阅读说明：本技术 一种梳状滤波器 (Comb filter ) 是由 张韶华 王胜福 李宏军 汪晓龙 王小维 刘帅 周伟 张梓福 于 2019-08-26 设计创作，主要内容包括：本发明公开了一种梳状滤波器,包括：第一屏蔽层,上设有第一通孔；中间支撑层,为框架结构,设置于所述第一屏蔽层上,中间支撑层的左端设有信号输入端口,中间支撑层的右端设有信号输出端口；第二屏蔽层,上设有第二通孔,设置于中间支撑层上,与第一屏蔽层和中间支撑层共同构成电磁屏蔽腔；至少两个馈电结构,设置在中间支撑层内,馈电结构从左向右依次排列形成梳状结构,馈电结构的第一端均与中间支撑层的前端相连,馈电结构的第二端均悬空；第一个馈电结构上设有信号输入凸台,信号输入凸台在信号输入端口中,最后一个馈电结构上设有信号输出凸台,信号输出凸台在信号输出端口中。本发明结构的滤波器能适用于太赫兹频段的使用。(The invention discloses a comb filter, comprising: the first shielding layer is provided with a first through hole; the middle supporting layer is of a frame structure and is arranged on the first shielding layer, a signal input port is arranged at the left end of the middle supporting layer, and a signal output port is arranged at the right end of the middle supporting layer; the second shielding layer is provided with a second through hole, is arranged on the middle supporting layer and forms an electromagnetic shielding cavity together with the first shielding layer and the middle supporting layer; the feed structures are arranged in the middle supporting layer, the feed structures are sequentially arranged from left to right to form a comb-shaped structure, the first ends of the feed structures are connected with the front end of the middle supporting layer, and the second ends of the feed structures are suspended; the first feed structure is provided with a signal input boss in the signal input port, and the last feed structure is provided with a signal output boss in the signal output port. The filter with the structure can be suitable for the use of a terahertz frequency band.)

1. A comb filter, comprising:

the first shielding layer is provided with a first through hole;

the middle supporting layer is of a frame structure and is arranged on the first shielding layer, a signal input port is arranged at the left end of the middle supporting layer, and a signal output port is arranged at the right end of the middle supporting layer;

the second shielding layer is provided with a second through hole, is arranged on the middle supporting layer and forms an electromagnetic shielding cavity together with the first shielding layer and the middle supporting layer;

the feed structures are arranged in the middle supporting layer and are sequentially arranged from left to right to form a comb-shaped structure, the first ends of the feed structures are connected with the front end of the middle supporting layer, and the second ends of the feed structures are suspended; and a signal input boss is arranged on the first feed structure and in the signal input port, and a signal output boss is arranged on the last feed structure and in the signal output port.

2. The comb filter of claim 1, wherein the intermediate support layer comprises:

the first supporting layer is of a frame structure and is arranged on the first shielding layer;

the second supporting layer is arranged on the first supporting layer and is the same as the frame structure of the first supporting layer, the signal input port is arranged at the left end of the frame structure of the second supporting layer, the signal input port is arranged at the right end of the frame structure of the second supporting layer, the feeding structure is arranged in the second supporting layer, and the inner side surface of the second supporting layer is connected with the first end of the feeding structure;

and the third supporting layer is the same as the frame structure of the first supporting layer and is arranged on the second supporting layer.

3. The comb filter of claim 2, further comprising:

the first supporting plate is arranged between the first supporting layer and the second supporting layer and below the feed structure, and plays a supporting role on the feed structure;

the second supporting plate is arranged between the first supporting layer and the second supporting layer, is arranged below the signal input boss and respectively plays a supporting role on the signal input boss;

and the third supporting plate is arranged between the first supporting layer and the second supporting layer, is arranged below the signal output boss and respectively plays a supporting role on the signal output boss.

4. The comb filter according to claim 3, wherein the first support layer is provided with a first groove at a position where the first support plate is provided; a second concave groove is formed in the position, where the first supporting plate is arranged, of the second supporting layer; the first concave groove and the second concave groove form an accommodating space for accommodating the first supporting plate.

