阅读说明：本技术 一种气体感测装置和气体检测设备 (A kind of gas measuring device and gas detection equipment ) 是由 池彦菲 程浩 陈霞 胡贵光 孙少君 鲁俊祥 刘承俊 林祥栋 于 2019-09-27 设计创作，主要内容包括：本发明提供一种气体感测装置和气体检测设备。该气体感测装置包括基底和设置在基底上方的第一电极、第二电极和气敏件,气敏件设置于第一电极和第二电极的背离基底的一侧,第一电极和第二电极分设于气敏件的相对两端,且与气敏件相接触,用于向气敏件的相对两端施加极化电压,气敏件用于吸附被测气体分子,并将其转换为电流输出；第一电极还用于将气敏件产生的电流输出。该气体感测装置克服了现有电化学气体传感器信号易衰减的缺陷、红外气体传感器输出信号微弱,无法直接使用的缺陷,以及半导体类气体传感器选择性不好,灵敏度不高,寿命短的缺陷,相对于现有的电参量气体传感器,该气体感测装置的选择性更好,灵敏度更高,且成本低,寿命长。(The present invention provides a kind of gas measuring device and gas detection equipment.The gas measuring device includes substrate and the first electrode, second electrode and the gas-sensitive element that are arranged in above substrate, gas-sensitive element is set to the side away from substrate of first electrode and second electrode, first electrode and second electrode are divided into the opposite end of gas-sensitive element, and it is in contact with gas-sensitive element, for applying polarizing voltage to the opposite end of gas-sensitive element, gas-sensitive element is converted into electric current output for adsorbing tested gas molecule；The electric current output that first electrode is also used to generate gas-sensitive element.The gas measuring device overcomes defect, the infrared gas sensor weak output signals that existing electrochemical gas sensor signal is easily decayed, the defect that can not directly use, and semiconductor type gas sensor is selectively bad, sensitivity is not high, service life short defect, relative to existing electric parameter gas sensor, the selectivity of the gas measuring device is more preferable, sensitivity is higher, and at low cost, and the service life is long.)

1. including substrate and square on the substrate first electrode, second electrode and air-sensitive is arranged in a kind of gas measuring device Part, which is characterized in that the gas-sensitive element is set to the side away from the substrate of the first electrode and the second electrode, The first electrode and the second electrode are divided into the opposite end of the gas-sensitive element, and are in contact with the gas-sensitive element, use In applying polarizing voltage to the opposite end of the gas-sensitive element, the gas-sensitive element is for adsorbing tested gas molecule, and by its turn It is changed to electric current output；The electric current output that the first electrode is also used to generate the gas-sensitive element.

2. gas measuring device according to claim 1, which is characterized in that the gas-sensitive element uses graphene oxide two-dimensional Flexible material.

3. gas measuring device according to claim 2, which is characterized in that the first electrode and the second electrode are adopted With copper-titanium alloy material.

4. gas measuring device according to claim 1 to 3, which is characterized in that it further include switching tube, it is described Switching tube is arranged on the substrate, and the first pole of the switching tube is electrically connected the first electrode.

5. gas measuring device according to claim 4, which is characterized in that the grid of the switching tube, has gate insulation layer Active layer, first pole and the second pole are successively arranged far from the substrate；First pole and the setting of second pole same layer；

The gate insulation layer also extends between the substrate and the first electrode, the second electrode and the gas-sensitive element；

First pole also extends between the first electrode and the gate insulation layer and the second electrode and the grid Between insulating layer.

6. gas measuring device according to claim 5, which is characterized in that further include the first insulating layer and barrier bed, institute It states the first insulating layer and is set to the side that the switching tube deviates from the substrate, offer via hole in first insulating layer, institute First electrode, the second electrode and the gas-sensitive element is stated to be located in the via hole；

The barrier bed is set to the side away from the switching tube of first insulating layer, and the barrier bed is in the base Orthographic projection on bottom covers the switching tube, and the barrier bed can block the ambient light for exposing to the switching tube.

7. gas measuring device according to claim 6, which is characterized in that the barrier bed uses opaque metal material Material.

8. gas measuring device according to claim 4, which is characterized in that it further include detection circuit, the detection circuit Input terminal be electrically connected the second pole of the switching tube, the detection circuit is used to receive the electric current of the gas-sensitive element output, and The electric current is converted to the concentration of tested gas.

9. a kind of gas detection equipment, which is characterized in that including gas measuring device described in claim 1-8 any one.

