阅读说明：本技术 超高品质因子微棒腔制备装置及方法 (Device and method for preparing ultra-high quality factor micro rod cavity ) 是由 肖云峰 姚璐 刘鹏 龚旗煌 于 2021-10-19 设计创作，主要内容包括：本发明涉及回音壁微腔制备技术领域,提供一种超高品质因子微棒腔制备装置及方法,该超高品质因子微棒腔制备装置包括二氧化碳激光器,用以向样棒发射熔融激光；旋转电机,所述旋转电机的输出端设有转轴,所述转轴用以同轴装配所述样棒；步进位移台,所述旋转电机设于所述步进位移台上,所述步进位移台可沿所述转轴的轴向移动；控制器,所述控制器分别与所述二氧化碳激光器、所述旋转电机和所述步进位移台电连接。本发明通过控制器自动控制二氧化碳激光器、旋转电机和步进位移台,结构简单,实现对样棒自动加工制备微棒腔,保证微棒腔的鲁棒性,提高制备效率。(The invention relates to the technical field of echo wall micro-cavity preparation, and provides a device and a method for preparing a micro rod cavity with an ultra-high quality factor, wherein the device for preparing the micro rod cavity with the ultra-high quality factor comprises a carbon dioxide laser for emitting melting laser to a sample rod; the output end of the rotating motor is provided with a rotating shaft, and the rotating shaft is used for coaxially assembling the sample rod; the rotating motor is arranged on the stepping displacement table, and the stepping displacement table can move along the axial direction of the rotating shaft; and the controller is electrically connected with the carbon dioxide laser, the rotating motor and the stepping displacement table respectively. The carbon dioxide laser, the rotating motor and the stepping displacement table are automatically controlled by the controller, the structure is simple, the micro-rod cavity is automatically processed and prepared on the sample rod, the robustness of the micro-rod cavity is ensured, and the preparation efficiency is improved.)

1. The utility model provides an ultra-high quality factor micro rod cavity preparation facilities which characterized in that includes:

the carbon dioxide laser is used for emitting melting laser to the sample rod;

the output end of the rotating motor is provided with a rotating shaft, and the rotating shaft is used for coaxially assembling the sample rod;

the rotating motor is arranged on the stepping displacement table, and the stepping displacement table can move along the axial direction of the rotating shaft;

and the controller is electrically connected with the carbon dioxide laser, the rotating motor and the stepping displacement table respectively.

2. The apparatus of claim 1, further comprising an optical microscope and a charge-coupled device camera, wherein the collection end of the optical microscope is configured to be opposite to the processing position of the sample rod, the collection end of the charge-coupled device camera is configured to be opposite to the observation end of the optical microscope, and the charge-coupled device camera is electrically connected to the controller.

3. The ultra-high quality factor micro rod cavity preparation device according to claim 1, further comprising a reaction chamber, wherein the carbon dioxide laser, the step-by-step displacement table and the rotating motor are all disposed in the reaction chamber.

4. The ultra-high quality factor micro rod cavity preparation device according to claim 3, further comprising a nitrogen storage tank, wherein an air outlet of the nitrogen storage tank is connected with an air inlet of the reaction bin through an air conveying pipe.

5. The ultra-high quality factor micro rod cavity preparation device according to claim 4, wherein an electromagnetic valve is arranged on the gas transmission pipe, and the electromagnetic valve is connected with the controller.

6. The ultra-high quality factor micro rod cavity preparation device according to claim 1, further comprising a touch display screen electrically connected to the controller.

7. The ultra-high quality factor micro rod cavity preparation device according to claim 1, wherein the stepping displacement table comprises a stepping motor, a base and a displacement seat, wherein the output end of the stepping motor is provided with a lead screw, the base is provided with a guide slide rail, and the displacement seat is arranged on the base and is in guide fit with the guide slide rail;

the displacement seat is provided with a nut matched with the lead screw, the rotating motor is arranged on the displacement seat, and the stepping motor is electrically connected with the controller.

8. The apparatus of claim 1 wherein the output power of the carbon dioxide laser is less than or equal to 50 watts.

9. The ultra-high quality factor micro rod chamber preparation device according to any of claims 1 to 8, wherein the sample rod is a quartz rod.

