阅读说明：本技术 一种可防热变形的半导体晶圆切割装置 (Semiconductor wafer cutting device capable of preventing thermal deformation ) 是由 张海朋 于 2019-11-18 设计创作，主要内容包括：本发明公开了一种可防热变形的半导体晶圆切割装置,包括机体,所述机体内设有向上和向右开口的送料腔,所述送料腔的前后壁间左右滑动设有滑块,所述滑块的顶面上设有可用于夹持硅锭的夹块,所述送料腔的下侧连通设有从动腔,所述从动腔内设有可控制所述滑块带动所述硅锭向左步进移动的步进机构,本发明可有效降低半导体制作原料晶圆在切割时所产生的发热变形问题,并且也能降低硅锭在移动送料切割过程中,由于长时间连续工作导致主轴位置偏移导致切割不准的问题,其中,步进机构能够通过旋转联动水平步进移动的传动方式,使硅锭在连续切割时能够稳定送料。(The invention discloses a semiconductor wafer cutting device capable of preventing thermal deformation, which comprises a machine body, wherein a feeding cavity with an upward opening and a rightward opening is arranged in the machine body, a slide block is arranged between the front wall and the rear wall of the feeding cavity in a left-right sliding manner, a clamping block used for clamping a silicon ingot is arranged on the top surface of the slide block, the lower side of the feeding cavity is communicated with a driven cavity, and a stepping mechanism capable of controlling the slide block to drive the silicon ingot to move leftwards in a stepping manner is arranged in the driven cavity, so that the problem of heating deformation generated during cutting of a raw material wafer for manufacturing a semiconductor can be effectively solved, and can also reduce the problem of inaccurate cutting caused by the main shaft position deviation caused by long-time continuous work in the moving, feeding and cutting processes of the silicon ingot, the stepping mechanism can stably feed the silicon ingot during continuous cutting through a transmission mode of rotating linkage horizontal stepping movement.)

1. A semiconductor wafer cutting device capable of preventing thermal deformation comprises a machine body, and is characterized in that: a feeding cavity with upward and rightward openings is arranged in the machine body, a sliding block is arranged between the front wall and the rear wall of the feeding cavity in a sliding mode, a clamping block capable of clamping a silicon ingot is arranged on the top surface of the sliding block, a driven cavity is communicated with the lower side of the feeding cavity, a stepping mechanism capable of controlling the sliding block to drive the silicon ingot to move leftwards in a stepping mode is arranged in the driven cavity, a transverse plate is fixedly arranged on the right side surface of the sliding block, a limiting cavity with an upward opening is arranged in the transverse plate, and a stabilizing mechanism capable of limiting the sliding block to shake leftwards and rightwards when the sliding block is in a cutting state and capable of being opened when the sliding;

a cutting cavity is communicated with the left side of the feeding cavity, a cutting blade for cutting is arranged in the cutting cavity, the left side of the cutting cavity is communicated with a lifting cavity, the inner wall of the lifting cavity is provided with a lifting block which can drive the cutting blade to lift, a power cavity is arranged at the lower side of the lifting cavity, a power mechanism capable of controlling the lifting block to lift back and forth intermittently to achieve a continuous cutting state is arranged in the power cavity, two left and right symmetries are arranged at the position, close to the upper side, of the cutting cavity, and can be used for cooling the sponge of the cutting blade, the left side and the right side of the position close to the upper side of the cutting cavity are communicated with a cooling water cavity, the upper side of the cooling water cavity is communicated with a transmission cavity, the transmission cavity is internally provided with a transmission mechanism which can control the sponge to abut against the cutting blade when the cutting blade rises so as to achieve a cooling effect, and the transmission mechanism and the power mechanism are in linkage operation.

