阅读说明：本技术 一种掩膜版清洗系统夹具及其使用方法 (mask plate cleaning system clamp and using method thereof ) 是由 罗雪春 胡家铭 王宏宇 王照忠 万长明 于 2019-08-06 设计创作，主要内容包括：本发明公开了一种掩膜版清洗系统夹具及其使用方法,包括框架主体,所述框架主体包括底板和设置在底板顶部两侧的第一架体和第二架体,第二架体与底板焊接,所述底板上还设有第一驱动机构,第一驱动机构的输出端与第一架体连接,第一驱动机构能够驱动第一架体朝着远离第二架体方向移动,所述架体上均设有纵向传输机构,第一架体和第二架体之间还设有横向传输机构,所述第一架体和第二架体上还设有升降丝杆,并且升降丝杆与纵向传输机构连接,升降丝杆能够带动纵向传输沿着竖直方向移动；还包括设置在第一架体上的控制器,所述第一驱动机构、升降丝杆、纵向传输机构、横向传输机构均与控制器连接。(the invention discloses a mask plate cleaning system clamp and a using method thereof, and the mask plate cleaning system clamp comprises a frame main body, wherein the frame main body comprises a bottom plate, a first frame body and a second frame body which are arranged on two sides of the top of the bottom plate, the second frame body is welded with the bottom plate, a first driving mechanism is also arranged on the bottom plate, the output end of the first driving mechanism is connected with the first frame body, the first driving mechanism can drive the first frame body to move towards the direction away from the second frame body, longitudinal transmission mechanisms are arranged on the frame bodies, a transverse transmission mechanism is also arranged between the first frame body and the second frame body, lifting screw rods are also arranged on the first frame body and the second frame body, and are connected with the longitudinal transmission mechanisms, and can drive the longitudinal transmission to move along the vertical direction; the lifting device is characterized by further comprising a controller arranged on the first frame body, and the first driving mechanism, the lifting screw rod, the longitudinal transmission mechanism and the transverse transmission mechanism are all connected with the controller.)

1. The mask plate cleaning system clamp is characterized by comprising a frame main body, wherein the frame main body comprises a bottom plate (15), a first frame body (16) and a second frame body (19) which are arranged on two sides of the top of the bottom plate (15), the second frame body (19) is welded with the bottom plate (15), a first driving mechanism (3) is further arranged on the bottom plate (15), the output end of the first driving mechanism (3) is connected with the first frame body (16), the first driving mechanism (3) can drive the first frame body (16) to move towards the direction close to or away from the second frame body (19), longitudinal transmission mechanisms (2) are respectively arranged on the frame bodies (16), a transverse transmission mechanism (1) is further arranged between the first frame body (16) and the second frame body (19), lifting screw rods (6) are further arranged on the first frame body (16) and the second frame body (19), and the lifting screw rods (6) are connected with the longitudinal transmission mechanisms (2), the lifting screw rod (6) can drive the longitudinal transmission mechanism (2) to move along the vertical direction;

the automatic lifting device is characterized by further comprising a controller arranged on the first frame body (16), wherein the first driving mechanism (3), the lifting screw rod (6), the longitudinal transmission mechanism (2) and the transverse transmission mechanism (1) are all connected with the controller.

2. the mask plate cleaning system clamp according to claim 1, wherein one end of the bottom plate (15) is further provided with a positioning block (5), the positioning block (5) is provided with a groove, a first sensor is arranged in the groove, and the first sensor is connected with a controller.

3. the mask cleaning system clamp according to claim 1, wherein the transverse conveying mechanism (1) comprises a transverse rail, a plurality of first rollers, a first belt and a third driving mechanism, the first rollers are sequentially distributed on the transverse rail, the first belt is respectively connected with the first rollers and the third driving mechanism, the third driving mechanism can drive the first rollers to rotate on the transverse rail, and the third driving mechanism is connected with the controller;

vertical transmission device (2) are including vertical track, a plurality of second gyro wheel, second belt, fourth actuating mechanism, the second gyro wheel distributes in proper order on vertical track, the second belt is connected with second gyro wheel and fourth actuating mechanism in proper order, and fourth actuating mechanism can drive the second gyro wheel and rotate on vertical track, vertical orbital lateral wall passes through the screw and is connected with lift lead screw (6), fourth actuating mechanism is connected with the controller.

