阅读说明：本技术 一种气动装置和光刻装置 (Pneumatic device and photoetching device ) 是由 赵文波 胡小林 张丽 于 2018-07-06 设计创作，主要内容包括：本发明实施例提供了一种气动装置和光刻装置,其中,该气动装置包括气控块和气控通路,气控块内部设置有气体切换腔室、柔性薄片、大气管路、第一真空支路和第二真空支路,气控通路的两端分别与气体切换腔室和待控对象连通；气体切换腔室密封设置,柔性薄片设置于气体切换腔室内,用于将气体切换腔室分为相互隔离的第一隔离区和第二隔离区；当第一真空支路抽真空时,气控通路将第一真空支路输入的真空导向待控对象,实现吸附；当第二真空支路抽真空时,气控通路将大气管路输入的大气导向待控对象,实现释放。本发明实现了减小气动装置的体积,使气动装置可以设置于光刻设备中离硅片很近的位置,从而减小了硅片交接时间,提高了曝光效率。(The embodiment of the invention provides a pneumatic device and a photoetching device, wherein the pneumatic device comprises a pneumatic control block and a pneumatic control passage, a gas switching chamber, a flexible sheet, an atmosphere pipeline, a first vacuum branch and a second vacuum branch are arranged in the pneumatic control block, and two ends of the pneumatic control passage are respectively communicated with the gas switching chamber and an object to be controlled; the gas switching chamber is arranged in a sealing mode, and the flexible sheet is arranged in the gas switching chamber and used for dividing the gas switching chamber into a first isolation area and a second isolation area which are isolated from each other; when the first vacuum branch is vacuumized, the air control passage guides the vacuum input by the first vacuum branch to an object to be controlled to realize adsorption; when the second vacuum branch is vacuumized, the air control passage guides the atmosphere input by the atmosphere pipeline to the object to be controlled, so that release is realized. The invention realizes the reduction of the volume of the pneumatic device, and the pneumatic device can be arranged at the position which is close to the silicon wafer in the photoetching equipment, thereby reducing the silicon wafer handover time and improving the exposure efficiency.)

1. A pneumatic device is characterized by comprising a pneumatic control block and a pneumatic control passage, wherein a gas switching chamber, a flexible sheet, an atmosphere pipeline, a first vacuum branch and a second vacuum branch are arranged in the pneumatic control block, and two ends of the pneumatic control passage are respectively communicated with the gas switching chamber and an object to be controlled;

the gas switching chamber is arranged in a sealing manner, the flexible sheet is arranged in the gas switching chamber and is used for dividing the gas switching chamber into a first isolation area and a second isolation area which are isolated from each other, the first isolation area is always communicated with the first vacuum branch and the gas control passage, and the second isolation area is always communicated with the second vacuum branch;

the first end of the atmosphere pipeline is communicated with ambient atmosphere, the second end of the atmosphere pipeline is arranged in the first isolation area, when the first vacuum branch is vacuumized, the flexible sheet deforms towards the first isolation area and seals the second end of the atmosphere pipeline, and the air control passage guides the vacuum input by the first vacuum branch to the object to be controlled;

when the second vacuum branch is vacuumized, the flexible sheet deforms towards the second isolation area, the atmosphere pipeline is communicated with the air control passage, and the air input by the atmosphere pipeline is guided to the object to be controlled by the air control passage.

2. The pneumatic device according to claim 1, wherein the pneumatic control block is formed by splicing a first splitter block and a second splitter block;

the first isolation area is arranged on one side, facing the second shunt block, of the first shunt block, the second isolation area is arranged on one side, facing the first shunt block, of the second shunt block, after the first shunt block and the second shunt block are spliced, the first isolation area and the second isolation area form the gas switching cavity, and the flexible thin sheet is located at the splicing position of the first shunt block and the second shunt block and serves as sealing surfaces of the first isolation area and the second isolation area respectively.

3. The pneumatic device of claim 2, further comprising a first solenoid valve;

the first end of the first vacuum branch is communicated with the first isolation area of the gas switching chamber, the second end of the first vacuum branch is connected with the first output end of the first electromagnetic valve, the first end of the second vacuum branch is communicated with the second isolation area of the gas switching chamber, the second end of the second vacuum branch is connected with the second output end of the first electromagnetic valve, and the input end of the first electromagnetic valve is connected with a vacuum source.