2. The apparatus of claim 1, wherein the apparatus further comprises: step-by-step mechanism is including setting firmly step-by-step piece on the slider bottom surface, step-by-step piece is located driven cavity, step-by-step piece's bottom surface has set firmly first tooth, it is equipped with two bilateral symmetry's rotation axis to rotate on driven cavity's the back wall, first connecting rod has set firmly in the periphery of rotation axis, the articulated second connecting rod that is equipped with two bilateral symmetry on driven cavity's the back wall, the second connecting rod with it is equipped with the trident connecting rod to articulate between the first connecting rod, the articulated rotation axis that is equipped with of trident connecting rod opposite side, two a horizontal bar has set firmly on the top surface of rotation axis, second tooth has set firmly on the top surface of horizontal bar, the second tooth can with first tooth meshing.

3. The apparatus of claim 2, wherein the wafer cutting device is capable of preventing thermal deformation, and comprises: the worm gear type worm gear comprises a driven cavity, a worm gear cavity, a rotation shaft, a worm and a worm wheel, wherein the worm gear cavity is formed in the rear side of the driven cavity, the backward extending part of the rotation shaft extends into the worm gear cavity, the worm wheel is fixedly arranged on the periphery of the worm gear cavity, a first motor is fixedly arranged on the left wall of the worm gear cavity, a worm is dynamically connected to the right side face of the first motor, the right side face of the worm is rotatably connected with the right wall of the worm gear cavity, and the worm is meshed with the worm wheel.

4. The apparatus of claim 1, wherein the apparatus further comprises: stabilizing mean includes the restriction piece, the diaphragm extends outside to the right extension, and its right flank has set firmly the hand piece, be equipped with the ascending restriction chamber of opening in the diaphragm, the upside intercommunication of slave drive chamber is equipped with the slip chamber, the slip chamber with pay-off chamber intercommunication, the restriction piece slides and establishes on the right wall in slip chamber, the downward slip of restriction piece can be inserted the restriction intracavity, restriction piece downwardly extending portion runs through the pay-off chamber, and stretch into slave drive intracavity, and it is located the horizontal bar upside, the second tooth can with restriction piece butt, the top surface of restriction piece has set firmly the pull rod, the pull rod makes progress the extension and stretches out the external world, and its top surface has set firmly holds the ball, restriction piece top surface with fixed mounting has the spring between the roof in slip chamber.

5. The apparatus of claim 1, wherein the apparatus further comprises: the fixed second motor that has inlayed in the inner wall of elevator, the right flank power connection of second motor is equipped with the cutting axle, the cutting piece sets firmly on the right flank of cutting axle, the cutting chamber leans on lower position to open set up to the front, it is equipped with the receiving box to slide around on the bottom surface in cutting chamber, be equipped with the ascending receiving chamber of opening in the receiving box, the receiving chamber with cutting chamber intercommunication, the clear water has been deposited to the receiving chamber, the leading flank of receiving box has set firmly the hand lever.

6. The apparatus of claim 1, wherein the apparatus further comprises: the power mechanism comprises a third motor fixedly arranged on the bottom wall of the power cavity, a motor shaft is arranged on the top surface of the third motor in a power connection mode, a first rotary disc is fixedly arranged on the top surface of the motor shaft, a first screw rod is arranged between the upper wall and the lower wall of the lifting cavity in a rotating mode, the first screw rod penetrates through the lifting block and is in threaded connection with the lifting block, the downward extending portion of the first screw rod extends into the power cavity, a second rotary disc is fixedly arranged on the bottom surface of the first screw rod, a third connecting rod is hinged to the bottom surface of the second rotary disc and the top surface of the first rotary disc, and the diameter of the second rotary disc is larger than that of the first rotary disc.

7. The apparatus of claim 1, wherein the apparatus further comprises: the transmission mechanism comprises a moving block which is arranged on the front wall and the rear wall of the moving cavity in a sliding mode, the sponge extends into the moving cavity towards the extending part of the moving cavity and is fixedly connected with the moving block, a cooling water cavity is communicated with the lower side of the moving cavity, cooling water is stored in the cooling water cavity, the extending part of the sponge extends into the cooling water cavity, a fourth connecting rod is fixedly arranged on the top surface of the moving block, a second screw rod is rotatably arranged on the bottom wall of the transmission cavity, a threaded sleeve is arranged on the periphery of the second screw rod in a threaded connection mode, and a fifth connecting rod is hinged between the threaded sleeve and the fourth connecting rod.

