阅读说明：本技术 铝氧化物物品 (Aluminum oxide article ) 是由 竹元裕仁 青木雅裕 丰田浩司 稻叶孝一朗 境健太郎 于 2018-03-14 设计创作，主要内容包括：本发明涉及铝氧化物物品,其至少由铝原子和氧原子构成,透射电子显微镜观察中的前述铝氧化物物品的截面包含能够确认晶格像的结晶化部分和不能确认晶格像的非结晶部分,具有海岛结构,所述海岛结构包含：包含前述结晶化部分的孤立的部分和连续的非结晶部分的(其中,前述孤立的部分相当于海岛结构的岛部,前述连续的非结晶部分相当于海岛结构的海部),且多个前述岛部在前述海部中均匀散布。根据本发明,提供用于提高锂离子二次电池的电池性能和固化膜的耐擦伤性、硬度、进一步还有气体阻隔膜的气体阻隔性的铝氧化物。(The present invention relates to aluminum oxide articles, it is at least made of aluminium atom and oxygen atom, the section of aforementioned aluminum oxide article in transmission electron microscope observation is comprising being able to confirm that the crystallized portion of lattice image and not can confirm that the non-crystallized part of lattice image, with island structure, the island structure includes: isolated part and continuous non-crystallized part comprising aforementioned crystalline part (wherein, aforementioned isolated part is equivalent to the island portion of island structure, aforementioned continuous non-crystallized part is equivalent to the extra large portion of island structure), and multiple aforementioned island portions uniformly dispersing in aforementioned sea portion.According to the present invention, provide that the marresistance of the battery performance and cured film for improving lithium ion secondary battery, hardness, further there are also the aluminum oxides of the barrier properties for gases of gas barrier film.)

1. aluminum oxide article, is at least made of aluminium atom and oxygen atom,

The section of aforementioned aluminum oxide article in transmission electron microscope observation includes the crystallization portion for being able to confirm that lattice image Divide and not can confirm that the non-crystallized part of lattice image,

With island structure, the island structure includes: the isolated part comprising aforementioned crystalline part and continuous non-knot (wherein, aforementioned isolated part is equivalent to the island portion of island structure, and aforementioned continuous non-crystallized part is equivalent to island for brilliant part The extra large portion of structure), and

Multiple aforementioned island portions uniformly dispersing in aforementioned sea portion.

2. aluminum oxide article according to claim 1, wherein aforementioned island portion is not can confirm that lattice image in central part Structure, peripheral portion are aforementioned crystalline part.

3. aluminum oxide article according to claim 1 or 2, wherein aforesaid plurality of island portion is in the sea of marine uniformly dispersing Island structure is observed in at least region of 100nm × 100nm in the image in aforementioned section.

4. aluminum oxide article described according to claim 1 ~ any one of 3, wherein items are arranged on substrate Film, independent film or autonomous block.

5. aluminum oxide article described according to claim 1 ~ any one of 4, wherein by the saturating of the section of aluminum oxide article It penetrates electron microscope observation image and carries out 3 equal parts along depth direction from article surface, and will exist in most surface region Island portion partial size average value be denoted as A, the average value of the partial size of existing island portion in the middle region be denoted as B, will be most The average value of the partial size of island portion present in deep region is denoted as C, by the partial size of island portion present in the entirety in item sections When average value is denoted as X, meet the relationship of 0.9 < A/X, B/X, C/X < 1.1.

6. aluminum oxide article described according to claim 1 ~ any one of 5, wherein by the saturating of the section of aluminum oxide article It penetrates electron microscope observation image and carries out 3 equal parts along depth direction from article surface, and by the island portion in most surface region Quantity is denoted as a, the quantity of the island portion of intermediate region is denoted as to b, the quantity of the island portion of bottommost layer is denoted as to c, by whole island When quantity is denoted as Y, meet the relationship of 0.27 < a/Y, b/Y, c/Y < 0.40.

7. aluminum oxide article described according to claim 1 ~ any one of 6, wherein pencil hardness F or harder than F.

8. the manufacturing method of aluminum oxide article comprising:

The step of dried object of partial hydrolystate containing alkyl aluminum is prepared by the solution of the partial hydrolystate containing alkyl aluminum；With

Temperature by aforementioned dried object at 70 DEG C or more heats to obtain the alumina being at least made of aluminium atom and oxygen atom The step of object article；

Wherein, aforementioned heating is implemented to the aluminum oxide article for obtaining having the structure for meeting following (1) ~ (3)；

(1) section of the aforementioned aluminum oxide article in transmission electron microscope observation includes the crystallization for being able to confirm that lattice image Change part and not can confirm that the non-crystallized part of lattice image；

(2) there is island structure, the island structure includes: the isolated part comprising aforementioned crystalline part and continuous (wherein, aforementioned isolated part is equivalent to the island portion of island structure to non-crystallized part, and aforementioned continuous non-crystallized part is equivalent to The extra large portion of island structure)；With

(3) multiple aforementioned island portions uniformly dispersing in aforementioned sea portion.

