2' to reversely rotate to the zero point, the controller controls the first stepping motor M1 'to forwardly rotate to a first preset position, and controls the second stepping motor M2' to forwardly rotate to a second preset position; when the radio frequency sensor detects that the radio frequency power of the radio frequency power supply is input on the transmission line, the controller operates a matching control algorithm according to a signal output by the radio frequency sensor, and controls the adjustment amount of the first stepping motor M1 'and the second stepping motor M2', so that the impedance of the input end of the automatic matcher and the constant output impedance of the radio frequency power supply are in conjugate matching. When the radio frequency sensor detects that the radio frequency power of the radio frequency power source is not input on the transmission line, the controller controls the first stepping motor M1 'to return to the first preset position and the second stepping motor M2' to return to the second preset position. Further, in order to shorten the process matching time and achieve rapid matching, the rotating speed of the stepping motor is often required to be increased, but under the condition of high rotating speed or mechanical friction, the situation that the controller sends pulses and the motor does not rotate often occurs easily, namely, the step motor loses steps, the steps of the stepping motor are accumulated continuously along with the increase of the matching times of the automatic matcher, and the deviation of the first variable capacitor and the second variable capacitor from the first preset position and the second preset position becomes more and more serious until the matcher cannot be matched, so that the process is interrupted.

Disclosure of Invention

The invention aims to at least solve one technical problem in the prior art, and provides a position calibration device of a variable capacitance stepping motor, a radio frequency matcher and semiconductor equipment.

To achieve the object of the present invention, there is provided a position calibration apparatus for a variable capacitance stepping motor, comprising:

the calibration assembly is arranged on a rotating shaft of the stepping motor and coaxially rotates along with the rotating shaft, and an identification structure for identifying a unit rotation angle of the rotating shaft is arranged on the calibration assembly, wherein the unit rotation angle is equal to a stepping angle of the stepping motor;

and the measurement and control unit is used for detecting the identification structure, generating a displacement pulse signal according to a detection result and determining the position of the stepping motor according to the displacement pulse signal.

Preferably, the calibration assembly comprises: the grating disc is arranged on a rotating shaft of the stepping motor and coaxially rotates along with the rotating shaft;

the identification structure includes: the grating disc comprises a plurality of light holes which are arranged on the grating disc, and the light holes are uniformly distributed on the grating disc in an annular mode, wherein any two adjacent light holes correspond to central angles equal to the unit rotation angle.

Preferably, the measurement and control unit includes: a photoelectric sensor, a photoelectric coupler and a processor, wherein,

the photoelectric sensor is used for emitting optical signals to an area, provided with the light holes, on the grating disc, and the optical signals pass through the light holes or are shielded along with the rotation of the grating disc;

the photoelectric sensor is also used for detecting whether the optical signal passes through the light hole or not and outputting a high level and a low level alternately according to a detection result to form the displacement pulse signal;

the photoelectric coupler is used for converting the displacement pulse signal into a voltage square wave signal and sending the voltage square wave signal to the processor;

the processor is configured to determine whether the displacement pulse signal is detected or not based on a rising edge and/or a falling edge of the voltage square wave signal, and determine a position of the stepping motor based on a detection result, wherein the count of the position of the stepping motor is increased by 1 when a forward driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, the count of the position of the stepping motor is decreased by 1 when a reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, and the count of the position of the stepping motor is not changed when the forward driving pulse or the reverse driving pulse is transmitted to the stepping motor but the displacement pulse signal is not detected.

Preferably, the calibration assembly comprises:

the rotating conductive disc is arranged on a rotating shaft of the stepping motor and coaxially rotates along with the rotating shaft;

the fixed conductive disc is arranged opposite to the rotating conductive disc, is coaxial with the rotating shaft and is fixed when the rotating shaft rotates;

the identification structure includes: (ii) a

The first light holes are uniformly distributed on the rotating conductive disc in an annular shape, and the central angle corresponding to any two adjacent first light holes is equal to the unit rotation angle;

and the second light holes are uniformly distributed on the fixed conductive disc in an annular manner, wherein any two adjacent central angles corresponding to the second light holes are equal to the unit rotation angle.