8. The apparatus of claim 6 or 7, wherein: the belt chamber has been seted up to the upside in transmission chamber, it is equipped with the vertical axis to rotate on the diapire in belt chamber, the upwards extending part of second screw rod stretches into the belt intracavity, the second screw rod with the transmission is connected between the vertical axis and is equipped with belt transmission, the downward extending part of vertical axis stretches into in the power chamber, and its bottom surface has set firmly first gear, is located the power intracavity first screw rod has set firmly the second gear in the periphery, the second gear with first gear engagement.

9. The apparatus of claim 1, wherein the apparatus further comprises: the clamping block is divided into an upper part and a lower part, two buckles which are symmetrical in the front and the back are fixedly arranged on the clamping block which is positioned on the upper side, and a glass window is fixedly arranged on the front side of the cutting cavity.

Technical Field

The invention relates to the technical field of semiconductors, in particular to a semiconductor wafer cutting device capable of preventing thermal deformation.

Background

At present, with the improvement of technological level, semiconductor elements are more and more widely used, in the manufacturing process of semiconductors, one of the procedures is to manufacture silicon ingots into silicon wafers in a cutting mode, a general silicon wafer cutting device feeds materials through the transmission of a motor screw rod, the silicon ingots are not accurately moved in the feeding mode, the thickness of each wafer is not uniform, heating distortion and deformation are easy to occur when the screw rod works continuously for a long time, and finally cutting position deviation is caused.

Disclosure of Invention

The present invention is directed to a semiconductor wafer cutting apparatus capable of preventing thermal deformation, which overcomes the above-mentioned drawbacks of the prior art.

According to the embodiment of the invention, the semiconductor wafer cutting device capable of preventing thermal deformation comprises a machine body, a feeding cavity which is opened upwards and rightwards is arranged in the machine body, a sliding block is arranged between the front wall and the rear wall of the feeding cavity in a sliding mode leftwards and rightwards, a clamping block which can be used for clamping a silicon ingot is arranged on the top surface of the sliding block, a driven cavity is communicated with the lower side of the feeding cavity, a stepping mechanism which can control the sliding block to drive the silicon ingot to move leftwards in a stepping mode is arranged in the driven cavity, a transverse plate is fixedly arranged on the right side surface of the sliding block, a limiting cavity which is opened upwards is arranged in the transverse plate, a stabilizing mechanism which can limit the sliding block to shake leftwards and rightwards when the sliding block is in a cutting state and is opened when the sliding block is in a moving state is arranged in the feeding cavity, a cutting cavity is communicated with the left side of, be equipped with on the inner wall in lift chamber and drive the elevator that the cutting piece goes up and down, the power chamber has been seted up to the downside in lift chamber, it is steerable to be equipped with in the power chamber the elevator intermittent type nature comes and goes up and down, reaches the power unit of continuous cutting state, the cutting chamber leans on the upside position to be equipped with two bilateral symmetry, and can be used for cooling the sponge of cutting piece, the upside position left and right sides intercommunication that leans on in cutting chamber is equipped with the cooling water chamber, is that the upside intercommunication in cooling water chamber is equipped with the transmission chamber, it is steerable to be equipped with in the transmission intracavity the sponge is in the butt that rises on the cutting piece reaches cooling effect's drive mechanism, drive mechanism with power unit linkage operation.

A further technical scheme, step-by-step mechanism is including setting firmly step-by-step piece on the slider bottom surface, step-by-step piece is located driven intracavity, step-by-step piece's bottom surface has set firmly first tooth, it is equipped with two bilateral symmetry's rotation axis to rotate on driven chamber's the back wall, first connecting rod has set firmly in the periphery of rotation axis, the articulated second connecting rod that is equipped with two bilateral symmetry on driven chamber's the back wall, the second connecting rod with it is equipped with the trident connecting rod to articulate between the first connecting rod, the articulated rotation axis that is equipped with of trident connecting rod opposite side, two a horizontal bar has set firmly on the top surface of rotation axis, second tooth has set firmly on the top surface of horizontal bar, the second tooth can with first tooth meshing.

