阅读说明：本技术 基于铝纳米盘阵列结构偏振相关的等离子体彩色滤波器 (Relevant plasma color filter is polarized based on aluminium nanometer plate array structure ) 是由 肖功利 杨寓婷 杨宏艳 张开富 窦碗滢 杨秀华 李海鸥 傅涛 李琦 刘兴鹏 于 2019-09-05 设计创作，主要内容包括：本发明提供的是一种基于铝纳米盘阵列结构偏振相关的等离子体彩色滤波器,属于微纳光电子领域,滤波器包括波导层,缓冲层和金属纳米盘,在波导层1上覆盖有缓冲层2,在缓冲层2上刻蚀有纳米金属盘3,4阵列,金属盘3和4分别组成的行会进行交叉排布。通过改变滤波器周期P,可以达到对覆盖整个可见光谱的光的操纵。本发明可以实现对对覆盖整个可见光谱的光的操纵,且具有偏振相关特性,可以提高微纳集成光学器件在集成光电路中的集成密度,能应用在高分辨率彩色显示中。(The present invention is to provide one kind to polarize relevant plasma color filter based on aluminium nanometer plate array structure, belong to micro-nano optoelectronic areas, filter includes ducting layer, buffer layer and metal nano disk, buffer layer 2 is covered on ducting layer 1, it is etched with 3,4 array of nano metal disk on the buffer layer 2, the guild that metal dish 3 and 4 separately constitutes carries out cross arrangement.By changing filter period P, the manipulation to the light for covering entire visible spectrum can achieve.The present invention may be implemented to the manipulation to the light for covering entire visible spectrum, and have polarization dependent behavior, and integration density of the micro-nano integrated optical device in integrated optical circuit can be improved, can apply in high-resolution color is shown.)

1. the relevant plasma color filter of aluminium nanometer plate array structure polarization, including ducting layer 1 are based on, on ducting layer 1 It is covered with buffer layer 2, is etched with 3,4 array of nano metal disk on the buffer layer 2, the row that metal dish 3 and 4 separately constitutes can be into Row cross arrangement.Ducting layer 1 selects material for Si₃N₄Its thickness H1 is fixed as 100nm, and the material of buffer layer 2 selects MgF₂, It is fixed as 25nm with a thickness of H2,3,4 material of nano metal disk is selected as Al, and thickness H3 is fixed as 20nm, nano metal disk 3 Diameter is D1, and the diameter of nano metal disk 4 is D2, and the relationship between D1 and D2 is fixed as 2*D2=D1, the circle of nano metal disk 3,4 The distance between heart is P, is the period of filter, and the relationship of the diameter D1 and period P of metal dish 3 are fixed as D1/P= 0.6。

2. according to claim 1 polarize relevant plasma color filter based on aluminium nanometer plate array structure, It is characterized in that: being covered with buffer layer 2 on the ducting layer 1；3,4 array of nano metal disk is etched on buffer layer 2.

3. according to claim 1 polarize relevant plasma color filter based on aluminium nanometer plate array structure, Be characterized in that: metal disk array is the row separately constituted by metal dish 3 and 4, carries out cross arrangement and forms.

4. according to claim 1 polarize relevant plasma color filter based on aluminium nanometer plate array structure, Be characterized in that: ducting layer 1 selects material for Si₃N₄, the material of buffer layer 2 selects MgF2, and 3,4 material of nano metal disk is selected as Al.

5. according to claim 1 polarize relevant plasma color filter based on aluminium nanometer plate array structure, Be characterized in that: 1 thickness H1 of ducting layer is fixed as 100nm, and 2 thickness H2 of buffer layer is fixed as 25nm, and 3,4 thickness H3 of nanometer plate is fixed For 20nm.

6. according to claim 1 polarize relevant plasma color filter based on aluminium nanometer plate array structure, Be characterized in that: the relationship between the diameter D1 of nano metal disk 3 and the diameter D2 of nano metal disk 4 is fixed as 2*D2=D1.

7. according to claim 1 polarize relevant plasma color filter based on aluminium nanometer plate array structure, Be characterized in that: the relationship between the diameter D1 and period P of nano metal disk 3 is fixed as D1/P=0.6.

