阅读说明：本技术 工艺腔室和半导体处理设备 (Process chamber and semiconductor processing equipment ) 是由 张璐 于 2018-06-29 设计创作，主要内容包括：本发明公开了一种工艺腔室和半导体处理设备。包括：腔室本体；基座,位于所述腔室本体内；盖板,盖设在所述腔室本体上,且与所述腔室本体之间绝缘间隔；下电极射频电源,与所述基座和所述盖板选择性地电连接；并且,启辉阶段,所述盖板为悬浮状态,所述下电极射频电源与所述盖板电性导通,以通过容性耦合的方式使得等离子体发生启辉；启辉结束,所述下电极射频电源与所述基座电性导通,以形成射频自偏压。盖板在启辉阶段为悬浮状态,并且,在启辉阶段,下电极射频电源与盖板电性导通,从而可以通过容性耦合的方式实现等离子体启辉,进而可以降低启辉阶段的晶圆损伤,且同时还能够有效降低腔室颗粒污染,提高晶圆的加工良率,降低制作成本。(The invention discloses a process chamber and semiconductor processing equipment. The method comprises the following steps: a chamber body; a pedestal located within the chamber body; the cover plate is covered on the cavity body and is insulated and spaced from the cavity body; a lower electrode radio frequency power supply selectively electrically connected to the base and the lid; in the glow starting stage, the cover plate is in a suspension state, the lower electrode radio frequency power supply is electrically conducted with the cover plate, and plasma is started in a capacitive coupling mode; and after the starting is finished, the lower electrode radio frequency power supply is electrically conducted with the base to form radio frequency self-bias voltage. The cover plate is in a suspension state in the glow starting stage, and the lower electrode radio frequency power supply is electrically conducted with the cover plate in the glow starting stage, so that plasma glow starting can be realized in a capacitive coupling mode, wafer damage in the glow starting stage can be reduced, particle pollution of a cavity can be effectively reduced, the processing yield of wafers is improved, and the manufacturing cost is reduced.)

1. A process chamber, comprising:

a chamber body;

a pedestal located within the chamber body;

the cover plate is covered on the cavity body and is insulated and spaced from the cavity body;

a lower electrode radio frequency power supply selectively electrically connected to the base and the lid; and the number of the first and second electrodes,

in the glow starting stage, the cover plate is in a suspension state, the lower electrode radio frequency power supply is electrically conducted with the cover plate, and plasma is started in a capacitive coupling mode;

and after the starting is finished, the lower electrode radio frequency power supply is electrically conducted with the base to form radio frequency self-bias voltage.

2. The process chamber of claim 1, further comprising a first selective coupling;

the lower electrode RF power source is selectively electrically connected to the base and the lid via the first selective connection.

3. The process chamber of claim 2, wherein the first selection connection comprises a selection switch;

the fixed contact of the selection switch is electrically connected with the lower electrode radio frequency power supply, and the moving contact of the selection switch is selectively and electrically connected with the base and the cover plate.

4. The process chamber of claim 3, further comprising:

the first matcher is arranged between the base and the selector switch in series;

and the second matcher is serially arranged between the cover plate and the selector switch.

5. The process chamber of any of claims 1 to 4, further comprising a first insulator;

the first insulating member is sandwiched between the chamber body and the cover plate so that the cover plate and the chamber body are insulated from each other.

6. The process chamber of any of claims 1 to 4, further comprising a second selective coupling;

the cover plate is selectively electrically connected with a grounding terminal through the second selective connecting piece; and the number of the first and second electrodes,

in the glow starting stage, the cover plate is not conducted with the grounding end through the second selective connecting piece, so that the cover plate is in a suspension state;

and after the glow starting is finished, the second selective connecting piece enables the cover plate to be electrically conducted with the grounding end.