10. The method for preparing the ultra-high quality factor micro rod cavity preparation device according to any one of claims 1 to 9, comprising the following steps:

the sample rod is coaxially and correspondingly assembled on the rotating shaft, so that the laser emission end of the carbon dioxide laser is opposite to the processing position of the sample rod;

and setting preparation parameters through the controller, and respectively controlling the carbon dioxide laser, the rotating motor and the stepping displacement table to operate according to the preparation parameters until the micro rod cavity is prepared.

Technical Field

The invention relates to the technical field of echo wall micro-cavity preparation, in particular to a device and a method for preparing a micro-rod cavity with an ultra-high quality factor.

Background

The echo wall optical microcavity has an ultrahigh quality factor and a very small mode volume, can realize optical field local area in time and space at the same time, and is one of the keys of modern basic optical physics research and integrated photonics application. The optical microcavity with the whispering gallery mode has a very important role in human production, life and scientific research, and has been widely applied to the fields of biological detection, precision measurement, high-speed optical communication and the like.

The preparation method of the echo wall micro-cavity with the high quality factor mainly comprises chemical etching and fusion preparation, and the traditional on-chip echo wall optical micro-cavity mainly adopts an etching method which combines a semiconductor photoetching process with a specific material.

The preparation process based on the etching method is complex, the preparation flow is too long, and the quality factor of the obtained echo wall optical microcavity is also lower. And the carbon dioxide laser is utilized to melt the high-purity quartz rod to obtain the micro rod cavity, so that the ultrahigh quality factor can be realized. Firstly, the high-power carbon dioxide laser is utilized to carry out ablation and melting on the silica quartz rod, and then the carbon dioxide laser power is reduced to carry out reflux treatment on the microcavity surface, thereby preparing the silicon dioxide quartz rod with the quality factor exceeding 1 multiplied by 10⁹The silica micro rod cavity of (1).

Although the melting method has the advantages of simple preparation, high preparation speed, realization of ultra-high quality factor and the like, the method still has some limitations:

(1) manual preparation is needed, and the production efficiency is low;

(2) the preparation process has larger instability;

(3) the water vapor in the air increases the hydroxide content of the microcavities during the preparation process.

The low efficiency of the manual preparation hinders the large-scale industrial application and popularization, and in addition, the instability of the preparation also causes the properties of the microcavity, such as quality factors and the like, to have corresponding uncertainty, thus influencing the robustness of the preparation; the increase of the hydroxyl content increases the heat effect of the echo wall micro-rod cavity, and the micro-rod cavity is not used for generating optical solitons so as to be applied to precision measurement, optical communication and the like.

Disclosure of Invention

The invention provides a device and a method for preparing a micro rod cavity with an ultra-high quality factor, which are used for solving the defects of unstable performance and low preparation efficiency of a manually prepared echo wall micro cavity in the prior art, realizing the automatic preparation of the micro rod cavity and improving the robustness and the preparation efficiency.

The invention provides a device for preparing a micro rod cavity with an ultrahigh quality factor, which comprises:

the carbon dioxide laser is used for emitting melting laser to the sample rod;

the output end of the rotating motor is provided with a rotating shaft, and the rotating shaft is used for coaxially assembling the sample rod;

the rotating motor is arranged on the stepping displacement table, and the stepping displacement table can move along the axial direction of the rotating shaft;

and the controller is electrically connected with the carbon dioxide laser, the rotating motor and the stepping displacement table respectively.

The ultrahigh-quality-factor micro-rod cavity preparation device further comprises an optical microscope and a charge coupling piece camera, wherein the collecting end of the optical microscope is arranged opposite to the processing position of the sample rod, the collecting end of the charge coupling piece camera is arranged opposite to the observing end of the optical microscope, and the charge coupling piece camera is electrically connected with the controller.

The device for preparing the ultra-high quality factor micro rod cavity further comprises a reaction bin, wherein the carbon dioxide laser, the stepping displacement table and the rotating motor are all arranged in the reaction bin.

The ultrahigh-quality-factor micro rod cavity preparation device further comprises a nitrogen storage tank, and an air outlet of the nitrogen storage tank is connected with an air inlet of the reaction bin through an air conveying pipe.

According to the device for preparing the micro rod cavity with the ultrahigh quality factor, provided by the invention, the gas transmission pipe is provided with the electromagnetic valve, and the electromagnetic valve is connected with the controller.

