阅读说明：本技术 金属线栅偏振片与光探测设备 (Metal wire grating polaroid and light detection equipment ) 是由 陈黎暄 于 2021-07-05 设计创作，主要内容包括：本申请实施例提供一种金属线栅偏振片与光探测设备。金属线栅偏振片包括透明衬底及设于透明衬底上的金属层,金属层包括第一线栅单元、第二线栅单元,第一线栅单元包括间隔且平行设置的多根第一金属条,第二线栅单元包括间隔且平行设置的多根第二金属条；第一金属条的延伸方向与第二金属条的延伸方向不平行。当该金属线栅偏振片应用于光探测设备时,可以将第一线栅单元与第二线栅单元分别对应第一探测单元与第二探测单元设置,这样第一探测单元与第二探测单元各自检测到的偏振光的偏振方向不同,从而可以采用一个光探测设备实现多种偏振光的检测,并且,在检测过程中,不需要改变探测单元的位置或方向,使光探测设备的使用更加便捷。(The embodiment of the application provides a metal wire grid polaroid and light detection equipment. The metal wire grid polaroid comprises a transparent substrate and a metal layer arranged on the transparent substrate, wherein the metal layer comprises a first wire grid unit and a second wire grid unit, the first wire grid unit comprises a plurality of first metal strips which are arranged at intervals and in parallel, and the second wire grid unit comprises a plurality of second metal strips which are arranged at intervals and in parallel; the extending direction of the first metal strip is not parallel to the extending direction of the second metal strip. When this metal wire grid polaroid is applied to optical detection equipment, can correspond first detecting element and second detecting element setting respectively with first wire grid unit and second wire grid unit, the polarization direction of the polarized light that first detecting element and second detecting element detected respectively is different like this to can adopt an optical detection equipment to realize the detection of multiple polarized light, and, in the testing process, need not change detecting element's position or direction, make optical detection equipment's use more convenient.)

1. A metal wire grid polaroid is characterized by comprising a transparent substrate and a metal layer arranged on the transparent substrate, wherein the metal layer comprises a first wire grid unit and a second wire grid unit, the first wire grid unit comprises a plurality of first metal strips which are arranged at intervals and in parallel, and the second wire grid unit comprises a plurality of second metal strips which are arranged at intervals and in parallel; the extending direction of the first metal strip is not parallel to the extending direction of the second metal strip.

2. The wire grid polarizer of claim 1, wherein the first metal strips extend perpendicular to the second metal strips.

3. The metallic wire grid polarizer of claim 1, wherein the first wire grid cells have a different wire grid period than the second wire grid cells; and/or

The first wire grid unit and the second wire grid unit have different height-width ratios; and/or

The line widths of the first wire grid unit and the second wire grid unit are different.

4. The metallic wire grid polarizer of any one of claims 1 to 3, wherein the metallic layer further comprises third wire grid cells comprising a plurality of third metallic strips arranged in spaced and parallel relationship, wherein the first, second and third metallic strips do not extend in parallel.

5. The wire grid polarizer of claim 4, wherein an angle between a direction of extension of the third metal strips and a direction of extension of the first metal strips is a first acute angle, and an angle between a direction of extension of the third metal strips and a direction of extension of the second metal strips is a second acute angle.

6. The wire grid polarizer of claim 5, wherein the first acute angle is 45 degrees and the second acute angle is 45 degrees.

7. The metal wire grid polarizer according to claim 4, wherein the metal layer is provided with a plurality of the first wire grid cells, a plurality of the second wire grid cells, and a plurality of the third wire grid cells;

the plurality of first wire grid units are sequentially arranged in a first row according to a first direction, the plurality of second wire grid units are sequentially arranged in a second row according to the first direction, and the plurality of third wire grid units are sequentially arranged in a third row according to the first direction; the first row, the second row and the third row are sequentially arranged in a second direction perpendicular to the first direction.

8. The metallic wire grid polarizer according to claim 4, wherein any two of the first wire grid cell, the second wire grid cell, and the third wire grid cell have different wire grid periods; and/or

In the first wire grid unit, the second wire grid unit and the third wire grid unit, the height-width ratio of any two wire grid units is different; and/or

In the first wire grid unit, the second wire grid unit and the third wire grid unit, the wire widths of any two wire grid units are different.

9. The wire grid polarizer of claim 1, wherein the wire grid polarizer is fabricated using a nanoimprint process.

10. An optical detection device comprising a metal wire grid polarizer and a detector;

the metal wire grid polarizer is a metal wire grid polarizer according to any one of claims 1 to 9;

the detector comprises a first detection unit and a second detection unit;

the first detection unit is arranged corresponding to the first wire grid unit, and the second detection unit is arranged corresponding to the second wire grid unit.