7. The process chamber of any of claims 1 to 4, wherein the cover plate is a metallic material;

one surface of the cover plate facing the chamber body is subjected to rough treatment; or one surface of the cover plate facing the chamber body is provided with an insulating material layer, and the insulating material layer is subjected to rough treatment.

8. The process chamber of claim 7, wherein the material of the cover plate or the insulating material of the surface of the cover plate is the same as a metal or oxide material to which the process requires attachment.

9. The process chamber of any of claims 1 to 4, further comprising:

a dielectric window coupled with the chamber body;

the radio frequency coil is placed on the dielectric window and is electrically connected with the upper electrode radio frequency power supply through a third matcher;

and the Faraday shielding piece is positioned in the chamber body and is arranged corresponding to the medium window, and the Faraday shielding piece is directly grounded through the chamber body.

10. A semiconductor processing apparatus comprising the process chamber of any of claims 1-9.

Technical Field

The invention relates to the technical field of semiconductor equipment, in particular to a process chamber and semiconductor processing equipment.

Background

Plasma equipment is widely used in the manufacturing process of semiconductors, solar cells, flat panel displays and the like. In current manufacturing processes, plasma equipment types have been used including capacitively coupled plasma types, inductively coupled plasma types, and electron cyclotron resonance plasma types. These types of discharges are currently widely used in the fields of physical vapor deposition, plasma etching, and plasma chemical vapor deposition.

Inductively coupled plasma refers to a discharge mode in which a radio frequency current is applied to a radio frequency coil, an electromagnetic field that changes with time is induced around the radio frequency coil, and plasma is generated and maintained in a discharge space. Because the mode can stably generate plasma with higher density, the application is very wide.

However, the rf current on the rf coil causes capacitive coupling to occur between the coil and the plasma in addition to inductive coupling. Such capacitive coupling causes problems of reduced coil life, reduced energy coupling efficiency, etc.

Disclosure of Invention

The invention aims to solve at least one technical problem in the prior art, and provides a process chamber and semiconductor processing equipment.

To achieve the above object, according to a first aspect of the present invention, there is provided a process chamber comprising:

a chamber body;

a pedestal located within the chamber body;

the cover plate is covered on the cavity body and is insulated and spaced from the cavity body;

a lower electrode radio frequency power supply selectively electrically connected to the base and the lid; and the number of the first and second electrodes,

in the glow starting stage, the cover plate is in a suspension state, the lower electrode radio frequency power supply is electrically conducted with the cover plate, and plasma is started in a capacitive coupling mode;

and after the starting is finished, the lower electrode radio frequency power supply is electrically conducted with the base to form radio frequency self-bias voltage.

Optionally, the process chamber further comprises a first option connector;

the lower electrode RF power source is selectively electrically connected to the base and the lid via the first selective connection.

Optionally, the first selective connection comprises a selection switch;

the fixed contact of the selection switch is electrically connected with the lower electrode radio frequency power supply, and the moving contact of the selection switch is selectively and electrically connected with the base and the cover plate.

Optionally, the process chamber further comprises:

the first matcher is arranged between the base and the selector switch in series;

and the second matcher is serially arranged between the cover plate and the selector switch.

Optionally, the process chamber further comprises a first insulator;

the first insulating member is sandwiched between the chamber body and the cover plate so that the cover plate and the chamber body are insulated from each other.

Optionally, the process chamber further comprises a second option connector;

the cover plate is selectively electrically connected with a grounding terminal through the second selective connecting piece; and the number of the first and second electrodes,

in the glow starting stage, the cover plate is not conducted with the grounding end through the second selective connecting piece, so that the cover plate is in a suspension state;

and after the glow starting is finished, the second selective connecting piece enables the cover plate to be electrically conducted with the grounding end.

Optionally, the cover plate is made of a metal material;

one surface of the cover plate facing the chamber body is subjected to rough treatment; or one surface of the cover plate facing the chamber body is provided with an insulating material layer, and the insulating material layer is subjected to rough treatment.

