阅读说明：本技术 一种半导体清洗后的废气酸碱中和处理装置 (Waste gas acid-base neutralization treatment device after semiconductor cleaning ) 是由 华斌 李文轩 于 2021-10-15 设计创作，主要内容包括：本发明公开了一种半导体清洗后的废气酸碱中和处理装置,用以对半导体清洗后挥发的废气进行处理；包括外壳体,上方安装有储放箱,且所述储放箱的上侧连接有输料口；排气通道,安装在所述外壳体的左侧,且所述外壳体和所述排气通道的连接处开设有通孔,并且所述通孔位于所述外壳体和所述排气通道连接处的下方；出风口,连通在所述排气通道的左上方,且所述排气通道的左下方连通有排液口。该半导体清洗后的废气酸碱中和处理装置,只需要一个驱动源便可控制内筒围绕主管转动,节能型高,便捷性高,且可同步的驱动转杆控制外侧安装的搅拌叶转动,对内筒内的废气和中和药剂进行翻转混合,使得废气和中和药剂充分接触,加快中和效率。(The invention discloses a waste gas acid-base neutralization treatment device after semiconductor cleaning, which is used for treating the volatilized waste gas after semiconductor cleaning; the device comprises an outer shell, wherein a storage box is arranged above the outer shell, and the upper side of the storage box is connected with a material conveying port; the exhaust passage is arranged on the left side of the outer shell, a through hole is formed in the joint of the outer shell and the exhaust passage, and the through hole is positioned below the joint of the outer shell and the exhaust passage; and the air outlet is communicated with the upper left of the exhaust channel, and the lower left of the exhaust channel is communicated with a liquid discharge port. This waste gas acid-base neutralization treatment device after semiconductor washs only needs a driving source alright control inner tube to rotate around being responsible for, and energy-saving type is high, and the convenience is high, and the stirring leaf of the installation of drive bull stick control outside that can be synchronous rotates, overturns the mixture to waste gas and neutralization agent in the inner tube for waste gas and neutralization agent fully contact, accelerate neutralization efficiency.)

1. An acid-base neutralization treatment device for waste gas generated after semiconductor cleaning is used for treating the waste gas volatilized after semiconductor cleaning,

the device comprises an outer shell, wherein a storage box is arranged above the outer shell, and the upper side of the storage box is connected with a material conveying port;

the exhaust passage is arranged on the left side of the outer shell, a through hole is formed in the joint of the outer shell and the exhaust passage, and the through hole is positioned below the joint of the outer shell and the exhaust passage;

the air outlet is communicated with the left upper part of the exhaust channel, and the left lower part of the exhaust channel is communicated with a liquid discharge port;

the method is characterized in that: further comprising:

the feed opening is formed in the middle of the lower side of the storage box, a stop block is attached to the inner side of the feed opening, an installation frame is connected to the front side of the stop block, the installation frame is elastically connected with the storage box through a first spring, and the lower end of the installation frame is connected with a first magnet;

the main pipe is rotatably connected inside the outer shell by a bearing, the outer side of the main pipe is communicated with a connecting pipe, and one end, far away from the main pipe, of the connecting pipe is communicated with an inner cylinder;

the full gear is connected to the outer side of the rear end of the main pipe in a key mode, a half gear is connected to the upper portion of the full gear in a meshed mode, the inner side of the half gear is connected with a rotating shaft in a key mode, the rear end of the rotating shaft is connected with the output end of a motor, and the motor is fixed to the rear upper portion of the outer shell through bolts;

the gas pipe is rotatably connected to the rear end of the main pipe and communicated with the inside of the gas pipe;

the fixing ring is arranged on the rear side inside the outer shell, and the inner side of the fixing ring is connected with a tooth block;

and a fourth magnet installed at a front side inside the outer case.