Preferably, the measurement and control unit includes:

a power supply for supplying a first alternating voltage;

the capacitance detection circuit is used for converting the first alternating voltage into a second alternating voltage which changes along with the capacitance change between the fixed conductive disc and the rotating conductive disc and converting the second alternating voltage into the displacement pulse signal;

and a processor configured to detect the displacement pulse signal based on a digital-to-analog conversion function and determine a position of the stepping motor according to a detection result, wherein the count of the position of the stepping motor is increased by 1 when a forward driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, the count of the position of the stepping motor is decreased by 1 when a reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, and the count of the position of the stepping motor is not changed when the forward driving pulse or the reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is not detected.

Preferably, the capacitance detection circuit includes:

an operational amplifier, the reverse input end of which is connected with the power supply through a fixed capacitor, the reverse input end of which is also connected with the rotating conductive disc, the forward input end of which is grounded, and the output end of which is connected with the fixed conductive disc, and is used for converting the first alternating voltage into the second alternating voltage which is changed along with the capacitance change between the fixed conductive disc and the rotating conductive disc when the rotating conductive disc rotates;

and the positive end of the diode is connected with the output end of the operational amplifier, and the negative end of the diode is connected with the processor and used for converting the second alternating voltage into the displacement pulse signal and transmitting the displacement pulse signal to the processor.

Preferably, the calibration assembly comprises: a conductive plate, a conductive plate;

the identification structure includes: the light holes are uniformly distributed on the conductive disc in an annular shape, and the central angles corresponding to any two adjacent light holes are equal to the unit rotation angle;

the conductive disc and the rotating shaft are coaxially arranged;

the conductive plate and the conductive disc are arranged opposite to each other in the area provided with the light holes, and the size of the conductive plate is the same as that of the light holes;

when the rotating shaft rotates, the conducting plate and the conducting disc move relatively.

Preferably, the measurement and control unit includes:

a power supply for supplying a third alternating voltage;

a capacitance detection circuit for converting the third alternating voltage into a fourth alternating voltage that varies with a change in capacitance between the conductive plate and the conductive plate, and converting the fourth alternating voltage into the displacement pulse signal;

and a processor configured to detect the displacement pulse signal based on a digital-to-analog conversion function and determine a position of the stepping motor according to a detection result, wherein the count of the position of the stepping motor is increased by 1 when a forward driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, the count of the position of the stepping motor is decreased by 1 when a reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, and the count of the position of the stepping motor is not changed when the forward driving pulse or the reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is not detected.

According to another aspect of the present invention, there is also provided a radio frequency matcher, including: variable capacitor, step motor, radio frequency sensor, controller, radio frequency sensor is used for gathering the radio frequency power value of radio frequency power, and the controller is used for according to the radio frequency power value control step motor adjusts the capacitance value of variable capacitor still includes: the variable capacitance stepping motor position calibration device is described in the application.

According to another aspect of the present invention, there is also provided a semiconductor device including the radio frequency matcher described in the present application.

The invention has the following beneficial effects:

in the technical scheme of the position calibration device of the variable capacitance stepping motor, the calibration component can coaxially rotate along with the rotating shaft of the stepping motor, and the calibration component is provided with an identification structure for identifying the unit rotating angle of the rotating shaft, wherein the unit rotating angle is equal to the stepping angle of the stepping motor; the measurement and control unit is used for detecting the identification structure, generating a displacement pulse signal according to a detection result and determining the position of the stepping motor according to the displacement pulse signal; from this, the identification structure can identify the unit rotation angle of step motor's pivot, and the measurement and control unit can add up through the displacement pulse signal that detects the identification structure and correspond and obtain step motor's actual step number to can make step motor correctly return to zero point position according to step motor's actual step number, effectively avoided step motor because of losing the step can't correctly return zero point, thereby make the unable problem of matching of matcher, improved the reliability of matcher.

According to the technical scheme of the radio frequency matcher and the semiconductor equipment, the position calibration device of the variable capacitance stepping motor is included, so that the problem that the matcher cannot be matched due to the fact that the stepping motor cannot return to a zero point correctly due to step loss can be effectively avoided, and the reliability of the radio frequency matcher is improved.

