阅读说明：本技术 离子推进器及其制备方法 (ion thruster and preparation method thereof ) 是由 谭秋林 张永威 张磊 张文栋 于 2019-09-25 设计创作，主要内容包括：本发明公开一种离子推进器及其制备方法,该离子推进器制备方法包括：多个预制生瓷片层叠并层压形成前部；多个预制生瓷片层叠并层压形成后部；将前部和后部组装放置在烧结模具中,前部与后部的锥形部紧密配合；将主阴极放置在前部的阴极孔中,并在阴极孔中填充陶瓷浆料以固定主阴极；将烧结模具放置在加热炉中烧结。该离子推进器采用了模块化加工方法,在每个模块制造时,均采用将多个预制生瓷片层叠在一起,并层压的方法,具有工艺简单、成本低的优点,且制成的离子推进器尺寸小,并具有良好的耐高温性能。(The invention discloses an ion thruster and a preparation method thereof, wherein the preparation method of the ion thruster comprises the following steps: laminating and laminating a plurality of prefabricated green tiles to form a front portion; laminating and laminating a plurality of prefabricated green tiles to form a rear portion; assembling the front part and the rear part in a sintering mold, wherein the front part is tightly matched with the conical part of the rear part; placing a main cathode in the cathode hole at the front part, and filling ceramic slurry in the cathode hole to fix the main cathode; and placing the sintering mold in a heating furnace for sintering. The ion thruster adopts a modularized processing method, and adopts a method of laminating a plurality of prefabricated green ceramic sheets when each module is manufactured, so that the ion thruster has the advantages of simple process and low cost, and the manufactured ion thruster is small in size and has good high-temperature resistance.)

1. a method of making an ion thruster, comprising:

Step 101, laminating and laminating a plurality of prefabricated green tiles to form a front part, wherein the front part comprises a cathode hole and an air inlet hole;

102, stacking and laminating a plurality of prefabricated green ceramic chips to form a rear part, wherein the rear part comprises a middle part and a tail part, and the middle part comprises a conical part and a barrel part; a reaction chamber is positioned in the middle part, a prefabricated carbon block with the shape matched with that of the reaction chamber is placed in the reaction chamber, and an anode metal layer is formed on the surface of the prefabricated carbon block at a position corresponding to the conical part; the tail part comprises an accelerating grid cathode and an accelerating grid anode which are provided with a plurality of spray holes and are oppositely arranged at a certain distance; the extraction electrode penetrates through the conical part; a permanent magnet slot is formed on the outer surface of the middle part;

103, assembling and placing the front part and the rear part in a sintering mold, wherein the front part is tightly matched with the conical part of the rear part so as to enable the cathode hole and the air inlet hole to be communicated with the reaction chamber;

104, placing a main cathode in the cathode hole, and filling ceramic slurry in the cathode hole to fix the main cathode;

And 105, placing the sintering mold in a heating furnace for sintering.

2. The method according to claim 1, wherein the step 101 specifically comprises:

Cutting the green ceramic tape to form a green ceramic sheet;

Forming through holes and/or openings at the appointed positions of the green ceramic chips to form prefabricated green ceramic chips;

filling a carbon film in the through hole and/or the opening;

And laminating a plurality of the prefabricated green ceramic sheets filled with the carbon film, wherein the through holes are communicated to form the cathode holes, and the openings are communicated with the through holes to form the air inlets.

3. The method according to claim 1, wherein the step 102 specifically comprises:

Cutting the green ceramic tape to form a green ceramic sheet;

Forming openings and/or through holes in the green ceramic sheet to form a prefabricated green ceramic sheet;

printing the extraction electrode on the prefabricated green ceramic chip;

Laminating a plurality of prefabricated green ceramic sheets with gradually increasing external dimensions to form the conical part, wherein the extraction electrode is formed on the conical part;

Stacking a plurality of prefabricated green ceramic chips with the same overall dimension as the largest prefabricated green ceramic chip of the conical part to form the barrel part, wherein the conical part is communicated with the through hole of the barrel part to form a reaction chamber, and the permanent magnet slot is formed by the opening;

Filling a carbon film in the through hole of the prefabricated green ceramic chip, printing a grid metal layer on the surface of the prefabricated green ceramic chip filled with the carbon film to form the accelerating grid cathode and the accelerating grid anode, and forming the spray hole by the through hole filled with the carbon film;

Sequentially laminating and laminating the accelerating grid anode, the prefabricated green ceramic chip and the accelerating grid cathode to form the tail part;

the cone portion, the barrel portion, the pre-formed carbon block, and the tail portion are sequentially laminated together and laminated.

4. The method according to any one of claims 1 to 3, wherein the step 101 further comprises: forming a first temperature sensor, a first pressure sensor and a vibration sensor before stacking the prefabricated green ceramic chips;

The step 102 further comprises: forming a second temperature sensor and a second pressure sensor before laminating the prefabricated green ceramic sheets.

5. The method according to claim 4, characterized in that the step of forming the first temperature sensor or the second temperature sensor comprises in particular:

forming a medium through hole on the first green ceramic chip;

filling temperature-sensitive ceramic in the medium through hole;

Printing an upper electrode on the surface, facing the first green ceramic chip, of a second green ceramic chip adjacent to the first green ceramic chip, wherein the upper electrode covers the medium through hole and extends to the edge of the second green ceramic chip;

And printing a lower electrode on the surface, facing the first green ceramic chip, of a third green ceramic chip adjacent to the lower part of the first green ceramic chip, wherein the lower electrode covers the medium through hole and extends to the edge of the third green ceramic chip.

6. The method according to claim 4, characterized in that the step of forming the first pressure sensor or the second pressure sensor comprises in particular:

Forming a medium through hole on the first green ceramic chip;

filling a carbon film in the medium through hole;

Printing an upper electrode on the surface, facing the first green ceramic chip, of a second green ceramic chip adjacent to the first green ceramic chip, wherein the upper electrode covers the medium through hole and extends to the edge of the second green ceramic chip;

and printing a lower electrode on the surface, facing the first green ceramic chip, of a third green ceramic chip adjacent to the lower part of the first green ceramic chip, wherein the lower electrode covers the medium through hole and extends to the edge of the third green ceramic chip.

