micro-displacement amplifying devices

文档序号:1578876 发布日期:2020-01-31 浏览:5次 中文

阅读说明:本技术 一种微位移放大装置 (micro-displacement amplifying devices ) 是由 范伟 傅雨晨 金花雪 王寅 占炜 杨建红 于 2019-10-28 设计创作,主要内容包括:本发明提供一种微位移放大装置,包括支撑件和压电件,所述压电件包括转向块、两组三角组件和杠杆组件;所述三角组件包括三角输入块和三角输出块,所述三角输入块具有中间部以及两个连接部,在同一所述三角组件中,所述三角输出块有两个,两个所述三角输出块的一端分别柔性铰接在对应的所述连接部上,其中一个所述三角输出块未与所述连接部连接的一端柔性铰接在所述支撑件上,另一个所述三角输出块未与所述连接部连接的一端柔性铰接在所述转向块上;所述杠杆组件包括第一杆件以及第二杆件。通过设置三角组件,在实现位移放大的同时可以改变位移的方向,能够应用的测试平台相对较广,同时通过设置非对称结构的杠杆组件,放大倍数相对较大。(The invention provides micro-displacement amplifying devices, which comprise a support and a piezoelectric element, wherein the piezoelectric element comprises a steering block, two groups of triangular assemblies and a lever assembly, the triangular assembly comprises a triangular input block and two triangular output blocks, the triangular input block is provided with a middle part and two connecting parts, in the same triangular assembly, the two triangular output blocks are provided, ends of the two triangular output blocks are respectively flexibly hinged on the corresponding connecting parts, wherein ends of triangular output blocks which are not connected with the connecting parts are flexibly hinged on the support, ends of triangular output blocks which are not connected with the connecting parts are flexibly hinged on the steering block, the lever assembly comprises a rod piece and a second rod piece, the direction of displacement can be changed while the displacement amplification is realized by arranging the triangular assembly, an applicable test platform is relatively , and the amplification factor is relatively large by arranging the lever assembly with an asymmetric structure.)

The micro-displacement amplifying device is characterized by comprising a support piece and a piezoelectric element which are positioned on the same plane, wherein the piezoelectric element comprises a steering block, two groups of triangular components and more than two groups of lever components which are sequentially connected in series;

the triangular component comprises a triangular input block and two triangular output blocks, the triangular input block is provided with a middle part and two connecting parts which are respectively connected with the middle part in a body manner and are symmetrically arranged with the middle part as the center, the same of the triangular component is provided with two triangular output blocks, the two triangular output blocks are symmetrically arranged with the middle part as the center, ends of the two triangular output blocks are respectively flexibly hinged on the corresponding connecting parts, wherein ends of the triangular output blocks which are not connected with the connecting parts are flexibly hinged on the supporting part, ends of the triangular output blocks which are not connected with the connecting parts are flexibly hinged on the steering block, hinged points at two ends of the triangular output blocks are mutually staggered, the two groups of triangular components are symmetrically arranged with each other, and a driving space for placing a piezoelectric ceramic driver is formed between the middle parts of the two groups of triangular components;

the lever assembly comprises a rod piece with an end flexibly hinged with the supporting piece and a second rod piece with a end flexibly hinged at the middle position of the rod piece, wherein a end of the rod piece which is not connected with the supporting piece forms a lever output end, a end of the second rod piece which is not connected with the rod piece forms a lever input end, the lever output end of the lever assembly close to the head end of two adjacent lever assemblies is flexibly hinged on the lever input end of the other lever assembly , and the lever input end of the lever assembly at the head end is flexibly hinged on the steering block.

2. The micro-displacement amplifying device as claimed in claim 1, wherein the hinge point between the turning block and the corresponding lever assembly is located on the symmetry center line of the two sets of the triangular assemblies.

3. The micro-displacement amplifying device of claim 1, wherein a hinge point of the th pin and the support member and a hinge point of the th pin and the corresponding second pin are located at the same side of the th pin.

4. The micro-displacement amplifying device according to claim 1, wherein each of the flexible hinges is hinged by a flexible hinge.