5. The comb filter of claim 3, wherein the first support layer is provided with a first groove at a position where the second support plate is provided; a second concave groove is formed in the position, where the second supporting plate is arranged, of the second supporting layer; the first concave groove and the second concave groove form an accommodating space for accommodating the second support plate.

6. The comb filter according to claim 3, wherein the first support plate is disposed perpendicular to the feed structure.

7. The comb filter of claim 2, wherein the first shielding layer is a first square structure;

the second supporting layer is a first square frame structure which is the same as the first shielding layer structure, wherein the signal input port is arranged at the left end of the first square frame structure and is communicated with the first square frame structure, the signal input port is a left frame body with an opening at the left end, the signal input boss extends from the first square frame structure to the signal input port, the signal output port is arranged at the right end of the first square frame structure and is communicated with the first square frame structure, the signal output port is a right frame body with an opening at the right end, and the signal output boss extends from the square frame structure to the signal output port;

the third supporting layer is a second square frame structure which is the same as the first shielding layer structure, a first opening is arranged at the left end of the second square frame structure, the position of the first opening is above the signal input boss, a second opening is arranged at the right end of the second square frame structure, and the position of the second opening is above the signal output boss;

the first supporting layer is of a frame structure the same as that of the second supporting layer;

the second shielding layer is of a second square structure which is the same as the first shielding layer in structure, a left frame body connected with the second square structure is arranged at the left end of the second square structure, the left end of the left frame body connected with the second square structure is provided with an opening, the right end of the second square structure is provided with a right frame body connected with the second square structure, and the right end of the right frame body connected with the second square structure is provided with an opening.

8. The comb filter of claim 1, wherein the first shield layer, the middle support layer, and the second shield layer are all copper material.

Technical Field

The invention relates to the technical field of semiconductor manufacturing, in particular to a comb filter.

Background

The terahertz wave (THz) comprises an electromagnetic wave with the frequency of 0.1 to 10THz, has the wavelength range of 30 mu m-3 mm, is positioned at the high-frequency and low-frequency far infrared spectrum edge of the millimeter wave band of the electromagnetic wave, and is widely applied to the fields of communication, radar, electronic countermeasure, electromagnetic weapons, astronomy, medical imaging, nondestructive testing, safety inspection and the like. In practical application, the terahertz system needs to filter electromagnetic noise outside an unnecessary frequency range, improve the anti-interference capability and use a filter.

At present, a microstrip line planar filter is commonly used, the application range of the microstrip filter is not wide, the expansibility is not strong, the microstrip filter is mainly concentrated in a low-frequency system at present, the loss of signals is large, the system integration is difficult, and the development of the system is restricted. Therefore, a high-performance filter product suitable for a high-frequency microwave band, especially a terahertz frequency band, is urgently needed to be developed.

Disclosure of Invention

The embodiment of the invention provides a comb filter, and aims to solve the problem that the existing filter cannot meet the use requirement of a terahertz frequency band.

An embodiment of the present invention provides a comb filter, including:

the first shielding layer is provided with a first through hole;

the middle supporting layer is of a frame structure and is arranged on the first shielding layer, a signal input port is arranged at the left end of the middle supporting layer, and a signal output port is arranged at the right end of the middle supporting layer;

the second shielding layer is provided with a second through hole, is arranged on the middle supporting layer and forms an electromagnetic shielding cavity together with the first shielding layer and the middle supporting layer;

the feed structures are arranged in the middle supporting layer and are sequentially arranged from left to right to form a comb-shaped structure, the first ends of the feed structures are connected with the front end of the middle supporting layer, and the second ends of the feed structures are suspended; and a signal input boss is arranged on the first feed structure and in the signal input port, and a signal output boss is arranged on the last feed structure and in the signal output port.

In an embodiment of the present application, the intermediate support layer comprises:

the first supporting layer is of a frame structure and is arranged on the first shielding layer;

the second supporting layer is arranged on the first supporting layer and is the same as the frame structure of the first supporting layer, the signal input port is arranged at the left end of the frame structure of the second supporting layer, the signal input port is arranged at the right end of the frame structure of the second supporting layer, the feeding structure is arranged in the second supporting layer, and the inner side surface of the second supporting layer is connected with the first end of the feeding structure;

and the third supporting layer is the same as the frame structure of the first supporting layer and is arranged on the second supporting layer.

