阅读说明：本技术 一种用于多路光束合束的对准方法及装置 (Alignment method and device for multi-path light beam combination ) 是由 韩旭东 徐新行 于 2019-09-16 设计创作，主要内容包括：本发明公开了一种用于多路光束合束的对准方法及装置,包括第1至第N光源、第1-1至第N-1摆动元件、第1-2至第N-2摆动元件、合光元件、导光元件、分光元件、平行光管和缩束光管,第i光源发出的第i光束依次被第i-1摆动元件和第i-2摆动元件反射而入射到合束元件,合束元件将各路光束汇合,导光元件将由合束元件输出的汇合光分出一路光作为监测光束,分光元件将监测光束分出一路光入射到平行光管,并分出另一路光入射到缩束光管。本发明用于多路光束合束的对准方法及装置不仅能够对光束左右、高低方向的角度偏差进行校正,而且能够对光束左右、高低方向的位置偏差进行校正,并且不需要光路分层传输,光路结构相对简单,克服了现有技术存在的问题。(The invention discloses an alignment method and device for multi-path light beam combination, which comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth swinging element, a light combination element, a light guide element, a light splitting element, a collimator and a beam reducing light tube, wherein an ith light beam emitted by the ith light source is reflected by the i-1 st swinging element and the i-2 th swinging element in sequence and enters the beam combination element, the beam combination element combines all paths of light beams, the light guide element divides the combined light output by the beam combination element into one path of light serving as a monitoring light beam, the light splitting element divides the monitoring light beam into one path of light which enters the collimator, and divides the other path of light which enters the beam reducing light tube. The alignment method and the alignment device for the multi-path light beam combination not only can correct the angle deviation of the light beam in the left-right direction and the high-low direction, but also can correct the position deviation of the light beam in the left-right direction and the high-low direction, does not need layered transmission of the light path, has relatively simple structure of the light path, and overcomes the problems in the prior art.)

1. An alignment method for combining multiple paths of light beams is characterized in that the used alignment device comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a light combining element, a light guide element, a light splitting element, a collimator and a beam reducing light pipe, wherein N is a positive integer larger than 1, and the swinging element comprises a two-dimensional swing table and a reflecting element arranged on the two-dimensional swing table;

the ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N;

the light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element;

the alignment correction is respectively carried out on each path of light beam according to the following steps, and the method comprises the following steps:

adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;

adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;

and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.

2. The method as claimed in claim 1, wherein the alignment device further comprises a wavelength gating element disposed on the optical path between the light guiding element and the light splitting element, the wavelength gating element being configured to allow the light of the wavelength band specified by the command to pass through and prevent the light of other wavelength bands except for the light of the specified wavelength band from passing through according to the command.

3. The alignment method as claimed in claim 1, wherein the two-dimensional stage can swing along two axes perpendicular to each other on the plane of the two-dimensional stage.

4. The alignment method as claimed in claim 3, wherein the wobble element further comprises a base, and the two-dimensional stage is mounted on the base.

5. The method as claimed in claim 1, wherein the light guide element is configured to reflect the combined light output by the beam combining element into the main working optical path and transmit the combined light as the monitoring light beam.

6. The alignment method as claimed in claim 1, wherein the angle deviation between the feedback beam and the reference beam path of the collimator is (δ)_x，δ_y) Wherein a three-dimensional rectangular coordinate system, delta, is established by taking the direction of the reference light path as the z-axis direction_xRepresenting the angle, delta, of the projection of the beam in the plane xoz with respect to the z-axis_yThe included angle between the projection of the light beam in the yoz plane and the z axis is shown, and the adjustment amount of the swing angle of the reflecting element of the i-2 th swing element isSo that the angular deviation of the light beam from the reference light path is within a first preset range,the angle of adjustment of the reflecting element of the i-2 th rocking element around the E axis of the two-dimensional rocking platform is shown,the angle of adjustment of the reflective element of the i-2 th rocking element around the F-axis of the two-dimensional rocking platform is shown, where the E-axis is in the vertical direction and the F-axis is in the horizontal direction when the two-dimensional rocking platform is installed in the apparatus.