9. manufacturing method according to claim 8, wherein the condition of aforementioned heating is the calcination time at 100 DEG C of temperature It is 10 minutes or more, calcination time is 2 minutes or more at 400 DEG C.

10. manufacturing method according to claim 8 or claim 9, wherein aforesaid alkyl aluminium is chemical combination shown in the following general formula (1) Object,

[changing 1]

(in formula, R¹The alkyl, alkoxy, acyloxy of the linear chain or branched chain of carbon atom number 1 ~ 8 are each independently represented, X indicates hydrogen Or halogen atom；The integer that n is 0 ~ 2).

11. the manufacturing method according to any one of claim 8 ~ 10, wherein the partial hydrolystate of alkyl aluminum uses opposite It is obtained in the molar ratio of the alkyl aluminum of general formula (1) for 1.3 water below.

12. the manufacturing method according to any one of claim 8 ~ 11, wherein prepare aforementioned dried object on substrate.

13. the manufacturing method according to any one of claim 8 ~ 12, wherein from the surface of aforementioned aluminum oxide article to The range with a thickness of 5nm ~ 5 μm in most deep.

Technical field

The present invention relates to the aluminum oxide articles of the crystallinity with appropriateness and amorphism (amorphism).It is specific and Speech is related to the electrode overlay film as non-aqueous secondary battery, the cured film for improving marresistance or hardness, has both high gas resistance Every the useful aluminum oxide article of the gas barrier film of property and the transparency.

The mutual reference of related application

This application claims Japanese Patent Application 2017-56166 priority submitted on March 22nd, 2017, all record herein Especially quoted in a manner of disclosed.

Background technique

The insulating properties of aluminium oxide (aluminium oxide), heat resistance, wear resistance, chemical resistance are excellent, multi-purpose to set as electronics The sliding of refractory material, dental kind plant, the medical bone joint element of standby insulating element, crucible, exhaust gas component etc. etc. Component.

About aluminium oxide, it is known that a large amount of structure, it is (non-special there are amorphous, α, β, γ, δ, ζ, η, θ, κ, ρ, χ 11 kinds Sharp document 1).

In recent years, in order to improve the thermal stability of the excellent lithium ion secondary battery of output power density, energy density, fill Cycle characteristics when electric is also used to the surface coating (patent document 1,2) of positive active material.

In addition, being also used to have both the transparency on the surface of the optical component, touch panel, film-type liquid crystal elements of plastics etc. With the curing overlay film (patent document 3) of wear resistance, marresistance.

Further, the packaging material and being used as also as food, pharmaceuticals etc. has both blocking oxygen, the effect of moisture and thoroughly The gas barrier film (patent document 4) of bright property.

Although being like this highly useful aluminium oxide, in order to use the active material of alpha-alumina crystals covering electrode, tree Rouge is needed using physical pressure, bonding agent (bonding agent).In addition, in the case where forming overlay film by such method, in addition The thickness of the size of aluminium oxide, bonding agent, causes to be difficult to filming, as a result, there is transparency reduction, battery performance to reduce etc. Project.

Patent document 1: Japanese Unexamined Patent Publication 2001-143703 bulletin

Patent document 2: Japanese Unexamined Patent Publication 2010-140737 bulletin

Patent document 3: Japanese Unexamined Patent Publication 2001-139888 bulletin

Patent document 4: Japanese Unexamined Patent Publication 08-183139 bulletin

Patent document 5: Japanese Unexamined Patent Publication 2002-151077 bulletin

Patent document 6: Japanese Unexamined Patent Publication 2016-143490 bulletin

Patent document 7: Japanese Unexamined Patent Publication 2002-187738 bulletin

Patent document 8: Japanese Unexamined Patent Publication 2000-71396 bulletin

Patent document 9: Japanese Unexamined Patent Publication 2013-216760 bulletin

Non-patent literature 1:Oxides and Hydroxides of Aluminum, Alcoa Laboratories, USA, 1987.

227 (1995) of non-patent literature 2:Bolt P.H.et al., Surf.Sci.329

Non-patent literature 3:Sarapatka T.J., J.Phys.Chem.97 11274 (1993)

Whole record of patent document 1 ~ 9 and non-patent literature 1 ~ 3 is especially quoted in the form of disclosed herein.

Summary of the invention

Subject to be solved by the invention

Method as more unfertile land covering aluminium oxide, it is known that pass through the hydrolysis (institute of the aluminium compound with water-disintegrable organic group The sol-gal process of meaning) and the method for covering.For example, proposing using sol-gal process in patent document 5,6 in lithium ion two The method that the positive electrode surface of primary cell forms film.In addition, proposing through sol-gal process in patent document 7 in glass base The method of cured film is formed on plate.Further, it in patent document 8,9, proposes and passes through collosol and gel on thermoplastic resin film The method of method blanketing gas barrier film.