(1) technical field

It is inclined based on aluminium nanometer plate array structure that the present invention relates to micro-nano integrated optical device technical fields, in particular to one kind Shake relevant plasma color filter

(2) background technique

In nature, many animals and plants suffer from beautiful color abundant.They pass through the special micro-structure on its surface Diffraction, reflection and scattering light are to be presented different colors.For example, in beetle, scattering of the color derived from micro-structure on skin；And In butterfly, color is derived from the reflection of wing.Surface plasma structure color is by the phase interaction of metal particle and light With and generate color.Therefore, by the micro-structure of change body surface, it can control the interaction between light and substance, To achieve the purpose that change object color.For example, in Middle Ages, just had by ceramics it is metal nano particle-doped come The technology of chromatic ceramics is prepared, this is application of the structural color in life.The presence of metal nanoparticle makes material in ceramics Material can absorb and scatter specific light wave, so that we can be by visually seeing the different colours on surface.

Recently as the development of micro-nano technology technology and surface plasma body resonant vibration (SPRs) technology, artificial system is utilized The metal micro-nanostructure made becomes the main method for generating schemochrome.Metal micro-nanostructure can be effectively by photon and metal In free electron coupling to allow surface plasmon resonance to absorb the visible light of (or radiation) specific frequency, generate surface etc. From excimer schemochrome.Compared with general chemistry dyestuff, surface phasmon schemochrome schemochrome has environmental protection, easily manufactures, is not easy It fades, the advantages that persistence is good, Color control facilitates.Based on these advantages, surface plasma colored filter is in superelevation point It is had important application in resolution imaging, liquid crystal display systems, cmos digital integrated circuit and light emitting diode.For from excimer The research research emphasis in recent years of schemochrome is transferred to film, on periodic nano-structure, to overcome during conventional color filters The scale and endurance issues encountered.L.J.Guo team devises a kind of optical filtering based on silver nanoparticle coupled wave of grating guide structure Element covers entire visible-range by changing the period of Ag grating.Li et al. people proposes one based on MIM (Ag/ SiO₂/ Ag) structure reflection-type phasmon color super surface, reflection can be changed by changing the thickness of insulator layer Color.

This paper presents a kind of transmission type color filters being made of Al nanometer plate group pattern, buffer layer and waveguide.Institute The filter of proposition passes through surface plasma Bull polaron (SPP) mould, the mixing of local Fabry-Perot resonance and waveguide mode Act on work.By controlling size, the arrangement mode of nanometer dish structure, the period be may be implemented to the entire visible spectrum of covering The manipulation of light.It has highly transmissive, and transmissivity reaches 80% or more, in addition to this, the filter there are also Polarization-Sensitive characteristic, In terms of can be applied to colored display and integrated optoelectronic device.

(3) summary of the invention

The present invention provides one kind and polarizes relevant plasma color filter based on aluminium nanometer plate array structure, passes through control Size, the geometry of plasmon nanostructure processed can achieve the manipulation to the light for covering entire visible spectrum, simultaneously should Filter can reach high color rate and possess Polarization-Sensitive characteristic.

The object of the present invention is achieved like this:

One kind polarizing relevant plasma color optical filtering wave device, including Si based on aluminium nanometer plate array structure₃N₄Waveguide Layer, MgF₂Buffer layer and Al nanometer plate, in Si₃N₄There is MgF on ducting layer₂Buffer layer is etched with Al nanometers of metal on buffer layer Disk.Si₃N₄The thickness H1 of waveguide is fixed as 100nm, MgF₂Thickness H2 fixes 25nm, and the thickness H3 of Al disk is fixed as 20nm, and P is The period of Al disk, D1 are the diameter of big metal dish, and D2 is the diameter of small metal dish, and fixed Al metal dish duty ratio is 0.6.At this In, P, the relationship between D1 and D2 is as follows: 2*D2=D1,3*D2=P.

The study found that this structure is compared to other nanometer plate chromatic filters, there is high-transmission rate, by adjusting nanometer The period of disk can be realized the manipulation to the light for covering entire visible spectrum.Compared to other metal nano disk chromatic filters, For Al nanometer plate chromatic filter while having high-transmission rate and good quality factor, Al is relatively more universal, have compared with Low interband transition loss, and it is also more cheap in price, oxidation resistance is more preferable, and application range is wider in practical applications.

(4) Detailed description of the invention

Fig. 1 (a) is the polarization correlation plasma colorful filter structure schematic diagram of different sized nanostructures disk array structures, figure 1 (b) is the structural schematic diagram in the direction colored filter YZ, and Fig. 1 (c) is the structural schematic diagram in the direction colored filter XZ.

