阅读说明：本技术 电连接装置 (Arrangements of electric connection ) 是由 林崎孝幸 成田寿男 于 2018-04-03 设计创作，主要内容包括：本发明提供一种电连接装置,该电连接装置包括：探针(10)；以及探针头(20),其具有由探针(10)贯穿的顶部(21)、配置于比顶部(21)靠端头部侧的位置且由探针(10)贯穿的底部(23)、以及配置于顶部(21)与底部(23)之间且由探针(10)贯穿的上部引导部(24)和下部引导部(25),探针(10)被以在顶部(21)与底部(23)之间弯曲的状态保持,通过端头部与被检查体(2)相接触,从而探针(10)发生压曲,至少探针(10)发生压曲的状态下的探针(10)的自贯穿底部(23)的部分起到贯穿下部引导部(25)的部分为止的连续的部分是刚性比探针(10)的发生压曲的部分的刚性高的高刚性部分(101)。(The present invention provides a kind of arrangements of electric connection, which includes: probe (10)；And probe (20), it has by probe (10) perforative top (21), it is configured at than top (21) by the position of end head side and by the perforative bottom (23) of probe (10), and it is configured between top (21) and bottom (23) and by probe (10) perforative upper guide portion (24) and lower guide (25), probe (10) is by with state curved between top (21) and bottom (23) holding, it is in contact by end head with inspected body (2), to which probe (10) buckle, playing until the part of lower guide (25) from the part through bottom (23) for probe (10) in the state that at least probe (10) is buckled is partially continuously portion that rigidity is buckled than probe (10) The high high rigidity part (101) of the rigidity divided.)

1. a kind of arrangements of electric connection is used in the measurement of the electrical characteristics of inspected body, which is characterized in that

The arrangements of electric connection includes:

Probe, in measurement, the end head of the probe is in contact with the inspected body；And

Probe has by the perforative top of the probe, is configured at than the top by the position of end head side and by institute It states the perforative bottom of probe and is configured between the top and the bottom and by the perforative guide portion of the probe,

The probe is kept with state curved between the top and the bottom,

It is in contact by the end head with the inspected body, so that the probe is buckled,

Playing from the part through the bottom for the probe in the state that at least described probe is buckled runs through described Until the part of guide portion is partially continuously the rigidity high rigidity higher than the rigidity for the part that the probe is buckled Part.

2. arrangements of electric connection according to claim 1, which is characterized in that

The diameter of the high rigidity part of the probe is greater than the diameter of the part buckled.

3. arrangements of electric connection according to claim 1, which is characterized in that

With high hardness material of the high rigidity part of the probe by hardness than the part buckled coats.

4. arrangements of electric connection according to claim 1, which is characterized in that

The probe have between the top and the bottom it is multiple by the perforative guide portion of probe,

The part of adjacent with bottom guide portion in the multiple guide portion is played from the part through the bottom Until continuously be partially the probe the high rigidity part.

Technical field

The present invention relates to a kind of arrangements of electric connections used in the measurement of the electrical characteristics of inspected body.

Background technique

In order to use tool not measuring in the state of wafer separate to the electrical characteristics of the inspected bodys such as integrated circuit There is the arrangements of electric connection for the probe being in contact with inspected body.In arrangements of electric connection, use will keep the probe of probe to pacify Structure etc. loaded on electrode base board is configured with the electrode pad being electrically connected with probe in the electrode base board.

Probe is for example kept with the state for being applied in the guide hole that probe is arranged.At this point, by will be along probe The position of two guide holes of axial arrangement configures with being staggered, so that probe is held in the inside of probe with being inclined by.Pass through The structure, when making multiple probes be contacted with inspected body, these probes are buckled to the same direction, are able to suppress adjacent probe It contacts with each other (referring for example to patent document 1.).

Summary of the invention

Problems to be solved by the invention

However, by drawing probe between the state for being contacted with inspected body and the state for not being contacted with inspected body The internal slide of guide hole, so that the side of probe rubs in the opening portion of guide hole.It is damaged as a result, generating probe The problem of.

In view of the above problems, the object of the present invention is to provide a kind of probes that is able to suppress in the guidance for being set to probe The arrangements of electric connection of the damage of caused probe is slided in hole.

