阅读说明：本技术 测量装置和测量方法 (Measuring device and measuring method ) 是由 川端武史 日高和彦 于 2019-06-11 设计创作，主要内容包括：提供了能够以高精度且在短时间内测量物体表面的测量装置和测量方法。本发明的一个方面是用于测量物体表面在第一方向和与第一方向正交的第二方向上的位置的测量装置。该测量装置包括：可移动体,其具有供物体安装的安装部、彼此不共面的第一表面和第二表面；第一标尺部,其被设置为对第一表面加压并沿着与第一表面的法线方向平行的第一标尺轴线测量第一标尺位置；第二标尺部,其被设置为对第二表面加压并沿着与第二表面的法线方向平行的第二标尺轴线测量第二标尺位置；第一探针,其具有设定在与第二方向平行的探针轴线上且设定在第一标尺轴线和第二标尺轴线的交点处的位置测量的基准点；以及第二探针,其测量沿着探针轴线的位置。(Provided are a measuring device and a measuring method capable of measuring the surface of an object with high accuracy and in a short time. One aspect of the present invention is a measuring device for measuring a position of a surface of an object in a first direction and a second direction orthogonal to the first direction. The measuring device includes: a movable body having a mounting portion to which an object is mounted, a first surface and a second surface that are not coplanar with each other; a first scale portion that is provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface; a second scale portion that is provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface; a first probe having a reference point set on a probe axis parallel to the second direction and set at a position measurement at an intersection of the first scale axis and the second scale axis; and a second probe that measures a position along the probe axis.)

1. A measuring device for measuring a position of a surface of an object in a first direction and a second direction orthogonal to the first direction, the measuring device comprising:

a movable body having a mounting portion for mounting the object, a first surface and a second surface, the first surface and the second surface being non-coplanar with each other;

a first scale portion for measuring a first scale position and provided to press the first surface, the first scale position being a position along a first scale axis parallel to a normal direction of the first surface;

a second scale portion for measuring a second scale position which is a position along a second scale axis parallel to a normal direction of the second surface and which is provided so as to press the second surface;

a first probe in which a reference point of position measurement is set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis; and

a second probe for measuring a position along the probe axis,

wherein the movable body is moved in the first direction and the second direction by driving of the first scale portion and the second scale portion, coordinate values of a first measurement point of the object in the first direction and the second direction are obtained based on a first scale position and a second scale position when the reference point is aligned with the first measurement point of the surface of the object on one side, a position of a second measurement point of the surface of the object on the other side along the probe axis is measured by the second probe, and the coordinate values of the second measurement point in the first direction and the second direction are obtained based on the result of the measurement.

2. The measuring device of claim 1,

the mounting portion of the movable body is provided with a through hole, and

the second probe is arranged to measure the position of the surface of the object on the other side through the through hole.

3. A measuring device according to claim 1 or 2,

a direction orthogonal to the first direction and the second direction is defined as a third direction,

the movable body has a third surface that is not parallel to the first surface and the second surface,

the measuring device further includes a third scale portion for measuring a third scale position and provided to pressurize the third surface, the third scale position being a position along a third scale axis parallel to a normal direction of the third surface,

the reference point of the first probe is set to be an intersection of the first scale axis, the second scale axis, and the third scale axis,

moving the movable body in the first direction, the second direction, and the third direction by driving of the first scale part, the second scale part, and the third scale part, obtaining coordinate values of the first measurement point in the first direction, the second direction, and the third direction based on the first scale position, the second scale position, and the third scale position when the reference point is aligned with the first measurement point, and obtaining coordinate values of the second measurement point in the first direction, the second direction, and the third direction based on a result measured by the second probe.

4. A measuring device according to any one of claims 1 to 3, wherein the second probe is movably arranged along the probe axis.

5. The measurement device according to any one of claims 1 to 4, further comprising:

a fixing frame for fixing the first probe; and

a movable frame movably disposed along the probe axis with respect to the fixed frame,

wherein the second probe is mounted to the movable frame and is movably disposed on the probe axis with the movable frame.