According to the technical scheme, a worm wheel cavity is formed in the rear side of the driven cavity, the backward extending portion of the rotating shaft extends into the worm wheel cavity, worm wheels are fixedly arranged on the peripheries of the backward extending portion of the rotating shaft in the worm wheel cavity, a first motor is fixedly arranged on the left wall of the worm wheel cavity, a worm is arranged on the right side face of the first motor in a power connection mode, the right side face of the worm is rotatably connected with the right wall of the worm wheel cavity, and the worm is meshed with the worm wheels.

Further technical scheme, stabilizing mean includes the restriction piece, the diaphragm extends outside to the right side, and its right flank has set firmly the hand piece, be equipped with the ascending restriction chamber of opening in the diaphragm, the upside intercommunication of driven chamber is equipped with the slip chamber, the slip chamber with pay-off chamber intercommunication, the restriction piece slides and establishes on the right wall in slip chamber, restriction piece lapse can insert the restriction intracavity, restriction piece lapse runs through the pay-off chamber, and stretch into from the driven intracavity, and it is located the horizontal bar upside, the second tooth can with restriction piece butt, the top surface of restriction piece has set firmly the pull rod, the pull rod upwards extends outside, and its top surface has set firmly and holds the ball, restriction piece top surface with fixed mounting has the spring between the roof in slip chamber.

Further technical scheme, the second motor has been embedded in the inner wall of elevator, the right flank power connection of second motor is equipped with the cutting axle, the cutting piece sets firmly on the right flank of cutting axle, the cutting chamber leans on lower position to open up the setting forward, it is equipped with the receiving box to slide around on the bottom surface in cutting chamber, be equipped with the ascending receiving chamber of opening in the receiving box, the receiving chamber with cutting chamber intercommunication, the clear water has been deposited in the receiving chamber, the leading flank of receiving box has set firmly the hand lever.

The power mechanism comprises a third motor fixedly arranged on the bottom wall of the power cavity, a motor shaft is arranged on the top surface of the third motor in a power connection mode, a first rotary disc is fixedly arranged on the top surface of the motor shaft, a first screw rod is arranged between the upper wall and the lower wall of the lifting cavity in a rotating mode, the first screw rod penetrates through the lifting block and is in threaded connection with the lifting block, the downward extending portion of the first screw rod extends into the power cavity, a second wheel disc is fixedly arranged on the bottom surface of the first screw rod, a third connecting rod is hinged to the bottom surface of the second wheel disc and the top surface of the first rotary disc, and the diameter of the second wheel disc is larger than that of the first rotary disc.

According to the technical scheme, the transmission mechanism comprises a moving block which is arranged on the front wall and the rear wall of the moving cavity in a sliding mode, the sponge extends into the moving cavity towards the extending portion of the moving cavity and is fixedly connected with the moving block, a cooling water cavity is communicated with the lower side of the moving cavity, cooling water is stored in the cooling water cavity, the downward extending portion of the sponge extends into the cooling water cavity, a fourth connecting rod is fixedly arranged on the top surface of the moving block, a second screw rod is rotatably arranged on the bottom wall of the transmission cavity, a threaded sleeve is connected to the periphery of the second screw rod in a threaded mode, and a fifth connecting rod is hinged between the threaded sleeve and the fourth connecting rod.

Further technical scheme, the belt chamber has been seted up to the upside in transmission chamber, it is equipped with the vertical axis to rotate on the diapire in belt chamber, the upwards extension of second screw rod stretches into the belt intracavity, the second screw rod with it is equipped with belt drive to transmit between the vertical axis to be connected, the downward extension of vertical axis stretches into in the power chamber, and its bottom surface has set firmly first gear, is located the power intracavity first screw rod has set firmly the second gear in the periphery, the second gear with first gear engagement.

According to the technical scheme, the clamping block is divided into an upper part and a lower part, the clamping block is located on the upper side, two buckles which are symmetrical front and back are fixedly arranged on the clamping block, and a glass window is fixedly arranged on the front side of the cutting cavity.