10. gas detection equipment according to claim 9, which is characterized in that the quantity of the gas measuring device is more A, multiple gas measuring devices are arranged in array.

Technical field

The invention belongs to gas detection technology fields, and in particular to a kind of gas measuring device and gas detection equipment.

Background technique

In environment, automobile, chemical industry and medical diagnostic field, people increasingly pay close attention to the detection of gas.Gas is examined at present Surveying sensor mainly has electrochemistry class gas sensor, infrared gas sensor and electric parameter gas sensor.Chemical classes gas Sensor is mainly that high sensitivity, selectivity are good, but the evaporation of electrolyte or pollution will lead to the decaying of sensor signal；It is red The output of outer gas sensor is all minute analog signal, and general user cannot directly use；And Optic Sensors in Power System cost It is low, gas concentration can be measured by its electrical signal, semiconductor type gas sensor is one type, but is much partly led at present The defects of body class gas sensor has selectivity bad, and sensitivity is not high, and the service life is short.

Summary of the invention

The present invention is directed to the problems of the prior art, provides a kind of gas measuring device and gas detection equipment.The gas It is micro- that sensing device overcomes defect, infrared gas sensor output signal that existing electrochemical gas sensor signal is easily decayed Weak, the defect and semiconductor type gas sensor that can not directly use are selectively bad, and sensitivity is not high, the service life it is short lack It falls into, relative to existing electric parameter gas sensor, the selectivity of the gas measuring device is more preferable, and sensitivity is higher, and cost Low, the service life is long.

The present invention provides a kind of gas measuring device, including substrate and setting square first electrode, the on the substrate Two electrodes and gas-sensitive element, the gas-sensitive element be set to the first electrode and the second electrode away from the one of the substrate Side, the first electrode and the second electrode are divided into the opposite end of the gas-sensitive element, and are in contact with the gas-sensitive element, For applying polarizing voltage to the opposite end of the gas-sensitive element, the gas-sensitive element for adsorbing tested gas molecule, and by its Be converted to electric current output；The electric current output that the first electrode is also used to generate the gas-sensitive element.

Preferably, the gas-sensitive element uses graphene oxide two-dimensional flexible material.

Preferably, the first electrode and the second electrode use copper-titanium alloy material.

It preferably, further include switching tube, on the substrate, the first pole of the switching tube is electrically connected for the switching tube setting Connect the first electrode.

Preferably, the grid of the switching tube, gate insulation layer, active layer, first pole and the second pole are successively far from institute State substrate setting；First pole and the setting of second pole same layer；

The gate insulation layer also extend to the substrate and the first electrode, the second electrode and the gas-sensitive element it Between；

First pole also extends between the first electrode and the gate insulation layer and the second electrode and institute It states between gate insulation layer.

It preferably, further include the first insulating layer and barrier bed, first insulating layer is set to the switching tube away from institute The side of substrate is stated, via hole, the first electrode, the second electrode and the gas-sensitive element are offered in first insulating layer In the via hole；

The barrier bed is set to the side away from the switching tube of first insulating layer, and the barrier bed is in institute The orthographic projection stated in substrate covers the switching tube, and the barrier bed can block the ambient light for exposing to the switching tube.

Preferably, the barrier bed uses opaque metal material.

It preferably, further include detection circuit, the input terminal of the detection circuit is electrically connected the second pole of the switching tube, institute Detection circuit is stated for receiving the electric current of the gas-sensitive element output, and the electric current is converted to the concentration of tested gas.

The present invention also provides a kind of gas detection equipments, wrap and state gas measuring device.

Preferably, the quantity of the gas measuring device is multiple, and multiple gas measuring devices are arranged in array.

Beneficial effects of the present invention: gas measuring device provided by the present invention, by setting gas-sensitive element, first electrode and Second electrode, can be by adsorbing tested gas molecule during gas sensing, and is converted into electric current output, thus to gas Body is sensed, and defect, infrared gas sensor output signal that existing electrochemical gas sensor signal is easily decayed are overcome Faint, the defect and semiconductor type gas sensor that can not directly use are selectively bad, and sensitivity is not high, and the service life is short Defect, relative to existing electric parameter gas sensor, the selectivity of the gas measuring device is more preferable, and sensitivity is higher, and at This is low, and the service life is long.

Gas detection equipment provided by the present invention improves the gas detection by using above-mentioned gas sensing device The selectivity and sensitivity that equipment detects gas, while the cost of the gas detection equipment is reduced, and improve it Service life.