Technical Field

The application relates to the technical field of polaroids, in particular to a metal wire grid polaroid and light detection equipment.

Background

The polarizing plate includes an absorption type polarizing plate and a reflection type polarizing plate. The absorption-type polarizing plate is a polarizing plate in which a dichroic dye such as iodine is oriented in a resin film, for example. The reflective polarizer includes a wire grid polarizer, a linear polarizer made of a birefringent resin laminate, and a circular polarizer made of cholesteric liquid crystal. However, the linearly polarizing plate and the circularly polarizing plate show low polarized light separating ability. Therefore, a wire grid type polarizing plate exhibiting a higher polarized light separating ability is receiving attention. The structure of the wire grid polarizer is as follows: when the pitch of the fine metal wires is sufficiently shorter than the wavelength of incident light, the wire grid polarizer transmits a component having an electric field vector perpendicular to the fine metal wires (i.e., p-polarized light) of the incident light, and reflects a component having an electric field vector parallel to the fine metal wires (i.e., s-polarized light).

Disclosure of Invention

The embodiment of the application provides a wire grating polaroid and optical detection equipment, and this wire grating polaroid can see through the polarized light of different polarization directions in different regions, can make the detection of light polarization information more convenient when using with the detector cooperation.

In a first aspect, an embodiment of the present application provides a metal wire grid polarizer, including a transparent substrate and a metal layer disposed on the transparent substrate, where the metal layer includes a first wire grid unit and a second wire grid unit, the first wire grid unit includes a plurality of first metal strips arranged at intervals and in parallel, and the second wire grid unit includes a plurality of second metal strips arranged at intervals and in parallel; the extending direction of the first metal strip is not parallel to the extending direction of the second metal strip.

Optionally, the extending direction of the first metal strip is perpendicular to the extending direction of the second metal strip. Optionally, the first wire grid unit and the second wire grid unit have different wire grid periods; and/or

The first wire grid unit and the second wire grid unit have different height-width ratios; and/or

The line widths of the first wire grid unit and the second wire grid unit are different.

Optionally, the metal layer further includes a third wire grid unit, the third wire grid unit includes a plurality of third metal strips arranged in parallel at intervals, and the extending directions of any two of the first metal strip, the second metal strip, and the third metal strip are not parallel.

Optionally, an included angle between the extending direction of the third metal strip and the extending direction of the first metal strip is a first acute angle, and an included angle between the extending direction of the third metal strip and the extending direction of the second metal strip is a second acute angle.

Optionally, the first acute angle is 45 degrees, and the second acute angle is 45 degrees.

Optionally, in the metal layer, the number of the first wire grid units is set to be multiple, the number of the second wire grid units is set to be multiple, and the number of the third wire grid units is set to be multiple;

the plurality of first wire grid units are sequentially arranged in a first row according to a first direction, the plurality of second wire grid units are sequentially arranged in a second row according to the first direction, and the plurality of third wire grid units are sequentially arranged in a third row according to the first direction; the first row, the second row and the third row are sequentially arranged in a second direction perpendicular to the first direction.

Optionally, in the first wire grid unit, the second wire grid unit, and the third wire grid unit, the wire grid periods of any two wire grid units are different; and/or

In the first wire grid unit, the second wire grid unit and the third wire grid unit, the height-width ratio of any two wire grid units is different; and/or

In the first wire grid unit, the second wire grid unit and the third wire grid unit, the wire widths of any two wire grid units are different.

Optionally, the metal wire grid polarizer is prepared by a nanoimprint process.

In a second aspect, an embodiment of the present application provides an optical detection apparatus, including a metal wire grid polarizer and a detector;

the metal wire grid polarizer is the metal wire grid polarizer described above;

the detector comprises a first detection unit and a second detection unit;

the first detection unit is arranged corresponding to the first wire grid unit, and the second detection unit is arranged corresponding to the second wire grid unit.

The utility model provides a metal wire grid polaroid, including first wire grid unit and second wire grid unit, and the wire grid direction of first wire grid unit and second wire grid unit is different, when this metal wire grid polaroid is applied to optical detection equipment, can correspond first detecting element and second detecting element setting respectively with first wire grid unit and second wire grid unit, the polarization direction of the polarized light that first detecting element and second detecting element detected respectively is different like this, thereby can adopt a optical detection equipment to realize the detection of multiple polarized light, and, in the testing process, need not change detecting element's position or direction, make optical detection equipment's function stronger, it is more convenient to use.