The device for preparing the ultra-high quality factor micro rod cavity further comprises a touch display screen, wherein the touch display screen is electrically connected with the controller.

According to the ultrahigh quality factor micro rod cavity preparation device provided by the invention, the stepping displacement table comprises a stepping motor, a base and a displacement seat, wherein the output end of the stepping motor is provided with a lead screw, the base is provided with a guide slide rail, and the displacement seat is arranged on the base and is in guide fit with the guide slide rail;

the displacement seat is provided with a nut matched with the lead screw, the rotating motor is arranged on the displacement seat, and the stepping motor is electrically connected with the controller.

According to the preparation device of the micro rod cavity with the ultrahigh quality factor, provided by the invention, the output power of the carbon dioxide laser is less than or equal to 50 watts.

According to the device for preparing the ultra-high quality factor micro rod cavity, the sample rod is a quartz rod.

The invention also provides a preparation method of the ultra-high quality factor micro rod cavity, which comprises the following steps:

the sample rod is coaxially and correspondingly assembled on the rotating shaft, so that the laser emission end of the carbon dioxide laser is opposite to the processing position of the sample rod;

and setting preparation parameters through the controller, and respectively controlling the carbon dioxide laser, the rotating motor and the stepping displacement table to operate according to the preparation parameters until the micro rod cavity is prepared.

The invention provides a device and a method for preparing a micro rod cavity with an ultra-high quality factor, which comprises a carbon dioxide laser for emitting melting laser to a sample rod; the output end of the rotating motor is provided with a rotating shaft, and the rotating shaft is used for coaxially assembling the sample rod; the rotating motor is arranged on the stepping displacement table, and the stepping displacement table can move along the axial direction of the rotating shaft; the controller, the controller respectively with the carbon dioxide laser the rotating electrical machines with step-by-step displacement platform electricity is connected, through controller automatic control carbon dioxide laser, rotating electrical machines and step-by-step displacement platform, simple structure realizes guaranteeing the robustness in micro-rod chamber to sample stick automatic processing preparation.

Drawings

In order to more clearly illustrate the technical solutions of the present invention or the prior art, the drawings needed to be used in the description of the embodiments or the prior art will be briefly described below, and it is obvious that the drawings in the following description are some embodiments of the present invention, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.

FIG. 1 is a block diagram of an apparatus for preparing an ultra-high quality factor micro rod cavity according to the present invention;

reference numerals:

1: a carbon dioxide laser; 2: a sample rod; 3: a rotating electric machine; 4: a rotating shaft; 5: a step-by-step displacement stage; 6: a controller; 7: a charge-coupled element camera; 8: a reaction bin; 9: a gas delivery pipe; 10: an electromagnetic valve; 11: touch-control display screen.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, embodiments of the present invention are described in further detail below with reference to the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.

In the description of the embodiments of the present invention, it should be noted that the terms "center", "longitudinal", "lateral", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience in describing the embodiments of the present invention and simplifying the description, but do not indicate or imply that the referred devices or elements must have a specific orientation, be constructed in a specific orientation, and be operated, and thus, should not be construed as limiting the embodiments of the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the embodiments of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. Specific meanings of the above terms in the embodiments of the present invention can be understood in specific cases by those of ordinary skill in the art.

In embodiments of the invention, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may be directly contacting the first and second features or indirectly contacting the first and second features through intervening media. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of an embodiment of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.

The following describes an ultra-high quality factor micro rod cavity preparation device of the present invention with reference to fig. 1, including:

a carbon dioxide laser 1 for emitting a melting laser to the sample rod 2;

the sample rod assembling device comprises a rotating motor 3, wherein a rotating shaft 4 is arranged at the output end of the rotating motor 3, and the rotating shaft 4 is used for coaxially assembling a sample rod 2;

the stepping displacement table 5 is provided with a rotating motor 3, and the stepping displacement table 5 can move along the axial direction of the rotating shaft 4;

and the controller 6 is electrically connected with the carbon dioxide laser 1, the rotating motor 3 and the stepping displacement table 5 respectively. It can be understood that the carbon dioxide laser 1 is used for emitting melting laser to the sample rod 2 to realize the melting preparation of the micro rod cavity. The output of rotating electrical machines 3 sets up pivot 4, and pivot 4 is used for assembling appearance stick 2, and then rotating electrical machines 3 drives the high-speed rotation of appearance stick 2. Wherein, appearance stick 2 and 4 coaxial arrangement of pivot, the one end of pivot 4 and rotating electrical machines 3's output end fixed connection, the other end of pivot 4 is equipped with the jack, and appearance stick 2 is inserted and is established in the jack, and the diameter of appearance stick 2 and the internal diameter looks adaptation of jack guarantee to stabilize the card and hold, prevent that rotatory in-process from taking place to drop. It should be noted that a manipulator may be provided at the output end of the rotating motor 3 to stably clamp the sample rod 2.