Drawings

FIG. 1 is a schematic diagram of an exemplary RF discharge plasma generation system;

FIG. 2 is a diagram of an exemplary automatic impedance matcher;

fig. 3 is a schematic structural diagram of a position calibration apparatus for a variable capacitance stepping motor according to an embodiment of the present invention;

FIG. 4 is a schematic structural diagram of a calibration assembly in an embodiment of the present invention;

FIG. 5 is a schematic view of the distribution of light holes in an embodiment of the present invention;

FIG. 6 is a circuit diagram of a measurement and control unit according to an embodiment of the present invention;

FIG. 7 is a schematic diagram of a calibration assembly according to another embodiment of the present invention;

FIG. 8 is a circuit diagram of a measurement and control unit according to another embodiment of the present invention;

FIG. 9 is a schematic structural diagram of a calibration assembly in accordance with yet another embodiment of the present invention;

fig. 10 is a schematic structural diagram of a radio frequency matcher in an embodiment of the present invention.

Detailed Description

In order to make those skilled in the art better understand the technical solution of the present invention, the position calibration apparatus, the radio frequency matcher and the semiconductor device of the variable capacitance stepping motor provided in the present invention are described in detail below with reference to the accompanying drawings.

As shown in fig. 3, a schematic structural diagram of a position calibration apparatus for a variable capacitance stepping motor according to an embodiment of the present invention is provided, in which the position calibration apparatus for a variable capacitance stepping motor includes: the calibration assembly 1 and the measurement and control unit 2.

The calibration assembly 1 is disposed on the rotating shaft 3 of the stepping motor and coaxially rotates along with the rotating shaft 3 of the stepping motor, and an identification structure (not shown) for identifying a unit rotation angle of the rotating shaft 3 is disposed on the calibration assembly, wherein the unit rotation angle is equal to a stepping angle of the stepping motor.

Alternatively, the step angle of the stepping motor is determined by the characteristics of the stepping motor, for example, the step angle of the stepping motor may be 1.8 °.

The measurement and control unit 2 is used for detecting the identification structure, generating a displacement pulse signal according to a detection result, and determining the position of the stepping motor according to the displacement pulse signal.

The rotating shaft 3 of the stepping motor is a rotating shaft connected between the stepping motor and the variable capacitor of the matcher, the capacity value of the variable capacitor can be adjusted by controlling the rotating shaft 3 of the stepping motor to rotate in the matcher, so that the matcher reaches a matching state, and at the moment, the plasma generating chamber connected with the matcher can obtain the maximum power from a radio frequency power supply.

In a preferred embodiment of the present invention, as shown in fig. 4, which is a schematic structural diagram of the calibration assembly 1, the calibration assembly 1 includes: and the grating disc 11 is arranged on the rotating shaft 3 of the stepping motor, and the grating disc 11 coaxially rotates along with the rotating shaft 3 of the stepping motor.

In the preferred embodiment, the identification structure comprises: as shown in fig. 5, the plurality of light holes 111 are uniformly distributed on the grating disk 11 in an annular shape, wherein a central angle corresponding to any two adjacent light holes 111 is equal to a unit rotation angle.

Alternatively, the material used for the grating disk 11 includes any one of metal, film, and resin. Further, the grating disk is a circular grating disk, for example, the diameter of the grating disk may be 50-100 mm, and the thickness may be 0.2-1 mm.

Alternatively, the shape of the radial cross section of the light transmission hole 111 includes any of various shapes such as a rectangle, a square, a circle, and the like. As shown in fig. 5, the light-transmitting hole 111 has a rectangular shape in radial cross section. For example, the length of the rectangle may be 0.2 to 0.5 mm.

The calibration assembly provided by the embodiment of the invention realizes the identification of the unit rotation angle of the calibration assembly through the plurality of light holes arranged on the grating disc, and has the advantages of simple structure and easy realization.

Preferably, as shown in fig. 6, the measurement and control unit 2 in the embodiment of the present invention is a circuit diagram, and in fig. 6, the measurement and control unit 2 includes: a photosensor 21, a photocoupler 22 and a processor 23.

The photoelectric sensor 21 is configured to emit a light signal to an area of the grating disk 11 where the light transmission hole 111 is disposed, where the light signal passes through the light transmission hole or is blocked along with the rotation of the grating disk; the photosensor 21 is also used to detect whether the light signal passes through the light-transmitting hole 111, and alternately outputs a high level and a low level according to the detection result, forming a displacement pulse signal.