Drawings

In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings used in the description of the embodiments will be briefly introduced below. It is obvious that the drawings in the following description are only some embodiments of the application, and that for a person skilled in the art, other drawings can be derived from them without inventive effort.

Fig. 1 is a schematic diagram of a first-angle structure of a metal wire grid polarizer according to an embodiment of the present disclosure.

Fig. 2 is an enlarged structural view of a first wire grid cell in the metal wire grid polarizer of fig. 1.

Fig. 3 is a schematic perspective view of a first wire grid cell in the metal wire grid polarizer of fig. 1.

Fig. 4 is an enlarged structural view of a second wire grid cell in the metal wire grid polarizer of fig. 1.

Fig. 5 is an enlarged structural view of a third wire grid cell in the metal wire grid polarizer of fig. 1.

Fig. 6 is a second angle structural diagram of a metal wire grid polarizer according to an embodiment of the present disclosure.

Fig. 7 is a schematic structural diagram of a first angle of a light detection device according to an embodiment of the present application.

Fig. 8 is a schematic structural diagram of a second angle of the optical detection apparatus according to the embodiment of the present application.

Detailed Description

The technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application. It is to be understood that the embodiments described are only a few embodiments of the present application and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application.

Referring to fig. 1, fig. 1 is a schematic view illustrating a first-angle structure of a metal wire grid polarizer according to an embodiment of the present disclosure. The metal wire grid polarizer 110 may include a transparent substrate 10 and a metal layer 20 disposed on the transparent substrate 10, wherein the metal layer 20 includes a first wire grid unit 21 and a second wire grid unit 22, the first wire grid unit 21 includes a plurality of first metal strips 211 disposed at intervals and in parallel, and the second wire grid unit 22 includes a plurality of second metal strips 221 disposed at intervals and in parallel; the extending direction of the first metal strip 211 is not parallel to the extending direction of the second metal strip 221.

Given that the metal wire grid polarizer can transmit the incident light with the polarization direction perpendicular to the wire grid direction (the extending direction of the metal strips), and reflect the incident light with the polarization direction parallel to the wire grid direction, the embodiment of the present application sets the extending direction of the first metal strips 211 and the extending direction of the second metal strips 221 to be different directions, so that the polarization directions of the polarized lights selectively transmitted by the first wire grid unit 21 and the second wire grid unit 22 are different, that is, when a bundle of lights with multiple polarization directions passes through the metal wire grid polarizer 110 of the embodiment of the present application, the polarization directions of the lights transmitted from the first wire grid unit 21 and the second wire grid unit 22 are different from each other. When the metal wire grid polarizer 110 is applied to the light detection device 100, the first wire grid unit 21 and the second wire grid unit 22 can be respectively arranged corresponding to the first detection unit 41 and the second detection unit 42, so that the polarization directions of the polarized light detected by the first detection unit 41 and the second detection unit 42 are different, and thus, the detection of multiple polarized lights can be realized by adopting one light detection device 100, and in the detection process, the position or the direction of the detection unit does not need to be changed, so that the light detection device 100 has stronger functions and is more convenient to use.

Referring to fig. 2 and 4, fig. 2 is an enlarged schematic view of a first wire grid unit in the metal wire grid polarizer of fig. 1, and fig. 4 is an enlarged schematic view of a second wire grid unit in the metal wire grid polarizer of fig. 1. The extending direction of the first metal strip 211 may be perpendicular to the extending direction of the second metal strip 221. Thus, the polarization direction of the polarized light transmitted from the first wire grid cell 21 is also perpendicular to the polarization direction of the polarized light transmitted from the second wire grid cell 22.

Referring to fig. 3, fig. 3 is a schematic perspective view illustrating a first wire grid unit in the metal wire grid polarizer of fig. 1. In the first wire grid unit 21, the widths (L) of the first metal strips 211 are equal, the heights (H) of the first metal strips 211 are equal, and the first metal strips 211 are uniformly arranged at intervals, that is, the widths (S) of the intervals between every two first metal strips 211 are equal. Illustratively, in the first grid unit 21, L is 50nm, S is 50nm, H is 100nm, the grid period P is L + S is 100nm, the duty ratio is L/L + S is 0.5, and the aspect ratio is H/L is 2.

In some embodiments, in the second wire grid unit 22, the widths (L) of the plurality of second metal strips 221 are equal, the heights (H) of the plurality of second metal strips 221 are equal, and the plurality of second metal strips 221 are uniformly spaced, that is, the widths (S) of the spaces between every two second metal strips 221 are equal. Illustratively, in the second wire grid unit 22, L is 50nm, S is 50nm, H is 100nm, the wire grid period P is L + S is 100nm, the duty ratio is L/L + S is 0.5, and the aspect ratio is H/L is 2.

