阅读说明：本技术 宽带任意波长多通道激光源 (Broadband any wavelength multi-channel laser source ) 是由 A.J.齐尔基 P.斯里尼瓦桑 于 2018-06-14 设计创作，主要内容包括：一种多通道激光源,包括：总线波导,其在总线波导的输出端处耦合到多通道激光源的输出；第一半导体光学放大器；第一后镜；在总线波导上具有第一谐振波长的第一波长相关耦合器；第二半导体光学放大器；第二后镜；以及在总线波导上具有不同于第一谐振波长的第二谐振波长的第二波长相关耦合器。在一些实施例中,第一半导体光学放大器由第一波长相关耦合器耦合到总线波导,所述第一波长相关耦合器比第二波长相关耦合器更靠近总线波导的输出端,第二半导体光学放大器由第二波长相关耦合器耦合到总线波导,并且第一波长相关耦合器配置成沿总线波导在第二谐振波长下传输光。(A kind of multi-channel laser source, comprising: bus waveguide is coupled to the output in multi-channel laser source in the output of bus waveguide；First semi-conductor optical amplifier；Mirror after first；With the first wave length standard reference of the first resonance wavelength on bus waveguide；Second semi-conductor optical amplifier；Mirror after second；And there is the second wave length standard reference of the second resonance wavelength different from the first resonance wavelength on bus waveguide.In some embodiments, first semi-conductor optical amplifier is coupled to bus waveguide by first wave length standard reference, the first wave length standard reference is than second wave length standard reference closer to the output end of bus waveguide, second semi-conductor optical amplifier is coupled to bus waveguide by second wave length standard reference, and first wave length standard reference is configured to transmit light under the second resonance wavelength along bus waveguide.)

1. a kind of multi-channel laser source, comprising:

Bus waveguide, the bus waveguide are coupled to the defeated of the multi-channel laser source in the output of the bus waveguide Out；

First semi-conductor optical amplifier；

Mirror after first；

First wave length standard reference with the first resonance wavelength；

Second semi-conductor optical amplifier；

Mirror after second；And

Second wave length standard reference with the second resonance wavelength for being different from first resonance wavelength；

First semi-conductor optical amplifier includes:

The first end of mirror after being coupled to described first, and

Second end,

The first wave length standard reference includes:

Access port, the access port are connected to the second end of first semi-conductor optical amplifier；

Bus output, the bus output are connected to the first part of the bus waveguide；And

Bus input, bus input are connected to the second part of the bus waveguide, and described the second of the bus waveguide Part is located farther from the output end of the bus waveguide than the first part of the bus waveguide；

Second semi-conductor optical amplifier is coupled to the bus waveguide by the second wave length standard reference,

The first wave length standard reference is than the second wave length standard reference closer to the described defeated of the bus waveguide Outlet,

The first wave length standard reference is configured to light under second resonance wavelength from the first wave length correlation coupling The bus input of clutch is transferred to the bus output of the first wave length standard reference.

2. multi-channel laser source according to claim 1, further include the bus waveguide the output it is defeated Coupler out, wherein the first wave length standard reference is configured to light under first resonance wavelength from the first wave The access port of long standard reference is transferred to the bus output of the first wave length standard reference.

3. multi-channel laser source according to claim 1 exists wherein the first wave length standard reference is configured to reflection The access port of the first wave length standard reference is in the first part of received light under first resonance wavelength, And it is configured to receive under first resonance wavelength at the access port of the first wave length standard reference Light second part be transferred to the first wave length standard reference the bus output.

4. multi-channel laser source according to claim 3, wherein the first part be the received light at least 10%, and the second part is at least the 40% of the received light.

5. multi-channel laser source according to claim 1, wherein the first wave length standard reference is configured to described By optical transport received at the access port to the 4th end of the first wave length standard reference under second resonance wavelength Mouthful.

6. multi-channel laser source according to claim 5, wherein the 4th end of the first wave length standard reference Mouth is connected to optical absorber.

7. multi-channel laser source according to claim 1, wherein mirror and first semiconductor optical are put after described first Big device is configured to Reflective Semiconductor Optical amplifier.

8. multi-channel laser source according to claim 1, wherein the first wave length standard reference includes first annular Resonator.

9. multi-channel laser source according to claim 8, wherein the first wave length standard reference further includes the second ring Shape resonator, the first annular resonator and second toroidal cavity resonator are configured as vernier toroidal cavity resonator filter It is operated.

10. multi-channel laser source according to claim 1, wherein the first wave length standard reference includes grating auxiliary Coupler in the same direction.

11. multi-channel laser source according to claim 10, wherein the first wave length standard reference further includes and institute The coupler in the same direction of grating auxiliary is stated with the distributed Bragg reflector of cascade connection.

12. multi-channel laser source according to claim 1, wherein the first wave length standard reference includes for adjusting The wavelength actuator of first resonance wavelength.

13. multi-channel laser source according to claim 1, further include after described first mirror it is related to the first wave length Phase shifter between coupler.

14. multi-channel laser source according to claim 1, further include after described first mirror it is related to the first wave length Amplitude modulator between coupler.

15. multi-channel laser source according to claim 1, wherein first semi-conductor optical amplifier is and described The identical semi-conductor optical amplifier of two semi-conductor optical amplifiers.

16. multi-channel laser source according to claim 1, wherein first semi-conductor optical amplifier includes the first half First wave guide in conductor chip, and second semi-conductor optical amplifier includes in first semiconductor chip Two waveguides.

