阅读说明：本技术 容器以及监测泄漏的系统、设备 (Container and system and device for monitoring leakage ) 是由 陈裕凯 于之跃 吴立仁 王希鸣 高克斌 叶书佑 锺佳宏 陈文雄 于 2019-07-30 设计创作，主要内容包括：本公开涉及一种容器、监测泄漏的系统及设备。容器用以将物件放置于其中。前述容器包括：容器本体、盖体、防撞部、配对识别机构以及检测液体感测器。盖体位于前述容器本体上方。防撞部被附接至前述容器本体和前述盖体的其中一或多者,且配置以缓冲冲击力。配对识别机构被配置以检测放置于前述容器本体中的物件。检测液体感测器被配置以检测来自前述物件的泄漏。(The present disclosure relates to a container, a system and an apparatus for monitoring leakage. The container is used for placing the object therein. The aforementioned container comprises: the container comprises a container body, a cover body, an anti-collision part, a pairing identification mechanism and a detection liquid sensor. The cover body is positioned above the container body. The impact prevention portion is attached to one or more of the container body and the lid and configured to cushion an impact force. The paired identification mechanism is configured to detect an object placed in the container body. The detection liquid sensor is configured to detect a leak from the object.)

1. A container, comprising:

a container body;

a cover body positioned above the container body;

a bumper attached to one or more of the container body and the lid and configured to cushion an impact force;

a mating identification mechanism configured to detect an object placed in the container body; and

a detection liquid sensor configured to detect a leak from the object.

2. The container of claim 1, wherein the bumper includes an upper bumper and a lower bumper, the upper bumper being located on the cover and the lower bumper being located on a bottom of the container body.

3. The container of claim 2, further comprising a shaking prevention portion configured to prevent relative movement between the container body and the cover and to reduce movement of the object between the upper and lower impact prevention portions.

4. The container of claim 2, wherein the lower bumper portion includes a recessed portion configured to surround a bottom surface of the article.

5. The container of claim 1, wherein:

a surface of a bottom of the container body descends from a boundary of the bottom of the container body toward a center of the bottom of the container body; and

an angle between the surface of the bottom of the container body and a horizontal plane is between about 5 degrees and about 45 degrees.

6. The container of claim 5, further comprising an indicator portion configured to indicate a status of the item based on a detection of the paired identification mechanism, wherein the status of the item includes one or more of a match with the container, a mismatch with the container, and the leak from the item.

7. The container of claim 5, further comprising a liquid collection well positioned in the center of the bottom of the container body, wherein the liquid collection well is configured to collect the leak from the item and the detection liquid sensor is positioned in the liquid collection well.

8. The container of claim 1, further comprising a carrier insert attached to and located below the container body, wherein the carrier insert includes a plurality of insert openings therethrough for lifting the container.

9. A system for monitoring leaks, comprising:

a central controller;

a communication network;

a container, comprising:

a container body;

a cover body positioned above the container body;

a bumper attached to one or more of the container body and the lid and configured to cushion an impact force;

a mating identification mechanism configured to detect an object placed in the container body; and

a detection liquid sensor configured to detect a leak from the object; and

a communication device configured to communicate with the central controller via the communication network.

10. An apparatus for monitoring leakage, comprising:

a container body, wherein a bottom of the container body comprises a lower anti-collision part;

a cover body positioned above the container body, wherein the cover body comprises an upper anti-collision part;

a detection liquid sensor configured to detect a leak from an object placed in the container body; and

a liquid collection well located at a bottom surface of the container body, wherein the liquid collection well is configured to collect the leak from the object, and the detection liquid sensor is located in the liquid collection well.

Technical Field

The disclosed embodiments relate to a container, a system and a device for monitoring leakage, and more particularly, to a container having an anti-collision part.

Background

Photoresist (PR) is a key element in the semiconductor industry. Photoresist is used at various stages of a semiconductor manufacturing process to form patterns on a wafer. Photoresist bottles (e.g., bottles containing photoresist used in semiconductor manufacturing) can be manually replaced to refill/replace the photoresist. However, manual replacement of the photoresist bottle is time consuming and costly, susceptible to human error, and compromised.

Disclosure of Invention

Embodiments of the present disclosure provide a container, comprising: the container comprises a container body, a cover body, an anti-collision part, a pairing identification mechanism and a detection liquid sensor. The cover body is positioned above the container body. The impact prevention portion is attached to one or more of the container body and the lid and configured to cushion an impact force. The paired identification mechanism is configured to detect an object placed in the container body. The detection liquid sensor is configured to detect a leak from the object.

The disclosed embodiment provides a system for monitoring leakage, including: a central controller, a communication network, a container, and a communication device. The aforementioned container comprises: the container comprises a container body, a cover body, an anti-collision part, a pairing identification mechanism and a detection liquid sensor. The cover body is positioned above the container body. The impact prevention portion is attached to one or more of the container body and the lid and configured to cushion an impact force. The mating identification mechanism is configured to detect an object placed in the container body. The detection liquid sensor is configured to detect a leak from the object. The communication device is configured to communicate with the central controller through the communication network.

The disclosed embodiment provides a device for monitoring leakage, including: a container body, a cover body, a liquid detection sensor and a liquid collection hole. The bottom of the container body comprises a lower anti-collision part. The cover body is positioned above the container body and comprises an upper anti-collision part. The detection liquid sensor is configured to detect a leak from an object placed in the container body. The liquid collection well is located on the bottom surface of the container body and is configured to collect leakage from the object. The liquid detecting sensor is located in the liquid collecting hole.

Drawings

The concepts of the embodiments of the present invention will be understood in light of the following detailed description taken in conjunction with the accompanying drawings. It should be noted that, in accordance with the standard practice in the industry, the various components in the drawings are not necessarily drawn to scale. In fact, the dimensions of the various elements may be arbitrarily expanded or reduced for clarity of illustration.

Fig. 1A-1C illustrate different views of an exemplary photoresist container according to some embodiments.