6. A measuring method for measuring a position of a surface of an object in a first direction and a second direction orthogonal to the first direction,

the measuring method uses a measuring apparatus comprising:

a movable body having a mounting portion for mounting the object, a first surface and a second surface, the first surface and the second surface being non-coplanar with each other;

a first scale portion for measuring a first scale position and provided to press the first surface, the first scale position being a position along a first scale axis parallel to a normal direction of the first surface;

a second scale portion for measuring a second scale position which is a position along a second scale axis parallel to a normal direction of the second surface and which is provided so as to press the second surface;

a first probe in which a reference point of position measurement is set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis; and

a second probe for measuring a position along the probe axis,

wherein the measuring method comprises the following steps:

a step of mounting the object on the mounting portion;

a step of moving the movable body in the first direction and the second direction by driving of the first scale section and the second scale section, and aligning the reference point with a first measurement point of a surface of the object on one side; and

a step of obtaining coordinate values of the first measurement point in the first direction and the second direction based on the first scale position and the second scale position when the reference point aligns with the first measurement point, measuring a position of a second measurement point located on a surface of the object located on the other side along the probe axis with the second probe, and obtaining coordinate values of the second measurement point in the first direction and the second direction based on a result of measurement by the second probe.

7. A measurement method for measuring a position of a surface of an object in a first direction, a second direction orthogonal to the first direction, and a third direction orthogonal to the first direction and the second direction,

the measuring method uses a measuring apparatus comprising:

a movable body having a mounting portion for mounting the object, a first surface, a second surface, and a third surface, the first surface, the second surface, and the third surface being non-coplanar with one another;

a first scale portion for measuring a first scale position and provided to press the first surface, the first scale position being a position along a first scale axis parallel to a normal direction of the first surface;

a second scale portion for measuring a second scale position which is a position along a second scale axis parallel to a normal direction of the second surface and which is provided so as to press the second surface;

a third scale portion for measuring a third scale position and provided to pressurize the third surface, the third scale position being a position along a third scale axis parallel to a normal direction of the third surface;

a first probe in which a reference point of position measurement is set on a probe axis parallel to the second direction and at an intersection of the first scale axis, the second scale axis, and the third scale axis; and

a second probe for measuring a position along the probe axis,

wherein the measuring method comprises the following steps:

a step of mounting the object on the mounting portion;

a step of moving the movable body in the first direction, the second direction, and the third direction by driving of the first scale part, the second scale part, and the third scale part, and aligning the reference point with a first measurement point located on a surface of the object located on one side; and

a step of obtaining coordinate values of the first measurement point in the first direction, the second direction, and the third direction based on the first scale position, the second scale position, and the third scale position when the reference point is aligned with the first measurement point, measuring a position of a second measurement point of a surface of the object on the other side along the probe axis with the second probe, and obtaining coordinate values of the second measurement point in the first direction, the second direction, and the third direction based on a result of measurement by the second probe.

Technical Field

The present invention relates to a measuring apparatus and a measuring method, and more particularly to a measuring apparatus and a measuring method capable of measuring a surface position of an object with high accuracy and in a short time.

Background

A measuring apparatus for measuring the surface shape of an object obtains three-dimensional coordinates of a measuring point by, for example, bringing a stylus ball (stylus ball) provided at the tip of a probe into contact with the measuring point. For example, european patent No.2244052 discloses a measuring device according to Abbe's principle. The abbe principle means that the measured object and the standard scale are aligned in the measuring direction. According to this principle, the measurement accuracy can be improved.

Further, a measuring device capable of measuring each of the upper surface and the lower surface of an object is disclosed in japanese patent No.4260180 and japanese patent No. 3486546. In this measuring apparatus, two measuring probes are disposed so as to face each other with a measuring object interposed therebetween. With this configuration, the upper surface and the lower surface of the object can be measured in a short time without turning the object over.

Japanese patent No.3827493, japanese patent No.4584029, and japanese patent No.4986530 disclose a measuring apparatus that performs high-precision calibration by measuring three reference balls.