17. multi-channel laser source according to claim 1, wherein first semi-conductor optical amplifier includes the first half Waveguide in conductor chip, and second semi-conductor optical amplifier includes different from first semiconductor chip Waveguide in two semiconductor chips.

18. multi-channel laser source according to claim 1, further includes:

Wavelength sensor, the wavelength sensor are configured to receive one of the light by first semi-conductor optical amplifier transmitting Partially and it is configured to sense its wavelength；And

Control system, the control system are configured to:

Wavelength sensing signal is received from the wavelength sensor,

The difference between the wavelength sensing signal and wavelength set point is calculated, and

Wavelength calibration signal is applied to wavelength actuator, to reduce between the wavelength sensing signal and the wavelength set point The difference.

19. multi-channel laser source according to claim 18 further includes mirror and the first wave appearance after described first The phase shifter between coupler is closed, wherein the wavelength actuator includes the phase shifter.

20. multi-channel laser source according to claim 18, wherein the first wave length standard reference includes for adjusting The coupler wavelength actuator of whole first resonance wavelength, wherein the wavelength actuator includes the coupler wavelength actuating Device.

21. multi-channel laser source according to claim 18, wherein the wavelength sensor is configured to from the first wave 4th port of long standard reference receives light.

22. multi-channel laser source according to claim 18, wherein the wavelength sensor includes: Mach-Zehnder dry Interferometer has the first arm and the second arm longer than first arm, and is configured to control a part of second arm The temperature temperature control system.

23. multi-channel laser source according to claim 18, in which:

First semi-conductor optical amplifier includes the waveguide in the first semiconductor chip；And

The wavelength sensor includes photodiode, and the photodiode is located in first semiconductor chip.

24. a kind of multi-channel laser source of multiplexing, comprising:

First multi-channel laser according to claim 1 source,

The two the first multi-channel laser source according to claim 1, and

Multiplexer,

The multiplexer includes:

First input,

Second input, and

Output,

The multiplexer is configured to:

Light is transferred to the output from the first input, and

Light is transferred to the output from the second input.

Technical field

One or more aspects according to an embodiment of the present disclosure are related to light source, and relate more specifically to multichannel light Source.

Background technique

The multichannel tunable laser source of silicon integreted phontonics can be used in some systems, have cover it is hundreds of to 1,000 or Any wavelength channel of the span lengths of thousands of nanometers, the span are much larger than single Reflective Semiconductor Optical amplifier (RSOA) The gain bandwidth of tube core or RSOA " chip ".

The single laser cavity for each channel can be used to construct in such laser source, wherein having for example according to beauty State's patent 9,270,078(" 078 patent ") construction each laser, the patent by reference with its entirety be incorporated into this paper In.Such as channel combining unit of optical multiplexer (MUX) or additional toroidal cavity resonator tunable optic filter can be used On the outside of combination of channels to cavity.For be combined and on the outside of laser cavity using MUX may have the disadvantage that (i) by In passband response periodicity and apply smallest passage interval, (ii) introduce wherein channel cannot existing stopband, and (iii) For passage aisle interval (and a large amount of channel), relatively high MUX is caused to be lost.With different designs and be connected to one or Multiple MUX of the channel spacing of multiple additional MUX are combined to the embodiment of a public output with the output by multiple MUX In, optical loss may also can be opposite height.

Toroidal cavity resonator tunable optic filter can be used for be combined on the outside of laser cavity from the light of multiple lasers, But such embodiment further includes other toroidal cavity resonator other than the filter used inside each laser cavity Tunable optic filter.As a result, may include more tuned elements, it is desirable that more stabilizing circuits.In addition, outside is filtered Device wavelength locking can increase the complexity of system to inside laser filter wavelength.

Accordingly, there exist the needs for a kind of improved multi-channel laser source.

Summary of the invention

In accordance with an embodiment of the present disclosure, a kind of multi-channel laser source is provided, comprising: bus waveguide, the bus waveguide It is coupled to the output in the multi-channel laser source in the output of the bus waveguide；First semi-conductor optical amplifier；The Mirror after one；First wave length standard reference with the first resonance wavelength；Second semi-conductor optical amplifier；Mirror after second；With And

Second wave length standard reference with the second resonance wavelength for being different from first resonance wavelength；Described the first half lead Bulk optics amplifier includes: the first end and second end of mirror after being coupled to described first, the first wave length standard reference It include: access port, the access port is connected to the second end of first semi-conductor optical amplifier；Bus is defeated Out, the bus output is connected to the first part of the bus waveguide；And bus input, the bus input are connected to institute State the second part of bus waveguide, the second part of the bus waveguide than the bus waveguide the first part more It is away from the output end of the bus waveguide；Second semi-conductor optical amplifier passes through the second wave length correlation coupling Clutch is coupled to the bus waveguide, and the first wave length standard reference is than the second wave length standard reference closer to institute State the output end of bus waveguide, the first wave length standard reference be configured under second resonance wavelength by light from The bus that the bus input of the first wave length standard reference is transferred to the first wave length standard reference is defeated Out.

In one embodiment, the multi-channel laser source includes the output in the output of the bus waveguide Coupler, wherein the first wave length standard reference is configured to light under first resonance wavelength from the first wave length The access port of standard reference is transferred to the bus output of the first wave length standard reference.