7. The alignment method as claimed in claim 1, wherein the position deviation of the feedback beam from the reference beam path is (L)_x，L_y) Wherein a three-dimensional rectangular coordinate system L is established by taking the direction of the reference light path as the z-axis direction_xDenotes a deviation value L in the x-axis direction of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy plane_yThe deviation value of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy plane in the y-axis direction is shown; the adjustment amount of the swing angle of the reflecting element of the i-1 th swing element isSo that the positional deviation of the light beam from the reference light path is within a second preset range, where M represents the distance from the incident point of the light beam on the reflecting element of the i-1 th rocking element to the incident point of the light beam on the next rocking element,the angle of adjustment of the reflecting element of the i-1 th rocking element around the two-dimensional pendulum table E axis is shown,the angle of adjustment of the reflective element of the i-1 th pendulum element around the F-axis of a two-dimensional pendulum platform, which is mounted in the apparatus with its E-axis in the vertical direction and the F-axis in the horizontal direction, is shown.

8. The alignment method for multi-path light beam combination according to any of claims 1-7, wherein N is 2, the 1 st-2 nd swinging component is used as the combining component, the 1 st light beam emitted by the 1 st light source is reflected by the 1 st-1 st swinging component and the 1 st-2 nd swinging component in sequence, the 2 nd light beam emitted by the 2 nd light source is reflected by the 2 nd-1 st swinging component and the 2 nd-2 nd swinging component in sequence and is incident on the 1 st-2 nd swinging component, the 1 st-2 nd swinging component transmits the 2 nd light beam, and the 1 st light beam and the 2 nd light beam are combined.

9. An alignment device for combining multiple paths of light beams is characterized by comprising a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a light combining element, a light guide element, a light splitting element, a collimator, a beam contracting collimator and a processor, wherein N is a positive integer greater than 1, and the swinging element comprises a two-dimensional swing table and a reflecting element arranged on the two-dimensional swing table;

the ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N;

the light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element;

the processor is respectively connected with the collimator and the beam contracting light tube and is used for respectively carrying out alignment correction on each path of light beam according to the following steps, and the method comprises the following steps:

adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;

adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;

and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.

10. The alignment apparatus as claimed in claim 9, wherein N is 2, the 1 st-2 nd swinging component serves as the beam combining component, the 1 st light beam emitted from the 1 st light source is reflected by the 1 st-1 st swinging component and the 1 st-2 nd swinging component in sequence, the 2 nd light beam emitted from the 2 nd light source is reflected by the 2 nd-1 st swinging component and the 2 nd-2 nd swinging component in sequence and is incident on the 1 st-2 nd swinging component, and the 1 st-2 nd swinging component transmits the 2 nd light beam and combines the 1 st light beam and the 2 nd light beam.

Technical Field

The present invention relates to the field of beam alignment and beam combination technologies, and in particular, to an alignment method and an alignment apparatus for combining multiple optical beams.

Background

At present, in the field of photoelectric countermeasure, optical devices such as a fixed light guide mirror and a fixed beam combining mirror are adopted, and multi-path light beams are aligned and combined by a method of combining the light beams one by one.

In the chinese invention patent application with application publication No. CN108919480A, an automatic alignment device for combining multiple laser beams in the same wavelength band is disclosed, which adopts a two-dimensional placing table to realize automatic correction of the angular deviation of the laser beams, and adopts a translation table to realize automatic correction of the position deviation of the laser beams, so that the device has high beam combining precision and small installation and adjustment difficulty, and has an automatic compensation function for each beam deviation caused by temperature, stress change and the like. However, in order to realize the correction of the position difference of the light beam in the left and right directions, the light path must be transmitted in an up-down layered manner, and at least two sets of electric translation tables are needed to realize the correction of the position deviation of the light beam in the left and right directions. Therefore, the device not only has a complex light path composition structure, but also occupies a large volume and space, and cannot be applied to occasions where light path layered transmission cannot be realized for beam combination.

