Power module structure

文档序号:1578914 发布日期:2020-01-31 浏览:23次 中文

阅读说明:本技术 功率模块结构 (Power module structure ) 是由 洪守玉 徐海滨 程伟 程娟 王涛 赵振清 于 2019-04-22 设计创作,主要内容包括:本发明提供一种功率模块结构,该功率模块结构包括第一金属层、第二金属层、第三金属层、第四金属层、第一开关和第二开关;第一金属层和第三金属层分别设置于第一参考平面和第二参考平面,其中,所述第一金属层和所述第三金属层在所述第一参考平面或所述第二参考平面上的投影有第一重叠区域,且流经所述第一金属层的电流与流经所述第三金属层的电流方向相反。通过采用本发明的功率模块结构,很好地实现了电感的抵消,降低了模组的寄生电感。(The invention provides power module structures, which comprise a metal layer, a second metal layer, a third metal layer, a fourth metal layer, a switch and a second switch, wherein the metal layer and the third metal layer are respectively arranged on a reference plane and a second reference plane, wherein a overlapping region is formed in the projection of the metal layer and the third metal layer on the reference plane or the second reference plane, and the direction of current flowing through the metal layer is opposite to that of current flowing through the third metal layer.)

1, power module structure, comprising:

an th metal layer disposed on the th reference plane;

a second metal layer disposed at the reference plane and adjacent to the metal layer;

a third metal layer disposed on a second reference plane, wherein the second reference plane is parallel to the th reference plane;

the fourth metal layer is arranged on the second reference plane and is adjacent to the third metal layer, and the fourth metal layer is electrically connected with the second metal layer through a connecting bridge;

a switch including a terminal and a second terminal, the terminal being electrically connected to the third metal layer and the second terminal being electrically connected to the second metal layer, and

a second switch comprising a third terminal electrically connected to the fourth metal layer and a fourth terminal electrically connected to the th metal layer;

wherein a th overlapping region is projected by the th metal layer and the third metal layer on the th reference plane or the second reference plane, and a current flowing through the th metal layer is opposite to a current flowing through the third metal layer.

2. The power module structure of claim 1, further comprising th and second substrates, wherein the th and second metal layers are disposed on a lower surface of the th substrate, and the third and fourth metal layers are disposed on an upper surface of the second substrate.

3. The power module structure of claim 1, further comprising:

a th pad connected to the th switch at , the th pad connected to of the third metal layer and the second metal layer, the th switch connected to another of the third metal layer and the second metal layer, and

a second pad connected to with the second switch, the second pad being connected to of the fourth metal layer and the metal layer, the second switch being connected to another of the fourth metal layer and the metal layer.

4. The power module structure of claim 3, wherein the th tile is a metal or thermally conductive insulating material and the second tile is a metal or thermally conductive insulating material.

5. The power module structure of claim 1, wherein the connecting bridges are evenly distributed between the th switch and the second switch.

6. The power module structure of claim 1, wherein the connecting bridges are collectively disposed on the same side of the th and second switches.

7. The power module structure of claim 1, further comprising:

an power terminal electrically connected to the third metal layer;

a second power terminal electrically connected to the th metal layer, and

and a third power terminal electrically connected to the connection bridge.

8. The power module structure of claim 7, wherein the th power terminal and the second power terminal have projections on the th or second reference planes that at least partially overlap.

9. The power module structure of claim 1, further comprising a signal terminal electrically connected to signal terminals of the th switch and the second switch by a bond wire or by a bond wire and a PCB board.

10. The power module architecture of claim 1, wherein each of the th switches and each of the second switches are connected in series to form pairs, and a plurality of pairs of the th switches and the second switches are arranged in parallel at .

11. The power module structure of claim 1, wherein current flowing through the th metal layer is in an opposite direction from current flowing through the third metal layer through a third reference plane, wherein the third reference plane cuts perpendicularly through the th overlap region.

12. The power module structure of claim 3, wherein said th switch and said second switch are both vertical devices, wherein,

the th end is connected to the third metal layer, the second end is connected to the th pad, and the th pad is connected to the second metal layer, and

the third end is connected to the fourth metal layer, the fourth end is connected to the second pad, and the second pad is connected to the th metal layer.

13. The power module structure of claim 3, wherein the th switch and the second switch are both planar devices, the power module structure further comprising a third pad, a th connection post, and a second connection post, wherein,

the th end is connected to the third metal layer;

the second terminal connected to a th connecting metal layer, the th connecting metal layer disposed on the second reference plane and adjacent to the third metal layer, the th connection stud connected to the th connecting metal layer and the second metal layer, and

the third terminal is connected to the third pad, the third pad is connected to a second connection metal layer, the second connection metal layer is disposed on the reference plane and adjacent to the metal layer, and the second connection stud is connected to the second connection metal layer and the fourth metal layer, and

the fourth end is connected to the second pad, and the second pad is connected to the th metal layer.

14. The power module structure of claim 3, wherein the th switch and the second switch are both planar devices, the power module structure further comprising a th connection post and a second connection post, wherein,

the th terminal connected to the third metal layer, the second terminal connected to a th connecting metal layer, the th connecting metal layer disposed on the second reference plane and adjacent to the third metal layer, the th connection stud connected to the th connecting metal layer and the second metal layer, and

the third terminal is connected to a second connection metal layer disposed on an th reference plane and adjacent to the th metal layer, the second connection stud is connected to the second connection metal layer and the fourth metal layer, and the fourth terminal is connected to the th metal layer.

15. The power module structure of claim 1, further comprising a clamp capacitor disposed between the reference plane and the second reference plane and electrically connected between the third metal layer and the metal layer.

16. The power module structure of claim 5, further comprising a clamp capacitor and a capacitor connecting block, wherein the clamp capacitor and the capacitor connecting block are located outside the connecting bridge, poles of the clamp capacitor are connected to the third metal layer, and poles of the clamp capacitor are electrically connected to the th metal layer through a third connecting metal layer and the corresponding capacitor connecting block.

17. The power module structure of claim 5, further comprising a clamp capacitor and a capacitor connection block, wherein the clamp capacitor and the capacitor connection block are located in a hollow portion of the connection bridge, poles of the clamp capacitor are connected to the third metal layer, and poles of the clamp capacitor are electrically connected to the th metal layer through a third connection metal layer and the corresponding capacitor connection block.

18. The power module structure of claim 6, further comprising a clamp capacitor and a capacitor connection block, wherein the clamp capacitor and the capacitor connection block are located between the th switch and the second switch, and wherein pole of the clamp capacitor is electrically connected to the third metal layer and pole is electrically connected to the th metal layer through the capacitor connection block.

19. The power module structure of claim 6, further comprising an upright clamp capacitor, wherein the upright clamp capacitor is located between the th switch and the second switch, and wherein of the upright clamp capacitor is electrically connected to the third metal layer and further is electrically connected to the th metal layer.

20. The power module structure of claim 1, wherein at least a portion of the th overlap region is located between a projection of a th switch region onto the th reference plane and a projection of a second switch region onto the th reference plane, wherein the th switch region is a minimum envelope region of the th switch and the second switch region is a minimum envelope region of the second switch.

21. The power module structure of claim 20, wherein a th signal terminal is connected to the th switch, a second signal terminal is connected to the second switch, and a wiring leading-out direction of the th signal terminal and a wiring leading-out direction of the second signal terminal extend respectively toward a direction away from the th overlapping area.

22. The power module structure of claim 7, wherein the th switch is linearly arranged along the th direction, the second switch is linearly arranged along the th direction, the th power terminal and the second power terminal are led out along the th direction, and the third power terminal is led out along the direction opposite to the th direction.

23. The power module structure of claim 3, wherein at least of the pad and the second pad comprises a pad plane in contact with a switch and a second pad plane in contact with a metal layer, wherein a projection of the second pad plane on the reference plane overlaps a projection of the pad plane on the reference plane, and a projection of the second pad plane on the reference plane is larger than a projection of the pad plane on the reference plane.

24. The power module structure of claim 23, wherein the side of the projection of the second pad plane at the reference plane protrudes outward 0.5-5 mm relative to the side of the projection of the reference plane at the pad plane.

25. The power module structure of claim 23, wherein at least sides of the pad plane define a pocket that is concave toward the second pad plane, the pocket including a fourth pad plane connected to the pad plane and a third pad plane connected to the fourth pad plane, the third pad plane spaced from the pad plane by more than 0.1mm, the third pad plane spaced from the second pad plane by more than 0.5 mm.

26. The power module structure of claim 1, wherein a projection of the connecting bridge at the th reference plane or the second reference plane overlaps the th overlap region.

27. The power module structure of claim 7, wherein there is an overlap in the projection of the reference plane or the second reference plane between the area where the th metal layer is connected to the second power terminal and the area where the third metal layer is connected to the power terminal.