Further, rotating electrical machines 3 stable installation is on step-by-step displacement platform 5, and step-by-step displacement platform 5 can be followed the axial displacement of pivot 4, that is to say, step-by-step displacement platform 5 drives rotating electrical machines 3, and then drives the length direction removal of appearance stick 2 along appearance stick 2, realizes processing a plurality of micro-rod cavities along the axial of appearance stick 2.

The controller 6 is electrically connected with the carbon dioxide laser 1, the rotating motor 3 and the stepping displacement table 5 respectively, so that the control of the operation state of the carbon dioxide laser 1, the rotating motor 3 and the stepping displacement table 5 is realized.

Specifically, the sample rod 2 is stably installed on the rotating shaft 4, the controller 6 sends a starting instruction to the rotating motor 3, and the rotating motor 3 drives the sample rod 2 to rotate at a high speed;

the controller 6 sends a starting instruction to the carbon dioxide laser 1, the carbon dioxide laser 1 emits melting laser, and the melting laser acts on a first position to be processed of the sample rod 2 rotating at a high speed to prepare a first micro rod cavity in a melting mode;

the controller 6 sends a starting instruction to the stepping displacement table 5 and sends a pause instruction to the carbon dioxide laser 1, the stepping displacement table 5 drives the rotating motor 3 to move, when the second to-be-processed position of the sample rod 2 is opposite to the emission end of the carbon dioxide laser 1, the stepping displacement table 5 stops moving, the carbon dioxide laser 1 generates melting laser to the second to-be-processed position of the sample rod 2, and the preparation of a second micro rod cavity is completed;

the above steps are repeated until the micro rod cavities with the required number are prepared.

The device for preparing the micro rod cavity with the ultra-high quality factor further comprises an optical microscope and a charge coupling piece camera 7, wherein the collecting end of the optical microscope is used for being arranged opposite to the processing position of the sample rod 2, the collecting end of the charge coupling piece camera 7 is arranged opposite to the observing end of the optical microscope, and the charge coupling piece camera 7 is electrically connected with the controller 6. It can be understood that the collecting end of the optical microscope is arranged opposite to the processing position of the sample rod 2, and the optical microscope uses the optical principle to carry out amplification imaging on the processing position of the sample rod 2. The collecting end of the charge coupling element camera 7, namely a CCD (charge coupled device) camera, is arranged opposite to the observing end of the optical microscope, so that the real-time imaging of the preparation process and the micro rod cavity is realized. The CCD camera 7 is electrically connected with the controller 6, so that the transmission and storage of imaging information are realized, the observation by workers is facilitated, and the data support is provided by the later improvement.

The device for preparing the ultra-high quality factor micro rod cavity further comprises a reaction bin 8, wherein the carbon dioxide laser 1, the stepping displacement table 5 and the rotating motor 3 are all arranged in the reaction bin 8. It can be understood that, in order to protect the preparation process and each device, the carbon dioxide laser 1, the stepping displacement table 5 and the rotating motor 3 are all installed in the reaction chamber 8, so that the preparation safety is improved, and the influence factors are reduced.

The device for preparing the ultra-high quality factor micro rod cavity further comprises a nitrogen storage tank, wherein an air outlet of the nitrogen storage tank is connected with an air inlet of the reaction bin 8 through an air conveying pipe 9. It can be understood that nitrogen is stored in the nitrogen storage tank, and the gas outlet of the nitrogen storage tank is connected with the gas inlet of the reaction bin 8 through the gas conveying pipe 9, so that nitrogen is conveyed into the reaction bin 8, the air in the reaction bin 8 is discharged from the gas outlet, a nitrogen environment is created, and the content of hydroxyl in the micro rod cavity in the preparation process is reduced. It is worth to be noted that before the preparation of the micro rod cavity, nitrogen is conveyed into the reaction bin 8, the conveying time is specifically set according to the size of the reaction bin 8, and after the air is completely or nearly completely discharged, the preparation of the micro rod cavity is started.