2. The apparatus according to claim 1, wherein the apparatus comprises: be provided with bull stick, feed inlet and third magnet on the inner tube:

the rotating rod is rotatably connected inside the inner cylinder by a bearing, stirring blades are arranged on the outer side of the rotating rod at equal angles, and the rear end of the rotating rod is in key connection with an adjusting gear;

the feeding hole is formed in one side, far away from the connecting pipe, of the inner barrel, a sealing plate is connected to the interior of the feeding hole in a sliding mode, and the sealing plate is elastically connected with the inner barrel through a second spring;

the front end of the sealing plate is provided with a connecting rod, the front end of the connecting rod is provided with a second magnet, the connecting rod is connected to the inner side of an adjusting groove in a sliding manner, and the adjusting groove is formed in the side wall of the inner cylinder;

and the third magnet is arranged on one side of the inner cylinder, which is far away from the connecting pipe.

3. The apparatus according to claim 1, wherein the apparatus comprises: the lateral wall is parallel distribution each other the feed opening with the opposite face of dog is the slope column structure, just the external diameter of dog reduces from last to down in proper order.

4. The acid-base neutralization treatment device for the waste gas after semiconductor cleaning according to claim 2, characterized in that: the mounting frame with the 7-shaped lateral section is in up-and-down sliding connection with the storage box, and the first magnet and the third magnet are arranged at the lower end of the mounting frame and correspond to each other in position.

5. The apparatus according to claim 1, wherein the apparatus comprises: the outer diameter of the full gear is the same as that of the half gear, and the number of teeth of the full gear is four times that of the half gear.

6. The acid-base neutralization treatment device for the waste gas after semiconductor cleaning according to claim 2, characterized in that: the inner cylinder is in equal angle distribution with respect to the transverse center line of the main pipe, the position of the feed inlet formed in the upper position of the inner cylinder corresponds to the position of the feed opening, and the inner diameter of the feed opening is smaller than that of the feed inlet.

7. The acid-base neutralization treatment device for the waste gas after semiconductor cleaning according to claim 2, characterized in that: the distribution of tooth piece equidistance is in gu fixed ring with adjusting gear's junction, just adjusting gear with the stirring leaf is coaxial coupling.

8. The acid-base neutralization treatment device for the waste gas after semiconductor cleaning according to claim 2, characterized in that: the fourth magnets are symmetrically arranged about the transverse center line of the main pipe, and the positions of the fourth magnets and the position of the second magnet are arranged correspondingly.

9. The apparatus according to claim 1, wherein the apparatus comprises: the bottom side surface in the storage box is of an inclined structure, and the lowest point of the storage box and the highest point of the feed opening are overlapped.

Technical Field

The invention relates to the technical field of semiconductor cleaning, in particular to a waste gas acid-base neutralization treatment device after semiconductor cleaning.

Background

In the process of manufacturing semiconductors, since the manufacturing process is complicated, the chemical components used are considerably diversified, the process off-gas thus generated is also quite complex, including acid gases (e.g., Hydrogen Fluoride (HF), hydrogen chloride (HCl), nitric acid (HNO3), sulfuric acid (H2SO4), and phosphoric acid (H3PO4), etc.), base gases (e.g., ammonia (NH3)), solvents (e.g., isopropyl alcohol (IPA), acetone, n-hexane, cyclopentanone, Propylene Glycol Monomethyl Ether (PGME), and propylene glycol monomethyl ether ester (PGMEA), etc.), and toxic gases (such as arsine (AsH3), phosphine (PH3), silane (SiH4), dichlorosilane (SiH2Cl2), diborane (B2H6), boron trifluoride (BF3), silicon tetrafluoride (SiF4), and the like), in order to avoid the problem of environmental pollution caused by process off-gas generated during the manufacturing process of semiconductors, a process off-gas treatment apparatus is provided at the end of the apparatus.