In the method recorded in patent document 5,6, proposing makes to be adsorbed on by the alumine hydroxide colloid that hydrolysis generates On positive active material particle, then heat-treating methods in the case where aoxidizing atmosphere.However, it is known that if by aluminium hydroxide 700 DEG C temperature below is handled, then obtains amorphous structure, is further being set as until the case where 900 DEG C or so of high temperature Under, it is crystallized from the surface of particle, therefore surface and internal crystal state are uneven.Further, patent document 5 [0020] section, in [0087] section of patent document 6, describe preferably by the covering that this method generates is particle one Divide or the overlay film of dispersion, not formed oxide coating film are partially dispersed on the particle surface.But in recent years, advance with The raising for further increasing the operation voltage for the purpose of energy density, there are the electrode surface of high voltage when charging and electrolyte Contact portion, thus electrolyte decomposition, as a result, there are the projects that battery performance reduces.

In addition, describing through the overlay film that the method for patent document 7 generates is amorphous structure, if not using ultraviolet light Such specific process is irradiated, then pencil hardness is low, is unable to fully satisfactory.

Further, in the method for patent document 8, if without using special methods such as autoclave, ultraviolet light irradiations, nothing Method forms the overlay film for taking into account the good transparency and barrier properties for gases.

The present invention is carried out in view of above-mentioned project.That is, problem of the present invention is that, it provides as raising lithium ion secondary The electrode overlay film of the battery performance of battery, the cured film for improving marresistance and hardness have both high gas-obstructing character and transparent The useful aluminum oxide article of the gas barrier film of property.

Means for solving the problems

The inventors of the present invention have made intensive studies to solve aforementioned problems, as a result, it has been found that, by using crystallized portion and The marresistance of the uniform existing aluminum oxide article of non-crystallized part, the battery performance of lithium ion secondary battery and cured film, The barrier properties for gases raising of hardness, further gas barrier film, so as to complete the present invention.

That is, the present invention is as described below.

[1]

Aluminum oxide article, is at least made of aluminium atom and oxygen atom,

The section of aforementioned aluminum oxide article in transmission electron microscope observation includes the crystallization portion for being able to confirm that lattice image Divide and not can confirm that the non-crystallized part of lattice image,

With island structure, the island structure includes: the isolated part comprising aforementioned crystalline part and continuous non-knot (wherein, aforementioned isolated part is equivalent to the island portion of island structure, and aforementioned continuous non-crystallized part is equivalent to island for brilliant part The extra large portion of structure), and

Multiple aforementioned island portions uniformly dispersing in aforementioned sea portion.

[2]

The aluminum oxide article according to [1], wherein aforementioned island portion is not can confirm that the structure of lattice image in central part, week Edge is aforementioned crystalline part.

[3]

According to aluminum oxide article described in [1] or [2], wherein island structure of the aforesaid plurality of island portion in marine uniformly dispersing It is observed in at least region of 100nm × 100nm in the image in aforementioned section.

[4]

The aluminum oxide article according to any one of [1] ~ [3], wherein items be the film being arranged on substrate, Independent film or autonomous block.

[5]

The aluminum oxide article according to any one of [1] ~ [4], wherein by the transmitted electron in the section of aluminum oxide article Micro- sem observation image carries out 3 equal parts along depth direction from article surface, and will the island portion present in most surface region Partial size average value be denoted as A, the average value of the partial size of existing island portion in the middle region be denoted as B, will be in most deep region Present in the average value of partial size of island portion be denoted as C, by the average value of the partial size of island portion present in the entirety in item sections When being denoted as X, meet the relationship of 0.9 < A/X, B/X, C/X < 1.1.

[6]

The aluminum oxide article according to any one of [1] ~ [5], wherein by the transmitted electron in the section of aluminum oxide article Micro- sem observation image carries out 3 equal parts along depth direction from article surface, and the quantity of the island portion in most surface region is remembered Make a, the quantity of the island portion of intermediate region is denoted as to b, the quantity of the island portion of bottommost layer is denoted as to c, remembering the quantity on whole island When making Y, meet the relationship of 0.27 < a/Y, b/Y, c/Y < 0.40.

[7]

The aluminum oxide article according to any one of [1] ~ [6], wherein pencil hardness F or harder than F.

[8]

The manufacturing method of aluminum oxide article comprising: alkyl is contained by the solution preparation of the partial hydrolystate containing alkyl aluminum The step of dried object of the partial hydrolystate of aluminium；With

Temperature by aforementioned dried object at 70 DEG C or more heats to obtain the alumina being at least made of aluminium atom and oxygen atom The step of object article；

Wherein, aforementioned heating is implemented to the aluminum oxide article for obtaining having the structure for meeting following (1) ~ (3)；

(1) section of the aforementioned aluminum oxide article in transmission electron microscope observation includes the crystallization for being able to confirm that lattice image Part and the non-crystallized part that not can confirm that lattice image；

(2) there is island structure, the island structure includes: the isolated part comprising aforementioned crystalline part and continuous non- (wherein, aforementioned isolated part is equivalent to the island portion of island structure to crystalline portion, and aforementioned continuous non-crystallized part is equivalent to sea The extra large portion of island structure)；With

(3) aforesaid plurality of island portion uniformly dispersing in aforementioned sea portion.