Disclosure of Invention

In view of the above, an object of the present invention is to provide an alignment method and apparatus for combining multiple optical beams, which can not only correct the angular deviation of the optical beams in the left-right and high-low directions, but also correct the positional deviation of the optical beams in the left-right and high-low directions, and do not require layered transmission of optical paths, and the optical path structure is relatively simple, thereby overcoming the problems in the prior art.

In order to solve the technical problems, the invention provides the following technical scheme:

an alignment device used in the method comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a light combining element, a light guiding element, a light splitting element, a collimator and a beam contracting light tube, wherein N is a positive integer greater than 1, and the swinging element comprises a two-dimensional swing table and a reflecting element arranged on the two-dimensional swing table;

the ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N;

the light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element;

the alignment correction is respectively carried out on each path of light beam according to the following steps, and the method comprises the following steps:

adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;

adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;

and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.

Preferably, the alignment device further comprises a wavelength gating element disposed on the optical path between the light guide element and the light splitting element, and the wavelength gating element is configured to allow the light of the wavelength band specified by the instruction to pass through and prevent the light of other wavelength bands except the light of the specified wavelength band from passing through according to the instruction.

Preferably, the two-dimensional swing table can swing respectively along two axes which are perpendicular to each other on the plane where the two-dimensional swing table is located.

Preferably, the swing element further comprises a base, and the two-dimensional swing table is mounted on the base.

Preferably, the light guide element is configured to reflect the combined light output by the beam combining element into one path of light, enter the main working optical path, and transmit the one path of light as the monitoring light beam.

Preferably, the angle deviation of the light beam fed back by the collimator from the reference light path is (delta)_x，δ_y) Wherein a three-dimensional rectangular coordinate system, delta, is established by taking the direction of the reference light path as the z-axis direction_xRepresenting the angle, delta, of the projection of the beam in the plane xoz with respect to the z-axis_yThe included angle between the projection of the light beam in the yoz plane and the z axis is shown, and the adjustment amount of the swing angle of the reflecting element of the i-2 th swing element isSo that the angular deviation of the light beam from the reference light path is within a first preset range,the angle of adjustment of the reflecting element of the i-2 th rocking element around the E axis of the two-dimensional rocking platform is shown,the angle of adjustment of the reflective element of the i-2 th rocking element around the F-axis of the two-dimensional rocking platform is shown, where the E-axis is in the vertical direction and the F-axis is in the horizontal direction when the two-dimensional rocking platform is installed in the apparatus.

Preferably, the position deviation of the light beam fed back by the beam reducing tube from the reference light path is (L)_x，L_y) Wherein a three-dimensional rectangular coordinate system L is established by taking the direction of the reference light path as the z-axis direction_xDenotes a deviation value L in the x-axis direction of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy plane_yThe deviation value of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy plane in the y-axis direction is shown; the adjustment amount of the swing angle of the reflecting element of the i-1 th swing element isSo that the positional deviation of the light beam from the reference light path is within a second preset range, where M represents the distance from the incident point of the light beam on the reflecting element of the i-1 th rocking element to the incident point of the light beam on the next rocking element,the angle of adjustment of the reflecting element of the i-1 th rocking element around the two-dimensional pendulum table E axis is shown,the angle of adjustment of the reflective element of the i-1 th pendulum element around the F-axis of a two-dimensional pendulum platform, which is mounted in the apparatus with its E-axis in the vertical direction and the F-axis in the horizontal direction, is shown.

Preferably, N is 2, the 1 st to 2 nd swinging elements are used as beam combining elements, the 1 st light beam emitted by the 1 st light source is sequentially reflected by the 1 st to 1 st swinging elements and the 1 st to 2 nd swinging elements, the 2 nd light beam emitted by the 2 nd light source is sequentially reflected by the 2 nd to 1 st swinging elements and the 2 nd to 2 nd swinging elements and enters the 1 st to 2 nd swinging elements, and the 1 st to 2 nd swinging elements transmit the 2 nd light beam and combine the 1 st light beam and the 2 nd light beam.

