阅读说明：本技术 用于减少全氟化合物并生成氟化锡的装置和方法 (apparatus and method for reducing perfluorinated compounds and generating tin fluoride ) 是由 黄智源 梁元 郑秀和 方炳烈 李殷道 于 2018-01-31 设计创作，主要内容包括：本发明涉及用于减少全氟化合物并生成氟化锡的装置和方法,更具体地,涉及可有效减少作为温室气体的全氟化合物,同时生成作为高附加值物质的氟化锡的用于减少全氟化合物并生成氟化锡的装置和方法。本发明提供一种用于减少全氟化合物并生成氟化锡的装置,其包括：反应部,收纳有液体锡(Sn)；以及原料投入部,用于向所述反应部投入全氟化合物(PFC),其中,在所述反应部中,所述全氟化合物与所述液体锡进行反应而生成氟化锡(SnF<Sub>2</Sub>)。(The present invention relates to an apparatus and a method for reducing a perfluorocompound and generating tin fluoride, and more particularly, to an apparatus and a method for reducing a perfluorocompound and generating tin fluoride, which can effectively reduce a perfluorocompound as a greenhouse gas while generating tin fluoride as a high value-added substance. The invention provides an apparatus for reducing perfluorinated compounds and generating tin fluoride, comprising: a reaction section containing liquid tin (Sn); and a raw material charging unit for charging a perfluoro compound (PFC) into the reaction unit, wherein the perfluoro compound reacts with the liquid tin to generate tin fluoride (SnF) in the reaction unit 2 )。)

1. An apparatus for reducing perfluorinated compounds and producing tin fluoride, comprising:

A reaction section containing liquid tin (Sn); and

A raw material charging section for charging a perfluoro compound (PFC) into the reaction section,

Wherein, in the reaction part, the perfluoro compound reacts with the liquid tin to generate tin fluoride (SnF)₂)。

2. The apparatus for reducing perfluorinated compounds and generating tin fluoride as claimed in claim 1,

The perfluorinated compound is sulfur hexafluoride (SF)₆)。

3. the apparatus for reducing perfluorinated compounds and generating tin fluoride as claimed in claim 2,

The chemical reaction taking place in the reaction part is SF₆+4Sn→3SnF₂+SnS。

4. The apparatus for reducing perfluorinated compounds and generating tin fluoride as claimed in claim 1,

Comprises a heating part connected with the reaction part,

The heating part heats the liquid tin contained in the reaction part to a preset temperature.

5. The apparatus for reducing perfluorinated compounds and generating tin fluoride as claimed in claim 4,

The heating part heats the liquid tin contained in the reaction part to 850-950 ℃.

6. The apparatus for reducing perfluorinated compounds and generating tin fluoride as claimed in claim 4,

Comprises a measuring part connected with the reaction part,

The measuring section is configured to measure a temperature of the liquid tin contained in the reaction section and a reforming rate of the tin fluoride.

7. The apparatus for reducing perfluorinated compounds and generating tin fluoride as claimed in claim 5,

The heating part heats the liquid tin contained in the reaction part to 600-650 ℃, and when the reforming rate of the tin fluoride reaches a preset target reforming rate, the heating part heats the liquid tin to 850-950 ℃.

8. The apparatus for reducing perfluorinated compounds and generating tin fluoride as claimed in claim 1,

A plurality of distribution parts spaced apart from each other along a longitudinal direction of the reaction part are provided at an inner lower side of the reaction part,

The distribution section is provided to inject the perfluoro compound flowing in from the raw material input section into the reaction section in a dispersed manner.

9. The apparatus for reducing perfluorinated compounds and generating tin fluoride as claimed in claim 1,

Further comprising a condensing part disposed at an upper portion of the reaction part,

The condensing part is to condense the tin fluoride in a gaseous state generated by the chemical reaction of the reaction part into a liquid state or a solid state.

10. the apparatus for reducing perfluorinated compounds and generating tin fluoride as claimed in claim 1,

Further comprises a liquid tin storage part arranged at the upper part of the reaction part,

the liquid tin reservoir supplies the liquid tin to the reaction section.