7. the method according to claim 4, characterized in that the step of forming the vibration sensor comprises in particular:

Forming a cross micro-beam on the first green ceramic chip;

Forming a first medium through hole on a second green ceramic chip below the first green ceramic chip in a position corresponding to the crisscross micro-beam;

forming a second medium through hole on a third green ceramic chip above the first green ceramic chip at a position corresponding to the cross micro-beam;

Filling carbon films in the first dielectric through hole and the second dielectric through hole;

Printing a lower electrode on the crossed micro-beam, wherein the lower electrode extends to the edge of the first green ceramic chip;

And printing an upper electrode on the surface, facing the third green ceramic chip, of a fourth green ceramic chip above the third green ceramic chip, wherein the upper electrode covers the second medium through hole and extends to the edge of the fourth green ceramic chip.

8. The method of claim 1, further comprising placing permanent magnets in the permanent magnet slots.

9. An ion thruster prepared by the method of any one of claims 1 to 8.

10. The ion thruster of claim 9, further comprising a neutralizer duct located at a side of the tail for ejecting negatively charged ions around the tail.

Technical Field

The invention relates to the technical field of space propulsion, in particular to an ion propeller and a preparation method thereof.

Background

An ion thruster, also called ion engine, is one of the space electric propulsion technologies, and is characterized by small thrust and high specific impulse, and is widely applied to space propulsion of a microsatellite, such as attitude control, position maintenance, orbital maneuver, space flight and the like.

With the wide application of microsatellites in the fields of communication, ground remote sensing, interplanetary detection and the like, the application demand of the ion thruster is continuously increased, and the ion thruster with simple preparation process and low cost becomes the first choice. In addition, as the cosmos environment in which the microsatellite works is complex, and particularly the temperature change range is large, higher requirements are put on the high-temperature resistance of the used ion thruster.

Disclosure of Invention

The invention provides an ion thruster and a preparation method thereof, the preparation method has simple process and low cost, and the ion thruster prepared by the method has good high temperature resistance.

the invention provides a preparation method of an ion thruster, which comprises the following steps: step 101, laminating and laminating a plurality of prefabricated green tiles to form a front part, wherein the front part comprises a cathode hole and an air inlet hole; 102, stacking and laminating a plurality of prefabricated green ceramic chips to form a rear part, wherein the rear part comprises a middle part and a tail part, and the middle part comprises a conical part and a barrel part; a reaction chamber is positioned in the middle part, a prefabricated carbon block with the shape matched with that of the reaction chamber is placed in the reaction chamber, and an anode metal layer is formed on the surface of the prefabricated carbon block at a position corresponding to the conical part; the tail part comprises an accelerating grid cathode and an accelerating grid anode which are provided with a plurality of spray holes and are oppositely arranged at a certain distance; the extraction electrode penetrates through the conical part; a permanent magnet slot is formed on the outer surface of the middle part; 103, assembling and placing the front part and the rear part in a sintering mold, wherein the front part is tightly matched with the conical part of the rear part so as to enable the cathode hole and the air inlet hole to be communicated with the reaction chamber; 104, placing a main cathode in the cathode hole, and filling ceramic slurry in the cathode hole to fix the main cathode; and 105, placing the sintering mold in a heating furnace for sintering.

further, the step 101 specifically includes: cutting the green ceramic tape to form a green ceramic sheet; forming through holes and/or openings at the appointed positions of the green ceramic chips to form prefabricated green ceramic chips; filling a carbon film in the through hole and/or the opening; and laminating a plurality of the prefabricated green ceramic sheets filled with the carbon film, wherein the through holes are communicated to form the cathode holes, and the openings are communicated with the through holes to form the air inlets.

Further, the step 102 specifically includes: cutting the green ceramic tape to form a green ceramic sheet; forming openings and/or through holes in the green ceramic sheet to form a prefabricated green ceramic sheet; printing the extraction electrode on the prefabricated green ceramic chip; laminating a plurality of prefabricated green ceramic sheets with gradually increasing external dimensions to form the conical part, wherein the extraction electrode is formed on the conical part; stacking a plurality of prefabricated green ceramic chips with the same overall dimension as the largest prefabricated green ceramic chip of the conical part to form the barrel part, wherein the conical part is communicated with the through hole of the barrel part to form a reaction chamber, and the permanent magnet slot is formed by the opening; filling a carbon film in the through hole of the prefabricated green ceramic chip, printing a grid metal layer on the surface of the prefabricated green ceramic chip filled with the carbon film to form the accelerating grid cathode and the accelerating grid anode, and forming the spray hole by the through hole filled with the carbon film; sequentially laminating and laminating the accelerating grid anode, the prefabricated green ceramic chip and the accelerating grid cathode to form the tail part; the cone portion, the barrel portion, the pre-formed carbon block, and the tail portion are sequentially laminated together and laminated.

Further, the step 101 further includes: forming a first temperature sensor, a first pressure sensor and a vibration sensor before stacking the prefabricated green ceramic chips; the step 102 further comprises: forming a second temperature sensor and a second pressure sensor before laminating the prefabricated green ceramic sheets.

Optionally, the step of forming the first temperature sensor or the second temperature sensor specifically includes: forming a medium through hole on the first green ceramic chip; filling temperature-sensitive ceramic in the medium through hole; printing an upper electrode on the surface, facing the first green ceramic chip, of a second green ceramic chip adjacent to the first green ceramic chip, wherein the upper electrode covers the medium through hole and extends to the edge of the second green ceramic chip; and printing a lower electrode on the surface, facing the first green ceramic chip, of a third green ceramic chip adjacent to the lower part of the first green ceramic chip, wherein the lower electrode covers the medium through hole and extends to the edge of the third green ceramic chip.

Optionally, the step of forming the first pressure sensor or the second pressure sensor specifically includes: forming a medium through hole on the first green ceramic chip; filling a carbon film in the medium through hole; printing an upper electrode on the surface, facing the first green ceramic chip, of a second green ceramic chip adjacent to the first green ceramic chip, wherein the upper electrode covers the medium through hole and extends to the edge of the second green ceramic chip; and printing a lower electrode on the surface, facing the first green ceramic chip, of a third green ceramic chip adjacent to the lower part of the first green ceramic chip, wherein the lower electrode covers the medium through hole and extends to the edge of the third green ceramic chip.

Optionally, the step of forming the vibration sensor specifically includes: forming a cross micro-beam on the first green ceramic chip; forming a first medium through hole on a second green ceramic chip below the first green ceramic chip in a position corresponding to the crisscross micro-beam; forming a second medium through hole on a third green ceramic chip above the first green ceramic chip at a position corresponding to the cross micro-beam; filling carbon films in the first dielectric through hole and the second dielectric through hole; printing a lower electrode on the crossed micro-beam, wherein the lower electrode extends to the edge of the first green ceramic chip; and printing an upper electrode on the surface, facing the third green ceramic chip, of a fourth green ceramic chip above the third green ceramic chip, wherein the upper electrode covers the second medium through hole and extends to the edge of the fourth green ceramic chip.