The solution to the problem

Using a technical solution of the invention, a kind of arrangements of electric connection is provided comprising: probe, in measurement, the probe End head be in contact with inspected body；And probe, have by the perforative top of probe, be configured at than top by end It the position of portion side and by the perforative bottom of probe and is configured between top and bottom and by the perforative guide portion of probe, visits Needle is in contact by end head with inspected body by with state curved between top and bottom holding, so that probe occurs It buckles, the probe in the state that at least probe is buckled plays until the part of guide portion from the part through bottom Be partially continuously the part that rigidity is buckled than probe the high high rigidity part of rigidity.

The effect of invention

Probe can be inhibited to slide caused spy in the guide hole for being set to probe according to the present invention, it is possible to provide a kind of The arrangements of electric connection of the damage of needle.

Detailed description of the invention

Fig. 1 is the schematic diagram for indicating the structure of arrangements of electric connection of the 1st embodiment of the invention.

Fig. 2 is the schematic diagram for indicating the structure of the probe of arrangements of electric connection of the 1st embodiment of the invention, Fig. 2's (a) indicate that contactless state, (b) of Fig. 2 indicate contact condition.

Fig. 3 is the schematic diagram for indicating the structure of the probe of arrangements of electric connection of comparative example.

Fig. 4 is the schematic diagram for indicating the structure of the probe of arrangements of electric connection of another comparative example.

Fig. 5 is the schematic diagram for indicating the structure of the probe of arrangements of electric connection of the 2nd embodiment of the invention.

Fig. 6 is the schematic diagram for indicating the structure of arrangements of electric connection of other embodiments of the invention.

Specific embodiment

Next, being described with reference to embodiments of the present invention.In the record of attached drawing below, for identical or class As partially mark same or similar appended drawing reference.It is to be noted, however, that attached drawing is schematical, the thickness of each section Ratio etc. it is different from reality.In addition, certainly including the different portion of relationship, the ratio of mutual size among the attached drawings Point.Embodiment as shown below is illustrated to the device for embodying technical thought of the invention, method Embodiment, in embodiments of the present invention, not by the material of component parts, shape, construction, configuration etc. specifically for following Content.

(the 1st embodiment)

The arrangements of electric connection 1 of 1st embodiment of the invention shown in FIG. 1 is used in the electrical characteristics of inspected body 2 In measurement.Arrangements of electric connection 1 includes: probe 10；And probe 20, have by the perforative top 21 of probe 10 and is configured at Than top 21 by the position of end head side and by the perforative bottom 23 of probe 10.Probe 20 has upper guide portion 24 and lower part Guide portion 25, the upper guide portion 24 and the configuration of lower guide 25 run through between top 21 and bottom 23 and by probe 10.

Outer edge area in order to constitute hollow region 200 between the top of probe 20 21 and bottom 23, at top 21 Spacer 22 is configured between the outer edge area of bottom 23.Match in the side close to top 21 of the inside of hollow region 200 It is equipped with the upper guide portion 24 of plate.In addition, being guided in the side close to bottom 23 of the inside of hollow region 200 with top Portion 24 is configured with the lower guide 25 of plate in parallel.As probe 20, ceramic material, polyimide synthetic resin are used Material etc..

For the probe 10 that end head is in contact with inspected body 2 when measuring inspected body 2, bottom is sequentially passed through 23, lower guide 25, upper guide portion 24 and top 21.The guide hole of illustration omitted is respectively formed in bottom in Fig. 1 23, lower guide 25, each portion of upper guide portion 24 and top 21 by the perforative part of probe 10.

In terms of the face normal direction of the main surface of bottom 23, the position of the guide hole at the top 21 that same probe 10 is passed through (hereinafter referred to as " bias configuration " is configured with being staggered in a manner of with major surfaces in parallel with the position of the guide hole of bottom 23.).In In example shown in FIG. 1, the guide hole of bottom 23 by relative to the guide hole at top 21 to matching in a manner of being staggered on the left of paper It sets.By bias configuration, probe 10 is kept with being inclined by the inside of hollow region 200, and probe 10 is curved because of flexible deformation It is bent.