11. A method for reducing perfluorinated compounds and producing tin fluoride comprising the steps of:

a) supplying liquid tin to the reaction section;

b) Heating the liquid tin received in the reaction part to a preset temperature;

c) feeding a perfluoro compound to the heated liquid tin to effect a reaction; and

d) condensing tin fluoride formed by the reaction of the liquid tin with the perfluorinated compound.

12. The method for reducing perfluorinated compounds and forming tin fluoride as claimed in claim 11,

In the step b), the liquid tin is heated to a temperature of 850-950 ℃.

13. The method for reducing perfluorinated compounds and forming tin fluoride as claimed in claim 11,

In the step b), the liquid tin is heated to the temperature of 600-650 ℃.

14. the method for reducing perfluorinated compounds and forming tin fluoride as claimed in claim 13,

In said step c), the reforming rate of said tin fluoride is measured.

15. The method for reducing perfluorinated compounds and forming tin fluoride according to claim 14,

In the step c), when the reforming rate of the tin fluoride reaches a target reforming rate, the liquid tin is heated to a temperature of 850 to 950 ℃.

16. The method for reducing perfluorinated compounds and forming tin fluoride as claimed in claim 11,

In said step c), said perfluoro compound is sulfur hexafluoride(SF₆)。

17. The method for reducing perfluorinated compounds and forming tin fluoride as claimed in claim 11,

In said step c), the chemical reaction taking place in said reaction part is SF₆+4Sn→3SnF₂+SnS。

18. A semiconductor or display device to which the apparatus for reducing a perfluoro compound and generating tin fluoride according to any one of claims 1 to 10 is applied.

Technical Field

The present invention relates to an apparatus and a method for reducing a perfluorocompound and generating tin fluoride, and more particularly, to an apparatus and a method for reducing a perfluorocompound and generating tin fluoride, which can effectively reduce a perfluorocompound as a greenhouse gas while generating tin fluoride as a high value-added substance.

Background

The perfluoro compound is a gas causing global warming, and is represented by sulfur hexafluoride (SF 6).

Sulfur hexafluoride is a chemically inert stable gas, and has excellent insulating strength, rapid insulation recovery, stable Arc (Arc), and the like, and thus is widely used for large-capacity power equipment, liquid crystal panels, and semiconductors.

however, sulfur hexafluoride is known to have strong infrared absorption ability, chemical stability, and the like, and thus cannot be rapidly removed in the earth atmosphere, and the global warming index is about 23900 times higher than that of carbon dioxide, which is a representative substance of global warming causes. Compared with the common perfluoro compounds with the global warming index of 6500 times to 9200 times of that of carbon dioxide, the amount of the sulfur hexafluoride discharged in Korea is more than two times, and the sulfur hexafluoride discharged in 2011 is 19.1 million tons of carbon dioxide equivalent (CO)₂eq.), accounting for 2.7% of the total greenhouse gas emission. Sulfur hexafluoride is used as an insulating gas in high-capacity power equipment in a form of high purity of 99.9% or more, but when the sulfur hexafluoride concentration is reduced to 97% or less, the sulfur hexafluoride needs to be replaced completely, and therefore the amount of sulfur hexafluoride used is very large. In particular, 1000 to 2000ppm of the perfluorocompound gas is continuously discharged also in semiconductor and display processes, and the demand for a processing technique for processing perfluorocompounds is continuously increasing.

In addition, it is expected that 64Mt carbon dioxide equivalent is discharged by 2030 in the global power equipment, and 133.2Mt carbon dioxide equivalent is discharged by 2030 in the flat panel display field centered on korea, china, and japan, so that it is expected that the relevant emission regulations will be more strengthened. And, in addition to sulfur hexafluoride (SF)₆) Hexafluoroethane (C) is also used₂F₆) Carbon tetrafluoride (CF)₄) Nitrogen trifluoride (NF)₃) And various Fluorinated greenhouse gases (F-GHGs) or Fluorinated gases (F-Gas), and particularly, semiconductors and displays using F-Gas in large quantities in korea are used as the backbone industry, and a technology for reducing the amount of perfluoro compounds is inevitably required in order to simultaneously meet the objectives of coping with climate change and developing the backbone industry in the country.