Optionally, the preparation method further comprises placing a permanent magnet in the permanent magnet slot.

The invention provides an ion thruster which is prepared by the method.

Furthermore, the ion thruster also comprises a neutralizing agent pipeline which is positioned at one side of the tail part and is used for spraying negative ions to the periphery of the tail part.

In the preparation method of the ion thruster and the ion thruster prepared by the method, a modularized processing method is adopted, the front part of the ion thruster is firstly manufactured, then the rear part is manufactured, and finally the two parts are butt-jointed and sintered, in addition, when each module is manufactured, a method of overlapping and laminating a plurality of prefabricated green ceramic sheets is adopted, the method is simple and convenient to realize, and the cost of the ceramic material is low, so the manufacturing cost of the ion thruster is obviously reduced.

In addition, the green ceramic chip formed by the cutting process can be very thin, and the hole formed by the punching process can be very small, so that after lamination, the whole size of the ion thruster can be very small and can reach millimeter level or even micron level so as to be suitable for different occasions.

drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly introduced below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.

Fig. 1 is a perspective view of an ion thruster provided in an embodiment of the present invention;

FIG. 2 is a schematic cross-sectional view of the ion thruster shown in FIG. 1;

FIG. 3 is a schematic front and rear view of the lamination of green tiles in the front portion of the ion thruster shown in FIG. 1;

FIG. 4 is a schematic front and rear view of the lamination of green tiles in the rear portion of the ion thruster shown in FIG. 1;

FIG. 5 is a schematic view of the front and rear portions of the ion thruster shown in FIG. 1;

FIG. 6 is a schematic cross-sectional view of the assembled ion thruster shown in FIG. 5;

fig. 7 is a flowchart of a method for manufacturing an ion thruster according to an embodiment of the present invention;

FIG. 8 is a flow chart of a method of forming a front portion according to an embodiment of the present invention;

FIG. 9 is a flow chart of a method of forming a rear portion according to an embodiment of the present invention;

FIG. 10 is a flow chart of a method of forming a temperature sensor according to an embodiment of the present invention;

FIG. 11 is a flow chart of a method of forming a pressure sensor according to an embodiment of the present invention;

fig. 12 is a flow chart of a method for forming a vibration sensor according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

in order to make the technical solution of the present invention clearer, embodiments of the present invention are described in detail below with reference to the accompanying drawings.

Fig. 1 is a perspective view of an ion thruster provided in an embodiment of the present invention; FIG. 2 is a schematic cross-sectional view of the ion thruster shown in FIG. 1; FIG. 3 is a schematic front and rear view of the lamination of green tiles in the front portion of the ion thruster shown in FIG. 1; FIG. 4 is a schematic front and rear view of the lamination of green tiles in the rear portion of the ion thruster shown in FIG. 1; FIG. 5 is a schematic view of the front and rear portions of the ion thruster shown in FIG. 1; FIG. 6 is a schematic cross-sectional view of the assembled ion thruster shown in FIG. 5; fig. 7 is a flowchart of a method for manufacturing an ion thruster according to an embodiment of the present invention; FIG. 8 is a flow chart of a method of forming a front portion according to an embodiment of the present invention; FIG. 9 is a flow chart of a method of forming a rear portion according to an embodiment of the present invention; FIG. 10 is a flow chart of a method of forming a temperature sensor according to an embodiment of the present invention; FIG. 11 is a flow chart of a method of forming a pressure sensor according to an embodiment of the present invention; fig. 12 is a flow chart of a method for forming a vibration sensor according to an embodiment of the present invention.

the embodiment of the invention provides a preparation method of an ion thruster, which comprises the following steps as shown in figures 1-7.

In step 101, a plurality of prefabricated green ceramic tiles p are laminated and laminated to form a front part 51, the front part 51 including cathode holes k1 and air inlet holes k 2.

the green ceramic pieces can be obtained by cutting ALN (aluminum nitride) or AL ₂ O ₃ (aluminum oxide) green ceramic strips, and the green ceramic pieces are required to be provided with required through holes and openings at specified positions by adopting a punching process so as to form prefabricated green ceramic pieces.

102, stacking and laminating a plurality of prefabricated green ceramic tiles p to form a rear part B, wherein the rear part B comprises a middle part 53 and a tail part 52, the middle part 53 comprises a conical part B1 and a barrel part B2, a reaction chamber c is positioned in the middle part 53, a prefabricated carbon block t with the shape matched with the reaction chamber c is placed in the reaction chamber c, the surface of the prefabricated carbon block t is provided with an anode metal layer 21 at a position corresponding to the conical part B1, the tail part 52 comprises an acceleration grid anode s1 and an acceleration grid cathode s2 which are provided with a plurality of spray holes k4 and are oppositely arranged at a certain interval, a leading-out electrode 3 penetrates through the conical part B1, and a permanent magnet slot k3 is formed in the outer surface of the middle part and.

The prefabricated carbon block t is formed by laminating and laminating a plurality of layers of carbon films m, the outline of the prefabricated carbon block t is matched with the reaction chamber c, so that the prefabricated carbon block t can be filled in the reaction chamber c in the process of forming the rear part B, and the laminated structure cannot be deformed due to the existence of the cavity when the prefabricated green ceramic chip p is laminated. In addition, an anode metal layer 21 is formed on the surface of the prefabricated carbon block t at a position corresponding to the conical part b1, the anode metal layer 21 is adhered to the inner surface of the conical part b1 and fixed and formed along with the volatilization of the prefabricated carbon block t in the subsequent sintering step to form a main anode 2, the main anode 2 is electrically connected with one end of the extraction electrode 3 penetrating through the conical part b1, and the other end of the extraction electrode 3 extends to the outer surface of the conical part b1 and is used for being electrically connected with an external power supply anode.

Step 103, placing the front part 51 and the back part B in a sintering mold in an assembly manner, wherein the front part 51 is tightly matched with the conical part B1 of the back part B, so that the cathode hole k1 and the air inlet hole k2 are communicated with the reaction chamber c.

Step 104, the main cathode 1 is placed in the cathode hole k1, and ceramic slurry is filled in the cathode hole to fix the main cathode 1.

And 105, placing the sintering mold in a heating furnace for sintering.

The sintering process, namely the co-firing process can be a low temperature co-firing process (LTCC) or a high temperature co-firing process (HTCC), is used for sintering the laminated prefabricated green ceramic chips into a whole to form a ceramic material body 5, and a main cathode 1, a main anode 2 and an extraction electrode 3 which are fixed on the body 5.