However, when the waste gas is treated, excessive waste gas and the neutralizing agent are in direct contact reaction, the neutralizing effect is influenced, the cumulative use of the neutralizing agent gradually reduces the neutralizing effect of the subsequent waste gas, the waste gas cannot be neutralized by using a brand-new agent in small batches, the automation degree of the operation of the whole device is low, and the agent needs to be added manually.

Therefore, we propose a waste gas acid-base neutralization treatment device after semiconductor cleaning so as to solve the above-mentioned problems.

Disclosure of Invention

The invention aims to provide a waste gas acid-base neutralization treatment device after semiconductor cleaning, which aims to solve the problems that excessive waste gas and a neutralizing agent are in direct contact reaction to influence the neutralizing effect when the waste gas is treated in the current market in the background technology, the neutralizing effect of subsequent waste gas can be gradually reduced due to the accumulated use of the neutralizing agent, the waste gas cannot be neutralized by using a brand-new agent in small batches, the automation degree of the operation of the whole device is low, and the agent needs to be added manually.

In order to achieve the purpose, the invention provides the following technical scheme: a waste gas acid-base neutralization treatment device after semiconductor cleaning is used for treating waste gas volatilized after semiconductor cleaning;

the device comprises an outer shell, wherein a storage box is arranged above the outer shell, and the upper side of the storage box is connected with a material conveying port;

the exhaust passage is arranged on the left side of the outer shell, a through hole is formed in the joint of the outer shell and the exhaust passage, and the through hole is positioned below the joint of the outer shell and the exhaust passage;

the air outlet is communicated with the left upper part of the exhaust channel, and the left lower part of the exhaust channel is communicated with a liquid discharge port;

further comprising:

the feed opening is formed in the middle of the lower side of the storage box, a stop block is attached to the inner side of the feed opening, an installation frame is connected to the front side of the stop block, the installation frame is elastically connected with the storage box through a first spring, and the lower end of the installation frame is connected with a first magnet;

the main pipe is rotatably connected inside the outer shell by a bearing, the outer side of the main pipe is communicated with a connecting pipe, and one end, far away from the main pipe, of the connecting pipe is communicated with an inner cylinder;

the full gear is connected to the outer side of the rear end of the main pipe in a key mode, a half gear is connected to the upper portion of the full gear in a meshed mode, the inner side of the half gear is connected with a rotating shaft in a key mode, the rear end of the rotating shaft is connected with the output end of a motor, and the motor is fixed to the rear upper portion of the outer shell through bolts;

the gas pipe is rotatably connected to the rear end of the main pipe and communicated with the inside of the gas pipe;

the fixing ring is arranged on the rear side inside the outer shell, and the inner side of the fixing ring is connected with a tooth block;

and a fourth magnet installed at a front side inside the outer case.

Preferably, the inner cylinder is provided with a rotating rod, a feeding hole and a third magnet:

the rotating rod is rotatably connected inside the inner cylinder by a bearing, stirring blades are arranged on the outer side of the rotating rod at equal angles, and the rear end of the rotating rod is in key connection with an adjusting gear;

the feeding hole is formed in one side, far away from the connecting pipe, of the inner barrel, a sealing plate is connected to the interior of the feeding hole in a sliding mode, and the sealing plate is elastically connected with the inner barrel through a second spring;

the front end of the sealing plate is provided with a connecting rod, the front end of the connecting rod is provided with a second magnet, the connecting rod is connected to the inner side of an adjusting groove in a sliding manner, and the adjusting groove is formed in the side wall of the inner cylinder;

and the third magnet is arranged on one side of the inner cylinder, which is far away from the connecting pipe.

Preferably, the lateral wall mutual parallel distribution the feed opening with the opposite face of dog is the slope column structure, just the external diameter of dog reduces from last to down in proper order, and the usable dog of this design encloses the fender to the feed opening to when the dog shifts up, reserve in the gap supply between dog and the feed opening and the medicament whereabouts.