The invention has the beneficial effects that: the invention can effectively reduce the heating deformation problem generated when the raw material wafer for manufacturing the semiconductor is cut, and can also reduce the problem that the cutting is inaccurate due to the position deviation of the main shaft caused by long-time continuous work in the moving, feeding and cutting process of the silicon ingot, wherein the stepping mechanism can stably feed the silicon ingot during continuous cutting through a transmission mode of rotating linkage horizontal stepping movement, so that the deviation defect of moving and feeding by screw transmission is avoided, the stabilizing mechanism can limit the silicon ingot to shake left and right when in a cutting state, so that the thickness of the cut wafer is more accurate, the power mechanism and the transmission mechanism can operate in a linkage manner, and the cutting piece can obtain the cooling effect of mutual extrusion of sponges when being cut downwards and moved upwards, the surface temperature of the cutting piece is reduced, and the thermal deformation generated when the wafer is cut can be reduced.

Drawings

FIG. 1 is a schematic view of the internal overall structure of the present invention;

FIG. 2 is a left side view of the clamp block of the present invention;

FIG. 3 is a schematic view of a portion of the present invention taken along line A-A of FIG. 1;

FIG. 4 is a schematic view of the internal structure of the worm gear cavity of the present invention;

figure 5 is a schematic view of a glazing and receiver box of the present invention.

Detailed Description

The invention will now be described in detail with reference to fig. 1-5, for convenience of description, the following orientations will now be defined: the up, down, left, right, and front-back directions described below correspond to the up, down, left, right, and front-back directions in the projection relationship of fig. 1 itself.

Referring to fig. 1 to 5, a semiconductor wafer cutting device capable of preventing thermal deformation according to an embodiment of the present invention includes a machine body 11, a feeding cavity 68 opened upward and rightward is provided in the machine body 11, a slide block 47 is provided between front and rear walls of the feeding cavity 68 in a left-right sliding manner, a clamping block 49 for clamping a silicon ingot 48 is provided on a top surface of the slide block 47, a driven cavity 62 is provided in communication with a lower side of the feeding cavity 68, a stepping mechanism 101 capable of controlling the slide block 47 to drive the silicon ingot 48 to move leftward and rightward is provided in the driven cavity 62, a horizontal plate 41 is fixedly provided on a right side surface of the slide block 47, a limiting cavity 42 opened upward is provided in the horizontal plate 41, a stabilizing mechanism 102 capable of limiting the slide block 47 to rock leftward and rightward in a cutting state and opening in a moving state is provided in the feeding cavity 68, a cutting cavity 27 is provided in communication with a left side of the feeding cavity 68, a cutting blade 50 which can be used for cutting is arranged in the cutting cavity 27, the left side of the cutting cavity 27 is communicated with a lifting cavity 18, the inner wall of the lifting cavity 18 is provided with a lifting block 15 which can drive the cutting blade 50 to lift, a power cavity 26 is arranged at the lower side of the lifting cavity 18, a power mechanism 103 capable of controlling the lifting block 15 to intermittently lift back and forth to achieve a continuous cutting state is arranged in the power cavity 26, two bilateral symmetries are arranged at the upper side of the cutting cavity 27, and can be used for cooling the sponge 52 of the cutting blade 50, the left and right sides of the upper side position of the cutting cavity 27 are communicated with a cooling water cavity 14, the upper side of the cooling water cavity 14 is communicated with a transmission cavity 55, the transmission cavity 55 is internally provided with a transmission mechanism 104 which can control the sponge 52 to abut against the cutting blade 50 when the cutting blade 50 rises so as to achieve a cooling effect, and the transmission mechanism 104 and the power mechanism 103 run in a linkage manner.

