阅读说明：本技术 膜片分离机构及膜片分离方法 (Diaphragm separation mechanism and diaphragm separation method ) 是由 兰立广 陈保存 姚立强 杨巍 王营营 李金龙 于 2018-06-26 设计创作，主要内容包括：本发明提供了一种膜片分离机构及膜片分离方法。其中,膜片分离机构包括：承载装置,用于承载待分离组合件,承载装置包括第一吸附区和排斥区,其中,第一吸附区能够吸合待分离组合件的第一子部件,排斥区能够将待分离组合件的第二子部件推离承载装置；柱状吸合结构,位于承载装置的上方,柱状吸合结构具有多个第二吸附区,部分或全部第二吸附区投入使用并对待分离组合件的第二子部件进行吸合,柱状吸合结构相对于承载装置运动,以实现待分离组合件的第一子部件和第二子部件之间的分离。本发明有效地解决了现有技术中膜片分离的加工效率较低,存在分离不彻底导致基底碎裂的问题。(The invention provides a membrane separation mechanism and a membrane separation method. Wherein, diaphragm separating mechanism includes: the bearing device is used for bearing the assembly to be separated and comprises a first adsorption area and a rejection area, wherein the first adsorption area can attract the first sub-component of the assembly to be separated, and the rejection area can push the second sub-component of the assembly to be separated away from the bearing device; the columnar attraction structure is positioned above the bearing device and provided with a plurality of second adsorption areas, part or all of the second adsorption areas are put into use and attract the second sub-part of the assembly to be separated, and the columnar attraction structure moves relative to the bearing device so as to realize the separation between the first sub-part and the second sub-part of the assembly to be separated. The invention effectively solves the problems of low processing efficiency of membrane separation and substrate fragmentation caused by incomplete separation in the prior art.)

1. A membrane separation mechanism, comprising:

a carrier device (10) for carrying a pack (20) to be separated, the carrier device (10) comprising a first suction zone (11) and a repulsion zone (12), wherein the first suction zone (11) is capable of attracting a first sub-part (21) of the pack (20) to be separated, and the repulsion zone (12) is capable of pushing a second sub-part (22) of the pack (20) to be separated away from the carrier device (10);

the cylindrical attracting structure (30) is positioned above the bearing device (10), the cylindrical attracting structure (30) is provided with a plurality of second adsorption areas (31), part or all of the second adsorption areas (31) are used for attracting the second sub-component (22) of the assembly (20) to be separated, and the cylindrical attracting structure (30) moves relative to the bearing device (10) so as to realize the separation between the first sub-component (21) and the second sub-component (22) of the assembly (20) to be separated.

2. The membrane separation mechanism of claim 1, further comprising:

the guide rail assembly (40) can drive the columnar suction structure (30) to move;

and the driving structure (50) is connected with the columnar attracting structure (30) and can drive the columnar attracting structure (30) to rotate around the axis of the columnar attracting structure.

3. The membrane separation mechanism of claim 1, further comprising:

the lifting structure drives the columnar suction structure (30) or the bearing device (10) to lift through the lifting structure.

4. The membrane separation mechanism according to claim 1, wherein the cylindrical attraction structure (30) comprises a cylindrical attraction piece (32), the outer surface of the cylindrical attraction piece (32) is provided with a plurality of second adsorption areas (31), the plurality of second adsorption areas (31) are arranged at intervals along the circumferential direction of the cylindrical attraction piece (32), and at any time, the second adsorption area (31) which is closest to the bearing device (10) in the plurality of second adsorption areas (31) is put into use; all the second adsorption zones (31) are put into use in sequence within a preset time.

5. The membrane separation mechanism according to claim 4, wherein the cylindrical attraction structure (30) further comprises a first vacuum-pumping assembly (33) connected to the cylindrical attraction member (32), the first vacuum-pumping assembly (33) being in communication with at least one of the second adsorption zones (31) to provide vacuum negative pressure to the second adsorption zone (31).

6. The membrane separation mechanism according to claim 5, wherein the first vacuum pumping assembly (33) comprises:

two cover bodies (331), the two cover bodies (331) are respectively connected with two end faces of the cylindrical suction piece (32);

the vacuum-pumping main pipeline (332), part of the vacuum-pumping main pipeline (332) passes through one of the cover bodies (331) and then is connected with a vacuum-pumping pump;

a plurality of vacuum-pumping branch pipelines (333) which are arranged corresponding to the plurality of second adsorption zones (31) and are connected with the vacuum-pumping main pipeline (332), and each vacuum-pumping branch pipeline (333) is communicated with the corresponding second adsorption zone (31);

and the control device is used for controlling the on-off of the vacuumizing main pipeline (332) and the vacuumizing branch pipelines (333), and different vacuumizing branch pipelines (333) are sequentially communicated with the vacuumizing main pipeline (332) within a preset time.

7. The membrane separation mechanism according to claim 6, wherein the control device comprises a plurality of switch structures, and the plurality of switch structures are arranged corresponding to the plurality of vacuum branch pipes (333) to control the on/off of the corresponding vacuum branch pipes (333) and the vacuum main pipe (332).

8. A membrane separation mechanism according to claim 1, wherein the carrier means (10) comprises:

a carrying structure (13), the first adsorption zone (11) and/or the repulsion zone (12) being arranged on the upper surface of the carrying structure (13);

a second vacuum-pumping assembly (14) arranged on the carrying structure (13), the first adsorption area (11) sucks the first sub-component (21) of the assembly (20) to be separated through the second vacuum-pumping assembly (14);

-an air intake structure (15) arranged on the carrying structure (13), the repelling zone (12) pushing the second subpart (22) of the pack (20) to be separated away from the carrying structure (13) by means of the air intake structure (15).

9. A membrane separation mechanism according to claim 1, wherein the repulsive zone (12) is located at one side of the first adsorption zone (11).

10. Membrane separation mechanism according to claim 1, wherein the repulsion zone (12) and/or the first adsorption zone (11) and/or the second adsorption zone (31) are formed by a plurality of through holes.

11. The membrane separation mechanism of claim 1, further comprising:

the collecting device (60) is positioned at the downstream position of the cylindrical attraction structure (30), the second sub-component (22) of the assembly (20) to be separated is driven to the collecting device (60) by the cylindrical attraction structure (30), the collecting device (60) is provided with a plurality of third adsorption areas (61), and part or all of the third adsorption areas (61) are put into use and attract the second sub-component (22) of the assembly (20) to be separated.