28. The power module structure of claim 1, wherein the second metal layer and the fourth metal layer have a second overlapping area projected on the reference plane or the second reference plane, and the projection of the connection bridge on the reference plane or the second reference plane falls within the range of the second overlapping area.

29. The power module structure of claim 28, wherein the connecting bridge is a cylindrical connecting bridge.

30. The power module structure of claim 28, wherein a projection of the connecting bridge on the th reference plane or the second reference plane does not overlap with the th overlap region.

31. The power module structure of claim 28 wherein said th overlapping areas and said second overlapping areas are staggered.

32, power module arrangement, comprising:

an th metal layer disposed on the th reference plane;

a second metal layer disposed on a second reference plane, wherein the second reference plane is parallel to the th reference plane;

a third metal layer disposed on the second reference plane and adjacent to the second metal layer;

a fourth metal layer disposed between the th reference plane and the second reference plane and parallel to the th reference plane or the second reference plane;

a th switch including a th terminal and a second terminal, the th terminal being electrically connected to the second metal layer, the second terminal being electrically connected to the th metal layer, and

a second switch comprising a third terminal electrically connected to the th metal layer and a fourth terminal electrically connected to the third metal layer;

wherein the fourth metal layer is electrically connected to metal layers of the second and third metal layers, the fourth metal layer has an overlapping region with a projection of another metal layer of the second and third metal layers onto the reference plane or the second reference plane, and a current flowing through the fourth metal layer is in an opposite direction to a current flowing through the another metal layer.

33. The power module structure of claim 32, wherein at least a portion of the overlap region is located between a projection of a th switch region on a reference plane and a projection of a second switch region on a reference plane, wherein the th switch region is a minimum envelope region of the th switch and the second switch region is a minimum envelope region of the second switch.

34. The power module structure of claim 33, wherein a th signal terminal is connected to the th switch, a second signal terminal is connected to the second switch, and a lead-out direction of the th signal terminal and a lead-out direction of the second signal terminal extend in directions away from the overlapping area, respectively.

35. The power module structure of claim 32, further comprising:

an th power terminal electrically connected to the second metal layer;

a second power terminal electrically connected to the third metal layer; and

a third power terminal electrically connected to the th metal layer.

36. The power module structure of claim 35, wherein the th switch comprises a linear arrangement along the th direction, the second switch comprises a linear arrangement along the th direction, the th power terminal, the second power terminal are led out along the th direction, and the third power terminal is led out along the direction opposite to the th direction.

37. The power module structure of claim 32, further comprising:

a th pad connected to the th switch at , the th pad connected to of the second metal layer and the th metal layer, the th switch connected to the other of the second metal layer and the th metal layer, and

and a second pad connected to , the second pad being connected to of the third metal layer and the metal layer, the second switch being connected to the other of the third metal layer and the metal layer, wherein the pad and the second pad are both thermally conductive conductors.

38. The power module structure of claim 37 wherein at least of the pads and the second pads comprises a pad plane in contact with the switch and a second pad plane in contact with the metal layer, wherein a projection of the second pad plane onto the reference plane partially overlaps a projection of the pad plane onto the reference plane, and wherein a projection of the second pad plane onto the reference plane is greater than a projection of the pad plane onto the reference plane.

39. The power module structure of claim 38, wherein the side of the projection of the second pad plane at the reference plane protrudes 0.5-5 mm outward relative to the side of the projection of the reference plane at the pad plane.

40. The power module structure of claim 38, wherein at least sides of the pad plane define a pocket that is concave toward the second pad plane, the pocket including a fourth pad plane connected to the pad plane and a third pad plane connected to the fourth pad plane, the third pad plane spaced from the pad plane by more than 0.1mm, the third pad plane spaced from the second pad plane by more than 0.5 mm.

Technical Field

The invention relates to the technical field of power electronic equipment, in particular to power module structures.

Background

The goal has been a significant pursuit by those skilled in the art for ensuring long-term stable operation of power electronics and improving the power conversion efficiency of power electronics, and it is well established that finds widespread application in the power, electronics, motor, and energy industries as an important component of power conversion.

The performance of a power semiconductor device, which is a core component of modern power electronic equipment, directly determines the reliability and power conversion efficiency of a power electronic device. In order to design a more reliable, safe, and high-performance power electronic device, it is desirable that the power semiconductor device have characteristics of low voltage stress and low power loss. Power semiconductor devices used in power electronic devices operate in a switching state, and the high frequency of switching action causes a high rate of current change di/dt in the line. According to the circuit principle, a varying current acts on the parasitic inductance LstrayWill generate a voltage VsThe calculation formula is as follows:

Vs=Lstraydi/dt

therefore, under the condition that the current change rate is not changed, a higher voltage peak value can be generated by larger parasitic inductance, and the reliability of the device can be reduced by an excessively high voltage peak value, so that the turn-off loss of the device is increased; after the line parasitic inductance is reduced, the device is allowed to use smaller driving resistance to achieve faster switching speed and reduce switching loss so as to improve the efficiency of the converter.

In summary, the requirement of reducing the parasitic inductance on the line is raised, and the parasitic inductance is related to the packaging of the power semiconductor device, therefore, reasonable packaging structures are required to reduce the parasitic inductance.

Disclosure of Invention

It is an object of the present invention to provide power module structures, thereby overcoming the above-mentioned technical problems due to limitations and disadvantages of the related art, at least to the extent of .

Additional features and advantages of the invention will be set forth in the detailed description which follows, or may be learned by practice of the invention.

According to an th aspect of the invention, there are provided power module structures, including:

an th metal layer disposed on the th reference plane;

a second metal layer disposed at the reference plane and adjacent to the metal layer;

a third metal layer disposed on a second reference plane, wherein the second reference plane is parallel to the th reference plane;

the fourth metal layer is arranged on the second reference plane and is adjacent to the third metal layer, and the fourth metal layer is electrically connected with the second metal layer through a connecting bridge;

a switch including a terminal and a second terminal, the terminal being electrically connected to the third metal layer and the second terminal being electrically connected to the second metal layer, and

a second switch comprising a third terminal electrically connected to the fourth metal layer and a fourth terminal electrically connected to the th metal layer;

wherein a th overlapping region is projected by the th metal layer and the third metal layer on the th reference plane or the second reference plane, and a current flowing through the th metal layer is opposite to a current flowing through the third metal layer.

Optionally, the package structure further comprises an th substrate and a second substrate, wherein the th metal layer and the second metal layer are disposed on the lower surface of the th substrate, and the third metal layer and the fourth metal layer are disposed on the upper surface of the second substrate.

Optionally, the method further comprises:

a th pad connected to the th switch at , the th pad connected to of the third metal layer and the second metal layer, the th switch connected to another of the third metal layer and the second metal layer, and

a second pad connected to with the second switch, the second pad being connected to of the fourth metal layer and the metal layer, the second switch being connected to another of the fourth metal layer and the metal layer.

Optionally, the th pad is a metal block or a heat conducting and insulating material block, and the second pad is a metal block or a heat conducting and insulating material block.

Optionally, the connecting bridges are evenly distributed between the th switch and the second switch.

Optionally, the connecting bridges are collectively disposed on the same side of the th switch and the second switch.

Optionally, the method further comprises:

an power terminal electrically connected to the third metal layer;

a second power terminal electrically connected to the th metal layer, and

and a third power terminal electrically connected to the connection bridge.

Optionally, the th power terminal and the second power terminal have projections on the th reference plane or the second reference plane that at least partially overlap.

Optionally, the switch further comprises a signal terminal, wherein the signal terminal is electrically connected to the th switch and the signal terminal of the second switch through a bonding wire or through a bonding wire and a PCB board.

Optionally, each of the switches and each of the second switches are connected in series to form pairs, and a plurality of pairs of the switches and the second switches are arranged in parallel at .

Optionally, a current flowing through the th metal layer is in an opposite direction than a current flowing through the third metal layer through a third reference plane, wherein the third reference plane perpendicularly cuts the th overlap region.

Optionally, the th switch and the second switch are both vertical devices, wherein,

the th end is connected to the third metal layer, the second end is connected to the th pad, and the th pad is connected to the second metal layer, and

the third end is connected to the fourth metal layer, the fourth end is connected to the second pad, and the second pad is connected to the th metal layer.

Optionally, the th switch and the second switch are both planar devices, the power module structure further includes a third pad, a th connection post and a second connection post, wherein,

the th end is connected to the third metal layer;

the second terminal connected to a th connecting metal layer, the th connecting metal layer disposed on the second reference plane and adjacent to the third metal layer, the th connection stud connected to the th connecting metal layer and the second metal layer, and

the third terminal is connected to the third pad, the third pad is connected to a second connection metal layer, the second connection metal layer is disposed on the reference plane and adjacent to the metal layer, and the second connection stud is connected to the second connection metal layer and the fourth metal layer, and

the fourth end is connected to the second pad, and the second pad is connected to the th metal layer.

