阅读说明：本技术 对象体研磨装置及对象体研磨方法 (Object polishing apparatus and object polishing method ) 是由 张道祥 洪侊杓 于 2018-07-26 设计创作，主要内容包括：本发明公开一种对象体研磨装置及对象体研磨方法。所述对象体研磨装置包括：工作台,其能够移动且能够用于配置对象体；研磨单元,其可旋转地位于工作台上,具有外壳部、设置于外壳部内且利用至少一个永磁铁向供应到对象体上的磁流变流体施加磁场以整列磁流变流体的磁场发生部及与磁场发生部相邻且利用电磁铁将永磁铁的磁场限制在外壳部内部的磁场限制部；磁流变流体供应部,其能够向对象体上供应磁流变流体；以及研磨液供应部,其向磁流变流体与对象体之间供应研磨用研磨液。因此,能够将大面积的对象体整体研磨均匀。(The invention discloses an object grinding device and an object grinding method. The object grinding device includes: a movable table on which an object can be placed; a grinding unit rotatably positioned on the worktable and having a housing part, a magnetic field generating part disposed in the housing part and applying a magnetic field to the magnetorheological fluid supplied to the object by at least one permanent magnet to align the magnetorheological fluid, and a magnetic field restricting part adjacent to the magnetic field generating part and restricting the magnetic field of the permanent magnet inside the housing part by the electromagnet; a magnetorheological fluid supply unit capable of supplying a magnetorheological fluid to an object; and a polishing liquid supply unit for supplying a polishing liquid between the magnetorheological fluid and the target body. Therefore, the entire object having a large area can be uniformly polished.)

1. An object grinding apparatus, comprising:

a movable table on which an object can be placed;

a grinding unit rotatably disposed on the table, and including a housing portion, a magnetic field generating portion disposed in the housing portion and configured to apply a magnetic field to the magnetorheological fluid supplied to the object by at least one permanent magnet to align the magnetorheological fluid, and a magnetic field restricting portion adjacent to the magnetic field generating portion and configured to restrict the magnetic field of the permanent magnet within the housing portion by the electromagnet;

a magnetorheological fluid supply unit capable of supplying the magnetorheological fluid onto the object; and

and a polishing liquid supply unit configured to supply a polishing liquid between the magnetorheological fluid and the target body.

2. The object grinding apparatus according to claim 1, wherein:

the permanent magnet includes a plurality of permanent magnets arranged in a horizontal direction.

3. The object abrading device according to claim 1, wherein the abrading unit further comprises:

a yoke supporting the permanent magnet and the electromagnet; and

a magnetic field passage portion that functions as a magnetic field passage between the permanent magnet and the electromagnet.

4. The object grinding apparatus according to claim 3, wherein:

the permanent magnet includes a plurality of permanent magnets arranged to have the same polarity with a yoke portion extending in a vertical direction interposed therebetween.

5. The object grinding apparatus according to claim 4, wherein:

the plurality of permanent magnets are respectively in the shape of annular rings and are arranged in a concentric circle shape.

6. The object grinding apparatus according to claim 1, wherein:

the permanent magnets are vertically arranged such that different polarities of the permanent magnets alternate.

7. The object abrading device according to claim 1, wherein the abrading unit further comprises:

a rotating shaft;

a slip ring surrounding the rotating shaft; and

and a power supply unit for supplying power to the electromagnet.

8. The object polishing apparatus according to claim 1, wherein the polishing liquid supply unit includes:

a polishing liquid storage tank for storing the polishing liquid;

a pump for pumping the polishing liquid from the polishing liquid storage tank to the object; and a stirrer for stirring the polishing liquid recovered from the object in the polishing liquid storage tank.

9. A method of grinding an object, comprising:

disposing the object on a movable table;

a step of applying a magnetic field to the magnetorheological fluid supplied to the object body with a permanent magnet to align the magnetorheological fluid;

supplying a polishing slurry between the magnetorheological fluid and the object to polish the object;

a step of limiting a magnetic field of the permanent magnet by turning on/off a power supply applied to an electromagnet adjacent to the permanent magnet; and

the step of releasing the magnetorheological fluid from the permanent magnet during the step of restricting the magnetic field of the permanent magnet.

10. The object grinding method according to claim 9, wherein the step of grinding the object comprises:

a step of turning off the power supply to the electromagnet so that a magnetic field is formed around the permanent magnet.

11. The object grinding method of claim 9, wherein the step of limiting the magnetic field of the permanent magnet comprises:

a step of turning on power applied to the electromagnet.