Detailed description of the invention

Fig. 1 is the schematic structural cross-sectional view of gas measuring device in the embodiment of the present invention；

Fig. 2 is the schematic diagram that the gas-sensitive element in the embodiment of the present invention in gas measuring device senses ammonia；

Fig. 3 is the functional block diagram of gas measuring device sense gasses in the embodiment of the present invention.

Wherein appended drawing reference are as follows:

1, substrate；2, first electrode；3, second electrode；4, gas-sensitive element；5, switching tube；51, the first pole；52, grid；53, Second pole；54, gate insulation layer；55, active layer；6, the first insulating layer；61, via hole；7, barrier bed；8, detection circuit.

Specific embodiment

Technical solution in order to enable those skilled in the art to better understand the present invention, with reference to the accompanying drawing and specific embodiment party Formula is described in further detail gas measuring device of the present invention and gas detection equipment.

The embodiment of the present invention provides a kind of gas measuring device, as shown in Figure 1, including substrate 1 and setting side on the base 1 First electrode 2, second electrode 3 and gas-sensitive element 4, gas-sensitive element 4 be set to first electrode 2 and second electrode 3 away from substrate 1 Side, first electrode 2 and second electrode 3 are divided into the opposite end of gas-sensitive element 4, and are in contact with gas-sensitive element 4, are used for air-sensitive The opposite end of part 4 applies polarizing voltage, and gas-sensitive element 4 is converted into electric current output for adsorbing tested gas molecule；The The electric current output that one electrode 2 is also used to generate gas-sensitive element 4.

The gas measuring device, through setting gas-sensitive element 4, first electrode 2 and second electrode 3, during gas sensing It can be by adsorbing tested gas molecule, and it is converted into electric current output, to sense to gas, overcome existing electrification Defect, the infrared gas sensor weak output signals that gas sensor signal is easily decayed, the defect that can not directly use, with And semiconductor type gas sensor is selectively bad, sensitivity is not high, service life short defect, relative to existing electric parameter gas The selectivity of sensor, the gas measuring device is more preferable, and sensitivity is higher, and at low cost, and the service life is long.

Preferably, in the present embodiment, gas-sensitive element 4 uses graphene oxide two-dimensional flexible material.The gas-sensitive element 4 of the material, Applying polarizing voltage in first electrode 2 and second electrode 3 (can apply a negative pressure such as -3V, in second electrode in such as first electrode A positive pressure such as 1V can be applied) after, surface will form the functional group of concentration in gradient distribution, thus in adsorption gas point Directional migration can occur for the charge that the period of the day from 11 p.m. to 1 a.m ionizes out, and generate spontaneous polarizing voltage, the oxidation stone after spontaneous polarization process The 4 electrical signal intensity of gas-sensitive element of black alkene two-dimension flexible material is higher, and response speed is very fast, and then fills the gas sensing The selectivity set is more preferable, and sensitivity is higher.It is illustrated in figure 2 and adsorbs ammonia molecule when the gas-sensitive element 4 senses ammonia Schematic diagram.

Certainly, gas-sensitive element 4 can also use other materials with the above function, be not specifically limited here.

Preferably, first electrode 2 and second electrode 3 use copper-titanium alloy material.The electrodes conduct performance of the material is more preferable, To can be further improved the selectivity and sensitivity of gas measuring device.

Certainly, first electrode 2 and second electrode 3 can also not do specific limit using other conductive metal materials here It is fixed.

In the present embodiment, as shown in Figure 1, gas measuring device further includes switching tube 5, switching tube 5 is arranged on the base 1, First pole 51 of switching tube 5 is electrically connected first electrode 2.After the grid 52 of the switching tube 5 is opened, the electric current of the generation of gas-sensitive element 4 It is flowed out by the second pole 53 of switching tube 5, to realize the output control to electric current on gas-sensitive element 4.The setting of switching tube 5, energy The output for the electric current that gas-sensitive element 4 generates is controlled, to realize the Sensitive Detection of the gas measuring device.

Preferably, in the present embodiment, the grid 52 of switching tube 5, gate insulation layer 54, active layer 55, the first pole 51 and second Pole 53 is successively arranged far from substrate 1；First pole 51 and the setting of 53 same layer of the second pole；Gate insulation layer 54 also extends to substrate 1 and Between one electrode 2, second electrode 3 and gas-sensitive element 4；First pole 51 also extend between first electrode 2 and gate insulation layer 54 and Between second electrode 3 and gate insulation layer 54.The structure setting can make the structure of gas measuring device more compact, and volume is smaller, To reduce occupied space when its use.