5. The micro-displacement amplifying device as claimed in claim 4, wherein the flexible hinges between the th lever member and the supporting member are straight beam type hinges, and the other flexible hinges are straight circular type hinges.

6. The micro-displacement amplifier device as claimed in any of claims wherein the support member has a positioning hole.

Technical Field

The invention relates to amplifying devices, in particular to micro-displacement amplifying devices.

Background

In recent years, with the development of microelectronic technology, piezoelectric ceramics are widely applied to the fields of micro displacement driving and precision positioning by due to their excellent precision driving and positioning performance, but because their micron-sized displacement output often cannot meet the requirements of practical application, generally needs to design a displacement amplification device to amplify the displacement.

The invention discloses a Chinese patent publication No. CN104900573B, which is a symmetric differential lever micrometric displacement amplifying device designed in the early stage of the applicant, comprising a base, a substrate fixed on the base, and a piezoelectric block located on the same plane as the substrate, wherein the piezoelectric block comprises pushing parts and two transmission parts located at two ends of the pushing parts respectively and symmetrically placed with the perpendicular bisector of the pushing parts as the center, the two transmission parts are connected with sets of lever assemblies located on the same plane as the substrate respectively, and the two sets of lever assemblies are symmetrically placed with the perpendicular bisector of the pushing parts as the center, a piezoelectric ceramic driver abutting against the pushing parts is placed between the two transmission parts, the micrometric displacement amplifying device realizes larger displacement amplification by arranging the lever assemblies according to the principle of differential lever amplification, has larger stroke, and has smaller clearance and friction force between the lever members due to the adoption of flexible hinge connection, can reduce errors and have higher precision, however, the displacement amplifying device can only realize larger amplification times by the limited application of the differential lever amplification device , and can still realize larger differential displacement amplification times of the differential lever amplification test.

In view of the above, the present inventors have conducted extensive studies on a micro-displacement amplifying device, and have made this invention.

Disclosure of Invention

The invention aims to provide applicable micro-displacement amplification devices with test platforms being and amplification factors being large.

In order to achieve the purpose, the invention adopts the following technical scheme:

kinds of micro displacement amplifying device, which comprises a support element and a piezoelectric element on the same plane, wherein the piezoelectric element comprises a steering block, two groups of triangle components and more than two groups of lever components which are connected in series in sequence;

the triangular component comprises a triangular input block and two triangular output blocks, the triangular input block is provided with a middle part and two connecting parts which are respectively connected with the middle part in a body manner and are symmetrically arranged with the middle part as the center, the same of the triangular component is provided with two triangular output blocks, the two triangular output blocks are symmetrically arranged with the middle part as the center, ends of the two triangular output blocks are respectively flexibly hinged on the corresponding connecting parts, wherein ends of the triangular output blocks which are not connected with the connecting parts are flexibly hinged on the supporting part, ends of the triangular output blocks which are not connected with the connecting parts are flexibly hinged on the steering block, hinged points at two ends of the triangular output blocks are mutually staggered, the two groups of triangular components are symmetrically arranged with each other, and a driving space for placing a piezoelectric ceramic driver is formed between the middle parts of the two groups of triangular components;

the lever assembly comprises a rod piece with an end flexibly hinged with the supporting piece and a second rod piece with a end flexibly hinged at the middle position of the rod piece, wherein a end of the rod piece which is not connected with the supporting piece forms a lever output end, a end of the second rod piece which is not connected with the rod piece forms a lever input end, the lever output end of the lever assembly close to the head end of two adjacent lever assemblies is flexibly hinged on the lever input end of the other lever assembly , and the lever input end of the lever assembly at the head end is flexibly hinged on the steering block.

As an improvement of , the hinge point between the steering block and the corresponding lever assembly is positioned on the symmetrical center line of the two groups of triangular assemblies.

As an improvement of of the present invention, the hinge point of the rod and the support member and the hinge point of the rod and the corresponding second rod are located on the same side of the rod.

As an improvement of , the flexible hinges are hinged by flexible hinges.

