Method for inhibiting high-temperature corrosion of high-temperature superheater of garbage incinerator and control system
阅读说明:本技术 一种垃圾焚烧炉高温过热器抑制高温腐蚀的方法及控制系统 (Method for inhibiting high-temperature corrosion of high-temperature superheater of garbage incinerator and control system ) 是由 卢占导 蒋忠生 顾建兵 于 2021-06-18 设计创作,主要内容包括:本发明涉及了一种垃圾焚烧炉高温过热器抑制高温腐蚀的方法及控制系统,在炉膛的上部稀相区增加一路燃烬风,该燃烬风接至一次风机的出口冷风,从而增加炉膛密相区燃烧份额,降低焚烧炉炉膛出口的烟温。若焚烧炉炉膛出口的压力超出预设值,则减少引风机的风量,降低烟气的流速,增加燃料在炉膛内的停留时间;增加燃料在炉膛内的停留时间,以避免废渣未完全燃烧即很快被拉出炉膛至尾部烟道。增加二次风量,提高锅炉的床温至预设值;加强炉膛密相区扰动,以保证燃料能够在炉膛内得到充分燃烧。使高温过热器的入口烟温小于预设值,减少高温腐蚀量。区别现有技术,本发明可以在原有的结构上改进,结构简单,降低改进的成本。(The invention relates to a method for inhibiting high-temperature corrosion of a high-temperature superheater of a garbage incinerator and a control system. If the pressure at the outlet of the hearth of the incinerator exceeds a preset value, reducing the air quantity of a draught fan, reducing the flow velocity of flue gas and increasing the residence time of fuel in the hearth; the residence time of the fuel in the hearth is increased, so that the waste slag is prevented from being pulled out of the hearth to a tail flue quickly without being completely combusted. Increasing the secondary air quantity, and increasing the bed temperature of the boiler to a preset value; and the disturbance of the dense-phase area of the hearth is strengthened so as to ensure that the fuel can be fully combusted in the hearth. The inlet smoke temperature of the high-temperature superheater is smaller than a preset value, and the high-temperature corrosion amount is reduced. The invention can be improved on the original structure, has simple structure and reduces the improved cost.)
1. A method for inhibiting high-temperature corrosion of a high-temperature superheater of a garbage incinerator is characterized in that the incinerator is used for incinerating papermaking waste residues, the papermaking waste residues are put into a combustion chamber for combustion, the pressure of the outlet of a hearth of the incinerator is detected, the inlet smoke temperature of the high-temperature superheater is detected, the bed temperature of a boiler is detected, and the load of the boiler is detected;
the method comprises the following steps:
a path of burning-out air is added to the upper dilute phase zone of the hearth and is connected to cold air at an outlet of a primary fan, so that the combustion share of the dense phase zone of the hearth is increased, and the smoke temperature at the outlet of the hearth of the incinerator is reduced;
if the pressure at the outlet of the hearth of the incinerator exceeds a preset value, reducing the air quantity of a draught fan, reducing the flow velocity of flue gas and increasing the residence time of fuel in the hearth;
increasing secondary air quantity, increasing the bed temperature of the boiler to a preset value, keeping the total air quantity unchanged, reducing an air door and increasing the air pressure of the secondary air;
and reducing the inlet smoke temperature of the high-temperature superheater to enable the inlet smoke temperature of the high-temperature superheater to be smaller than a preset value.
2. The method for suppressing high temperature corrosion of a high temperature superheater of a garbage incinerator according to claim 1, wherein if the load of the boiler exceeds a preset value, the load of the boiler is reduced to ensure that the inlet flue gas temperature of the high temperature superheater is less than the preset value.
3. The method for suppressing high temperature corrosion of a high temperature superheater of a garbage incinerator according to claim 1, wherein the heat resistance of the material of the high temperature superheater is improved, thereby improving the corrosion resistance of the high temperature superheater.
4. The method for inhibiting the high-temperature corrosion of the high-temperature superheater of the garbage incinerator according to claim 1, wherein the high-temperature superheater is subjected to ash removal, wall thickness detection and wear-resistant tile correction after the incinerator is stopped every time, so that the performance of the high-temperature superheater is ensured.