Optionally, the th switch and the second switch are both planar devices, the power module structure further comprising a th connection post and a second connection post, wherein,

the th terminal connected to the third metal layer, the second terminal connected to a th connecting metal layer, the th connecting metal layer disposed on the second reference plane and adjacent to the third metal layer, the th connection stud connected to the th connecting metal layer and the second metal layer, and

the third terminal is connected to a second connection metal layer disposed on an th reference plane and adjacent to the th metal layer, the second connection stud is connected to the second connection metal layer and the fourth metal layer, and the fourth terminal is connected to the th metal layer.

Optionally, a clamping capacitor is further included, the clamping capacitor being disposed between the th reference plane and the second reference plane and being electrically connected between the third metal layer and the th metal layer.

Optionally, the power module structure further includes a clamp capacitor and a capacitor connection block, wherein the clamp capacitor and the capacitor connection block are located outside the connection bridge, poles of the clamp capacitor are connected to the third metal layer, and poles of the clamp capacitor are electrically connected to the th metal layer through a third connection metal layer and the corresponding capacitor connection block.

Optionally, the power module structure further includes a clamp capacitor and a capacitor connecting block, wherein the clamp capacitor and the capacitor connecting block are located in a hollow portion of the connecting bridge, poles of the clamp capacitor are connected to the third metal layer, and poles of the clamp capacitor are electrically connected to the th metal layer through a third connecting metal layer and the corresponding capacitor connecting block.

Optionally, the power module structure further includes a clamp capacitor of a lay-flat type and a capacitor connection block, wherein the clamp capacitor of the lay-flat type and the capacitor connection block are located between the th switch and the second switch, pole of the clamp capacitor of the lay-flat type is electrically connected to the third metal layer, and pole is electrically connected to the th metal layer through the capacitor connection block.

Optionally, the power module structure further comprises an upright clamping capacitor, wherein the upright clamping capacitor is located between the th switch and the second switch, of the upright clamping capacitor is electrically connected to the third metal layer, and is electrically connected to the th metal layer.

Optionally, at least a portion of the th overlap region is located between a projection of a th switch region onto the th reference plane and a projection of a second switch region onto the th reference plane, where the th switch region is a minimum envelope region of the th switch and the second switch region is a minimum envelope region of the second switch.

Optionally, a signal terminal is connected to the th switch, a second signal terminal is connected to the second switch, and the wiring leading-out direction of the th signal terminal and the wiring leading-out direction of the second signal terminal extend respectively toward a direction away from the th overlapping region.

Optionally, the th switch is linearly arranged along the th direction, the second switch is linearly arranged along the th direction, the th power terminal and the second power terminal are led out along the th direction, and the third power terminal is led out along the reverse direction of the th direction.

Optionally, at least of the th pad and the second pad comprises a th pad plane in contact with the switch and a second pad plane in contact with the metal layer, wherein a projection of the second pad plane on the th reference plane partially overlaps a projection of the th pad plane on the th reference plane, and a projection of the second pad plane on the th reference plane is larger than a projection of the th pad plane on the th reference plane.

Optionally, the side of the projection of the second pad plane on the th reference plane protrudes 0.5-5 mm outward relative to the side of the projection of the th pad plane on the th reference plane.

Optionally, at least sides of the pad plane are formed with a pocket that is concave toward the second pad plane, the pocket including a fourth pad plane connected to the pad plane and a third pad plane connected to the fourth pad plane, the third pad plane being spaced from the pad plane by more than 0.1mm, the third pad plane being spaced from the second pad plane by more than 0.5 mm.

Optionally, there is an overlap of a projection of the connecting bridge at the th reference plane or the second reference plane with the th overlapping region.

Optionally, there is an overlap between a region where the th metal layer is connected to the second power terminal and a region where the th metal layer is connected to the th power terminal in a projection of the th reference plane or the second reference plane.

Optionally, the second metal layer and the fourth metal layer have a second overlapping area on the th reference plane or the second reference plane, and the projection of the connecting bridge on the th reference plane or the second reference plane falls within the range of the second overlapping area.

Optionally, the connecting bridge is a cylindrical connecting bridge.

Optionally, a projection of the connecting bridge on the th reference plane or the second reference plane does not overlap with the th overlap region.

Optionally, the th overlapping area and the second overlapping area are staggered.

By adopting the power module structure of the aspect of the invention, since the overlapping region is formed by the projection of the th metal layer and the third metal layer on the th reference plane or the second reference plane, and the direction of the current flowing through the th metal layer is opposite to the direction of the current flowing through the third metal layer, the effect of inductance cancellation is well realized, and the parasitic inductance of the module is reduced.

The second aspect of the present invention further provides power module structures, including:

an th metal layer disposed on the th reference plane;

a second metal layer disposed on a second reference plane, wherein the second reference plane is parallel to the th reference plane;

a third metal layer disposed on the second reference plane and adjacent to the second metal layer;

a fourth metal layer disposed between the th reference plane and the second reference plane and parallel to the th reference plane or the second reference plane;

a th switch including a th terminal and a second terminal, the th terminal being electrically connected to the second metal layer, the second terminal being electrically connected to the th metal layer, and

a second switch comprising a third terminal electrically connected to the th metal layer and a fourth terminal electrically connected to the third metal layer;

wherein the fourth metal layer is electrically connected to metal layers of the second and third metal layers, the fourth metal layer has an overlapping region with a projection of another metal layer of the second and third metal layers onto the reference plane or the second reference plane, and a current flowing through the fourth metal layer is in an opposite direction to a current flowing through the another metal layer.

Optionally, at least a portion of the overlap region is located between a projection of an th switch region on a th reference plane and a projection of a second switch region on a th reference plane, wherein the th switch region is a minimum envelope region of the th switch, and the second switch region is a minimum envelope region of the second switch.

Optionally, a signal terminal is connected to the th switch, a second signal terminal is connected to the second switch, and the th signal terminal and the second signal terminal are respectively extended in a direction away from the overlapping region.

Optionally, the method further comprises:

an th power terminal electrically connected to the second metal layer;

a second power terminal electrically connected to the third metal layer; and

a third power terminal electrically connected to the th metal layer.

Optionally, the th switch comprises a switch arranged linearly along the th direction, the second switch is arranged linearly along the th direction, the th power terminal and the second power terminal are led out along the th direction, and the third power terminal is led out along the direction opposite to the th direction.

Optionally, the method further comprises:

a th pad connected to the th switch at , the th pad connected to of the second metal layer and the th metal layer, the th switch connected to the other of the second metal layer and the th metal layer, and

and a second pad connected to , the second pad being connected to of the third metal layer and the metal layer, the second switch being connected to the other of the third metal layer and the metal layer, wherein the pad and the second pad are both thermally conductive conductors.

Optionally, at least of the th pad and the second pad comprises a th pad plane in contact with the switch and a second pad plane in contact with the metal layer, wherein a projection of the second pad plane on the th reference plane partially overlaps a projection of the th pad plane on the th reference plane, and a projection of the second pad plane on the th reference plane is larger than a projection of the th pad plane on the th reference plane.

Optionally, the side of the projection of the second pad plane on the th reference plane protrudes 0.5-5 mm outward relative to the side of the projection of the th pad plane on the th reference plane.

Optionally, at least sides of the pad plane are formed with a pocket that is concave toward the second pad plane, the pocket including a fourth pad plane connected to the pad plane and a third pad plane connected to the fourth pad plane, the third pad plane being spaced from the pad plane by more than 0.1mm, the third pad plane being spaced from the second pad plane by more than 0.5 mm.

By adopting the power module structure of the second aspect of the present invention, since the projection of the fourth metal layer and the second metal layer or the third metal layer on the th reference plane or the second reference plane has an overlapping area, and the direction of the current flowing through the fourth metal layer is opposite to the direction of the current flowing through the second metal layer or the third metal layer, the effect of inductance cancellation is well achieved, and the parasitic inductance of the module is reduced.

To further understand the features and technical content of the present invention, please refer to the following detailed description and drawings of the present invention, which are only used to illustrate the present invention and not to limit the scope of the claims of the present invention.

Drawings

The above and other features and advantages of the present invention will become more apparent by describing in detail exemplary embodiments thereof with reference to the attached drawings.