In an embodiment of the present application, further comprising:

the first supporting plate is arranged between the first supporting layer and the second supporting layer and below the feed structure, and plays a supporting role on the feed structure;

the second supporting plate is arranged between the first supporting layer and the second supporting layer, is arranged below the signal input boss and respectively plays a supporting role on the signal input boss;

and the third supporting plate is arranged between the first supporting layer and the second supporting layer, is arranged below the signal output boss and respectively plays a supporting role on the signal output boss.

In an embodiment of the application, a first concave groove is formed at a position where the first support plate is arranged on the first support layer; a second concave groove is formed in the position, where the first supporting plate is arranged, of the second supporting layer; the first concave groove and the second concave groove form an accommodating space for accommodating the first supporting plate.

In an embodiment of the application, a first concave groove is formed at a position where the second support plate is arranged on the first support layer; a second concave groove is formed in the position, where the second supporting plate is arranged, of the second supporting layer; the first concave groove and the second concave groove form an accommodating space for accommodating the second support plate.

In an embodiment of the application, the first support plate is arranged perpendicular to the feed structure.

In an embodiment of the present application, the first shielding layer is a first square structure;

the second supporting layer is a first square frame structure which is the same as the first shielding layer structure, wherein the signal input port is arranged at the left end of the first square frame structure and is communicated with the first square frame structure, the signal input port is a left frame body with an opening at the left end, the signal input boss extends from the first square frame structure to the signal input port, the signal output port is arranged at the right end of the first square frame structure and is communicated with the first square frame structure, the signal output port is a right frame body with an opening at the right end, and the signal output boss extends from the square frame structure to the signal output port;

the third supporting layer is a second square frame structure which is the same as the first shielding layer structure, a first opening is arranged at the left end of the second square frame structure, the position of the first opening is above the signal input boss, a second opening is arranged at the right end of the second square frame structure, and the position of the second opening is above the signal output boss;

the first supporting layer is of a frame structure the same as that of the second supporting layer;

the second shielding layer is of a second square structure which is the same as the first shielding layer in structure, a left frame body connected with the second square structure is arranged at the left end of the second square structure, the left end of the left frame body connected with the second square structure is provided with an opening, the right end of the second square structure is provided with a right frame body connected with the second square structure, and the right end of the right frame body connected with the second square structure is provided with an opening.

In an embodiment of the present application, the first shielding layer, the middle supporting layer, and the second shielding layer are all made of copper.

The first shielding layer, the middle supporting layer and the second shielding layer jointly form an electromagnetic shielding cavity, the middle supporting layer is internally provided with a feed structure, and the feed structures are arranged in a staggered mode to form a comb-shaped structure.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present invention, the drawings needed to be used in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to these drawings without inventive labor.

Fig. 1 is a schematic structural diagram of each layer of a comb filter according to an embodiment of the present invention;

fig. 2 is a schematic diagram of an overall structure of a comb filter according to an embodiment of the present invention;

fig. 3 is a schematic structural diagram of a feeding structure provided in an embodiment of the present invention;

fig. 4 is a schematic structural diagram of a first support plate, a second support plate and a third support plate according to an embodiment of the present invention;

fig. 5 is a schematic structural diagram of a second supporting plate according to an embodiment of the present invention.

Wherein: 1. a first shielding layer; 2. a second shielding layer; 3. a first support layer; 4. a second support layer; 5. a third support layer; 6. a feed structure; 7. a signal input boss; 8. a signal output boss; 9. a first through hole; 10. a first support plate; 11. a second support plate; 12. and a third support plate.

Detailed Description

In order to make the technical solution better understood by those skilled in the art, the technical solution in the embodiment of the present invention will be clearly described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is a part of the embodiment of the present invention, and not a whole embodiment. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present disclosure without any creative effort shall fall within the protection scope of the present disclosure.

The terms "include" and any other variations in the description and claims of this document and the above-described figures, mean "including but not limited to", and are intended to cover non-exclusive inclusions. Furthermore, the terms "first" and "second," etc. are used to distinguish between different objects and are not used to describe a particular order.