Preferably, the mounting bracket with the 7-shaped lateral section is connected with the storage box in a vertically sliding mode, the first magnet is mounted at the lower end of the mounting bracket, the third magnet is mounted at the lower end of the mounting bracket, the stop block is driven to vertically move by the aid of vertical movement of the mounting bracket, and the position of the mounting bracket is adjusted by the aid of mutual repulsion force between the first magnet and the third magnet.

Preferably, be located in same vertical plane full gear's external diameter with half gear's external diameter is the same, just full gear's number of teeth is half gear four times of the number of teeth, the usable half gear drive full gear of this design rotates to can guarantee that half gear rotates a week and drives full gear rotation quarter a week.

Preferably, the inner tube is about the horizontal central line isogonism of being responsible for distributes, and the top position the inner tube is seted up the position of feed inlet with the position of feed opening corresponds each other, and the internal diameter of feed opening is less than the internal diameter of feed inlet, and the usable inner tube continuity of this design mixes waste gas and neutralization agent and carries out neutralization treatment, and guarantees that neutralization agent from the smooth entering of feed opening in the feed inlet.

Preferably, the distribution of angles such as tooth piece is in gu fixed ring with adjusting gear's junction, just adjusting gear with the stirring leaf is coaxial coupling, and the usable tooth piece drive adjusting gear of this design rotates to the drive stirring leaf rotates, mixes waste gas and neutralization agent.

Preferably, the fourth magnets are symmetrically arranged about the transverse center line of the main pipe, and the positions of the fourth magnets and the position of the second magnet are arranged in a corresponding manner, so that the second magnet can be driven to drive the connecting rod to move by utilizing the mutual attraction between the fourth magnets and the second magnet, and the position of the sealing plate can be adjusted.

Preferably, the bottom side surface inside the storage box is of an inclined structure, the lowest point of the storage box and the highest point of the feed opening are overlapped, and the design can ensure that the neutralizing agent is concentrated at the feed opening and smoothly shunted and discharged from the feed opening.

Compared with the prior art, the invention has the beneficial effects that: the acid-base neutralization treatment device for the waste gas after semiconductor cleaning,

(1) the waste gas neutralization device can convey a batch of waste gas and neutralizing agents into the inner barrel, acid and alkali of the waste gas are neutralized in the inner barrel, the position alternation of the inner barrel is realized by matching with the use of the half gear and the gear, when the position alternation of the inner barrel is realized, the suction force of the fourth magnet and the second magnet which are distributed in different poles is utilized to open the feed inlet, the repulsive force of the third magnet and the first magnet which are distributed in the same poles opens the feed outlet, the automation and batch feeding of the agents are realized, the waste gas is neutralized in a separated mode, the waste gas in the inner barrel is guaranteed to be mixed with brand new neutralizing agents, the drug property of the agents is guaranteed, the neutralizing effect of the waste gas is guaranteed, the process can be automatically completed only when the inner barrel rotates around the main pipe, the operation convenience is high, and the automation degree is high;

(2) only need a driving source alright control inner tube to rotate around being responsible for, energy-saving height, the convenience is high, and the stirring leaf of the installation of the drive bull stick control outside that can synchronize rotates, and waste gas and neutralization medicament in to the inner tube carry out the upset mixture for waste gas and neutralization medicament fully contact, accelerate neutralization efficiency, and the waste gas discharge after the follow-up entering of this device can promote the neutralization, is favorable to the batch continuity neutralization treatment of waste gas.

Drawings

FIG. 1 is a schematic view of the main sectional structure of the present invention;

FIG. 2 is a schematic view of the main sectional structure of the inner cylinder of the present invention;

FIG. 3 is a schematic view of a main section of an adjusting gear of the present invention;

FIG. 4 is a schematic side sectional view of the present invention;

FIG. 5 is a schematic rear sectional view of a half gear of the present invention;

FIG. 6 is an enlarged view of a portion a of FIG. 4 according to the present invention;

FIG. 7 is a schematic side sectional view of a seal plate according to the present invention;

FIG. 8 is a schematic view of a main sectional structure of a gas pipe according to the present invention;

FIG. 9 is a schematic side sectional view of the inner cylinder of the present invention.