On the other hand, when overlooking main surface, the guide hole of the position and upper guide portion 24 of the guide hole at top 21 Position is substantially uniform.In addition, the position of the guide hole of the guide hole and lower guide 25 of bottom 23 is big when overlooking main surface It causes consistent.As shown in Figure 1, probe 10 is bent between upper guide portion 24 and lower guide 25.

Arrangements of electric connection 1 further includes electrode base board 30, is configured in the electrode base board 30 and is electrically connected with the base end part of probe 10 The electrode pad 31 connect.The upper surface opposite with electrode base board 30 cardinal extremity outstanding at the top of probe 20 21 of probe 10 The electrode pad 31 of portion's lower surface configuration opposite with the same probe 20 in electrode base board 30 is connected.

The electrode pad 31 of electrode base board 30 is by being configured at the electrode wiring (illustration omitted) of the inside of electrode base board 30 And it is electrically connected with the connection pad 32 for the upper surface for being configured at electrode base board 30.Connect the IC testing machine of pad 32 and illustration omitted Etc. check devices electrical connection.Scheduled voltage, electric current are applied to inspected body 2 via probe 10 using check device.Also, from The signal that inspected body 2 exports is conveyed via probe 10 to check device, to check the characteristic of inspected body 2.

Arrangements of electric connection 1 shown in FIG. 1 is vertically-acting formula probe card.Probe 10 under the bottom of probe 20 23 With pad, (Japanese: inspection Check is used in the inspection of the inspected body 2 of the lower section of arrangements of electric connection 1 for the end head of surface exposure and configuration パ ッ De) (illustration omitted) be in contact.In fig. 1 it is illustrated that the state that probe 10 is not contacted with inspected body 2.Such as make equipped with The chuck 3 of inspected body 2 rises, so that the end head of probe 10 is contacted with inspected body 2.

When the end head of probe 10 after base end part is connected with electrode pad 31 is in contact with inspected body 2, probe 10 buckle in hollow region 200.That is, probe 10 is because of bending deformation between upper guide portion 24 and lower guide 25 Shape and be bent to a greater degree.

By by the guide hole bias configuration of the guide hole at top 21 and bottom 23, so that multiple probes 10 are in hollow region With identical shape to same direction flexible deformation in 200.At this point, since probe 10 is held in 24 He of upper guide portion respectively Lower guide 25, therefore can prevent adjacent probe 10 from contacting with each other in hollow region 200.

As described above, by making probe 10 from probe 10 not in contact with the bending under the contactless state of inspected body 2 Shape distortion is that probe 10 is contacted with the further curved shape in the state of inspected body 2, to be made with predetermined pressure Probe 10 is contacted with inspected body 2.Thereby, it is possible to use probe 10 to measure the electrical characteristics of inspected body 2.It is tested measuring After the electrical characteristics of physical examination 2, decline the chuck 3 equipped with inspected body 2, thus probe 10 and inspected body 2 become non-and connect Touching state.

Probe 10 has to be restored extremely to contact it with inspected body 2 in the case where probe 10 and inspected body 2 become contactless state The elasticity of preceding shape.As the material of probe 10, tungsten (W) etc. is used.Alternatively, the material of probe 10 is able to use copper (Cu) conjunction Gold, palladium (Pd) alloy, nickel (Ni) alloy, W alloy etc..

In arrangements of electric connection 1, at least probe 10 buckle in the state of the portion through bottom 23 from probe 10 The rigidity for point playing the continuous part until the part of lower guide 25 of probe 10 is pressed higher than probe 10 The rigidity of bent part.In Fig. 1, the rigidity part higher than the rigidity for the part that probe 10 is buckled is shown as " Gao Gang Property part 101 ".High rigidity part 101 shown in FIG. 1 is the part of the part buckled than probe 10 close to bottom 23. Draw that is, playing adjacent with bottom 23 lower part in upper guide portion 24 and lower guide 25 from the part through bottom 23 Until leading the part in portion 25 is partially continuously the high rigidity part 101 of probe 10.