Implementations of the present invention are described in detail below with reference to the following detailed drawings:

fig. 1 to 5 illustrate a comb filter provided in an embodiment of the present invention, and for convenience of illustration, only the parts related to the embodiment of the present invention are shown, and detailed as follows:

as shown in fig. 1 to 3, an embodiment of the present invention provides a comb filter, including:

the first shielding layer 1 is provided with a first through hole 9;

the middle supporting layer is of a frame structure and is arranged on the first shielding layer 1, a signal input port is arranged at the left end of the middle supporting layer, and a signal output port is arranged at the right end of the middle supporting layer;

the second shielding layer 2 is provided with a second through hole, is arranged on the middle supporting layer and forms an electromagnetic shielding cavity together with the first shielding layer 1 and the middle supporting layer;

at least two feed structures 6 arranged in the middle support layer, wherein the feed structures 6 are sequentially arranged from left to right to form a comb-shaped structure, the first ends of the feed structures 6 are connected with the front end of the middle support layer, and the second ends of the feed structures 6 are suspended; the first feed structure 6 is provided with a signal input boss 7, the signal input boss 7 is arranged in the signal input port, the last feed structure 6 is provided with a signal output boss 8, and the signal output boss 8 is arranged in the signal output port.

In the present embodiment, the length of the feed structure 6 is λ 0/4 wavelength of the desired frequency, the thickness is 100 μm, and the width is preferably (100 μm and 600 μm) in consideration of the electrical performance and volume trade-off.

In this embodiment, the first end of the feeding structure 6 is connected to the front end of the middle supporting layer to form a short circuit structure, and the second end of the feeding structure 6 is suspended to form an open circuit structure.

In this embodiment, a certain distance is provided between two adjacent feeding structures 6, so as to control the coupling size of the filter, and the distance can be adjusted according to the specific performance of the desired product.

In the present embodiment, the distance between two adjacent first through holes 9 is 800 micrometers. The distance between two adjacent second through holes is 800 micrometers. The first and second through holes 9 and 9 function to entirely discharge the photoresist.

The first shielding layer, the middle supporting layer and the second shielding layer jointly form an electromagnetic shielding cavity, the middle supporting layer is internally provided with the feed structures, and the feed structures are arranged in a staggered mode to form a comb-shaped structure.

In the embodiment of the present invention, the size of the signal input boss 7 and the size of the signal output boss 8 are both 1000 × 200 × 100mm, so as to realize interconnection with the outside.

In an embodiment of the present invention, the feed structure 6 is copper material.

As shown in fig. 1, in an embodiment of the present invention, the intermediate support layer includes:

the first supporting layer 3 is of a frame structure and is arranged on the first shielding layer 1;

the second supporting layer 4 is arranged on the first supporting layer 3, and has the same frame structure as the first supporting layer 3, the left end of the frame structure of the second supporting layer 4 is provided with the signal input port, and the right end of the frame structure of the second supporting layer 4 is provided with the signal input port, wherein the feeding structure 6 is arranged in the second supporting layer 4, and the inner side surface of the second supporting layer 4 is connected with the first end of the feeding structure 6;

and a third support layer 5 having the same frame structure as the first support layer 3 and disposed on the second support layer 4.

In an embodiment of the present invention, the thickness of the first support layer 3, the second support layer 4, the third support layer 5, the first shield layer 1 and the second shield layer 2 are all 100 micrometers.

The first shield layer 1 and the second shield layer 2 function as signal shields. The first supporting layer 3 and the third supporting layer 5 play a role of mechanical support and electromagnetic shielding at the edge of the whole filter. The second support layer 4 is a signal transmission layer.

As shown in fig. 4-5, in the embodiment of the present invention, the method further includes:

a first support plate 10, disposed between the first support layer 3 and the second support layer 4, below the feed structure 6, for supporting the feed structure 6;

the second supporting plate 11 is arranged between the first supporting layer 3 and the second supporting layer 4, is arranged below the signal input boss 7, and respectively supports the signal input boss 7;

and the third support plate 12 is arranged between the first support layer 3 and the second support layer 4, is arranged below the signal output boss 8, and respectively supports the signal output boss 8.

In this embodiment, the first support plate 10 may be one for supporting the feeding structure 6, and may be disposed at a middle portion of the feeding structure 6 or a free end of the feeding structure 6, and is perpendicular to the feeding structure 6.