In the figure: 1. an outer housing; 2. a storage box; 3. a material conveying port; 4. an exhaust passage; 5. a through hole; 6. a feeding port; 7. a stopper; 8. a mounting frame; 9. a first spring; 10. a first magnet; 11. a main pipe; 12. a gas delivery pipe; 13. all-gear; 14. a half gear; 15. a rotating shaft; 16. a motor; 17. a connecting pipe; 18. an inner barrel; 19. a rotating rod; 20. stirring blades; 21. an adjusting gear; 22. a fixing ring; 23. a tooth block; 24. a feed inlet; 25. an adjustment groove; 26. a sealing plate; 27. a connecting rod; 28. a second spring; 29. a second magnet; 30. a third magnet; 31. a fourth magnet; 32. an air outlet; 33. and a liquid discharge port.

Detailed Description

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

Referring to fig. 1-9, the present invention provides a technical solution: a waste gas acid-base neutralization treatment device after semiconductor cleaning is used for treating waste gas volatilized after semiconductor cleaning;

the device comprises an outer shell 1, wherein a storage box 2 is arranged above the outer shell, and the upper side of the storage box 2 is connected with a material conveying port 3;

the exhaust passage 4 is arranged on the left side of the outer shell 1, a through hole 5 is formed in the joint of the outer shell 1 and the exhaust passage 4, and the through hole 5 is positioned below the joint of the outer shell 1 and the exhaust passage 4;

an air outlet 32 communicated with the upper left of the exhaust passage 4, and a liquid outlet 33 communicated with the lower left of the exhaust passage 4;

further comprising:

the feed opening 6 is formed in the middle of the lower side of the storage box 2, a stop block 7 is attached to the inner side of the feed opening 6, an installation frame 8 is connected to the front side of the stop block 7, the installation frame 8 is elastically connected with the storage box 2 through a first spring 9, and the lower end of the installation frame 8 is connected with a first magnet 10;

a main pipe 11 rotatably connected to the inside of the outer casing 1 by a bearing, wherein a connecting pipe 17 is connected to the outside of the main pipe 11, and an inner cylinder 18 is connected to one end of the connecting pipe 17 away from the main pipe 11;

the full gear 13 is in key connection with the outer side of the rear end of the main pipe 11, a half gear 14 is in meshed connection with the upper portion of the full gear 13, the inner side of the half gear 14 is in key connection with a rotating shaft 15, the rear end of the rotating shaft 15 is connected with the output end of a motor 16, and the motor 16 is fixed on the rear upper portion of the outer shell 1 through bolts;

the air delivery pipe 12 is rotatably connected to the rear end of the main pipe 11, and the air delivery pipe 12 is communicated with the interior of the air delivery pipe 12;

a fixing ring 22 installed at the rear side inside the outer case 1, and a tooth block 23 connected to the inside of the fixing ring 22;

and a fourth magnet 31 mounted on the front side inside the outer case 1.

The outer diameter of the full gear 13 located in the same vertical plane is the same as that of the half gear 14, and the number of teeth of the full gear 13 is four times that of the half gear 14.

The neutralizing agent is conveyed into the storage box 2 from the material conveying opening 3 to realize storage of the neutralizing agent, then a motor 16 shown in figure 4 is powered on, the motor 16 is controlled to drive a rotating shaft 15 connected with an output shaft to rotate, the rotating shaft 15 controls a half gear 14 connected with an outer side key to rotate, and as shown in figure 5, when the half gear 14 rotates to be meshed with the full gear 13, the full gear 13 can be controlled to rotate, because the number of teeth of the full gear 13 is four times that of the half gear 14, and the outer diameter of the full gear 13 is the same as that of the half gear 14, one circle of rotation of the half gear 14 can drive the full gear 13 to rotate by one fourth, and the full gear 13 controls a main pipe 11 connected with an inner side key to rotate.