Disclosure of Invention

Problems to be solved by the invention

In acquiring the shape (coordinates) of the surface of the object, a highly accurate measurement result can be obtained by measurement according to the abbe principle. On the other hand, sufficient measurement time is required to perform highly accurate measurement of a plurality of points on the surface of the object. In the measuring device, measurement accuracy and short measurement time are also important factors.

An object of the present invention is to provide a measuring apparatus and a measuring method capable of measuring the surface of an object with high accuracy and in a short time.

Means for solving the problems

One aspect of the present invention is a measuring apparatus for measuring a position of a surface of an object in a first direction and a second direction orthogonal to the first direction. The measuring device includes: a movable body having a mounting portion to which the object is mounted, a first surface and a second surface, the first surface and the second surface being non-coplanar with each other; a first scale portion that is provided to press the first surface and that is used to measure a first scale position that is a position along a first scale axis parallel to a normal direction of the first surface; a second scale portion that is provided to press the second surface and that is used to measure a second scale position that is a position along a second scale axis that is parallel to a normal direction of the second surface; a first probe having a reference point set on a probe axis parallel to the second direction and set at a position measurement at an intersection of the first scale axis and the second scale axis; and a second probe that measures a position along the probe axis.

In the measuring apparatus, the movable body is moved in the first direction and the second direction by driving of the first scale portion and the second scale portion, coordinate values of the first measurement point in the first direction and the second direction are obtained on the basis of a first scale position and a second scale position when the reference point is aligned with the first measurement point of the surface of the object on one side, a position of a second measurement point of the surface of the object on the other side along the probe axis is measured by the second probe, and the coordinate values of the second measurement point in the first direction and the second direction are obtained on the basis of a result of measurement by the second probe.

According to this configuration, the position of the surface of the object on one side can be measured by the first probe, and the position of the surface of the object on the other side can be measured by the second probe. At this time, since the reference point for position measurement of the first probe is set at the intersection of the first scale axis and the second scale axis, position measurement can be performed with high accuracy by the reference point of the first probe according to the abbe principle. In addition, since the position along the probe axis is measured by the second probe, highly accurate position measurement can be performed with reference to the reference point of the first probe. That is, for highly accurate position measurement according to the abbe principle, both one side and the other side of the object can be measured by the first probe and the second probe in a short time.

In the measuring apparatus, the mounting portion of the movable body may be provided with a through hole, and the second probe may be provided to measure the position of the surface of the object on the other side through the through hole. Therefore, the position of the surface of the object on one side can be measured by the first probe in a state where the object is mounted on the mounting portion, and the position of the surface of the object on the other side can be measured by the second probe through the through hole without replacing the object.

In addition, the movable body may further include a third surface that is not parallel to the first surface and the second surface, and the measuring device may include a third scale portion that is provided to pressurize the third surface, and measure a third scale position, which is a position along a third scale axis that is parallel to a normal direction of the third surface, with a direction orthogonal to the first direction and the second direction as the third direction.

In the measuring apparatus, the reference point of the first probe is set at an intersection of the first scale axis, the second scale axis, and the third scale axis. Then, by moving the movable body in the first direction, the second direction, and the third direction by the driving of the first scale part, the second scale part, and the third scale part, the coordinate values of the first measurement point in the first direction, the second direction, and the third direction can be obtained based on the first scale position, the second scale position, and the third scale position when the reference point is aligned with the first measurement point, and the coordinate values of the second measurement point on the surface of the object on the other side in the first direction, the second direction, and the third direction can be obtained based on the result of measurement by the second probe.

In the measuring device, the second probe may be movably arranged along the probe axis. With this configuration, the coordinate values can be obtained by aligning the second probe with the measurement point of the object using the position of the first probe as a reference.

The measuring device may further include: a fixing frame for fixing the first probe; and a movable frame movably disposed along the probe axis with respect to the fixed frame. In the measuring apparatus, the second probe is mounted to the movable frame and is movably disposed on the probe axis together with the movable frame. With this configuration, the movable frame is stably supported by the fixed frame to which the first probe is fixed, and the accuracy of position measurement by the second probe is improved.