12. A membrane separation mechanism according to claim 11, wherein the collecting means (60) comprises:

a collecting structure (62), the third adsorption zone (61) being arranged on the upper surface of the collecting structure (62);

a plurality of third vacuum-pumping assemblies (63) arranged on the collecting structure (62), wherein the plurality of third vacuum-pumping assemblies (63) are arranged corresponding to a plurality of third adsorption areas (61), and the third adsorption areas (61) attract the second sub-component (22) of the assembly (20) to be separated through the third vacuum-pumping assemblies (63).

13. A membrane separation mechanism according to claim 11 or 12, wherein a plurality of said third suction areas (61) are arranged in sequence along the moving direction of said cylindrical attraction structure (30).

14. The membrane separation mechanism of claim 12, further comprising:

the pressure detection device is arranged on the columnar suction structure (30) or the bearing device (10) or the collection device (60) and is used for detecting a first pressure value between the columnar suction structure (30) and the bearing device (10); and/or

The device is used for detecting a second pressure value between the columnar suction structure (30) and the collecting device (60), and when the first pressure value reaches a first preset pressure value, the repelling zone (12) is put into use; and when the second pressure value reaches a second preset pressure value, the third vacuumizing assembly (63) is put into use.

15. A membrane separation method using the membrane separation mechanism according to any one of claims 1 to 14, the membrane separation method comprising:

step S1: placing a component (20) to be separated on a carrier (10) of the membrane separation mechanism;

step S2: the first adsorption area (11) of the bearing device (10) adsorbs a first sub-component (21) of the assembly (20) to be separated, the cylindrical adsorption structure (30) of the membrane separation mechanism is moved to the position of the bearing device (10), and the rejection area (12) of the bearing device (10) pushes at least part of a second sub-component (22) of the assembly (20) to be separated away from the bearing device (10);

step S3: and part or all of the second adsorption area (31) of the columnar attracting structure (30) is used for attracting the second sub-component (22) of the assembly (20) to be separated, and the columnar attracting structure (30) moves relative to the carrying device (10) so as to separate the first sub-component (21) and the second sub-component (22) of the assembly (20) to be separated.

16. The membrane separation method according to claim 15, wherein the step S2 includes:

step S21: opening a second vacuum-pumping assembly (14) of the carrier device (10) so that the first adsorption zone (11) sucks the first sub-component (21) of the assembly to be separated (20);

step S22: the guide rail assembly (40) of the membrane separation mechanism drives the columnar attraction structure (30) to move and move to the position of the bearing device (10);

step S23: the lifting structure of the diaphragm separating mechanism drives the columnar attracting structure (30) or the bearing device (10) to move, so that the columnar attracting structure (30) and the bearing device (10) are close to each other, the pressure detection device of the diaphragm separating mechanism detects a first pressure value between the columnar attracting structure and the bearing device, and when the first pressure value reaches a first preset pressure value, the air inlet structure (15) pushes away the second sub part (22) of the assembly to be separated (20) from the bearing device (10).

17. The membrane separation method according to claim 15, wherein the step S3 includes:

step S31: the guide rail assembly (40) of the membrane separating mechanism drives the columnar attracting structure (30) to move towards the direction of the collecting device (60) of the membrane separating mechanism, and the driving structure (50) of the membrane separating mechanism drives the columnar attracting structure (30) to rotate towards the first direction, so that the columnar attracting structure (30) drives the second sub-component (22) of the assembly to be separated (20) to move towards the collecting device (60).

18. The film separating method according to claim 17, wherein in the step S31, the direction of the moving speed V1 of the rail assembly (40) is opposite to the linear speed V2 of the contacting portion of the cylindrical pick-up structure (30) and the carrying device (10), and the value of the moving speed V1 is greater than or equal to the value of the linear speed V2.

19. A membrane separation method according to claim 17, wherein in step S31, at any time, the second adsorption zone (31) closest to the carrier device (10) is put into use, and the vacuum branch line (333) and the vacuum main line (332) of the membrane separation mechanism corresponding to the second adsorption zone (31) put into use are communicated with each other, so that the second adsorption zone (31) attracts the second sub-component (22) of the assembly to be separated (20).

20. The membrane separation method according to claim 17, further comprising, after the step S3, a step S4 of:

when the cylindrical suction structure (30) moves to the position of the collecting device (60) of the membrane separating mechanism, the third suction area (61) of the collecting device (60) is put into use and sucks the second sub-component (22) of the assembly (20) to be separated, and part or all of the second suction area (31) does not suck the second sub-component (22) of the assembly (20) to be separated any more.

21. The membrane separation method according to claim 20, wherein the step S4 further comprises:

step S41: the guide rail assembly (40) of the membrane separating mechanism drives the columnar attracting structure (30) to move towards the direction far away from the bearing device (10), and the driving structure (50) of the membrane separating mechanism drives the columnar attracting structure (30) to rotate towards the second direction opposite to the first direction, so that the second sub-component (22) of the assembly (20) to be separated is gradually attracted by the third adsorption area (61).

22. The membrane separation method according to claim 21, wherein in step S41, at any time, the control device of the membrane separation mechanism closest to the collection device (60) disconnects the vacuum branch line (333) of the membrane separation mechanism corresponding thereto from the main vacuum line (332) of the membrane separation mechanism, and each of the third adsorption zones (61) is gradually put into use in a direction opposite to the moving direction of the rail assembly (40).

23. The membrane separation method according to claim 22, wherein in step S41, the vacuum branch line (333) is disconnected from the main vacuum line (332) after the third adsorption zone (61) is put into use.

24. The membrane separation method according to claim 22, wherein in the step S41, the pressure detection device of the membrane separation mechanism detects a second pressure value between the cylindrical attraction structure (30) and the collection device (60), and when the second pressure value reaches a second preset pressure value, the third adsorption area (61) is put into use.

25. A film separating method according to claim 21, wherein in said step S41, a moving speed V3 of said guide rail assembly (40) is opposite to a linear speed V4 of a contacting portion of said cylindrical pick-up structure (30) and said collecting device (60), and a value of said moving speed V3 is less than or equal to a value of said linear speed V4.

Technical Field

The invention relates to the technical field of membrane separation, in particular to a membrane separation mechanism and a membrane separation method.

Background

Currently, among the membrane separation techniques, the lift-off technique includes mechanical lift-off, laser lift-off and wet etching lift-off. In the wet etching and stripping technique, the diaphragm needs to be separated from the substrate after wet stripping. However, due to the presence of liquid between the membrane and the substrate, a water adsorption effect is generated between the membrane and the substrate, resulting in difficulty in separation between the two.

In the prior art, the membrane and the substrate are usually separated by a manual separation mode, so that the processing efficiency is low, and the phenomenon of substrate fragmentation caused by incomplete separation exists.