As an improvement of of the present invention, the flexible hinge between the th rod member and the supporting member is a straight beam type hinge, and the other flexible hinges are all straight circular type hinges.

As improvements of the invention, the supporting piece is provided with a positioning hole.

By adopting the technical scheme, the invention has the following beneficial effects:

1. through setting up the triangle subassembly, can change the direction of displacement when realizing that the displacement is enlargied, the test platform that can use is relatively, simultaneously through setting up asymmetric structure's lever assembly, and the magnification is great relatively.

2. By utilizing the characteristics that the straight circular hinge is sensitive to tensile displacement and the straight beam hinge is sensitive to torsional displacement, -step magnification of the displacement amplification mechanism is increased.

3. Combine triangle-shaped principle and lever principle, carry out multistage amplification to input displacement, the output of triangle-shaped subassembly portion is direct to be connected through flexible hinge and lever assembly's input, has reduced energy loss to degree, and displacement loss is less promptly.

Drawings

FIG. 1 is a schematic structural diagram of a micro-displacement amplifying device according to the present invention;

fig. 2 is a schematic view of the working principle of the micro-displacement amplifying device of the present invention.

The designations in the figures correspond to the following:

100-a support; 110-positioning holes;

200-a piezoelectric element; 210-a turning block;

220-a triangular component; 221-triangle input block;

221 a-middle section; 221 b-connecting part;

222-a triangle output block; 230-a lever assembly;

231- th rod piece, 232-second rod piece.

Detailed Description

The invention is further described with reference to the figures and the specific embodiments.

As shown in fig. 1, the micro-displacement amplifying device provided in this embodiment includes a supporting member 100 and a piezoelectric element 200 located on the same plane, wherein the structure of the supporting member 100 can be designed according to actual requirements, in this embodiment, the supporting member 100 is a rigid frame structure, and the supporting member 100 is provided with a positioning hole 110, so as to facilitate the supporting member 100 to be accurately and fixedly mounted at a designated position of a testing platform or an experimental platform.

Preferably, the piezoelectric element 200 is a -body-formed part, that is, the steering block 210, the triangular component 220 and the lever component 230 are formed by body forming, and the piezoelectric element 200 and the supporting member 100 are connected by body forming, specifically, the micro-displacement amplifying device provided by the embodiment forms the -body-connected piezoelectric element 200 and the supporting member 100 by wire electrical discharge cutting, so that the machining precision is relatively high, and error superposition in the cutting and assembling processes is effectively avoided.

The turning block 210 is a centrosymmetric part, that is, the turning block 210 has center lines (the center lines are virtual lines, and the center lines are not drawn on the actual part), and the parts of the turning block 210 located at both sides of the center lines are symmetrically arranged with the center lines as centers.

The triangular assembly 220 comprises a triangular input block 221 and a triangular output block 222, wherein the triangular input block 221 has a middle part 221a and two connecting parts 221b fixedly connected with the middle part 221a in a body-like manner and symmetrically arranged with the middle part 221a as the center, namely the triangular input block 221 is also a central symmetrical part, in the same triangular assemblies 220, there are two triangular output blocks 222, and the two triangular output blocks 222 are symmetrically arranged with the middle part 221a as the center, so that the triangular output blocks 222 and the connecting parts 221b positioned at the same sides of the middle part 221a can be matched with each other, specifically, ends of the two triangular output blocks 222 are flexibly hinged on the corresponding connecting parts 221b, respectively, in addition, ends of the two triangular output blocks 222, where triangular output blocks 222 are not connected with the connecting parts 221b, are flexibly hinged on the supporting member 100, ends of the other triangular output blocks 222, which are not connected with the connecting parts 221b, are flexibly hinged on the steering block 210, and hinge points at two ends of the two triangular output blocks 222 are arranged in a staggered manner, namely, and the connecting points of the triangular output blocks are not in the same length direction with the connecting parts.