Fig. 1 is an equivalent circuit diagram of half-bridge modules in the prior art;

FIG. 2 is a schematic diagram of a packaged power module configuration according to an embodiment of the invention;

FIG. 3 is a diagram illustrating the structure of a power module according to an embodiment of the present invention;

FIG. 4 is a cross-sectional view taken along line A-A of FIG. 2;

FIG. 5 is a schematic view of the direction of current flow in FIG. 4;

fig. 6 is an exploded view of the power module structure of th embodiment of the present invention;

FIG. 7 is a diagram illustrating a power module according to a second embodiment of the present invention;

fig. 8 is an exploded view of a power module structure of a second embodiment of the present invention;

FIG. 9 is a cross-sectional view taken along line B-B of FIG. 7;

fig. 10 is a schematic diagram of a power module structure according to a third embodiment of the present invention;

fig. 11 is an exploded view of a power module structure of a third embodiment of the present invention;

fig. 12 is a schematic diagram of a power module structure according to a fourth embodiment of the present invention;

fig. 13 is a schematic diagram of a power module structure according to a fifth embodiment of the present invention;

FIG. 14 is an equivalent circuit diagram of a half-bridge module with clamping capacitors added according to the present invention;

fig. 15 is a schematic diagram of a power module structure according to a sixth embodiment of the present invention;

fig. 16 is a schematic diagram of a power module structure according to a seventh embodiment of the present invention;

FIG. 17 is an enlarged view of the boxed area of FIG. 16;

FIG. 18 is a cross-sectional view taken in the direction D-D of FIG. 16;

fig. 19 is a schematic diagram of a power module structure according to an eighth embodiment of the present invention;

FIG. 20 is a cross-sectional view taken in the direction E-E of FIG. 19;

fig. 21 is a schematic view of a power module structure according to a ninth embodiment of the present invention;

FIG. 22 is a cross-sectional view taken in the direction F-F of FIG. 21;

FIG. 23 is an equivalent circuit diagram of a half bridge module employing four pairs of switches;

fig. 24 is a schematic view of a power module structure according to a tenth embodiment of the present invention;

fig. 25 and 26 are partial exploded views of a power module structure of a tenth embodiment of the present invention;

FIG. 27 is a sectional view taken in the direction H-H in FIG. 24;

FIG. 28 is a sectional view taken in the direction G-G of FIG. 24;

FIG. 29 is a schematic view of the direction of current flow shown in FIG. 27;

fig. 30 is an exploded view of a power module structure of a tenth embodiment of the present invention;

fig. 31 is a schematic diagram of a power module structure according to a tenth embodiment of the invention;

fig. 32 is a schematic view of a power module structure according to a twelfth embodiment of the present invention;

FIGS. 33-34 are schematic structural views of the th pad used in various embodiments of the present invention;

FIGS. 35-43 are schematic views of various alternative configurations of the head block of the present invention.

Reference numerals:

21 the th connection column of the upper substrate 61

22 lower base plate 62 second connecting column

23 signal terminal 63 third pad

24 bonding wire 41 metal layer (examples 1 to 10)

25 th pad 42 second metal layer (examples 1 to 10)

251, , pad plane 43 third metal layer (examples 1-10)

252 second pad plane 44 fourth metal layer (examples 1-10)

253 third pad plane 45 th connection metal layer

254 fourth pad plane 46 second connection metal layer

26 second pads 511-514 connecting material

27 connecting bridge 52 clamping capacitor

28 power device 53 capacitance connecting block

281 th th switch 54 third connection metal layer

2811 end side 71 No. Metal layer (example 11)

2812 second end 72 second metal layer (example 11)

282 second switch 73 third metal layer (example 11)

2821 third terminal 74 fourth metal layer (example 11)

2822 fourth end 81, Metal layer (example 12)

31 second metal layer of Power terminal 82 (example 12)

32 second power terminal 83 third metal layer (embodiment 12)

33 third power terminal 84 fourth metal layer (embodiment 12)

Detailed Description

Example embodiments will now be described more fully with reference to the accompanying drawings. Example embodiments may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein; rather, these embodiments are provided so that this disclosure will be thorough and complete, and will fully convey the concept of example embodiments to those skilled in the art. The same reference numerals denote the same or similar structures in the drawings, and thus detailed descriptions thereof will be omitted.

Herein, the connection between two components may mean that the two components are directly connected, i.e., directly contacted or attached, or that the two components are indirectly connected, i.e., connected with each other through other materials; that is, they may be physically or electrically connected. In different embodiments, they have the corresponding meanings.

Furthermore, the described features, structures, or characteristics may be combined in any suitable manner in or more embodiments in the following description, however, it will be recognized by one skilled in the art that the present invention may be practiced without the or more of the specific details, or with other structures, components, steps, methods, etc. in other instances, well-known structures, components, or operations are not shown or described in detail to avoid obscuring aspects of the invention.

To solve the problems of the prior art, embodiments of the present invention provide power module structures, which include a metal layer, a second metal layer, a third metal layer, a fourth metal layer, a th switch and a second switch, wherein the th metal layer is disposed on a th reference plane, the second metal layer is disposed on a th reference plane and adjacent to the metal layer, the third metal layer is disposed on a second reference plane, and the second reference plane is parallel to the th reference plane, the fourth metal layer is disposed on the second reference plane and adjacent to the third metal layer, the fourth metal layer is electrically connected to the second metal layer through a connecting bridge, the 897 th switch includes a th end and a second end, the th end is electrically connected to the third metal layer, the second end is electrically connected to the second metal layer, the second switch includes a third end and a fourth end, the third end is electrically connected to the fourth metal layer, the third metal layer is electrically connected to the third metal layer, the second end is electrically connected to the third metal layer, the third metal layer is electrically connected to the third metal layer, the inductor 5838, the third metal layer has a reduced current flow through the third reference plane, and the third metal layer has a reduced current flow through the third metal layer , and the third metal layer, and the parasitic current flow is reduced, and the third metal layer has reduced, and the third metal layer, the.

In embodiments to shown in fig. 1 to 30, the metal layer 41 may represent a metal layer electrically connected to an N pole, the second metal layer 42 and the fourth metal layer 44 may represent a metal layer electrically connected to an O pole, and the third metal layer 43 may represent a metal layer electrically connected to a P pole, the power terminal 31 may represent a P pole power terminal, the second power terminal 32 may represent an N pole power terminal, and the third power terminal 33 may represent an O pole power terminal.

FIG. 1 shows an equivalent circuit diagram of a prior art half-bridge module, in which a th switch S1 is connected in series with a second switch S2, wherein the th switch S1 includes a th terminal and a second terminal, the second switch S2 includes a third terminal and a fourth terminal, a P pole is electrically connected to the th terminal of the th switch S1, an N pole is electrically connected to the fourth terminal of the second switch S2, and the second terminal of the th switch S1 is electrically connected to the third terminal of the second switch S2 and is commonly connected to an O pole, as shown in FIG. 1.

Fig. 2 to 6 are schematic diagrams illustrating a power module structure according to an embodiment of the invention, in which the power module structure includes a substrate 21 and a second substrate 22 disposed in parallel, a power device 28 is disposed between the two substrates, and there is no limitation on the number of the power device 28, such as three switches 281 and three second switches 282, wherein the power terminal 31 is electrically connected to the end of the switch 281, the second power terminal 32 is electrically connected to the fourth end of the second switch 282, the second end of the switch 281 is electrically connected to the third end of the second switch 282 and is commonly electrically connected to the third power terminal 33, the signal terminal 23 is electrically connected to the signal terminal of the power device 28 through a bonding wire 24, and further, the projections of the power device 28 on the plane of the substrate 21 or the plane of the second substrate 22 do not overlap, and the power device 28 is disposed between the substrate 21 and the second substrate 22 and is not stacked on each other.

As shown in fig. 4, within the power module structure, the substrate 21 is used as the upper substrate, the lower surface thereof is referred to as the reference plane, the second substrate 22 is used as the lower substrate, the upper surface thereof is referred to as the second reference plane, the 1 metal layer 41 and the second metal layer 42 adjacent to each other are disposed on the reference plane, the third metal layer 43 and the fourth metal layer 44 adjacent to each other are disposed on the second reference plane, wherein the second metal layer 42 and the fourth metal layer 44 are connected by the connecting bridge 27 from . as shown in fig. 4, the connecting bridge 27 is shaped connecting bridges connecting the second metal layer 42 and the fourth metal layer 44 from . as shown in fig. 6, the projection of the connecting bridge 27 on the reference plane or the second reference plane is overlapped with the overlap region of the 6, and the projection of the connecting bridge 27 on the reference plane 6868 from the third metal layer or the second reference plane is overlapped with the third metal layer 869, and the second metal layer 281 from the power device 72 is connected to the vertical switch 72 through the third metal layer 8672, and the power device 72, and the power device via the power switch 72, and the power switch 281 from the power switch 72, and , and 3665, the power switch 72, the power device 3665, the power switch 72 is perpendicular to the power switch 72, and 3653, and 3665.