Therefore, recently, in order to remove sulfur hexafluoride used in a process using sulfur hexafluoride, a technique of concentration and separation using combustion, microwaves, a catalyst, plasma, or PSA has been developed.

Among the most widely used techniques, known is the combustion technique, but in order to remove perfluorocompounds by the combustion technique, it is necessary to maintain the thermal decomposition temperature (NF) of each target substance₃Is 800 ℃ and SF₆Is 1200 ℃ and CF₄Above 1600 degrees) and, even if the corresponding temperature conditions are reached, cannot be removed 100% if there is a lack of proper mixing and thermal decomposition of the reactants required for the subsequent reactions. That is, since the combustion technique is energy-consuming and economical, the conditions for completely removing the perfluoro compound are severe, and it is difficult to reduce NO generated during combustion_X、CO。

In addition, the catalyst technology has a very short catalyst replacement period, and the plasma technology is also difficult to maintain the continuity of operation due to frequent replacement of torch materials, and thus is economically disadvantageous.

In particular, since the prior art only focuses on the development of a technique for removing a perfluoro compound, it is expensive to remove a perfluoro compound, and therefore, the prior art is economically disadvantageous.

(prior patent document) korean patent No. 10-1514449 (2015.04.16) was granted.

disclosure of Invention

Technical problem

An object of the present invention, which has been made to solve the above problems, is to provide an apparatus and a method for reducing a perfluoro compound and generating tin fluoride, which can effectively reduce a perfluoro compound as a greenhouse gas while generating tin fluoride as a high value-added substance.

The technical problems to be solved by the present invention are not limited to the above-mentioned technical problems, and other technical problems not mentioned may be clearly understood by those skilled in the art from the following descriptions.

Technical scheme

The present invention for achieving the above object provides an apparatus for reducing a perfluoro compound and generating tin fluoride, comprising: a reaction section containing liquid tin (Sn); and a raw material charging unit for charging a perfluoro compound (PFC) into the reaction unit, wherein the perfluoro compound reacts with the liquid tin to generate tin fluoride (SnF) in the reaction unit₂)。

in an embodiment of the present invention, the perfluoro compound may be sulfur hexafluoride (SF)₆)。

in embodiments of the present invention, the perfluoro compound may include all perfluoro compounds and fluorinated gases containing fluorine.

in an embodiment of the present invention, when sulfur hexafluoride is used as the gas to be removed, a representative chemical reaction occurring in the reaction portion may be SF₆+4Sn→3SnF₂+SnS。

In an embodiment of the present invention, a heating part connected to the reaction part may be included, and the heating part may heat the liquid tin received in the reaction part to a predetermined temperature.

In an embodiment of the present invention, the heating unit may heat the liquid tin contained in the reaction unit to a temperature of 850 to 950 ℃.

In an embodiment of the present invention, the liquid tin reforming apparatus may further include a measuring unit connected to the reaction unit, and the measuring unit may measure a temperature of the liquid tin stored in the reaction unit and a reforming rate of the tin fluoride.

In an embodiment of the present invention, the heating unit heats the liquid tin received in the reaction unit to a temperature of 600 to 650 degrees, and when the reforming rate of the tin fluoride reaches a predetermined target reforming rate, the heating unit may heat the liquid tin to a temperature of 850 to 950 degrees.

In an embodiment of the present invention, a plurality of distribution portions are provided inside and below the reaction portion, the distribution portions being spaced apart from each other in a longitudinal direction of the reaction portion, and the distribution portions are provided so that the perfluoro compound flowing in from the raw material charging portion is injected into the reaction portion in a dispersed manner.

In an embodiment of the present invention, the reaction part may further include a condensing part disposed at an upper portion of the reaction part, and the condensing part may condense the tin fluoride in a gaseous state generated by the chemical reaction of the reaction part into a liquid state or a solid state.

In an embodiment of the present invention, the liquid tin storage unit may supply the liquid tin to the reaction unit.