12. The object grinding method of claim 11, wherein the step of limiting the magnetic field of the permanent magnet comprises:

and arranging polarities of the permanent magnets according to polarities of the electromagnets to form a magnetic field ring inside.

Technical Field

Embodiments of the present invention relate to an object polishing apparatus and an object polishing method. And more particularly, to an object polishing apparatus and an object polishing method capable of polishing an edge or a surface of an object using a magnetorheological fluid.

Background

Magnetorheological fluids are sensitive substances that have a reaction speed of a few milliseconds when a magnetic field is applied. The magnetorheological fluid is formed by mixing carbonyl iron (carbonyl iron) and a non-magnetic transfer fluid (carrier fluid) for dispersing carbonyl iron powder.

The magnetorheological fluids find application in a variety of fields, particularly in the fields of dampers (dampers), grinding (polising), and the like.

In the conventional mechanical polishing apparatus and polishing method, a polishing sheet polishes an object while pressurizing a surface of the object with a relatively high pressure. Therefore, there may be a case where a scratch occurs on the surface of the object or the object is damaged by residual stress.

To solve these problems, a wheel-shaped member is rotated at a predetermined speed by a magnetorheological fluid grinding apparatus, and a magnetorheological fluid is applied thereon so as to be simultaneously rotated. Here, a slurry (slurry) is supplied between the object and the magnetorheological fluid. Therefore, a shearing force occurs as the polishing liquid contacts the surface of the object, thereby performing a polishing process.

However, the existing grinding method using magnetorheological fluid may be limited by the shape of the object, and a large amount of engineering time is required for uniformly grinding the whole object with a large area. Further, when the magnetic field is formed by the electromagnet, the structure for driving the electromagnet is complicated, and there is a problem in that heat is generated.

Disclosure of Invention

Technical problem

Embodiments of the present invention provide an object polishing apparatus capable of uniformly polishing an entire object having a large area.

Embodiments of the present invention provide a method for polishing an object, which can uniformly polish the entire object having a large area.

Technical scheme

An object polishing apparatus according to an embodiment of the present invention for achieving the above object includes: a movable table on which an object can be placed; a grinding unit rotatably disposed on the table, and including a housing portion, a magnetic field generating portion disposed in the housing portion and configured to apply a magnetic field to the magnetorheological fluid supplied to the object by at least one permanent magnet to align the magnetorheological fluid, and a magnetic field restricting portion adjacent to the magnetic field generating portion and configured to restrict the magnetic field of the permanent magnet within the housing portion by the electromagnet; a magnetorheological fluid supply unit capable of supplying the magnetorheological fluid onto the object; and a polishing liquid supply unit configured to supply a polishing liquid for polishing between the magnetorheological fluid and the target body.

According to an embodiment of the present invention, the permanent magnet may include a plurality of permanent magnets arranged in a horizontal direction.

According to an embodiment of the present invention, the grinding unit may further include: a yoke supporting the permanent magnet and the electromagnet; and a magnetic field passage portion that functions as a magnetic field passage between the permanent magnet and the electromagnet.

Here, the plurality of permanent magnets are arranged so as to have the same polarity with a yoke portion extending in the vertical direction interposed therebetween.

The plurality of permanent magnets may be arranged in a concentric circle shape, each having a ring shape.

According to one embodiment of the invention, the permanent magnets are vertically arranged in an alternating configuration of different polarities of permanent magnets.

According to an embodiment of the present invention, the grinding unit may further include: a rotating shaft; a slip ring surrounding the rotating shaft; and a power supply unit that supplies power to the electromagnet.

According to an embodiment of the present invention, the slurry supply part may include: a polishing liquid storage tank for storing the polishing liquid; a pump for pumping the polishing liquid from the polishing liquid storage tank to the object; and a stirrer for stirring the polishing liquid recovered from the object in the polishing liquid storage tank.

According to an embodiment of the present invention for achieving the above object, after the object is disposed on the movable table, a magnetic field is applied to the magnetorheological fluid supplied to the object by using the permanent magnet to align the magnetorheological fluid. Thereafter, a polishing slurry is supplied between the magnetorheological fluid and the object to polish the object, and a magnetic field of the permanent magnet is limited by turning on/off a power supply applied to an electromagnet adjacent to the permanent magnet. Thereafter, the magnetorheological fluid is released from the permanent magnet during the limiting of the magnetic field of the permanent magnet.

According to one embodiment of the present invention, a magnetic field may be formed around the permanent magnet by turning off the power applied to the electromagnet during the grinding of the object.

According to one embodiment of the invention, the power supply to the electromagnet is switched on in order to limit the magnetic field of the permanent magnet.