The two groups of triangular components 220 are symmetrically arranged, the symmetric axes of the two groups of triangular components 220 are located on the same straight line with the central line of the steering block 210, the middle parts 221a of the two groups of triangular components 220 are oppositely arranged, and a driving space for placing the piezoelectric ceramic driver is formed between the middle parts 221a of the two groups of triangular components 220, namely, the opposite ends of the two middle parts 221a are displacement input ends matched with the piezoelectric ceramic driver.

The lever assembly 230 includes a first rod 231 having ends flexibly hinged to the support member 100 and a second rod 232 having 0 ends flexibly hinged to the middle of the first rod 231, wherein the ends of the first rod 231 not connected to the support member 100 form output ends of the lever, and the ends of the second rod 232 not connected to the second rod 231 form input ends of the lever, it should be noted that the ends or the ends of the respective rods referred to in the above description are general descriptions of the relative positions of the , and do not only refer to the end positions of the rods, but also include shaft portions of the respective rods near the end positions.

In this way, in two adjacent lever assemblies 230, the lever output end of the lever assembly 230 near the head end is flexibly hinged to the lever input end of another lever assembly 230, and the lever input end of the lever assembly 230 at the head end is flexibly hinged to the turning block 210, and in addition, the hinge point between the turning block 210 and the corresponding lever assembly 230 is located on the symmetry center line of the two sets of triangular assemblies 220.

Preferably, in this embodiment, the hinge point between the th rod 231 and the supporting member 100 and the hinge point between the th rod 231 and the corresponding second rod 232 are located on the same side of the th rod 231, so as to avoid generating a shearing force to affect the precision of the amplifying device.

The flexible hinges are hinged by flexible hinges, wherein the flexible hinge between the th rod 231 and the support 100 is a straight beam type hinge relatively sensitive to torsion displacement, and the other flexible hinges are straight circular type hinges relatively sensitive to extension displacement.

The micro-displacement amplifying device provided by the embodiment can realize the purpose of amplifying a small range into a large range through the micro-displacement amplifying device in a smaller processing space, the theoretical amplification factor of the device is 27.24 times, wherein the amplification factor of the triangular component 220 is 4.54 times, and the amplification factor of the lever component 230 is 6. specifically, as shown in fig. 2 and referring to fig. 1, when in use, a micro displacement output by the piezoelectric ceramic driver is applied to the displacement input ends of the two triangular components 220, the displacement input ends and the triangular output blocks 222 can form a triangular structure to amplify the displacement, wherein L1 and L2 shown in fig. 2 are adjacent sides of the triangle, α is an included angle, since the two triangular output blocks 222 in triangular components 220 are symmetrically arranged, and wherein triangular output blocks 222 are flexibly hinged with the support 100, and according to the superposition theorem, the amplification ratio of the triangular components 220 is K12/tan α, due to the turning block 210 are directly connected to the triangle assembly 220 and the lever assembly 230, respectively, so that the input displacement of the lever rigid body assembly 230 is approximately ay1=Δy·K1Since the lever assembly 230 has two sets, which can be divided into -level lever structure and two-level lever structure, in fig. 2, L6-2L 5-2L 4-2L 3, the amplification factor of -level lever structure is K according to the lever principle2(L4+ L3)/L3, the magnification of the secondary lever structure is K2(L6+ L5)/L5, wherein the output end of the -level lever structure is the input end of the two-level lever structure, and the total magnification of the rigid body part of the two-level lever is K according to the superposition principle3=K1·K2Since (L4+ L3)/L3 · (L6+ L5)/L5 ═ 6, the total magnification of the entire micro-displacement amplification device is approximately K ═ K1·K2·K3=12/tanα。

The micro-displacement amplifying device provided by the embodiment can convert the transverse input displacement of the piezoelectric ceramic driver into the longitudinal output displacement and realize multi-stage amplification, has the advantages of novel structure, relatively small parasitic displacement, high precision and the like, and is suitable for the technical fields of micro-displacement measurement, micro-precision positioning platforms and micro-nano driving.

The present invention is described in detail with reference to the attached drawings, but the embodiments of the present invention are not limited to the above embodiments, and those skilled in the art can make various modifications to the present invention based on the prior art, which fall within the scope of the present invention.

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