阅读说明：本技术 基于超表面的太赫兹滤波器及其制作方法 (Terahertz filter based on super surface and manufacturing method thereof ) 是由 王政焱 易成汉 杨兵 余荣斌 陈明 杨春雷 于 2019-09-16 设计创作，主要内容包括：本发明公开了一种基于超表面的太赫兹滤波器及其制作方法。该方法包括：提供衬底并对所述衬底进行预处理；在所述衬底上形成第一谐振层；在所述第一谐振层上形成第一介质层；对所述第一介质层的部分区域进行激光诱导处理,以在所述第一介质层中形成第二谐振层,其中,所述第二谐振层厚度小于所述第一介质层的厚度。该太赫兹滤波器包括：第一谐振层；第一介质层,设置于所述第一谐振层上；第二谐振层,形成于所述第一介质层中,且所述第二谐振层的厚度小于所述第一介质层的厚度。利用激光直写的方法制作第二谐振层与传统的光刻方法相比程序简单,可以有效地提高效率；同时激光直写设备与光刻系统相比节约很多的成本,有利于大范围推广。(The invention discloses a terahertz filter based on a super surface and a manufacturing method thereof. The method comprises the following steps: providing a substrate and pretreating the substrate; forming a first resonance layer on the substrate; forming a first dielectric layer on the first resonance layer; and carrying out laser induction treatment on a partial area of the first dielectric layer to form a second resonance layer in the first dielectric layer, wherein the thickness of the second resonance layer is smaller than that of the first dielectric layer. The terahertz filter includes: a first resonance layer; the first dielectric layer is arranged on the first resonance layer; and the second resonance layer is formed in the first dielectric layer, and the thickness of the second resonance layer is smaller than that of the first dielectric layer. Compared with the traditional photoetching method, the method for manufacturing the second resonance layer by using the laser direct writing method has simple procedure and can effectively improve the efficiency; meanwhile, compared with a photoetching system, the laser direct writing equipment saves a lot of cost and is beneficial to large-scale popularization.)

1. A method for manufacturing a terahertz filter based on a super-surface is characterized by comprising the following steps:

Providing a substrate and pretreating the substrate;

forming a first resonance layer on the substrate;

Forming a first dielectric layer on the first resonance layer;

And carrying out laser induction treatment on a partial area of the first dielectric layer to form a second resonance layer in the first dielectric layer, wherein the thickness of the second resonance layer is smaller than that of the first dielectric layer.

2. the method for manufacturing the terahertz filter based on the super-surface as claimed in claim 1, wherein the preprocessing comprises the following specific steps: and sequentially carrying out polishing treatment and cleaning treatment on the substrate.

3. the method for manufacturing the terahertz filter based on the super-surface as claimed in claim 1, wherein the material of the first resonance layer is molybdenum, gold, silver or copper, and the thickness of the first resonance layer is 1.5 μm to 1.8 μm.

4. The method for manufacturing the terahertz filter based on the super-surface as claimed in claim 1, wherein the material of the first dielectric layer is polyimide or polydimethylsiloxane, and the thickness of the first dielectric layer is 75 μm to 100 μm.

5. The method for manufacturing the terahertz filter based on the super-surface as claimed in claim 1, wherein the step of performing laser-induced processing on the partial region of the first dielectric layer comprises:

Scanning a partial region of the first medium layer by adopting pulse laser with a preset power value according to a preset track, so that the scanned part of the first medium layer is graphitized to form a second resonance layer.

6. The method for manufacturing the terahertz filter based on the super-surface as claimed in claim 5, wherein the preset power value is 30-50W/mm²The scanning speed of the pulse laser is 40-70 mm/s, and the thickness of the second resonance layer is 10-30 mu m.

7. the method for manufacturing a terahertz filter based on a super-surface as claimed in claim 4, wherein the second resonance layer has a rectangular cross-sectional shape perpendicular to the thickness direction, and one side of the rectangle has a notch.

8. a terahertz filter based on a super-surface is characterized by comprising:

A first resonance layer;

The first dielectric layer is arranged on the first resonance layer;

And the second resonance layer is formed in the first dielectric layer, and the thickness of the second resonance layer is smaller than that of the first dielectric layer.

9. The terahertz filter according to claim 8, wherein a surface of the second resonance layer facing away from the first resonance layer is flush with a surface of the first dielectric layer facing away from the first resonance layer.

10. The super-surface based terahertz filter according to claim 8, comprising: the cross section of the second resonance layer along the direction vertical to the thickness direction is rectangular, and one side of the rectangle is provided with a notch.

Technical Field

The invention belongs to the technical field of communication, and particularly relates to a terahertz filter based on a super surface and a manufacturing method thereof.

background

Terahertz waves are electromagnetic waves with a frequency in the range of 0.1-10THz and a wavelength in the range of 30um-3mm, and are between microwaves and infrared rays in an electromagnetic spectrum. Because of its special location in the electromagnetic spectrum, it has a series of special properties, such as low energy, penetrability, fingerprint spectrum, etc. Based on the electromagnetic characteristics, the terahertz wave has unique advantages in the research of material molecular spectrum analysis, material nondestructive testing, biological tissue biopsy, high-precision secret radar and the like.

