阅读说明：本技术 一种多晶炉台一台真空泵控制多台多晶炉运行方法 (Method for controlling multiple polycrystalline furnaces to operate by one vacuum pump on polycrystalline furnace table ) 是由 邵长洲 韩晓敏 孙永付 夏益民 于 2019-09-29 设计创作，主要内容包括：本发明涉及一种多晶炉台一台真空泵控制多台多晶炉运行改造方法,具体方法如下：(1)在操作前先将相邻多晶炉串联；(2)正常运行状态下真空泵上的V8阀是打开的,V9阀是关闭的；(3)进行并接操作时,先将计划继续运行的主真空泵的V9阀打开,挂好标牌；(4)将准备停的辅真空泵的V8阀关闭,挂好标牌；(5)打开辅真空泵V9阀,挂好标牌；(6)将计划停用的辅泵关闭；(7)当并接的多晶炉中有一台运行结束时,需将停炉的多晶炉分离,恢复正常运行状态；(8)关闭主泵和辅泵的V9阀,挂好标牌。本发明直接减少真空泵的使用数量,从根本上减少能耗,降低故障发生频率。(The invention relates to a method for controlling the operation and transformation of a plurality of polycrystalline furnaces by one vacuum pump of a polycrystalline furnace, which comprises the following steps: (1) before operation, adjacent polycrystalline furnaces are connected in series; (2) the V8 valve on the vacuum pump is open under normal operating conditions, and the V9 valve is closed; (3) when the parallel connection operation is carried out, the V9 valve of the main vacuum pump which is planned to continue to operate is opened, and the label is hung; (4) closing a V8 valve of the auxiliary vacuum pump to be stopped, and hanging a label; (5) opening an auxiliary vacuum pump V9 valve, and hanging the label; (6) shutting down the secondary pump scheduled to be deactivated; (7) when one of the parallel polycrystalline furnaces finishes operating, the shutdown polycrystalline furnace needs to be separated, and the normal operation state is recovered; (8) the V9 valves of the primary and secondary pumps were closed and the signs were hung. The invention directly reduces the number of vacuum pumps, thus fundamentally reducing energy consumption and reducing the frequency of faults.)

1. A method for controlling the operation and transformation of a plurality of polycrystalline furnaces by one vacuum pump of a polycrystalline furnace table is characterized by comprising the following steps: the specific method comprises the following steps:

(1) before operation, adjacent polycrystalline furnaces are connected in series;

(2) the V8 valve on the vacuum pump is open under normal operating conditions, and the V9 valve is closed; before the parallel connection operation, the state of a machine table needs to be confirmed, and the parallel connection equipment needs to be in a gas control mode;

(3) when the parallel connection operation is carried out, the V9 valve of the main vacuum pump which is planned to continue to operate is opened, and the label is hung; the vacuum pump needing to be operated is called a main vacuum pump, and the vacuum pump stopping to be operated is called an auxiliary vacuum pump;

(4) closing a V8 valve of the auxiliary vacuum pump to be stopped, hanging a label, and closing or opening; the manual valve is closed clockwise and opened anticlockwise;

(5) opening an auxiliary vacuum pump V9 valve, hanging a label, and observing the air pressure condition in the furnace to determine whether the air pressure condition meets the set value of the formula;

(6) shutting down the secondary pump scheduled to be deactivated; the V8 valve is manually opened, and the work is finished;

(7) when one of the parallel polycrystalline furnaces finishes operating, the shutdown polycrystalline furnace needs to be separated, and the normal operation state is recovered; ensuring that a main pump runs; opening the auxiliary pump vacuum pump, opening the V8 valve, and hanging the label; when the valve is opened, the valve needs to be screwed to the bottom anticlockwise;

(8) closing V9 valves of the main pump and the auxiliary pump, and hanging labels; when the valve is closed, the valve needs to be screwed clockwise to the end.

Technical Field

The invention belongs to the technical field of polycrystalline furnaces, and particularly relates to a method for controlling multiple polycrystalline furnaces to operate by one polycrystalline furnace platform and one vacuum pump.

Background

The polycrystalline furnace has a long operation period (about 70 hours), but only belongs to a gas replacement process in a heating stage (about 10 hours). And in the stages of melting, crystal growth, annealing and cooling (about 60 hours), the air pressure in the furnace is stable, and the gas inlet and outlet amount is small. Therefore, the mode in which one vacuum pump supplies one polycrystalline furnace table causes a large amount of wasted productivity. The vacuum pump is used as an essential device in gas transportation, the energy consumption is high in the operation process, the vacuum pump belongs to a mechanical oil pump, a large amount of lubricating oil is consumed in the operation process, sound is generated by mechanical action, and a large amount of noise pollution is generated; therefore, in the case of a fixed hearth, it is necessary to increase the utilization rate and reduce the use of vacuum pumps. Simultaneously, a vacuum pump supplies with the mode of a polycrystal stove platform, can make every vacuum pump all be in operating condition, and the vacuum pump does not stop to operate for a long time between the sliding valve and is in the friction process for a long time always and makes the life-span of sliding valve reduce, and work such as machine halt maintenance all can direct influence polycrystal stove equipment board efficiency. When the vacuum pump fails, the vacuum pump can only be stopped for maintenance; not only directly influence product quality, and if the gas can not be effectively discharged, major safety accidents can occur.