[9]

The manufacturing method according to [8], wherein the condition of aforementioned heating be 100 DEG C of calcination times of temperature be 10 minutes with On, it is 2 minutes or more in 400 DEG C of calcination times.

[10]

According to manufacturing method described in [8] or [9], wherein aforesaid alkyl aluminium is the following general formula (1) compound represented,

[changing 1]

(in formula, R¹The alkyl, alkoxy, acyloxy of the linear chain or branched chain of carbon atom number 1 ~ 8 are each independently represented, X indicates hydrogen Or halogen atom；The integer that n is 0 ~ 2).

[11]

The manufacturing method according to any one of [8] ~ [10], wherein the partial hydrolystate use of alkyl aluminum is relative to general formula (1) molar ratio of alkyl aluminum obtains for 1.3 water below.

[12]

The manufacturing method according to any one of [8] ~ [11], wherein aforementioned dried object is prepared on substrate.

[13]

The manufacturing method according to any one of [8] ~ [12], wherein from the surface of aforementioned aluminum oxide article to most deep The range with a thickness of 5nm ~ 5 μm.

The effect of invention

In accordance with the invention it is possible to provide the electrode overlay film as the battery performance for improving lithium ion secondary battery, improve anti-scratch The cured film of wound property and hardness, the useful aluminum oxide article of gas barrier film for having both high gas-obstructing character and the transparency.

Detailed description of the invention

Fig. 1 is the TEM image (50,000 times) of embodiment 1.

Fig. 2 is the recognition result of the island portion of the TEM image (50,000 times) of embodiment 1.

Fig. 3 is the TEM image (1,500,000 times) of embodiment 1.

Fig. 4 is the TEM image (1,500,000 times) of embodiment 1 as the grain of island portion and the crystallized portion on periphery and conduct The recognition result of the non-crystallized part in extra large portion.

Fig. 5 is the TEM image (200,000 times) of embodiment 1.

Fig. 6 is the recognition result of the island portion of the TEM image (200,000 times) of embodiment 1.

Fig. 7 is the TEM image (100,000 times) of embodiment 4.

Fig. 8 is the recognition result of the island portion of the TEM image (100,000 times) of embodiment 4.

Fig. 9 is the TEM image (100,000 times) of reference example 4.

Figure 10 is the recognition result of the island portion of the TEM image (100,000 times) of reference example 4.

Figure 11 is the schematic diagram for showing the battery of coin battery unit used in embodiment 7 (coin cell).

Specific embodiment

For the present invention, illustrate in further detail below.

Aluminum oxide article of the invention is at least made of aluminium atom and oxygen atom, further in transmission electron microscope In cross-section observation, comprising being able to confirm that the crystallized portion of lattice image and not can confirm that the non-crystallized part of lattice image.Further, It is with island structure, the island structure includes: the isolated part comprising aforementioned crystalline part and continuous noncrystalline Part, and the aluminum oxide article of multiple island portions uniformly dispersing in extra large portion.Wherein, aforementioned isolated part is equivalent to island knot The island portion of structure, aforementioned continuous non-crystallized part are equivalent to the extra large portion of island structure.

By making multiple island portions comprising crystallized portion uniformly dispersing, knot with high hardness in the extra large portion of non-crystallized part Crystallization part and barrier properties for gases and the high non-crystallized part of ionic conductivity coexist.As a result, if being used for lithium ion The electrode overlay film of secondary cell, then can be improved battery performance, can be improved marresistance and hardness as cured film, into one Step is used as gas barrier film, and barrier properties for gases improves.

Here, " crystallized portion " refer to by transmission electron microscope (Transmission ElectronMIcroscope, hereinafter referred to as TEM) observation when be able to confirm that the part of lattice image, " non-crystallized part " refers to through TEM not It can confirm that the part of lattice image.The transmission electron microscope being able to use is not particularly limited, and is able to use such as Japan Electronics JEM-2010 processed.It, can be by being carried out at acceleration voltage 200kV for confirming that the measuring method of lattice image is not particularly limited The high magnification in the bright visual field is observed and is confirmed.

Aluminum oxide article in the present invention by section low range (such as 2,000 times ~ 200,000 times) TEM image It is found that forming the island for being mutually separated into extra large portion and island portion on the depth direction from aluminum oxide article surface towards inner face Structure (see, for example Fig. 2,3,4,5).Further, by the high magnification of same cross-sectional (such as 80,0000 times ~ 1,500,000 times) TEM image, lattice image (see, for example Fig. 3,4) can be confirmed near the periphery of island portion.Accordingly, confirm that the section of island portion exists Central part is the structure that not can confirm that lattice image, and peripheral portion is aforementioned crystalline part.It can be speculated as in three-dimensional, island portion is outer Week being crystallized part covering structure, inside is the non-crystalline structure not crystallized, or because periphery crystallize due to have compared with For the grain for approaching the structure for crystallizing structure.For island portion, it is believed that by giving the energy such as heat, it is possible to from outer circumferential direction Inside is crystallized.On the other hand, extra large portion does not confirm lattice image, therefore, it is considered that being non-crystalline structure.