5. The method for suppressing high temperature corrosion of a high temperature superheater of a garbage incinerator according to claim 1, wherein in the step of adding a path of ember-laden air to the upper freeboard area of the furnace, the air pressure of the ember-laden air is increased so that the air pressure of the ember-laden air exceeds a preset value.
6. The method for inhibiting the high-temperature corrosion of the high-temperature superheater of the garbage incinerator according to claim 1, characterized by ensuring the pressure of a hearth outlet to be between 50Pa and 100Pa in the step of reducing the air volume of the induced draft fan.
7. The method for suppressing high temperature corrosion of a high temperature superheater of a garbage incinerator according to claim 1, wherein in the step of increasing the secondary air quantity and increasing the bed temperature of the boiler to a preset value, the bed temperature of the boiler is ensured to be between 850 ℃ and 890 ℃, and the oxygen content of the boiler is ensured to be between 5% and 7%.
8. A control system for inhibiting high-temperature corrosion of a high-temperature superheater of a garbage incinerator is characterized by being used for executing the method for inhibiting high-temperature corrosion of the high-temperature superheater of the garbage incinerator according to any one of claims 1 to 7.
Technical Field
The invention relates to the technical field of boilers, in particular to a method for inhibiting high-temperature corrosion of a high-temperature superheater of a garbage incinerator and a control system.
Background
With the development of the waste incineration waste heat boiler towards high capacity and high parameter, the superheater has a serious high-temperature corrosion problem.
The existing garbage incinerator adopts a high-temperature high-pressure design, and under the production situation that the requirements of external load and light slag treatment are higher, the temperature of a flue at the tail part of a boiler is higher than that of front smoke for a long time and is over-temperature, so that the heating surface of a high-temperature superheater is seriously corroded by high-temperature chlorine ions in the smoke. The whole group is forced to be replaced after about 1 year of use.
More information about the above solution can also be found in the following documents:
in the patent publication No. CN 111550758A of the invention in China, a large-capacity high-parameter waste incineration waste heat boiler is disclosed, which comprises an incinerator, an external empty device preheating system, a hearth, a horizontal flue, an evaporator, a superheating system, a steering chamber and a bidirectional water supply heating economizer; the external air preheater preheating system introduces secondary steam of the flash tank and extracted steam of the steam turbine into the low-pressure section pipe group, introduces extracted steam of saturated steam of the drum into the high-pressure section pipe group, and preheats primary air to enter the bottom of a grate of the incinerator and send the preheated primary air into the incinerator or preheats secondary air to enter the upper part of the incinerator to play a role in disturbing combustion smoke; the evaporator is arranged at an inlet of the horizontal flue, and the horizontal flue is communicated with the economizer for bidirectional water supply heating through the steering chamber. The invention can inhibit the generation of dioxin and nitrogen oxide in the furnace, optimizes the flow field, effectively controls the high-temperature corrosion of the superheater and the low-temperature corrosion of the economizer, improves the heat exchange efficiency, reduces the operation cost and has good environmental protection performance.
In the invention patent of China with the patent publication number of CN 110701620A, a water spray cooling system for a grate type garbage incinerator and an automatic control method thereof are disclosed, wherein thermocouples are respectively and simultaneously arranged on the left and right side walls of an outlet of the incinerator and the left and right side walls of an inlet of a high-temperature superheater. Atomized water drops enter the incinerator to be mixed with flue gas for vaporization and heat absorption, the temperature of the flue gas at the outlet of the hearth is further reduced, according to the temperature fed back in real time, a signal of the opening degree of an adjusting valve is given out through DCS (distributed control system) logical operation, the water injection flow entering the incinerator is adjusted, when the temperature of the flue gas is reduced to a safety set value, a water delivery pump and a valve are immediately closed, compressed air pushes a cylinder piston, and a spray gun is automatically withdrawn from the incinerator. The system is simple, stable in operation and high in automation degree, and can effectively solve the problems of corrosion of the heating surface, over-standard NOx and the like caused by over-temperature.
In the process of implementing the invention, the inventor finds that the following problems exist in the prior art:
in the prior art, the problem of high-temperature corrosion of the high-temperature superheater is solved, and the structure is complex and high in cost.
Disclosure of Invention
Therefore, a method and a control system for inhibiting high-temperature corrosion of the high-temperature superheater of the garbage incinerator are needed to be provided, and the technical problems of complex structure and high cost of the boiler in the prior art are solved.