Another aspect of the present invention is a measuring method for measuring a position of a surface of an object in a first direction and a second direction orthogonal to the first direction. The measuring method uses a measuring apparatus comprising: a movable body having a mounting portion for mounting the object to the movable body, a first surface and a second surface, the first surface and the second surface being non-coplanar with each other; a first scale portion that is provided to press the first surface and that is used to measure a first scale position that is a position along a first scale axis parallel to a normal direction of the first surface; a second scale portion that is provided to press the second surface and that is used to measure a second scale position that is a position along a second scale axis that is parallel to a normal direction of the second surface; a first probe having a reference point set on a probe axis parallel to the second direction and set at a position measurement at an intersection of the first scale axis and the second scale axis; and a second probe for measuring a position along the probe axis.

The measuring method comprises the following steps: a step of mounting the object on the mounting portion; a step of moving the movable body in the first direction and the second direction by driving the first scale part and the second scale part to align the reference point of the first probe with a first measurement point of a surface of the object on one side; and a step of obtaining coordinate values of the first measurement point in the first direction and the second direction based on the first scale position and the second scale position when the reference point is aligned with the first measurement point, measuring a position of a second measurement point of a surface of the object on the other side along the probe axis with the second probe, and obtaining coordinate values of the second measurement point in the first direction and the second direction based on a result of measurement by the second probe.

According to this configuration, it is possible to perform highly accurate position measurement according to the abbe principle using the reference point of the first probe, and to measure the position in the second direction with respect to the reference point of the first probe with high accuracy using the second probe without replacing the object.

Another aspect of the present invention is a measurement method for measuring a position of a surface of an object in a first direction, a second direction orthogonal to the first direction, and a third direction orthogonal to the first direction and the second direction, wherein the measurement method uses a measurement apparatus including: a mounting portion for mounting the object; a movable body having a first surface, a second surface, and a third surface, the first surface, the second surface, and the third surface being non-coplanar with one another; a first scale portion that is provided to press the first surface and that is used to measure a first scale position that is a position along a first scale axis parallel to a normal direction of the first surface; a second scale portion that is provided to press the second surface and that is used to measure a second scale position that is a position along a second scale axis that is parallel to a normal direction of the second surface; a third scale portion which is provided to pressurize the third surface and which is used to measure a third scale position, the third scale position being a position along a third scale axis parallel to a normal direction of the third surface; a first probe having a reference point set on a probe axis parallel to the second direction and set at a position measurement at an intersection of the first, second and third scale axes; and a second probe that measures a position along the probe axis.

The measuring method comprises the following steps: a step of mounting the object on the mounting portion; a step of moving the movable body in the first direction, the second direction, and the third direction by driving of the first scale part, the second scale part, and the third scale part, and aligning the reference point with a first measurement point of a surface of the object on one side; and a step of obtaining coordinate values of the first measurement point in the first scale position, the second scale position, and the third scale position when the reference point is aligned with the first measurement point, measuring a position of a second measurement point of the surface of the object on the other side along the probe axis with the second probe, and obtaining coordinate values of the second measurement point in the first direction, the second direction, and the third direction based on a result of measurement by the second probe.

According to this configuration, highly accurate three-dimensional position measurement according to the abbe principle can be performed using the reference point of the first probe, and highly accurate three-dimensional position measurement using the reference point of the first probe as the reference point can be performed by the second probe without replacing the object.

Drawings

Fig. 1 is a schematic sectional view showing a measuring apparatus according to a first embodiment.

Fig. 2 is a schematic plan view showing a measuring apparatus according to the first embodiment.

Fig. 3 is a schematic sectional view showing an example of a state in which the movable body moves.

Fig. 4 is a schematic sectional view showing a measuring apparatus according to a second embodiment.

Fig. 5 is a schematic sectional view showing an example of a state in which a movable body of a measuring apparatus according to a second embodiment moves.

Fig. 6 is a schematic cross-sectional view illustrating a calibration method.

Fig. 7 is a schematic diagram showing a relationship between a standard ball (master ball) and a stylus ball in calibration.