Disclosure of Invention

The invention aims to provide a method for controlling the operation of a plurality of polycrystalline furnaces by one vacuum pump on each polycrystalline furnace, which utilizes one vacuum pump or a mechanical pump to control the operation of not only a single polycrystalline furnace but also a plurality of polycrystalline furnaces to normally operate, and can effectively reduce the operation energy consumption of the vacuum pump, reduce the use amount of lubricating oil, reduce the noise of a workshop, improve the maintenance efficiency of a machine table and prolong the service life of a sliding valve of the vacuum pump.

In order to achieve the above object, the present invention has the following technical means.

A method for controlling the operation of a plurality of polycrystalline furnaces by one vacuum pump of a polycrystalline furnace comprises the following specific steps:

(1) before operation, adjacent polycrystalline furnaces are connected in series;

(2) the V8 valve on the vacuum pump is open under normal operating conditions, and the V9 valve is closed; before the parallel connection operation, the state of a machine table needs to be confirmed, and the parallel connection equipment needs to be in a gas control mode;

(3) when the parallel connection operation is carried out, the V9 valve of the main vacuum pump which is planned to continue to operate is opened, and the label is hung; the vacuum pump needing to be operated is called a main vacuum pump, and the vacuum pump stopping to be operated is called an auxiliary vacuum pump;

(4) closing a V8 valve of the auxiliary vacuum pump to be stopped, hanging a label, and closing or opening; the manual valve is closed clockwise and opened anticlockwise;

(5) opening an auxiliary vacuum pump V9 valve, hanging a label, and observing the air pressure condition in the furnace to determine whether the air pressure condition meets the set value of the formula;

(6) shutting down the secondary pump scheduled to be deactivated; the V8 valve is manually opened, and the work is finished;

(7) when one of the parallel polycrystalline furnaces finishes operating, the shutdown polycrystalline furnace needs to be separated, and the normal operation state is recovered; ensuring that a main pump runs; opening the auxiliary pump vacuum pump, opening the V8 valve, and hanging the label; when the valve is opened, the valve needs to be screwed to the bottom anticlockwise;

(8) closing V9 valves of the main pump and the auxiliary pump, and hanging labels; when the valve is closed, the valve needs to be screwed clockwise to the end.

The invention has the beneficial effects that: according to the method for controlling the operation of the multiple polycrystalline furnaces by the vacuum pump, the number of the vacuum pumps is directly reduced, energy consumption is fundamentally reduced, the vacuum pump belongs to the mechanical oil pump, mechanical action can generate sound, the number of the vacuum pumps is reduced, and noise is directly reduced; the mode that one vacuum pump supplies for a plurality of polycrystalline furnace platforms can effectively prolong the service life of the vacuum pump and reduce the condition that the service life of the slide valve is reduced because the slide valves are always in a friction process for a long time; the mode that a vacuum pump supplied with many polycrystal stove platforms can make vacuum pump interchange use, and work such as machine halt maintenance all can be arranged in the out-of-use condition to do not influence polycrystal stove equipment board efficiency. And regular maintenance of the efficiency of the machine table is not delayed at regular intervals, the failure occurrence frequency is reduced, the product quality is directly ensured, and major safety accidents caused by the fact that gas cannot be effectively discharged are prevented. In the method, the number of the vacuum pumps for supplying the polycrystalline furnace tables can be arbitrarily switched according to actual conditions.

Drawings

FIG. 1 is a schematic view of the connection control of a polycrystalline furnace according to the method used in the example of the present invention.

The notation in the figure is: 1. a first vacuum pump; 2. a first V8 valve; 3. a first V9 valve; 4. a second vacuum pump; 5. a second V9 valve; 6. a third vacuum pump; 7. a third V9 valve; 8. a fourth vacuum pump; 9. a fourth V9 valve; 10. a fourth V8 valve; 11. a fourth polycrystalline furnace; 12. a third V8 valve; 13. a third polycrystalline furnace; 14. a second V8 valve; 15. a second polycrystalline furnace; 16. a first polycrystalline furnace.

Detailed Description

The invention will be better understood from the following description of specific embodiments thereof with reference to the accompanying drawings and examples.