The photocoupler 22 is used for converting the displacement pulse signal into a voltage square wave signal and sending the voltage square wave signal to the processor 23.

The processor 23 is configured to determine whether a displacement pulse signal is detected according to a rising edge and/or a falling edge of the voltage square wave signal, and determine a position of the stepping motor according to a detection result, wherein the count of the position of the stepping motor is incremented by 1 when a forward driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, the count of the position of the stepping motor is decremented by 1 when a reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, and the count of the position of the stepping motor is not changed when the forward driving pulse or the reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is not detected.

Further, the photoelectric switch may be used as the photoelectric sensor 21. Preferably, as shown in fig. 6, the measurement and control unit 2 further includes: the specific positions of the resistors (R1, R2, R3, R4), the first dc power source VCC1, the second dc power source VCC2, and the clipping diode D1 are shown in fig. 6, and are not described herein again.

Specifically, the processor 23 may be a DSP (digital signal processor), a PLC (Programmable Logic Controller), or an ARM (Advanced RISCMachine), and the process of accumulating the actual steps of the stepping motor by the processor 23 according to the voltage square wave signal is as follows: the processor 23 sends 1 forward driving pulse to the stepping motor and the controller captures a displacement pulse through the photoelectric sensor at the same time, the position counter of the stepping motor is controlled to be increased by 1, and if the processor 23 sends 1 forward driving pulse to the stepping motor but the processor 23 does not capture the displacement pulse, the position counter of the stepping motor is not increased by 1; (2) when the processor 23 sends 1 inversion driving pulse to the stepping motor and the processor 23 captures the displacement pulse through the photosensor at the same time, the stepping motor position counter is decremented by 1, and if the processor 23 sends 1 inversion driving pulse to the stepping motor but the processor 23 does not capture the displacement pulse, the stepping motor position counter is not decremented by 1. The technical scheme of the invention counts the position of the stepping motor by adopting a method of accumulating displacement pulses, and can effectively avoid the situation that the stepping motor does not rotate when the processor sends the pulses, thereby realizing the real-time calibration of the position of the stepping motor and solving the problem of step loss of the stepping motor.

The measurement and control unit provided by the embodiment of the invention transmits the optical signal to the grating disk through the photoelectric sensor, converts the optical signal into the displacement pulse signal according to the feedback signal obtained when each light-transmitting hole passes through the photoelectric sensor, and converts the displacement pulse signal into the voltage square wave signal received by the processor through the photoelectric coupler, so that the voltage square wave signal is accumulated by the processor.

To sum up, in the position calibration apparatus for a variable capacitance stepping motor according to the embodiment of the present invention, the calibration component can coaxially rotate along with the rotating shaft of the stepping motor, and the calibration component has an identification structure for identifying a unit rotation angle of the rotating shaft, where the unit rotation angle is equal to a stepping angle of the stepping motor; the measurement and control unit is used for detecting the identification structure, generating a displacement pulse signal according to a detection result and determining the position of the stepping motor according to the displacement pulse signal; from this, the identification structure can identify the unit rotation angle of step motor's pivot, and the measurement and control unit can add up through the displacement pulse signal that detects the identification structure and correspond and obtain step motor's actual step number to can make step motor correctly return to zero point position according to step motor's actual step number, effectively avoided step motor because of losing the step can't correctly return zero point, thereby make the unable problem of matching of matcher, improved the reliability of matcher.

Further, in another embodiment of the present invention, the calibration assembly 1 may also adopt other structures, as shown in fig. 7, which is a schematic structural diagram of the calibration assembly 1 in another embodiment of the present invention, and the calibration assembly 1 includes: a rotating conductive disc 12 and a fixed conductive disc 13.

Wherein, the rotating conductive disc 12 is arranged on the rotating shaft 3 of the stepping motor and coaxially rotates along with the rotating shaft 3 of the stepping motor.