Detailed Description

Embodiments of the present invention will be described below with reference to the accompanying drawings. In the following description, the same components are denoted by the same reference numerals, and the description of the components once described will be appropriately omitted.

[ first embodiment ]

Fig. 1 is a schematic sectional view showing a measuring apparatus according to the present embodiment.

Fig. 2 is a schematic plan view showing a measuring apparatus according to the present embodiment.

As shown in fig. 1 and 2, the measurement apparatus 1 according to the present embodiment is an apparatus for measuring the position (coordinates) of the surface of an object W. Here, in the present embodiment, it is assumed that the first direction is the X direction, the second direction orthogonal to the first direction is the Z direction, and the third direction orthogonal to the first direction and the second direction is the Y direction. The Z direction is also referred to as the vertical direction and the thickness direction. The measuring apparatus 1 can measure X, Y, Z coordinates of the surface of the object W with reference to a preset origin.

The measuring apparatus 1 includes a movable body 10 having a mounting portion 11 on which an object W is mounted, and a first surface 101, a second surface 102, and a third surface 103 which are not coplanar with each other. The mounting portion 11 is provided on the upper surface of the movable body 10. The mounting portion 11 is provided with a fixing piece 111 for fixing the object W. A first surface 101, a second surface 102, and a third surface 103 whose normal directions are different from each other are provided at the lower side of the movable body 10. The normal directions of the first surface 101, the second surface 102, and the third surface 103 need not be orthogonal to each other. The first surface 101, the second surface 102 and the third surface 103 all face downwards.

The movable body 10 is movable in X, Y and Z directions by the respective forward and backward movements of the first scale part 21, the second scale part 22, and the third scale part 23. The first scale portion 21, the second scale portion 22 and the third scale portion 23 each include a linear scale.

The first scale portion 21 is provided to press the first surface 101, and measures a first scale position, which is a position along a first scale axis SC1 parallel to the normal line of the first surface 101. That is, the linear scale in the first scale portion 21 is arranged along the first scale axis SC 1. The pressing surface of the first scale portion 21 is not fixed to the first surface 101, but is provided to be slidable along the first surface 101.

The second scale portion 22 is provided to press the second surface 102, and measures a second scale position, which is a position along a second scale axis SC2 parallel to the normal line of the second surface 102. That is, the linear scale in the second scale portion 22 is arranged along the second scale axis SC 2. The pressing surface of the second scale portion 22 is not fixed to the second surface 102, but is provided to be slidable along the second surface 102.

The third scale portion 23 is provided to press the third surface 103, and measures a third scale position, which is a position along a third scale axis SC3 parallel to the normal of the third surface 103. That is, the linear scale in the third scale portion 23 is arranged along the third scale axis SC 3. The pressing surface of the third scale portion 23 is not fixed to the third surface 103, but is provided to be slidable along the third surface 103.

Here, the first scale axis SC1, the second scale axis SC2, and the third scale axis SC3 need not be parallel to the first direction (X direction), the second direction (Z direction), and the third direction (Y direction), respectively.

In the measuring apparatus 1 according to the present embodiment, the first scale axis SC1, the second scale axis SC2, and the third scale axis SC3 are arranged to intersect at one point (intersection a) above the movable body 10. The first probe 31 is disposed above the object W, and the second probe 32 is disposed below the object W.

The first stylus ball 311 is disposed at the end of the first probe 31. The center of the first stylus ball 311 serves as a reference point for position measurement. The reference point is positioned on the probe axis PA parallel to the Z direction, and is positioned at the intersection a of the first scale axis SC1, the second scale axis SC2, and the third scale axis SC 3. In this way, by setting the reference point for position measurement of the first probe 31 to the intersection a of the first scale axis SC1, the second scale axis SC2, and the third scale axis SC3, highly accurate position measurement can be performed by the reference point of the first probe 31 according to the abbe principle.