In the preparation method of the ion thruster provided by the invention, a modularized processing method is adopted, the front part of the ion thruster is firstly manufactured, then the rear part is manufactured, and finally the two parts are in butt joint sintering, in addition, when each module is manufactured, a method of laminating a plurality of prefabricated green ceramic sheets is adopted, the method is simple and convenient to realize, and the cost of the ceramic material is low, so the manufacturing cost of the ion thruster is obviously reduced.

In addition, the green ceramic chip formed by the cutting process can be very thin, and the hole formed by the punching process can be very small, so that after lamination, the whole size of the ion thruster can be very small and can reach millimeter level or even micron level so as to be suitable for different occasions. The existing ion thruster main body is mostly made of metal materials, the preparation method mainly comprises the step of carrying out compression molding on the metal materials, the structure formed by the method cannot reach a millimeter level, and the ion thruster with a small size cannot be manufactured.

In the above manufacturing method, the method of forming the front part in step 101 may specifically include the following steps as shown in fig. 8.

Step 1011, cutting the green tape to form a green tile.

The material of the green tape may be ALN (aluminum nitride) or AL ₂ O ₃ (aluminum oxide), but the present invention is not limited thereto.

In step 1012, through holes and/or openings are formed in the green ceramic sheet to form a pre-fabricated green ceramic sheet p.

As shown in fig. 3 and 5, both the through-hole (e.g., cathode hole k1) and the opening (e.g., gas channel o3) were formed through the green ceramic sheet, and the opening left the edge portion of the green ceramic sheet open, whereas the through-hole did not.

Step 1013, filling a carbon film in the via hole and/or the opening.

The purpose of filling the carbon film is to fill the cavity on the prefabricated green ceramic chip, so that the laminated structure is not deformed due to the existence of the cavity when the prefabricated green ceramic chip is subsequently laminated. Some of the prefabricated green ceramic pieces p have only openings or only through holes, and some of the prefabricated green ceramic pieces p have both openings and through holes, so that when a carbon film is filled in one of the prefabricated green ceramic pieces p, only the through holes need to be filled, only the openings need to be filled, and the through holes and the openings need to be filled.

And 1014, laminating and laminating a plurality of prefabricated green ceramic chips filled with carbon films, wherein the through holes are communicated to form cathode holes k1, and the openings are communicated with the through holes to form air inlet holes k 2.

as shown in fig. 3 and 5, the circular holes at the center of each of the prefabricated green ceramic pieces p are communicated to form a cathode hole k1 for receiving the main cathode 1. The two prefabricated green ceramic pieces p with the openings are simultaneously provided with large round holes which are communicated with the openings, and the prefabricated green ceramic pieces p below the openings are also surrounded by 8 small round holes at the periphery of the round hole at the center. When these prefabricated green tiles are laminated and laminated, two laminated openings communicate to form the air passage o3 in the air intake hole k2, a plurality of laminated large circular holes form the large circular hole o2 in the air intake hole k2, a plurality of laminated small circular holes form the small circular hole o1 in the air intake hole k2, and the air passage o3, the large circular hole o2 and the small circular hole o1 communicate to form the air intake hole k 2.

It should be noted that: the shape, size, number and arrangement of the through holes and openings are not limited to those shown in the drawings, and may be any shape, size, number and arrangement known to those skilled in the art.

in the above method for manufacturing the ion thruster, the method for forming the rear portion in step 102 may specifically include the following steps as shown in fig. 9.

step 1021, cutting the green tape to form a green ceramic chip.

The material of the green tape may be ALN (aluminum nitride) or AL ₂ O ₃ (aluminum oxide), but the present invention is not limited thereto.

at step 1022, openings and/or through-holes kt are formed in the green ceramic sheet to form a pre-fabricated green ceramic sheet.

As shown in fig. 4 and 5, both the through hole kt and the opening (e.g., permanent magnet slot k3) are formed through the green ceramic sheet, the opening leaves the edge portion of the green ceramic sheet open, but the through hole kt does not.

And step 1023, printing an extraction electrode on the prefabricated green ceramic chip.

The extraction electrode 3 is used to extend the main anode 2 on the inner wall surface of the cone portion b1 to the outer wall of the cone portion b1, so that the via wall on the prefabricated green tile on which the lead electrode 3 is formed is a part of the inner wall of the cone portion b1 to be formed in the future, and the printed extraction electrode 3 reaches the via wall at one end and the outer surface of the prefabricated green tile at the other end.

In step 1024, a plurality of pre-fabricated green ceramic pieces having gradually increasing outer dimensions are stacked to form a tapered portion b1, and the lead electrode 3 is formed on the tapered portion.

The plurality of prefabricated green ceramic pieces p forming the tapered portion b1 include prefabricated green ceramic pieces on which lead-out electrodes are printed, and the prefabricated green ceramic pieces p are gradually increased in outer dimensions and stacked to form a tapered portion b1 having a tapered outer shape.

And 1025, laminating a plurality of prefabricated green ceramic pieces with the same shape and size as the largest prefabricated green ceramic piece of the cone part to form a barrel part b2, wherein the through holes of the cone part and the barrel part are communicated to form a reaction chamber c, and the opening forms a permanent magnet slot k 3.

As shown in fig. 4 and 5, the 3 prefabricated green ceramic pieces p are all formed with openings, wherein each prefabricated green ceramic piece p is formed with 4 openings, each opening is used for forming a permanent magnet slot k3, the 12 permanent magnet slots k3 are arranged around the outer wall of the barrel part b2 and are uniformly distributed for inserting permanent magnets with different magnetism, so that a magnetic field capable of enabling electrons to do a rotary motion is formed in the reaction chamber c through the action between adjacent opposite magnetic poles, and the probability of collision between the electrons and gas molecules of fuel gas in the reaction chamber c is increased.

it should be noted that: the number and arrangement of the permanent magnet slots k3 is not limited to that shown in the figures, and other numbers and arrangements known to those skilled in the art may be used with the present invention.

And step 1026, filling carbon films in the through holes of the prefabricated green ceramic pieces, printing a grid metal layer on the surfaces of the prefabricated green ceramic pieces filled with the carbon films to form an accelerating grid anode s1 and an accelerating grid cathode s2, and forming the spray holes k4 by the through holes filled with the carbon films.

After the acceleration grid anode s1 and the acceleration grid cathode s2 are connected to the power supply cathode and the power supply anode, respectively, an electric field is formed between the acceleration grid anode s1 and the acceleration grid cathode s2 to accelerate positively charged gas cations to be ejected from the ejection holes k 4. The holes in the pre-fabricated green ceramic tiles used to form the acceleration grid anode s1 and the acceleration grid cathode s2 form the orifices k 4.

