阅读说明：本技术 一种粉尘过滤装置及粉尘过滤控制方法 (Dust filtering device and dust filtering control method ) 是由 王俊 闫岩 高崇 梁舰 冯敏强 廖良生 于 2019-11-08 设计创作，主要内容包括：本发明涉及粉尘过滤技术领域,公开一种粉尘过滤装置及粉尘过滤控制方法。其中粉尘过滤装置包括过滤腔、与过滤腔连通的排污管路和冲洗管路,其中过滤腔包括与外部设备连通的进气管路、与气源连通的吹扫管路和与真空泵连通的抽气管路；过滤腔内设置有过滤网,进气管路位于过滤网的一侧,抽气管路和吹扫管路位于过滤网的另一侧；排污管路设置在过滤网靠近进气管路的一侧；冲洗管路能冲洗过滤网上的粉尘。本发明还公开一种粉尘过滤控制方法。本发明通过过滤腔内的过滤网实现对粉尘的过滤；通过冲洗管路冲洗过滤网上的粉尘；通过排污管路排出粉尘；通过吹扫管路吹干冲洗过后的过滤网；总体上有效地保证了排气管路的通畅。(The invention relates to the technical field of dust filtration, and discloses a dust filtration device and a dust filtration control method. The dust filtering device comprises a filter cavity, a sewage discharge pipeline and a flushing pipeline, wherein the sewage discharge pipeline and the flushing pipeline are communicated with the filter cavity; a filter screen is arranged in the filter cavity, the air inlet pipeline is positioned at one side of the filter screen, and the air suction pipeline and the purging pipeline are positioned at the other side of the filter screen; the sewage discharge pipeline is arranged on one side of the filter screen close to the air inlet pipeline; the flushing pipeline can flush dust on the filter screen. The invention also discloses a dust filtration control method. The invention realizes the filtration of dust through the filter screen in the filter cavity; washing the dust on the filter screen through a washing pipeline; discharging dust through a sewage discharge pipeline; blowing the washed filter screen through a blowing pipeline; the smoothness of the exhaust pipeline is effectively ensured on the whole.)

1. A dust filtering device is characterized by comprising a filtering cavity (1), wherein the filtering cavity (1) comprises an air inlet pipeline (2) communicated with external equipment, a purging pipeline (3) communicated with an air source and an air suction pipeline (4) communicated with a vacuum pump, a filtering net (11) is arranged in the filtering cavity (1), the air inlet pipeline (2) is positioned at one side of the filtering net (11), and the air suction pipeline (4) and the purging pipeline (3) are positioned at the other side of the filtering net (11);

the filter cavity (1) is also provided with a sewage discharge pipeline (5), and the sewage discharge pipeline (5) is arranged on one side of the filter screen (11) close to the air inlet pipeline (2);

a flushing line (6) configured to flush dust on the filter screen (11).

2. A dust filtering device according to claim 1, characterized in that the air inlet line (2) is provided with a first valve (21); a second valve (31) is arranged on the purging pipeline (3); a third valve (41) is arranged on the air extraction pipeline (4); and a fourth valve (61) is arranged on the flushing pipeline (6), and a fifth valve (51) is arranged on the sewage draining pipeline (5).

3. A dust filtering arrangement according to claim 2, wherein a heating belt (32) is further arranged between the gas source and the second valve (31), the heating belt (32) being configured to heat the gas provided by the gas source.

4. A dust filtering arrangement according to claim 1, characterized in that a dust counter (52) is also arranged on the sewer line (5).

5. A dust filtering arrangement according to claim 2, further comprising an ultrasonic oscillator (12) connected to the filter screen (11), the ultrasonic oscillator (12) being configured to break up dust on the filter screen (11).

6. The dust filtering device of claim 5, further comprising a control module electrically connected to the external equipment, the gas source, and the vacuum pump.