In addition, in one embodiment, the step mechanism 101 includes a step block 37 fixed on the bottom surface of the slide block 47, the step block 37 is located in the driven cavity 62, a first tooth 38 is fixed on the bottom surface of the step block 37, two bilaterally symmetrical rotating shafts 36 are rotatably provided on the rear wall of the driven cavity 62, a first connecting rod 32 is fixed on the periphery of the rotating shaft 36, two bilaterally symmetrical second connecting rods 30 are hinged on the rear wall of the driven cavity 62, a three-way connecting rod 31 is hinged between the second connecting rod 30 and the first connecting rod 32, the rotating shaft 36 is hinged on the other side of the three-way connecting rod 31, a cross bar 33 is fixed on the top surfaces of the two rotating shafts 36, a second tooth 34 is fixed on the top surface of the cross bar 33, the second tooth 34 can be engaged with the first tooth 38, and by the rotation of the rotating shaft 36, the first connecting rod 32 can drive the three-fork connecting rod 31 to swing left and right around the arc direction, so that the connecting platform 35 can drive the cross bar 33 to swing left and right around the arc direction, when the cross bar 33 moves upwards along the arc direction, the second teeth 34 can be meshed with the first teeth 38, and then the sliding block 47 can be driven to move left, so that the clamping block 49 can move left.

In addition, in one embodiment, a worm wheel cavity 69 is formed at the rear side of the driven cavity 62, the backward extending portions of the rotating shaft 36 extend into the worm wheel cavity 69, a worm wheel 64 is fixedly arranged on the outer circumference of the worm wheel cavity 69, a first motor 63 is fixedly arranged on the left wall of the worm wheel cavity 69, a worm 65 is dynamically connected to the right side surface of the first motor 63, the right side surface of the worm 65 is rotatably connected with the right wall of the worm wheel cavity 69, the worm 65 is meshed with the worm wheel 64, and the worm 65 can drive the rotating shaft 36 to rotate through the operation of the first motor 63.

In addition, in one embodiment, the stabilizing mechanism 102 includes a limiting block 39, a rightward extending portion of the horizontal plate 41 extends out of the outside, a hand-pulling block 40 is fixedly disposed on a right side surface of the horizontal plate 41, a limiting cavity 42 with an upward opening is disposed in the horizontal plate 41, a sliding cavity 43 is communicated with an upper side of the driven cavity 62, the sliding cavity 43 is communicated with the feeding cavity 68, the limiting block 39 is slidably disposed on a right wall of the sliding cavity 43, the limiting block 39 is slidably inserted into the limiting cavity 42 in a downward direction, a downward extending portion of the limiting block 39 penetrates through the feeding cavity 68 and extends into the driven cavity 62, and is located on an upper side of the cross bar 33, the second tooth 34 can abut against the limiting block 39, a pull rod 45 is fixedly disposed on a top surface of the limiting block 39, the pull rod 45 extends out of the outside, a hand-pulling ball 46 is fixedly disposed on a top surface of the pull rod 45, a spring 44 is fixedly disposed between the top surface of the limiting block 39 and a top wall of the sliding, when the cross bar 33 drives the second tooth 34 to move upwards, the second tooth 34 can abut against the limiting block 39, the limiting block 39 moves upwards, the limiting block 39 can be separated from the limiting cavity 42, the sliding block 47 can normally move leftwards, when the sliding block 47 needs to move rightwards, the hand-held ball 46 is manually pulled upwards, the limiting block 39 moves upwards, the hand-pulled block 40 is manually pulled rightwards, and the transverse plate 41 can drive the sliding block 47 to move rightwards.

In addition, in an embodiment, the second motor 16 is fixedly embedded in the inner wall of the lifting block 15, the right side surface of the second motor 16 is provided with a cutting shaft 51 in a power connection manner, the cutting blade 50 is fixedly arranged on the right side surface of the cutting shaft 51, the cutting cavity 27 is arranged by being arranged at the lower position and opening forward, the receiving box 28 is arranged on the bottom surface of the cutting cavity 27 in a sliding manner, the receiving box 28 is internally provided with a receiving cavity 29 with an upward opening, the receiving cavity 29 is communicated with the cutting cavity 27, clear water is stored in the receiving cavity 29, the front side surface of the receiving box 28 is fixedly provided with a hand lever 67, the cutting shaft 51 can drive the cutting blade 50 to rotate through the operation of the second motor 16, so that the cutting effect can be achieved, products falling after cutting can be buffered through the clear water in the receiving cavity 29, and the hand lever 67 can be pulled forward by hand, the receptacle 28 can be slid forward to allow removal of the product.