In order to achieve the above purpose, the inventor provides a method for inhibiting high-temperature corrosion of a high-temperature superheater of a garbage incinerator, wherein the incinerator is used for incinerating papermaking waste residues, the papermaking waste residues are put into a combustion chamber for combustion, the pressure of the outlet of a hearth of the incinerator is detected, the inlet smoke temperature of the high-temperature superheater is detected, the bed temperature of a boiler is detected, and the load of the boiler is detected;
the method comprises the following steps:
a path of burning-out air is added to the upper dilute phase zone of the hearth and is connected to cold air at an outlet of a primary fan, so that the combustion share of the dense phase zone of the hearth is increased, and the smoke temperature at the outlet of the hearth of the incinerator is reduced;
if the pressure at the outlet of the hearth of the incinerator exceeds a preset value, reducing the air quantity of a draught fan, reducing the flow velocity of flue gas and increasing the residence time of fuel in the hearth;
increasing secondary air quantity, increasing the bed temperature of the boiler to a preset value, keeping the total air quantity unchanged, reducing an air door and increasing the air pressure of the secondary air;
and reducing the inlet smoke temperature of the high-temperature superheater to enable the inlet smoke temperature of the high-temperature superheater to be smaller than a preset value.
Different from the prior art, above-mentioned technical scheme is through increasing the all-round after-combustion wind all the way in the upper portion dilute phase district of furnace, and this after-combustion wind connects to the export cold wind of primary air fan to increase the furnace dense phase district and burn the share, reduce the gas temperature of burning furnace export, can effectively reduce high temperature over heater entry gas temperature. If the pressure at the outlet of the hearth of the incinerator exceeds a preset value, reducing the air quantity of a draught fan, reducing the flow velocity of flue gas and increasing the residence time of fuel in the hearth; the micro-positive pressure operation can be kept, the flow velocity of the flue gas is reduced, and the retention time of the fuel in the hearth is prolonged, so that the waste residues are prevented from being incompletely combusted, namely, the waste residues are quickly pulled out of the hearth to a tail flue. Increasing secondary air quantity, increasing the bed temperature of the boiler to a preset value, keeping the total air quantity unchanged, reducing an air door and increasing the air pressure of the secondary air; and the disturbance of the dense-phase area of the hearth is strengthened so as to ensure that the fuel can be fully combusted in the hearth. The inlet smoke temperature of the high-temperature superheater is reduced, so that the inlet smoke temperature of the high-temperature superheater is smaller than a preset value, and the high-temperature corrosion amount is reduced. Therefore, the structure can be improved on the original structure, the structure is simple, and the improved cost is reduced.
As an embodiment of the invention, if the load of the boiler exceeds the preset value, the load of the boiler is reduced, and the inlet smoke temperature of the high-temperature superheater is ensured to be less than the preset value.
Therefore, under the condition that the whole load is controllable, the load of the boiler is controlled to be not more than 80%, the smoke temperature at the inlet of the high-temperature superheater is strictly controlled to be below 750 ℃, and the high-temperature corrosion amount is reduced.
In one embodiment of the present invention, the heat resistance of the material of the high-temperature superheater is improved, thereby improving the corrosion resistance of the high-temperature superheater.
Therefore, the original high-temperature superheater is made of T91 steel, and is changed into TP347 stainless steel, so that the corrosion resistance is improved in terms of the quality of the pipe.
As an implementation mode of the invention, after the incinerator is stopped every time, the ash removal, the wall thickness detection and the wear-resistant tile correction are carried out on the high-temperature superheater, so that the performance of the high-temperature superheater is ensured.
So, can maintain burning furnace, improve high temperature superheater's life.
As an implementation mode of the invention, in the step of adding one path of burn-out air to the upper dilute phase zone of the hearth, the air pressure of the burn-out air is increased, so that the air pressure of the burn-out air exceeds a preset value.
Therefore, the air pressure of the burning air reaches 13KPa, the penetrating power is strong, the combustion share of a dense-phase area of the hearth is increased, the smoke temperature of the outlet of the hearth is reduced, and the smoke temperature of the inlet of the high-temperature superheater is effectively reduced.