7. A dust filtration control method using the dust filtration device according to claim 6, comprising:

s10: closing the first valve (21) and the third valve (41), and opening the fourth valve (61), the fifth valve (51) and the ultrasonic oscillator (12) to break up and flush dust on the filter screen (11) and start dust discharge;

s20: and closing the fourth valve (61), blowing the filter chamber (1) by the blowing pipeline (3) to dry the filter screen (11) and the filter chamber (1), and finishing dust exhaust.

8. A dust filtration control method according to claim 7, wherein the second valve (31) is opened after the fourth valve (61) is closed, and the inert gas provided by the gas source is heated to dry the filter screen (11) and the filter chamber (1).

9. The dust filtration control method of claim 7, further comprising, before S20:

s12: judging the number of dust in the sewage discharge pipeline (5), and executing S20 when the number of dust in the sewage discharge pipeline (5) is not more than a dust number threshold value;

and when the dust number in the sewage discharge pipeline (5) is larger than the dust number threshold value, continuing to execute S10.

10. The dust filtration control method of claim 9, further comprising, before S12:

s11: counting the dust discharging times, when the dust number in the sewage discharge pipeline (5) is larger than the dust number threshold value, continuing to execute S10, accumulating the dust discharging times, and then judging the dust discharging times;

when the dust discharging times are larger than the dust discharging time threshold value, prompting to replace the filter screen (11), and then executing S20;

when the dust discharge number is not greater than the dust discharge number threshold, S12 is executed.

Technical Field

The invention relates to the technical field of dust filtration, in particular to a dust filtration device and a dust filtration control method.

Background

A large amount of dust is generated in the film coating process by adopting a Plasma Enhanced Chemical Vapor Deposition (PECVD) method, and the dust can block an exhaust pipeline after being accumulated for a long time; after entering the vacuum pump, the vacuum pump works abnormally and fails, a filter screen is additionally arranged at the front end of the vacuum pump to prevent dust from entering the vacuum pump under general conditions, but the dust is blocked after being accumulated for a long time, so that the preset vacuum effect cannot be achieved; in addition, most of the filtered dust continues to accumulate in the exhaust line, and the accumulated dust also has a problem of clogging the exhaust line.

Disclosure of Invention

Based on the above, the present invention provides a dust filtering apparatus and a dust filtering control method, which can effectively filter, flush and collect dust in an exhaust pipe, and ensure the smoothness of the exhaust pipe.

In order to achieve the purpose, the invention adopts the following technical scheme:

a dust filtering device comprises a filtering cavity, wherein the filtering cavity comprises an air inlet pipeline communicated with external equipment, a purging pipeline communicated with an air source and an air suction pipeline communicated with a vacuum pump, a filtering screen is arranged in the filtering cavity, the air inlet pipeline is positioned on one side of the filtering screen, and the air suction pipeline and the purging pipeline are positioned on the other side of the filtering screen;

the filter cavity is also provided with a sewage discharge pipeline which is arranged at one side of the filter screen close to the air inlet pipeline;

a flushing line configured to flush dust on the filter screen.

As a preferred scheme of the dust filtering device, a first valve is arranged on the air inlet pipeline; a second valve is arranged on the purging pipeline; a third valve is arranged on the air pumping pipeline; and a fourth valve is arranged on the flushing pipeline, and a fifth valve is arranged on the sewage discharge pipeline.

As a preferable aspect of the dust filtering device, a heating belt is further disposed between the gas source and the second valve, and the heating belt is configured to heat the gas supplied from the gas source.

As a preferred scheme of the dust filtering device, a dust counter is also arranged on the sewage discharge pipeline.

As a preferable mode of the dust filtering apparatus, the dust filtering apparatus further includes an ultrasonic oscillator connected to the filter screen, and the ultrasonic oscillator is configured to break up dust on the filter screen.

As a preferable scheme of the dust filtering device, the dust filtering device further comprises a control module, and the control module is electrically connected with the external equipment, the gas source and the vacuum pump.