Either in the state that probe 10 is buckled still in the state that probe 10 is not buckled, high rigidity portion Dividing 101 is that the part of the guide hole across lower guide 25 is played in the part from the guide hole for passing through bottom 23 of probe 10 Until continuous part.Illustrate the example of high rigidity part 101 referring to (a) of Fig. 2 and (b) of Fig. 2.(a) of Fig. 2 is shown State of the probe 10 not in contact with the probe 10 under the contactless state of inspected body 2.Arrow shown in (a) of Fig. 2 is shown certainly The glide direction of probe 10 when contact condition changes to contactless state.(b) of Fig. 2 shows probe 10 and is contacted with inspected body The state of probe 10 in the state of 2.Arrow shown in (b) of Fig. 2 is shown when changing from contactless state to contact condition The glide direction of probe 10.

Either under contactless state or under contact condition, 230 phase of guide hole certainly with bottom 23 of probe 10 Pair part play the part opposite with the guide hole 250 of lower guide 25 until high rigidity part 101 the equal shape of diameter Diameter as the other parts for being greater than the part buckled comprising probe 10.Therefore, such as (b) of (a) of Fig. 2 and Fig. 2 Shown, in the region until the lower surface that lower guide 25 is played in the upper surface from bottom 23, probe 10 is not bent, and is Rectilinear form.Thereby, it is possible to prevent the opening portion point contact of the guide hole 250 of probe 10 and lower guide 25.

In contrast, not probe 10 be arranged high rigidity part 101 in the case where, as shown in figure 3, probe 10 is pressed Song, thus probe 10 the inside of the guide hole 250 of lower guide 25 relative to guide hole 250 centerline dip it is sliding It is dynamic.Therefore, the opening portion point contact of probe 10 and guide hole 250.In Fig. 3, the sliding side of probe 10 is indicated using arrow To the contact site being in contact with probe 10 for showing lower guide 25 in a manner of being surrounded with the circle of dotted line is (following It is identical.).In comparative example shown in Fig. 3, due to the opening portion point contact of probe 10 and guide hole 250, it can visit Abrasion, decortication (Japanese: the stripping Ga れ) equivalent damage on surface are generated on needle 10.

In addition, the damage of probe 10 caused by 25 point contact of probe 10 and lower guide in order to prevent, as shown in Figure 4 Comparative example it is such, consideration coats the contact site of probe 10 contacted with lower guide 25 with hard metal film 10A Countermeasure.But even if only improve probe 10 the contact site contacted with lower guide 25 rigidity, probe 10 still relative to The centerline dip of guide hole 250 guide hole 250 internal slide.Thus, the opening portion point of probe 10 and guide hole 250 It contacts this point not change, generates the abrasion of hard metal film 10A in contact site.Thus, in comparative example shown in Fig. 4, It can not fundamentally solve the problems, such as that probe 10 is damaged.

In contrast, in arrangements of electric connection 1, make the internal slide of the guide hole 230 of the comfortable bottom 23 of probe 10 The part that part is played until the part of the internal slide of the guide hole 250 of lower guide 25 is continuously high rigidity part 101.Therefore, the center line of probe 10 and the guide hole 250 of lower guide 25 is sliding in the inside of guide hole 250 substantially in parallel It is dynamic.Thus, probe 10 will not be with the opening portion point contact of guide hole 250.As a result, it is possible to inhibit probe 10 because with guide hole Damage caused by abrasion occurs for 250 opening portion.

Moreover it is preferred that the outer diameter of the high rigidity part 101 of probe 10 can be in guide hole 250 in probe 10 The degree that portion is swimmingly slided is slightly thinner than the internal diameter of guide hole 250.The outer diameter of high rigidity part 101 and the internal diameter of guide hole 250 Between difference it is smaller, probe 10 more the inside of guide hole 250 become rectilinear form.Therefore, even if being visited when probe 10 slides Needle 10 is contacted with guide hole 250, and the side of probe 10 will not be with the opening portion point contact of guide hole 250, but and guide hole 250 inner wall plane-plane contact.Thus, it is possible to inhibit the damage of probe 10.

For example, the outer diameter in the part that probe 10 is buckled is 30 ± 2 μm and the outer diameter of high rigidity part 101 is 37 In the case where ± 2 μm or so, make 47 ± 2 μm of internal diameter of guide hole 250 or so.