4. the mask plate cleaning system clamp according to claim 1, wherein the first frame body (16) and the second frame body (19) are of the same structure, the first frame body (16) and the second frame body (19) respectively comprise a top plate (17) and three supporting columns (18), the top ends of the three supporting columns (18) are respectively connected with the bottom of the top plate (17), a fifth driving mechanism is further arranged at the top of the top plate (17) and connected with a controller, the output end of the fifth driving mechanism is connected with the lifting screw rod (6), and the output end of the first driving mechanism (3) is connected with the supporting column (18) in the middle of the first frame body (16).

5. the reticle cleaning system clamp according to claim 4, wherein the support column (18) is provided with a second sensor (11), a third sensor (12) and a fourth sensor (13), respectively, and the second sensor (11), the third sensor (12) and the fourth sensor (13) are all connected with the controller.

6. The reticle cleaning system clamp according to claim 4, wherein a riser (14) is arranged on the top of one of the pillars (18) of the first frame body (16) and the second frame body (19), a fifth sensor is further arranged on the riser (14), and the fifth sensor is connected with the controller.

7. the mask plate cleaning system clamp according to claim 3, wherein a transverse plate is further arranged between the first frame body (16) and the second frame body (19) and welded with the support columns (18) of the second frame body (19), a second code scanner (9) is further arranged on the transverse plate, a first code scanner (7) is further arranged on the side wall of the transverse track of the transverse transmission mechanism (1), a third code scanner (10) is further arranged on one support column (18) of the second frame body (19), a fourth code scanner (8) is further arranged on the top plate (17) of the second frame body (19), and the first code scanner (7), the second code scanner (9), the third code scanner (10) and the fourth code scanner (8) are all connected with a controller.

8. A reticle cleaning system clamp according to claim 1, characterized in that a second driving mechanism (4) is further provided on the top of the base plate (15), and the output end of the second driving mechanism (4) is also connected to the support (18) in the middle of the first frame body (16).

9. the use method of the mask plate cleaning system clamp is characterized by comprising the following steps:

1) The cart provided with the mask plate cassette is aligned through the alignment block (5), and a first sensor in the alignment block (5) senses and generates a signal to the controller;

2) the controller controls the first code scanner (7) to identify the two-dimensional code information of the trolley, and then the controller controls the first roller of the transverse transmission mechanism (1) to start rotating;

3) the controller controls the first driving mechanism (3) to start working, and the first driving mechanism adjusts the distance between the first frame body (16) and the second frame body (19) according to the size of a mask plate in the cart;

4) the controller controls a second roller of the longitudinal transmission mechanism (2) to start rotating, and the cassette provided with the mask plate is sent into the frame main body;

5) in the process that the cassette moves on the longitudinal transmission mechanism (2), when the fourth sensor (13) senses the cassette, the longitudinal transmission mechanism (2) stops working, and the cassette is loaded in place;

6) the fourth code scanner (8) identifies two-dimensional code information on the cassette and transmits the two-dimensional code information to the controller, and the controller controls the second driving mechanism (4) to start working, adjusts the position of the first frame body (16), and finely positions the position of the cassette;

7) The controller controls the fifth driving mechanism to work, the fifth driving mechanism drives the transmission screw rod to rotate, the longitudinal transmission mechanism (2) is forced to move upwards, the second code scanner (9) sequentially identifies the two-dimensional code information of the mask plate on the cartridge according to the layer number in the process that the conveying mechanism drives the cartridge to move upwards, and when the identification of the two-dimensional code information of all the mask plates is completed, the lifting screw rod (6) stops rotating;

8) And finishing the loading of the mask plate, and waiting for a robot to grab the mask plate and put the mask plate into a cleaning production line.

Technical Field

The invention relates to the technical field of mask cleaning, in particular to a mask cleaning system clamp and a using method thereof.