Here, in order to limit the magnetic field of the permanent magnet, the polarities of the permanent magnets may be arranged according to the polarities of the electromagnets to form a magnetic field loop inside.

Technical effects

According to the object polishing apparatus and the polishing method of the embodiments of the present invention, since the electromagnet and the permanent magnet can be arranged horizontally or vertically to be coupled, the object having a large area can be uniformly polished as a whole.

In particular, on the one hand, a permanent magnet is used to apply a magnetic field to the magnetorheological fluid, and on the other hand, an electromagnet can be used to release the magnetic field from the magnetorheological fluid. Therefore, the structure of the object polishing apparatus can be simplified and power consumption can be reduced.

Drawings

FIG. 1 is a view illustrating a configuration of an object polishing apparatus according to an embodiment of the present invention;

FIG. 2 is a sectional view for explaining the polishing unit of FIG. 1;

FIGS. 3a and 3b are sectional views for explaining a magnetic field generated by the polishing unit of FIG. 1;

FIG. 4 is a view illustrating the structure of an object polishing apparatus according to an embodiment of the present invention;

FIG. 5 is a sectional view for explaining the magnetic field generating section of FIG. 4;

fig. 6 is a flowchart illustrating a method of polishing an object according to an embodiment of the present invention.

Description of the reference numerals

100. 200: object polishing apparatus 110, 210: working table

130. 245: the grinding unit 150: polishing liquid supply part

170: magnetorheological fluid supply

Detailed Description

Embodiments of the present invention will be specifically described below with reference to the accompanying drawings. However, the present invention is not necessarily limited to the example configurations described below, and may be embodied in various forms other than these. The following examples are provided to fully convey the scope of the invention to those skilled in the art of the present invention, and are not provided solely to enable the full practice of the invention.

When an embodiment of the present invention describes that one element is disposed or connected to another element, the element may be directly disposed or connected to the other element, or another element may be interposed therebetween. Alternatively, when an element is referred to as being directly arranged or connected to another element, there may be no other element therebetween. The terms first, second, third, etc. may be used to describe various items such as elements, components, regions, layers and/or sections, but the items are not limited by these terms.

The terminology used in the embodiments of the present invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. In addition, unless otherwise defined, terms including technical and scientific terms are intended to have the same meaning as commonly understood by one of ordinary skill in the art. Dictionary-defined terms that are commonly used should be construed to have meanings consistent with the context of this specification and should not be construed to have odd or excessive formal meanings unless expressly defined herein.

Embodiments of the invention are described below with reference to the general drawings showing preferred embodiments of the invention. In this case, variations from the shapes shown in the figures, for example variations in the production method and/or the permissible tolerances, are fully conceivable. Accordingly, embodiments of the present invention are not described in the specific shapes of regions illustrated in the drawings, but include deviations in shapes that are illustrated for simplicity, are not intended to illustrate the precise shapes, and are not intended to limit the present invention.

Fig. 1 is a configuration diagram illustrating an object polishing apparatus according to an embodiment of the present invention, and fig. 2 is a sectional view illustrating a polishing unit of fig. 1.

Referring to fig. 1 and 2, an object polishing apparatus 100 according to an embodiment of the present invention includes a table 110, a polishing unit 130, a slurry supply unit 150, and a magnetorheological fluid supply unit 170. The object polishing apparatus 100 may polish the surface or the side of the object 10 by applying stress and shear force to the object 10 using a magnetorheological fluid (magnetorheological fluid) capable of controlling flow characteristics such as viscosity, fluidity, and the like by an applied magnetic field. The object 10 may include a plate material having a plate shape, such as a glass substrate, a semiconductor substrate, a printed circuit board, or the like.

The table 110 supports the object 10. That is, the object 10 may be disposed on one surface of the table 110. In order to fix the object 10 to the table 110, a vacuum force or an electrostatic force may be used. Alternatively, a fixing member such as a clamp provided on one surface of the table 110 may be used.

The table 110 is provided to be movable. For example, the table 110 is movable in the horizontal direction, i.e., the X direction and the Y direction. For this, a table driving part (not shown) may be additionally provided for moving the table 110. The work table 110 can be horizontally moved with respect to the grinding unit 130.

The grinding unit 130 is located on the work table 110. The grinding unit 130 is provided to be rotatable. The polishing unit 130 can polish the object with the polishing liquid while rotating.

The grinding unit 130 includes a housing portion (not shown), a magnetic field generating portion 131, and a magnetic field restricting portion 136.

The housing portion entirely surrounds the magnetic field generating portion 131 and the magnetic field limiting portion 136, and provides a space therein.