As shown in FIG. 5, the current directions are opposite, that is, at least third reference plane perpendicular to the or second reference plane exists, the third reference plane vertically cuts the -th overlapping area of the third metal layer 43 and the metal layer 41, and the current flowing through the third metal layer 43 and the current flowing through the metal layer 41 pass through the third reference plane in opposite directions.

As shown in fig. 3-5, in this embodiment, at least a portion of the th overlap region is located between the projection of the th switch region on the th reference plane and the projection of the second switch region on the th reference plane, where the th switch region is the minimum envelope region of the th switch 281 and the second switch region is the minimum envelope region of the second switch 282, i.e., in the view shown in fig. 4, the minimum envelope region of the th switch 281 is located to the left of the th overlap region and the minimum envelope region of the second switch 282 is located to the right of the th overlap region.

The configuration has the advantages that the th switch region and the second switch region have empty spaces on two sides and can be used as the output end regions of the signal terminals of the th switch 281 and the second switch 282, in particular, the 0 th switch 281 is connected with the 1 th signal terminal, and the second switch 282 is connected with the second signal terminal, the 2 th switch region and the second switch region are respectively arranged on two sides of the 3 th overlapping region, the wiring leading-out direction of the th signal terminal and the wiring leading-out direction of the second signal terminal can respectively extend towards the direction far away from the th overlapping region, namely, in the view angle of fig. 4, the wiring leading-out direction of the th signal terminal can continue towards the left side from the th switch 281, and the wiring leading-out direction of the second signal terminal can continue towards the right side from the second switch 282, and by the configuration, the chip driving circuit of the th switch 281 and the second switch 282 which are connected in parallel can be enabled, which is beneficial to realize the chip synchronous driving voltage , and chip synchronization optimizing and chip synchronization dynamic synchronization.

In this embodiment, the switch 281 is arranged linearly along the th direction, and the second switch 282 is arranged linearly along the 0 th direction, the 1 th power terminal 31 and the second power terminal 32 are led out along the 2 th direction, and the third power terminal 33 is led out along the direction opposite to the 3 th direction, so that the output ends of the th power terminal 31, the second power terminal 32 and the third power terminal 33 do not occupy the empty spaces on both sides of the th switch region and the second switch region, the empty space on the left side of the th switch 281 can be used as the signal terminal output end region of the th switch 281, and the empty space on the right side of the second switch 282 can be used as the signal terminal output end region of the second switch 282, so that the chip driving loop of the th switch 281 and the second switch 282 connected in parallel can be made to be beneficial to realize the inter-chip driving voltage -to-chip synchronous switching, and further to optimize the inter-chip dynamic current sharing.

It is noted that in other embodiments, the power module structure may be provided without a substrate, and when no substrate is provided, the metal layers of the power module are made of lead frames, which saves more material, the power device 28 is connected to the metal layer provided on the inner side of the second substrate 22 by a connecting material 511, wherein the connecting material 511 may be solder, sintered silver or conductive silver paste, the power device 28 is connected to the metal layer provided on the inner side of the substrate 21 by a pad 1, a pad 86526 and a connecting material 512, wherein the pad and the pad 26 are both thermal and electrical conductors, for example, the power device 28 is connected to the metal layer provided on the inner side of the substrate by a pad , a pad 25, a pad 86526 and a pad 512, wherein the pad and the pad 26 are both metal blocks, and the pad 7 is made of copper, aluminum, molybdenum, tungsten, copper alloy or molybdenum alloy, and the distance between the pad 513 is controlled by a connecting material such as a metal pad 6327, and a parasitic switch 26, and a corresponding pad 6327, and a switch 26 is also able to adjust the distance between the substrate 7 and the substrate 23, and the substrate 9, and the switch 26 is controlled by a similar way that the aforementioned embodiments, and the distance between the substrate may be adjusted by a parasitic switch 26, and the metal layer may be adjusted by a metal layer 9, and the substrate 9, and the same.

In this embodiment, the switch 281 and the second switch 282 are vertical devices, such as IGBT, MOSFET or diode, the signal terminal 23 is connected to the signal terminal of the power device 28 through the bonding wire 24 and the metal layer disposed inside the second substrate 22, a PCB may be disposed outside the power device 28, the signal terminal 23 is connected to the signal terminal of the power device 28 through the bonding wire 24 and the PCB, the power terminal 31 is electrically connected to the 0 switch 281 through the third metal layer 43 disposed inside the second substrate 22, the second power terminal 32 is electrically connected to the second switch 282 through the metal layer 41 disposed inside the substrate 21, the switch 281 is electrically connected to the second switch 282 through the connecting bridge 27, the third power terminal 33 is connected to the connecting bridge 27 through the fourth metal layer 44 disposed inside the second substrate 22, or directly connected to the connecting bridge 27, or the power terminal 33 and the connecting bridge 27 are , wherein the power terminal 31 and the second power terminal 31 are uniformly overlapped on the second substrate 22, or the second power terminal 31 and the second switch 27, or the parasitic metal alloy 27 may be made of a lower inductance metal alloy, such as an alloy 734, a parasitic metal alloy, a parasitic material , or a metal alloy material, or the like.

Fig. 7 to 9 are schematic diagrams showing a power module structure according to a second embodiment of the present invention, which is similar to the power module structure of the embodiment, in which the th switch 281 and the second switch 282 are electrically connected by a connection bridge 27, except that the connection bridge 27 is concentrically disposed on the same side of the th switch 281 and the second switch 282, i.e., concentrically disposed on a partial region therebetween or outside thereof, for example, in the present embodiment, three pairs of power devices are arranged side by side in two columns, the th switch 281 of each pair is arranged in the th column, the second switch 282 is arranged in a second column parallel to the th column, the two power devices of each pair are arranged in a left-right correspondence, and the connection bridge 27 is located on a symmetrical line of the th column and the second column and is disposed outside of all the power devices 28.

Fig. 9 is a sectional view taken along the direction B-B of fig. 7, the power device 28 has only power electrodes respectively above and below the power device in the direction perpendicular to , the projections of the third metal layer 43 and the metal layer 41 in the module on the reference plane or the second reference plane have a -th overlapping region, and the current flowing through the metal layer 41 is opposite to the current flowing through the third metal layer 43, so that the cancellation of inductance is well achieved, and the parasitic inductance of the module is reduced.

Fig. 10 to 11 are schematic diagrams showing a power module structure according to a third embodiment of the present invention, which is similar to the power module structure of the embodiment except that the projection of the power terminal 31 and the second power terminal 32 on the reference plane or the second reference plane are not overlapped, the power device 28 has only power electrodes respectively above and below the vertical direction, the projection of the third metal layer 43 and the metal layer 41 on the reference plane or the second reference plane inside the module has an overlapping region of the , and the current flowing through the metal layer 41 is opposite to the current flowing through the third metal layer 43, so that the cancellation of inductance is well achieved, and the parasitic inductance of the module is reduced.

FIG. 12 shows a schematic diagram of a power module structure according to a fourth embodiment of the present invention, which is similar to the power module structure of the embodiment except that the -th switch 281 and the second switch 282 in FIG. 12 are both planar devices, such as GaN devices, the power electrode of the power device is fanned out from the side of the device, the side from which the power electrode is led out is called the electrode-containing layer, and the opposite side is called the electrode-free layer, the -th switch 281 and the second switch 282 are connected to the same substrate, the electrode-free layer of the power device 28 can be connected to the substrate, and the electrode-containing layer of the power device 28 can also be connected to the substrate, and the electrode-containing layer of the -th switch 281 is shown in FIG. 12 to be connected to the lower substrate 22.

The power module structure of this embodiment further includes a third pad 63, a third connection post 61, and a second connection post 62, wherein a 0 end 2811 of the switch 281 is connected to the third metal layer 43, a second end 2812 of the switch 281 is connected to the connection metal layer 45, the connection metal layer 45 is disposed on the second reference plane and adjacent to the third metal layer, the connection post 61 is connected to the connection metal layer 45 and the second metal layer 42, a third end 2821 of the second switch 282 is connected to the third pad 63, the third pad 63 is connected to the second connection metal layer 46, the second connection metal layer 46 is disposed on the reference plane and adjacent to the metal layer 41, the second connection post 62 is connected to the second connection metal layer 46 and the fourth metal layer 44, a fourth end 2822 of the second switch 282 is connected to the second pad 26, and the second connection post 26 is connected to the metal layer 41.