The electromagnetic meta-surface is formed by periodically arranging unit structures on a two-dimensional plane to form a two-dimensional meta-material. Research shows that the regulation and control principle of the super surface on the electromagnetic wave is not the phase accumulation effect in the space any more, but the distribution of the phase and the amplitude of the electromagnetic wave in the space is regulated and controlled by the phase and the amplitude abrupt change characteristics of the electric field and the magnetic field generated on two sides of the unit structure. Compared with a three-dimensional metamaterial, the super surface has great advantages in the following aspects: firstly, the meta-surface has a sub-wavelength thickness, and therefore it is much smaller in volume and weight than the three-dimensional meta-material, which greatly contributes to the miniaturization of the device; secondly, the processing of the metamaterial with a three-dimensional structure in terahertz, infrared and visible light wave bands has great challenge, and the super surface only has a single-layer structure or two to three-layer structures, so that the super surface with a micro-nano scale level can be easily processed by adopting a standard photoetching process, and the processing difficulty and the cost are far less than those of the three-dimensional metamaterial; finally, the super surface can be processed on a flexible medium due to the excellent ultra-thin characteristic to form a bendable, conformal and flexible metamaterial.

the Capasso professor team of Harvard university in America proposed the generalized Snell's law in the ' science ' journal of 2011, namely, the concept of phase mutation is introduced, so that the interface has a phase jump along the tangential direction, and the traditional Snell's law is expanded to the generalized Snell's law. The antennas with different mutation phases are distributed on a plane in a gradient or certain specific phase distribution mode to form a single-layer novel artificial electromagnetic surface, and the method greatly enhances the regulation and control capability of the novel artificial electromagnetic surface on electromagnetic waves. Subsequently, the concept is widely applied to design a series of devices for regulating and controlling electromagnetic waves, so that the wide-range application of the super-surface terahertz device becomes possible.

at present, most of terahertz filters are manufactured by utilizing a photoetching process and photoetching to manufacture filter units with patterns. However, the photolithography process is costly, complicated and not suitable for wide application.

Disclosure of Invention

(I) technical problems to be solved by the invention

The technical problem solved by the invention is as follows: how to reduce the complexity of the manufacturing process of the terahertz filter and reduce the cost.

(II) the technical scheme adopted by the invention

In order to solve the technical problems, the invention adopts the following technical scheme:

A method for manufacturing a terahertz filter based on a super-surface comprises the following steps:

Providing a substrate and pretreating the substrate;

Forming a first resonance layer on the substrate;

Forming a first dielectric layer on the first resonance layer;

And carrying out laser induction treatment on a partial area of the first dielectric layer to form a second resonance layer in the first dielectric layer, wherein the thickness of the second resonance layer is smaller than that of the first dielectric layer.

Preferably, the pretreatment comprises the following specific steps: and sequentially carrying out polishing treatment and cleaning treatment on the substrate.

Preferably, the material of the first resonance layer is molybdenum, gold, silver or copper, and the thickness of the first resonance layer is 1.5 μm to 1.8 μm.

Preferably, the material of the first dielectric layer is polyimide or polydimethylsiloxane, and the thickness of the first dielectric layer is 75-100 μm.

Preferably, the specific step of performing laser-induced processing on the partial region of the first dielectric layer includes:

scanning a partial region of the first medium layer by adopting pulse laser with a preset power value according to a preset track, so that the scanned part of the first medium layer is graphitized to form a second resonance layer.

Preferably, the preset power value is 30-50W/mm²The scanning speed of the pulse laser is 40-70 mm/s, and the thickness of the second resonance layer is 10-30 mu m.

Preferably, a cross-sectional shape of the second resonance layer in a direction perpendicular to the thickness direction is a rectangle, and one side of the rectangle has a notch.

the invention also provides a terahertz filter based on the super surface, which comprises:

A first resonance layer;

The first dielectric layer is arranged on the first resonance layer;

And the second resonance layer is formed in the first dielectric layer, and the thickness of the second resonance layer is smaller than that of the first dielectric layer.

Preferably, a surface of the second resonant layer facing away from the first resonant layer is flush with a surface of the first dielectric layer facing away from the first resonant layer.

Preferably, a cross-sectional shape of the second resonance layer in a direction perpendicular to the thickness direction is a rectangle, and one side of the rectangle has a notch.

(III) advantageous effects

the invention discloses a method for manufacturing a terahertz filter based on a super surface, which has the following advantages and beneficial effects compared with the prior art:

compared with the traditional photoetching method, the method for manufacturing the second resonance layer by using the laser direct writing method has simple procedure and can effectively improve the efficiency; meanwhile, compared with a photoetching system, the laser direct writing equipment saves a lot of cost and is beneficial to large-scale popularization; and secondly, the graphitization degree of the polyimide is different due to different laser powers, the filtering effect of the filter on the terahertz waves is also changed, and various filter units with different effects can be obtained conveniently.

Drawings

FIG. 1 is a flow chart of a method of fabricating a super-surface based terahertz filter according to an embodiment of the present invention;

FIG. 2 is a cross-sectional view of a super-surface based terahertz filter of an embodiment of the present invention;

FIG. 3 is a top view of a super-surface based terahertz filter of an embodiment of the present invention;

Fig. 4 is a raman spectrum of a polyimide layer after laser induction according to an embodiment of the present invention.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.