A dust filtration control method using the dust filtration device according to any one of the above aspects, comprising:

s10: closing the first valve and the third valve, and opening the fourth valve, the fifth valve and the ultrasonic oscillator to break up and flush dust on the filter screen and start dust discharge;

s20: and closing the fourth valve, blowing air into the filter cavity by the blowing pipeline to blow dry the filter screen and the filter cavity, and finishing dust exhaust.

As a preferable scheme of the dust filtration control method, after the fourth valve is closed, the second valve is opened, and the inert gas provided by the gas source is heated to dry the filter screen and the filter cavity.

As a preferable embodiment of the dust filtration control method, before S20, the method further includes:

s12: judging the number of dust in the sewage discharge pipeline, and executing S20 when the number of dust in the sewage discharge pipeline is not more than a dust number threshold value;

when the dust number in the sewage drain line is greater than the dust number threshold value, S10 is continuously executed.

As a preferable embodiment of the dust filtration control method, before S12, the method further includes:

s11: counting the dust discharging times, when the dust number in the sewage discharge pipeline is larger than the dust number threshold value, continuing to execute S10, accumulating the dust discharging times, and then judging the dust discharging times;

when the dust discharging times are larger than the dust discharging time threshold value, prompting to replace the filter screen, and then executing S20;

when the dust discharge number is not greater than the dust discharge number threshold, S12 is executed.

The invention has the beneficial effects that: the filter screen is arranged in the filter cavity, so that dust is filtered, meanwhile, the diameter of the filter cavity is larger than that of the air suction pipeline, the filter screen is arranged in the filter cavity, the filter area of the filter screen for the dust is increased, and the filter effect is better; by arranging the flushing pipeline for flushing the dust on the filter screen, the situation that the filter screen is blocked by the dust due to long-time filtering is effectively avoided, and the service life of the filter screen is prolonged; by arranging the sewage discharge pipeline, the dust flushed by the flushing pipeline is effectively discharged out of the filter cavity, so that the situation of large accumulation of dust is prevented; the flushed filter screen can be dried by blowing through the blowing pipeline communicated with the air source, so that the dust filtering device can conveniently perform next filtering; in addition, the blowing pipeline blows and blows dust which is not washed off on the filter screen when the filter screen is blown and dried, and the filtering effect of the dust filtering device is further enhanced.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings used in the description of the embodiments of the present invention will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the contents of the embodiments of the present invention and the drawings without creative efforts.

FIG. 1 is a schematic view of a dust filter apparatus according to an embodiment of the present invention;

fig. 2 is a flowchart of a dust filtration control method according to an embodiment of the present invention.

In the figure:

1-a filter chamber; 11-a filter screen; 12-an ultrasonic oscillator;

2-an air inlet pipeline; 21-a first valve;

3-purging the pipeline; 31-a second valve; 32-a heating belt;

4-an air extraction pipeline; 41-a third valve;

5-a sewage draining pipeline; 51-a fifth valve; 52-dust counter;

6-flushing the pipeline; 61-fourth valve.

Detailed Description

In order to make the technical problems solved, technical solutions adopted and technical effects achieved by the present invention clearer, the technical solutions of the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

As shown in fig. 1, the present embodiment provides a dust filtering apparatus, which includes a filter chamber 1, a blowdown line 5 and a flushing line 6, wherein the blowdown line 5 and the flushing line 6 are communicated with the filter chamber 1, and the filter chamber 1 includes an air inlet line 2 communicated with external equipment, a purge line 3 communicated with an air source, and an air suction line 4 communicated with a vacuum pump; a filter screen 11 is arranged in the filter cavity 1, the air inlet pipeline 2 is positioned at one side of the filter screen 11, and the air exhaust pipeline 4 and the purging pipeline 3 are positioned at the other side of the filter screen 11; the sewage discharge pipeline 5 is arranged on one side of the filter screen 11 close to the air inlet pipeline 2; the flushing line 6 can flush dust on the filter screen 11.