In this embodiment, the th pad 25 is a metal block or a heat-conducting insulating material block, and the second pad 26 and the third pad 63 are both metal blocks, wherein the heat-conducting insulating material may be aluminum oxide, beryllium oxide, aluminum nitride, or dbc, the upper and lower sides of the power device 28 in the vertical direction of its are only power electrodes, the projection of the third metal layer 43 and the th metal layer 41 in the module on the th reference plane or the second reference plane has a th overlapping region, and the direction of the current flowing through the th metal layer 41 is opposite to the direction of the current flowing through the third metal layer 43, so that the cancellation of the inductance is well achieved, and the parasitic inductance of the module is reduced.

Fig. 13 is a schematic diagram illustrating a power module structure according to a fifth embodiment of the invention, which is similar to the power module structure of the fourth embodiment, wherein the th switch 281 and the 282 are planar devices, except that the th switch 281 and the 282 second switch 282 in fig. 13 are respectively disposed on the second substrate 22 and the th substrate 21, wherein the th switch 281 is disposed on the second substrate 22 and includes an electrode layer connected to a metal layer disposed on an inner side of the second substrate 22, and the second switch 282 is disposed on the th substrate 21 and includes an electrode layer connected to a metal layer disposed on an inner side of the th substrate 21.

The power module structure of this embodiment further includes a th connection column 61 and a 62 th connection column, wherein a 0 th end 2811 of the th switch 281 is connected to the third metal layer 43, a second end 2812 of the th switch 281 is connected to the th connection metal layer 45, the th connection metal layer 45 is disposed on the second reference plane and adjacent to the third metal layer 43, the th connection column 61 is connected to the th connection metal layer 45 and the second metal layer 42, a third end 2821 of the second switch 282 is connected to the second connection metal layer 46, the second connection metal layer 46 is disposed on the th reference plane and adjacent to the th metal layer 41, the second connection column 62 is connected to the second connection metal layer 46 and the fourth metal layer 44, and a fourth end 2822 of the second switch 282 is connected to the th metal layer 41.

In this embodiment, the th pad 25 is a metal block or a heat-conducting insulating material block, the second pad 26 is a metal block or a heat-conducting insulating material block, the power device 28 has only power electrodes respectively above and below the vertical direction, the projections of the third metal layer 43 and the th metal layer 41 in the module on the th reference plane or the second reference plane have a th overlapping region, and the direction of the current flowing through the th metal layer 41 is opposite to the direction of the current flowing through the third metal layer 43, so that the inductance cancellation is well realized, and the parasitic inductance of the module is reduced.

Fig. 14 shows an equivalent circuit diagram with a clamping capacitance. Placing a clamping capacitor C in the moduleinWhen the device is turned off, the area surrounded by the corresponding high-frequency loop is reduced, and the loop parasitic inductance is also reduced. In particular, no clamping capacitor C is placed within the moduleinWhile, the parasitic inductance of the loop is Lout+Lin(ii) a Placing a clamping capacitor C in the moduleinThen, the loop parasitic inductance value becomes Lin and the inductance value decreases.

Fig. 15 shows a schematic diagram of a power module structure with a clamping capacitor according to a sixth embodiment of the present invention, which is similar to the power module structure of the embodiment, except that the power module structure further includes a clamping capacitor 52, and the clamping capacitor 52 is disposed between the reference plane and the second reference plane and electrically connected between the third metal layer 43 and the metal layer 41.

In this embodiment, the clamping capacitor 52 is a flat clamping capacitor, the power module structure further includes a capacitor connection block 53, wherein the clamping capacitor 52 and the capacitor connection block 53 are located outside the connection bridge 27, of the clamping capacitor 52 is electrically connected to the third metal layer 43, another is electrically connected to the th metal layer 41 through the corresponding capacitor connection block 53, the power device 28 has only power electrodes respectively above and below the vertical direction thereof, the third metal layer 43 and the th metal layer 41 in the module have an overlapping region in the reference plane or the second reference plane, the current flowing through the th metal layer 41 is opposite to the current flowing through the third metal layer 43, thereby achieving good inductance cancellation and reducing parasitic inductance of the module, and 3526 further reducing parasitic inductance by disposing the clamping capacitor 52 between the P electrode and the N electrode in the module.

Fig. 16 to 18 are schematic diagrams showing a power module structure according to a seventh embodiment of the present invention, which is similar to the power module structure of the sixth embodiment and includes a clamp capacitor 52 and a capacitor connection block 53, and the clamp capacitor 52 is also a clamp capacitor of a lying type, except that the clamp capacitor 52 is provided outside the connection bridge 27, the connection bridge 27 is partially hollowed out to form a hollow portion 271, and the clamp capacitor 52 and the capacitor connection block 53 are provided in the hollow portion 271, specifically, in the hollow portion 271 of the connection bridge 27, the pole of the clamp capacitor 52 is electrically connected to the third metal layer 43 through a connection material, the other pole of the clamp capacitor 52 is electrically connected to the third metal layer 43 through the third connection metal layer 54, the capacitor connection block 53 provided on the third connection metal layer 54, and the connection material to the metal layer 41 of the , and compared with the scheme of the sixth embodiment, the scheme of placing the clamp capacitor 52 outside the connection bridge 27 and in the hollow portion 271 reduces the high frequency loop surrounding area and further reduces the loop inductance.

Fig. 18 is a cross-sectional view taken along the direction D-D in fig. 16, the power device 28 has only power electrodes above and below its vertical direction, the module interior third metal layer 43 and metal layer 41 have overlapping regions projected on the reference plane or the second reference plane, and the current flowing through the metal layer 41 is opposite to the current flowing through the third metal layer 43, so that the inductance cancellation is well achieved, the parasitic inductance of the module is reduced, and the parasitic inductance can be further reduced by disposing the clamp capacitor 52 between the P pole and the N pole inside the module.

Fig. 19 to 20 are schematic diagrams illustrating a power module structure according to an eighth embodiment of the invention, which is similar to the structure of the second embodiment, wherein the connecting bridge 27 is disposed on the same side of the th switch 281 and the second switch 282, the power module structure further includes a clamping capacitor 52 and a capacitor connecting block 53, and the clamping capacitor 52 is a flat clamping capacitor, wherein the clamping capacitor 52 and the capacitor connecting block 53 are uniformly distributed between the th switch 281 and the second switch 282 except for the position of the connecting bridge 27, the pole of the clamping capacitor 52 is electrically connected to the third metal layer 43 through a connecting material, and the pole is electrically connected to the metal layer 41 through the capacitor connecting block 53 and the connecting material.

Fig. 20 is a cross-sectional view taken along the direction E-E in fig. 19, where there are only power electrodes on the upper and lower sides of the power device 28 in the direction perpendicular to its , respectively, there is an -th overlapping region on the -th reference plane or the second reference plane by the projections of the third metal layer 43 and the -th metal layer 41 inside the module, and the current flowing through the -th metal layer 41 is opposite to the current flowing through the third metal layer 43, so that the inductance cancellation is well achieved, and the parasitic inductance of the module is reduced.

Fig. 21 to 22 are schematic diagrams illustrating a power module structure according to a ninth embodiment of the invention, which is similar to the structure of the second embodiment, wherein the connecting bridge 27 is disposed at the same side of the switch 281 and the second switch 282, and the power module structure further includes a clamping capacitor 52, and the clamping capacitor 52 is a vertical clamping capacitor, wherein the clamping capacitors 52 are uniformly distributed between the switch 281 and the second switch 282 except for the position of the connecting bridge 27, the electrode of the clamping capacitor 52 is electrically connected to the third metal layer 43 through a connecting material, and the electrode is electrically connected to the metal layer 41 through a connecting material.

Fig. 22 is a cross-sectional view along the direction F-F in fig. 21, the power device 28 has only power electrodes above and below the power device in the vertical direction, the third metal layer 43 and the metal layer 41 in the module have overlapping regions projected on the reference plane or the second reference plane, and the current flowing through the metal layer 41 is opposite to the current flowing through the third metal layer 43, so that the inductance cancellation is well achieved, and the parasitic inductance of the module is reduced.

Fig. 23 is an equivalent circuit diagram of a half-bridge module having four pairs of switches, wherein switches S11, S12, S13 and S14 correspond to switch 281 of , and switches S21, S22, S23 and S24 correspond to switch 282, in comparison with the embodiment, the embodiment is different from the embodiment in that not only do the projections of the metal layer 41 and the third metal layer 43 on the reference plane or the second reference plane have the -th overlapping region, but also the projections of the second metal layer 42 and the fourth metal layer on the reference plane or the second reference plane have the second overlapping region, the projection of the connecting bridge 27 on the reference plane or the second reference plane falls within the range of the second overlapping region, because of the presence of the second overlapping region, the connecting bridge 27 does not need to be designed as a pillar-shaped bridge, and the connecting bridge 27 is easily connected to the power module by the connecting bridge 6327 and the connecting bridge 27 is more easily connected to the power module by the pillar-shaped connecting bridge 27, and the connecting bridge 27 is more easily connected to the power module 281, and the connecting module is more easily connected to the pillar-shaped connecting module 281, and the connecting module 281 is more easily than the pillar-shaped connecting module 281, and the pillar-shaped connecting bridge 27 is directly connected to the pillar-shaped connecting module.