An alignment device for combining multiple paths of light beams comprises a 1 st to an Nth light source, a 1 st-1 st to an Nth swinging element, a 1 st-2 nd to an Nth-2 th swinging element, a light combining element, a light guiding element, a light splitting element, a collimator, a beam reducing collimator and a processor, wherein N is a positive integer greater than 1, and the swinging element comprises a two-dimensional placing table and a reflecting element arranged on the two-dimensional placing table;

the ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N;

the light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element;

the processor is respectively connected with the collimator and the beam contracting light tube and is used for respectively carrying out alignment correction on each path of light beam according to the following steps, and the method comprises the following steps:

adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;

adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;

and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.

Preferably, N is 2, the 1 st to 2 nd swinging elements are used as beam combining elements, the 1 st light beam emitted by the 1 st light source is sequentially reflected by the 1 st to 1 st swinging elements and the 1 st to 2 nd swinging elements, the 2 nd light beam emitted by the 2 nd light source is sequentially reflected by the 2 nd to 1 st swinging elements and the 2 nd to 2 nd swinging elements and enters the 1 st to 2 nd swinging elements, and the 1 st to 2 nd swinging elements transmit the 2 nd light beam and combine the 1 st light beam and the 2 nd light beam.

Known from the above technical solutions, the alignment device used in the alignment method for combining multiple light beams provided by the present invention includes a 1 st to nth light source, a 1 st to nth swing element, a 1 st to nth-1 st swing element, a 1 st to nth-2 nd swing element, a light combining element, a light guiding element, a light splitting element, a collimator, and a beam reduction tube, where N is a positive integer greater than 1, an ith light beam emitted by the ith light source is reflected by the ith-1 st swing element and the ith-2 th swing element in sequence and is incident to the light combining element, i is greater than or equal to 1 and less than or equal to N, the light combining element combines the light beams, the light guiding element separates one path of light from the combined light output by the light combining element and is incident to the light splitting element, the light splitting element splits one path of the monitoring light beam and emits the other path of light to the beam reduction tube, the collimator is used for detecting the angle deviation of the incident beam and the reference light path, and the beam contracting light tube is used for detecting the position deviation of the incident beam and the reference light path. Carrying out alignment correction on the ith light beam emitted by the ith light source according to the following process: firstly, adjusting the swing angle of a reflecting element of an i-2 th swing element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so that the angle deviation of the i-th light beam and the reference light path is within a first preset range, then adjusting the swing angle of the reflecting element of the i-1 th swing element according to the position deviation of the i-th light beam and the reference light path fed back by the beam reducing tube so that the position deviation of the i-th light beam and the reference light path is within a second preset range, and adjusting the swing angle of the reflecting element of the i-2 th swing element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so that the angle deviation of the i-th light beam and the reference light path is within the first preset range. According to the method, alignment correction is respectively carried out on each light beam. Therefore, the alignment method for the multi-path light beam combination not only can correct the angle deviation of the light beam in the left-right direction and the height direction, but also can correct the position deviation of the light beam in the left-right direction and the height direction, does not need layered transmission of the light path, can be applied to occasions where the light path cannot be propagated in an up-down layered mode for beam combination, has a relatively simple light path structure and relatively small occupied space, and overcomes the problems in the prior art.

The invention also provides an alignment device for combining the multiple paths of light beams, which can achieve the beneficial effects.

Drawings

In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a flowchart illustrating alignment correction performed on an ith light beam in an alignment method for combining multiple light beams according to an embodiment of the present invention;

FIG. 2 is a schematic structural diagram of a two-dimensional swing table and a base in an embodiment of the invention;

fig. 3 is a schematic diagram of an alignment apparatus used when the alignment method for combining multiple optical beams includes 2 light sources according to an embodiment of the present invention;

fig. 4 is a top view of the alignment device shown in fig. 3.

Detailed Description

In order to make those skilled in the art better understand the technical solution of the present invention, the technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the drawings in the embodiment of the present invention, and it is obvious that the described embodiment is only a part of the embodiment of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

The embodiment of the invention provides an alignment method for combining multiple paths of light beams, wherein the alignment device comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a light combining element, a light guide element, a light splitting element, a collimator and a beam reducing light pipe, and N is a positive integer greater than 1.

The ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N. The light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element, the light splitting element is used for dividing the monitoring light beam into one path of light to be incident to the collimator, and dividing the other path of light to be incident to the beam contracting collimator, the collimator is used for detecting the angle deviation between the incident light beam and the reference light path, and the beam contracting collimator is used for detecting the position deviation between the incident light beam and the reference light path.

An i-1 th swinging element and an i-2 th swinging element are sequentially arranged on a propagation light path of an i-th light beam emitted by an i-th light source, the emitted i-th light beam is reflected by the i-1 th swinging element and the i-2 th swinging element in sequence and propagates to a beam combining element, and the beam combining element combines the light beams to form a beam. The two-dimensional swing table can swing in the two-dimensional direction to drive the reflection element to swing, and the incident position or the incident angle of a light beam can be adjusted.

The method respectively performs alignment correction on each path of light beam according to the following process, and respectively performs alignment correction on the ith light beam emitted by the ith light source according to the following steps, please refer to fig. 1, which specifically includes the following steps:

s10: and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.

Firstly, according to the angle deviation of the ith light beam and the reference light path fed back by the collimator, the swinging angle of the reflecting element of the ith-2 swinging element is adjusted to enable the angle deviation of the ith light beam and the reference light path to be within a first preset range, and the ith light beam and the reference light path are initially adjusted to be parallel. The first preset range refers to an angular deviation range which allows the pointing direction of one light beam to be parallel to the reference light path when the light beam is considered to be parallel to the reference light path.

Specifically, when the swinging element is operated according to the data fed back by the collimator, the angular deviation of the light beam fed back by the collimator from the reference light path is assumed to be (delta)_x，δ_y) Wherein δ_xRepresenting the angle, delta, of the projection of the beam in the plane xoz with respect to the z-axis_yRepresenting the angle between the projection of the light beam in the yoz plane and the z-axis, wherein a three-dimensional rectangular coordinate system is established by taking the direction of the reference light path as the z-axis direction, the adjustment amount of the swing angle of the reflecting element of the i-2 th swing element is The angle of adjustment of the reflecting element of the i-2 th rocking element around the E axis of the two-dimensional rocking platform is shown,and (3) indicating an angle of adjusting the reflecting element of the i-2 th swinging element around an F axis of a two-dimensional swinging table, wherein the E axis of the two-dimensional swinging table is in a vertical direction and the F axis of the two-dimensional swinging table is in a horizontal direction when the two-dimensional swinging table is installed in the device, so that the angular deviation of the light beam from the reference light path is within a first preset range.

S11: and adjusting the swinging angle of the reflecting element of the i-1 th swinging element according to the position deviation of the i-th light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the i-th light beam and the reference light path is within a second preset range.

After the adjustment of the previous step, according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube at the moment, the swinging angle of the reflecting element of the (i-1) th swinging element is adjusted, so that the position deviation of the ith light beam and the reference light path is in a second preset range, and the position of the ith light beam and the position of the reference light path are coincided. The position of the ith light beam is adjusted by adjusting the swinging angle of the reflecting element of the (i-1) th swinging element, wherein the position adjustment of the ith light beam in the left-right direction is included, and the position adjustment of the ith light beam in the high-low direction is also included. The second preset range is a position deviation range which is allowed to exist between one path of light beam and the reference light path when the path of light beam is considered to be overlapped with the reference light path.

Specifically, when the oscillating element is operated according to the data fed back by the beam reducing tube, the positional deviation of the beam fed back by the beam reducing tube from the reference light path is assumed to be (L)_x，L_y) Wherein a three-dimensional rectangular coordinate system L is established by taking the direction of the reference light path as the z-axis direction_xDenotes a deviation value L in the x-axis direction of the intersection point of the light beam and the xoy plane and the intersection point of the reference light path and the xoy plane_yRepresenting the intersection of the beam with the xoy planeAnd the deviation value of the intersection point of the reference optical path and the xoy plane in the y-axis direction, the adjustment amount of the swing angle of the reflecting element of the i-1 th swing element isM denotes the distance from the point of incidence of the light beam on the reflecting element of the i-1 th rocking element to the point of incidence of the light beam on the next rocking element,the angle of adjustment of the reflecting element of the i-1 th rocking element around the two-dimensional pendulum table E axis is shown,and the angle of the reflecting element of the i-1 th swinging element is adjusted around an F axis of the two-dimensional swinging table, so that the position deviation of the light beam and the reference light path is within a second preset range, wherein the E axis of the two-dimensional swinging table is in the vertical direction, and the F axis is in the horizontal direction.