Fig. 2A-2B illustrate top and cross-sectional views of an exemplary container bottom according to some embodiments.

Fig. 3A-3B illustrate top and cross-sectional views of an exemplary lower impact portion, according to some embodiments.

Fig. 4A-4B illustrate cross-sectional views of an exemplary position locking pin according to some embodiments.

FIG. 5 illustrates an exemplary system according to some embodiments.

FIG. 6 is a diagram of an example computer system for implementing various embodiments.

Description of reference numerals:

100. 110, 120 views

101 photoresist bottle

101-1 bottle top

101-2 bottle bottom

102 cover body

103 container body

104 lower bumper

105 carrier insertion part

106 bottom platform

107-1, 107-2 insertion openings

108 pairing identification device

109 upper collision-prevention part

111. 302 opening

112 anti-shaking part

112-1 first part

112-2 second part

113-1, 113-2 hinge

114. 303, 403 recessed part

150 container

200. 300 plan view

202 element

203-1, 203-2, 203-3 position locking pin

204 liquid collecting hole

205 integrated circuit

206 detecting liquid sensor

250. 350 section view

301 peripheral edge

400. 450 enlarged cross-sectional view

401 pin cap

402 pin body

500 system

501 container

502 central controller

503. 503-1, 503-2 receiving device

504 communication network

600 computer system

602 input/output interface (user input/output interface)

603 input/output device (user input/output device)

604 processor

606 communication infrastructure

608 Main memory

610 secondary storage

612 hard disk drive

614 removable storage drive

618. 622 removable storage unit

620 interface

624 communication interface

626 communication path

628 remote device, network, entity

Angle A

2-2 ', 3-3' direction

4-4' center line

Detailed Description

The following disclosure provides many different embodiments, or examples, for implementing different features of embodiments of the disclosure. Specific examples of components and arrangements are described below to simplify the description of the embodiments of the present disclosure. These specific examples are exemplary only and not intended to be limiting. In addition, the same reference signs and/or labels may be reused in different examples of the following disclosure. These iterations are for simplicity and clarity and are not intended to limit the relationship between the various embodiments and/or structures discussed.

In semiconductor manufacturing, Photoresist (PR) is a key element for forming various patterns/features. The photoresist is stored in bottles that are distributed at various locations in the manufacturing facility. A plastic cap/bag may be used to cover the photoresist bottle to prevent the possibility of damage/overflow of the photoresist. In use, the photoresist bottle is placed in a container that holds the photoresist bottle in a proper orientation (orientation) (e.g., the top of the bottle is facing up) to prevent photoresist spillage/leakage. When the photoresist bottle is empty or the amount of photoresist is low, the technician may move the photoresist bottle, for example, according to the report, manually move the photoresist bottle to a particular location (e.g., a warehouse where empty photoresist bottles are placed), and manually refill the photoresist. Replacement of the photoresist vial may be recorded/confirmed by scanning the barcode dispensed onto the photoresist vial. However, during replacement and shipping of the photoresist bottle, little or no protection is provided to the photoresist bottle from impact and/or improper human handling such that the photoresist bottle may be susceptible to damage or photoresist spillage. Scanning the bar code also requires the attention of a technician and makes it difficult to detect human error (e.g., misplacing an incorrect photoresist vial). Therefore, replacing and transporting the photoresist bottles requires an undesirably large amount of time and labor, and is costly. In addition, when damage and/or spillage occurs, it is difficult to detect the location and time of the damage/spillage.

The embodiment of the disclosure describes equipment and a system for monitoring photoresist leakage. The photoresist bottle container (or "container" for ease of description) can hold the photoresist bottle in the proper orientation and prevent potential photoresist bottle collisions and photoresist leakage. The container provides protection to the photoresist bottle during use and shipping. The aforementioned containers enable automated replacement, transport and registration of photoresist bottles. The container may also allow for detection of photoresist leaks and bi-directional communication with a central controller regarding the status of the container. When a photoresist leak occurs, the container may communicate with a central controller and/or other devices and transmit detailed information of the overflow/leak (e.g., Identification (ID) code, location, and time of the photoresist bottle/container). Thus, photoresist overflow/leakage can be easily detected.

The photoresist bottle is less likely to collide with the side wall and other portions of the container by the protection of the container. Therefore, the photoresist bottle is less prone to photoresist overflow/leakage. In addition, the container may confirm that the correct photoresist bottle is placed in the container by an appropriate pairing identification device (e.g., radio frequency identification method, bluetooth method, etc.), making replacement/refilling of the photoresist bottle less susceptible to human error. The container may further include upper and lower bumpers that prevent the photoresist bottle from being placed in an orientation that deviates from a vertical orientation. The container may further include a shaking prevention part which prevents the photoresist bottle from jumping and moving in the container. With the disclosed container and method, the photoresist bottle is less susceptible to damage and photoresist spillage/leakage. Replacing and shipping the photoresist bottle can be less time consuming and reduce costs.

Fig. 1A, 1C illustrate different views 100, 120 of an exemplary container with the lid closed at different viewing angles, while fig. 1B illustrates a view 110 of an exemplary container with the lid open according to some embodiments. As shown in fig. 1A-1C, the container 150 may include a cover 102, a container body 103, a lower bump guard 104, a carrier insertion portion 105, a portion of a mating identification device 108, an upper bump guard 109, and a wobble prevention portion 112. The cover 102 may include an opening 111 to reveal the top of the photoresist bottle. The lid 102 may be commonly connected to the container body 103 by any suitable means 113 that allows the lid 102 to be opened and closed. For illustrative purposes, a pair of hinges 113-1, 113-2 are shown as an example. The carrier insert 105 may include a plurality of insert openings for insertion of a suitable support structure (e.g., a robot arm) and may carry the container 150 on a carrier (e.g., a carrier) for refilling/replacing the photoresist bottle. For illustrative purposes, two insertion openings 107-1, 107-2 are shown. When the photoresist bottle 101 is placed in the container 150 and the cover 102 is closed, the bottle top 101-1 may fit into the opening 111 and be exposed from the opening 111, and the bottle bottom 101-2 may fit into the lower bump guard 104 and rest thereon. The anti-wobble portion 112 can fix/limit the movement between the cover 102 and the container body 103, and the upper and lower bumper portions 109 and 104 can contact the photoresist bottle 101 and keep the photoresist bottle 101 facing upward (e.g., straight upward). Therefore, the movement of the photoresist bottle 101 may be restricted or not moved in the container 150. The container 150 will be described in detail below.