In this embodiment, the first support plates 10 may be two, one disposed at the first end of the feeding structure 6 and one disposed at the second end of the feeding structure 6, both first support plates 10 are used for supporting the feeding structure 6, and the two first support plates 10 are perpendicular to the feeding structure 6.

In the present embodiment, the second support plate 11 and the third support plate 12 have a thickness of 30 μm, a length of 560 μm, and a width of 200 μm.

In the present embodiment, the first support plate 10, the second support plate 11 and the third support plate 12 are all non-metal with low dielectric constant, and do not cause short circuit to the feeding structure 6.

In the embodiment of the present invention, a first concave groove is formed at the position where the first support plate 10 is arranged on the first support layer 3; a second concave groove is formed at the position, where the first supporting plate 10 is arranged, of the second supporting layer 4; the first concave groove and the second concave groove form an accommodating space for accommodating the first support plate 10.

In the embodiment of the present invention, a first concave groove is formed at the position where the second support plate 11 is disposed on the first support layer 3; a second concave groove is formed in the position, where the second supporting plate 11 is arranged, of the second supporting layer 4; the first concave groove and the second concave groove form an accommodation space that accommodates the second support plate 11.

In an embodiment of the invention, the first support plate 10 is arranged perpendicular to the feed structure 6.

As shown in fig. 1-2, in the embodiment of the present invention, the first shielding layer 1 has a first square structure;

the second supporting layer 4 is a first square frame structure having the same structure as the first shielding layer 1, wherein the signal input port is disposed at the left end of the first square frame structure and is communicated with the first square frame structure, the signal input port is a left frame body with an open left end, the signal input boss 7 extends from the first square frame structure to the signal input port, the signal output port is disposed at the right end of the first square frame structure and is communicated with the first square frame structure, the signal output port is a right frame body with an open right end, and the signal output boss 8 extends from the square frame structure to the signal output port;

the third supporting layer 5 is a second square frame structure with the same structure as the first shielding layer 1, a first opening is arranged at the left end of the second square frame structure, the position of the first opening is above the signal input boss 7, a second opening is arranged at the right end of the second square frame structure, and the position of the second opening is above the signal output boss 8;

the first supporting layer 3 is a frame structure with the same structure as the second supporting layer 4;

the second shielding layer 2 is of a second square structure with the same structure as the first shielding layer 1, a left frame body connected with the second square structure is arranged at the left end of the second square structure, the left end of the left frame body connected with the second square structure is provided with an opening, the right end of the second square structure is provided with a right frame body connected with the second square structure, and the right end of the right frame body connected with the second square structure is provided with an opening.

In an embodiment of the present invention, the first shielding layer 1, the middle supporting layer, and the second shielding layer 2 are all made of copper.

In the embodiment of the present invention, the edge of the first shielding layer 1 is further provided with a first groove penetrating through the upper surface of the first shielding layer 1 and the lower surface of the first shielding layer 1, and the first groove is used for discharging the photoresist.

The border on the second shielding layer 2 is also provided with a second groove which runs through the upper surface of the second shielding layer 2 and the lower surface of the second shielding layer 2, and the second groove is arranged on the first groove.

The front end and the rear end of the first supporting layer 3 are provided with third grooves which penetrate through the upper surface of the first supporting layer 3 and the lower surface of the first supporting layer 3, and the third grooves are formed in the first grooves.

The front end and the rear end of the third supporting layer 5 are provided with fourth grooves which penetrate through the upper surface of the third supporting layer 5 and the lower surface of the third supporting layer 5, and the fourth grooves are arranged on the first grooves.

The preparation process of the specific feed structure comprises the following steps:

and coating photoresist on the wafer carrier, and carrying out photoetching and developing.

Manufacturing an electroplated copper conductor layer on the wafer carrier subjected to photoetching and developing;

carrying out planarization treatment on the copper conductor layer and the photoresist;

repeating the steps to manufacture the micro coaxial grounding conductor;

manufacturing a micro coaxial inner conductor supporting medium;

and repeating photoetching, electroplating and flattening to form a complete three-dimensional micro-coaxial transmission line conductor structure.

The above-mentioned embodiments are only used for illustrating the technical solutions of the present invention, and not for limiting the same; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.