In this embodiment, the projection of the connection bridge 27 on the th reference plane or the second reference plane does not overlap the th overlapping region, and, as shown in fig. 25, there is an overlap between the region where the th metal layer 41 is connected to the second power terminal 32 and the region where the third metal layer 43 is connected to the th power terminal 31.

As shown in fig. 29, the current flowing through the th metal layer 41 is in the opposite direction to the current flowing through the third metal layer 43, similarly to the embodiment , since the third metal layer 43 and the th metal layer 41 inside the power module are at least partially overlapped and the current flowing through them is in the opposite direction, the cancellation of the inductance is well achieved, and the parasitic inductance of the module is reduced.

In this embodiment, the overlapping regions of the third metal layer 41 and the second metal layer 42 are alternately disposed in a staggered manner, that is, as shown in fig. 30, at the boundary between the th metal layer 41 and the second metal layer 42, a zigzag boundary is formed, the boundary between the th metal layer 41 and the second metal layer 42 alternately protrudes forward, similarly, at the boundary between the third metal layer 43 and the fourth metal layer 44, the third metal layer 43 and the fourth metal layer 44 alternately protrude forward, the boundary protruding portion of the th metal layer 41 and the boundary protruding portion of the third metal layer 43 are projected on the reference plane or the second reference plane to form the overlapping region of the first metal layer , and the boundary protruding portion of the second metal layer 42 and the boundary protruding portion of the fourth metal layer 44 are projected on the reference plane or the second reference plane to form the overlapping regions of the second metal, the number and distribution of the connection bridges 27 are not limited to those shown in fig. 30, the pillar-shaped connection bridges 27 are uniformly distributed between the second switches and , and the second conductive interconnections may be made of the second copper alloy material , such as molybdenum alloy, copper alloy, tungsten alloy, copper alloy, tungsten alloy, molybdenum alloy, copper alloy.

A tenth embodiment and a twelfth embodiment of the present invention are described further below in connection with fig. 31 and 32, .

In this embodiment, the metal layer 71 may represent a metal layer electrically connected to an O pole, the second metal layer 72 and the fourth metal layer 74 may represent metal layers electrically connected to a P pole, and the third metal layer 73 may represent a metal layer electrically connected to an N pole.

In this embodiment, the th metal layer 71 is disposed on the th reference plane, the second metal layer 72 and the third metal layer 73 are disposed on the second reference plane, the second reference plane is parallel to the th reference plane, the fourth metal layer 74 is disposed between the th reference plane and the second reference plane and is parallel to the th reference plane and the second reference plane, wherein the fourth metal layer 74 is electrically connected to the second metal layer 72.

The th switch 281 comprises a th terminal and a second terminal, the th terminal is electrically connected to the second metal layer 72, the second terminal is electrically connected to the th metal layer 71, the second switch 282 comprises a third terminal and a fourth terminal, the third terminal is electrically connected to the th metal layer 71, and the fourth terminal is electrically connected to the third metal layer 73. in the embodiments, the fourth metal layer 74 and the third metal layer 73 have an overlapping region projected on the th reference plane or the second reference plane, and the directions of the currents flowing through the fourth metal layer 74 and the third metal layer 73 are opposite, so that the inductance cancellation is well achieved, and the parasitic inductance of the module is reduced.

The current directions are opposite, namely, at least third reference plane perpendicular to the reference plane or the second reference plane exists, the third reference plane vertically cuts an overlapped area of the fourth metal layer 74 and the third metal layer 73, and the current flowing through the fourth metal layer 74 and the current flowing through the third metal layer 73 pass through the third reference plane in opposite directions.

Similarly to the embodiment, in this embodiment, at least part of the overlap region is between the th switch region projection onto the th reference plane and the th switch region projection onto the th reference plane, as shown in FIG. 31, where the th switch region is the th switch 281 minimum envelope region and the second switch region is the second switch 282 minimum envelope region, i.e., in the view shown in FIG. 31, the th switch 281 minimum envelope region is to the left of the overlap region and the second switch 282 minimum envelope region is to the right of the overlap region.

The arrangement has the advantages that the two sides of the th switch area and the second switch area are provided with empty spaces which can be used as the output end areas of the signal terminals of the th switch 281 and the second switch 282, in particular, the 0 th switch 281 is connected with the 1 th signal terminal, and the second switch 282 is connected with the second signal terminal, the th switch area and the second switch area are respectively arranged on the two sides of the overlapping area, the wiring leading-out direction of the th signal terminal and the wiring leading-out direction of the second signal terminal can respectively extend towards the direction far away from the overlapping area, namely, in the view angle of fig. 31, the wiring leading-out direction of the th signal terminal can continue to the left side from the th switch 281, and the wiring leading-out direction of the second signal terminal can continue to the right side from the second switch 282, and the chip driving circuit of the th switch 281 and the second switch 282 which are connected in parallel can be enabled to be beneficial to realize the inter-chip driving voltage , the chip synchronous switch, and the inter-chip optimized current sharing dynamic .

In this embodiment, , the switch 281 may be linearly arranged along the th direction, and the second switch 282 may be linearly arranged along the th direction, the th power terminal 31 and the second power terminal 32 are led out along the th direction, and the third power terminal 33 is led out along the opposite direction to the th direction, which has the advantage that the outlets of the th power terminal 31, the second power terminal 32, and the third power terminal 33 do not occupy the empty spaces on both sides of the th switch region and the second switch region, the empty space on the left side of the switch 281 may be used as the signal terminal outlet region of the switch 281, and the empty space on the right side of the second switch 282 may be used as the signal terminal outlet region of the second switch 282, so that the chip driving loop of the parallel-connected th switch 281 and second switch 282 may be implemented to facilitate the implementation of the inter-chip driving voltage -chip synchronous switching, and the inter-chip dynamic current sharing optimization.

The th substrate 21 and the second substrate 22 may be disposed above and below the power module structure, respectively, or may be disposed without a substrate, and when no substrate is disposed, the metal layer of the power module is made of a lead frame, which is more material-saving.the th switch 281 is connected to the metal layer disposed inside the second substrate 22 through a connection material, and the second switch 282 is connected to the metal layer disposed inside the th substrate 21 through a connection material, which may be solder, sintered silver, or conductive silver paste.the th switch 281 is connected to the metal layer disposed inside the th substrate 21 through a th pad 25, and the second switch 282 is connected to the metal layer disposed inside the second substrate through a second pad 26. similarly, in other embodiments, the positions of the th switch 281 and the third pad 25 may be interchanged, the positions of the second switch 282 and the second switch 26 may be interchanged.the selected embodiments of the switch 281 and the second switch 282 may be implemented by adding other planar type devices such as the aforementioned clamp diode devices , the third clamp connection pad 61, the third switch 76, the third pad , the third switch 76, the third clamp pad 61, the third clamp diode clamp pad 61, and the like.

In this embodiment, th metal layer 81 may represent a metal layer electrically connected to an O pole, second metal layer 82 may represent a metal layer electrically connected to a P pole, and third metal layer 83 and fourth metal layer 84 may represent metal layers electrically connected to an N pole, but the present invention is not limited thereto.

In this embodiment, the th metal layer 81 is disposed at the th reference plane, the second metal layer 82 and the third metal layer 83 are disposed at the second reference plane, the second reference plane is parallel to the th reference plane, the fourth metal layer 84 is disposed between the th reference plane and the second reference plane and is parallel to the th reference plane and the second reference plane, wherein the fourth metal layer 84 is electrically connected to the third metal layer 83.

The th switch 281 comprises a th terminal and a second terminal, the th terminal is electrically connected to the second metal layer 82, the second terminal is electrically connected to the th metal layer 81, the second switch 282 comprises a third terminal and a fourth terminal, the third terminal is electrically connected to the th metal layer 71, and the fourth terminal is electrically connected to the third metal layer 83. the fourth metal layer 84 and the second metal layer 82 have an overlapping region projected on the th reference plane or the second reference plane, and the directions of the currents flowing through the fourth metal layer 84 and the second metal layer 82 are opposite, so that the inductance cancellation is well achieved, and the parasitic inductance of the module is reduced.

The current directions are opposite, namely, at least third reference planes which are perpendicular to the reference plane or the second reference plane exist, the third reference planes vertically cut the overlapping area of the fourth metal layer 84 and the third metal layer 83, and the directions of the current flowing through the fourth metal layer 84 and the current flowing through the second metal layer 82 are opposite, because the fourth metal layer 84 and the second metal layer 82 in the power module are at least partially overlapped and the directions of the currents flowing through the fourth metal layer 84 and the second metal layer 82 are opposite, the cancellation of the inductance is well realized, the parasitic inductance of the module is reduced, in addition, heat dissipation channels which exchange heat with the environment are arranged on the upper surface and the lower surface of the switch 281 and the upper surface and the lower surface of the second switch 282, and the double-sided heat dissipation can be.