In addition, as being specifically illustrated in embodiment, it is believed that, the size of island portion is more uniform in cross-section observation, and island portion Evenly dispersed in extra large portion (see, for example Fig. 2,3,4,5), therefore in aluminum oxide article, crystallized portion and noncrystalline portion Divide and is uniformly mixed.

In aluminum oxide article in the present invention, the island structure of aforesaid plurality of island portion uniformly dispersing in extra large portion preferably exists It is observed in at least region of 100nm × 100nm in the image in aforementioned section.Island structure is more preferably in aluminum oxide object It is observed in the entirety of product or almost entirety.

Aluminum oxide article of the invention is from the viewpoint of the size of island portion is more uniform, preferably by the transmission electricity in section The micro- sem observation image (cross sectional TEM image) of son carries out 3 equal parts along depth direction from article surface, and will be in most surface area The average value of the partial size of island portion present in domain is denoted as A, is denoted as the average value of the partial size of existing island portion in the middle region B, the average value of the partial size of the island portion present in most deep region is denoted as C, by island portion present in the entirety in item sections The average value of partial size when being denoted as X, meet the relationship of 0.9 < A/X, B/X, C/X < 1.1.That is, 0.9 < A/X < 1.1,0.9 < B/X < 1.1,0.9<C/X<1.1.A/X, B/X, C/X are independently greater than 0.9 and lower than 1.1.

In the case that the ratio of the average value of the partial size of island portion independently is 0.9 or less or 1.1 or more, there are partial size differences Island portion throughout tendency, the hardness of the part is likely to decrease, therefore preferably above range.

Further, aluminum oxide article of the invention is island portion is evenly dispersed in extra large portion, preferably by aluminium The transmission electron microscope observation image in the section of oxide article carries out 3 equal parts along depth direction from article surface, and will The quantity of the island portion in most surface region is denoted as a, the quantity of the island portion of intermediate region is denoted as to b, by the quantity of the island portion of bottommost layer When being denoted as c, the quantity on whole island being denoted as Y, meet the relationship of 0.27 < a/Y, b/Y, c/Y < 0.40.That is, 0.27 < a/Y < 0.40,0.27<b/Y<0.40,0.27<c/Y<0.40.A/Y, b/Y, c/Y are independently greater than 0.27 and lower than 0.40.It should say It is bright, in the range for the physical property for not damaging article of the invention, it is mixed in aluminum oxide article other than aluminium and oxygen Element can also be with.

In the case that the ratio of the average value of the quantity of island portion independently is 0.27 or less or 0.40 or more, the few portion of island portion The hardness divided is likely to decrease, therefore preferably above range.

As long as the crystal structure for including in the crystallized portion of the aluminum oxide article in the present invention is former comprising aluminium and oxygen The crystal structure of son.For example, the crystal form as aluminium oxide (aluminium oxide), it is known that α, β, γ, δ, ζ, η, θ, κ, ρ, χ structure, As long as being then not particularly limited other than non-crystalline structure (amorphous).But as being recorded in embodiment, in reality It applies in XRD used in example, is unable to get diffraction maximum.Therefore, crystallized portion can not be determined by XRD used in embodiment Crystal structure.

Aluminum oxide article of the invention can be the film being arranged on substrate.Alternatively, being also possible to do not have substrate Independent film or independent piece.The thickness in the case where film being arranged on substrate, from the surface of aluminum oxide to most deep Degree is not particularly limited, and can be the ranges of such as 5nm ~ 5 μm, the range of 10nm ~ 1 μm, the range of 50nm ~ 1 μm, further The range of 100nm ~ 1 μm.

The pencil hardness of aluminum oxide article of the invention is F or harder than F.Aluminum oxide article of the invention has upper Island structure is stated, therefore hardness is high.The pencil hardness of aluminum oxide article of the invention is preferably H or more.

(identification method of aluminum oxide article)

In the present invention, the identification for the aluminum oxide that crystallized portion and non-crystallized part are equably mixed can pass through TEM It carries out.Acquisition methods for TEM image and according to the analysis method of the crystallized portion of TEM image and crystallized portion with The analysis method of the uniformity of non-crystallized part is illustrated.

< TEM image acquisition methods >

Method as the TEM image for obtaining aluminum oxide item sections, it is known that aluminum oxide is thin along cross-wise direction progress The method of Slice.As the method for slice, be not particularly limited, may be exemplified out for example using argon ion slicer, The general slice such as focused ion beam (FIB) device, super slicer disguises the method set.

< TEM image analysis method >

The distribution of " crystallized portion " and " non-crystallized part " of aluminum oxide article of the invention can be by by alumina Compound is sliced along cross-wise direction, is viewed as island knot by the TEM image observed under low range (2000 times ~ 200000 times) Island portion and sea portion are compared, to confirm by structure.It is preferred that confirming in same TEM image from aluminum oxide article surface edge The structure of depth direction in inner face, therefore multiplying power expectation selection when observing TEM image is able to confirm that aluminum oxide entirety Multiplying power, or selection is able to confirm that the multiplying power of island structure.Thickness from the surface of aluminum oxide to most deep is thick, is able to confirm that In the case that the multiplying power of aluminum oxide entirety is the multiplying power that not can confirm that island structure, can from aluminum oxide article surface along Depth direction in inside is divided and obtains image, analyzed.When dividing and obtaining image, it is expected that being surveyed under phase same multiplying It is fixed.