S12: and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.

After the adjustment in step S11, the ith light beam is not parallel to the reference light path, the step aligns and corrects the angular deviation of the ith light beam again, and adjusts the swing angle of the reflection element of the (i-2) th swing element again according to the angular deviation of the ith light beam and the reference light path fed back in real time by the collimator, so that the angular deviation of the ith light beam and the reference light path is within a first preset range, and the ith light beam and the reference light path are finally adjusted and parallel. Thus, alignment correction of the ith light beam emitted from the ith light source is completed.

According to the method, alignment correction is independently performed on each light beam, and finally the light beams emitted by the 1 st light source to the Nth light source are all aligned. In practical applications, the value of N may be 2 or other values, and is within the protection scope of the present invention.

It can be seen that the alignment method for combining multiple light beams in the embodiment can correct the angular deviation of the light beams in the left-right and high-low directions, can correct the position deviation of the light beams in the left-right and high-low directions, does not need layered transmission of the light paths, can be applied to the occasions where the light paths cannot be layered and propagated up and down to combine the light beams, and has the advantages of relatively simple structure of the light paths and relatively small occupied space, thereby overcoming the problems in the prior art.

In a further preferred embodiment, the alignment device further includes a wavelength gating element disposed on the optical path between the light guiding element and the light splitting element, and the wavelength gating element is configured to allow the light of the wavelength band specified by the instruction to pass through and prevent the light of other wavelength bands except for the light of the specified wavelength band from passing through according to the instruction. In the prior art, when alignment correction is performed on a certain light beam, other light sources need to be turned off and a light source corresponding to the light beam to be corrected needs to be turned on, and the operation is complicated.

More specifically, the two-dimensional swing table can swing along two axes which are perpendicular to each other on a plane where the two-dimensional swing table is located. Referring to fig. 2 exemplarily, fig. 2 is a schematic structural diagram of a two-dimensional swing table and a base in this embodiment, two axes E and F perpendicular to each other on a plane where the two-dimensional swing table 200 is located are provided, the two-dimensional swing table 200 can swing with the axis E as a rotation axis and with the axis F as a rotation axis, and the two-dimensional swing table 200 swings to drive a reflection element to swing together. The further pendulum element further comprises a base 201, the two-dimensional pendulum platform 200 being mounted on said base 201. When arranging the light path and installing each component in practical application, can set for the two-dimensional swing table E axle of swing component to be vertical axle, and the F axle of two-dimensional swing table is the horizontal axis, and around the swing of two-dimensional swing table E axle namely around the vertical axle swing of two-dimensional swing table, swing around two-dimensional swing table F axle namely around the horizontal axis swing of two-dimensional swing table.

In practical application, when the optical path is arranged, the light guide element may reflect the merged light output by the beam merging element into the main working optical path, and transmit a path of light as a monitoring beam to enter the light splitting element. Preferably, the light guide element may reflect 99.99% of the energy of the combined light to enter the main working optical path, and transmit 0.01% of the energy of the combined light to serve as the monitoring light beam.

The following describes the alignment method for combining multiple optical beams according to the present invention in detail by taking the value of N as 2 as a specific embodiment. Referring to fig. 3, fig. 3 is a schematic diagram of an alignment apparatus used in the method of the present embodiment, and fig. 4 is a top view of the alignment apparatus shown in fig. 3, it can be seen that the alignment apparatus used includes a 1 st light source 100, a 1 st-1 st swinging element 102, a 1 st-2 st swinging element 103, a 2 nd light source 101, a 2 nd-1 st swinging element 104, a 2 nd-2 nd swinging element 105, a light guiding element 106, a light splitting element 107, a collimator 108, and a beam reducing light pipe 109.

