阅读说明：本技术 基于一体化校正器的阵列光束波前校正系统和方法 (array beam wavefront correction system and method based on integrated corrector ) 是由 宁禹 张明 范占斌 何宇龙 张阳 孙全 刘文广 许晓军 于 2019-09-06 设计创作，主要内容包括：本发明公开了基于一体化校正器的阵列光束波前校正系统,包括一体化变形镜、一体化传感器、第一分光镜、第二分光镜、缩束望远镜、计算机和高压放大器,一体化变形镜各凹槽的空间排布与阵列光束各子光束的空间排布一一对应,阵列光束经一体化变形镜反射至一体化传感器,一体化传感器将阵列光束波前畸变信息反馈给计算机,计算机根据波前畸变信息控制高压放大器各通道电压,输出给一体化变形镜各凹槽内的驱动器,实现阵列波束各子光束波前的独立校正。该系统将传统阵列光束自适应光学系统中对应各子光束的多套独立波前校正装置进行一体化集成,结构简单,易于装配控制,大大提高了系统工作效率,本发明可广泛应用于非相干或相干阵列光束领域。(The invention discloses an array beam wavefront correction system based on an integrated corrector, which comprises an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam-shrinking telescope, a computer and a high-voltage amplifier, wherein the spatial arrangement of each groove of the integrated deformable mirror corresponds to the spatial arrangement of each sub-beam of an array beam one by one, the array beam is reflected to the integrated sensor through the integrated deformable mirror, the integrated sensor feeds back the wavefront distortion information of the array beam to the computer, and the computer controls the voltage of each channel of the high-voltage amplifier according to the wavefront distortion information and outputs the voltage to a driver in each groove of the integrated deformable mirror, so that the independent correction of the wavefront of each sub-beam of the array beam is realized. The system integrates a plurality of sets of independent wavefront correction devices corresponding to all sub-beams in the traditional array beam self-adaptive optical system, has a simple structure, is easy to assemble and control, greatly improves the working efficiency of the system, and can be widely applied to the field of incoherent or coherent array beams.)

1. an array beam wavefront correction system based on an integrated corrector is characterized by comprising an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam shrinking telescope and a control unit;

the first spectroscope is used for reflecting the array light beam to the integrated deformable mirror so that the array light beam is normally incident to the integrated deformable mirror;

The integrated deformable mirror comprises a substrate, a reflecting layer on the substrate, a groove on the back surface of the substrate, a driver in the groove and an electric connection assembly, and is used for independently carrying out wavefront correction on each sub-beam of the array beam incident on the reflecting layer;

the second spectroscope is used for dividing the corrected array beam into at least two beams, wherein the two beams comprise a first beam and a second beam, and the first beam is condensed by the beam condensing telescope and enters the integrated sensor;

the integrated sensor is used for detecting the light spot form of each sub-beam of the array light beam after correction and acquiring the wavefront distortion information of each sub-beam;

The control unit is electrically connected with the integrated sensor, the control unit is electrically connected with the integrated deformable mirror, and the control unit is used for receiving wavefront distortion information detected by the integrated sensor and controlling the voltage of the driver in the groove of the integrated deformable mirror.

2. the array beam wavefront correction system of claim 1, further comprising a quality evaluation unit disposed on the optical path of the second beam for acquiring the corrected array beam to-target spot image and sending to the control unit.

3. The array beam wavefront correction system of claim 2, wherein the quality assessment unit comprises a lens and a CCD camera, the second beam being converged onto the CCD camera target surface via the lens.

4. The array beam wavefront correction system of claim 3, wherein the control unit is electrically connected to the CCD camera, and the control unit is further configured to receive the target spot image obtained by the quality evaluation unit and perform spot quality evaluation according to the target spot image.

5. The array beam wavefront correction system of any one of claims 1-4, wherein the control unit comprises high voltage amplifiers and a computer, the number of channels of the high voltage amplifiers is not less than the number of grooves of the integrated deformable mirror, and the drivers in the grooves of the integrated deformable mirror are electrically connected with the channels of the high voltage amplifiers through the electrical connection components.

6. the array beam wavefront correction system of claim 5, wherein the actuators in the grooves of the integral deformable mirror comprise bimorph actuators, microelectromechanical actuators, spatial light modulation actuators.

7. the array beam wavefront correction system of claim 5, wherein the number of the integrated deformable mirror grooves is equal to the number of the array beam sub-beams, and the spatial positions of the grooves of the integrated deformable mirror correspond to the spatial positions of the sub-beams of the array beam one to one.