Referring to fig. 6, fig. 6 is a schematic diagram illustrating a second-angle structure of a metal wire grid polarizer according to an embodiment of the present disclosure. The wire grid periods (P) of the first wire grid cells 21 and the second wire grid cells 22 may be different.

Referring to fig. 6, the aspect ratio (H/L) of the first gate line cell 21 and the second gate line cell 22 may be different. It is known that the larger the aspect ratio, the higher the degree of polarization of the wire grid unit, and therefore, when the duty ratios of a plurality of wire grid units are the same and the aspect ratios are different from each other, the degrees of polarization of the respective wire grid units are different. The degree of polarization (transmitted vertically polarized light-transmitted parallel polarized light)/(transmitted vertically polarized light + transmitted parallel polarized light), the vertically polarized light is polarized light having a polarization direction perpendicular to the direction of the wire grid, and the parallel polarized light is polarized light having a polarization direction parallel to the direction of the wire grid. When the transmitted vertically polarized light is equal to the transmitted parallel polarized light, the degree of polarization is equal to 0, indicating that the polarization performance of the wire grid polarizer is very poor, and when the transmitted parallel polarized light is 0, the degree of polarization is 100%, indicating that the polarization performance of the wire grid polarizer is very good.

Referring to fig. 6, the line widths of the first gate line unit 21 and the second gate line unit 22 may be different. It is understood that the line width refers to the width (L) of the metal strip.

Referring to fig. 5 in conjunction with fig. 1, fig. 5 is an enlarged structural diagram of a third wire grid unit in the metal wire grid polarizer of fig. 1. The metal layer 20 may further include a third wire-grid unit 23, the third wire-grid unit 23 includes a plurality of third metal strips 231 arranged in parallel at intervals, and the extending directions of any two of the first metal strip 211, the second metal strip 221, and the third metal strip 231 are not parallel.

In some embodiments, an angle between the extending direction of the third metal strip 231 and the extending direction of the first metal strip 211 is a first acute angle, and an angle between the extending direction of the third metal strip 231 and the extending direction of the second metal strip 221 is a second acute angle. Illustratively, the first acute angle is 45 degrees and the second acute angle is 45 degrees; alternatively, the first acute angle is 30 degrees and the second acute angle is 60 degrees; alternatively, the first acute angle is 60 degrees and the second acute angle is 30 degrees.

It is understood that the metal layer 20 may include other wire grid units, such as a fourth wire grid unit, a fifth wire grid unit, a sixth wire grid unit, etc., besides the first wire grid unit 21, the second wire grid unit 22, and the third wire grid unit 23, and the other wire grid units may be different from the first wire grid unit 21, the second wire grid unit 22, and the third wire grid unit 23 in terms of wire grid direction, wire grid period, aspect ratio, wire width, etc.

Referring to fig. 1, in the metal layer 20, the number of the first wire-gate cells 21 may be set to be plural, the number of the second wire-gate cells 22 may be set to be plural, and the number of the third wire-gate cells 23 may be set to be plural.

The plurality of first wire grid units 21 are sequentially arranged in a first row according to a first direction X, the plurality of second wire grid units 22 are sequentially arranged in a second row according to the first direction X, and the plurality of third wire grid units 23 are sequentially arranged in a third row according to the first direction X; the first row, the second row and the third row are sequentially arranged in a second direction Y perpendicular to the first direction X. Exemplarily, the first wire grid unit 21, the second wire grid unit 22, and the third wire grid unit 23 are correspondingly disposed in the second direction Y, and referring to fig. 1, it can be seen that the plurality of first wire grid units 21, the plurality of second wire grid units 22, and the plurality of third wire grid units 23 are arranged in an array on the transparent substrate 10.

In this application, plural refers to two or more, such as three, four, five, six, seven, eight, and so on.

In other embodiments, the number of the first wire grid cells 21 may be set to 1, the number of the second wire grid cells 22 may be set to 1, and the number of the third wire grid cells 23 may be set to 1.

In some embodiments, in the third wire-grid unit 23, the widths (L) of the plurality of third metal strips 231 are equal, the heights (H) of the plurality of third metal strips 231 are equal, and the plurality of third metal strips 231 are uniformly spaced, that is, the widths (S) of the spaces between every two third metal strips 231 are equal. Illustratively, in the third wire-grid unit 23, L is 50nm, S is 50nm, H is 100nm, the wire-grid period P is L + S is 100nm, the duty ratio is L/L + S is 0.5, and the aspect ratio is H/L is 2.