The 1 st light beam emitted by the 1 st light source 100 is reflected by the 1 st-1 st swinging element 102 and enters the 1 st-2 nd swinging element 103, the 1 st-2 nd swinging element serves as a beam combining element, and the 1 st light beam emitted by the 1 st light source 100 is reflected by the 1 st-1 st swinging element and the 1 st-2 nd swinging element in sequence. The 2 nd light beam emitted from the 2 nd light source 101 is reflected by the 2 nd-1 st oscillating element 104 and the 2 nd-2 nd oscillating element 105 in order to be incident on the 1 st-2 nd oscillating element, and the 1 st-2 nd oscillating element 103 transmits the 2 nd light beam, so that the 1 st light beam and the 2 nd light beam are combined.

The light guide element 106 reflects the merged light output from the 1 st to 2 nd swinging elements 103 into the main working optical path, and transmits a path of light as a monitoring beam to enter the light splitting element 107. The beam splitting element 107 splits one path of light of the monitoring beam to be incident on the collimator 108, and splits the other path of light to be incident on the beam reducing tube 109, the collimator 108 is used for detecting the angle deviation between the incident beam and the reference light path, and the beam reducing tube 109 is used for detecting the position deviation between the incident beam and the reference light path. And a wavelength gating element 110 on the optical path between the light guide element 106 and the light splitting element 107, wherein the wavelength gating element 110 is used for allowing the light with the wavelength band specified by the instruction to pass through according to the instruction, and preventing the light with other wavelength bands except the light with the specified wavelength band from passing through.

In this embodiment, the alignment correction may be performed on the 1 st light beam emitted by the 1 st light source and the 2 nd light beam emitted by the 2 nd light source according to the processes of the above steps S10 to S12, specifically, the alignment correction may be performed on the 1 st light beam emitted by the 1 st light source according to the following steps, including the following steps:

s20: and adjusting the swinging angle of the reflecting element of the 1 st-2 nd swinging element according to the angle deviation of the 1 st light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the 1 st light beam and the reference light path to be within a first preset range.

S21: and adjusting the swinging angle of the reflecting element of the 1 st-1 st swinging element according to the position deviation of the 1 st light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the 1 st light beam and the reference light path is in a second preset range.

S22: and adjusting the swinging angle of the reflecting element of the 1 st-2 nd swinging element according to the angle deviation of the 1 st light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the 1 st light beam and the reference light path to be within a first preset range.

The alignment correction of the 2 nd light beam emitted by the 2 nd light source is carried out according to the following steps:

s30: and adjusting the swinging angle of the reflecting element of the 2 nd-2 nd swinging element according to the angle deviation of the 2 nd light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the 2 nd light beam and the reference light path to be within a first preset range.

S31: and adjusting the swinging angle of the reflecting element of the 2 nd-1 st swinging element according to the position deviation of the 2 nd light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the 2 nd light beam and the reference light path is in a second preset range.

S32: and adjusting the swinging angle of the reflecting element of the 2 nd-2 nd swinging element according to the angle deviation of the 2 nd light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the 2 nd light beam and the reference light path to be within a first preset range.

Correspondingly, the embodiment of the invention also provides an alignment device for combining the multiple paths of light beams, which comprises a 1 st to an Nth light source, a 1-1 st to an Nth swinging element, a 1-2 nd to an Nth-2 th swinging element, a light combining element, a light guide element, a light splitting element, a collimator, a beam reducing light pipe and a processor, wherein N is a positive integer greater than 1, and the swinging element comprises a two-dimensional swing table and a reflecting element arranged on the two-dimensional swing table.

The ith light beam emitted by the ith light source is reflected by the (i-1) th swinging element and the (i-2) th swinging element in sequence and enters the beam combining element, the beam combining element is used for combining all paths of light beams, and i is more than or equal to 1 and less than or equal to N.