Disclosure of Invention

The invention mainly aims to provide a membrane separation mechanism and a membrane separation method, and aims to solve the problems that in the prior art, the membrane separation processing efficiency is low, and the separation is incomplete, so that a substrate is cracked.

In order to achieve the above object, according to one aspect of the present invention, there is provided a membrane separation mechanism including: the bearing device is used for bearing the assembly to be separated and comprises a first adsorption area and a rejection area, wherein the first adsorption area can attract the first sub-component of the assembly to be separated, and the rejection area can push the second sub-component of the assembly to be separated away from the bearing device; the columnar attraction structure is positioned above the bearing device and provided with a plurality of second adsorption areas, part or all of the second adsorption areas are put into use and attract the second sub-part of the assembly to be separated, and the columnar attraction structure moves relative to the bearing device so as to realize the separation between the first sub-part and the second sub-part of the assembly to be separated.

Further, the membrane separation mechanism further comprises: the guide rail assembly can drive the columnar suction structure to move; and the driving structure is connected with the columnar attraction structure and can drive the columnar attraction structure to rotate around the axis of the columnar attraction structure.

Further, the membrane separation mechanism further comprises: the lifting structure drives the columnar suction structure or the bearing device to lift through the lifting structure.

Furthermore, the cylindrical suction structure comprises a cylindrical suction member, a plurality of second adsorption zones are arranged on the outer surface of the cylindrical suction member at intervals along the circumferential direction of the cylindrical suction member, and at any moment, the second adsorption zone which is closest to the bearing device is put into use; and all the second adsorption zones are put into use in sequence within a preset time.

Furthermore, the cylindrical attraction structure further comprises a first vacuumizing assembly connected with the cylindrical attraction part, and the first vacuumizing assembly is communicated with the at least one second adsorption area to provide vacuum negative pressure for the second adsorption area.

Further, the first vacuum pumping assembly comprises: the two cover bodies are respectively connected with two end faces of the cylindrical suction piece; the vacuum pumping main pipeline penetrates through one of the cover bodies and then is connected with a vacuum pumping pump; the plurality of vacuumizing branch pipelines are arranged corresponding to the plurality of second adsorption areas and connected with the vacuumizing main pipeline, and each vacuumizing branch pipeline is communicated with the corresponding second adsorption area; and the control device controls the on-off of the vacuumizing main pipeline and the vacuumizing branch pipelines, and different vacuumizing branch pipelines are communicated with the vacuumizing main pipeline in sequence within preset time.

Furthermore, the control device comprises a plurality of switch structures, and the switch structures and the vacuumizing branch pipelines are correspondingly arranged to control the on-off of the corresponding vacuumizing branch pipelines and the vacuumizing main pipeline.

Further, the bearing device comprises: the bearing structure, the first adsorption area and/or the repulsion area are arranged on the upper surface of the bearing structure; the second vacuumizing assembly is arranged on the bearing structure, and the first sub-assembly of the assembly to be separated is sucked in the first adsorption area through the second vacuumizing assembly; and the air inlet structure is arranged on the bearing structure, and the repelling area pushes the second subparts of the assembly to be separated away from the bearing structure through the air inlet structure.

Further, the repulsive zone is located at one side of the first adsorption zone.

Further, the repelling zone and/or the first adsorption zone and/or the second adsorption zone are formed by a plurality of through holes.

Further, the membrane separation mechanism further comprises: the collecting device is positioned at the downstream position of the columnar attraction structure, the second sub-component of the assembly to be separated is driven to the collecting device by the columnar attraction structure, the collecting device is provided with a plurality of third adsorption areas, and part or all of the third adsorption areas are put into use and attract the second sub-component of the assembly to be separated.

Further, the collecting device comprises: the third adsorption area is arranged on the upper surface of the collection structure; and the plurality of third vacuumizing assemblies are arranged on the collecting structure, the plurality of third vacuumizing assemblies and the plurality of third adsorption areas are correspondingly arranged, and the third adsorption areas attract the second sub-components of the assembly to be separated through the third vacuumizing assemblies.

Further, along the moving direction of the columnar suction structure, the plurality of third adsorption areas are sequentially arranged.

Further, the membrane separation mechanism further comprises: the pressure detection device is arranged on the columnar suction structure or the bearing device or the collection device and is used for detecting a first pressure value between the columnar suction structure and the bearing device; and/or the first pressure value is used for detecting a second pressure value between the columnar suction structure and the collecting device, and when the first pressure value reaches a first preset pressure value, the rejection area is put into use; and when the second pressure value reaches a second preset pressure value, the third vacuumizing assembly is put into use.

According to another aspect of the present invention, there is provided a membrane separation method using the above membrane separation mechanism, the membrane separation method including: step S1: placing the assembly to be separated on a bearing device of the membrane separation mechanism; step S2: the first adsorption area of the bearing device adsorbs the first sub-component of the assembly to be separated, the columnar adsorption structure of the membrane separation mechanism is moved to the position of the bearing device, and the rejection area of the bearing device pushes at least part of the second sub-component of the assembly to be separated away from the bearing device; step S3: and part or all of the second adsorption area of the columnar attraction structure is put into use and attracts the second sub-component of the assembly to be separated, and the columnar attraction structure moves relative to the bearing device so as to separate the first sub-component and the second sub-component of the assembly to be separated.

Further, step S2 includes: step S21: opening a second vacuumizing assembly of the bearing device to enable the first adsorption area to attract the first sub-component of the assembly to be separated; step S22: the guide rail component of the membrane separation mechanism drives the columnar suction structure to move and move to the position of the bearing device;

step S23: the lifting structure of the diaphragm separating mechanism drives the columnar attraction structure or the bearing device to move so as to enable the columnar attraction structure and the bearing device to be close to each other, the pressure detection device of the diaphragm separating mechanism detects a first pressure value between the columnar attraction structure and the bearing device, and when the first pressure value reaches a first preset pressure value, the air inlet structure pushes the second sub-component of the assembly to be separated away from the bearing device.

Further, step S3 includes: step S31: the guide rail component of the membrane separating mechanism drives the columnar attraction structure to move towards the direction of the collecting device of the membrane separating mechanism, and the driving structure of the membrane separating mechanism drives the columnar attraction structure to rotate towards the first direction, so that the columnar attraction structure drives the second sub-component of the assembly to be separated to move towards the collecting device.

Further, in step S31, the moving speed V1 of the track assembly is opposite to the linear speed V2 of the contacting portion of the column-shaped pick-up structure and the carrying device, and the moving speed V1 is greater than or equal to the linear speed V2.