As an embodiment of the invention, in the step of reducing the air quantity of the induced draft fan, the pressure of the outlet of the hearth is ensured to be between 50Pa and 100 Pa.
Therefore, the pressure of the outlet of the hearth is further controlled to be 50-100 Pa, the micro-positive pressure operation is kept, the flow velocity of flue gas is reduced, the retention time of fuel in the hearth is increased, and the waste residues are prevented from being pulled out of the hearth to a tail flue quickly without complete combustion.
As an implementation mode of the invention, in the step of increasing the secondary air quantity and increasing the bed temperature of the boiler to a preset value, the bed temperature of the boiler is ensured to be between 850 ℃ and 890 ℃, and the oxygen content of the boiler is ensured to be between 5 percent and 7 percent.
Therefore, the bed temperature of the boiler is further increased to about 850-890 ℃, the secondary air quantity is increased to keep the secondary air high-pressure operation, the oxygen quantity is controlled to be 5-7%, and the disturbance of a dense-phase region of the hearth is enhanced to ensure that the fuel can be fully combusted in the hearth.
To achieve the above object, the inventor also provides a control system for suppressing high temperature corrosion of a high temperature superheater of a waste incinerator, which is used for executing the method for suppressing high temperature corrosion of the high temperature superheater of the waste incinerator as described in any one of the above mentioned inventor.
Different from the prior art, above-mentioned technical scheme is through increasing the all-round after-combustion wind all the way in the upper portion dilute phase district of furnace, and this after-combustion wind connects to the export cold wind of primary air fan to increase the furnace dense phase district and burn the share, reduce the gas temperature of burning furnace export, can effectively reduce high temperature over heater entry gas temperature. If the pressure at the outlet of the hearth of the incinerator exceeds a preset value, reducing the air quantity of a draught fan, reducing the flow velocity of flue gas and increasing the residence time of fuel in the hearth; the micro-positive pressure operation can be kept, the flow velocity of the flue gas is reduced, and the retention time of the fuel in the hearth is prolonged, so that the waste residues are prevented from being incompletely combusted, namely, the waste residues are quickly pulled out of the hearth to a tail flue. Increasing secondary air quantity, increasing the bed temperature of the boiler to a preset value, keeping the total air quantity unchanged, reducing an air door and increasing the air pressure of the secondary air; and the disturbance of the dense-phase area of the hearth is strengthened so as to ensure that the fuel can be fully combusted in the hearth. The inlet smoke temperature of the high-temperature superheater is reduced, so that the inlet smoke temperature of the high-temperature superheater is smaller than a preset value, and the high-temperature corrosion amount is reduced. Therefore, the structure can be improved on the original structure, the structure is simple, and the improved cost is reduced.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings needed to be used in the embodiments of the present application will be briefly described below, and it is obvious that the drawings described below are only some embodiments of the present application, and it is obvious for a person skilled in the art to obtain other drawings based on the drawings without any creative effort.
Fig. 1 is a diagram of a boiler combustion system of a garbage incinerator according to an embodiment.
Description of reference numerals:
1. the primary cold air is cooled,
2. the secondary hot air is used for heating the air,
3. the direction of the flow of the flue gas,
4. a high-temperature superheater is arranged on the upper portion of the furnace,
5. a low-temperature superheater is arranged on the lower portion of the furnace,
6. an air preheater channel box is arranged on the air preheater,
7. a combustion chamber.
Detailed Description
To explain technical contents, structural features, and objects and effects of the technical solutions in detail, the following detailed description is given with reference to the accompanying drawings in conjunction with the embodiments.
In the description of the present application, unless explicitly stated or limited otherwise, the terms "first", "second", and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance; the term "plurality" means two or more unless specified or indicated otherwise; the terms "connected," "fixed," and the like are to be construed broadly and may, for example, be fixedly connected, detachably connected, integrally connected, or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description of the present application, it should be understood that the terms "upper", "lower", "left", "right", and the like used in the embodiments of the present application are described with reference to the angles shown in the drawings, and should not be construed as limiting the embodiments of the present application. In addition, in this context, it will also be understood that when an element is referred to as being "on" or "under" another element, it can be directly on "or" under "the other element or be indirectly on" or "under" the other element via an intermediate element.