Background

The mask plate of the key component in the cavity of the OLED process evaporation packaging equipment can deposit an evaporation film on the surface in the long-time use process, and the film can fall off when the film thickness reaches a certain degree, so that the whole atmosphere of the cavity is influenced, and the generation of poor evaporation is caused. Therefore, in order to ensure the yield of panel process, the mask needs to be periodically and precisely regenerated.

at present, a mask plate cleaning production line clamp can only deal with a size product, namely, a specific mask plate cartridge can only be loaded, if a client side product is changed, a generation line is upgraded or a new client is faced, the existing mask plate cleaning production line clamp cannot deal with the size product, and the mask plate cleaning production line clamp suitable for the size of the product needs to be transformed or reconfigured. The production line equipment modification period is long, the cost is high, the production process can be influenced, the clamp for configuring a new mask plate cleaning production line cannot deal with various generation line mask plates, the production line space can be occupied, the process route becomes complicated, and the production efficiency is greatly reduced.

disclosure of Invention

The invention aims to overcome the defects in the prior art and provide a mask plate cleaning system clamp and a use method thereof, which can be suitable for mask plates with different sizes.

The invention is realized by the following technical scheme:

A mask plate cleaning system clamp and a using method thereof comprise a frame main body, wherein the frame main body comprises a bottom plate, a first frame body and a second frame body which are arranged on two sides of the top of the bottom plate, the second frame body is welded with the bottom plate, a first driving mechanism is further arranged on the bottom plate, the output end of the first driving mechanism is connected with the first frame body, the first driving mechanism can drive the first frame body to move towards the direction close to or away from the second frame body, longitudinal transmission mechanisms are arranged on the frame bodies, a transverse transmission mechanism is further arranged between the first frame body and the second frame body, lifting lead screws are further arranged on the first frame body and the second frame body and are connected with the longitudinal transmission mechanisms, and the lifting lead screws can drive the longitudinal transmission mechanisms to move along the vertical direction; the lifting device is characterized by further comprising a controller arranged on the first frame body, and the first driving mechanism, the lifting screw rod, the longitudinal transmission mechanism and the transverse transmission mechanism are all connected with the controller.

The space between the first frame body and the second frame body can be adjusted by the aid of the arranged first driving mechanism, and the mask plate to be cleaned can be placed on the longitudinal conveying mechanism, so that the longitudinal conveying mechanism can smoothly convey the cartridge with the mask plate to a grabbing position of the cleaning manipulator, meanwhile, the arranged transverse conveying mechanism can ensure that the mask plate to be conveyed is located between the first frame body and the second frame body, two sides of the mask plate cartridge can be uniformly placed on the two longitudinal conveying mechanisms, the mask plate can be located in the central position of the frame main body, and accordingly a subsequent manipulator can smoothly clamp and grab the mask plate.

furthermore, the one end of bottom plate still is equipped with the counterpoint piece, is equipped with the recess on the counterpoint piece, is equipped with first sensor in the recess, and first sensor is connected with the controller to with vertical transmission device linkage.

Present removal handcart lower extreme is equipped with aligning device, and aligning device and anchor clamps lower extreme counterpoint recess completion when removing the handcart are counterpointed, and first sensor can sense to send signal to the controller, remind to have to treat abluent mask version and need send into to the frame main part in.

further, the transverse transmission mechanism comprises a transverse rail, a plurality of first rollers, a first belt and a third driving mechanism, the first rollers are sequentially distributed on the transverse rail, the first belt is respectively connected with the first rollers and the third driving mechanism, the third driving mechanism can drive the first rollers to rotate on the transverse rail, and the third driving mechanism is connected with the controller;

vertical transmission device includes vertical track, a plurality of second gyro wheel, second belt, fourth actuating mechanism, the second gyro wheel distributes in proper order on vertical track, the second belt is connected with second gyro wheel and fourth actuating mechanism in proper order, and fourth actuating mechanism can drive the second gyro wheel and rotate on vertical track, vertical orbital lateral wall passes through the screw and is connected with the lift lead screw, fourth actuating mechanism is connected with the controller.