Before printing a grid metal layer on the surface of the prefabricated green ceramic chip, a carbon film is required to be filled in the through hole, and the purpose of filling the carbon film is to fill the cavity on the prefabricated green ceramic chip, so that the laminated structure cannot be deformed due to the existence of the cavity when the prefabricated green ceramic chip is subsequently laminated.

Step 1027, stacking and laminating the accelerating grid anode s1, the prefabricated green ceramic pieces p and the accelerating grid cathode s2 in sequence to form the tail part 52.

The accelerating grid anode s1 and the accelerating grid cathode s2 are spaced apart to ensure that an electric field is formed between them, and therefore, when the tail portion 52 is formed, a preformed green ceramic sheet p is sandwiched between the accelerating grid anode s1 and the accelerating grid cathode s2 to form a space, and a through hole is formed in the preformed green ceramic sheet, and is large enough to expose all the orifices k4, so that the gas cations can be smoothly ejected.

Step 1028, the cone part b1, the barrel part b2, the prefabricated carbon block t and the tail 52 are laminated together in sequence and laminated.

The prefabricated carbon block t is formed by laminating and laminating a plurality of carbon films, the shape of the prefabricated carbon block t is matched with the reaction chamber c, so that the prefabricated carbon block t can be filled in the reaction chamber c in the process of forming the rear part B, and the laminated structure cannot be deformed due to the existence of the cavity when the prefabricated green ceramic chip p is laminated. In addition, an anode metal layer 21 is formed on the surface of the prefabricated carbon block t at a position corresponding to the conical part b1, the anode metal layer 21 is adhered to the inner surface of the conical part b1 and fixed and formed along with the volatilization of the prefabricated carbon block t in the subsequent sintering step to form a main anode 2, the main anode 2 is electrically connected with one end of the extraction electrode 3 penetrating through the conical part b1, and the other end of the extraction electrode 3 extends to the outer surface of the conical part b1 and is used for being electrically connected with an external power supply anode.

In the above manufacturing method, the method for forming the front portion 51 in step 101 may further include: before the pre-fabricated ceramic tiles are stacked, the first temperature sensor w1, the first pressure sensor y1 and the vibration sensor z are formed, and the step 102 of forming the rear portion B may further include: before the pre-fabricated green tiles are laminated, a second temperature sensor w2 and a second pressure sensor y2 are formed.

The first temperature sensor w1, the first pressure sensor y1, and the vibration sensor z formed at the front portion 51 can be used to detect the temperature, pressure, and vibration information of the environment where the ion thruster is located, respectively, so as to prevent the ion thruster from being damaged by the harsh environment. And a second temperature sensor w2 and a second pressure sensor y2 formed at the rear portion B may be used to detect temperature and pressure information inside the ion thruster reaction chamber c to monitor the normal operation of the ion thruster.

Specifically, the first temperature sensor w1 and the second temperature sensor w2 are formed similarly, and may include the following steps as shown in fig. 10.

Step 201, forming a medium through hole on the first green ceramic sheet.

the temperature sensor structurally comprises an upper electrode, a lower electrode and temperature-sensitive ceramic between the upper electrode and the lower electrode, wherein the temperature-sensitive ceramic is filled in a medium through hole, as shown in figures 3-5, a green ceramic chip used for forming the medium through hole is designated as a first green ceramic chip. The step of forming the dielectric through holes can be performed simultaneously with or after the step of forming the pre-ceramic tiles 1012 when forming the first temperature sensor w 1. Similarly, the step of forming the dielectric through holes can also be performed simultaneously with or after the step of forming the pre-ceramic tiles 1012 when forming the second temperature sensor w 2. The step of forming the dielectric through holes is performed simultaneously with the step 1012 of forming the precast green ceramic pieces, the first green ceramic pieces are green ceramic pieces formed by cutting a green ceramic tape, and the step of forming the dielectric through holes is performed after the step 1012 of forming the precast green ceramic pieces, the first green ceramic pieces are precast green ceramic pieces.

Step 202, filling temperature-sensitive ceramic in the medium through hole.

the temperature sensitive ceramic is also called as thermal sensitive ceramic, and is a material with resistivity which obviously changes along with temperature. The method can be used for manufacturing temperature sensors, temperature measurement, line temperature compensation, frequency stabilization and the like.

Step 203, printing an upper electrode on the surface of the second green ceramic sheet adjacent to the first green ceramic sheet facing the first green ceramic sheet, wherein the upper electrode covers the medium through hole and extends to the edge of the second green ceramic sheet.

As shown in fig. 3-5, the green ceramic tile adjacent above the first green ceramic tile is designated as the second green ceramic tile, and the upper electrode is printed on the surface of the second green ceramic tile facing the first green ceramic tile, which is the printed upper electrode d1 for the first temperature sensor w1 and the printed upper electrode d3 for the second temperature sensor w 2. The printing step of the electrode d3 on the second temperature sensor w2 may be performed simultaneously with or after the step 1023 of printing the extraction electrodes.

the illustrated upper electrode includes a plate-shaped portion covering the dielectric through-hole and a strip-shaped portion extending to an edge of the second green ceramic sheet for connection to an external circuit.

And step 204, printing a lower electrode on the surface, facing the first green ceramic chip, of the third green ceramic chip adjacent to the lower part of the first green ceramic chip, wherein the lower electrode covers the medium through hole and extends to the edge of the third green ceramic chip.

as shown in fig. 3-5, the green ceramic tile adjacent below the first green ceramic tile is designated as the third green ceramic tile, and the lower electrode is printed on the surface of the third green ceramic tile facing the first green ceramic tile, which is printed lower electrode d2 for the first temperature sensor w1 and printed lower electrode d4 for the second temperature sensor w 2. The printing step of the lower electrode d4 of the second temperature sensor w2 may be performed simultaneously with or after the step 1023 of printing the extraction electrodes.

The illustrated lower electrode includes a plate-shaped portion covering the dielectric through-hole and a strip-shaped portion extending to an edge of the third green ceramic sheet for connection to an external circuit.

In the above step of forming the sensor, the first pressure sensor y1 and the second pressure sensor y2 are formed in a similar manner, and may specifically include the following steps as shown in fig. 11.

Step 301, forming a dielectric via in the first green tile.