8. An array beam wavefront correction method based on an integrated corrector, which is applied to the array beam wavefront correction system of any one of claims 1 to 7, and is characterized by comprising the following steps:

S1, adjusting the first beam splitter to make the array beam normally incident on the integrated deformable mirror;

s2, rotating the integrated deformable mirror to enable the sub-beams of the array beam to correspond to the cells of the integrated deformable mirror one by one;

s3, adjusting a second beam splitter to split the corrected array beam, so that the first beam is converged to the CCD camera through a lens, and the second beam is incident to a beam-shrinking telescope;

s4, adjusting the beam shrinking telescope to shrink the second beam of the corrected array beam to the integrated sensor;

s5, calling a computer program, receiving the target light spot image of the CCD camera, and evaluating the light spot quality of the array light beam according to the target light spot image;

S6, if the quality of the facula does not reach the standard, executing the step S8, if the quality of the facula reaches the standard, executing the step S7;

s7, keeping the voltage of each channel of the high-voltage amplifier unchanged, and executing the step S5;

s8, calling a computer program to receive wavefront distortion information of the integrated sensor;

And S9, judging whether the wavefront distortion information meets the correction requirement, if so, converting the wavefront distortion information into voltage information by using a wavefront recovery algorithm, outputting the voltage information to each channel of the high-voltage amplifier, and executing a step S8, otherwise, executing a step S7.

Technical Field

The invention relates to the field of adaptive optics, in particular to an adaptive optical system for array beams, which is compact in structure.

background

the laser with multiple paths of lower power is synthesized into one beam for output, and the method is an effective way for improving far-field energy concentration of a laser emission system. In the actual beam combining process, aberration is inevitably introduced, and the beam quality is affected. Taking the output of the fiber laser matched collimator as an example, when the assembly in the axial direction has errors, the beam focus can generate axial offset, defocusing aberration occurs, and the focus position cannot be accurately positioned at a target; when there is an error in the assembly in the vertical axis direction, aberrations such as astigmatism and coma will be generated, so that the far field light spot of the light beam is dispersed, and the energy concentration is affected. Therefore, aberration correction of the array beam is the key to improving beam quality of the composite array beam system.

the self-adaptive optical system realizes beam aberration correction by utilizing the cooperation of the wavefront corrector and the sensor, and is an effective way for improving the beam quality. There are two basic requirements for wavefront correction of array beams. First, the array beam is an array set of multiple sub-beams, and the aperture of the beam is larger than that of a single beam, and the corresponding wavefront corrector and sensor also need to be made into a large aperture. The aperture of a common wavefront corrector, such as a micro-electromechanical deformable mirror, a spatial light modulator, a double piezoelectric plate deformable mirror, etc., is limited by the manufacturing process, and cannot meet the requirement of large aperture. Second, each sub-beam of the multi-beam is independent, and each sub-beam needs to be corrected independently in order to realize correct wavefront correction quickly. In the traditional wave-front corrector, the electrodes and the substrate are uniformly distributed, and the deformation of each area of the continuous mirror surface is connected, so that the independent deformation of each area is difficult to realize. Therefore, in this case, it is common practice to provide an independent adaptive optical device for each sub-beam for wavefront correction of the array beam. Therefore, the traditional array beam wavefront correction system becomes very large and complex, each beam of sub-beam is independently provided with a set of wavefront corrector and a wavefront sensor, the optical path is complex, the adjustment, assembly and maintenance of the system are very time-consuming, and the control procedure is very complicated.

disclosure of Invention

in order to solve the problems of bulkiness, complexity, difficulty in assembly and difficulty in control of the conventional array beam wavefront regulation and control system, the invention provides an array beam wavefront correction system based on an integrated corrector.

The technical scheme adopted by the embodiment of the invention is as follows:

An array beam wavefront correction system based on an integrated corrector comprises an integrated deformable mirror, an integrated sensor, a first spectroscope, a second spectroscope, a beam shrinking telescope and a control unit;

The first spectroscope is used for reflecting the array light beam to the integrated deformable mirror so that the array light beam is normally incident to the integrated deformable mirror;

The integrated deformable mirror comprises a substrate, a reflecting layer on the substrate, a groove on the back surface of the substrate, a driver in the groove and an electric connection assembly, and is used for independently carrying out wavefront correction on each sub-beam of the array beam incident on the reflecting layer;

the second spectroscope is used for dividing the corrected array beam into at least two beams, wherein the two beams comprise a first beam and a second beam, and the first beam is condensed by the beam condensing telescope and enters the integrated sensor;

the integrated sensor is used for detecting the light spot form of each sub-beam of the array light beam after correction and acquiring the wavefront distortion information of each sub-beam;