In addition, in one embodiment, the power mechanism 103 includes a third motor 25 fixed on the bottom wall of the power cavity 26, a top surface of the third motor 25 is connected to a motor shaft 24, a top surface of the motor shaft 24 is fixed to a first rotating disc 23, a first screw 17 is rotatably arranged between the upper wall and the lower wall of the lifting cavity 18, the first screw 17 penetrates through the lifting block 15 and is in threaded connection with the lifting block 15, a downward extending portion of the first screw 17 extends into the power cavity 26, a bottom surface of the first screw is fixed to a second rotating disc 21, a bottom surface of the second rotating disc 21 is hinged to the top surface of the first rotating disc 23 and is provided with a third connecting rod 22, a diameter of the second rotating disc 21 is larger than a diameter of the first rotating disc 23, the motor shaft 24 can drive the first rotating disc 23 to rotate by the operation of the third motor 25, and the second rotating disc 21 can drive the first screw 17 to intermittently rotate back and forth, the elevator block 15 may be intermittently raised and lowered, and then the slicing blade 50 may be enabled to continuously slice the silicon ingot 48.

In addition, in one embodiment, the transmission mechanism 104 includes a moving block 53 slidably disposed on the front and rear walls of the moving cavity 13, the sponge 52 extends into the moving cavity 13 toward the extending portion of the moving cavity 13 and is fixedly connected to the moving block 53, a cooling water cavity 14 is disposed in communication with the lower side of the moving cavity 13, cooling water is stored in the cooling water cavity 14, the downward extending portion of the sponge 52 extends into the cooling water cavity 14, a fourth connecting rod 54 is fixedly disposed on the top surface of the moving block 53, a second screw 57 is rotatably disposed on the bottom wall of the transmission cavity 55, a threaded sleeve 58 is threadedly connected to the outer periphery of the second screw 57, a fifth connecting rod 56 is hinged between the threaded sleeve 58 and the fourth connecting rod 54, the threaded sleeve 58 can intermittently move up and down through intermittent forward and reverse rotation of the second screw 57, and the fifth connecting rod 56 can drive the fourth connecting rod 54 to intermittently move left and right, therefore, the moving block 53 can drive the sponge 52 to intermittently move back and forth and left and right, so that the sponge 52 can move towards the cutting blade 50 and abut against the cutting blade 50 when the cutting blade 50 ascends, and can be opened towards the moving cavity 13 when the cutting blade 50 descends, and the sponge 52 can be ensured to be in a water absorption state through the cooling water in the cooling water cavity 14.

In addition, in an embodiment, a belt cavity 60 is formed in the upper side of the transmission cavity 55, a vertical shaft 12 is rotatably disposed on the bottom wall of the belt cavity 60, an upward extending portion of the second screw 57 extends into the belt cavity 60, a belt transmission device 59 is disposed between the second screw 57 and the vertical shaft 12 in a transmission connection manner, a downward extending portion of the vertical shaft 12 extends into the power cavity 26, a first gear 20 is fixedly disposed on the bottom surface of the vertical shaft, a second gear 19 is fixedly disposed on the periphery of the first screw 17 located in the power cavity 26, the second gear 19 is engaged with the first gear 20, and the first screw 17 can drive the vertical shaft 12 to rotate back and forth through the operation of the third motor 25, so that the belt transmission device 59 can drive the second screw 57 to rotate back and forth.

In addition, in one embodiment, the clamping block 49 is divided into an upper part and a lower part, two symmetrical buckles 61 are fixedly arranged on the clamping block 49 at the upper side, a glass window 66 is fixedly arranged at the front side of the cutting cavity 27, the silicon ingot 48 can be clamped by the clamping block 49 through the buckles 61, and the cutting condition can be observed conveniently through the glass window 66.