Further, in step S31, at any time, the second adsorption area closest to the carrier device is put into use, and the vacuum branch pipeline and the vacuum main pipeline of the membrane separation mechanism corresponding to the second adsorption area put into use are communicated, so that the second adsorption area attracts the second sub-component of the assembly to be separated.

Further, the membrane separation method further includes step S4 after step S3: when the columnar attraction structure moves to the position of the collecting device of the membrane separating mechanism, the third adsorption area of the collecting device is put into use and attracts the second sub-part of the assembly to be separated, and part or all of the second adsorption areas do not attract the second sub-part of the assembly to be separated any more.

Further, step S4 further includes: step S41: the guide rail component of the membrane separating mechanism drives the columnar attracting structure to move towards the direction far away from the bearing device, and the driving structure of the membrane separating mechanism drives the columnar attracting structure to rotate towards a second direction opposite to the first direction, so that the second sub-component of the assembly to be separated is gradually attracted by the third adsorption area.

Further, in step S41, at any time, the control device of the membrane separation mechanism closest to the collection device disconnects the vacuum branch line of the corresponding membrane separation mechanism from the main vacuum line of the membrane separation mechanism, and each of the third adsorption zones is gradually put into use in a direction opposite to the movement direction of the guide rail assembly.

Further, in step S41, after the third adsorption zone is put into use, the evacuation branch line is disconnected from the evacuation main line.

Further, in step S41, the pressure detecting device of the diaphragm separating mechanism detects a second pressure value between the cylindrical attraction structure and the collecting device, and when the second pressure value reaches a second preset pressure value, the third adsorption area is put into use.

Further, in step S41, the moving speed V3 of the rail assembly is opposite to the linear speed V4 of the contacting portion of the column-shaped attraction structure and the collection device, and the moving speed V3 is smaller than or equal to the linear speed V4.

By applying the technical scheme of the invention, the first adsorption area of the bearing device can adsorb the first sub-component of the assembly to be separated, the exclusion area of the bearing device can push away the second sub-component of the assembly to be separated, the columnar adsorption structure drives part or all of the second adsorption area to move relative to the bearing device, and the second adsorption area can adsorb the second sub-component of the assembly to be separated so as to realize the separation of the first sub-component and the second sub-component of the assembly to be separated. In the process, the second sub-component is attracted by the second adsorption area and is driven to move relative to the first sub-component, so that the first sub-component and the second sub-component are separated more easily.

Compared with the manual membrane separation in the prior art, the membrane separation mechanism in the application solves the problems that the membrane separation in the prior art is low in processing efficiency and the separation is not thorough, so that the substrate is cracked.

Drawings

The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:

FIG. 1 shows a schematic perspective view of an embodiment of a membrane separation mechanism according to the present invention;

FIG. 2 is a schematic perspective view of the cylindrical engaging structure of the membrane separating mechanism of FIG. 1 with the cylindrical engaging member removed;

FIG. 3 is a schematic perspective view of the supporting device of the membrane separating mechanism shown in FIG. 2 after being assembled with the column-shaped attracting structure;

FIG. 4 is a schematic perspective view of the collection device of the membrane separation mechanism of FIG. 1;

FIG. 5 is a schematic perspective view of the cylindrical engaging member of the membrane separating mechanism of FIG. 1;

FIG. 6 shows a side view of the cylindrical engaging member of FIG. 5;

FIG. 7 shows a cross-sectional view A-A of the cylindrical engaging member of FIG. 6;

FIG. 8 illustrates a side view of the cylindrical engagement structure of FIG. 1 with the cover removed;

FIG. 9 shows a perspective view of the carrier of the membrane separation mechanism of FIG. 1;

FIG. 10 shows a top view of the collection device of the membrane separation mechanism of FIG. 1; and

fig. 11 shows a bottom view of the assembly to be separated in fig. 1.

Wherein the figures include the following reference numerals:

10. a carrying device; 11. a first adsorption zone; 12. a repulsive zone; 13. a load bearing structure; 14. a second vacuum pumping assembly; 15. an air intake structure; 20. an assembly to be separated; 21. a first sub-assembly; 22. a second sub-assembly; 30. a columnar suction structure; 31. a second adsorption zone; 32. a tubular engaging member; 321. a second communication hole; 322. a communicating cavity; 33. a first vacuum pumping assembly; 331. a cover body; 332. a main vacuum-pumping pipeline; 333. vacuumizing branch pipelines; 333a, a first communication hole; 40. a guide rail assembly; 41. a guide rail; 50. a drive structure; 60. a collection device; 61. a third adsorption zone; 62. a collection structure; 63. and the third vacuumizing assembly.

Detailed Description

It should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict. The present invention will be described in detail below with reference to the embodiments with reference to the attached drawings.

It is noted that, unless otherwise indicated, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application belongs.

In the present invention, unless stated to the contrary, use of the directional terms "upper and lower" are generally directed to the orientation shown in the drawings, or to the vertical, or gravitational direction; likewise, for ease of understanding and description, "left and right" are generally to the left and right as shown in the drawings; "inner and outer" refer to the inner and outer relative to the profile of the respective member itself, but the above directional terms are not intended to limit the present invention.

In order to solve the problems that the processing efficiency of membrane separation is low and the separation is not thorough to cause substrate fragmentation in the prior art, the application provides a membrane separation mechanism and a membrane separation method.

As shown in fig. 1 and 2, the membrane separating mechanism includes a carrier 10 and a column-shaped engaging structure 30. The carrier device 10 is used for carrying a combination 20 to be separated, and the carrier device 10 comprises a first adsorption area 11 and a repulsion area 12, wherein the first adsorption area 11 can attract a first sub-component 21 of the combination 20 to be separated, and the repulsion area 12 can push a second sub-component 22 of the combination 20 to be separated away from the carrier device 10. The column-shaped attracting structure 30 is located above the carrying device 10, the column-shaped attracting structure 30 has a plurality of second absorbing areas 31, a part or all of the second absorbing areas 31 are used and attract the second sub-component 22 of the assembly 20 to be separated, and the column-shaped attracting structure 30 moves relative to the carrying device 10 to realize the separation between the first sub-component 21 and the second sub-component 22 of the assembly 20 to be separated.

By applying the technical solution of this example, the first suction area 11 of the carrier device 10 can suck the first sub-component 21 of the assembly 20 to be separated, the repelling area 12 of the carrier device 10 can push the second sub-component 22 of the assembly 20 to be separated, the cylindrical sucking structure 30 drives part or all of the second suction area 31 to move relative to the carrier device 10, and the second suction area 31 can suck the second sub-component 22 of the assembly 20 to be separated, so as to separate the first sub-component 21 and the second sub-component 22 of the assembly 20 to be separated. In the above process, the second suction area 31 sucks the second sub-component 22 and drives the second sub-component 22 to move relative to the first sub-component 21, so that the first sub-component 21 and the second sub-component 22 can be separated more easily.