The light guide element is used for dividing the merged light output by the beam merging element into one path of light to serve as a monitoring light beam, and the monitoring light beam is incident to the light splitting element, the light splitting element is used for dividing the monitoring light beam into one path of light to be incident to the collimator, and dividing the other path of light to be incident to the beam contracting collimator, the collimator is used for detecting the angle deviation between the incident light beam and the reference light path, and the beam contracting collimator is used for detecting the position deviation between the incident light beam and the reference light path.

The processor is respectively connected with the collimator and the beam contracting light tube and is used for respectively carrying out alignment correction on each path of light beam according to the following steps, and the method comprises the following steps:

adjusting the swinging angle of a reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator, so that the angle deviation of the i-th light beam and the reference light path is within a first preset range;

adjusting the swinging angle of a reflecting element of the (i-1) th swinging element according to the position deviation of the ith light beam and the reference light path fed back by the beam reducing tube, so that the position deviation of the ith light beam and the reference light path is within a second preset range;

and adjusting the swinging angle of the reflecting element of the i-2 th swinging element according to the angle deviation of the i-th light beam and the reference light path fed back by the collimator so as to enable the angle deviation of the i-th light beam and the reference light path to be within a first preset range.

The aligning device for combining the multiple light beams can correct the angle deviation of the light beams in the left-right direction and the height direction, can correct the position deviation of the light beams in the left-right direction and the height direction, does not need light path layered transmission, can be applied to occasions where the light beams cannot be combined by means of upper-lower layered transmission of the light paths, and is relatively simple in light path structure and relatively small in occupied space, so that the problems in the prior art are solved.

In this embodiment, for specific implementation of each optical element included in the apparatus, reference may be made to the detailed description of the above embodiment of the alignment method for combining multiple light beams, which is not repeated in this embodiment.

In a specific example, the value of N may be 2, and the alignment device for combining multiple light beams in this embodiment includes a 1 st light source, a 1 st-1 st swing element, a 1 st-2 st swing element, a 2 nd light source, a 2 nd-1 st swing element, a 2 nd-2 nd swing element, a light guide element, a light splitting element, a collimator, a beam reduction tube, and a processor.

The 1 st light beam emitted by the 1 st light source is reflected by the 1 st-1 st swinging element and enters the 1 st-2 nd swinging element, the 1 st-2 nd swinging element is used as a beam combining element, and the 1 st light beam emitted by the 1 st light source is reflected by the 1 st-1 st swinging element and the 1 st-2 nd swinging element in sequence. The 2 nd light beam emitted by the 2 nd light source is reflected by the 2 nd-1 st swinging element and the 2 nd-2 nd swinging element in sequence and enters the 1 st-2 nd swinging element, and the 1 st-2 nd swinging element transmits the 2 nd light beam so as to combine the 1 st light beam and the 2 nd light beam.

The light guide element reflects the merged light output by the 1 st to 2 nd swinging elements into a main working light path, transmits a path of light as a monitoring light beam, and then enters the light splitting element. The beam splitting element splits the monitoring light beam into one path of light to be incident to the collimator and splits the other path of light to be incident to the beam contracting tube, the collimator is used for detecting the angle deviation of the incident beam and the reference light path, and the beam contracting tube is used for detecting the position deviation of the incident beam and the reference light path. And the wavelength gating element is arranged on the optical path between the light guide element and the light splitting element and is used for allowing the light with the wave band specified by the instruction to pass through according to the instruction and preventing the light with other wave bands except the light with the specified wave band from passing through.

The processor is respectively connected with the collimator and the beam reducing light tube and is used for respectively carrying out alignment correction on the 1 st light beam emitted by the 1 st light source and the 2 nd light beam emitted by the 2 nd light source according to the method process.

The present invention provides a method and an apparatus for aligning a multi-beam combination. The principles and embodiments of the present invention are explained herein using specific examples, which are presented only to assist in understanding the method and its core concepts. It should be noted that, for those skilled in the art, it is possible to make various improvements and modifications to the present invention without departing from the principle of the present invention, and those improvements and modifications also fall within the scope of the claims of the present invention.