The structure of the pressure sensor includes an upper electrode, a lower electrode, and a cavity between the upper electrode and the lower electrode, the cavity is located in the medium through hole, as shown in fig. 3 to 5, the green ceramic sheet for forming the medium through hole is designated as a first green ceramic sheet. It should be noted that the first green ceramic chip, the second green ceramic chip, and the third green ceramic chip are only used for distinguishing each other in the process of forming the pressure sensor, and are not necessarily the same as the green ceramic chips referred to as the first green ceramic chip, the second green ceramic chip, and the third green ceramic chip used for forming the temperature sensor. That is, the first green ceramic sheet in the pressure sensor may be the same as or different from the first green ceramic sheet in the temperature sensor; the second green ceramic chip in the pressure sensor can be the same as or different from the second green ceramic chip of the temperature sensor; the third green ceramic tile in the pressure sensor can be the same as or different from the third green ceramic tile in the temperature sensor.

The step of forming the media through-hole can be performed simultaneously with or after the step of forming the pre-tile 1012 when forming the first pressure sensor y 1. Similarly, the step of forming the dielectric through-hole can also be performed at the same time or after the step of forming the pre-ceramic tile 1012 when forming the second pressure sensor y 2. The step of forming the dielectric through holes is performed simultaneously with the step 1012 of forming the precast green ceramic pieces, the first green ceramic pieces are green ceramic pieces formed by cutting a green ceramic tape, and the step of forming the dielectric through holes is performed after the step 1012 of forming the precast green ceramic pieces, the first green ceramic pieces are precast green ceramic pieces.

And 302, filling a carbon film in the dielectric through hole.

the purpose of filling the carbon film is to fill the cavity formed by the medium through hole, so that the laminated structure cannot be deformed due to the existence of the cavity when the green ceramic chip is laminated and prefabricated subsequently.

Step 303, print an upper electrode on the surface of the second green ceramic tile adjacent to the top of the first green ceramic tile facing the first green ceramic tile, the upper electrode covering the dielectric through hole and extending to the edge of the second green ceramic tile.

As shown in fig. 3-5, the green ceramic tile adjacent above the first green ceramic tile is designated as the second green ceramic tile, and the upper electrode is printed on the surface of the second green ceramic tile facing the first green ceramic tile, which is the printed upper electrode d5 for the first pressure sensor y1 and the printed upper electrode d7 for the second pressure sensor y 2. The printing step of the electrode d7 on the second pressure sensor y2 may be performed simultaneously with or after the step 1023 of printing the extraction electrodes.

The illustrated upper electrode includes a plate-shaped portion covering the dielectric through-hole and a strip-shaped portion extending to an edge of the second green ceramic sheet for connection to an external circuit.

And step 304, printing a lower electrode on the surface, facing the first green ceramic chip, of the third green ceramic chip adjacent to the lower part of the first green ceramic chip, wherein the lower electrode covers the medium through hole and extends to the edge of the third green ceramic chip.

As shown in fig. 3-5, the green ceramic tile adjacent below the first green ceramic tile is designated as the third green ceramic tile, and the lower electrode is printed on the surface of the third green ceramic tile facing the first green ceramic tile, which is the printed lower electrode d6 for the first pressure sensor y1 and the printed lower electrode d8 for the second pressure sensor y 2. The printing step of the lower electrode d8 of the second pressure sensor y2 may be performed simultaneously with or after the step 1023 of printing the lead-out electrodes.

The illustrated lower electrode includes a plate-shaped portion covering the dielectric through-hole and a strip-shaped portion extending to an edge of the third green ceramic sheet for connection to an external circuit.

In the step of forming the sensor, the method of forming the vibration sensor may specifically include the following steps as shown in fig. 12.

Step 401, forming a cross micro beam L on the first green ceramic sheet.

The structure of the vibration sensor comprises an upper electrode, a lower electrode and a cavity between the upper electrode and the lower electrode, wherein the cavity is located in a medium through hole, and as shown in figures 3-5, the second medium through hole is used for forming the cavity medium through hole for the vibration sensor. The green ceramic chip for forming the second medium through hole is designated as a third green ceramic chip, and in addition, in the vibration sensor z, a first medium through hole is further included, which is formed below the crisscross micro-beam L to provide a space for the vibration of the micro-beam.

The cross micro beam L is formed by extending four strip-shaped ceramic materials outwards from the periphery of the ceramic material in the middle, the tail ends of the strip-shaped ceramic materials are connected with the ceramic materials on the periphery, and the ceramic materials on the two sides of the strip-shaped ceramic materials are removed through a punching process to form a cavity.

The step of forming the criss-cross micro-beams L may be performed simultaneously with or after the step of forming the pre-fabricated green tiles 1012. The step of forming the crisscross micro-beam L is performed simultaneously with the step of forming the pre-ceramic pieces 1012, the first green ceramic pieces are green ceramic pieces formed by cutting green ceramic tapes, and the step of forming the crisscross micro-beam L is performed after the step of forming the pre-ceramic pieces 1012, the first green ceramic pieces are pre-manufactured green ceramic pieces.

Step 402, forming a first medium through hole on a second green ceramic chip below the first green ceramic chip at a position corresponding to the cross micro-beam.

The step of forming the first dielectric via can be performed simultaneously with or after the step of forming 1012 a pre-ceramic tile. The step of forming the first dielectric through-holes is performed simultaneously with the step of forming the green ceramic pieces 1012, the second green ceramic pieces are green ceramic pieces formed by cutting the green ceramic tape, and the step of forming the first dielectric through-holes is performed after the step of forming the green ceramic pieces 1012, the second green ceramic pieces are green ceramic pieces.

and step 403, forming a second medium through hole on the third green ceramic chip above the first green ceramic chip at a position corresponding to the cross micro-beam.

The step of forming the second dielectric via can be performed simultaneously with or after the step of forming 1012 a pre-ceramic tile. The step of forming the second medium through-holes is performed simultaneously with the step 1012 of forming the green ceramic pieces, the third green ceramic pieces are green ceramic pieces formed by cutting the green ceramic tape, and the step of forming the medium through-holes is performed after the step 1012 of forming the green ceramic pieces, the third green ceramic pieces are green ceramic pieces.

and step 404, filling carbon films in the first dielectric through hole and the second dielectric through hole.

The purpose of filling the carbon film is to fill the cavity formed by the medium through hole, so that the laminated structure cannot be deformed due to the existence of the cavity when the green ceramic chip is laminated and prefabricated subsequently.

Step 405, printing a lower electrode on the crisscross micro-beam, wherein the lower electrode extends to the edge of the first green ceramic chip.

As shown in fig. 3 to 5, the ceramic material in the middle of the crisscross micro-beam L forms a platform on which an electrode is printed as a lower electrode d10 of the vibration sensor. This printing step may be performed simultaneously with or after the step 1023 of printing the extraction electrodes.