In the present embodiment, the first sub-member 21 is a substrate.

Compared with the manual membrane separation in the prior art, the membrane separation mechanism in the embodiment solves the problems that the membrane separation in the prior art is low in processing efficiency and the separation is incomplete, so that the substrate is cracked.

In the present embodiment, the first sub-part 21 of the assembly 20 to be separated is a substrate, and the second sub-part 22 of the assembly 20 to be separated is a membrane. As shown in fig. 11, the side of the second subcomponent 22 is exposed relative to the first subcomponent 21 and is purged by the exclusion zone 12.

In the embodiment, part or all of the second absorption area 31 on the cylindrical attraction structure 30 is used to separate the first sub-component 21 and the second sub-component 22 in a linear manner, so as to improve the operation reliability of the membrane separation mechanism and effectively avoid the problem of ineffective separation caused by excessive surface contact. At the same time, a pre-separation of the second subcomponent 22 is achieved by the exclusion zone 12, which serves as a good secondary separation.

As shown in fig. 1 and 2, the membrane separation mechanism further includes a rail assembly 40 and a driving structure 50. Wherein, the guide rail assembly 40 can drive the column-shaped suction structure 30 to move. The driving structure 50 is connected to the cylindrical attraction structure 30 and can drive the cylindrical attraction structure 30 to rotate around its own axis. Specifically, after the assembly 20 to be separated is placed on the carrying device 10, the guiding rail assembly 40 drives the cylindrical attraction structure 30 to move until the cylindrical attraction structure 30 moves to the upper side of the carrying device 10. Meanwhile, the driving structure 50 can drive the cylindrical attracting structure 30 to rotate, so that the cylindrical attracting structure 30 attracting the second sub-component 22 rotates relative to the carrying device 10, and the first sub-component 21 and the second sub-component 22 are quickly separated.

In this embodiment, the guide rail assembly 40 includes two guide rails 41 parallel to each other, and the cylindrical attraction structure 30 is respectively connected to the two guide rails 41 and can slide along with the two guide rails 41. The structure is simple and easy to realize.

It should be noted that the structure of the rail assembly 40 is not limited to this. Alternatively, the rail assembly 40 includes a rail 41, and a portion of the cylindrical attraction structure 30 is fixed to the rail 41 and can slide along the rail 41.

In this embodiment, the driving structure 50 is a motor.

In this embodiment, the membrane separation mechanism further comprises a lifting mechanism. Wherein, the lifting structure drives the columnar attracting structure 30 to lift. Specifically, when the cylindrical attraction structure 30 is located above the bearing device 10, the lifting structure drives the cylindrical attraction structure 30 to move toward the bearing device 10 until the pressure between the cylindrical attraction structure 30 and the bearing device 10 reaches a preset pressure value, and the driving structure 50 drives the cylindrical attraction structure 30 to rotate.

In other embodiments not shown in the drawings, the carrying device is lifted by a lifting structure. When the columnar suction structure is positioned above the bearing device, the lifting structure drives the bearing device to move towards the columnar suction structure until the pressure between the columnar suction structure and the bearing device reaches a preset pressure value, and the driving structure drives the columnar suction structure to rotate.

Optionally, the cylindrical attraction structure 30 includes a cylindrical attraction member 32, the outer surface of the cylindrical attraction member 32 has a plurality of second adsorption areas 31, the plurality of second adsorption areas 31 are arranged at intervals along the circumferential direction of the cylindrical attraction member 32, and at any time, the second adsorption area 31 closest to the carrying device 10 in the plurality of second adsorption areas 31 is put into use; all the second adsorption zones 31 are put into use in sequence within a preset time. As shown in fig. 6, the outer surface of the cylindrical absorbing member 32 has five second absorbing regions 31, and the five second absorbing regions 31 are arranged at intervals along the circumferential direction of the cylindrical absorbing member 32, and at any time, one second absorbing region 31 closest to the carrier device 10 is put into use; the different second adsorption zones 31 are put into use in sequence within a preset time. Thus, in the process of the cylindrical attraction structure 30 attracting the second sub-component 22, the repelling region 12 of the carrying device 10 blows a part of the second sub-component 22 away from the carrying device 10, and the second attraction regions 31 on the cylindrical attraction structure 30 are sequentially used to attract different parts of the second sub-component 22 in sequence until all the second attraction regions 31 on the cylindrical attraction structure 30 are used.

Specifically, when the cylindrical attracting structure 30 rotates, the second attracting area 31 closest to the carrying device 10 is first put into use, and the second attracting area 31 attracts the second sub-component 22, so that the second sub-component 22 is attracted to the cylindrical attracting structure 30. Then, when the cylindrical engaging structure 30 rotates to the second absorption area 31 adjacent to the previous second absorption area 31 and the distance between the second absorption area 31 and the carrier 10 is the shortest, the second absorption area 31 is also used to engage the second sub-component 22. Until all the second absorption areas 31 are put into use, so as to absorb all the second sub-components 22 on the columnar absorption structure 30, and the separation of the first sub-component 21 and the second sub-component 22 is realized.

As shown in fig. 3 and 8, the cylindrical attraction structure 30 further includes a first vacuum-pumping assembly 33 connected to the cylindrical attraction member 32, and the first vacuum-pumping assembly 33 is communicated with at least one second adsorption area 31 to provide vacuum negative pressure to the second adsorption area 31. Specifically, the first vacuum assembly 33 attracts the second sub-assembly 22 through the second attraction area 31, so that the second sub-assembly 22 is attracted to the pillar-shaped attracting structure 30. The structure is simple, the implementation is easy, and the processing cost of the diaphragm separating mechanism is reduced.

The manner of the pillar-shaped engaging structure 30 engaging the second sub-member 22 is not limited to this. Alternatively, the cylindrical engaging structure 30 is magnetically engaged with the second sub-member 22. Optionally, the magnetic attraction is an electromagnetic attraction.

As shown in fig. 3 and 8, the first vacuum assembly 33 includes two covers 331, a main vacuum pipeline 332, a plurality of branch vacuum pipelines 333, and a control device. The two covers 331 are connected to the two end faces of the tubular engaging member 32, respectively. A part of the main vacuum line 332 passes through one of the covers 331 and is connected to a vacuum pump. The plurality of vacuum branch pipes 333 are disposed corresponding to the plurality of second adsorption zones 31 and connected to the main vacuum pumping pipe 332, and each vacuum branch pipe 333 is communicated with a corresponding second adsorption zone 31. The on-off of the main vacuum-pumping pipeline 332 and the branch vacuum-pumping pipeline 333 is controlled by a control device, and different branch vacuum-pumping pipelines 333 are communicated with the main vacuum-pumping pipeline 332 in sequence within a preset time. Therefore, the on-off of each second absorption area 31 on the cylindrical absorption structure 30 is realized through the structure, so that the appearance of the second sub-component 22 absorbed on the cylindrical absorption component 32 is smoother and more beautiful.