" island structure " in the TEM image observed under low range refers to that in TEM image, " extra large portion " and " island portion " is mixed Close existing structure.It is shown in aftermentioned Fig. 1.For " extra large portion ", observed under high magnification (800000 times ~ 1500000 times) In TEM image, lattice image is not observed, therefore is the relatively more region of non-crystallized part.On the other hand, island portion is near periphery Confirm lattice image, therefore periphery is crystallized portion, inside is amorphous, or because periphery crystallization due to be it is noncrystalline but It is easy the grain of the structure of crystallization.That is, island portion is the structure of periphery the being crystallized part covering of amorphous grain in three-dimensional. When confirming in the TEM image of low range, grain periphery it is deep or light obvious, can will can be identified as grain by its deep or light difference Position is denoted as island portion.In Fig. 4, the crystallized portion of island portion, the noncrystalline of island portion and extra large portion (non-crystallized part) are shown.

Accordingly, by studying the size of island portion and the dispersity of island portion, multiple island portions can be made uniformly to dissipate in extra large portion The non-crystallized part of cloth becomes obvious.

In order to grasp the size and dispersity of island portion, the size for dividing island portion by image analysis software can be used The method evaluated as partial size.The image analysis software routinely utilized can be used in image analysis software.For example, can make With MacView etc..

Specifically, aluminum oxide article is sliced along cross-wise direction in image analysis software, in analysis software (MacView) in, the TEM image observed under low range is read as conventional image digitization file, will be observed as highlights To island portion point be identified as grain.Court of the region expectation identified in the depth direction from aluminum oxide article surface towards inner face Upwards, production accommodates rectangular (such as rectangle or square) of aluminum oxide article completely, this is rectangular interior as cog region Domain.Further, rectangular region is carried out to 3 points on the depth direction from aluminum oxide article surface towards inner face, it will most table The region of layer is denoted as region 1, the region of middle layer is denoted as to region 2, the region of bottommost layer is denoted as region 3, identifies each region Island portion.As knowledge method for distinguishing, method, the method for automatic identification of manual identification.When manual identification, can be used will be Highlights is formed in TEM image and there are the methods that the position of the profile of dark portion is identified as island portion around it.The gimmick will be passed through The TEM image of obtained embodiment 1 is illustrated in Fig. 2.In the case where automatic identification, condition is identified to each Image Adjusting, with It can identify island portion point.After identifying island portion point, partial size, the size distribution, the information of distribution of particles of island portion point are obtained.Further, Rectangular region is carried out 3 points on the depth direction from aluminum oxide article surface towards inner face, the region on most surface layer is remembered Make region 1, the region of middle layer is denoted as to region 2, the region of bottommost layer is denoted as region 3, identifies the island portion in each region.About The island portion existing for the near border in each region is preferably identified as the island portion in the big region of ratio of area.Thereafter, each area is found out The average value of the partial size in domain and the quantity of particle, and by comparing, dispersed of the island portion in aluminum oxide article can be studied State.I.e., it is possible to study the dispersity of crystallized portion and non-crystallized part.

(manufacturing method of aluminum oxide article)

The manufacturing method of aluminum oxide article of the invention includes:

By the solution coating of the partial hydrolystate containing alkyl aluminum and the step of drying；With

Temperature by aforementioned dried object at 70 DEG C or more heats to obtain the alumina being at least made of aluminium atom and oxygen atom The step of object article；

Wherein, aforementioned heating is implemented to the aluminum oxide article for obtaining having the structure for meeting following (1) ~ (3)；

(1) section of the aforementioned aluminum oxide article in transmission electron microscope observation includes the crystallization for being able to confirm that lattice image Part and the non-crystallized part that not can confirm that lattice image；

(2) there is island structure, the island structure includes: the isolated part comprising aforementioned crystalline part and continuous non- (wherein, aforementioned isolated part is equivalent to the island portion of island structure to crystalline portion, and aforementioned continuous non-crystallized part is equivalent to sea The extra large portion of island structure)；With

(3) aforesaid plurality of island portion uniformly dispersing in aforementioned sea portion.

The solution of partial hydrolystate containing alkyl aluminum, which can be enumerated, is diluted alkyl aluminum with solvent by partial hydrolysis Solution obtained from the solution arrived.It is believed that forming aluminium by partial hydrolysis alkyl aluminum and oxygen being pre-formed bonding position Precursor, under heating, the bonded portion form core, thus uniformly generate without there is island portion unevenly.

Alkyl aluminum is the following general formula (1) compound represented.

[changing 2]

(in formula, R¹The alkyl, alkoxy, acyloxy of the linear chain or branched chain of carbon atom number 1 ~ 8 are each independently represented, X is indicated The halogen atoms such as hydrogen, fluorine, chlorine, bromine, iodine；The integer that n is 0 ~ 2).