The second probe 32 measures a position along the probe axis PA. The second stylus ball 321 is disposed at the end of the second probe 32. The second probe 32 is arranged to be movable back and forth along the probe axis PA. The probe position of the second stylus ball 321 in the second probe 32 along the probe axis PA is measured by the probe scale portion 320. The probe scale portion 320 includes a linear scale arranged along the probe axis PA. In the present embodiment, the through hole 11h is provided in the mounting portion 11 of the movable body 10, and the position of the surface of the object W can be measured by the second probe 32 passing through the through hole 11 h.

In the measuring apparatus 1 having such a configuration, the movable body 10 is moved in the respective directions X, Y and Z by being driven by the first scale part 21, the second scale part 22, and the third scale part 23, and the reference point of the first probe 31 is aligned with the first measuring point of the surface of the object W on one side. Then, the coordinate values in the X, Y and Z directions of the first measurement point are obtained based on the first scale position, the second scale position, and the third scale position at this time. Further, the coordinate values in the X, Y and Z directions of the second measurement point of the surface of the object W on the other side are obtained based on the probe position of the second probe 32.

[ measuring method ]

First, the object W is placed on the mounting portion 11 of the movable body 10. The object W is fixed to the mounting portion 11 by a fixing member 111. Next, the movable body 10 is appropriately moved in each of the X, Y and Z directions by being driven by the first scale part 21, the second scale part 22, and the third scale part 23. Here, the first scale part 21 can move back and forth along the first scale axis SC1, the second scale part 22 can move back and forth along the second scale axis SC2, and the third scale part 23 can move back and forth along the third scale axis SC 3. By balancing the forward and backward movements of these scale portions, the movable body 10 can move in each of the X, Y and Z directions.

For example, when all of the first scale part 21, the second scale part 22, and the third scale part 23 move upward, the movable body 10 rises in the Z direction. In contrast, when all of the first scale portion 21, the second scale portion 22, and the third scale portion 23 move downward, the movable body 10 descends in the Z direction. Further, for example, when the first scale part 21 is moved upward and the second scale part 22 is moved downward, the movable body 10 is moved in the X direction. By controlling the balance of the advance and retreat of these scale portions, the movable body 10 can be moved by an arbitrary amount in the respective X, Y, and Z directions.

By moving the movable body 10 in this way, the reference point of the first probe 31 is aligned with the first measurement point of the surface of the object W on one side. Here, matching the reference point of the first probe 31 with the first measurement point means adjusting a measurement posture (measurement position) using the reference point of the first probe 31 as a position reference. In the present embodiment, the first measurement point of the object W is brought into contact with the first stylus ball 311 of the first probe 31 by moving the movable body 10.

When the first stylus ball 311 comes into contact with the surface of the object W, detection may be performed by a detector such as a pressure-sensitive element (piezoelectric element). At the time of this detection, a position on the first scale axis SC1 (first scale position) is measured by the first scale part 21, a position on the second scale axis SC2 (second scale position) is measured by the second scale part 22, and a position on the third scale axis SC3 (third scale position) is measured by the third scale part 23. Based on these scale positions, X, Y and Z coordinates of the reference points can be obtained by calculation.

Next, in this state, the second probe 32 is raised in the Z direction, and the second stylus ball 321 is aligned with the second measurement point of the surface of the object W on the other side. Here, aligning the second stylus ball 321 and the second measurement point means adjusting the measurement posture with the center point of the second stylus ball 321 as a position reference. In the present embodiment, the second stylus ball 321 is brought into contact with the second measurement point of the surface of the object W on the other side.

When the second stylus ball 321 is in contact with the surface of the object W, the contact may be detected by a detector such as a pressure sensitive element (piezoelectric element) like the first stylus ball 311. At the time of this detection, the probe position of the second probe 32 is measured by the probe scale part 320. The measurement position of the second probe 32 is obtained based on the abbe principle as the distance in the Z direction with reference to the reference point (i.e., intersection a) of the first probe 31. Thereby, the coordinate values in the X, Y and Z directions of the second measurement point of the surface of the object W on the other side can be obtained.

After the measurement at the first measurement point and the second measurement point is completed, once the second probe 32 is lowered, the movable body 10 is moved, and the measurement at the next measurement point is performed in the same manner.