Specifically, rolling bearings are provided between the guide rail 41 and the corresponding lid 331, by which the rotation of the cylindrical engaging member 32 with respect to the guide rail 41 is effected. The main evacuation line 332 is located at the center of the tubular suction unit 32 and connected to an evacuation pump, and the on/off state between the main evacuation line 332 and each of the evacuation branch lines 333 can be controlled by a control device. When the control device controls the vacuum branch pipe 333 to communicate with the main vacuum pipe 332, the second adsorption region 31 corresponding to the main vacuum pipe 332 can attract the second sub-assembly 22. The second sub-assembly 22 is engaged with the tubular engaging member 32 until all of the evacuation branch pipes 333 are in communication with the main evacuation pipe 332.

As shown in fig. 3, 5 to 7, the side of the evacuation branch pipe 333 facing the cylindrical suction member 32 has a first communication hole 333a, and the evacuation branch pipe 333 communicates with the corresponding second suction region 31 through the first communication hole 333 a. The cylindrical suction member 32 includes a second communication hole 321 provided in a radial direction thereof and a communication chamber 322 communicating with the second communication hole 321. Wherein the second communication hole 321 communicates with the second adsorption zone 31 through the communication chamber 322, and the cylindrical suction member 32 communicates with the first communication hole 333a through the second communication hole 321. Specifically, when the main vacuum line 332 communicates with each of the sub vacuum lines 333, the second adsorption area 31, the communication chamber 322, the second communication hole 321, the first communication hole 333a, and the main vacuum line 332 form a communication passage, so that a negative pressure is generated in the second adsorption area 31.

Optionally, the control device includes a plurality of switch structures, and the plurality of switch structures are disposed corresponding to the plurality of vacuum branch pipes 333 to control on/off of the corresponding vacuum branch pipes 333 and the vacuum main pipe 332. As shown in fig. 8, the control device includes five switch structures, and the five switch structures are disposed corresponding to the plurality of vacuum branch pipes 333. In this way, each of the branch vacuum pipes 333 is controlled by a corresponding switch structure to connect and disconnect the branch vacuum pipes 333 and the main vacuum pipe 332, so that the second adsorption area 31 is controlled more easily and conveniently by the operator, and the labor intensity of the operator is reduced.

Optionally, the switch structure is a solenoid valve.

Optionally, the control device is a valve island, and controls the vacuum negative pressure switches of the five second adsorption areas 31.

As shown in fig. 1 to 3 and 9, the carrying device 10 includes a carrying structure 13, a second vacuum pumping assembly 14 and an air inlet structure 15. Wherein the first adsorption zone 11 and the repulsion zone 12 are arranged on the upper surface of the carrying structure 13. The second vacuum assembly 14 is arranged on the carrying structure 13, and the first suction area 11 sucks the first sub-part 21 of the assembly 20 to be separated through the second vacuum assembly 14. The air inlet structure 15 is arranged on the carrier structure 13 and the repelling zone 12 pushes the second subpart 22 of the assembly 20 to be separated away from the carrier structure 13 via the air inlet structure 15. Specifically, the second vacuum pumping assembly 14 sucks the first sub-assembly 21 through the first adsorption area 11, and the air inlet structure 15 pushes away and purges the second sub-assembly 22 through the repulsion area 12, so that a portion of the second sub-assembly 22 is separated from the first sub-assembly 21, and the cylindrical sucking assembly 32 is convenient to suck the second sub-assembly 22. Wherein a portion of the second subcomponent 22 is located outside the first subcomponent 21, the exclusion zone 12 is capable of purging the second subcomponent 22 located outside the first subcomponent 21. The structure is simple and easy to realize.

As shown in fig. 3, the repulsive area 12 is located at one side of the first adsorption area 11. Thus, the repelling zone 12 blows the part of the second sub-part 22 outside the first sub-part 21, and only one side of the second sub-part is blown, and the blown second sub-part 22 is the attraction starting end, so that the attraction of the second sub-part 22 on the cylindrical attraction part 32 is easier.

As shown in fig. 1 and 3, the repulsive area 12 and the first and second adsorption areas 11 and 31 are formed of a plurality of through holes. The mechanism with the structure is simple, easy to process and realize, and further reduces the processing cost of the diaphragm separating mechanism.

Optionally, the through-hole is a microporous structure.

Optionally, the purging direction of the exclusion zone 12 is arranged at an angle to the carrying structure 13, so that part of the second sub-assembly 22 is blown obliquely upwards by the gas flow.

As shown in fig. 1, 2 and 4, the membrane separation mechanism further includes a collection device 60. The collecting device 60 is located at the downstream position of the cylindrical attracting structure 30, the second sub-component 22 of the assembly 20 to be separated is driven to the collecting device 60 by the cylindrical attracting structure 30, the collecting device 60 has a plurality of third adsorbing areas 61, and part or all of the third adsorbing areas 61 are put into use and attract the second sub-component 22 of the assembly 20 to be separated. In this way, the collecting device 60 is used to collect the second sub-member 22 (film sheet) so that the completely separated second sub-member 22 (film sheet) is neatly placed on the collecting device 60.

Specifically, the second sub-component 22 attracted to the cylindrical attraction structure 30 is conveyed above the collecting device 60 by the guide rail assembly 40, the lifting structure drives the cylindrical attraction structure 30 to descend toward the collecting device 60, or drives the collecting device 60 to ascend toward the cylindrical attraction structure 30 until a predetermined pressure exists between the cylindrical attraction structure 30 and the collecting device 60, and part or all of the third adsorption areas 61 are put into use to attract the second sub-component 22. Thereafter, the second suction areas 31 of the cylindrical attracting structure 30 are stopped to allow the second sub-members 22 to be attracted to the collecting device 60.