The control unit is electrically connected with the integrated deformable mirror and is used for receiving wavefront distortion information detected by the integrated sensor and controlling the voltage of the driver in the groove of the integrated deformable mirror.

further, the system also comprises a quality evaluation unit which is arranged on the light path of the second light beam and is used for acquiring the target spot image of the corrected incoherent array light beam.

still further, the quality evaluation unit includes a lens and a CCD camera, and the second light beam is converged onto the CCD camera target surface through the lens.

furthermore, the control unit is electrically connected with the CCD camera and is also used for receiving the target light spot image acquired by the quality evaluation unit and evaluating the light spot quality according to the target light spot image.

preferably, the control unit comprises a high-voltage amplifier and a computer, the number of channels of the high-voltage amplifier is not less than the number of grooves of the integrated deformable mirror, and the drivers in the grooves of the integrated deformable mirror are electrically connected with the channels of the high-voltage amplifier through the electric connection assembly.

Preferably, the drivers in the grooves of the integrated deformable mirror comprise a bimorph driver, a microelectromechanical driver and a spatial light modulation driver.

Preferably, the spatial position of each honeycomb mirror body of the integrated deformable mirror corresponds to the spatial position of each sub-beam of the incoherent array beam in a one-to-one manner.

The invention also provides a self-adaptive wavefront regulation and control method of the incoherent array light beam based on the integrated deformable mirror, which is applied to the self-adaptive wavefront regulation and control system and comprises the following steps:

s1, adjusting the first beam splitter to make the array beam normally incident on the integrated deformable mirror;

s2, rotating the integrated deformable mirror to enable the sub-beams of the array beam to correspond to the cells of the integrated deformable mirror one by one;

S3, adjusting a second beam splitter to split the corrected array beam, so that the first beam is converged to the CCD camera through a lens, and the second beam is incident to a beam-shrinking telescope;

S4, adjusting the beam shrinking telescope to shrink the second beam of the corrected array beam to the integrated sensor;

s5, calling a computer program, receiving the target light spot image of the CCD camera, and evaluating the light spot quality of the array light beam according to the target light spot image;

S6, if the quality of the facula does not reach the standard, executing the step S8, if the quality of the facula reaches the standard, executing the step S7;

s7, keeping the voltage of each channel of the high-voltage amplifier unchanged, and executing the step S5;

S8, calling a computer program to receive wavefront distortion information of the integrated sensor;

and S9, judging whether the wavefront distortion information meets the correction requirement, if so, converting the wavefront distortion information into voltage information by using a wavefront recovery algorithm, outputting the voltage information to each channel of the high-voltage amplifier, and executing a step S8, otherwise, executing a step S7.

The invention has the beneficial effects that:

The invention utilizes the partition isolation characteristic of the mirror surface deformation of the integrated deformable mirror, overcomes the complexity problem of the traditional array beam wavefront regulation system, solves the contradiction between the independent regulation and the system simplification of each sub-beam wavefront of the array beam, and provides the array beam self-adaptive control system which has a simple structure, is easy to implement and can independently control each sub-beam wavefront.

Drawings

FIG. 1 is a schematic diagram of an array beam adaptive wavefront control system based on an integrated deformable mirror according to the present invention;

FIG. 2 is a schematic diagram of the spatial arrangement of an array beam according to the present invention;

FIG. 3 is a rear view of an integrated deformable mirror according to the present invention;

FIG. 4 is a schematic perspective view of an integrated deformable mirror according to the present invention;

FIG. 5 is a schematic flow chart of an array beam adaptive wavefront control method based on an integrated deformable mirror according to the present invention

Description of reference numerals:

1. an integrated deformable mirror; 2. an integral sensor; 3. a quality evaluation unit; 4. a control unit; 41. a computer; 42. a high voltage amplifier; 6. a first beam splitter; 7. a second beam splitter; 8. a beam-shrinking telescope; 9. a first light beam; 10. a second light beam; 11. a central recess; 12. a central sub-beam; 13. a central shaft of the integrated deformable mirror; 22. a driver; 31. a lens; a CCD camera.

Detailed Description

it should be noted that the embodiments and features of the embodiments in the present application may be combined with each other without conflict.