Similarly to the embodiment, in this embodiment, at least part of the overlap region is between the projection of the switch region on the reference plane and the second switch region on the reference plane, as shown in FIG. 32, where the th switch region is the smallest envelope region of the th switch 281 and the second switch region is the smallest envelope region of the second switch 282, i.e., the smallest envelope region of the th switch 281 is to the left of the overlap region and the smallest envelope region of the second switch 282 is to the right of the overlap region, as viewed in the perspective shown in FIG. 32.

The arrangement has the advantages that the two sides of the th switch area and the second switch area are provided with empty spaces which can be used as the output end areas of the signal terminals of the th switch 281 and the second switch 282, in particular, the 0 th switch 281 is connected with the 1 th signal terminal, and the second switch 282 is connected with the second signal terminal, the th switch area and the second switch area are respectively arranged on the two sides of the overlapping area, the wiring leading-out direction of the th signal terminal and the wiring leading-out direction of the second signal terminal can respectively extend towards the direction far away from the overlapping area, namely, in the view angle of fig. 32, the wiring leading-out direction of the th signal terminal can continue to the left side from the th switch 281, and the wiring leading-out direction of the second signal terminal can continue to the right side from the second switch 282, and the chip driving circuit of the th switch 281 and the second switch 282 which are connected in parallel can be enabled to be beneficial to realize the inter-chip driving voltage , the chip synchronous switch, and the inter-chip optimized dynamic current sharing process .

In this embodiment, in steps, the switch 281 may be arranged linearly along the th direction, and the second switch 282 may be arranged linearly along the th direction, the th and second power terminals 31 and 32 are led out along the th direction, and the third power terminal 33 is led out along the direction opposite to the th direction, that is, the th and second power terminals 31 and 32 are led out along the opposite direction to the third power terminal 33, so the configuration has the advantage that the outlets of the th, second and third power terminals 31, 32 and 33 do not occupy the vacant spaces on both sides of the th and second switch regions, the vacant space on the left side of the th switch 281 may serve as the signal terminal outlet region of the switch 281, the vacant space on the right side of the second switch 282 may serve as the signal terminal outlet region of the second switch 282, so that the driving circuit of the second switch and the second switch 281 connected in parallel may drive the inter-chip synchronous circuits , and facilitate the chip synchronous driving circuit .

The th substrate 21 and the second substrate 22 may be disposed above and below the power module structure, respectively, in other embodiments, there may be no substrate disposed, and when there is no substrate disposed, the metal layer of the power module is made of lead frame, which saves more material, the th switch 281 is connected to the metal layer disposed inside the second substrate 22 through a connecting material, the second switch 282 is connected to the metal layer disposed inside the th substrate 21 through a connecting material, which may be solder, sintered silver, or conductive silver paste, the th switch 281 is connected to the metal layer disposed inside the rd substrate through a th pad 25 and a connecting material, the second switch 282 is connected to the metal layer disposed inside the second substrate 22 through a second pad 26. similarly, in other embodiments, the positions of the th switch 281 and the th pad 24 may be interchanged, the positions of the second switch 282 and the second pad may be interchanged, the positions of the second switch 281 and the second switch 282 may be interchanged, the selected positions of the second switch 281, the second switch 282 may be added to the other planar MOSFET devices such as the aforementioned clamp connection post 52, the planar MOSFET , the planar MOSFET device , the planar MOSFET device, and the like in the embodiments.

As shown in fig. 33 and 34, the structure of the th block used in the embodiments of the present invention is schematically illustrated, and here, the connection relationship of the th block in the embodiment is taken as an example, it is understood that the structure of the th block can be applied to the above embodiments to combine into a new technical solution, and all of them fall within the protection scope of the present invention.

As shown in FIG. 33, the th pad 25 includes a 0 th pad plane 251 in contact with the th switch 281 and a second pad plane 252 in contact with the second metal layer 42, the projection of the second pad plane 252 on the 1 th reference plane is larger than the projection of the th pad plane 251 on the th reference plane, specifically, the th end of the th switch 281 is connected to the third metal layer 43 through a connecting material 511, the second end of the th switch 281 is connected to the th pad plane 251 of the th pad through a connecting material 514, and the second pad plane 252 of the pad 25 is connected to the second metal layer 42 through a connecting material 512.

Preferably, the second pad block plane 252 protrudes d1. outwardly on the side of projected on the reference plane relative to the second pad block plane 251 on the side of projected on the reference plane , i.e. in the view shown in fig. 34, the right side of the second pad block plane 252 protrudes d1. outwardly relative to the right side of the plane 251 of the pad block, wherein the distance d1 is preferably 0.5-5 mm, but the invention is not limited thereto.

At least side of the block plane 251 of the block 25 is formed with a recessed platform recessed toward the second block plane 252, the recessed platform includes a fourth block plane 254 connected to the block plane 251 and a third block plane 253 connected to the fourth block plane 254, a distance d3 between the third block plane 253 and the block plane 251 is preferably greater than 0.1mm, and a distance d2 between the third block plane 253 and the second block plane 252 is preferably greater than 0.5mm, but the invention is not limited thereto.

Here, there are only embodiments of the th block 25 in addition, the th block 25 may also adopt various embodiments as shown in fig. 35 to 43.

As shown in fig. 35, the projection of the second plane 252 of the th tile 25 onto the th tile plane 251 may overlap the th tile plane 251.

In order to increase the bonding area between the second pad plane 252 of the third pad 25 and the second metal layer 42, the projection of the second pad plane 252 on the third pad plane 251 of may further protrude beyond the third pad plane 251 of , as shown in fig. 36, the structure of the protruding sides is shown, further , the projection of the second pad plane 252 on the third pad plane 251 of may further protrude beyond the two sides of the third pad plane 251, as shown in fig. 37 and 38, and further , the projection of the second pad plane 252 on the third pad plane 251 of may further protrude beyond the three sides of the third pad plane 251, as shown in fig. 39.

The projection of the second pad plane 252 onto the th pad plane 251 may also project beyond the th pad plane 251, wherein the th switch 281 may have signal connection terminals near the second end, which may be located at the middle of the edge of the th switch 281, corresponding to that shown in fig. 40, which may also be located at the corners of the th switch 281, as shown in fig. 41.

In the above configuration, the junction transition between the th plane and the third plane is a 90 ° right angle, which also applies to a rounded transition, as shown in fig. 42, and a transition angle greater than 90 °, as shown in fig. 43.

For example, the second pad 26 may include a fifth pad plane in contact with the second switch 282 and a sixth pad plane in contact with the fourth metal layer 44 or the metal layer 41 (in different embodiments, the metal layer in contact with the fifth pad plane may be different), the projection of the sixth pad plane on the reference plane is larger than the projection of the fifth pad plane on the reference plane, the projection of the sixth pad plane on the reference plane side is projected outward relative to the projection of the fifth pad plane on the reference plane side to increase the contact area and the structural strength between the sixth pad plane and the connected metal layer.

In this embodiment, the second pad has a recessed land formed at least on the side of the fifth pad plane and recessed toward the sixth pad plane, the recessed land including an eighth pad plane connected to the fifth pad plane and a seventh pad plane connected to the eighth pad plane, the seventh pad plane being spaced from the fifth pad plane by a distance greater than 0.1mm, and the seventh pad plane being spaced from the sixth pad plane by a distance greater than 0.5 mm.

, the second head block 26 can also adopt the structure of the head block shown in fig. 35-43. the above-mentioned head block and the second head block are described in connection with the embodiment , and can also be combined with the embodiments two to six to obtain different technical solutions, all of which are within the protection scope of the present invention.

In addition, the first pad block 25 and the second pad block 26 in the tenth embodiment and the twelfth embodiment can also adopt the pad block structure shown in fig. 35 to 43, and combine with the modifications of the embodiments to obtain different technical solutions, which all fall within the protection scope of the present invention.

In summary, by adopting the power module structure of each embodiment of the present invention, since the projections of the P-pole metal layer and the N-pole metal layer on the th reference plane or the second reference plane have an overlapping region, and the direction of the current flowing through the P-pole is opposite to that of the current flowing through the N-pole, the cancellation of the inductance is well achieved, and the parasitic inductance of the module is reduced.

The present invention has been described in the embodiments, however, the embodiments are only examples for implementing the present invention and do not limit the scope of the present invention. Rather, it is intended that all such modifications and variations be included within the spirit and scope of this invention.

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