The cover 102 may comprise any suitable material having sufficient rigidity and strength to hold and protect the photoresist bottle 101. For example, the cover 102 may be formed from a material including one or more of reinforced plastic and metal. In some embodiments, cover 102 comprises stainless steel. The cover 102 may include an opening 111 to reveal the bottle top 101-1. The exposed bottle top 101-1 may allow for other applications to operate on the photoresist bottle 101. For example, the lid 102 may reveal the cover of the photoresist bottle 101 (e.g., at the top most portion of the bottle top 101-1) to allow an automated robot to rotate and open the lid (when the lid 102 is closed). When the cover 102 is closed, the photoresist bottle 101 can be maintained in a stable position/orientation, and thus the photoresist bottle 101 is not prone to overflow. By being commonly connected to the container body 103, the cover 102 may be flipped down to close the container 150 or flipped up to open the container 150.

The container body 103 may comprise any suitable material having sufficient rigidity and strength to hold and protect the photoresist bottle 101 and other components in the container 150. The container body 103 may be made of the same material as the cap body 102 or a different material. In some embodiments. The container body 103 comprises reinforced plastic because of its light weight. The container body 103 may have any suitable shape that can accommodate the photoresist bottle 101. For example, the horizontal cross-section of the container body 103 (e.g., along the X-Y plane) may be square, circular, rectangular, and/or irregularly shaped. The horizontal cross-section of the container body 103 may have a larger dimension than the photoresist bottle 101 to allow the photoresist bottle 101 to be fully placed within the container body 103. In some embodiments, cover 102 has the same shape and dimensions as a horizontal cross-section. In some embodiments, the horizontal cross-section of the container body 103 is square.

The upper bump guard 109 may be secured to the cover 102 and the lower bump guard 104 may be placed on the container bottom of the container 150 (e.g., the bottom of the container body 103). The upper bumper 109 and the lower bumper 104 may comprise any suitable material having the desired stiffness and may provide support and cushioning of the photoresist bottle 101. The material forming the upper and lower bumpers 109, 104 should have the desired stiffness and softness to provide support for the container 150 and to cushion any movement/impact of the photoresist bottle 101. For example, the aforementioned materials may include shock absorbing materials such as various rubbers (e.g., nitrile rubber, polypropylene (PP) rubber and/or polyvinyl chloride (PVC)). In some embodiments, the upper impact portion 109 and the lower impact portion 104 may comprise nitrile rubber.

The upper bump guard 109 and the lower bump guard 104 may have any suitable shape that is capable of maintaining the position and orientation of the photoresist bottle 101. For example, the upper bump guard 109 may be secured to the inside of the lid 102 (e.g., the side facing the inside of the container 150) by any suitable means (e.g., adhesive and/or bonding) and has a horizontal cross-section that is smaller than the horizontal cross-section of the lid 102. In some embodiments, the horizontal cross-section of the upper bump guard 109 is circular and matches the surface perimeter of the photoresist bottle 101 such that the upper bump guard 109 can contact and cushion the photoresist bottle 101 in both the vertical direction (e.g., the Z-axis) and any horizontal direction (e.g., in the X-Y plane). When the cover body 102 is turned downward to close the container 150, the upper collision prevention part 109 may contact the photoresist bottle 101 and buffer the movement of the photoresist bottle 101, so that the photoresist bottle 101 may be kept upward with improved stability.

Meanwhile, when the photoresist bottle 101 is placed in the container 150 and contacts the lower bump guard 104, the lower bump guard 104 may be fixed to the bottom of the container. The outer periphery of the lower bump guard 104 may match or be similar to the inner periphery of the container body 103 such that the lower bump guard 104 may fit securely into the container body 103. Thus, movement of the lower impact prevention portion 104 may be reduced/prevented. In some embodiments, the lower bump guard 104 includes a recess 114 that allows the bottle bottom 101-2 to fit into the recess 114, which in turn may further maintain the position and orientation of the photoresist bottle 101. The recess 114 may be located substantially in the center of the lower bump guard 104 and may have the same shape and size as the bottle bottom 101-2. When the photoresist bottle 101 is placed on the lower bump guard 104, the bottle bottom 101-2 can fit firmly in the recess 114 and rest in the recess 114. The shape and size of the recess 114 may limit movement of the photoresist bottle 101 in both the vertical direction (e.g., along the Z-axis) and the horizontal direction (e.g., along the X-Y plane). In some embodiments, the horizontal cross-section of the bottle bottom 101-2 is circular and the horizontal cross-section of the recess 114 is circular of substantially the same size. When the photoresist bottle 101 is placed on the recess 114, the lower bump guard 104 may contact and cushion the photoresist bottle 101 in both the vertical direction (e.g., Z-axis) and any horizontal direction (e.g., in the X-Y plane).

Thus, the use of the upper and lower bump guards 109 and 104 may reduce movement of the photoresist bottle 101 in different directions. They can support the photoresist bottle 101 from various directions (e.g., horizontally and vertically), and impacts/shocks of the photoresist bottle 101 in any direction can be absorbed or cushioned by the upper bump guard 109 and/or the lower bump guard 104 being contacted. The photoresist bottle 101 can be held in place and orientation (e.g., straight up) with improved stability. Therefore, the photoresist bottle 101 is less likely to collide with other portions of the container 150.