the transverse transmission mechanism is used for adjusting the position of the cartridge in the horizontal direction and ensuring that the cartridge can accurately enter the frame main body, specifically, the controller generates a signal to the third driving mechanism, the forward rotation or the reverse rotation of the third driving mechanism is controlled according to the size of the mask plate, the first roller is forced to rotate forward or reversely, the position of the mask plate cartridge on the transverse track is adjusted, and one side of the mask plate is ensured to be placed on the longitudinal track on the second frame body; the longitudinal conveying mechanism is used for conveying the mask plate clamping boxes placed on the transverse conveying mechanism into the frame main body, so that the manipulator of the next procedure can smoothly grab the mask plate in the clamping boxes, specifically, the controller controls the fourth driving mechanism to work, the fourth driving mechanism drives the second roller to rotate, and the mask plate clamping boxes positioned on the transverse conveying mechanism move into the frame main body along the longitudinal rail.

Further, first support body and second support body are the same structure, and first support body and second support body all include roof and three spinal branch posts, and the top of three spinal branch posts all is connected with the bottom of roof, the top of roof still is equipped with fifth actuating mechanism, and fifth actuating mechanism is connected with the controller, and fifth actuating mechanism's output is connected with the lift lead screw, the output of first actuating mechanism is connected with the pillar in the middle of the first support body.

The first frame body and the second frame body in the technical scheme have the same structure, three support columns of the second frame body are fixed on the bottom plate, the transverse rails are also fixed with the support columns, the first frame body is not fixed with the bottom plate, and the support column in the middle of the first frame body is connected with the first driving mechanism, so that the first driving mechanism can drive the first frame body to move towards the direction close to or away from the second frame body to change the distance between the first frame body and the second frame body, thereby changing the distance between two longitudinal conveying mechanisms and ensuring that the two longitudinal conveying mechanisms are matched with a mask plate cassette to be cleaned; the lifting screw rod is connected with the longitudinal rail through threads, when the controller controls the fifth driving mechanism to work, the fifth driving mechanism drives the screw rod to rotate, the transverse rail is forced to move along the screw rod, the height of the transverse transmission mechanism is adjusted, and a manipulator in the next procedure can smoothly clamp the mask plate in the cartridge on the longitudinal rail.

furthermore, a second sensor, a third sensor and a fourth sensor are respectively arranged on the supporting column, and the second sensor, the third sensor and the fourth sensor are all connected with the controller.

The second sensor is used for sensing whether the mask plate cassette is arranged on the longitudinal conveying mechanism or not and sending a signal to the controller, and the controller controls the longitudinal conveying mechanism to start working; when the mask plate cartridge box moves on the longitudinal conveying mechanism, when the mask plate cartridge box moves to the third sensor, the third sensor senses the mask plate cartridge box, then the third sensor generates a signal to the controller, the controller controls the longitudinal conveying mechanism to decelerate, when the mask plate cartridge box moves to the fourth sensor, the fourth sensor senses the mask plate cartridge box and sends the signal to the controller, the controller controls the longitudinal conveying mechanism to stop, and the mask plate cartridge box is guaranteed to move in place.

Furthermore, the top of one of the pillars of the first frame body and the second frame body is provided with a vertical plate, the vertical plate is further provided with a fifth sensor, and the fifth sensor is connected with the controller.

The fifth sensor that sets up is used for responding to the number of piles of placing the mask version in the card casket, and when the vertical transmission device of lift lead screw drive moved up, the fifth sensor that sets up on the riser senses the mask version on every layer in the card casket in proper order, confirms again that every layer of mask version has or not and ID information.

Further, still be equipped with the diaphragm between first support body and the second support body, the pillar welding of diaphragm and second support body, still be equipped with the second bar code scanner on the diaphragm, still be equipped with first bar code scanner on the horizontal track lateral wall of horizontal transmission mechanism, still be equipped with the third bar code scanner on one of them pillar of second support body, still be equipped with the fourth bar code scanner on the roof of second support body, first bar code scanner, second bar code scanner, third bar code scanner, fourth bar code scanner all are connected with the controller. The top of bottom plate still is equipped with second actuating mechanism, and second actuating mechanism's output also is connected with the pillar in the middle of the first support body.