The fixed conductive disc 13 is disposed opposite to the rotating conductive disc 12, is disposed coaxially with the rotating shaft 3, and is fixed when the rotating shaft rotates. In an embodiment, the diameter of the fixed conductive disc 13 may be the same as the diameter of the rotating conductive disc 12. For example, the distance between the fixed conductive disc 13 and the rotating conductive disc 12 can be 1-2 mm, the diameters of the fixed conductive disc 13 and the rotating conductive disc 12 can be 50-100 mm, and the thicknesses of the fixed conductive disc 13 and the rotating conductive disc 12 can be 0.2-1 mm.

In this embodiment, the identifier structure includes: a plurality of first light transmission holes 121 and a plurality of second light transmission holes 131;

the first light holes 121 are uniformly distributed on the rotating conductive disc 12 in an annular shape, wherein a central angle corresponding to any two adjacent first light holes 121 is equal to a unit rotation angle.

The second light holes 131 are uniformly distributed on the fixed conductive plate 13 in an annular shape, wherein the central angle corresponding to any two adjacent second light holes 131 is equal to a unit rotation angle.

The calibration assembly 1 provided by this embodiment is implemented by using the rotating conductive disc 12 and the fixed conductive disc 13, because the rotating conductive disc 12 and the fixed conductive disc 13 are respectively provided with the first light transmission hole 121 and the second light transmission hole 131, when the rotating conductive disc 12 rotates, the corresponding area between the rotating conductive disc 12 and the fixed conductive disc 13 is continuously changed along with the periodic correspondence and non-correspondence of the first light transmission hole 121 and the second light transmission hole 131, so that a changed capacitance value can be obtained after an alternating voltage is loaded between the rotating conductive disc 12 and the fixed conductive disc 13, and a unit rotation angle of the calibration assembly 1 can be determined by detecting the changed capacitance value, so that identification of the unit rotation angle is implemented in another way by the present invention, and the present invention has a simple structure and is easy to implement, and provides diversity of implementation of the calibration assembly 1.

For the calibration assembly with the rotating conductive disc 12 and the fixed conductive disc 13, a measurement and control unit is also provided, as shown in fig. 8, which is a circuit diagram of the measurement and control unit in another embodiment of the present invention. In fig. 8, the measurement and control unit 2 includes: power supply 24, capacitance detection circuitry, processor 27, wherein the capacitance detection circuitry comprises: operational amplifier 25, diode 26.

Wherein the power supply 24 is adapted to provide a first alternating voltage.

The capacitance detection circuit is used for converting the first alternating voltage into a second alternating voltage which changes along with the capacitance conversion between the fixed conductive disc 13 and the rotating conductive disc 12, and converting the second alternating voltage into a displacement pulse signal.

The processor 27 is configured to detect a displacement pulse signal based on the digital-to-analog conversion function, and determine a position of the stepping motor based on a detection result, wherein the count of the position of the stepping motor is incremented by 1 when the forward driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, the count of the position of the stepping motor is decremented by 1 when the reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, and the count of the position of the stepping motor is not changed when the forward driving pulse or the reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is not detected.

Further, the inverting input terminal of the operational amplifier 25 is connected to the power supply 24 through a fixed capacitor 28, the inverting input terminal of the operational amplifier 25 is further connected to the rotating conductive plate 12, the forward input terminal of the operational amplifier 25 is grounded, and the output terminal of the operational amplifier 25 is connected to the fixed conductive plate 13 (not shown), specifically, in fig. 8, the capacitor Cx is formed by the fixed conductive plate 13 and the rotating conductive plate 12.

The operational amplifier 25 is used to convert the first ac voltage into a second ac voltage that varies as the capacitance Cx between the fixed conductive disc 13 and the rotating conductive disc 12 changes when the rotating conductive disc 12 rotates.

The positive terminal of the diode 26 is connected to the output terminal of the operational amplifier 25, and the negative terminal of the diode 26 is connected to the processor 27, for converting the second ac voltage into a displacement pulse signal and transmitting the displacement pulse signal to the processor 27.

In fig. 8, a capacitor C1 and a resistor RT are further connected in parallel between the negative terminal of the diode 26 and the ground, respectively, and the displacement pulse signal output by the diode 26 can be changed into a regular displacement pulse signal that can be received by the processor 27 through the capacitor C1 and the resistor RT, so that the processor 27 can process the displacement pulse signal conveniently.