4. The pneumatic device of claim 1, further comprising an isolation line;

the isolation pipeline is arranged in a first isolation area of the gas switching chamber, the conduction direction of the isolation pipeline is perpendicular to the surface of the flexible sheet, the isolation pipeline is used for dividing the first isolation area into an inner space and an outer space, the inner space is arranged in the isolation pipeline, and the first isolation area outside the isolation pipeline is the outer space;

the inner space is always communicated with the first vacuum branch and the air control passage, and the outer space is always communicated with the atmosphere pipeline;

when the first vacuum branch is vacuumized, the flexible sheet deforms towards the direction of the isolation pipeline and is tightly attached to the end part of the isolation pipeline so as to isolate the inner space from the outer space, and when the second vacuum branch is vacuumized, the flexible sheet is separated from the end part of the isolation pipeline so as to communicate the inner space with the outer space.

5. The pneumatic device according to claim 4, wherein a surface of the flexible sheet facing the second isolation region has a first protrusion;

the vertical projection of the isolation pipeline on the flexible sheet is positioned in the vertical projection of the first bulge on the flexible sheet.

6. The pneumatic device according to claim 5, wherein the surface of the flexible sheet facing the first isolation zone has an annular projection at the edge of the flexible sheet;

and an annular groove is formed in the surface, close to the flexible sheet, of the second flow dividing block, and the annular protrusion is clamped with the annular groove.

7. The pneumatic device of claim 6, wherein the flexible sheet is circular, the first protrusion is cylindrical, and the annular protrusion is circular.

8. The pneumatic device according to claim 7, wherein the flexible sheet has a thickness of 0.4 to 0.6mm, the first protrusions have a thickness of 1.4 to 1.6mm, and the first protrusions have a diameter of 5.2 to 7.2 mm; the inner diameter of the annular bulge is 12-14 mm, and the outer diameter of the annular bulge is 15-17 mm.

9. The pneumatic device according to claim 5, wherein the distance between the face of the gas switching chamber away from the first isolation region and the first protrusion of the flexible sheet is 0.4-0.6 mm.

10. The pneumatic device according to claim 5, further comprising a positive pressure branch and a second solenoid valve;

the first end of the positive pressure branch is communicated with the second isolation area of the gas switching chamber, the second end of the positive pressure branch is connected with the output end of the second electromagnetic valve, and the input end of the second electromagnetic valve is connected with a positive pressure source;

when the first vacuum branch is vacuumized, the positive pressure branch provides positive pressure.

11. The pneumatic device according to claim 10, characterized in that a perpendicular projection of the first end of the second vacuum branch on the flexible sheet is located between the first projection and the annular projection;

the perpendicular projection of the first end of the positive pressure branch on the flexible sheet is positioned in the first bulge.

12. The pneumatic device of claim 11, wherein the first end of the positive pressure branch is connected to a pressure groove, and the pressure groove is located on a side of the second isolation region away from the first isolation region and is opposite to the first protrusion.

13. The pneumatic device of claim 5, wherein the second vacuum branch comprises a first sub-branch and a second sub-branch;

the vertical projection of the output end of the first sub-branch on the flexible sheet is positioned between the first bulge and the annular bulge;

the perpendicular projection of the output end of the second sub-branch on the flexible sheet is positioned in the first bulge.

14. The pneumatic device of claim 13, wherein the output end of the second sub-branch is connected to a pressure groove disposed opposite to the first protrusion.

15. The pneumatic device of claim 2, further comprising a sealing ring disposed in the first vacuum branch at a junction of the first diverter block and the second diverter block.

16. A lithographic apparatus comprising a pneumatic device according to any one of claims 1 to 15 for effecting the adsorption and desorption of said object to be controlled.

Technical Field

The invention relates to the field of photoetching machines, in particular to a pneumatic device and a photoetching device.

Background

In semiconductor lithography equipment, a pneumatic device is an extremely important subsystem for completing silicon wafer handover, and the yield of the lithography equipment is directly influenced by the speed of silicon wafer handover. The pneumatic device inputs an air source through the electromagnetic valve to achieve the purpose of finishing the rapid switching between vacuum and ambient atmosphere in the process of continuously switching the silicon wafers.