The opposite surfaces of the feed opening 6 and the stop dog 7, which are distributed in parallel, of the side walls are of inclined structures, and the outer diameter of the stop dog 7 is reduced from top to bottom in sequence. The mounting frame 8 having a 7-shaped side cross-section is slidably coupled to the storage box 2 in an up-down direction, and the first magnet 10 and the third magnet 30 are mounted at the lower end of the mounting frame 8 in positions corresponding to each other. The bottom side surface in the storage box 2 is of an inclined structure, and the lowest point of the storage box 2 and the highest point of the feed opening 6 are overlapped. The inner cylinder 18 is provided with a rotating rod 19, a feed inlet 24 and a third magnet 30: a rotating rod 19 which is rotatably connected inside the inner cylinder 18 by a bearing, stirring blades 20 are arranged on the outer side of the rotating rod 19 at equal angles, and an adjusting gear 21 is connected to the rear end key of the rotating rod 19; a feed inlet 24, which is arranged on one side of the inner cylinder 18 far away from the connecting pipe 17, and a sealing plate 26 is connected inside the feed inlet 24 in a sliding manner, and the sealing plate 26 is elastically connected with the inner cylinder 18 through a second spring 28; the connecting rod 27 is arranged at the front end of the sealing plate 26, the second magnet 29 is arranged at the front end of the connecting rod 27, the connecting rod 27 is connected to the inner side of the adjusting groove 25 in a sliding mode, and the adjusting groove 25 is formed in the side wall of the inner barrel 18; and a third magnet 30 installed on a side of the inner cylinder 18 away from the connection pipe 17. The inner cylinder 18 is distributed at an equal angle with respect to the transverse center line of the main pipe 11, the position of the feed opening 24 opened in the upper position of the inner cylinder 18 corresponds to the position of the feed opening 6, and the inner diameter of the feed opening 6 is smaller than the inner diameter of the feed opening 24. The tooth blocks 23 are distributed at equal angles at the joint of the fixed ring 22 and the adjusting gear 21, and the adjusting gear 21 and the stirring blade 20 are coaxially connected. The fourth magnets 31 are disposed symmetrically with respect to the lateral center line of the main pipe 11, and the positions of the fourth magnets 31 and the positions of the second magnets 29 are disposed to correspond to each other.