Optionally, the material of the cover plate or the insulating material of the surface of the cover plate is the same as the metal or oxide material to which the process needs to be attached.

Optionally, the process chamber further comprises:

a dielectric window coupled with the chamber body;

the radio frequency coil is placed on the dielectric window and is electrically connected with the upper electrode radio frequency power supply through a third matcher;

and the Faraday shielding piece is positioned in the chamber body and is arranged corresponding to the medium window, and the Faraday shielding piece is directly grounded through the chamber body.

In a second aspect of the invention, a semiconductor processing apparatus is provided, comprising the process chamber described above.

The invention relates to a process chamber and semiconductor processing equipment. The cover plate is in a suspension state in the glow starting stage, and the lower electrode radio frequency power supply is electrically conducted with the cover plate in the glow starting stage, so that plasma glow starting can be realized in a capacitive coupling mode, namely non-lower electrode glow starting of a process chamber can be realized, wafer damage in the glow starting stage can be reduced, particle pollution of the chamber can be effectively reduced, the processing yield of the wafer is improved, and the manufacturing cost is reduced.

Drawings

The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:

FIG. 1 is a schematic view of a process chamber according to a first embodiment of the present invention;

fig. 2 is a schematic structural view of a faraday shield in a second embodiment of the present invention.

Description of the reference numerals

100: a process chamber;

110: a chamber body;

120: a base;

130: a cover plate;

141: a lower electrode radio frequency power supply;

142: an upper electrode radio frequency power supply;

150: a first selection link;

161: a first matcher;

162: a second matcher;

163: a third matcher;

171: a first insulating member;

172: a second insulating member;

181: a dielectric window;

182: a radio frequency coil;

190: a Faraday shield;

191: an annular body;

192: a gap.

Detailed Description

The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.

As shown in FIG. 1, a first aspect of the present invention is directed to a process chamber 100, the process chamber 100 comprising a chamber body 110, a pedestal 120, a lid 130, and a lower electrode RF power source 141. Wherein a susceptor 120 is disposed in the chamber body 110, the susceptor 120 is used for carrying a wafer (not shown) to complete a process, such as etching, deposition, etc., on the susceptor 120. The cover plate 130 is disposed on the chamber body 110, for example, the cover plate 130 may be disposed on the top of the chamber body 110, so as to provide a closed process environment for the wafer during the process, and prevent the outside particle impurities from falling into the chamber body 110. The cover plate 130 is generally made of a metal material, for example, aluminum, etc. Also, the insulating space between the cover plate 130 and the chamber body 110 may be, for example, an insulating member disposed between the cover plate 130 and the chamber body 110, or an insulating material layer coated on a surface of the cover plate 130 facing the chamber body, or an insulating material layer coated on a surface of the chamber body opposite to the cover plate 130, or the like, so as to implement the insulating space between the cover plate 130 and the chamber body 110. The lower electrode rf power source 141 is selectively electrically connected to the susceptor 120 and the lid 130.

Specifically, as shown in fig. 1, in the glow starting stage, the cover plate 130 is in a floating state, and the floating state is: the cover plate 130 is not grounded at this stage. In addition, during the glow starting stage, the lower electrode rf power source 141 is electrically conducted with the cover plate 130, when the lower electrode rf power source 141 provides rf power, a structure similar to a capacitor may be formed between the cover plate 130 and the chamber body 110, and the cover plate 130 and the chamber body 110 are respectively equivalent to two poles of the capacitor, so that the plasma may be ignited by a capacitive coupling manner.

After the plasma is ignited, i.e., the ignition stage is finished, the lower electrode rf power source 141 is electrically connected to the pedestal 120 to form an rf self-bias voltage, so that the formed rf self-bias voltage can attract the plasma to bombard the surface of the wafer to perform the process on the wafer.