According to the principle of the operational amplifier, the relationship between the output voltage Vout of the operational amplifier and the first ac voltage Vin can be expressed by formula (1), S represents the facing area between the rotating conductive plate 12 and the fixed conductive plate 13, d represents the distance between the rotating conductive plate 12 and the fixed conductive plate 13, e is the dielectric constant of the medium between the rotating conductive plate 12 and the fixed conductive plate 13, and C is the capacitance of the fixed capacitor 28.

When the rotating shaft of the matching motor rotates, the capacitance between the rotating conductive disc 12 and the fixed conductive disc 13 changes alternately, the output voltage Vout of the operational amplifier also changes alternately according to the formula (1), the output voltage Vout of the operational amplifier is detected by the diode 26, and the analog-to-digital conversion function of the processor 27 is used to detect the output voltage Vout. In the technical scheme of the invention, the processor 27 accumulates the actual steps of the stepping motor according to the displacement pulse signal as follows:

(1) when the processor 27 sends 1 forward driving pulse to the stepping motor and the processor 27 detects the change of the output voltage Vout of the operational amplifier at the same time, the position counter of the stepping motor is controlled to add 1, and if the processor 27 sends 1 forward driving pulse to the stepping motor but the processor 27 does not detect the change of the output voltage Vout of the operational amplifier, the position counter of the stepping motor does not add 1; (2) when the processor 27 sends 1 inversion driving pulse to the stepping motor and the processor 27 simultaneously detects the change in the magnitude of the output voltage Vout of the operational amplifier, the position counter of the stepping motor is controlled to be decremented by 1, and if the processor 27 sends 1 inversion driving pulse to the stepping motor but the processor 27 does not detect the change in the magnitude of the output voltage Vout of the operational amplifier, the position counter of the stepping motor is not decremented by 1. The technical scheme of the invention also adopts a displacement pulse phase accumulation method to count the position of the stepping motor, and can effectively avoid the situation that the stepping motor does not rotate when the processor sends pulses, thereby realizing the real-time calibration of the position of the stepping motor and solving the problem of step loss of the stepping motor.

The measurement and control unit provided by the embodiment adopts the operational amplifier to convert the first alternating voltage into the second alternating voltage which changes along with the capacitance change between the rotating conductive disc 12 and the fixed conductive disc 13, thereby realizing the function of detecting the displacement pulse signal obtained by the identification structure, and having simple structure and easy realization.

Further, in another embodiment of the present invention, the calibration assembly 1 may also adopt other structures, as shown in fig. 9, which is a schematic structural diagram of the calibration assembly 1 in another embodiment of the present invention, and the calibration assembly 1 includes: conductive pads 14 and conductive plates 15.

Wherein, the axis of the conductive disc 14 is coaxial with the rotating shaft 3 of the stepping motor.

The conductive plate 15 is disposed opposite to the conductive plate 14 and moves relative to the conductive plate 14 when the rotation shaft 3 of the stepping motor rotates.

In this embodiment, the identifier structure includes: the plurality of light holes 141 are disposed on the conductive plate 14, and the plurality of light holes 141 are uniformly distributed on the conductive plate in an annular shape, wherein a central angle corresponding to any two adjacent light holes 141 is equal to a unit rotation angle.

The conductive plate 15 is disposed opposite to the region of the conductive plate 14 where the light transmission hole 141 is disposed, and has the same size as the light transmission hole 141.

In the embodiment shown in fig. 9, the conductive plate 14 can rotate with the rotating shaft 3 of the stepping motor, and the conductive plate 15 is fixed when the conductive plate 14 moves (the fixing member for fixing the conductive plate 15 is not shown in fig. 9); alternatively, in other embodiments, the conductive plate 14 is coaxial with the stepper motor but does not rotate with the shaft of the stepper motor, and is rotated with the shaft 3 of the stepper motor by the conductive plate 15.

The calibration assembly provided by this embodiment is implemented by using the conductive plate 14 and the conductive plate 15, and since the light holes 141 are provided in the conductive plate 12, when the rotating shaft of the stepping motor rotates, the corresponding area between the conductive plate 14 and the conductive plate 15 is constantly changed along with the periodic correspondence and non-correspondence between the conductive plate 15 and the light holes 141, so that a changed capacitance value can be obtained after an alternating voltage is applied between the conductive plate 14 and the conductive plate 15, and the unit rotation angle of the calibration assembly 1 can be determined by detecting the changed capacitance value.