Hydrolysis alkyl aluminum obtained from solution refer to by alkyl aluminum shown in general formula (1) in organic solvent partial hydrolysis from And the solution of the partial hydrolystate containing alkyl aluminum.

As organic solvent, as long as the partial hydrolystate of alkyl aluminum shown in mutual-through type (1), alkyl aluminum is with dissolubility Can, it can be cited for example that electron donating property organic solvent, hydrocarbon compound.As electron donating property organic solvent, it can be cited for example that N- N-methyl-2-2-pyrrolidone N or 1,3- dimethyl-imidazol alkanone, -2 (1H)-pyrimidone of 1,3- dimethyl -3,4,5,6- tetrahydro etc. Cyclic amide, Anaesthetie Ether, tetrahydrofuran, Di Iso Propyl Ether, dioxane, di-n-butyl ether, dioxane ethyl glycol, two The ethers such as alkyl diethylene glycol, dialkyl group triethylene glycol, glycol dimethyl ether, diethylene glycol dimethyl ether, triethylene glycol dimethyl ether system Solvent etc..

In addition, the aliphatic hydrocarbons such as n-hexane, octane, n-decane can be enumerated as hydrocarbon compound；Pentamethylene, hexamethylene, The ester ring type hydrocarbons such as hexahydrotoluene, ethyl cyclohexane；The aromatic hydrocarbons such as benzene,toluene,xylene, isopropylbenzene；Solvent naphtha (mineral Spirit), the hydrocarbon system solvents such as solvent naphtha, kerosene, petroleum ether.

Organic solvent, which can also be used alone, has deliquescent organic solvent to water, and can also be applied in combination has water The deliquescent organic solvent solvent low with the dissolubility to water.Organic solvent can be electron donating property solvent, hydrocarbon compound or Their mixture.

Hydrolysis preferably carries out under the conditions of the molar ratio of the alkyl aluminum relative to general formula (1) is 1.3 below.Addition is greater than In the case where 1.3 water, in the solution for becoming precursor, crystal is precipitated, and the island portion in aluminum oxide article becomes uneven sometimes It is even.

By the step of the dried object of partial hydrolystate of the solution preparation containing alkyl aluminum of the partial hydrolystate containing alkyl aluminum Suddenly it is not particularly limited, can be implemented as follows: for example, by the molten of partial hydrolystate of the substrate surface coating containing alkyl aluminum The method of liquid；The method of immersed substrate in the solution comprising aluminum feedstock；Further there are also analyse from the solution comprising aluminum feedstock Method out forms film, and is dried.Coating method on substrate surface is not particularly limited, and can be used for example Dip coating, spin-coating method, slot coated method, slit rubbing method (ス ロ ッ ト コ ー ト method), stick coating method, rolling method, curtain coating processes, Ink-jet method, silk screen print method, infusion process etc..

Aforementioned dried object is heated in 70 DEG C or more of temperature in the next step, is obtained at least by aluminium atom and oxygen atom structure At aluminum oxide article.Heating device is not particularly limited.In the heating for the dried object being arranged on substrate, it can be used and add Hot plate etc. from the lower part of substrate apply heat device, in addition to this in the case where, electric furnace etc. can be used from aluminum oxide surface Apply the heating device of heat.

Heating is implemented to the aluminum oxide article for obtaining having the structure for meeting above-mentioned (1) ~ (3).

From the viewpoint of obtaining the aluminum oxide article with the structure for meeting above-mentioned (1) ~ (3), heat treatment temperature is set It is 70 DEG C or more, preferably 75 DEG C ~ 800 DEG C of range, further preferably 75 DEG C ~ 700 DEG C of range.It is being lower than 70 DEG C of temperature In the case where degree, crystal structure can not be formed well, if it is greater than 800 DEG C, then crystal state is integrally formed, is become sometimes not The uniform composition of right and wrong crystalline state.As the method for manufacturing aluminum oxide article of the invention, be heat-treated when Between depend on heating temperature, and obtain with meet above-mentioned (1) ~ (3) structure aluminum oxide article range preparation.Example Such as, calcination time is 10 minutes or more preferably at 75 DEG C of calcination temperature, and calcination time is 10 minutes or more at 100 DEG C, In Calcination time is 2 minutes or more at 400 DEG C, thus obtains the aluminum oxide article with the structure for meeting above-mentioned (1) ~ (3).

In the present invention, it is used to form material, shape, size of the substrate of aluminum oxide etc. and is not particularly limited, it can example The organic matters such as the resinousness such as the inorganic matter such as glass, metal, ceramics, plastics substrate, paper, timber are shown and theirs is compound Object.

In the case where the upper covering such as substrate, the thickness from the surface of aluminum oxide to most deep is not particularly limited, can It is selected with the purposes according to covering, preferably 5nm ~ 10 μm, further preferably 10nm ~ 5 μm.

Aluminum oxide of the invention can be used as the packet of the overlay film of Li ion secondary battery active material, food, pharmaceuticals Fill the gas barrier film or the plastic light department of the Chinese Academy of Sciences of purposes or flat-panel monitor, solar energy generating element, organic EL element etc. The hard coat film of part, touch panel etc..

(other)

It can on the depth direction from aluminum oxide article surface towards inner face by X-ray photoelectron spectroscopy (XPS) It is uniform for confirming the structure from aluminium.That is, be can compare island structure " crystallized portion and non-crystallized part " from Aluminum oxide article surface is towards one of the measuring method on the depth direction of inner face being uniform spectroscopy.If true in superelevation To specimen surface X-ray irradiation under sky, then by photoelectricity effect, from surface to true air-launched photoelectron.By observing the light The kinetic energy of electronics can obtain information relevant to the chemical state of its surface state.In this measurement, the light from specimen surface The detection range of electronics is 0.8mm φ, therefore can be obtained on the depth direction from aluminum oxide article surface towards inner face Privileged site equalization information.

It is illustrated for the XPS measuring method in the present invention and according to the analysis method of the structure at the peak XPS.

The aluminium of aluminum oxide article of the invention and the composition of oxygen can be surveyed by X-ray photoelectron spectroscopy (XPS) It is fixed.

Aluminum oxide article is etched by argon ion energy, XPS measurement is repeated, thus, it is possible to obtain from aluminum oxide The combination of article surface towards aluminium and oxygen on the depth direction of inner face can be used as peak information.

In order to determine the measurement site on from the surface of aluminum oxide article towards the depth direction of inner face, can be used logical Cross the method for finding out etching speed and determination.Etching speed (nm/ minutes) can be calculated by formula below.

Etching speed (nm/ minutes)=lost from thickness (nm)/aluminum oxide region total of the substrate of aluminum oxide start of calculation It carves time (minute)

The thickness that the slave substrate of aluminum oxide article is started can be measured by SEM, TEM etc..The total of aluminum oxide article Region until the peak XPS of substrate near can occur in etching period is denoted as the region of aluminum oxide article, using being etched to it The required total time.

By using time and etching speed needed for etching, can determine from the surface of aluminum oxide article towards inner face Depth direction measurement site.

It, can be true by comparing the ratio of the areal intensity at each peak at the peak at the peak of the 2p track of aluminium and the 1s track of oxygen Recognize the variation of the composition of the Al and O at each position in the depth direction from aluminum oxide article surface.The peak area of Al and O is strong The ratio of degree can be calculated by formula below.

The area at the peak of peak area/O 1s track of ratio=Al 2p track of the peak area intensity of Al and O

Further, by comparing the peak of the 2p track of the Al on from aluminum oxide article surface towards the depth direction of inner face, energy Enough confirm the bond styles of aluminium.Bond styles reflect the information of structure.

The 2p track peak of the Al of aluminum oxide article in the present invention is separated into detached peaks 1 and separation and being fitted 2 peaks at peak 2.About this 2 peaks, though it is not known, it is considered that the structure being discussed further below.

The energy position of these detached peaks 1 is about 71.9eV, and the energy position of detached peaks 2 is about 73.0eV.Usual XPS light Compose the correction of energy excursion (energy shift) caused by needing to carry out the electrification because of sample.However, in this measurement, leading to It is measured while crossing argon etching cutting sample, does not obtain the peak energy amount of the element as benchmark, therefore inclined without energy The correction of shifting.On the other hand, the peak the Al2p energy position from Al-O key that the ideal crystal of aluminium oxide has is reported The peak Al2p energy position 72.7eV (the non-patent from Al-Al key that 74.5eV (non-patent literature 2) and metallic aluminium have Document 3).The peak observed in this measurement and the peak energy amount from Al-O, Al-Al key of report are closely located to, it is known that there is tool There is the Al with the key of certain element.The detached peaks 1 of low energy side are main peaks in the XPS spectrum of Al, it is believed that are reflection knots The peak of crystallization part and non-crystallized part.Further, in this measurement, due to not observing the element other than Al, O, C Peak, it may thus be appreciated that the x of AlOx is 0 < x < 1.5 in aluminum oxide article in the present invention.Aluminum oxide article in the present invention In, the x of AlOx is also possible to 0.5 < x < 1.5.The detached peaks 2 of high energy side are it is considered that be derived from Al atom and hydroxyl (OH yl) Bonding peak.About hydroxyl, it is believed that be originated from raw material.

Peak separation, which can be used such as analyzing software OriginPro, to be carried out.Specifically, carrying out the place of baseline first After reason, peak fitting is carried out.As the processing of baseline, the method using constant, the baseline model using XPS can be enumerated The method of (Sherley, Tougaard), it is preferable to use the method for the model of XPS.It, can be with as fitting function in peak fitting Use the general fitting functions such as Gauss function, Lorentz function.

By comparing the detached peaks 1 from each measurement site from aluminum oxide article surface on the depth direction of inner face The ratio of the area of area and detached peaks 2 can define the Al atom from the surface of aluminum oxide on the depth direction of inner face Bond styles.