The existing garbage incinerator adopts a high-temperature high-pressure design, and under the production situation that the requirements of external load and light slag treatment are higher, the temperature of a flue at the tail part of a boiler is higher than that of front smoke for a long time and is over-temperature, so that the heating surface of a high-temperature superheater is seriously corroded by high-temperature chlorine ions in the smoke. The whole group is forced to be replaced after about 1 year of use. In the prior art, the problem of high-temperature corrosion of the high-temperature superheater is solved, and the structure is complex and high in cost.
In the embodiment, the incinerator is harmless treatment equipment for harmless treatment of medical and domestic wastes and animals; specifically, the incinerator is mainly used for incinerating papermaking waste residues. The high-temperature superheater exchanges heat under the condition of high temperature; the flue gas temperature is higher than the steam temperature in the superheater, and the flue gas transfer heat gives the steam in the superheater.
Referring to fig. 1, the embodiment relates to a method for inhibiting high temperature corrosion of a high temperature superheater of a garbage incinerator, wherein the incinerator is used for incinerating papermaking waste residues, the papermaking waste residues are put into a combustion chamber for combustion, the pressure of a hearth outlet of the incinerator is detected, the inlet smoke temperature of the high temperature superheater is detected, the bed temperature of a boiler is detected, and the load of the boiler is detected;
the method comprises the following steps:
a path of burning-out air is added to the upper dilute phase zone of the hearth and is connected to cold air at an outlet of a primary fan, so that the combustion share of the dense phase zone of the hearth is increased, and the smoke temperature at the outlet of the hearth of the incinerator is reduced;
if the pressure at the outlet of the hearth of the incinerator exceeds a preset value, reducing the air quantity of a draught fan, reducing the flow velocity of flue gas and increasing the residence time of fuel in the hearth;
increasing secondary air quantity, increasing the bed temperature of the boiler to a preset value, keeping the total air quantity unchanged, reducing an air door and increasing the air pressure of the secondary air;
and reducing the inlet smoke temperature of the high-temperature superheater to enable the inlet smoke temperature of the high-temperature superheater to be smaller than a preset value.
This embodiment is through increasing the burn-out wind all the way in the upper portion dilute phase district of furnace, and this burn-out wind connects to the export cold wind of primary air fan to increase the furnace dense phase district combustion share, reduce the gas temperature of burning furnace export, can effectively reduce high temperature over heater entry gas temperature. If the pressure at the outlet of the hearth of the incinerator exceeds a preset value, reducing the air quantity of a draught fan, reducing the flow velocity of flue gas and increasing the residence time of fuel in the hearth; the micro-positive pressure operation can be kept, the flow velocity of the flue gas is reduced, and the retention time of the fuel in the hearth is prolonged, so that the waste residues are prevented from being incompletely combusted, namely, the waste residues are quickly pulled out of the hearth to a tail flue. Increasing secondary air quantity, increasing the bed temperature of the boiler to a preset value, keeping the total air quantity unchanged, reducing an air door and increasing the air pressure of the secondary air; and the disturbance of the dense-phase area of the hearth is strengthened so as to ensure that the fuel can be fully combusted in the hearth. The inlet smoke temperature of the high-temperature superheater is reduced, so that the inlet smoke temperature of the high-temperature superheater is smaller than a preset value, and the high-temperature corrosion amount is reduced. Therefore, the structure can be improved on the original structure, the structure is simple, and the improved cost is reduced.
In some embodiments, if the load of the boiler exceeds a preset value, the load of the boiler is reduced, and the inlet smoke temperature of the high-temperature superheater is ensured to be less than the preset value.
Therefore, under the condition that the whole load is controllable, the load of the boiler is controlled to be not more than 80%, the smoke temperature at the inlet of the high-temperature superheater is strictly controlled to be below 750 ℃, and the high-temperature corrosion amount is reduced.
In some embodiments, the heat resistance of the material of the high temperature superheater is increased, thereby increasing the corrosion resistance of the high temperature superheater.
Therefore, the original high-temperature superheater is made of T91 steel, and is changed into TP347 stainless steel, so that the corrosion resistance is improved in terms of the quality of the pipe.
In some embodiments, after the incinerator is stopped every time, the ash of the high-temperature superheater is removed, the wall thickness of the pipe wall is detected, and the abrasion-proof tile is corrected, so that the performance of the high-temperature superheater is ensured.