In one embodiment, the first wave length standard reference is configured to reflection in the first wave length correlative coupling The access port of device is in the first part of received light under first resonance wavelength, and being configured to will be described The second part that the access port of one wavelength-dependent coupler device is in received light under first resonance wavelength is transferred to The bus of the first wave length standard reference exports.

In one embodiment, the first part is at least the 10% of the received light, and the second part It is at least the 40% of the received light.

In one embodiment, be configured to will be in institute under second resonance wavelength for the first wave length standard reference Received optical transport is stated at access port to the 4th port of the first wave length standard reference.

In one embodiment, the 4th port of the first wave length standard reference is connected to optical absorber.

In one embodiment, mirror and first semi-conductor optical amplifier are configured to reflective semiconductor after described first Optical amplifier.

In one embodiment, the first wave length standard reference includes first annular resonator.

In one embodiment, the first wave length standard reference further includes the second toroidal cavity resonator, first ring Shape resonator and second toroidal cavity resonator are configured as vernier toroidal cavity resonator filter and are operated.

In one embodiment, the first wave length standard reference includes the coupler in the same direction of grating auxiliary.

In one embodiment, the first wave length standard reference further includes the coupler in the same direction with grating auxiliary With the distributed Bragg reflector of cascade connection.

In one embodiment, the first wave length standard reference includes the wave for adjusting first resonance wavelength Long actuator.

In one embodiment, mirror coupling related to the first wave length after the multi-channel laser source is included in described first Phase shifter between clutch.

In one embodiment, mirror coupling related to the first wave length after the multi-channel laser source is included in described first Amplitude modulator between clutch.

In one embodiment, first semi-conductor optical amplifier is and the second semi-conductor optical amplifier phase Same semi-conductor optical amplifier.

In one embodiment, first semi-conductor optical amplifier includes the first wave in the first semiconductor chip It leads, and second semi-conductor optical amplifier includes the second waveguide in first semiconductor chip.

In one embodiment, first semi-conductor optical amplifier includes the waveguide in the first semiconductor chip, and And second semi-conductor optical amplifier includes the wave in the second semiconductor chip different from first semiconductor chip It leads.

In one embodiment, the multi-channel laser source includes: wavelength sensor, and the wavelength sensor is configured to connect It receives a part of the light emitted by first semi-conductor optical amplifier and is configured to sense its wavelength；And control system System, the control system is configured to: receive wavelength sensing signal from the wavelength sensor, calculate the wavelength sensing signal with Difference between wavelength set point, and wavelength calibration signal is applied to wavelength actuator, to reduce the wavelength sensing signal With the difference between the wavelength set point.

In one embodiment, mirror coupling related to the first wave length after the multi-channel laser source is included in described first Phase shifter between clutch, wherein the wavelength actuator includes the phase shifter.

In one embodiment, the first wave length standard reference includes the coupling for adjusting first resonance wavelength Clutch wavelength actuator, wherein the wavelength actuator includes the coupler wavelength actuator.

In one embodiment, the wavelength sensor is configured to the 4th port from the first wave length standard reference Receive light.

In one embodiment, the wavelength sensor includes: Mach-Zehnder interferometer, has the first arm and ratio Longer second arm of first arm, and be configured to control the temperature control system of the temperature of a part of second arm System.

In one embodiment, first semi-conductor optical amplifier includes the waveguide in the first semiconductor chip；With And the wavelength sensor includes photodiode, the photodiode is located in first semiconductor chip.

In one embodiment, a kind of multi-channel laser source of multiplexing includes: the first multi-channel laser source, the two the One multi-channel laser source and multiplexer, the multiplexer include: the first input, the second input and output, institute Multiplexer is stated to be configured to: by light from first input be transferred to it is described output and by light from second input be transferred to it is described defeated Out.

Detailed description of the invention

Reference book, claims and drawing will appreciate and understand that these and other features and advantages of the present invention, institute It states in attached drawing:

Figure 1A is the schematic diagram of the multi-channel laser device of embodiment according to the present invention；

Figure 1B is the schematic diagram of the spectrum of embodiment according to the present invention；

Fig. 2A is the schematic diagram of the vernier toroidal cavity resonator filter of embodiment according to the present invention；

Fig. 2 B is the schematic diagram of the vernier toroidal cavity resonator filter of embodiment according to the present invention；

Fig. 2 C is the schematic diagram of the vernier toroidal cavity resonator filter of embodiment according to the present invention；

Fig. 3 A is the schematic diagram in the multi-channel laser source of embodiment according to the present invention；

Fig. 3 B is the schematic diagram of the spectrum of embodiment according to the present invention；

Fig. 4 is the schematic diagram in the multi-channel laser source of embodiment according to the present invention；

Fig. 5 is the schematic diagram of the system for wavelength sensing of embodiment according to the present invention；

Fig. 6 is the schematic diagram in the multi-channel laser source of embodiment according to the present invention；

Fig. 7 is the schematic diagram in the multi-channel laser source of embodiment according to the present invention；

Fig. 8 is the schematic diagram in the multi-channel laser source of embodiment according to the present invention；

Fig. 9 A is the schematic diagram of the coupler in the same direction of the adjustable grating auxiliary of the first kind of embodiment according to the present invention；

Fig. 9 B is the schematic diagram of the coupler in the same direction of the adjustable grating auxiliary of the Second Type of embodiment according to the present invention；With And

Fig. 9 C is the schematic diagram of the coupler in the same direction of the adjustable grating auxiliary of the third type of embodiment according to the present invention.

Specific embodiment

The following detailed description of the drawings is intended to showing as the multi-channel laser source provided according to the present invention The description of example property embodiment, and be not intended to indicate wherein construct or utilize only form of the invention.The description combines The embodiment of diagram elaborates feature of the invention.It is to be appreciated, however, that identical or equivalent function and structure can be by not With embodiment realize, be also intended to cover within the spirit and scope of the present invention.As other positions herein refer to , similar element number is intended to refer to similar elements or features.

With reference to Figure 1A, in the first embodiment, multiple RSOA 100 of different band gap and material composition are integrated with structure Make multichannel tunable laser.One or more offer optical gains of each RSOA into multiple laser channelings, it is each to swash Optical channel generates light under corresponding wavelength, and all channels are incorporated into single output waveguide or " bus waveguide " 115.In In the embodiment, for each channel, using single vernier toroidal cavity resonator tunable optic filter set (or referred to as " vernier Toroidal cavity resonator filter "), with inside laser cavity execute gain selection with select generate laser (lasing) wavelength, And the light for generating laser and the light in other channels for entering single bus waveguide 115 are combined, all inner laser cavitys With shared output coupler (or " outgoing mirror ") 120.Each vernier toroidal cavity resonator filter is as wavelength-dependent coupler Device is operated, as discussed in further detail below.One vernier toroidal cavity resonator filter is only needed for each channel, And it can be so that laser cavity be longer for cost addition and desired channel as many.Each RSOA chip can separate Ground manufactures (for example, being made of III-V semiconductor material) and in alignment with (and being joined to) silicon photon chip, the silicon photon core Piece include shown in other optical modules (for example, vernier toroidal cavity resonator filter 110, bus waveguide 115 and output coupler 120).The rear mirror (back mirror) that the reflecting surface of RSOA can be used as laser cavity is operated.In some embodiments In, rear mirror is the element separated with semi-conductor optical amplifier.Figure 1B shows the spectrum that can be generated by the embodiment of Figure 1A Example.4th port of each vernier toroidal cavity resonator filter may be coupled to optical absorber 145(or for wavelength sense Survey), as discussed in further detail below.

With reference to Fig. 2A, in some embodiments, each vernier toroidal cavity resonator filter be include three multiple-mode interfence couplings Four port devices of clutch (MMI) 210A-C, link together with the waveguide of referred to as semi-ring 220A-220D.Each There are four ports for MMI tool, can be referred to as input port 230A, output port 230B, coupling port 230C and isolated port 230D.(i) be transferred to the power of coupling port and the ratio for the power for being (ii) supplied to input port can referred to as couple because Son.If output port 230B is defined as the port opposite with input port 230A, as shown in Figure 2 A, then coupling factor " cross-coupling " can be referred to as, and (i) be transferred to the power of coupling port and be (ii) supplied to the power of input port Ratio can be referred to as " bar shaped couples (bar coupling) " (term used in " 078 patent ").Input port and isolation Port can (for example, in " 078 patent ") be referred to as " rear end " port, and output port and coupling port can (for example, In " 078 patent ") it is referred to as " front end " port.Other of vernier toroidal cavity resonator filter are disclosed in " 078 patent " Example.

Every a pair of optical path that closure is formed using two corresponding MMI in semi-ring, it is humorous can be referred to as annular Vibration device (or be " simple " or " single " resonator, by itself and the differentiation of vernier toroidal cavity resonator filter, the vernier annular Resonator filter may include two or more (coupling) simple annular resonators).Light can be coupled to by MMI In the optical path of the closure or leave the optical path of the closure.For example, for including the first MMI 210A, first and second The first resonator of semi-ring 220A, 220B and the 2nd MMI 210B are propagated on direction (from RSOA to output coupler) Light can enter the input port 230A of the first MMI 210A, and around by first and second semi-ring 220A, 220B and The first ring that first and second MMI 210A, 210B are formed is propagated.Around the ring propagate light it is a part of can be coupled from It opens the first ring and arrives the second ring formed by third and fourth semi-ring 220C, 220D and second and the 3rd MMI 210B, 210C In.For it under the wavelength of multiple that the round-trip phase (round-trip phase) in path of closure is 2 π, can be with It says that the toroidal cavity resonator is in resonance, and is coupled to the light in toroidal cavity resonator and is built with the light recycled in toroidal cavity resonator Property interfere, this causes than for bigger circulating power the case where its lower toroidal cavity resonator is not in the wavelength of resonance.Ring Wavelength (or frequency) between the continuous resonance wavelength of shape resonator distinguishes the Free Spectral Range for being referred to as toroidal cavity resonator (FSR).The second annular resonance formed by third and fourth semi-ring 220C, 220D and second and the 3rd MMI 210B, 210C Device can be operated in a similar way.

As described above, vernier toroidal cavity resonator filter (it includes first annular resonator and the second toroidal cavity resonator) can To serve as wavelength-dependent coupler device, wherein the input port 230A of (for example, for positive traveling light) the first MMI 210A is trip The input port of toroidal cavity resonator filter is marked, and the coupling port 230C of the 3rd MMI 210C is the filter of vernier toroidal cavity resonator The coupling port of wave device.In the case where both its lower first resonator and the second resonator are in the wavelength of resonance, vernier annular is humorous Vibration device filter is in resonance, and the coupling ratio of vernier toroidal cavity resonator filter is high.The filter of vernier toroidal cavity resonator Wave device can be reciprocal device, so that when it is in resonance, from the light of the return of output coupler 120 on bus waveguide 115 RSOA can be coupled back by vernier toroidal cavity resonator filter 110.When the resonance of the first vernier toroidal cavity resonator filter When wavelength is no better than the resonance wavelength of the second vernier toroidal cavity resonator filter, vernier toroidal cavity resonator filter can be two Resonance is under wavelength between a wavelength.When vernier toroidal cavity resonator filter is not in resonance, vernier toroidal cavity resonator The coupling ratio of filter is low.First annular resonator and the second toroidal cavity resonator can have slightly different free light Spectral limit, so that being broadly to separate relatively, and make mark toroidal cavity resonator filter is in the wavelength of resonance downstream The only one wavelength that mark toroidal cavity resonator filter is in resonance downstream is fallen into the gain bandwidth of RSOA.Vernier annular resonance This (relatively wide) differentiation between the continuous resonance wavelength of device filter can be referred to as vernier toroidal cavity resonator filter Free Spectral Range (FSR).The width of the resonance peak of vernier toroidal cavity resonator filter is (for example, coupling ratio above The wave-length coverage that rate is in the 3dB of the maximum coupling ratio in peak value) vernier toroidal cavity resonator filter can be referred to as " bandwidth ", and it can be indicated as unit of wavelength or frequency.In some embodiments, the trip of such as Fig. 2 B can be used Mark the bicyclic vernier toroidal cavity resonator filter of toroidal cavity resonator filter or the vernier toroidal cavity resonator filter of such as Fig. 2 C Embodiment of the tricyclic vernier toroidal cavity resonator filter to replace Figure 1A in (or in Fig. 3 A discussed below, Fig. 4 and Fig. 5 In embodiment) Fig. 2A bicyclic vernier toroidal cavity resonator filter.Can be used phase shifter 135(Figure 1A) tune vernier ring The resonance wavelength of shape resonator filter, for example as shown in Fig. 2 B and Fig. 2 C, the phase shifter 135 may use heating Device, or as example described in " 078 patent ", the phase shifter 135 may use p-n or p-i-n junction.Some In embodiment, each of MMI shown in Fig. 2A -2C has the cross-coupling ratio for being equal to its bar shaped coupling ratio.

Referring again to Figure 1A, multiple vernier toroidal cavity resonator filter 110(of A or vernier resonator is alternative according to fig. 2 Embodiment, such as disclosed in " 078 patent " those) can be used for corresponding multiple RSOA being coupled to bus waveguide, In Its output wideband portions reflecting element serves as the output coupler 120 for all channels.Each RSOA chip 100 can To provide optical gain in corresponding wavelength band.RSOA chip 100 may include different corresponding extensions (" epi ") design or Material system, and there is different corresponding gain spectral central wavelength, jointly across big spectral region.Bandwidth in each band It may be limited by the gain bandwidth of the RSOA chip 100 for the band with the quantity in channel.Each RSOA chip may include The array of RSOA 105, each RSOA 105 is formed as the separation waveguide in RSOA chip 100, and each RSOA 105 is used RSOA chip 100 is that corresponding one in channel provides optical gain.As used herein, " band " or " wavelength band " refers to RSOA chip has the range of the wavelength of considerable gain above.

In some embodiments, each channel includes phase shifter 130(Δ φ) and amplitude modulator 140(Δ T).It can wrap Phase shifter 130 is included can be realized the accurate control for the wavelength for generating laser, and may include amplitude modulator 140 with can Realize the modulation of laser power.The bandwidth and cavity length that the amplitude modulation inside laser cavity can be executed above are at anti- Than.In some embodiments, channel recognition can be used for or for receiver with the amplitude modulation of the rate of several kHz or a few MHz The homodyne at place/heterodyne detection；In some embodiments, due to the length of cavity, the modulation with GHz frequency may be unrealistic 's.

In some embodiments, as the alternative for using amplitude modulator, desired amplitude modulation pattern tune is utilized RSOA biasing processed.This is eliminated for the needs of isolated amplitude modulator inside laser cavity, and which are added losses, and Increase the complexity of RSOA driving circuit.For all channels, the length of laser cavity can be roughly the same, and with adding Add more multichannel, length described in all channels is all increased.It can choose cavity length, so that the wavelength between cavity modes The bandwidth that (Free Spectral Range of cavity) is greater than any vernier toroidal cavity resonator filter is distinguished, so that primary only one kind Mode will generate laser in any channel.For example, the cavity Free Spectral Range of 10 picometers (pm) can be used about The cavity length of 5cm；The cavity length can accommodate 100 channels or more.

For example, outgoing mirror can use 1x2 power divider (power splitter) Lai Shixian, the power divider There is broadband high-reflection device on an output arm, wherein the shunting ratio of 1x2 power divider determines the reflectivity of outgoing mirror, And wherein current divider is realized using broadband MMI or directional coupler, and broadband high-reflection device using metal coating or Sagnac loop is realized.Total spectrum span broadband MMI or coupling as used in outgoing mirror of multi-channel laser device The characteristic of clutch is limited.In some embodiments, Broadband emission mirror utilizes the advanced thin films coating being integrated in output waveguide To realize, or realized using broadband (for example, chirp) the DBR grating being included in output waveguide.

With reference to Fig. 3 A, in a second embodiment, multi-channel laser source includes multiple multi-channel laser devices, each laser utensil There is corresponding bus waveguide.Corresponding wideband portions reflecting element serves as in each multi-channel laser device for multi-channel laser The corresponding output coupler 120 in all channels of device.The output of all multi-channel laser devices is in band multiplexer (MUX) In be combined, to form the output in multi-channel laser source.If being easy available output coupler 120(for example, as in Figure 1A Used in embodiment) bandwidth be not enough to cover desired spectrum span, or if swash constructing multichannel according to Figure 1A Cavity length is too long in the case where light source, then the embodiment of Fig. 3 A can be used.If with MUX being compact, the reality of Fig. 3 A Applying example can be more more compact than the embodiment of Figure 1A.Fig. 3 B shows the example for the spectrum that can be generated by the embodiment of Fig. 3 A.

As used herein, multi-channel laser device refers to the laser with multiple channels, the laser of such as Figure 1A Device, and light can be generated under more than one wavelength simultaneously, at least one element of the channels share is (for example, Figure 1A's is defeated Coupler 120 out).As used herein, multi-channel laser source is to refer to generate light under more than one wavelength simultaneously Light source, and including one or more lasers (shown embodiment in such as Fig. 3 A comprising three multi-channel lasers Device).

Fig. 3 A shows a bus waveguide for each band (that is, for each of RSOA chip 100), but should not Seek this correspondence.Each bus waveguide can be used single RSOA chip 100 as illustrated and collect light from multiple channels, or It can be used more than one different RSOA chips 100 and collects light (for example, the first RSOA can be used in it from multiple channels Chip 100 collects light from one or more channels from one or more channels and using the 2nd RSOA chip 100), Huo Zheduo Each of a bus waveguide can be used single RSOA chip 100 and collect light from the respective subset in multiple channels.

With reference to Fig. 4, if (all using the RSOA material of inhomogeneous broadening in one or more of RSOA chip 100 Such as quantum dot (QD) or quantum scribing line (QDASH) material) replace Quantum Well (QW) heterojunction structure, then 3rd embodiment can be than figure The embodiment of 1A and Fig. 3 A is more compact.The gain material of inhomogeneous broadening can be supported in the single waveguide in RSOA chip 100 The generation laser of multiple modes of (that is, in single RSOA).Between the channel for sharing RSOA in QD or QDASH RSOA chip Wavelength interval can be greater than RSOA material HOMOGENEOUS BROADENING width so that channel will not on significance degree for gain and it is competing It strives.QD or QDASH material may for multi-channel laser source all bands be not easy it is available；Therefore, in RSOA chip 100 It is some this material can be used, and other materials can be used in some other chips.The RSOA chip of inhomogeneous broadening can With then every RSOA(that is, every waveguide in RSOA chip) there is more than one channel.In the fig. 4 embodiment, top RSOA chip (be used for " p " wavelength band) anisotropically widened, and only include a RSOA 105, support simultaneously multiple Channel (wherein three are shown)；Other two RSOA chips 100, which are configured to every RSOA only, has a channel.Fig. 3 B is shown The example for the spectrum that can be generated by the embodiment of Fig. 4.

It will be appreciated that in some embodiments, single toroidal cavity resonator or humorous including more than two annular can be used In vernier toroidal cavity resonator filter 110 of the composite ring resonator of vibration device to replace the embodiment of Figure 1A, Fig. 3 A and Fig. 4 It is one or more.It will be appreciated that although illustrating only three RSOA chips and three bands in Figure 1A, Fig. 3 A and Fig. 4, Multi-channel laser device or multi-channel laser source may include more or fewer RSOA chips and band.

With reference to Fig. 5, in some embodiments, unbalanced Mech-Zehnder interferometer 510 and two photoelectricity can be used Detector 520 senses to execute wavelength.Each of photoelectric detector 520 may include in waveguide or be coupled to waveguide Reverse biased junction, and can be manufactured on the RSOA chip 100 operated with identical wavelength band.Mach-Zehnder is dry Interferometer 510 includes the first MMI 530 for serving as current divider and the 2nd MMI 530 for serving as combiner.In addition to can be than the second arm 550 corresponding part is longer and may cause except the part 560 of length difference between two arms 540,550, Mach- The waveguide of first arm 540 of Zehnder interferometer 510 can be located at the wave of the second arm 550 of Mach-Zehnder interferometer 510 Lead side.The temperature of Mach-Zehnder interferometer 510 can be sensed and control, to reduce Mach-Zehnder interferometer 510 In differential phase change, else if the temperature of Mach-Zehnder interferometer 510 (and therefore, prolong by differential optical path Change late), then the differential phase that may occur in Mach-Zehnder interferometer 510 changes.Fig. 5 is shown with more than two Two channels (rest part is not shown in FIG. 5) in the multi-channel laser source in channel.

It can choose the length of two arms 540,550, so that when the wave by the received light of Mach-Zehnder interferometer 510 When length is expectation wavelength, the corresponding photoelectric current generated by two photoelectric detectors 520 is equal.Therefore, feed circuit can pass through The difference between (for example, using difference amplifier) two photoelectric currents is calculated to form error signal, and error signal can be by Amplify and filters and feed back to one or more elements (or " wavelength actuator ") for adjusting wavelength.Such wavelength Actuator can be a part (and can be referred to as " coupler wavelength actuator ") of wavelength-dependent coupler device, and can be with It is (following on the coupler in the same direction of (for example, in whole) in the one or more of such as semi-ring, adjustable grating auxiliary Be discussed in further detail) and/or distributed Bragg reflector (in further detail below discuss) on phase shifter (for example, plus Hot device or p-i-n junction).In some embodiments, if the Free Spectral Range of the laser cavity in channel is greater than wavelength correlation coupling The resonant bandwidth of clutch can control phase shifter 130 then so that the resonance frequency of laser cavity is maintained at wavelength-dependent coupler In the resonant bandwidth of device.In such embodiments, phase shifter 130 serves as additional wavelength actuator, can fully comply with The central wavelength of wavelength-dependent coupler device, or (or faster) finer than the phase shifter of wavelength-dependent coupler device can be provided Wavelength control.In this way it is possible to control each output wavelength.Each of output wavelength is also possible to tunable, example As by the way that shifted signal is added to the error signal before error signal is amplified and filtered by feed circuit.Mach- Zehnder interferometer 510 can be fed with by a part of the RSOA that be directed to its channel for the measuring wavelength light emitted, For example, it can be with origin from measuring the of the corresponding vernier toroidal cavity resonator filter in channel of (and control) wavelength for it The light of the output port 230B of one MMI 210A is fed, as shown in Figure 5.

Fig. 6 shows the embodiment of multi-channel laser device, the embodiment is similar to the embodiment of Figure 1A, wherein Figure 1A The coupler in the same direction that vernier toroidal cavity resonator filter 110 has utilized the grating of the first kind to assist is (for example, adjustable grating The coupler in the same direction (TGACDC) of auxiliary) it is replaced.These gratings auxiliary coupler in the same direction as wavelength-dependent coupler device into Row operation, as discussed in further detail below.Mode as the embodiment similar to Figure 1A, in the embodiment of Fig. 6 In for each channel use TGACDC with inside laser cavity execute gain selection with select generate laser wavelength, and by The light of the light and other channels that generate laser is combined in single bus waveguide 115, all these tools inside laser cavity There is shared output coupler 120.Figure 1B shows the example for the spectrum that can be generated by the embodiment of Fig. 6.

Fig. 7 and Fig. 8 shows the embodiment in multi-channel laser source, and each multi-channel laser source includes multiple channels, uses TGACDC is as wavelength selectivity output coupler and as combining both the couplers of light generated by multiple channels. Fig. 7 and Fig. 8 uses the TGACDC of second and third type respectively, as discussed in further detail below.

Three kinds of different types of TGACDC: the i) first kind (such as Z.-M. Chuang and L. A. can be used Described in 1993 p. 1071 of Coldren, IEEE JQE 29 (4)), it is designed to Distributed Bragg Reflection Device (DBR) resonance wavelength 100% be transferred to decline T-port (Fig. 9 A, " TGACDC1 "), ii) Second Type, be designed to by DBR resonance wavelength partly reflects back into RSOA(Fig. 9 B, " TGACDC2 "), and resonance wavelength is partly transferred to decline T Port and iii) third compound type, the type is by conventional DBR(such as A. J. Zilkie et al. in " Power- efficient III-V/Silicon external cavity DBR lasers”Opt. Express 20, 23456- Described in 23462 (2012)) combine and form with the TGACDC of the first kind, with formed multiple device (Fig. 9 C, " TGACDC3 "), be also designed to by DBR resonance wavelength (in DBR and in the included TGACDC of the first kind all in The wavelength of resonance) partly reflect back into RSOA, resonance wavelength is partly transferred to next TGACDC of the first kind, and Resonance wavelength (by the TGACDC of the first kind) further 100% is transferred to decline T-port.The compound TGACDC of third type It can qualitatively be operated as the TGACDC of Second Type, and be substituted for the TGACDC of Second Type, to avoid The difficult design constraint being likely to be present in the TGACDC of Second Type.Disresonance (that is, for TGACDC for its be not at it is humorous The wavelength of vibration), every kind in three types TGACDC can be used as two substantially independent parallel waveguides and be operated, wherein It is almost no or no between them to couple (that is, light is almost no or no directly through top waveguide to be coupled to decline wave Lead), and the reflection almost no or no from TGACDC.

In some embodiments, by adding waveguide integrated heater (for example, mixing using waveguide heater or Si to grating Metal on miscellaneous integrated heater, wherein may have undercutting (undercut) so that it is more effective) make all grating DBR Tunable wave length.

As described above, if using TGACDC(Fig. 9 A of the first kind type) (for example, as illustrated in Figure 6), Then each TGACDC executes function identical with a filter in the vernier toroidal cavity resonator filter 110 of Figure 1A, and All laser (under different respective wavelengths) shares outgoing mirror, the outgoing mirror for all lasers be shown in public affairs Outgoing mirror 120 altogether.

With reference to Fig. 7, if using the type of TGACDC 710(Fig. 9 B of Second Type), TGACDC 710 is showed As routine DBR mirror, but go out laser output optical transport to leave bus waveguide.In such a case it is not necessary to public outgoing mirror, Because the outgoing mirror of each wavelength is corresponding TGACDC 710.This also provides following advantages: under each wavelength The cavity length much shorter of corresponding laser, close to traditional single channel DBR, it means that cavity FSR is much bigger, and therefore Each laser can have a much bigger tuning range between mode hop (hop), and the laser that can be added Quantity is unrestricted.However, the suitable TGACDC 710 of the type of Fig. 9 B may be more difficult to design and may have more Design constraint and/or be more difficult to manufacture.Figure 1B shows the example for the spectrum that can be generated by the embodiment of Fig. 7.

The type of TGACDC(Fig. 9 C of third type) be Fig. 9 B type TGACDC Alternate implementations, but because It is separated to serve as DBR and the GACDC functionality of laser mirror, therefore will have not stringent design constraint and/or manufacture difficult. Fig. 8 shows the multi-channel laser source of the TGACDC 810 using third type.In fig. 8, for the sake of simplicity, by third type Each of compound TGACDC 810 be illustrated as simple TGACDC.Figure 1B shows the spectrum that can be generated by the embodiment of Fig. 8 Example.Although the coupler in the same direction that grating assists in the description of some embodiments is referred to as TGACDC(, " adjustable grating is auxiliary The coupler in the same direction helped "), but the coupler in the same direction of grating auxiliary is not tunable in some embodiments.

In each of Fig. 6, Fig. 7 and Fig. 8, wavelength is sent and control can be by that will measure wavelength by be directed to it The a part of light of RSOA transmitting in channel be fed to suitable wavelength sensor to execute (for example, as being referred to described by 5 ), for example, a part of power can be fed to wavelength sensor in " output 1 passes through " port of TGACDC.In In other embodiments, optical absorber is coupled in the port of TGACDC, to prevent parasitic cavity or the light quilt from the port Reflect back into laser cavity or in bus waveguide.

As used herein, " wavelength-dependent coupler device " is the optical device at least three ports, including logical Road port, bus input and bus output, and the reflectivity of the coupling or one or more ports between its middle port takes Certainly in the wavelength for the light for being fed to wavelength-dependent coupler device.It the port of wavelength-dependent coupler device can also be for example humorous in vernier annular It is referred in the above description of vibration device filter and grating auxiliary coupler in the same direction by other titles.In some embodiments (for example, those of Figure 1A and Fig. 6 embodiment), the light that access port is fed under the resonance wavelength of wavelength-dependent coupler device can Be largely transferred to wavelength-dependent coupler device bus output (for example, between 0.1dB and 1.0dB or be less than In the case where the loss of 0.1 dB), and in resonance wavelength (or the if wavelength correlation coupling for being different from wavelength-dependent coupler device Clutch have more than one resonance wavelength, then be different from wavelength-dependent coupler device each resonance wavelength) wavelength under feed The light inputted to bus can be by largely transmission (for example, damage between 0.1dB and 1.0 dB or less than 0.1dB In the case where consumption) to wavelength-dependent coupler device bus export.It is inputted back to the reflectivity of access port and back to bus Reflectivity can be between 10% and 1%, for example, less than 5% or even less than 1%.In other embodiments (for example, Fig. 7 With those of Fig. 8 embodiment), the light that access port is fed under the resonance wavelength of wavelength-dependent coupler device can be by partly Reflection (for example, have reflectivity) between 10% and 50%, and partly transmitted (for example, have 40% and 90% it Between transmission rate) to wavelength-dependent coupler device bus export, and be different from wavelength-dependent coupler device resonance wavelength (or If person's wavelength-dependent coupler device has more than one resonance wavelength, it is different from each resonance wave of wavelength-dependent coupler device It is long) wavelength under be fed to bus input light can largely be transmitted (for example, between 0.1dB and 1.0dB or In the case where loss less than 0.1dB) to wavelength-dependent coupler device bus export.Reflectivity is (i) being different from wavelength correlation The resonance wavelength of coupler (or if wavelength-dependent coupler device has more than one resonance wavelength, is different from wavelength correlation Each resonance wavelength of coupler) wavelength under return to access port, and (ii) back to bus input, Ke Yi Between 10% and 1%, for example, less than 5% or even less than 1%.Wavelength-dependent coupler device can have the 4th port, and described Four ports can (as described above) be connected to optical absorber or may be used as the light generated in the channel one The source of a part, for being used for the wavelength in channel sensing and control system.Two kinds of possible uses of the 4th port are being schemed 6, it is illustrated in Fig. 7 and Fig. 8, wherein the arrow reference at the 4th port of two in wavelength-dependent coupler device is sent to wave The light of tall sensor.In some embodiments, the three dB bandwidth of the resonance characteristic of wavelength-dependent coupler device is in 0.01nm and 1.00nm Between.

As described above, vernier toroidal cavity resonator filter described herein is (for example, the vernier toroidal cavity resonator of Figure 1A Filter) and grating auxiliary coupler in the same direction (for example, TGACDC) be wavelength-dependent coupler device example.For example, in Figure 1A In, access port in each of vernier toroidal cavity resonator filter is upper left port, and bus input is lower-left port, and bus is defeated It is bottom right port out, and the 4th port is upper right port.

Any numberical range enumerated herein is intended to include enumerate in the range of wrap all of the identical numerical precision taken the photograph Subrange.For example, the range of " 1.0 to 10.0 " be intended to include 1.0 cited minimum value and 10.0 cited maximum value it Between (and be included) all subranges, that is, there is the minimum value equal to or more than 1.0, and maximum value is equal to or small In 10.0, such as 2.4 to 7.6.Enumerate herein any greatest measure limitation be intended to include wherein wrap take the photograph it is all compared with Low numerical value limitation, and any minimum value limitation enumerated in this specification is intended to include all high values wherein wrapped and taken the photograph Limitation.

Although having specifically described and having illustrated herein the exemplary embodiment in multi-channel laser source, many modifications and Variation will be apparent to those skilled in the art.It is, therefore, to be understood that constructed according to principles of the present invention Multi-channel laser source can as be different from it is specifically described herein and be carried out.The present invention also in following following claims and its It is defined in equivalent.