In the process chamber 100 with the structure of this embodiment, the cover plate 130 is in a floating state during the starting stage, and the bottom electrode rf power source 141 is electrically connected to the cover plate 130 during the starting stage, so that plasma starting can be achieved in a capacitive coupling manner, that is, non-bottom electrode starting of the process chamber 100 can be achieved, and wafer damage during the starting stage can be reduced.

As shown in fig. 1, the process chamber 100 also includes a first option connector 150. Wherein the lower electrode RF power source 141 is selectively electrically connected to the base 120 and the lid 130 via the first selective connection 150.

Specifically, as shown in fig. 1, the first selective connection element 150 may be a selective switch, a fixed contact of the selective switch may be electrically connected to the lower electrode rf power source 141, and a movable contact of the selective switch is selectively electrically connected to the base 120 and the cover 130. That is, when the moving contact of the selection switch is electrically connected to the base 120, the lower electrode rf power source 141 is electrically connected to the base 120; when the moving contact of the selection switch is electrically connected to the cover plate 130, the lower electrode rf power source 141 is electrically connected to the cover plate 130.

It should be noted that, the specific structure of the selection switch may be, for example, a relay, or may also be a radio frequency switch, etc.

The process chamber 100 of the present embodiment realizes selective electrical connection between the lower electrode rf power source 141 and the base 120 and the cover plate 130 through the first selective connection 150, i.e., the selective switch, and has a simple structure, and can effectively control the on/off states between the lower electrode rf power source 141 and the base 120 and the cover plate 130.

As shown in fig. 1, the process chamber 100 further includes a first adapter 161 and a second adapter 162. Wherein the first matcher 161 is serially disposed between the base 120 and the selection switch. The second matcher 162 is serially disposed between the cover plate 130 and the selection switch.

In the process chamber 100 with the structure of this embodiment, the first matcher 161 and the second matcher 162 are disposed, so that the rf power provided by the lower electrode rf power source 141 can be transmitted to the susceptor 120 or the cover plate 130 as much as possible, thereby reducing the reflected power on the rf transmission line, reducing the cost, and improving the economic benefits.

As shown in fig. 1, the process chamber 100 further includes a first insulator 171. The first insulating member 171 is interposed between the chamber body 110 and the cover plate 130 to insulate the cover plate 130 from the chamber body 110. Thus, in the ignition stage, that is, when the lower electrode rf power source 141 is electrically connected to the cover plate 130 through the selection switch and the second matching unit 162, the cover plate 130, the first insulating member 171 and the chamber body 110 form a capacitor plate structure, so that plasma ignition can be achieved in a capacitive coupling manner.

Specific materials of the first insulating member 171 are not limited, and for example, quartz, oxide material, and the like. The first insulating member 171 may completely cover the surface of the cover plate 130 contacting the chamber body 110, or, as shown in fig. 1, the first insulating member 171 only covers a portion of the surface of the cover plate 130 contacting the chamber body 110, and at this time, a certain gap or a length-to-width ratio (e.g., 5: 1, etc.) should be left at the contact surface between the chamber body 110 and the cover plate 130, so as to block the etching byproducts from entering the gap, and thus prevent the chamber body 110 from electrically connecting with the cover plate 130.

Optionally, the process chamber 100 further includes a second option connection (not shown). The cover plate 130 may be selectively electrically connected to the ground terminal via the second selective connection member.

Specifically, in the glow starting phase, the second selective connection element is disconnected, so that the cover plate 130 is not conducted with the ground end, and the cover plate 130 is in a floating state. At the end of the ignition, the second selective connection is closed, so that the cover 130 is electrically connected to the ground.

Optionally, a surface of the cover plate 130 facing the chamber body 110 is roughened so as to absorb byproducts generated during the etching process, thereby preventing the byproducts from falling into the chamber body 110 to contaminate wafers in the process, improving the yield of wafers, and reducing the manufacturing cost.