After the photoresist bottle 101 is placed in the container 150, the shaking prevention part 112 may prevent the photoresist bottle 101 from moving and sliding/bouncing (e.g., caused by a reaction force from the lower bump guard 104). The shaking prevention part 112 may fix the relative movement between the cover body 102 and the container body 103 so that the movement of the top of the photoresist bottle 101 may be restricted to the opening 111, and the upper and lower collision prevention parts 109 and 104 may restrict/prevent the vertical movement of the photoresist bottle 101. Therefore, the photoresist bottle 101 can be prevented from being shaken after being put into the container 150. The anti-wobble portion 112 can include any device and/or structure capable of restricting movement of the photoresist bottle 101. In one example, the anti-rock 112 may be a toggle latch. When the photoresist bottle 101 is placed in the container 150 and the lid 102 is flipped down onto the container body 103, the first and second portions 112-1 and 112-2 of the toggle latch may be closed to lock the relative motion between the lid 102 and the container body 103 so that the lid 102 and the container body 103 may be stationary relative to each other. Thus, movement of the photoresist bottle 101 may be reduced/eliminated. In some embodiments, the anti-wobble portion 112 can maintain a desired amount of pull force such that the anti-wobble portion 112 can cause the cover 102 to be stationary relative to the container body 103 under a reaction force from the photoresist bottle 101. Accordingly, the photoresist bottle 101 may be supported by the container 150 through the upper and lower bump guards 109 and 104 with improved stability, and the movement of the photoresist bottle 101 may be further restricted.

The container 150 and the photoresist bottle 101 may collectively include a pairing identification device. The pairing identification device may include any suitable wireless identification method that can specifically and automatically pair the container 150 with the photoresist bottle 101. For example, the pairing identification device may include a Radio Frequency Identification (RFID) tag, a reader and/or a Bluetooth transmitter, reader. In some embodiments, container 150 and photoresist bottle 101 each comprise a different one of an RFID tag and a reader. For illustrative purposes, an RFID tag is labeled on the container 150. For example, container 150 may include an RFID reader, and photoresist bottle 101 may include an RFID tag. For illustrative purposes, one portion of the paired identification device is shown as the RFID reader 108 on the container 150, and another portion of the paired identification device, the RFID tag, may be located on the photoresist bottle 101 and not shown. The RFID reader 108 and tag may be placed in any suitable location on the container 150 and the photoresist bottle 101, respectively. The RFID reader 108 may communicate with a central controller of the manufacturing facility over a wireless network to provide updated status of the photoresist bottles 101. The RFID reader 108 may be designed to specifically identify the photoresist bottle 101 by an RFID tag. In some embodiments, when another photoresist bottle (e.g., a photoresist bottle having an RFID tag that does not match the RFID reader 108) is incorrectly placed in the container 150, an error message may be communicated to the central controller, and a notification may be communicated to a receiving device of one or more technicians (e.g., a technician responsible for replacing the photoresist bottle) to notify of the incorrect photoresist bottle replacement. The error message and/or notification may also include the ID of the container/photoresist bottle, the time, and the location of the replacement. In some embodiments, the container 150 includes an indicator light (not shown) attached in a suitable location, such as a sidewall of the container body 103 or the lid 102. The indicator lights may communicate with the container 150 by wired and/or wireless means. In some embodiments, the indicator light may emit a warning signal (e.g., a red flashing light) when the wrong photoresist vial is placed in the container 150; when the photoresist bottle 101 is placed in the container 150, the indicator light will emit a different signal (e.g., a green light). Thus, the container 150 can automatically identify the paired photoresist bottle 101 and transmit a notification when the wrong photoresist bottle is placed within the container 150. Thus, replacing photoresist bottles with containers 150 may be less error prone and less time consuming.

The carrier insert 105 may include a plurality of insert openings 107 that may allow a suitable support structure to insert and lift the container 150 and become one piece. The photoresist bottle 101 may then be moved with the container 150 (e.g., for replacement/refilling), and the container 150 may protect and support the photoresist bottle 101 during transport. Suitable support structures may be any shape to fit within insertion opening 107 and may include any structure having sufficient rigidity to bear the weight of container 150 and photoresist bottle 101 filled with photoresist. The carrier insert 105 may include any suitable number of insert openings 107. For illustrative purposes, two insertion openings 107-1 and 107-2 are shown. The support structure may be manually or automatically operated. In some embodiments, the support structure may include robotic arms/forks that are part of the transport vehicle. Robotic arms/forks may be inserted into insertion openings 107-1 and 107-2, lift container 150, and move container 150 onto a transport vehicle. In some embodiments, the vertical cross-section of the insertion opening 107 (e.g., the cross-section along the X-Z plane) is rectangular, and the insertion opening has a sufficient horizontal length (e.g., the length along the Y-axis) to allow for smooth picking of the container 150. In some embodiments, the insertion opening 107 is a through hole along the Y-axis. Carrier insert 105 may comprise any suitable material having sufficient rigidity and strength. In some embodiments, carrier insert 105 comprises a metal and/or alloy (e.g., stainless steel). The carrier insert 105 may be manufactured separately from the container body 103 and may be joined to the container body 103 after the container body 103 is formed. The carrier insert 105 may be securely attached to the bottom of the container body 103 by any suitable means, such as bonding/bonding and/or clinching.

In some embodiments, the container 150 includes a bottom platform 106 located below the carrier insert 105 and securely fixed to the carrier insert 105. The bottom platform 106 may include a bottom surface that is sufficiently flat to allow the container 150 to stably maintain its orientation in a vertical direction (e.g., the Z-direction). The bottom platform 106 may also cushion the impact when the container 150 is placed on a surface. The bottom platform 106 may have a larger horizontal area (e.g., along the X-Y plane) than the carrier insert 105 so that the container 150 may rest on a horizontal surface with improved stability. Bottom platform 106 may have any suitable shape along the X-Y plane. In some embodiments, the bottom platform 106 is circular and the carrier insert 105/container 150 is secured to the center of the bottom platform 106. The bottom platform 106 may comprise any suitable material having sufficient rigidity and strength to support the container 150 and the photoresist bottle 101. In some embodiments, the bottom platform 106 may comprise a metal and/or alloy (e.g., stainless steel).