As shown in fig. 4 and 10, the collecting device 60 includes a collecting structure 62 and a plurality of third vacuum assemblies 63. Wherein the third adsorption zone 61 is disposed on the upper surface of the collection structure 62. The plurality of third vacuum-pumping units 63 are disposed on the collecting structure 62, and the plurality of third vacuum-pumping units 63 are disposed corresponding to the plurality of third suction areas 61, and the third suction areas 61 suck the second sub-assembly 22 of the assembly to be separated 20 by the third vacuum-pumping units 63. In this way, during the process of the second sub-assembly 22 being sucked by the collecting device 60, the third vacuum assemblies 63 are sequentially used to prevent air bubbles from being generated between the second sub-assembly 22 and the collecting structure 62 to affect the flatness of the second sub-assembly 22.

Optionally, a plurality of third evacuation assemblies 63 are controlled by valve islands.

Optionally, the third vacuum pumping assembly control device is a valve island, and controls the vacuum negative pressure switches of the plurality of third adsorption areas 61.

In this embodiment, the plurality of third absorption regions 61 are sequentially arranged along the moving direction of the column-shaped attraction structure 30. The third absorption areas 61 are sequentially used according to the arrangement order, so that the parts of the second sub-component 22 are sequentially absorbed on the collection structure 62, and no air bubbles exist between the second sub-component 22 and the collection structure 62.

In this embodiment, the diaphragm separating mechanism further includes a pressure detecting device. The pressure detection device is disposed on the cylindrical attraction structure 30, and is configured to detect a first pressure value between the cylindrical attraction structure 30 and the carrying device 10, and detect a second pressure value between the cylindrical attraction structure 30 and the collecting device 60. When the first pressure value reaches a first preset pressure value, the rejection zone 12 is put into use; when the second pressure value reaches a second preset pressure value, the third vacuum pumping assembly 63 is put into use. In this way, the pressure detecting device detects the pressure values between the cylindrical attraction structure 30 and the bearing device 10 and between the cylindrical attraction structure 30 and the collecting device 60, and when the pressure value reaches a preset pressure value, the corresponding structure or component is controlled to be put into use, so that the separation efficiency and the separation quality of the membrane separation mechanism are improved, and the separation between the first sub-component 21 and the second sub-component 22 is more thorough.

Note that the position where the pressure detection device is provided is not limited to this. Optionally, the pressure detection means is provided on the carrier means 10 or the collecting means 60.

The application also provides a membrane separation method, which adopts the membrane separation mechanism and comprises the following steps:

step S1: placing the assembly to be separated 20 on the carrier 10 of the membrane separation mechanism;

step S2: the first absorption area 11 of the carrying device 10 absorbs the first sub-component 21 of the assembly 20 to be separated, the cylindrical absorption structure 30 of the membrane separation mechanism is moved to the position of the carrying device 10, and the rejection area 12 of the carrying device 10 pushes at least part of the second sub-component 22 of the assembly 20 to be separated away from the carrying device 10;

step S3: part or all of the second absorption area 31 of the column-shaped attraction structure 30 is put into use and attracts the second sub-part 22 of the assembly 20 to be separated, and the column-shaped attraction structure 30 moves relative to the carrying device 10 to separate the first sub-part 21 and the second sub-part 22 of the assembly 20 to be separated.

Specifically, the first absorption area 11 of the carrying device 10 absorbs the first sub-component 21 of the assembly to be separated 20, the repelling area 12 of the carrying device 10 pushes away the second sub-component 22 of the assembly to be separated 20, the cylindrical absorption structure 30 drives part or all of the second absorption area 31 to move relative to the carrying device 10, and the second absorption area 31 can absorb the second sub-component 22 of the assembly to be separated 20, so as to separate the first sub-component 21 and the second sub-component 22 of the assembly to be separated 20. In the above process, the second absorption area 31 absorbs the second sub-component 22 and drives the second sub-component 22 to move relative to the first sub-component 21, so that the first sub-component 21 and the second sub-component 22 are separated more easily, and the problems of low processing efficiency of membrane separation and substrate fragmentation caused by incomplete separation in the prior art are solved.

In the present embodiment, step S2 includes:

step S21: opening the second vacuum-pumping assembly 14 of the carrier 10 to make the first absorption area 11 absorb the first sub-component 21 of the assembly 20 to be separated;

step S22: the guide rail component 40 of the membrane separation mechanism drives the columnar attraction structure 30 to move and move to the position of the bearing device 10;

step S23: the lifting structure of the membrane separating mechanism drives the cylindrical attracting structure 30 to move, so that the cylindrical attracting structure 30 and the bearing device 10 are close to each other, the pressure detecting device of the membrane separating mechanism detects a first pressure value between the two, and when the first pressure value reaches a first preset pressure value, the air inlet structure 15 pushes the second sub-component 22 of the assembly 20 to be separated away from the bearing device 10.

Specifically, the second vacuum pumping assembly 14 is turned on and engages the first sub-assembly 21, and the guiding rail assembly 40 drives the cylindrical engaging structure 30 to move and move to the upper side of the carrying device 10. Then, the lifting structure drives the cylindrical attraction structure 30 to move towards the bearing device 10 until a first pressure value between the cylindrical attraction structure 30 and the bearing device 10 reaches a first preset pressure value, the lifting structure stops running, and the air inlet structure 15 is put into use and sweeps a part of the second sub-component 22, so that the part of the second sub-component 22 is pushed away from the bearing device 10.

In the present embodiment, step S3 includes:

step S31: the guide rail assembly 40 of the membrane separating mechanism drives the cylindrical attracting structure 30 to move towards the collecting device 60 of the membrane separating mechanism, and the driving structure 50 of the membrane separating mechanism drives the cylindrical attracting structure 30 to rotate towards the first direction, so that the cylindrical attracting structure 30 drives the second sub-assembly 22 of the assembly 20 to be separated to move towards the collecting device 60. Thus, the column-shaped suction structure 30 performs three synchronous actions at any time, which are: the guide rail assembly 40 drives the cylindrical attracting structure 30 to move towards the collecting device 60, the cylindrical attracting structure 30 rotates under the driving of the driving structure 50, and the second absorbing area 31 attracts the second sub-component 22, so that the cylindrical attracting structure 30 attracts the second sub-component 22 while moving, so that the second sub-component 22 attracts the cylindrical attracting structure 30, and the first sub-component 21 and the second sub-component 22 are quickly separated.

In the present embodiment, in step S31, the moving speed V1 of the track assembly 40 is opposite to the linear speed V2 of the contacting portion of the column-shaped attraction structure 30 and the carriage 10, and the value of the moving speed V1 is greater than or equal to the value of the linear speed V2. Thus, the above arrangement ensures that the second sub-assembly 22 engaged with the cylindrical engaging structure 30 moves relative to the reference surface (non-moving surface) in a direction away from the side of the carrying device 10 (in a direction toward the collecting device 60) to realize a transportation function of the cylindrical engaging structure 30 for the second sub-assembly 22.