The dust is filtered by arranging the filter screen 11 in the filter cavity 1, meanwhile, the diameter of the filter cavity 1 is larger than that of the air suction pipeline 4, the filter screen 11 is arranged in the filter cavity 1, the dust filtering area of the filter screen 11 is increased, and the filtering effect is better; by arranging the flushing pipeline 6 for flushing dust on the filter screen 11, the situation that the filter screen 11 is blocked by the dust due to long-time filtering is effectively avoided, and the service life of the filter screen 11 is prolonged; by arranging the sewage discharge pipeline 5, the dust flushed by the flushing pipeline 6 is effectively discharged out of the filter cavity 1, so that the situation of large accumulation of dust is prevented; the flushed filter screen 11 can be dried by blowing through the blowing pipeline 3 communicated with the air source, so that the dust filtering device can conveniently perform next filtering; in addition, the blowing pipeline 3 blows and blows dust which is not washed off on the filter screen 11 when the filter screen 11 is dried, and the filtering effect of the dust filtering device is further enhanced.

Specifically, the intake pipe 2 is provided with a first valve 21; the purging pipeline 3 is provided with a second valve 31; the air pumping pipeline 4 is provided with a third valve 41; the flushing line 6 is provided with a fourth valve 61 and the waste line 5 is provided with a fifth valve 51. When filtering dust, closing the first valve 21, the second valve 31 and the third valve 41, opening the fourth valve 61 and the fifth valve 51, stopping air intake of external equipment into the filter cavity 1, stopping purging into the filter cavity 1, stopping vacuumizing, starting flushing dust on the filter screen 11, and discharging the flushed dust through the sewage discharge pipeline 5; and then closing the fourth valve 61, opening the second valve 31, stopping washing the filter screen 11, purging into the filter cavity 1, blowing the residual dust on the filter screen 11 while drying the filter screen 11 and the filter cavity 1, and completing one-time dust filtration.

Preferably, in order to further enhance the drying efficiency of the air source to the filter screen 11 and the filter chamber 1, a heating belt 32 is further disposed between the air source and the second valve 31, and the heating belt 32 can heat the air blown out by the air source. Before opening second valve 31 and sweeping, open heating band 32, heat the gas that the air supply provided, make and blow the gas that heats in filter screen 11 and the filter chamber 1 and can be faster stoving filter screen 11 and filter chamber 1 for dust filter equipment's work efficiency. It is understood that the heating belt 32 may be a heating wire or other heating device.

In other embodiments, the second valve 31 may be opened while the filter screen 11 is flushed through the flushing line 6 to purge the filter screen 11, so that dust and cleaning solution can rapidly enter the sewage draining line 5, and after the flushing is finished, the fourth valve 61 is closed, the heating belt 32 is opened, and the filter chamber 1 and the filter screen 11 are dried.

Specifically, the gas provided by the gas source is an inert gas, and further specifically, the inert gas may be nitrogen. The gas that provides the air supply sets up to more stable inert gas such as nitrogen gas, can avoid reacting with the dust in filter screen 11 or the filter chamber 1, also can make the filtering process more stable and safe simultaneously.

Preferably, a shower head is arranged at one end of the flushing line 6 close to the filter screen 11. When opening fourth valve 61 and washing filter screen 11, wash pipeline 6 and pass through cleaning solution the shower head sprays to filter screen 11 on, washes the dust on the filter screen 11, and the setting up of shower head enables cleaning solution more even to washing of filter screen 11, can also effectual water economy resource simultaneously.

Preferably, the dust filtering device further comprises an ultrasonic oscillator 12 connected to the filter screen 11, the ultrasonic oscillator 12 is turned on when the fourth valve 61 is turned on to flush the filter screen 11, and the ultrasonic oscillator 12 can break up dust on the filter screen 11, so that the cleaning solution can flush the filter screen 11 more thoroughly.