So, can maintain burning furnace, improve high temperature superheater's life.
In some embodiments, in the step of adding one path of burn-out air to the upper dilute phase zone of the hearth, the air pressure of the burn-out air is increased, so that the air pressure of the burn-out air exceeds a preset value.
Therefore, the air pressure of the burning air reaches 13KPa, the penetrating power is strong, the combustion share of a dense-phase area of the hearth is increased, the smoke temperature of the outlet of the hearth is reduced, and the smoke temperature of the inlet of the high-temperature superheater is effectively reduced.
In some embodiments, in the step of reducing the air volume of the induced draft fan, the outlet pressure of the hearth is ensured to be between 50Pa and 100 Pa.
Therefore, the pressure of the outlet of the hearth is further controlled to be 50-100 Pa, the micro-positive pressure operation is kept, the flow velocity of flue gas is reduced, the retention time of fuel in the hearth is increased, and the waste residues are prevented from being pulled out of the hearth to a tail flue quickly without complete combustion.
In some embodiments, in the step of increasing the secondary air quantity and increasing the bed temperature of the boiler to a preset value, the bed temperature of the boiler is ensured to be between 850 ℃ and 890 ℃, and the oxygen content of the boiler is ensured to be between 5 percent and 7 percent.
Therefore, the bed temperature of the boiler is further increased to about 850-890 ℃, the secondary air quantity is increased to keep the secondary air high-pressure operation, the oxygen quantity is controlled to be 5-7%, and the disturbance of a dense-phase region of the hearth is enhanced to ensure that the fuel can be fully combusted in the hearth.
The embodiment also relates to a control system for inhibiting high-temperature corrosion of the high-temperature superheater of the garbage incinerator, which is used for executing the method for inhibiting high-temperature corrosion of the high-temperature superheater of the garbage incinerator.
Specifically, with reference to fig. 1, a primary cold air 1 and a secondary hot air 2 are disposed in a combustion chamber 7 of the waste incinerator, the primary cold air 1 is above the secondary hot air 2, the primary cold air 1 is supplied to an outlet of a primary air blower, the secondary hot air 2 is supplied by a secondary air blower, and the secondary hot air can be fed in two stages at different heights in a hearth.
The flue gas flowing direction 3 enters the material returning device from the combustion chamber 7, sequentially enters the high-temperature superheater 4, the low-temperature superheater 5 and the air preheater pipe box 6 from the top of the material returning device, and finally flows out. The present embodiment mainly solves the problem of corrosion resistance of the high-temperature superheater 4.
Different from the prior art, this embodiment is through increasing the all over fire wind all the way in the upper portion dilute phase district of furnace, and this all over fire wind connects to primary air fan's export cold wind to increase the furnace dense phase district and burn the share, reduce the gas temperature of burning furnace export, can effectively reduce high temperature over heater entry gas temperature. If the pressure at the outlet of the hearth of the incinerator exceeds a preset value, reducing the air quantity of a draught fan, reducing the flow velocity of flue gas and increasing the residence time of fuel in the hearth; the micro-positive pressure operation can be kept, the flow velocity of the flue gas is reduced, and the retention time of the fuel in the hearth is prolonged, so that the waste residues are prevented from being incompletely combusted, namely, the waste residues are quickly pulled out of the hearth to a tail flue. Increasing secondary air quantity, increasing the bed temperature of the boiler to a preset value, keeping the total air quantity unchanged, reducing an air door and increasing the air pressure of the secondary air; and the disturbance of the dense-phase area of the hearth is strengthened so as to ensure that the fuel can be fully combusted in the hearth. The inlet smoke temperature of the high-temperature superheater is reduced, so that the inlet smoke temperature of the high-temperature superheater is smaller than a preset value, and the high-temperature corrosion amount is reduced. Therefore, the structure can be improved on the original structure, the structure is simple, and the improved cost is reduced.
It should be noted that, although the above embodiments have been described herein, the invention is not limited thereto. Therefore, based on the innovative concepts of the present invention, the technical solutions of the present invention can be directly or indirectly applied to other related technical fields by making changes and modifications to the embodiments described herein, or by using equivalent structures or equivalent processes performed in the content of the present specification and the attached drawings, which are included in the scope of the present invention.
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