In order to achieve the above object, the present invention provides a method for reducing a perfluoro compound and generating tin fluoride, comprising the steps of: a) supplying the liquid tin to a reaction section; b) heating the liquid tin received in the reaction part to a preset temperature; c) feeding the perfluorinated compound to the heated liquid tin to effect a reaction; and d) condensing tin fluoride formed by the reaction of the liquid tin with the perfluorinated compound.

In an embodiment of the invention, in the step b), the liquid tin may be heated to a temperature of 850 to 950 ℃.

In the embodiment of the invention, in the step b), the liquid tin may be heated to a temperature of 600 to 650 ℃.

in an embodiment of the present invention, in the step c), the reforming rate of the tin fluoride may be measured.

in an embodiment of the present invention, in the step c), when the reforming rate of the tin fluoride reaches a target reforming rate, the liquid tin may be heated to a temperature of 850 to 950 ℃.

In an embodiment of the present invention, in the step c), the perfluoro compound may be sulfur hexafluoride (SF)₆)。

In an embodiment of the present invention, in the step c), the chemical reaction occurring in the reaction part may be SF₆+4Sn→3SnF₂+SnS。

In order to achieve the above object, the present invention provides a semiconductor or a display device to which an apparatus for reducing a perfluoro compound and generating tin fluoride is applied.

In order to achieve the above object, the present invention provides a semiconductor or display device to which a method for reducing a perfluoro compound and generating tin fluoride is applied.

In order to achieve the above object, the present invention provides a fluorinated gas recovery apparatus for heavy electrical equipment, which employs a method for reducing a perfluorinated compound and generating tin fluoride.

In order to achieve the above object, the present invention provides a fluorinated gas recovery apparatus for heavy electrical equipment, which employs a method for reducing a perfluorinated compound and generating tin fluoride.

Effects of the invention

The present invention configured as described above has an effect that the perfluoro compound can be removed at a lower temperature than in the prior art, and the energy efficiency is high. For example, although the combustion technology employs high-temperature combustion at 1200 degrees or more for effective removal of sulfur hexafluoride and at 1600 degrees or more for effective removal of carbon tetrafluoride, the energy consumption is large, the present invention can completely remove the perfluoro compound even at 600 to 650 degrees. That is, the present invention can completely remove the perfluoro-compounds with less energy than the prior art, and is economical.

In addition, the liquid of the present inventiontin may be reacted with perfluorinated compounds to remove them, with formation of, for example, tin fluoride (SnF)₂) And tin sulfide (SnS). Tin fluoride is used as a high value-added substance with a price which is about 17 times different from that of liquid tin, and is used for oral cleaning products such as toothpaste and the like. That is, the present invention is economical in that it can remove perfluoro compounds while generating high value-added substances to obtain additional revenue.

It should be understood that the effects of the present invention are not limited to the above-described effects, but include all effects which can be presumed from the features of the invention described in the detailed description or the claims.

Drawings

Fig. 1 is a diagram illustrating an apparatus for reducing perfluorinated compounds and generating tin fluoride according to an embodiment of the present invention.

FIG. 2 is a schematic diagram of an apparatus for producing tin fluoride by reducing a perfluoro compound according to an embodiment of the present invention.

Fig. 3 is a graph showing the concentration of perfluorochemicals in the apparatus for reducing perfluorochemicals and producing tin fluoride according to an embodiment of the present invention.

Fig. 4 is a graph showing the reforming rate of tin fluoride in the apparatus for reducing a perfluoro compound and generating tin fluoride according to the embodiment of the present invention.

FIG. 5 is a flow chart of a method for reducing perfluorinated compounds and producing tin fluoride according to an embodiment of the present invention.

Detailed Description

The most preferred embodiment of the invention is an apparatus for reducing perfluorinated compounds and producing tin fluoride comprising: a reaction section containing liquid tin (Sn); and a raw material charging unit for charging a perfluoro compound (PFC) into the reaction unit, wherein the perfluoro compound reacts with the liquid tin to generate tin fluoride (SnF) in the reaction unit₂)。