Fig. 3 is a schematic sectional view showing an example of a state in which the movable body moves.

For example, the first scale portion 21 moves upward, and the second scale portion 22 moves downward. As a result, the movable body 10 moves parallel to the X direction. Thereafter, the first scale part 21, the second scale part 22, and the third scale part 23 move upward to move the movable body 10 in the Z direction. Then, the movement of the movable body 10 is stopped at a position where the surface of the object W on one side is in contact with the first stylus ball 311. Then, the first scale position, the second scale position, and the third scale position at this time are measured, and X, Y and Z coordinates of the measurement point are calculated.

Thereafter, as described above, the second probe 32 is raised in the Z direction, and the second probe ball 321 is brought into contact with the surface of the object W on the other side. Then, by measuring the probe position of the second probe 32 at this time, the coordinate values in the X, Y and Z directions of the measurement point of the surface of the object W on the other side are obtained.

By repeating such movement of the movable body 10 and the measurement operations of the first probe 31 and the second probe 32, it is possible to measure the three-dimensional positions (X, Y, Z coordinates) of both the surface of the object W on one side and the surface of the object W on the other side.

In the present embodiment, since the reference point for position measurement of the first probe 31 is set to the intersection a of the first scale axis SC1, the second scale axis SC2, and the third scale axis SC3, highly accurate position measurement can be performed by the reference point of the first probe 31 according to the abbe principle. That is, when the measurement point is changed, the movable body 10 (object W) is moved so that the reference point of the first probe 31 is kept unchanged at the intersection a of the scale axes. Thus, the first, second and third scale positions can be measured at any measurement point according to the abbe principle. This makes it possible to perform highly accurate position measurement.

In addition, in the present embodiment, in a state where the position of the surface of the object W on one side is measured by the first probe 31, the position of the surface of the object W on the other side can be measured by the second probe 32. Since the second probe 32 measures the probe position along the probe axis PA, highly accurate position measurement can be performed with reference to the reference point of the first probe 31. In addition, since position measurement can be performed by the second probe 32 passing through the through hole 11h, position measurement can be performed on both the surface of the object W on one side and the surface of the object W on the other side without replacing the object W.

[ embodiment 2]

Fig. 4 is a schematic sectional view showing a measuring apparatus according to a second embodiment.

As shown in fig. 4, the measurement device 1B according to the present embodiment further includes: a fixing frame 41 for fixing the first probe 31; and a movable frame 42 movably disposed along the probe axis PA with respect to the fixed frame 41.

The fixed frame 41 is provided with a probe scale portion 320 along the probe axis PA so that the position of the movable frame 42 along the probe axis PA can be measured. The movable frame 42 is provided in a shape that does not interfere with the movement of the movable body 10, and extends to the lower side of the movable body 10. The movable frame 42 may be provided to extend across the movable body 10 through the through hole 11h, for example. The second probe 32 is fixed to the lower end side of the movable frame 42. With this configuration, the second probe 32 can be moved along the probe axis PA in accordance with the movement of the movable frame 42.

In this measuring apparatus 1B, the movable frame 42 is stably supported by the fixed frame 41 to which the first probe 31 is fixed, and the second probe 32 can be stably moved along the probe axis PA together with the movable frame 42. As a result, the accuracy of the position measurement by the second probe 32 can be improved. In addition, since the probe scale portion 320 is also provided in the fixing frame 41 in which the first probe 31 is provided, the linear scale provided in the probe scale portion 320 can be suppressed from being displaced from the probe axis PA.

Fig. 5 is a schematic sectional view showing an example of a state in which a movable body of a measuring apparatus according to a second embodiment moves.

For example, the first scale portion 21 moves upward, and the second scale portion 22 moves downward. As a result, the movable body 10 moves parallel to the X direction. Thereafter, the first scale part 21, the second scale part 22, and the third scale part 23 move upward to move the movable body 10 in the Z direction. Then, the movement of the movable body 10 is stopped at a position where the surface of the object W on one side is in contact with the first stylus ball 311. Then, the first scale position, the second scale position, and the third scale position at this time are measured, and X, Y and Z coordinates of the measurement point are calculated.