The magnetic field generating part 131 is located within the housing part. The magnetic field generating unit 131 includes at least one permanent magnet 133a, 133 b. Thus, the permanent magnets 133a, 133b can provide a magnetic field to the magnetorheological fluid. As a result, the magnetic field generating unit 131 includes the permanent magnets 133a and 133b, and thus an iron core such as a conventional electromagnet, a coil, and a power supply unit for supplying power along the coil can be omitted. That is, the magnetic field generating unit 131 includes the permanent magnets 133a and 133b instead of the electromagnets, and thus not only is the structure relatively simple, but also the power efficiency can be improved.

The magnetic field generating unit 131 includes permanent magnets 133a and 133b that permanently generate a magnetic field. Therefore, the permanent magnets 133a, 133b can apply a magnetic field to the magnetorheological fluid. The permanent magnets 133a, 133b will be described in detail later.

The magnetic field confining portion 136 is located within the housing portion. The magnetic field limiting unit 136 is disposed adjacent to the magnetic field generating unit 131. The magnetic field restricting portion 136 includes an electromagnet.

Fig. 3a and 3b are cross-sectional views for explaining a magnetic field generated by the polishing unit of fig. 1.

Referring to fig. 3a, when no current flows through the coil of the electromagnet, the magnetic field limiting part 136 does not affect the magnetic field generating part 131. Therefore, the magnetic fields are independently generated around the permanent magnets 133a and 133b included in the magnetic field generating unit 131. Here, the magnetic field is applied to the magnetorheological fluid, which changes from a newtonian fluid state to a very strong semi-solid (semi-solid) state. Thus, the viscosity and yield stress of the magnetorheological fluid can be increased by a factor of several to tens of times.

Referring to fig. 3b, when a current flows in the coil of the electromagnet 138, the magnetic field restricting portion 136 restricts the magnetic field of the permanent magnets 133a and 133b in the inside of the housing portion. That is, when the magnetic field applied to the magnetorheological fluid by the permanent magnets 133a and 133b needs to be released, the current flows through the electromagnet 138 included in the magnetic field restricting portion 136. At this time, interference occurs between the permanent magnets 133a and 133b and the electromagnet 138, so that the magnetic field forms a magnetic field loop in the housing portion, and the magnetic field applied to the magnetorheological fluid is released (see fig. 3 b).

According to an embodiment of the present invention, the grinding unit 130 may further include a yoke 141 and a magnetic field passage 143.

Referring again to fig. 2, the yoke 141 supports the permanent magnets 133a, 133b and the electromagnet 138 within the housing portion. The yoke 141 functions as a passage for magnetic flux. The yoke 141 includes a plurality of pawls extending in a vertical direction.

The magnetic field passage portion 143 is connected to the yoke portion 141. The electromagnet 138 is disposed so as to surround the magnetic field passage portion 143. The permanent magnets 133a and 133b may be arranged between the pawls in a horizontal direction. Therefore, the magnetic field path portion 143 can function as a magnetic field path between the permanent magnets 133a and 133b and the electromagnet 138.

Here, the polarities of the permanent magnets 133a and 133b arranged between the yokes may be set to have the same polarity with respect to the yoke 141, particularly, with respect to the yokes as the center. Therefore, a magnetic field surrounding the permanent magnets 133a and 133b is formed along the extension direction of the permanent magnets 133a and 133 b. As a result, the magnetic field is applied to the magnetorheological fluid, enabling adjustment of the flow characteristics of the magnetorheological fluid.

The permanent magnets 133a and 133b have a shape of a ring (doughmut), respectively, and may be arranged in a concentric circle form.

According to an embodiment of the present invention, the polishing unit 130 may further include a rotating shaft 145, a slip ring (slip ring)146, and a power supply 147.

The rotation shaft 145 is connected to the magnetic force generating unit 131 and the magnetic force restricting unit 136. The rotation shaft 145 is rotated together with the magnetic force generating unit 131 and the magnetic force restricting unit 136.

The slip ring 146 is disposed to surround the rotating shaft 145. The slip ring 146 can supply power while preventing the wire of the power supply portion 147 from being twisted when the rotation shaft 145 rotates.

The power supply portion 147 can provide the rotational force of the rotational shaft 145. Also, the power supply portion 147 can cause a current to flow in the magnetic field restricting portion 136 having the electromagnet 138 (see fig. 2) to generate a magnetic field.

The polishing liquid supply unit 150 supplies polishing liquid to a space between the magnetorheological fluid and the object 10. The polishing liquid supply unit 150 may recover the polishing liquid discharged after polishing the object 10 and reuse the recovered polishing liquid.