The device comprises a first code scanner, a second code scanner, a third code scanner and a fourth code scanner, wherein the first code scanner, the second code scanner, the third code scanner and the fourth code scanner are all in the prior art, information is obtained by scanning a two-dimensional code, when a trolley is in butt joint with a counterpoint block, a first sensor senses and generates a signal to a controller, the controller controls the first code scanner to start working, the two-dimensional code on the trolley is scanned, size data of a mask plate placed in the trolley is identified, and then the distance between two longitudinal conveying mechanisms is adjusted; when the fourth sensor senses a mask plate cartridge, the fourth sensor sends a signal to the controller, the controller controls the longitudinal conveying mechanism to stop working and simultaneously sends a signal to the fourth code scanner, the fourth code scanner scans a two-dimensional code on the cartridge and identifies cartridge information, then the controller controls the second driving mechanism to perform fine positioning according to the identified cartridge information, the first driving mechanism is used for preliminary positioning, and the second driving mechanism is used for fine positioning; the second bar code scanner that sets up is used for discerning the information of two-dimensional code on the mask version, when the lift lead screw driven the mask version to go up promptly, the second bar code scanner that sets up can scan the two-dimensional code information on each layer mask version to with the information entry system, when information is unable discernment, operating personnel can take off the third bar code scanner, scans the two-dimensional code on the mask version manually.

a method for using a mask plate cleaning system clamp comprises the following steps:

1) The cart provided with the mask plate cassette is aligned through an alignment block, a first sensor in the alignment block senses the alignment block, and a signal is generated to a controller;

2) the controller controls the first code scanner to identify the two-dimensional code information of the trolley, and then the controller controls the first roller of the transverse transmission mechanism to start rotating;

3) the controller controls the first driving mechanism to start working, and the first driving mechanism adjusts the distance between the first frame body and the second frame body according to the size of the mask plate in the cart;

4) The controller controls a second roller of the longitudinal transmission mechanism to start rotating, and the cassette provided with the mask plate is sent into the frame main body;

5) When the fourth sensor senses the cassette in the process of moving the cassette on the longitudinal transmission mechanism, the longitudinal transmission mechanism stops working, and the cassette is loaded in place;

6) The fourth code scanner identifies the two-dimensional code information on the cassette and transmits the two-dimensional code information to the controller, and the controller controls the second driving mechanism to start working, adjusts the position of the first frame body and finely positions the position of the cassette;

7) The controller controls the fifth driving mechanism to work, the fifth driving mechanism drives the transmission screw rod to rotate, the longitudinal transmission mechanism is forced to move upwards, the second code scanner identifies the two-dimensional code information of the mask plate on the cartridge according to the number of layers in the process that the cartridge drives the mask plate to move upwards, and when all the two-dimensional code information of the mask plate is identified, the lifting screw rod stops rotating;

8) And finishing the loading of the mask plate, and waiting for a robot to grab the mask plate and put the mask plate into a cleaning production line.

compared with the prior art, the invention has the following advantages and beneficial effects:

According to the mask plate cleaning system clamp and the using method thereof, the distance between the first frame body and the second frame body can be adjusted by the aid of the arranged first controller, so that the distance between the two longitudinal conveying mechanisms can be adjusted, the mask plates with different sizes can be used, meanwhile, the arranged transverse conveying mechanisms can ensure that a mask plate cartridge can effectively move on the longitudinal conveying mechanisms, and the mask plates can be accurately matched with the next procedure;

Drawings

the accompanying drawings, which are included to provide a further understanding of the embodiments of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the principles of the invention. In the drawings:

FIG. 1 is a schematic structural view of the present invention;

FIG. 2 is a side view of the frame body of the present invention;

FIG. 3 is a schematic structural view of a first frame according to the present invention;

Reference numbers and corresponding part names in the drawings:

1-transverse conveying mechanism, 2-longitudinal conveying mechanism, 3-first driving mechanism, 4-second driving mechanism, 5-alignment block, 6-lifting screw rod, 7-first code scanner, 8-fourth code scanner, 9-second code scanner, 10-third code scanner, 11-second sensor, 12-third sensor, 13-third sensor, 14-vertical plate, 15-bottom plate, 16-first frame body, 17-top plate, 18-support column and 19-second frame body.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to examples and accompanying drawings, and the exemplary embodiments and descriptions thereof are only used for explaining the present invention and are not meant to limit the present invention.