In addition, an insulating material layer may be disposed on one surface of the cover plate 130 facing the chamber body 110, and the insulating material layer may be roughened, so that the adsorption of byproducts generated during the etching process may be also achieved.

Preferably, the material of the cap plate 130 or the insulating material of the surface of the cap plate 130 is the same as the metal or oxide material to which the process needs to be attached. Because metal wafers (wafers) are etched in a chamber with a faraday shield, generally in order to prolong the PM cycle and reduce particle contamination, the particle contamination can be effectively reduced after the etched metal particles are attached to the inner wall of the chamber. In the invention, the material of the cover plate 130 (without insulating material on the surface) or the insulating material on the surface of the cover plate 130 can be changed according to the metal or oxide material and the like which are required to be attached to the process, and the same effect as the prior art can be realized by directly applying radio frequency power to the cover plate 130 to carry out plasma bombardment on the cover plate 130 to obtain particles which are the same as the metal or oxide material required to be attached to the process. Therefore, the invention can also effectively reduce the pollution of chamber particles, improve the processing yield of the wafer and reduce the manufacturing cost.

As shown in fig. 1, the process chamber 100 further includes a dielectric window 181, a radio frequency coil 182, and a faraday shield 190. Wherein the dielectric window 181 is coupled to the chamber body 110. A radio frequency coil 182 is disposed on the dielectric window 181, and the radio frequency coil 182 is electrically connected to the upper electrode radio frequency power source 142 via the third matcher 163. The faraday shield 190 is disposed in the chamber body 110 and corresponding to the dielectric window 181, and the faraday shield 190 is directly grounded through the chamber body 110.

Specifically, the rf current flowing through the rf coil 182 causes capacitive coupling between the rf coil 182 and the plasma in addition to the inductive coupling, which causes a reduction in the lifetime of the rf coil 182 and a reduction in the energy coupling efficiency, and therefore, the process chamber 100 of the present embodiment is configured with the grounded faraday shield 190 to eliminate the capacitive coupling between the rf coil 182 and the plasma.

However, on the premise that no other plasma source exists, high voltage is required to generate plasma, so that high power is required to start the plasma, even the plasma cannot be started, or a bottom electrode starting mode is adopted, but the bias voltage of the bottom electrode starting mode is high, and the wafer is damaged.

Therefore, in the process chamber 100 with the structure of the present embodiment, when the plasma is ignited, the lower electrode rf power source 141 is electrically connected to the floating cover plate 130, so that the plasma is ignited in a capacitive coupling manner, thereby reducing damage to the wafer in the ignition stage, improving the yield of the wafer, and reducing the manufacturing cost.

As shown in fig. 1 and 2, the faraday shield 190 includes an annular body 191, a plurality of slits 192 are spaced apart from a circumferential side wall of the annular body 191, the annular body 191 may be completely broken at the plurality of slits 192, and a width of the slits 192 is generally less than 10mm, which can effectively prevent eddy current loss and heat generation. In addition, the second insulating member 172 can be inserted into each gap, the second insulating member 172 can be made of ceramic, and the annular body 191 exposed from the gap can be effectively prevented from being corroded, so that new particle impurities can be prevented from appearing, the wafer can be prevented from being polluted, the process manufacturing yield of the wafer can be improved, and the manufacturing cost can be reduced.

In a second aspect of the present invention, a semiconductor processing apparatus (not shown) is provided, including the process chamber 100 described above.

The semiconductor processing apparatus of this embodiment has the above-mentioned process chamber 100, the cover plate 130 is in a floating state in the glow starting stage, and the lower electrode rf power supply 141 is electrically connected to the cover plate 130 in the glow starting stage, so that plasma glow starting can be realized in a capacitive coupling manner, that is, non-lower electrode glow starting of the process chamber 100 can be realized, wafer damage in the glow starting stage can be reduced, and meanwhile, particle contamination of the chamber can be effectively reduced, the processing yield of the wafer can be improved, and the manufacturing cost can be reduced.

It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.