The magnetorheological fluid supply part 170 supplies the magnetorheological fluid to the object 10. The magnetorheological fluid supplied to the object 10 may be applied with a magnetic field generated from the permanent magnets 133a, 133 b.

For example, the magnetorheological fluid may include carbonyl iron powder. Therefore, when a magnetic field is applied to the magnetorheological fluid, the magnetorheological fluid may be changed into a columnar chain structure. Here, the polishing slurry is interposed between the magnetorheological fluid and the object 10. The magnetorheological fluid functions as a soft abrasive sheet.

According to an embodiment of the present invention, the polishing unit 130 includes a magnetic field generating portion 131 having permanent magnets 133a and 133b and a magnetic field restricting portion 136 capable of restricting the magnetic field generated by the permanent magnets 133a and 133b in the housing portion by an electromagnet 138. Therefore, when the magnetic field is released by the magnetic field generating unit 131 having the permanent magnets 133a and 133b when the object 10 is polished, the electromagnet 138 switches the path of the magnetic field applied to the magnetorheological fluid, and the magnetorheological fluid can be easily desorbed.

Fig. 4 is a view illustrating the structure of an object polishing apparatus according to an embodiment of the present invention, and fig. 5 is a sectional view illustrating a magnetic field generating unit of fig. 4.

Referring to fig. 4 and 5, an object polishing apparatus 200 according to an embodiment of the present invention includes a table 210, a polishing unit 245, a polishing liquid supply unit 250, and a magnetorheological fluid supply unit 270. The object polishing apparatus 200 can polish the side surface or corner of the object 20.

The polishing unit 245 is disposed at one side of the table 210. The polishing unit 245 may rotatably polish the sidewall or corner of the object 20 disposed on the table 210.

The plurality of permanent magnets 233a, 233b, 233c, 233d included in the polishing unit 245 are vertically arranged in an alternate arrangement of different polarities of the permanent magnets. Therefore, the permanent magnets 233a, 233b, 233c, 233d form a magnetic field loop along the vertical direction.

The slurry supply part 250 may include a slurry storage tank 251, a first pump 253, and a stirrer 255.

The polishing liquid storage tank 251 corresponds to a container for storing the polishing liquid. The polishing liquid maintained at a predetermined temperature can be supplied onto the object by adjusting the temperature of the polishing liquid storage tank 251.

The first pump 253 pumps the polishing liquid from the polishing liquid storage tank 251 to supply the polishing liquid to the object 20.

The agitator 255 agitates the polishing liquid recovered from the target 20 in the polishing liquid storage tank 251. This can suppress the sedimentation of polishing particles in the polishing liquid storage tank 251.

The object polishing apparatus 200 according to the embodiment of the present invention can polish the edge or the sidewall of the object 20.

Fig. 6 is a flowchart illustrating a method of polishing an object according to an embodiment of the present invention.

Referring to fig. 1 to 3b and 6, in the object polishing method according to an embodiment of the present invention, an object is disposed on a movable table (S110). Thereafter, a first magnetic field is applied to the magnetorheological fluid supplied to the object with the permanent magnet to align the magnetorheological fluid (S120).

Thereafter, a polishing slurry is supplied between the magnetorheological fluid and the object. As described above, the magnetorheological fluid functions as a polishing sheet, and the object is polished by the polishing slurry (S130).

Thereafter, by turning on/off the power supply to the electromagnet adjacent to the permanent magnet, a second magnetic field is generated by the electromagnet. As described above, the first magnetic field generated by the permanent magnet is restricted by interference between the first magnetic field and the second magnetic field (S140).

For example, a magnetic field is formed around the permanent magnet while a power supply to the electromagnet is turned off in a process of grinding the object. Therefore, the magnetorheological fluid can be aligned and the object can be polished by the polishing slurry.

In addition, during the period of limiting the magnetic field of the permanent magnet, the magnetic field formed around the permanent magnet is reduced around the magnetorheological fluid. Therefore, the magnetorheological fluid can be released from the permanent magnet (S150).

For example, to limit the magnetic field of the permanent magnet, the polarities of the permanent magnets may be arranged according to the polarities of the electromagnets to form a magnetic field loop inside. At this point the magnetic field applied to the magnetorheological fluid is reduced so that the magnetorheological fluid can be disengaged from the permanent magnets.

While the present invention has been described with reference to the preferred embodiments, it will be understood by those skilled in the art that various changes and modifications may be made without departing from the spirit and scope of the invention as defined in the claims.