The part and high rigidity part 101 buckled for probe 10, to make probe 10 be contacted with inspected body 2 In the case where the part buckled generate flexure but high rigidity part 101 does not generate the degree of flexure rigid difference is arranged. As a result, at the time of contact probe 10 can be contacted with inspected body 2 in the predetermined pressure generated due to probe 10 is buckled, and It can be improved the wear resistance of probe 10.

As described above, in the arrangements of electric connection 1 of the 1st embodiment of the invention, at least probe 10 is pressed Probe 10 in the state of song plays the part until the part of lower guide 25 from the part for passing through bottom 23 and is Continuous high rigidity part 101.Therefore, probe 10 is carried out in the inside of the guide hole 250 of lower guide 25 with rectilinear form Sliding.Thereby, it is possible to prevent the opening portion point contact of probe 10 Yu guide hole 250.Thus, using the tipping shown in FIG. 1 that is electrically connected 1 is set, the damage that probe 10 slides caused probe 10 in the guide hole for being set to probe 20 is able to suppress.

(the 2nd embodiment)

As shown in figure 5, the arrangements of electric connection 1 of the 2nd embodiment of the invention is configured to, pressed using as hardness ratio The hard films 11 of the material with high hardness of bent part coat the high rigidity part 101 of probe 10.That is, higher using hardness Hard films 11 continuously coat the playing from the part through bottom 23 and be through the part of lower guide 25 of probe 10 Part only is different from the 1st embodiment on this aspect of wear resistance to improve.Other structures and the 1st embodiment shown in FIG. 1 It is identical.

Using arrangements of electric connection 1 shown in fig. 5, the high rigidity part 101 of probe 10 coated by hard films 11 is straight line Shape.Therefore, the opening portion point contact of the guide hole 250 of probe 10 and lower guide 25 can be prevented.

It, can also be in addition, the material of hard films 11 of the high rigidity part 101 of cladding probe 10 can be conductive material It is non-conductive material.For example, hard films 11 can also use glass, pottery other than hard films 11 are using hard metal film Ceramic material etc..Alternatively, can use DLC coating etc. also to constitute high rigidity part 101.

In addition, by coating high rigidity part 101 using hard films 11, thus the high rigidity part 101 of probe 10 Diameter becomes larger.At this point, the difference of the internal diameter of the outer diameter and guide hole 250 of high rigidity part 101 is the smaller the better.Even if probe as a result, 10 contact in the internal slide of guide hole 250 with lower guide 25, the side of the probe 10 also inner wall with guide hole 250 Face contact.

As described above, using the arrangements of electric connection 1 of the 2nd embodiment of the invention, it is able to suppress probe 10 The damage of caused probe 10 is slided in the guide hole for being set to probe 20.In addition to this, the 2nd embodiment and the 1st reality It is substantially the same to apply mode, omits duplicate record.

(other embodiments)

As described above, the present invention is recorded by embodiment, but should not be construed, and constitutes the one of the disclosure Partial discussion and attached drawing limit the present invention.According to the disclosure, those skilled in the art can specify various instead of embodiment party Formula, embodiment and application technology.

For example, as shown in fig. 6, in order to make the interval for the electrode pad 31 for being configured at electrode base board 30 than the cardinal extremity of probe 10 The interval in portion is big, can also between probe 20 and electrode base board 30 configuration space converter 40.Space convertor 40 has The connecting wiring 41 of the 2nd main surface 402 is extended through from the 1st main surface 401 relative to each other.One terminal arrangement of connecting wiring 41 It is connected in the 1st interarea 401, and with the base end part of probe 10.The another terminal of connecting wiring 41 is configured at the 2nd interarea 402, and It is electrically connected with the electrode pad 31 of electrode base board 30.Connecting wiring 41 is for example connected by conductive pins 50 with electrode pad 31 It connects.

By using space convertor 40, thus between the interval of the electrode pad 31 of electrode base board 30, connection pad 32 Every becoming larger, the layout etc. of the electrode wiring of the inside of electrode base board 30 is become easy.In addition, by electrode base board 30 and check device The process connected becomes easy.

In this way, the present invention includes the various embodiments etc. that do not record herein certainly.

Industrial availability

The arrangements of electric connection of present embodiment can be applied in the field of the feature measurement of inspected body.