At present, in order to improve the yield of the lithography equipment and reduce the vacuum stabilization time, the pneumatic device is preferably arranged at a position close to the silicon wafer in the lithography equipment, but the existing pneumatic device comprises at least 4 micro electromagnetic valves, and the space of the position close to the silicon wafer of the lithography equipment is compact, so that the existing pneumatic device has a large volume and cannot be arranged at the position close to the silicon wafer in the lithography equipment.

Disclosure of Invention

The invention provides a pneumatic device and a photoetching device, which are used for reducing the volume of the pneumatic device and enabling the pneumatic device to be arranged at a position in photoetching equipment, which is very close to a silicon wafer, so that the silicon wafer handover time is reduced and the exposure efficiency is improved.

In a first aspect, an embodiment of the present invention provides a pneumatic device, including:

the device comprises an air control block and an air control passage, wherein an air switching chamber, a flexible sheet, an atmosphere pipeline, a first vacuum branch and a second vacuum branch are arranged in the air control block, and two ends of the air control passage are respectively communicated with the air switching chamber and an object to be controlled;

the gas switching chamber is arranged in a sealing manner, the flexible sheet is arranged in the gas switching chamber and is used for dividing the gas switching chamber into a first isolation area and a second isolation area which are isolated from each other, the first isolation area is always communicated with the first vacuum branch and the gas control passage, and the second isolation area is always communicated with the second vacuum branch;

the first end of the atmosphere pipeline is communicated with ambient atmosphere, the second end of the atmosphere pipeline is arranged in the first isolation area, when the first vacuum branch is vacuumized, the flexible sheet deforms towards the first isolation area and seals the second end of the atmosphere pipeline, and the air control passage guides the vacuum input by the first vacuum branch to the object to be controlled;

when the second vacuum branch is vacuumized, the flexible sheet deforms towards the second isolation area, the atmosphere pipeline is communicated with the air control passage, and the air input by the atmosphere pipeline is guided to the object to be controlled by the air control passage.

Optionally, the air control block is formed by splicing a first shunt block and a second shunt block;

the first isolation area is arranged on one side, facing the second shunt block, of the first shunt block, the second isolation area is arranged on one side, facing the first shunt block, of the second shunt block, after the first shunt block and the second shunt block are spliced, the first isolation area and the second isolation area form the gas switching cavity, and the flexible thin sheet is located at the splicing position of the first shunt block and the second shunt block and serves as sealing surfaces of the first isolation area and the second isolation area respectively.

Optionally, the pneumatic device further comprises a first solenoid valve;

the first end of the first vacuum branch is communicated with the first isolation area of the gas switching chamber, the second end of the first vacuum branch is connected with the first output end of the first electromagnetic valve, the first end of the second vacuum branch is communicated with the second isolation area of the gas switching chamber, the second end of the second vacuum branch is connected with the second output end of the first electromagnetic valve, and the input end of the first electromagnetic valve is connected with a vacuum source.

Optionally, the pneumatic device further comprises an isolation pipeline;

the isolation pipeline is arranged in a first isolation area of the gas switching chamber, the conduction direction of the isolation pipeline is perpendicular to the surface of the flexible sheet, the isolation pipeline is used for dividing the first isolation area into an inner space and an outer space, the inner space is arranged in the isolation pipeline, and the first isolation area outside the isolation pipeline is the outer space;

the inner space is always communicated with the first vacuum branch and the air control passage, and the outer space is always communicated with the atmosphere pipeline;

when the first vacuum branch is vacuumized, the flexible sheet deforms towards the direction of the isolation pipeline and is tightly attached to the end part of the isolation pipeline so as to isolate the inner space from the outer space, and when the second vacuum branch is vacuumized, the flexible sheet is separated from the end part of the isolation pipeline so as to communicate the inner space with the outer space.

Optionally, a surface of the flexible sheet facing the second isolation region has a first protrusion;

the vertical projection of the isolation pipeline on the flexible sheet is positioned in the vertical projection of the first bulge on the flexible sheet.

Optionally, the surface of the flexible sheet facing the first isolation region has an annular protrusion, and the annular protrusion is located at the edge of the flexible sheet;

and an annular groove is formed in the surface, close to the flexible sheet, of the second flow dividing block, and the annular protrusion is clamped with the annular groove.

Optionally, the flexible sheet is circular, the first protrusion is cylindrical, and the annular protrusion is circular.