Fig. 2 is transmission spectrum of the period P from 180nm~303nm.

Fig. 3 is the fixed cycle when being 240nm, transmission spectrum when H1 is from 80nm~120nm.

Fig. 4 is the fixed cycle when being 240nm, transmission spectrum when H2 is from 0nm~50nm.

Fig. 5 is the fixed cycle when being 240nm, the transmission spectrum when angle of polarization is from 0 °~90 °.

(5) specific embodiment

It illustrates with reference to the accompanying drawing and the present invention is described in more detail:

Referring to Fig.1, a kind of that relevant plasma color filter, including waveguide are polarized based on aluminium nanometer plate array structure (waveguide layer material is Si to layer₃N₄) 1, buffer layer (cushioning layer material MgF₂) 2, in MgF₂There are two types of different for etching on buffer layer 2 The metal dish (metal disk material is Al) 3,4 of size.

Wherein the thickness degree of ducting layer be H1, buffer layer with a thickness of H2, the metal disc thickness of two kinds of sizes is all H3, gold The category disk period is P, and metal disk diameter is respectively D1 and D2, fixes 2*D2=D1, D1/P=0.6, H1=100nm, H2=25m, H3=20nm.

Numerical simulation is carried out to structure using Three-dimensional Time Domain finite difference (FDTD) method, FDTD boundary condition is set as, in z Positive negative direction is set as perfect domination set (PML), and x and the positive negative direction of y are set as periodic boundary condition, x, y, in the positive negative direction of z Grid precision be arranged to 5nm*5nm.Transmission coefficient t is defined as, and wherein Pin and Pout is input respectively to T=Pout/Pin With the power of output port.

Metal dish material selection aluminium is because metallic aluminium is in life compared to minimum metallic silver is lost in the visible spectrum More common in work, price is more cheap, has lower interband transition loss, and has more preferable anti-oxidant erosion-resisting ability.

Fig. 2 is the polarization correlation plasma colored filter of different sized nanostructures disk array structures, is changing nanometer plate battle array Arrange the transmission spectrum in period.Fixed Si₃N₄Ducting layer 100nm, MgF₂Buffer layer 25nm, selection cycle p are 180nm~303nm, when It is blue at p=180nm when period p is 180nm, 240nm and 303nm, is green at p=240nm, is red at p=303nm Color.In these three spectrum, the transmitance (wavelength at highest transmitance) of resonant wavelength is greater than 80%, this shows filter Efficiency is very high, while also ensuring filter effect.In addition, we can also obtain, with the increase in period, pop understands red shift Conclusion.

In order to study influence of the H1 to transmission peaks, such as Fig. 3 chooses transmission spectrum when H1 changes from 80nm~120nm, with L increase transmission spectrum generate red shift,.On this basis, the peak value of transmission peaks is also stepped up, but is more than 100nm in H1 Later, transmission peak value increase is not obvious.

In order to study influence of the H2 to transmission peaks, the transmission spectrum when H2 changes from 0nm~50nm is found, such as Fig. 4 institute Show, can be clearly visible as the peak value of the increase transmission spectrum of H2 obviously increases, in addition to this full width at half maximum (FWHM) (FWHM) of transmission spectrum Obviously reduce as H2 increases, that is, is to illustrate that the quality factor of filter can be significantly improved by increasing H2.

Fixed P=240nm, H1=100nm, H2=25nm, H3=20nm study influence of the angle of polarization to transmission peaks, choosing Take the angle of polarization by 0 °~90 °, as shown in figure 5, wave crest gradually decreases with the increase of the angle of polarization, so as to illustrate colored filter Wave device is Polarization-Sensitive.

Chromatic filter structure of the invention can achieve the manipulation to the light for covering entire visible spectrum, and only need to lead to Spending the change period can be achieved with.Filter of the invention can reach 80% or more transmissivity, and to Polarization-Sensitive, thickness also pole It is small, can be shown in high-resolution color and integrated optoelectronic device in terms of play very big effect.

The preferred embodiment of the present invention has been described in detail above, but the present invention is not limited to embodiment, Those skilled in the art can also make various equivalent modifications on the premise of not violating the inventive spirit of the present invention Or replacement, these equivalent variation or replacement are all contained in scope of the present application.