For the calibration assembly with the conductive plate 14 and the conductive plate 15, the circuit diagram of the measurement and control unit shown in fig. 8 may also be used, but the measurement and control object of the measurement and control unit needs to be changed into the capacitance between the conductive plate 14 and the conductive plate 15.

Specifically, the measurement and control unit includes: power, electric capacity detection circuitry, treater, wherein electric capacity detection circuitry includes: operational amplifier, diode.

Wherein the power supply is used for providing a third alternating voltage.

The capacitance detection circuit is used for converting the third alternating voltage into a fourth alternating voltage which changes along with the capacitance conversion between the conductive plate and the conductive plate, and converting the fourth alternating voltage into a displacement pulse signal.

The processor is configured to detect a displacement pulse signal based on the digital-to-analog conversion function and determine a position of the stepping motor based on a detection result, wherein the count of the position of the stepping motor is increased by 1 when the forward driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, the count of the position of the stepping motor is decreased by 1 when the reverse driving pulse is transmitted to the stepping motor and the displacement pulse signal is detected, and the count of the position of the stepping motor is not changed when the forward driving pulse or the reverse driving pulse is transmitted to the stepping motor but the displacement pulse signal is not detected.

Further, the inverting input terminal of the operational amplifier is connected to the power supply through a fixed capacitor, the inverting input terminal of the operational amplifier is further connected to the conductive plate 15, the forward input terminal of the operational amplifier is grounded, and the output terminal of the operational amplifier is connected to the conductive plate 14.

The operational amplifier is configured to convert the third ac voltage into a fourth ac voltage that varies with a change in capacitance between the conductive plate 14 and the conductive plate 15 when the conductive plate 14 and the conductive plate 15 perform relative motion.

And the positive end of the diode is connected with the output end of the operational amplifier, and the negative end of the diode is connected with the processor and used for converting the fourth alternating voltage into a displacement pulse signal and transmitting the displacement pulse signal to the processor.

The measurement and control unit that this embodiment provided adopts operational amplifier with the fourth alternating voltage that the third alternating voltage conversion changes along with the electric capacity between conducting disc and the conducting plate changes to realized detecting the function that identification structure obtained displacement pulse signal, simple structure realizes easily.

For the position calibration device of the variable capacitance stepping motor according to the above embodiment, the present invention further provides a radio frequency matcher, as shown in fig. 10, which is a schematic structural diagram of the radio frequency matcher according to an embodiment of the present invention, in which the radio frequency matcher includes: variable capacitor, step motor, radio frequency sensor 4, controller, radio frequency sensor 4 is used for gathering radio frequency power D's radio frequency power value, and the controller is used for controlling step motor according to radio frequency power value and adjusts variable capacitor's capacitance value, still includes: the position calibration device of the variable capacitance stepping motor in the present embodiment.

Specifically, in fig. 10, there are two variable capacitors, including a first variable capacitor C₁And a second variable capacitor C₂(ii) a Two stepping motors, including a first stepping motor M₁And a second stepping motor M₂A first variable capacitor C₁Is controlled by a first stepping motor M₁Adjusted, second variable capacitance C₂Is controlled by a second stepping motor M₂And (6) carrying out adjustment. Specifically, in fig. 10, a matching resistor R is further provided between the rf sensor 4 and the rf power supply D. The variable capacitor is adjusted through the rotating shaft of the stepping motor in the matcher, further, the radio frequency matcher can be connected with the plasma generation cavity, and when the matcher rotates to the matching state of the matcher through the rotating shaft of the stepping motor, the plasma generation cavity can obtain the maximum power from the radio frequency power supply.

The radio frequency matcher provided by the embodiment of the invention comprises the position calibration device of the variable capacitance stepping motor, and the stepping motor can be correctly returned to the zero position according to the actual step number of the stepping motor, so that the problem that the radio frequency matcher cannot be matched because the stepping motor cannot correctly return to the zero due to step loss is effectively avoided, and the reliability of the radio frequency matcher is improved.

Further, the invention also provides semiconductor equipment comprising the radio frequency matcher in the embodiment of the invention.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.