Optionally, the thickness of the flexible sheet is 0.4-0.6 mm, the thickness of the first protrusion is 1.4-1.6 mm, and the diameter of the first protrusion is 5.2-7.2 mm; the inner diameter of the annular bulge is 12-14 mm, and the outer diameter of the annular bulge is 15-17 mm.

Optionally, a distance between a surface of the gas switching chamber, which is far away from the first isolation region, and the first protrusion of the flexible sheet is 0.4-0.6 mm.

Optionally, the pneumatic device further comprises a positive pressure branch and a second solenoid valve;

the first end of the positive pressure branch is communicated with the second isolation area of the gas switching chamber, the second end of the positive pressure branch is connected with the output end of the second electromagnetic valve, and the input end of the second electromagnetic valve is connected with a positive pressure source;

when the first vacuum branch is vacuumized, the positive pressure branch provides positive pressure.

Optionally, a perpendicular projection of the first end of the second vacuum branch on the flexible sheet is located between the first protrusion and the annular protrusion;

the perpendicular projection of the first end of the positive pressure branch on the flexible sheet is positioned in the first bulge.

Optionally, the first end of the positive pressure branch is connected with a pressure tank, and the pressure tank is located on one side of the second isolation region away from the first isolation region, and is arranged opposite to the first protrusion.

Optionally, the second vacuum branch comprises a first sub-branch and a second sub-branch;

the vertical projection of the output end of the first sub-branch on the flexible sheet is positioned between the first bulge and the annular bulge;

the perpendicular projection of the output end of the second sub-branch on the flexible sheet is positioned in the first bulge.

Optionally, an output end of the second sub-branch is connected to a pressure groove, and the pressure groove is opposite to the first protrusion.

Optionally, the pneumatic device further includes a sealing ring, and the sealing ring is disposed at a joint of the first vacuum branch and the second vacuum branch.

In a second aspect, an embodiment of the present invention further provides a lithographic apparatus, where the lithographic apparatus includes the pneumatic device provided in the first aspect, and the starting device is configured to implement adsorption and release of the object to be controlled.

The embodiment of the invention comprises a pneumatic device and a pneumatic device, wherein the pneumatic device comprises a sealed gas switching chamber, a flexible sheet is arranged in the gas switching chamber, the flexible sheet divides the gas switching chamber into a first isolation area and a second isolation area which are isolated from each other, the first isolation area is always communicated with a first vacuum branch and a pneumatic control passage, and the second isolation area is always communicated with a second vacuum branch; the first end of the atmosphere pipeline is communicated with ambient atmosphere, and the second end of the atmosphere pipeline is arranged in the first isolation area; when the second vacuum branch is vacuumized, the flexible sheet deforms towards the second isolation area, the atmosphere pipeline is communicated with the air control passage, the air control passage guides the atmosphere input by the atmosphere pipeline to the object to be controlled, and the vacuum state of the air control passage is damaged by the atmosphere, so that the object to be controlled (silicon wafer) is separated. The embodiment of the invention realizes the quick switching between the vacuum state of the pneumatic device and the ambient atmosphere without adding an electromagnetic valve, thereby reducing the volume of the pneumatic device, enabling the pneumatic device to be arranged at a position which is very close to an object (silicon wafer) to be controlled in photoetching equipment, enabling the switching efficiency between the vacuum state of the pneumatic device and the ambient atmosphere to be higher, reducing the vacuum stabilization time, namely reducing the switching time of the object (silicon wafer) to be controlled, and improving the exposure yield.

Drawings

FIG. 1 is a cross-sectional view of a pneumatic device according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view of the pneumatic device of FIG. 1 during a vacuum draw in the first vacuum branch; ,

FIG. 3 is a cross-sectional view of the pneumatic device of FIG. 1 during a vacuum draw in the second vacuum branch;

FIG. 4 is a cross-sectional view of a pneumatic device according to a second embodiment of the present invention;

FIG. 5 is a cross-sectional view of the pneumatic device of FIG. 4 during evacuation of the second vacuum branch;

fig. 6 is a partial enlarged view of the region 002 in fig. 4;

FIG. 7 is a cross-sectional view of a pneumatic device according to a third embodiment of the present invention;

FIG. 8 is a schematic structural diagram of a lithographic apparatus according to a fourth embodiment of the present invention.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.