Referring to fig. 6, in the first wire grid unit 21, the second wire grid unit 22, and the third wire grid unit 23, the wire grid periods of any two wire grid units may be different.

Referring to fig. 6, in the first wire grid unit 21, the second wire grid unit 22 and the third wire grid unit 23, the aspect ratio of any two wire grid units may be different.

In some embodiments, the line widths of any two of the first, second, and third wire grid cells 21, 22, and 23 are different.

Illustratively, the material of the metal layer 20 may include one or more of aluminum, silver, chromium, magnesium, and nickel.

Illustratively, the material of the transparent substrate 10 may be glass, Polyimide (PI), or Polymethylmethacrylate (PMMA).

The metal wire grid polarizer 110 according to the embodiment of the present application may be manufactured by a Nano-imprint Lithography (NIL) process, which breaks through the difficulty of conventional photolithography in the process of reducing the feature size, and has the characteristics of high resolution, low cost, and high yield. Nanoimprint technology has been widely used in the fields of semiconductor manufacturing, Micro-Electro-Mechanical systems (MEMS), biochips, biomedicine, and the like. The basic idea behind NIL is to transfer a pattern through a stencil onto a corresponding substrate, typically a thin polymer film, which is structurally hardened by heat pressing or irradiation to leave the transferred pattern. The whole process comprises two processes of stamping and pattern transfer. The NIL can be largely classified into three photolithography techniques of thermoplastic (Hot embossing), ultraviolet curing UV (ultraviolet curing), and Micro contact printing (uCP) according to the imprint method.

Referring to fig. 7 and fig. 8, in conjunction with fig. 1, fig. 2, fig. 4, fig. 5, and fig. 6, fig. 7 is a schematic structural diagram of a first angle of an optical detection apparatus according to an embodiment of the present disclosure, and fig. 8 is a schematic structural diagram of a second angle of the optical detection apparatus according to the embodiment of the present disclosure. The light detection device 100 can include a metallic wire grid polarizer 110 and a detector 120. The metal wire grid polarizer 110 can be the metal wire grid polarizer 110 described in any of the embodiments above.

When the metal layer 20 includes the first wire grid unit 21 and the second wire grid unit 22, the detector 120 includes a first detection unit 41 and a second detection unit 42, the first detection unit 41 is disposed corresponding to the first wire grid unit 21, and the second detection unit 42 is disposed corresponding to the second wire grid unit 22. Since the polarization direction of the polarized light transmitted from the first wire grid unit 21 is different from the polarization direction of the polarized light transmitted from the second wire grid unit 22, the polarization directions of the polarized light detected by the first detection unit 41 and the second detection unit 42 are different, so that the detection of two polarized lights can be realized by using one light detection device 100, and in the detection process, the position or direction of the detection unit does not need to be changed, so that the light detection device 100 has stronger functions and is more convenient to use.

When the polarization information of light is detected by the existing optical detection device, the polarizer needs to be turned over to obtain polarized light with different polarization directions, and when the polarization information of light is detected by the optical detection device 100 according to the embodiment of the present application, the metal wire grid polarizer 110 does not need to be rotated, so that the use is more convenient.

When the metal layer 20 further includes the third wire-grid cell 23, the detector 120 may further include a third detection unit 43, and the third detection unit 43 is disposed corresponding to the third wire-grid cell 23. Since the polarization direction of the polarized light transmitted through the first wire grid cell 21, the polarization direction of the polarized light transmitted through the second wire grid cell 22, and the polarization direction of the polarized light transmitted through the third wire grid cell 23 are different from each other, the polarization directions of the polarized light detected by the first detecting unit 41, the second detecting unit 42, and the third detecting unit 43 are different from each other, so that the detection of three kinds of polarized light can be realized with one light detecting apparatus 100.

It is understood that the first detecting unit 41, the second detecting unit 42 and the third detecting unit 43 may be arranged to be the same or different.

Exemplarily, the detector 120 may further include a substrate 30, and the first detection unit 41, the second detection unit 42, and the third detection unit 43 are disposed on the substrate 30.

For example, the detector 120 may be a multi-polarization degree information separation detection device, and the detector 120 may effectively distinguish the ratio, intensity, corresponding wavelength, and the like of different polarization components of incident light.

The optical detection device 100 of the embodiment of the application can be applied to the fields of CCD imaging, cameras, laser detection and the like, and has a function of assisting in acquiring optical information.

The metal wire grid polarizer and the light detection device provided by the embodiment of the present application are described in detail above. The principles and implementations of the present application are described herein using specific examples, which are presented only to aid in understanding the present application. Meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.