The illustrated lower electrode includes a plate-shaped portion covering the dielectric through-hole and a strip-shaped portion extending to an edge of the first green ceramic sheet through a micro-beam for connection to an external circuit.

and 406, printing an upper electrode on the surface, facing the third green ceramic chip, of the fourth green ceramic chip above the third green ceramic chip, wherein the upper electrode covers the second medium through hole and extends to the edge of the fourth green ceramic chip.

As shown in fig. 3 to 5, the green ceramic tile adjacent above the third green ceramic tile is designated as a fourth green ceramic tile, and an upper electrode d9 is printed on the surface of the fourth green ceramic tile facing the third green ceramic tile. The printing step of electrode d9 on vibration sensor z may be performed simultaneously with or after the printing step 1023 of the extraction electrodes.

The illustrated upper electrode includes a plate-shaped portion covering the second dielectric via hole and a strip-shaped portion extending to an edge of the fourth green ceramic sheet for connection to an external circuit.

the temperature sensor, the pressure sensor and the vibration sensor are collectively referred to as a parameter sensor, and the upper electrode and the lower electrode of the parameter sensor can be made of a high temperature resistant metal material, such as platinum or gold, although the invention is not limited thereto, and any high temperature resistant metal material can be used in the invention.

In the ion thruster, an antenna and a passive element, such as an LC sensor, may be integrated to form a wireless passive measurement mode.

When the parameter sensor is integrated in the ion thruster by the method described in the embodiment, the upper electrode and the lower electrode can both adopt a printing method, the printed metal layer is very thin, the size of the laminated structure cannot be excessively increased, the process is simple, the dielectric layer (temperature-sensitive ceramic or cavity) between the other two electrodes is also formed by utilizing the dielectric through holes on the ceramic sheet, the thickness is very thin, only the punching process is used, and the process cost is low. Therefore, the preparation method of the ion thruster provided by the embodiment of the invention has the advantages of simple process and low cost, and the ion thruster prepared by the method has smaller size.

As shown in fig. 1 to 6, the present embodiment further provides an ion thruster, and the ion thruster is prepared by the method for preparing the ion thruster described in the above embodiments.

Specifically, the ion thruster comprises a main cathode 1, a main anode 2, an extraction electrode 3, a permanent magnet and a body 5 formed by laminating and co-firing a plurality of prefabricated green ceramic chips p. The body 5 includes a front portion 51, a rear portion 52, and a middle portion 53 between the front portion 51 and the rear portion 52, wherein the middle portion 53 has a hollow reaction chamber c therein.

the front part 51 is formed with cathode holes k1 and air intake holes k2 communicating with the reaction chamber c, and the main cathode 1 is inserted into the reaction chamber c through the cathode holes k1 and fixed in the cathode holes k 1. The middle part 53 is formed at its outer surface with permanent magnet slots k3, and permanent magnets are fixed in the permanent magnet slots k3 for forming a magnetic field in the reaction chamber c. The middle part 53 includes a tapered part b1 connected to the front part 51 and a barrel part b2 connected to the rear part, and the main anode 2 is attached to the inner wall surface of the tapered part b 1; the extraction electrode 3 is electrically connected to the main anode 2 through the tapered portion b 1.

The tail portion 52 includes an acceleration grid anode s1 and an acceleration grid cathode s2 having a plurality of orifices k4 and disposed opposite to each other at a certain distance for forming an electric field at the tail portion 52.

when the ion thruster is operated, as shown in fig. 1 and 2, fuel gas enters the reaction chamber c through the gas inlet hole k2, the main anode 2 is attached to the inner wall surface of the conical part b1, and the main anode 2 is electrically connected with the power anode outside the body 5 through the extraction electrode 3 penetrating the conical part b 1; a permanent magnet is fixed in a permanent magnet slot k3 on the outer surface of the middle part 53 of the body 5 for generating a magnetic field in the reaction chamber c; the main cathode 1 is electrically connected with the power supply cathode and then releases electrons, the released electrons do accelerated motion towards the main anode 2 under the action of an electric field between the main cathode 1 and the main anode 2, and meanwhile, the probability of collision between the electrons and gas molecules of fuel gas in the reaction chamber c is increased due to the fact that the electrons generate cyclotron motion under the action of a magnetic field due to Lorentz force; the positive gas cations and the free electrons are generated after the electrons collide with the gas molecules, and the positive gas cations are accelerated by an electric field formed by the accelerating grid anode s1 and the accelerating grid cathode s2 at the tail part 52 of the body 5 and then are ejected from the tail part at a high speed through the spray hole k4 to form thrust.

The green ceramic pieces can be obtained by cutting ALN (aluminum nitride) or AL ₂ O ₃ (aluminum oxide) green ceramic strips, and the cut green ceramic pieces are required to be provided with required through holes at specified positions by adopting a punching process so as to form prefabricated green ceramic pieces.

the lamination process is to extrude the laminated prefabricated green ceramic sheets to exhaust the air in the gaps between the layers. The co-firing process may be a Low-Temperature co-fired Ceramic (LTCC) process or a High-Temperature co-fired Ceramic (HTCC) process, and is used to integrally fire the laminated prefabricated green Ceramic sheets to form the Ceramic body 5.

In the ion thruster provided by the invention, because a plurality of prefabricated green ceramic sheets are laminated together when the body is formed, and the body formed by the ceramic materials is formed after lamination and co-firing, the cost of the ceramic materials is low, the cost of the ion thruster is obviously reduced, in addition, the ion thruster can be formed only by simple lamination, lamination and co-firing, the preparation process is simple, the co-firing process can be a high-temperature co-firing process or a low-temperature co-firing process, and the fired ceramic materials have the advantages of corrosion resistance, high temperature resistance, long service life, good heat conduction performance and the like, so the prepared ion thruster also has good high-temperature resistance performance.

As in the previous embodiments, the ion thruster may also be of a smaller size to suit different applications.

The ion thruster may further include a plurality of parameter sensors for detecting parameter information such as temperature, pressure, vibration, etc., the parameter sensors including an upper electrode, a lower electrode, and a dielectric layer between the upper electrode and the lower electrode. In particular, the parameter sensor may be a temperature sensor, a pressure sensor or a vibration sensor.

When the parameter sensor is a temperature sensor, a first temperature sensor w1 may be disposed at the front portion 51 for detecting the ambient temperature around the front portion 51, so as to prevent the ion thruster from being damaged due to the excessive temperature of the environment in which the ion thruster operates. In addition, a second temperature sensor w2 can be further disposed in the middle portion 53 for detecting the temperature inside the cavity of the reaction chamber c in the middle portion 53, so as to prevent the temperature inside the cavity from being too high and causing damage to the ion thruster.