For detecting the washing effect of the filter screen 11, a dust counter 52 is further disposed on one side of the filter chamber 1 close to the air inlet pipeline 2 or the sewage draining pipeline 5, and can count the dust entering the sewage draining pipeline 5, and in this embodiment, the dust counter 52 is disposed on the sewage draining pipeline 5.

Specifically, in this embodiment, the dust filtering apparatus further includes a control module, and the external device, the air source, the vacuum pump, the ultrasonic oscillator 12, the dust counter 52, the first valve 21, the second valve 31, the third valve 41, the fourth valve 61, and the fifth valve 51 are all electrically connected to the control module, and the control module can control the above-mentioned electrically connected portions, and the specific connection manner and the control manner are the prior art, and those skilled in the art can connect and control according to actual situations, and are not described herein again.

As shown in fig. 2, the present embodiment also provides a dust filtration control method using the dust filtration device described above, including:

s10: closing the first valve 21, the second valve 31 and the third valve 41, and opening the fourth valve 61, the fifth valve 51 and the ultrasonic oscillator 12 to break up and wash the dust on the filter screen 11 to start dust discharge;

s11: counting the dust discharging times (N is 0), when the dust number in the sewage pipeline 5 is larger than a dust number threshold value (y), continuously executing S10, accumulating the dust discharging times (N is N +1), and then judging whether the dust discharging times is larger than a dust discharging time threshold value (x); when the dust discharging times are larger than the dust discharging time threshold (x), prompting to replace the filter screen 11, and then executing S20; when the dust discharge number is not greater than the dust discharge number threshold, S12 is executed.

S12: judging the dust number recorded by the dust counter 52, and executing S20 when the dust number in the sewage discharge pipeline 5 is not more than the dust number threshold value; when the number of dusts in the sewage drain line 5 is greater than the dust number threshold value, S10 is continuously performed.

S20: and closing the fourth valve 61, and opening the second valve 31 to dry the filter screen 11 and the filter cavity 1, and finishing dust exhaust.

It should be noted that the dust number threshold and the dust discharge number threshold may be selected according to experience of an operator, and may be verified according to multiple tests, so as to meet the requirement that the dust filtering device can normally complete filtering, and the specific setting of the numerical value and the setting manner are not specifically limited herein.

Preferably, before opening the second valve 31, the heating belt 32 is opened to heat the inert gas provided by the gas source to dry the filter screen 11 and the filter chamber 1, so as to ensure the cleanness and dryness of the filter screen 11 and the filter chamber 1; further preferably, a humidity sensor is disposed on the filter screen 11, and the humidity sensor can detect the dryness of the filter screen 11, so that the dust filtering device can perform the next filtering normally.

When the dust number is greater than the dust number threshold value and the dust exhaust number of times is greater than the dust exhaust number of times threshold value, then prove to have accumulated too much dust on the filter screen 11, can't be through washing with filter screen 11 clean-up, so in this embodiment, filter screen 11 can be dismantled with filter chamber 1 and be connected, when suggestion change filter screen 11, can take off the filter screen 11 that became invalid, change clean filter screen 11 to realize dust filter equipment's continuation filtration.

In this embodiment, a dust filtering apparatus and a dust filtering control method are applied to a device that is coated with a film by a chemical vapor deposition method or a Plasma Enhanced Chemical Vapor Deposition (PECVD) method, and can effectively filter dust generated in an evaporation process, and can also control filtering, thereby effectively ensuring that the dust filtering apparatus effectively filters dust.

In other embodiments, the dust filtering device and the dust filtering control method can also be applied to occasions requiring dust filtering and control on filtering, such as air conditioners, dust collectors, air purifiers, ultra-clean rooms and the like, and can effectively filter dust on the occasions and ensure the requirements of the occasions on the dust content.

It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious changes, rearrangements and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.