Thereafter, the second probe 32 is raised in the Z direction by moving the movable frame 42 along the probe axis PA, and the second stylus ball 321 is brought into contact with the surface of the object W on the other side. Then, by measuring the probe position of the second probe 32 at this time, the coordinate values in the X, Y and Z directions of the measurement point of the surface of the object W on the other side are obtained.

By repeating this operation, the three-dimensional positions (X, Y, Z coordinates) of both the surface of the object W on one side and the surface of the object W on the other side can be measured.

In the measuring apparatus 1B according to the present embodiment, the fixed frame 41 and the movable frame 42 improve the accuracy of movement of the second probe 32 along the probe axis PA and the accuracy of position measurement by the second probe 32.

[ calibration method ]

Next, an example of a calibration method by the measurement device 1 according to the present embodiment will be explained.

Fig. 6 is a schematic cross-sectional view illustrating a calibration method.

Fig. 7 is a schematic diagram showing a relationship between a standard ball (master ball) and a stylus ball in calibration.

As shown in fig. 6, a calibration sphere 200 is used to calibrate the measuring device 1. The reference ball 200 is of known ball diameter D_MThe ball for calibration of (1). A standard ball 200 is mounted to the end of a holder 210.

In order to perform calibration of the measuring apparatus 1 according to the present embodiment, the holder 210 to which the standard ball 200 is attached to the attachment portion 11 of the movable body 10. Next, the movable body 10 is moved to bring the first probe ball 311 of the first probe 31 into contact with the standard ball 200. Based on the measured value (coordinate value) of the first probe 31 measured at this time and the known sphere diameter D of the standard sphere 200_MDetermining the ball diameter D of the first stylus ball 311₁. Calibration of first probe 31 is preferably performed at multiple points of calibration sphere 200.

Next, the second probe 32 is moved to bring the second stylus ball 321 of the second probe 32 into contact with the standard ball 200. Based on the measured value (coordinate value) of the second probe 32 and the known sphere diameter D of the standard sphere 200_MTo determine the sphere diameter D of the second stylus ball 321₂. Calibration of the second probe 32 is preferably performed at multiple points of the calibration sphere 200.

In the above description, the determination of the ball diameter D of the first stylus ball 311 by the reference ball 200 has been described₁And the sphere diameter D of the second stylus ball 321₂But the sphere diameter D of only the first stylus ball 311 can be determined by the standard ball 200₁. In determining the diameter D of the sphere₁The first probe 31 may then measure the second stylus ball 321 of the second probe 32 to determine the ball diameter D₂。

In determining the center-to-center distance (center-to-center distance), the ball diameter D of the first stylus ball 311 is determined by the reference ball 200₁And the sphere diameter D of the second stylus ball 321₂The measurement value at zero thickness can be acquired with high accuracy.

As described above, according to the embodiment, high-precision position measurement can be performed according to the abbe principle by the first probe 31, and both sides of the object W can be measured by the first probe 31 and the second probe 32, and the entire surface of the object W can be measured with high precision in a short time.

[ modifications of the embodiments ]

Although the embodiments have been described above, the present invention is not limited to these examples.

For example, in the above-described embodiment, although the first probe 31 and the second probe 32 are described as the contact type, at least one of them may be a non-contact type position measuring probe. As the non-contact type probe, a probe provided with a sensor (a sensor of an axial chromatic aberration confocal system) using a wavelength confocal system is preferably used, so that measurement can be performed even when the inclination of the surface of the object W is relatively large.

In the above-described embodiment, an example of measuring the three-dimensional positions of X, Y and Z is shown, but it is also applicable to the case of measuring the two-dimensional positions of X and Z.

In addition, any contents or appropriate combinations of features of the respective embodiments obtained by appropriate addition, removal, or design change of the components with respect to the above-described embodiments by those skilled in the art are included in the scope of the present invention as long as the gist of the present invention is included.

Industrial applicability

As described above, the present invention is applicable to an apparatus for measuring the surface shape of an object W, such as a three-dimensional shape measuring apparatus.