In this embodiment, in step S31, at any time, the second adsorption area 31 closest to the carrier device 10 is activated, and the vacuum branch conduit 333 and the vacuum main conduit 332 of the membrane separation mechanism corresponding to the activated second adsorption area 31 are communicated to make the second adsorption area 31 attract the second sub-component 22 of the assembly 20 to be separated. In this way, after the cylindrical attraction structure 30 starts to move, the second suction area 31 closest to the carrier device 10 starts to be used, and then when the cylindrical attraction structure 30 rotates to the position where the second suction area 31 adjacent to the previous second suction area 31 is closest to the carrier device 10, the adjacent second suction area 31 is also used to attract the second sub-component 22. Until all the second absorption areas 31 are put into use, so as to absorb all the second sub-components 22 on the columnar absorption structure 30, and the separation of the first sub-component 21 and the second sub-component 22 is realized.

In this embodiment, the membrane separation method further includes step S4 after step S3: when the cylindrical engaging structure 30 moves to the position of the collecting device 60 of the membrane separating mechanism, the third absorbing region 61 of the collecting device 60 is used to engage the second sub-component 22 of the assembly 20 to be separated, and part or all of the second absorbing regions 31 no longer engage the second sub-component 22 of the assembly 20 to be separated. Thus, when the third suction zone 61 is in use, the second suction zone 31 is not in use to ensure that the second sub-assembly 22 is engaged with the collection device 60.

In this embodiment, step S4 further includes:

step S41: the guide rail assembly 40 of the membrane separating mechanism drives the cylindrical attracting structure 30 to move towards a direction away from the carrying device 10, and the driving structure 50 of the membrane separating mechanism drives the cylindrical attracting structure 30 to rotate towards a second direction opposite to the first direction, so that the second sub-component 22 of the assembly 20 to be separated is gradually attracted by the third absorbing area 61. Thus, the last part of the second sub-component 22 to be attracted by the cylindrical attraction structure 30 is firstly attracted by the third attraction area 61, and then the rest parts of the second sub-component 22 are sequentially attracted by the third attraction area 61 until all the second sub-components 22 are attracted by the third attraction area 61.

In this embodiment, in step S41, at any time, the control device of the membrane separation mechanism closest to the collection device 60 disconnects the vacuum branch conduit 333 of the corresponding membrane separation mechanism from the main vacuum conduit 332 of the membrane separation mechanism, and each third adsorption zone 61 is gradually put into use in the direction opposite to the movement direction of the guide rail assembly 40. Thus, the above arrangement enables the parts of the second sub-assembly 22 to be sequentially sucked by the third suction area 61, so as to prevent air bubbles from being generated between the second sub-assembly 22 and the collecting device 60 to affect the sucking effect.

Specifically, the third absorption region 61 closest to the column-shaped absorption structure 30 is first put into use, and the second absorption region 31 of the second sub-component 22 corresponding to the portion absorbed by the third absorption region 61 stops absorbing. Along with the movement of the cylindrical attraction structure 30 (the rotation along the second direction and the combined movement of the guide rail assembly 40 driving the movement), the other third absorption areas 61 closest to the cylindrical attraction structure 30 are sequentially used, the second absorption areas 31 on the second sub-component 22 corresponding to the parts attracted by the other third absorption areas 61 stop attracting until all the third absorption areas 61 are used and all the second absorption areas 31 stop attracting, and then the collection and attraction of the second sub-component 22 by the collection device 60 are completed.

In this embodiment, in step S41, after the third adsorption zone 61 is put into use, the evacuation branch line 333 is disconnected from the evacuation main line 332. Thus, the third suction area 61 engages the second sub-assembly 22, and the second suction area 31 no longer engages the second sub-assembly 22 and releases the second sub-assembly 22 so that the second sub-assembly 22 is engaged with the collection device 60.

In this embodiment, the pressure detecting device of the membrane separating mechanism detects a second pressure value between the cylindrical suction structure 30 and the collecting device 60, and when the second pressure value reaches a second preset pressure value, the third adsorption area 61 is put into use. Specifically, the guiding rail assembly 40 drives the column-shaped attracting structure 30 to move and move to the upper side of the collecting device 60. Then, the lifting structure drives the cylindrical attraction structure 30 to move towards the collection device 60 until a second pressure value between the cylindrical attraction structure 30 and the collection device 60 reaches a second preset pressure value, the lifting structure stops running, the third adsorption area 61 is put into use and attracts a part of the second sub-component 22, and meanwhile, the second adsorption area 31 releases the part of the second sub-component 22 until all the second sub-components 22 are attracted by the third adsorption area 61.

In the present embodiment, in step S41, the moving speed V3 of the guide rail assembly 40 is opposite to the linear speed V4 of the contacting portion of the cylindrical attraction structure 30 and the collection device 60, and the moving speed V3 is smaller than or equal to the linear speed V4. Thus, the above arrangement ensures that the second sub-component 22 engaged with the cylindrical engaging structure 30 moves relative to the reference surface (non-moving surface) toward the direction of the carrying device 10 to release the second sub-component 22 by the cylindrical engaging structure 30, so that the second sub-component 22 is laid flat on the collecting device 60.

From the above description, it can be seen that the above-described embodiments of the present invention achieve the following technical effects:

the first adsorption area of the bearing device can adsorb the first sub-component of the assembly to be separated, the exclusion area of the bearing device can push the second sub-component of the assembly to be separated, the columnar adsorption structure drives part or all of the second adsorption area to move relative to the bearing device, and the second adsorption area can adsorb the second sub-component of the assembly to be separated so as to separate the first sub-component and the second sub-component of the assembly to be separated. In the process, the second sub-component is attracted by the second adsorption area and is driven to move relative to the first sub-component, so that the first sub-component and the second sub-component are separated more easily.

Compared with the manual membrane separation in the prior art, the membrane separation mechanism in the application solves the problems that the membrane separation in the prior art is low in processing efficiency and the separation is not thorough, so that the substrate is cracked.

It is to be understood that the above-described embodiments are only a few, but not all, embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

It is noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of example embodiments according to the present application. As used herein, the singular is intended to include the plural unless the context clearly dictates otherwise, and it should be further understood that the terms "comprises" and/or "comprising," when used in this specification, specify the presence of features, steps, operations, devices, components, and/or combinations thereof.

It should be noted that the terms "first," "second," and the like in the description and claims of this application and in the drawings described above are used for distinguishing between similar elements and not necessarily for describing a particular sequential or chronological order. It is to be understood that the data so used is interchangeable under appropriate circumstances such that the embodiments of the application described herein are capable of operation in sequences other than those illustrated or described herein.

The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.