Fig. 2A illustrates a top view 200 of an exemplary container bottom (e.g., the bottom of container 150) according to some embodiments, while fig. 2B illustrates a cross-sectional view 250 of the exemplary container bottom in the 2-2' direction according to some embodiments. Fig. 2A and 2B show the structure and components of a container bottom without a lower bumper. As shown in fig. 2A and 2B, the container bottom may be surrounded by a container body 103. The bottom of the container may include a plurality of position locking pins 203 to fix the position of the lower bump stop when a photoresist bottle is placed on the lower bump stop. The aforementioned position locking pins 203 can support the lower bump stopper and the photoresist bottle from the rear side of the lower bump stopper. In order to improve the stability of the photoresist bottle, the number of the position locking pins 203 may be at least 3, and the position locking pins 203 may be symmetrically distributed around the center of the bottom of the container (or the center of the photoresist bottle 101, or the center of the pattern formed by the locking pins 203). For illustrative purposes, three position locking pins (e.g., 203-1, 203-2, and 203-3) are shown. The bottom of the container may also include a leak detection mechanism that includes a liquid collection well 204 and a detection liquid sensor 206 located at the bottom of the liquid collection well 204. When overflow occurs, the overflowing photoresist can flow into the liquid collection well 204 and can be detected by the detection liquid sensor 206. The fluid collection well 204 can have any suitable cross-section along a horizontal plane (e.g., an X-Y plane). In some embodiments, the liquid collection well 204 may have a circular cross-section. The bottom of the container may also include an Integrated Circuit (IC) 205 with suitable software and hardware to facilitate communication between the different parts of the container and between the container and the central controller. The integrated circuit 205 may be embedded in the bottom of the container and may receive the detection result from the detection liquid sensor 206. The integrated circuit 205 may also include a portion of a mating identification portion (e.g., an RFID reader/tag) to verify that the correct photoresist bottle. The container bottom may comprise any suitable material having sufficient rigidity, strength, and corrosion resistance. In some embodiments, the container bottom comprises stainless steel. Carrier insertion openings 107-1 and 107-2, which are hollow and indicated by dashed lines, may be formed below the top surface of the container bottom. The portion of the container bottom filled with material is designated element 202.

As shown in fig. 2B, the top surface of the container bottom may have a slope with respect to a horizontal plane (e.g., in the X-direction). The top surface of the bottom of the container may descend from the boundary toward the center and may form a "V" shape with the liquid collection well 204 at the center. The top surfaces of the position locking pins may be located in the same horizontal plane. When the photoresist bottle is placed on the position locking pins, the position locking pins (e.g., 203-3) may provide support so that the bottom of the photoresist bottle may be placed horizontally. In some embodiments, the bevels forming the "V" shape may have an angle a (e.g., in a range between about 5 degrees and about 45 degrees). Angle a may be an optimized angle to allow overflow/leaked photoresist to flow into the liquid collection well 204 in time for detection. The angle a should also be large enough to give the container bottle a compact shape (or height along the Z axis). In some embodiments, angle a is about 20 degrees. The slope may allow for easier flow of spilled or leaked liquid into the liquid collection well 204 and thus may be easier to detect. In some embodiments, the position locking pins may be distributed on a surface that descends from the boundary of the bottom of the photoresist bottle toward the center of the bottom of the photoresist bottle. In some embodiments, the position locking pins may be symmetrically distributed about the center of the bottom of the photoresist bottle. The arrows in fig. 2A indicate the direction of liquid flow across the top surface of the bottom of the container.

When an overflow/leak is detected, the detection liquid sensor 206 may communicate with the integrated circuit 205 through wired/wireless communication means. Thus, the integrated circuit 205 may transmit a notification to the central controller and/or turn on the indicator lights of the container. In some embodiments, integrated circuit 205 includes a clock (or timer) and is designed to include a map of the facility/surrounding environment. The aforementioned notification may include the time and location of the spill/leak. Upon receiving the overflow/leak notification, the central controller may transmit the notification (e.g., to a technician responsible for monitoring photoresist bottle replacement) via a communication device. The aforementioned notification may include the time and location of the leak/leak. Thus, liquid leakage/spillage in the container can be more effectively addressed.

Fig. 3A illustrates a top view 300 of an exemplary lower bump guard located on a container bottom according to some embodiments, and fig. 3B illustrates a cross-sectional view 350 of the exemplary lower bump guard located on the container bottom in the 3-3' direction according to some embodiments. For illustrative purposes, the thick lines represent the outline of the lower impact portion 104. As shown in fig. 3A and 3B, in some embodiments, the lower bump guard 104 is placed on the top surface of the container bottom and is surrounded by the container body 103. A photoresist bottle (not shown) may be placed in the container, and the periphery 301 of the recess 303 may surround the body of the photoresist bottle. The recess 303 may be the same as or similar to the recess 114 shown in fig. 1A-1C. In some embodiments, the photoresist bottle has a circular cross-section along the X-Y plane, and the perimeter 301 has a circular shape that substantially matches the dimensions of the photoresist bottle. In some embodiments, the lower bump guard 104 includes an opening 302 at the bottom of a recess 303. Opening 302 may reveal liquid collection aperture 204 so that leakage/overflow may flow through depression 303 and be collected in liquid collection aperture 204. The opening 302 may have any suitable shape along the X-Y plane. In some embodiments, the opening 302 is circular.

In some embodiments, the lower bump guard 104 is secured by a plurality of position locking pins (e.g., 203-3), as shown by the circled points in FIG. 3B. The position of the lower impact portion 104 may be fixed horizontally and/or vertically. Limiting the movement of the lower bump guard 104 may allow the photoresist bottle to be placed in a desired orientation (e.g., in a vertical direction) with little or no horizontal movement. In addition, the reaction force applied to the photoresist bottle by the lower bump guard 104 may be more evenly distributed so that the photoresist bottle may maintain its position and orientation with improved stability.

Fig. 4A and 4B illustrate enlarged cross-sectional views 400, 450 of the position locking pin 203-3 shown in fig. 3B, according to some embodiments. The position locking pin 203-3 may comprise any suitable device/mechanism that may expand horizontally (e.g., along the X-axis) when pressure is applied on top of the position locking pin 203-3 (e.g., along the Z-axis). For example, the position locking pin 203-3 may include a pressure detector on top of the locking pin 203-3 to detect pressure, and a resilient structure (e.g., a spring) below the pressure detector. When pressure is detected, the elastic structure expands along the X-axis or along the X-Y plane (the Y-axis is perpendicular to the X-Z plane). In some embodiments, the position locking pin 203-3 includes a pin body 402 and a pin cap 401 located above the pin body 402. The position locking pin 203-3 may be fixed above or partially in the top surface of the container bottom. The lower bump guard 104 may include a recess 403 that covers at least the pin cap 401.

As shown in fig. 4A, the position locking pin 203-3 is not subjected to pressure in the vertical direction (e.g., pressure in the Z-axis created by placing a photoresist bottle over the lower bump guard 104) and there is little or no contact between the lower bump guard 104 and the pin cap 401. As shown in fig. 4B, when the photoresist bottle is placed on the lower bump guard 104, the position locking pin 203-3 is subjected to pressure in the vertical direction, and the lower bump guard 104 contacts the pin cap 401. As shown in fig. 4A and 4B, when the sensing pressure is applied downward to the pin cap 401, the pin cap 401 may automatically expand horizontally (as indicated by the arrow in fig. 4B) to contact the inner side walls of the recess 403. In some embodiments, the pin cap 401 applies horizontal forces in all directions along the inner side wall of the recess 403 such that friction between the pin cap 401 and the inner side wall reduces/eliminates relative movement between the lower bump guard portion 104 and the position locking pin 203-3 (and similarly for other position locking pins). This action may be referred to as a "position fix" process. Thus, the lower bump guard 104 may be secured to the position locking pin and thereby placed more securely in the container. The lower bump guard 104 may provide a more uniform and stable support for the photoresist bottle surrounded and supported by the lower bump guard 104. In this way, a stable position and orientation of the photoresist bottle can be maintained.

The pin cap 401 may be any suitable shape and may include any suitable material having sufficient rigidity and strength to support the lower bump guard 104 and the photoresist bottle (e.g., with or without photoresist contained therein). For example, the pin cap 401 and the pin body 402 comprise a metal and/or alloy. In some embodiments, the pin cap 401 and the pin body 402 comprise stainless steel. In some embodiments, to make the force and/or friction between the pin cap 401 and the recess 403 more uniform, both the pin cap 401 and the recess 403 have a symmetrical shape about the centerline 4-4' of the pin cap 401. In some embodiments, the pin cap 401 and the recess 403 both have a circular shape along a horizontal plane (e.g., an X-Y plane). The recess 403 may be appropriately sized to allow the pin cap 401 to contact the inner side wall of the recess 403 after horizontal expansion and to exert pressure on the inner side wall of the recess 403.

The position locking pins may lock the position of the lower bump guard 104 when pressure is applied (e.g., by a photoresist bottle placed on the position locking pins), and release the lower bump guard 104 when no pressure is applied. Thus, the lower bump guard 104 may be more easily moved into and out of the container when no photoresist bottle is placed in the container. Further, in some embodiments, little or no relative movement occurs between the lower bump guard 104 and the position locking pin, making both components less prone to wear and requiring maintenance. By fixing the position of the lower bump guard 104, the movement/wobble of the photoresist bottle can be reduced. In some embodiments, the movement/shaking of the photoresist bottle may be in the range of about 3 μm.

The present disclosure also provides a system for replacing/refilling a photoresist bottle with a container. Fig. 5 shows an exemplary system 500 provided by the present disclosure, in accordance with some embodiments. System 500 may include a container 501, a central controller 502, and one or more receiving devices 503 (e.g., 503-1 and 503-2). The container 501 may be the same as or similar to the container shown in fig. 1A-1C. The container 501 may include suitable software and hardware to detect the placement of the photoresist bottle and any leaks, and to transmit (e.g., real-time) updates of the status of the container 501/photoresist bottle (e.g., Identification (ID) number and detailed information of the location, time of overflow/leaks, etc.) to the central controller 502. For example, the container 501 may include an indoor positioning system that can locate the position of the container 501 and transmit the position of the container 501 (e.g., in real time) to the central controller 502. The container 501 may also transmit (e.g., in real time) an indicator signal (e.g., a flash lamp) to indicate the status of the photoresist bottle. Communication between the container 501 and the central controller 502 may be made through any suitable wired/wireless communication network 504 (e.g., WiFi). The central controller 502 may then process the received signals/information and transmit a notification to the receiving device 503 (e.g., held by a technician) indicating the reported potential problem with the container. The receiving means 503 may comprise any suitable device having wireless communication capabilities. Communication between the central controller 502 and the receiving device 503 may be performed over the same or different communication networks. In some embodiments, the communication between the central controller 502 and the receiving device 503 is through a communication network 504. In some embodiments, the receiving device 503 includes a cell phone, tablet, and/or other mobile/stationary computing device. In some embodiments, the receiving device 503 may communicate with the central controller 502 to, for example, update the status of the container 501/photoresist bottle. In some embodiments, the container 501 disables (deactivates) the real-time indicator signal and/or stops transmitting real-time updates after the leak/overflow has been resolved (e.g., cleaned). In some embodiments, the central controller 502 transmits a disable signal to the container 501 to disable the real-time indicator signal and/or stop the real-time update. For illustrative purposes, one container 501 is shown in FIG. 5 as an example.

Status information of the container 501 may be collected by different sensing mechanisms included in the container 501, such as a paired identification device (e.g., 108) and a detection liquid sensor (e.g., 206). A pairing identification device (e.g., RFID method/device) may allow the container 501 to identify whether a matching/correct photoresist bottle is placed in the container 501, and periodically update this information in the central controller 502 and/or when a non-matching photoresist bottle is detected. A sensing mechanism (e.g., a detection liquid sensor) may detect any liquid leaks/spills in the container 501 and communicate detailed information of the leak/spill (e.g., Identification (ID) number, time, and location) to the central controller 502. The sensing mechanisms may each send a signal reflecting the detection result to the integrated circuit of the receptacle 501 so that the receptacle 501 may process the signal and communicate the detection result to the central controller 502.

The integrated circuits of the container 501 and the central controller 502 may each include any suitable hardware and software capable of transmitting, receiving, and processing various signals (e.g., detection results and notifications). In some embodiments, the integrated circuits of the container 501 and the central controller 502 each comprise a microprocessor or computer system.

FIG. 6 illustrates a diagram of an example computer system 600 to implement various embodiments of the present disclosure, according to some embodiments. As described above, the computer system may be used in an integrated circuit and a central controller of a container. The computer system 600 may be any computer capable of performing the functions and operations described in the present disclosure. For example, the computer system 600 can process and transmit signals, but is not limited thereto. The computer system 600 may be used, for example, to perform one or more functions of the container that describe example operations of communication between different portions of the container and between the container and a central controller.

Computer system 600 includes one or more processors (also referred to as Central Processing Units (CPUs)), such as a processor 604. The processor 604 is connected to a communication infrastructure or bus 606. The computer system 600 also includes input/output devices 603, such as a screen, keyboard, pointing device, etc., which communicate with a communication infrastructure or bus 606 via an input/output interface 602. The computer system 600 may receive instructions via the input/output device 603 to implement the functions and operations described in this disclosure (e.g., the functions of a container). The computer system 600 also includes main (or primary) memory 608, such as Random Access Memory (RAM). Main memory 608 may include one or more levels of caching (caches). The main memory 608 stores control logic (e.g., computer software) and/or data. In some embodiments, the control logic (e.g., computer software) and/or data may include one or more of the functions described above with respect to the container.

The computer system 600 may also include one or more secondary storage devices or memories 610. The secondary memory 610 may include, for example, a Hard Disk Drive (HDD) 612 and/or a removable storage device or drive 614. The removable storage drive 614 may be a Floppy Disk Drive (FDD), a tape drive, an optical disk drive, an optical storage device, a tape backup device, and/or any other storage device/drive.

The removable storage drive 614 may interact with a removable storage unit 618. Removable storage unit 618 includes a computer usable or readable storage device having stored thereon computer software (control logic) and/or data. Removable storage unit 618 may be a floppy disk, magnetic tape, CD (compact disk), DVD, optical disk, and/or any other computer data storage device. The removable storage drive 614 reads from and/or writes to a removable storage unit 618 in a well known manner.

According to some embodiments, secondary memory 610 may include other devices, tools, or other means for allowing computer programs and/or other instructions and/or data to be accessed by computer system 600. Such means, tools, or other approaches may include, for example, a removable storage unit 622 and an interface 620. Examples of removable storage unit 622 and interface 620 may include a program cartridge and cartridge interface (such as that found in electronic gaming devices), a removable Memory chip (such as an Erasable Programmable Read Only Memory (EPROM) or a Programmable Read Only Memory (PROM)) and associated slot, a Memory stick and USB port, a Memory card and associated Memory card slot, and/or any other removable storage unit and associated interface. In some embodiments, secondary memory 610, removable storage unit 618 and/or removable storage unit 622 may include one or more of the functions described above with respect to the container.

The computer system 600 may also include a communications or network interface 624. Communication interface 624 enables computer system 600 to communicate and interact with any combination of remote devices, remote networks, remote entities, and the like, individually and collectively identified by reference numeral 628. For example, communication interface 624 may allow computer system 600 to communicate with remote devices 628 via communication paths 626, where communication paths 626 may be wired and/or wireless and may include any combination of a Local Area Network (LAN), a Wide Area Network (WAN), the Internet, and the like. Control logic and/or data may be transferred to and from computer system 600 via communications path 626.

The functions/operations in the foregoing embodiments may be implemented in a wide variety of configurations and architectures. Thus, some or all of the operations (e.g., functions of the container and central controller) in the foregoing embodiments may be performed in hardware, software, or both. In some embodiments, a tangible apparatus or article of manufacture comprising a tangible computer usable or readable medium storing control logic (software) is also referred to in this disclosure as a computer program product or program storage device. This includes, but is not limited to, computer system 600, main memory 608, secondary memory 610, removable storage units 618, 622, and tangible articles of manufacture embodying any combination of the foregoing. When executed by one or more data processing devices (e.g., computer system 600), the control logic causes the data processing devices to operate as described herein. In some embodiments, computer system 600 includes hardware/equipment for manufacturing masks and circuit fabrication. For example, the hardware/devices may be connected to components 628 (one or more remote devices, networks, entities 628) of computer system 600 or be part of computer system 600.

Embodiments of the present disclosure describe apparatus and systems to monitor photoresist leakage. The disclosed container can hold the photoresist bottles in proper orientation and prevent potential photoresist bottle collisions and photoresist leaks. The aforementioned containers provide protection for the photoresist bottles during use and transport. The aforementioned container can implement automatic replacement, transportation and recording of the photoresist bottle. The container may also allow for detection of photoresist leaks and bi-directional communication with the central controller regarding the status of the container. When a photoresist leak occurs, the container may communicate with a central controller and/or other device and send detailed information of the overflow/leak (e.g., Identification (ID) number, location, and time of the photoresist bottle/container). Therefore, photoresist overflow/leakage can be more easily detected.

Under the protection of the container, the photoresist bottle is not easy to collide with the side wall and other parts of the container. Therefore, the photoresist bottle is less prone to photoresist overflow/leakage. Furthermore, the container may verify that the correct photoresist bottle is placed in the container by a suitable pairing identification device (e.g., radio frequency identification method, bluetooth method, etc.), making the photoresist bottle replacement/refill less susceptible to human error. The container may also include upper and lower bumpers that prevent the photoresist bottle from being placed in an orientation that deviates from a vertical orientation. The container may further include a shaking prevention part that prevents the photoresist bottle from bouncing and moving in the container. By using the disclosed container and method, the photoresist bottle is less susceptible to damage and photoresist spillage/leakage. The transportation and the replacement of the photoresist bottle can be more time-saving and lower in cost.

Although the container is described in terms of preventing overflow/leakage of photoresist from a photoresist bottle, the container may be used to prevent overflow/leakage of other liquid-containing objects (or objects containing fluid). The container may be shaped and sized to accommodate any suitable liquid-containing object (with or without a mating mechanism with the container) and to detect spillage/leakage from the liquid-containing object.

In some embodiments, a container comprises: the container comprises a container body, a cover body, an anti-collision part, a pairing identification mechanism and a detection liquid sensor. The cover body is positioned above the container body. The impact prevention portion is attached to one or more of the container body and the lid and configured to cushion an impact force. The paired identification mechanism is configured to detect an object placed in the container body. The detection liquid sensor is configured to detect a leak from the object. In some embodiments, the anti-collision portion includes an upper anti-collision portion and a lower anti-collision portion, the upper anti-collision portion is located on the cover body, and the lower anti-collision portion is located on the bottom of the container body. In some embodiments, the container further comprises a shaking prevention portion configured to prevent relative movement between the container body and the cover and to reduce movement of the object between the upper and lower bump prevention portions. In some embodiments, the lower impact protection portion includes a recessed portion configured to surround a bottom surface of the object. In some embodiments, the aforementioned pairing identification mechanism comprises a radio frequency identification device. In some embodiments, the surface of the bottom of the container body descends from the boundary of the bottom of the container body toward the center of the bottom of the container body. The angle between the surface of the bottom of the container body and the horizontal plane is between about 5 degrees and about 45 degrees. In some embodiments, the container further comprises an indicator portion configured to indicate a status of the object according to a detection result of the pair identification mechanism, wherein the status of the object includes one or more of a match with the container, a mismatch with the container, and a leak from the object. In some embodiments, the container further comprises a liquid collection hole located at the center of the bottom of the container body, wherein the liquid collection hole is configured to collect a leak from the object, and the detection liquid sensor is located in the liquid collection hole. In some embodiments, the container further comprises a lower bump guard having an opening to expose the liquid collection well. In some embodiments, the container further comprises a plurality of position locking pins configured to prevent movement of the lower bump stop, wherein the lower bump stop comprises a plurality of recesses covering at least a portion of the position locking pins. In some embodiments, the container further comprises a carrier insert attached to and located below the container body, wherein the carrier insert comprises a plurality of insert openings through the carrier insert for lifting the container.

In some embodiments, a system to monitor for leaks includes: a system for monitoring leaks, comprising: a central controller, a communication network, a container, and a communication device. The aforementioned container may comprise: the container comprises a container body, a cover body, an anti-collision part, a pairing identification mechanism and a detection liquid sensor. The cover body is positioned above the container body. The impact prevention portion is attached to one or more of the container body and the lid and configured to cushion an impact force. The mating identification mechanism is configured to detect an object placed in the container body. The detection liquid sensor is configured to detect a leak from the object. The communication device is configured to communicate with the central controller through the communication network. In some embodiments, the container further comprises a liquid collecting hole located at the center of the bottom of the container body, and the detection liquid sensor is located in the liquid collecting hole. The surface of the bottom of the container body is lowered from the boundary of the bottom of the container body toward the center of the bottom of the container body. The angle between the surface of the bottom of the container body and the horizontal is between about 5 degrees and about 45 degrees. The liquid collecting hole collects a leakage flowing from a surface of the bottom of the container body. In some embodiments, the communication device is configured to transmit real-time status data of the object according to the detection results of the pair identification mechanism and the detection liquid sensor, and the real-time status data includes one or more of matching of the object with the container, mismatching of the object with the container, and time and location of the leak. In some embodiments, the system for monitoring leakage further comprises a receiving device configured to communicate with the central controller to receive the real-time status data. In some embodiments, the anti-collision portion includes an upper anti-collision portion and a lower anti-collision portion, the upper anti-collision portion is located on the cover body, and the lower anti-collision portion is located on the bottom of the container body. In some embodiments, the container further comprises a plurality of position locking pins configured to prevent movement of the lower bump stop, wherein the lower bump stop comprises a plurality of recesses covering at least a portion of the position locking pins.

In some embodiments, an apparatus comprises: a container body and a cover body positioned above the container body. The cover may include an upper bumper portion and the bottom of the container body may include a lower bumper portion. The apparatus may also include a detection liquid sensor configured to detect a leak from an object placed in the container body. The device may further comprise a liquid collecting hole formed in the bottom surface of the container body. The liquid collection well may be configured to collect leakage from the object, wherein the detection liquid sensor is located in the liquid collection well. In some embodiments, the apparatus further comprises a plurality of position locking pins configured to prevent movement of the upper bumper portion and the lower bumper portion. In some embodiments, the apparatus further comprises a sensing mechanism configured to detect an identity of the object.

It should be understood that the paragraphs of the embodiments, and not the abstract of the disclosure, are intended to be used to interpret the claims. The abstract of the disclosure may set forth one or more, but not all exemplary embodiments, and is therefore not intended to limit the appended claims.

The foregoing outlines features of many embodiments so that those skilled in the art may better understand the embodiments of the present disclosure. Those skilled in the art should appreciate that they may readily use the disclosed embodiments as a basis for designing or modifying other processes and structures for carrying out the same purposes and/or achieving the same advantages of the embodiments introduced herein. It should also be realized by those skilled in the art that such equivalent constructions do not depart from the spirit and scope of the disclosure. Various changes, substitutions, and alterations can be made to the embodiments of the disclosure without departing from the spirit and scope of the disclosure.