In an initial state, the sliding block 47 abuts against the right wall of the feeding cavity 68, the cutting blade 50 is located on the upper side, the two sponges 52 abut against the cutting blade 50, the receiving box 28 is located on the lower side of the cutting cavity 27, clear water is stored in the receiving cavity 29, the cross bar 33 is located on the lowest side, the second teeth 34 are not in contact with the first teeth 38, the second teeth 34 are not in contact with the limiting block 39, and the limiting block 39 is inserted into the limiting cavity 42.

When the hand-pulling block is used, the worm 65 can drive the rotating shaft 36 to rotate through the operation of the first motor 63, the first connecting rod 32 can drive the three-fork connecting rod 31 to swing left and right around the arc direction through the rotation of the rotating shaft 36, so that the connecting platform 35 can drive the cross bar 33 to swing left and right around the arc direction, when the cross bar 33 moves upwards along the arc direction, the second tooth 34 can be meshed with the first tooth 38, and further can drive the upper sliding block 47 to move leftwards, so that the clamping block 49 can move leftwards, when the cross bar 33 drives the second tooth 34 to move upwards, the second tooth 34 can be abutted against the limiting block 39, so that the limiting block 39 moves upwards, so that the limiting block 39 can leave the limiting cavity 42, so that the sliding block 47 can move leftwards normally, when the sliding block 47 needs to move rightwards, the hand-holding ball 46 is pulled upwards manually, so that the limiting block 39 moves upwards, and the hand-pulling block 40 is pulled rightwards manually, the transverse plate 41 can drive the slide block 47 to move rightwards, the cutting shaft 51 can drive the cutting blade 50 to rotate through the operation of the second motor 16, so that the cutting effect can be achieved, the cut and dropped products can be buffered through the clean water in the receiving cavity 29, the receiving box 28 can slide forwards through the manual forward pulling of the hand pull rod 67, so that the products can be taken out, the motor shaft 24 can drive the first rotating disc 23 to rotate through the operation of the third motor 25, the second wheel disc 21 can drive the first screw 17 to intermittently rotate back and forth, the lifting block 15 can intermittently lift up and down, so that the cutting blade 50 can continuously cut the silicon ingot 48, the first screw 17 can drive the vertical shaft 12 to rotate back and forth through the operation of the third motor 25, the belt transmission device 59 can drive the second screw 57 to rotate back and forth, and forth rotation is realized through intermittent forward and reverse rotation of the second screw 57, the threaded sleeve 58 can intermittently move up and down, and the fifth connecting rod 56 can drive the fourth connecting rod 54 to intermittently move back and forth and left and right, so that the moving block 53 can drive the sponge 52 to intermittently move back and forth and left and right, the sponge 52 can move towards the cutting blade 50 and abut against the cutting blade 50 when the cutting blade 50 ascends, and the sponge 52 can be opened towards the moving cavity 13 when the cutting blade 50 descends, and the sponge 52 can be ensured to be in a water absorption state through cooling water in the cooling water cavity 14.

The invention has the beneficial effects that: the invention can effectively reduce the heating deformation problem generated when the raw material wafer for manufacturing the semiconductor is cut, and can also reduce the problem that the cutting is inaccurate due to the position deviation of the main shaft caused by long-time continuous work in the moving, feeding and cutting process of the silicon ingot, wherein the stepping mechanism can stably feed the silicon ingot during continuous cutting through a transmission mode of rotating linkage horizontal stepping movement, so that the deviation defect of moving and feeding by screw transmission is avoided, the stabilizing mechanism can limit the silicon ingot to shake left and right when in a cutting state, so that the thickness of the cut wafer is more accurate, the power mechanism and the transmission mechanism can operate in a linkage manner, and the cutting piece can obtain the cooling effect of mutual extrusion of sponges when being cut downwards and moved upwards, the surface temperature of the cutting piece is reduced, and the thermal deformation generated when the wafer is cut can be reduced.

It will be apparent to those skilled in the art that various modifications may be made to the above embodiments without departing from the general spirit and concept of the invention. All falling within the scope of protection of the present invention. The protection scheme of the invention is subject to the appended claims.