In the present embodiment, gas measuring device further includes the first insulating layer 6 and barrier bed 7, and the first insulating layer 6 is set to out The side that pipe 5 deviates from substrate 1 is closed, offers via hole 61, first electrode 2, second electrode 3 and gas-sensitive element 4 in the first insulating layer 6 In via hole 61；So set, the structure of the gas measuring device can be made more compact, volume and occupied space are smaller.It blocks Layer 7 is set to the side away from switching tube 5 of the first insulating layer 6, and the orthographic projection overlay switch pipe of barrier bed 7 on the base 1 5, barrier bed 7 can block the ambient light for exposing to switching tube 5.The setting of barrier bed 7, to the environment light for exposing to switching tube 5 It is blocked, increases the leakage current of switching tube 5 so that ambient lighting be avoided to penetrate, and then avoid 5 leakage current of switching tube to air-sensitive The influence of electric current is exported on part 4, it is ensured that the accuracy of output electric current measure on gas-sensitive element 4.

Wherein, barrier bed 7 uses opaque metal material.The shading of the material and heat dissipation performance are more preferable.Certainly, barrier bed 7 can also use other light-proof materials, be not specifically limited here.

In addition, in the present embodiment, as shown in figure 3, gas measuring device further includes detection circuit 8, the input of detection circuit 8 Second pole of end electrical connection switching tube 5, detection circuit 8 is used to receive the electric current of the output of gas-sensitive element 4, and converts electrical current into tested The concentration of gas.Detection circuit 8 is usually independently arranged at the outside of substrate 1.The setting of detection circuit 8 realizes the gas sense Survey detection of the device to tested gas concentration.

Conversion of the detection circuit 8 to tested gas concentration specifically: electric current and gas concentration are provided in detection circuit 8 Mapping table finds corresponding gas concentration according to the size of electric current is corresponding, and the gas concentration is determined as tested gas Concentration.The conversion function of detection circuit 8 is existing conventional func, is no longer elaborated here.

It should be noted that detection circuit 8, which may be set to be, to be converted to tested gas for the electric current that gas-sensitive element 4 exports Other parameters (such as flow, volume) circuit, specifically can specifically be arranged according to the actual application, which is not described herein again.

In addition, the gas that gas measuring device can sense is also not necessarily limited to ammonia, be also possible to it is other can pass through it is above-mentioned The gas that sensing principle is sensed.

Above structure based on gas measuring device, the present embodiment also provide a kind of preparation side of gas measuring device Method, comprising: first electrode, second electrode and gas-sensitive element are prepared in substrate.

Wherein, first electrode and second electrode are prepared using conventional patterning processes.Graphene oxide two-dimensional flexible material Gas-sensitive element is prepared using UVO method.Specifically:

The film of grapheme material is formed on the substrate first, then prepares graphene oxide by UV light and ozone treatment The gas-sensitive element of material.UVO method processing grapheme material mainly controls the work of UV illumination and ozone bombardment by time parameter Process can handle grapheme material about 7min by UVO method in the present embodiment, can achieve the desired results.The technique is to compare Mature traditional handicraft, specifically repeats no more.

In addition, the preparation of switching tube and detection circuit is traditional handicraft in gas measuring device, which is not described herein again.

The present embodiment the utility model has the advantages that gas measuring device provided by the present embodiment, pass through setting gas-sensitive element, the first electricity Pole and second electrode, can be by adsorbing tested gas molecule during gas sensing, and is converted into electric current output, thus Gas is sensed, defect, the infrared gas sensor output that existing electrochemical gas sensor signal is easily decayed are overcome Weak output signal, the defect that can not directly use and semiconductor type gas sensor are selectively bad, and sensitivity is not high, the service life Short defect, relative to existing electric parameter gas sensor, the selectivity of the gas measuring device is more preferable, and sensitivity is higher, And it is at low cost, the service life is long.

The embodiment of the present invention also provides a kind of gas detection equipment, including the gas measuring device in above-described embodiment.

Wherein, the quantity of gas measuring device is multiple, and multiple gas measuring devices are arranged in array.

By using the gas measuring device in above-described embodiment, improves the gas detection equipment and gas is detected Selectivity and sensitivity, while reducing the cost of the gas detection equipment, and improve its service life.

It is understood that the principle that embodiment of above is intended to be merely illustrative of the present and the exemplary implementation that uses Mode, however the present invention is not limited thereto.For those skilled in the art, essence of the invention is not being departed from In the case where mind and essence, various changes and modifications can be made therein, these variations and modifications are also considered as protection scope of the present invention.