The first temperature sensor w1 includes an upper electrode d1, a lower electrode d2, and a temperature sensitive ceramic j1 located between the upper electrode d1 and the lower electrode d 2. The temperature sensitive ceramic is also called as thermal sensitive ceramic, and is a material with resistivity which obviously changes along with temperature. The method can be used for manufacturing temperature sensors, temperature measurement, line temperature compensation, frequency stabilization and the like. Temperature sensitive ceramic j1 is filled in a cavity in the ceramic material of front part 51.

The second temperature sensor w2 has the same structure as the first temperature sensor w1, and also includes an upper electrode d3, a lower electrode d4, and a temperature-sensitive ceramic j2 located between the upper electrode d3 and the lower electrode d 4. Temperature sensitive ceramic j2 is filled in a cavity in the ceramic material of the middle section 53. Since the first temperature sensor w1 is used to detect the ambient temperature around the front part 51, the first temperature sensor w1 is located closer to the outer surface of the front part 51, i.e., the cavity where the temperature sensitive ceramic j1 is located is closer to the outer surface of the front part 51, and the second temperature sensor w2 is used to detect the temperature inside the cavity of the reaction chamber c inside the middle part 53, the second temperature sensor w2 is located closer to the inner surface of the middle part 53, making it closer to the reaction chamber c, i.e., the cavity where the temperature sensitive ceramic j2 is located is closer to the inner surface of the middle part 53.

When the parameter sensor is a pressure sensor, a first pressure sensor y1 may be disposed at the front portion 51 for detecting the ambient pressure around the front portion 51, so as to prevent the ion thruster from being damaged due to the excessive pressure of the environment in which the ion thruster operates. In addition, a second pressure sensor y2 may be disposed in the middle portion 53 for detecting the pressure in the cavity of the reaction chamber c in the middle portion 53 to prevent the pressure in the cavity from being too high and causing damage to the ion thruster.

The first pressure sensor y1 includes an upper electrode d5, a lower electrode d6, and an air gap j3 between the upper electrode d5 and the lower electrode d 6. The air gap j3 is located in a cavity in the ceramic material of the front portion 51, and when the ambient pressure changes, the ceramic material is deformed by the force to deform the cavity, so that the thickness of the air gap j3 between the upper electrode d5 and the lower electrode d6 changes, and the electrical parameter of the first pressure sensor y1 changes.

The second pressure sensor y2 has the same structure as the first pressure sensor y1, and also includes an upper electrode d7, a lower electrode d8, and an air gap j4 between the upper electrode d7 and the lower electrode d 8. The air gap j4 is located in a cavity in the ceramic material of the middle portion 53, and when the environmental pressure changes, the ceramic material is deformed by the force, so that the cavity is deformed, and the thickness of the air gap j4 between the upper electrode d7 and the lower electrode d8 is changed, and the electrical parameter of the second pressure sensor y2 is changed.

Since the first pressure sensor y1 is used to detect the ambient pressure around the front portion 51, the first pressure sensor y1 is located closer to the outer surface of the front portion 51, i.e. the cavity is closer to the outer surface of the front portion 51, while the second pressure sensor y2 is used to detect the intra-cavity pressure of the reaction chamber c in the middle portion 53, so the second pressure sensor y2 is located closer to the inner surface of the middle portion 53, making it closer to the reaction chamber c, i.e. the cavity where the air gap j4 is located, is closer to the inner surface of the middle portion 53.

when the parameter sensor is a vibration sensor, a vibration sensor z may be disposed at the front portion 51 for detecting environmental vibration around the front portion 51, so as to prevent the ion thruster from being damaged due to excessive vibration of the environment in which the ion thruster operates.

The vibration sensor z comprises an upper electrode d9, a lower electrode d10, and an air gap j5 between the upper electrode d9 and the lower electrode d10, the air gap j5 being located in the cavity in the ceramic material of the front portion 51, unlike the pressure sensor, the lower electrode d10 is formed on the criss-cross micro-beam L. The cross micro beam L is formed by extending four strip-shaped porcelain materials outwards from the periphery of the porcelain material in the middle, the tail ends of the strip-shaped porcelain materials are connected with the porcelain materials on the periphery, and the porcelain materials on the two sides of the strip-shaped porcelain materials are removed to form a cavity. In addition, cavities are formed above and below the crossed micro-beam L, so that when the environment where the ion thruster is located vibrates, the crossed micro-beam L can vibrate. A lower electrode d10 of the vibration sensor z is formed on the porcelain material in the middle of the cross micro beam L, a cavity is formed above the lower electrode d10, an air gap j5 therein serves as a dielectric layer of the vibration sensor z, and an upper electrode d9 is formed above the cavity. The vibration of the criss-cross micro-beam L changes the thickness of the air gap j5, and thus the electrical parameter of the vibration sensor z.

In the ion thruster, an antenna and a passive element, such as an LC sensor, may be integrated to form a wireless passive measurement mode.

It should be noted that: the cavities for accommodating the medium layers in the parameter sensors are all square, the invention is not limited to the square, and the shapes of the cavities can be set to any shape as required; each upper electrode and each lower electrode in each parameter sensor shown in the figure are square, the invention is not limited to the square, and the shapes of the upper electrode and the lower electrode can be set into any shape capable of covering the dielectric layer according to the requirement; the position of the cavity for accommodating the dielectric layer is not limited to the position shown in the figure, and can be any position where detection of the corresponding parameter can be realized.

In the above embodiments, the upper electrode and the lower electrode may be made of a high temperature resistant metal material, such as platinum or gold, but the present invention is not limited thereto, and any high temperature resistant metal material may be used in the present invention.

In the ion thruster, the air inlet hole k2 shown in fig. 3 and 5 includes a plurality of small circular holes o1 surrounding the cathode hole k1, a large circular hole o2 surrounding the small circular holes o1 and the cathode hole k1, and a gas channel o3 formed on the side wall of the front portion 51, the gas channel o3 is communicated with the large circular hole o2, so that the external fuel gas can be delivered to the large circular hole o2 through the gas channel o3 and then enter the small circular hole o 1.

As shown in fig. 3 and 5, a plurality of small circular holes o1 are uniformly arranged around the cathode holes k1, so that the fuel gas can be uniformly distributed after entering the reaction chamber c, and the electrons generated by the main cathode 1 can collide with more gas molecules.

In the above embodiment, the ion thruster may further include a neutralizer duct 6, as shown in fig. 2, disposed at one side of the tail 52 for ejecting negatively charged ions around the tail 52. These negatively charged ions serve to neutralize positively charged gas cations ejected from the tail 52.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention.