阅读说明：本技术 一种激光光束准直的判断方法及采用该方法的剪切干涉仪 (A kind of judgment method that laser beam collimates and the shearing interferometer using this method ) 是由 林亮 郭春雷 于 2018-05-23 设计创作，主要内容包括：本发明涉及光学测量领域,具体涉及一种激光光束准直的判断方法,该方法采用分束立方体形成干涉光斑,并通过调节分束立方体不同入射面的剪切量改变相交的光束相位,并通过干涉光斑是否旋转即可判断光斑的准直或发散,有效的简化了判断流程,其相应的剪切干涉仪也仅通过一个分束立方体调节相应光路,简化了仪器结构,使得对激光光束的准直判断更为简单而直观。(The present invention relates to field of optical measurements, more particularly to a kind of judgment method of laser beam collimation, this method forms interference hot spot using beam-dividing cube, and the shearing displacement by adjusting the beam-dividing cube difference plane of incidence changes the beam phase of intersection, and by interfering whether hot spot rotates i.e. the collimation that can determine whether hot spot or diverging, effectively simplify judgement process, its corresponding shearing interferometer also only adjusts corresponding optical path by a beam-dividing cube, apparatus structure is simplified, so that the collimation judgement to laser beam is more simple and intuitive.)

1. a kind of judgment method of laser beam collimation, which comprises the following steps:

S1. the optical axis of light beam to be measured is directed toward beam-dividing cube, the light beam to be measured is divided and formed by the beam-dividing cube It is transmitted to imaging device after interference, imaging device is made to collect interference hot spot；

S2. first plane of incidence and second plane of incidence for changing the beam-dividing cube are to the shearing displacement of the light beam to be measured；

S3. observe whether interference hot spot described in the imaging device rotates, it is described to be measured if the interference hot spot does not rotate Beam collimation, the beam divergence to be measured if interference hot spot rotation.

2. the method according to claim 1, wherein the step S1 includes:

S11. the light beam to be measured by first plane of incidence and second plane of incidence refraction after be divided into the first incident light and Second incident light；

S12. first incident light and second incident light are respectively directed to opposite two surfaces of beam-splitting surface；Described first enters It penetrates light and is separated into first refractive light and the first reflected light by beam-splitting surface refraction and after reflecting；Second incident light is rolled over by beam-splitting surface Penetrate and be separated into after reflecting the second refraction light and the second reflected light；

S13. the first refractive light and second reflected light refract to imaging device after meeting at the second exit facet；Described One reflected light and the second refraction light refract to imaging device after meeting at the first exit facet.

3. the method according to claim 1, wherein changing the first of the beam-dividing cube in the step S2 The shearing displacement of the plane of incidence and second plane of incidence specifically includes:

S21. it translates the beam-dividing cube in the horizontal direction, changes the light beam to be measured in first plane of incidence and described the Irradiated area on two planes of incidence.

4. according to the method described in claim 2, it is characterized in that, the optical axis and the beam-splitting surface are flat in the step S2 It goes and there is spacing.

5. a kind of shearing interferometer, including beam-dividing cube and the imaging device being connect with the beam-dividing cube optical path, It is characterized in that, further includes the regulation bracket for supporting the beam-dividing cube；The beam-dividing cube include the first right-angle prism and Second right-angle prism；The inclined-plane of the inclined-plane of first right-angle prism and the second right-angle prism is bonded each other constitutes beam-splitting surface；First is straight The common edge on the incidence surface of angle prism and its inclined-plane is that the first side is stupefied, the incidence surface of the second right-angle prism and the common edge on its inclined-plane It is stupefied for second side, first side it is stupefied it is stupefied with described second side intersect constitute wedged gap, the posture of the beam-dividing cube by The regulation bracket control.

6. shearing interferometer according to claim 5, which is characterized in that the regulation bracket include three-dimensional tilt module and Three-dimensional mobile module.

7. shearing interferometer according to claim 6, which is characterized in that first right-angle prism and the second right-angle prism Inclined-plane between be provided with beam splitting coating, the refraction reflectivity of the beam splitting coating is set as 1:1.

8. shearing interferometer according to claim 7, which is characterized in that the incidence surface of first right-angle prism and light out Face is provided with anti-reflection coating；The incidence surface and light-emitting surface of second right-angle prism are provided with anti-reflection coating.

9. shearing interferometer according to claim 8, which is characterized in that further include being arranged in light source and the beam splitting cube Filter between the optical path of body.

10. shearing interferometer according to claim 5, which is characterized in that the imaging device includes ccd imager and shows Show device；The display is electrically connected with the ccd imager and shows interference image thereon.

Technical field

The present invention relates to field of optical measurements, in particular to the judgment method and use of a kind of laser beam collimation The shearing interferometer of this method.

Background technique

Laser interferometer measurement system can carry out complete school to machine and other systems high to position accuracy demand Standard can accurately measure various geometric dimensions and dynamic machine characteristic, have in scientific research and engineering research field and widely answer With.In actual application, due to the collimation deviation between laser beam path and kinematic axis, cause to measure distance and reality There are errors between moving distance, and the collimation angle of deviation between the size and laser beam and kinematic axis of this error is related, usually Referred to as cosine error.When measurement, with the increase of laser stroke, cosine error will be progressively amplified, the standard of laser interferometer Whether straight deviation has significant effect measurement accuracy, quasi- to laser beam in order to reduce collimation deviation bring measurement error Straight judgement is most important to measurement error is reduced.

The collimation for judging sharp beam at present, is mainly the following method: one, using 4 quadrant detector associative operation circuit Detect the offset of laser point, because laser point is also different in the offset that different location measures, this mode needs Repeated multiple times adjusting just can be carried out judgement, and cumbersome and calibration effect is poor；Two, light is measured using PSD real-time detection laser point The drift of spot is displaced, but most of laser interferometer are there is no open second development interface at present, is difficult to obtain the reality of measurement When displacement data simultaneously, also will affect the measurement of intensity, angle, straightness of laser interferencefringes etc. under the non-collimated state of light beam Precision, this method simply cannot be solved these problems directly.

Its judgment step of the judgment method of existing beam collimation is relatively complicated, relevant shear interferometer structure and optical path device Part is also accurate complicated, is difficult intuitive and easy collimate to laser beam and judges.Therefore existing technology Shortcomings.

Summary of the invention

The embodiment of the invention provides the judgment method of beam collimation and shearing interferometers, solve at least naked eyes and directly see The technical issues of surveying and simplifying judgment step and device structure structure.

It is including following in order to solve the above-mentioned technical problems, the present invention provides a kind of judgment method of laser beam collimation Step:

S1. the optical axis of light beam to be measured is directed toward beam-dividing cube, the beam-dividing cube will the light beam to be measured divide and It is transmitted to imaging device after forming interference, imaging device is made to collect interference hot spot；

S2. first plane of incidence and second plane of incidence for changing the beam-dividing cube are to the shearing displacement of the light beam to be measured；

S3. observe whether interference hot spot described in the imaging device rotates, it is described if the interference hot spot does not rotate Beam collimation to be measured, the beam divergence to be measured if interference hot spot rotation.

Preferably, the step S1 includes:

S11. the light beam to be measured is divided into the first incidence after first plane of incidence and second plane of incidence refraction Light and the second incident light；

S12. first incident light and second incident light are respectively directed to opposite two surfaces of beam-splitting surface；Described One incident light is separated into first refractive light and the first reflected light by beam-splitting surface refraction and after reflecting；Second incident light is by beam splitting The second refraction light and the second reflected light are separated into after face refraction and reflection；

S13. the first refractive light and second reflected light refract to imaging device after meeting at the second exit facet；Institute It states after the first reflected light meets at the first exit facet with the second refraction light and refracts to imaging device.

Preferably, change first plane of incidence of the beam-dividing cube and the shearing displacement of second plane of incidence in the step S2 It specifically includes:

S21. the beam-dividing cube is translated in the horizontal direction, changes the light beam to be measured in first plane of incidence and institute State the irradiated area on second plane of incidence.

Preferably, in the step S2, the optical axis is parallel with the beam-splitting surface and has spacing.

To solve the above-mentioned problems, the application also provides a kind of shearing interferometer, including beam-dividing cube and with it is described The imaging device of beam-dividing cube optical path connection, further includes the regulation bracket for supporting the beam-dividing cube；The beam splitting cube Body includes the first right-angle prism and the second right-angle prism；The inclined-plane of the inclined-plane of first right-angle prism and the second right-angle prism pastes each other It closes and constitutes beam-splitting surface；The common edge on the incidence surface of the first right-angle prism and its inclined-plane is that the first side is stupefied, and the second right-angle prism enters The common edge on smooth surface and its inclined-plane is that second side is stupefied, first side it is stupefied with described second side is stupefied intersects composition wedged gap, institute The posture for stating beam-dividing cube is controlled by the regulation bracket.

Preferably, the regulation bracket includes three-dimensional tilt module and three-dimensional mobile module.

Preferably, it is provided with beam splitting coating between first right-angle prism and the inclined-plane of the second right-angle prism, described point The refraction reflectivity of beam coating is set as 1:1.

Preferably, the incidence surface of first right-angle prism and light-emitting surface are provided with anti-reflection coating；Second right angle The incidence surface and light-emitting surface of prism are provided with anti-reflection coating.

It preferably, further include the filter being arranged between light source and the optical path of the beam-dividing cube.

Preferably, the imaging device includes ccd imager and display；The display and ccd imager electricity It connects and shows interference image thereon.

Interference hot spot is formed using beam-dividing cube in embodiments of the present invention, and is entered by adjusting beam-dividing cube difference The shearing displacement for penetrating face changes the beam phase of intersection, and by interfering whether hot spot rotates i.e. the collimation or hair that can determine whether hot spot It dissipating, effectively simplifies judgement process, corresponding shearing interferometer also only adjusts corresponding optical path by a beam-dividing cube, Apparatus structure is simplified, so that the collimation judgement to laser beam is more simple and intuitive.

Detailed description of the invention

The drawings described herein are used to provide a further understanding of the present invention, constitutes part of this application, this hair Bright illustrative embodiments and their description are used to explain the present invention, and are not constituted improper limitations of the present invention.In the accompanying drawings:

Fig. 1 is the main flow schematic block diagram that laser beam of the present invention collimates judgment method；

Fig. 2 is the structural schematic diagram of shearing interferometer of the present invention and the schematic diagram for collimating judgment method；

Fig. 3 is the schematic diagram that beam-dividing cube of the present invention changes wedged gap mode；

Fig. 4 is the idiographic flow schematic diagram of the judgment method of laser beam of the present invention collimation；

Fig. 5 is incident light, emergent light, the optical path difference two dimension table of comparisons for collimating incident ray；

Fig. 6 is incident light, emergent light, the optical path difference two dimension table of comparisons of diverging incident light；

Fig. 7 is collimation incident ray shearing displacement interference comparison diagram different from diverging incident light；

Fig. 7 (a, b) is collimation incident ray difference shearing displacement interference pattern；

Fig. 7 (c, d, e) is the different shearing displacement interference patterns of diverging incident light；

Fig. 8 is optical path length schematic diagram of the beam-dividing cube of the present invention in incident beam height.

Specific embodiment

In order to enable those skilled in the art to better understand the solution of the present invention, below in conjunction in the embodiment of the present invention Attached drawing 1- attached drawing 8, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment Only a part of the embodiments of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, this field is common Technical staff's every other embodiment obtained without making creative work, all should belong to protection of the present invention Range.

It should be noted that description and claims of this specification and term " first " in above-mentioned attached drawing, " Two " etc. be to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should be understood that using in this way Data be interchangeable under appropriate circumstances, so as to the embodiment of the present invention described herein can in addition to illustrating herein or Sequence other than those of description is implemented.In addition, term " includes " and " having " and their any deformation, it is intended that cover Cover it is non-exclusive include, for example, the process, method, system, product or equipment for containing a series of steps or units are not necessarily limited to Step or unit those of is clearly listed, but may include be not clearly listed or for these process, methods, product Or other step or units that equipment is intrinsic.