The outer side of the main pipe 11 is communicated with the inner cylinder 18 by the connecting pipe 17, so the inner cylinder 18 can be driven to rotate, the inner cylinder 18 rotates clockwise as shown in figure 1, when the half gear 14 rotates to be disengaged with the full gear 13, the position of the feed port 24 of one inner cylinder 18 is opposite to the position of the feed port 6, in combination with figure 7, the position of the second magnet 29 corresponds to the position of the fourth magnet 31 at the upper position, the opposite surfaces of the fourth magnet 31 and the second magnet 29 are opposite poles, so the mutual attraction force is generated between the fourth magnet 31 and the second magnet 29, the connecting rod 27 is driven to move forwards, the connecting rod 27 pulls the sealing plate 26 mounted at the end part to move forwards, the sealing plate 26 synchronously presses the second spring 28, the sealing plate 26 is accommodated in the adjusting groove 25, meanwhile, the positions of the third magnet 30 and the first magnet 10 are opposite, the opposite surfaces of the third magnet 30 and the first magnet 10 are the same poles, the third magnet 30 and the first magnet 10 generate repulsive force, so the mounting rack 8 can be pushed to extrude the first spring 9 to move upwards, the stop 7 arranged at the control end part of the mounting rack 8 moves upwards to release the enclosure of the stop 7 to the feed opening 6, the neutralizing agent in the storage box 2 can be conveyed into the feed opening 6 and enter the inner cylinder 18, the gas conveying pipe 12 conveys the waste gas into the main pipe 11 which is rotatably connected, the main pipe 11 is divided into the connecting pipe 17, the connecting pipe 17 conveys the waste gas into the inner cylinder 18, the waste gas is directly contacted with the neutralizing agent to neutralize the waste gas, when the half gear 14 is meshed with the full gear 13 again, the inner cylinder 18 can be driven to rotate around the main pipe 11 again, the fourth magnet 31 and the second magnet 29 are staggered, the second spring 28 can drive the sealing plate 26 to reset and move, the sealing plate 26 is used for enclosing the feed opening 24, the third magnet 30 and the first magnet 10 are staggered, the first spring 9 controls the mounting frame 8 to move downwards and reset, thereby controlling the stop block 7 to move downwards and reset, the feed opening 6 is enclosed and blocked, the neutralizing agent is prevented from feeding, when the inner barrel 18 rotates around the main pipe 11, the gear block 23 drives the adjusting gear 21 which is in meshed connection to rotate, the adjusting gear 21 controls the rotating rod 19 which is in key connection with the inner side to rotate, the rotating rod 19 controls the stirring blade 20 which is arranged on the outer side to rotate, the waste gas and the neutralizing agent in the inner barrel 18 are overturned and mixed, so that the waste gas and the neutralizing agent are fully contacted, when the inner barrel 18 rotates to the lower position, the second magnet 29 can correspond to the fourth magnet 31 in the lower position, the sealing plate 26 is opened, the neutralizing agent and the waste gas in the inner barrel 18 are discharged, according to the steps, the automatic feeding of the neutralizing agent and the small batch processing of the waste gas are realized, and the neutralized waste gas residue can also be discharged when the inner barrel 18 rotates to the upper position to open the sealing plate 26, the subsequent waste gas that enters can promote the waste gas after the neutralization to discharge, is favorable to the batch continuity neutralization treatment of waste gas, and exhaust waste gas can enter exhaust passage 4 along through-hole 5, and then discharges from air outlet 32, and the follow-up thread sealing lid that can will go up on the leakage fluid dram 33 is dismantled, discharges the medicament.

The working principle is as follows: when the device for neutralizing the acid and alkali in the exhaust gas after semiconductor cleaning is used, firstly, a user stably places the whole device shown in fig. 1 in a working area, a motor 16 is powered on to drive an inner cylinder 18 to rotate, a mutual attraction force is generated between a fourth magnet 31 and a second magnet 29 which are distributed in different poles, a sealing plate 26 is accommodated in an adjusting groove 25, a repulsive force is generated between a third magnet 30 and a first magnet 10 which are distributed in the same poles, the enclosure of a baffle 7 on a feed opening 6 is released, a neutralizing agent is conveyed into the inner cylinder 18, the inner cylinder 18 is driven to rotate around a main pipe 11 again, the sealing plate 26 is reset to enclose a feed opening 24, the baffle 7 is moved downwards to reset to enclose the feed opening 6, a rotating rod 19 controls a stirring blade 20 arranged on the outer side to overturn and mix the exhaust gas and the neutralizing agent in the inner cylinder 18, the sealing plate 26 is opened when the inner cylinder 18 rotates to the lower position, the neutralized chemicals and exhaust gas in the inner cylinder 18 are discharged, the discharged exhaust gas is discharged from the air outlet 32, and then the screw sealing cover on the liquid outlet 33 can be removed to discharge the chemicals.

In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like, indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, are only for convenience in describing and simplifying the description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed in a particular orientation, and be operated, and thus, should not be construed as limiting the invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, e.g., as being fixed or detachable or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that various changes in the embodiments and/or modifications of the invention can be made, and equivalents and modifications of some features of the invention can be made without departing from the spirit and scope of the invention.