According to the device for preparing the micro rod cavity with the ultrahigh quality factor, provided by the invention, the electromagnetic valve 10 is arranged on the gas transmission pipe 9, and the electromagnetic valve 10 is connected with the controller 6. It can be understood that the air delivery pipe 9 is provided with an electromagnetic valve 10 for controlling the on-off of the air delivery pipe 9. The electromagnetic valve 10 is connected with the controller 6, and the controller 6 can automatically control the electromagnetic valve 10. It should be noted that the solenoid valve 10 is always open during the whole preparation process, that is, the nitrogen storage tank always supplies nitrogen to the reaction chamber 8. In this embodiment, the electromagnetic valve 10 is a flow electromagnetic valve 10, the opening degree of the electromagnetic valve 10 is regulated according to actual needs, and before preparation, the opening degree of the electromagnetic valve 10 is large, so that the air removal efficiency is improved; in the preparation process, the opening degree of the electromagnetic valve 10 is small, the influence of nitrogen flowing on the formation of the micro rod cavity is reduced, and the robustness of the micro rod cavity is improved.

The device for preparing the ultra-high quality factor micro rod cavity further comprises a touch display screen 11, wherein the touch display screen 11 is electrically connected with the controller 6. It can be understood that the touch display screen 11 is electrically connected with the controller 6, so that the preparation parameters can be conveyed to the controller 6 through the touch display screen 11, and meanwhile, the controller 6 sends imaging information to the touch display screen 11 for displaying, so that a worker can conveniently and visually check the preparation process.

According to the ultrahigh quality factor micro rod cavity preparation device provided by the invention, the stepping displacement table 5 comprises a stepping motor, a base and a displacement seat, wherein the output end of the stepping motor is provided with a lead screw, the base is provided with a guide slide rail, and the displacement seat is arranged on the base and is in guide fit with the guide slide rail;

the displacement seat is provided with a nut matched with the screw rod, the rotating motor 3 is arranged on the displacement seat, and the stepping motor is electrically connected with the controller 6. It can be understood that the stepping motor is used as a power output part of the stepping displacement table 5, and the output end of the stepping motor is provided with a lead screw, so that the stepping motor drives the lead screw to rotate forwards or backwards. The base is equipped with the direction slide rail, and direction slide rail and lead screw all set up along the axial of pivot 4. The displacement seat is correspondingly assembled on the guide slide rail of the base, so that the displacement seat can be movably guided.

Wherein, the bottom side of displacement seat is equipped with the nut, and on the lead screw was located to the nut cover, when the lead screw rotated, the nut drove the displacement seat and removed along the length direction of lead screw, and then the displacement seat drove rotating electrical machines 3 and removed, realized the removal adjustment to the position of treating of appearance stick 2. The controller 6 is electrically connected with the stepping motor and used for controlling the start and stop of the forward rotation and the reverse rotation of the stepping motor and carrying out automatic operation.

According to the device for preparing the micro rod cavity with the ultrahigh quality factor, provided by the invention, the output power of the carbon dioxide laser 1 is less than or equal to 50 watts. It will be appreciated that the maximum output power of the carbon dioxide laser 1 is 50 watts, which meets the requirements for laser melting to produce a cavity in a micro-rod.

According to the device for preparing the ultra-high quality factor micro rod cavity, the sample rod 2 is a quartz rod. It is understood that the sample rod 2 in this embodiment is embodied as a quartz rod.

The method for preparing the ultra-high quality factor micro rod cavity provided by the invention is described below, and the method for preparing the ultra-high quality factor micro rod cavity described below and the apparatus for preparing the ultra-high quality factor micro rod cavity described above can be referred to correspondingly.

The invention also provides a preparation method of the ultra-high quality factor micro rod cavity, which comprises the following steps:

the sample rod 2 is coaxially and correspondingly assembled on the rotating shaft 4, so that the laser emission end of the carbon dioxide laser 1 is opposite to the processing position of the sample rod 2;

the preparation parameters are set through the controller 6, and the carbon dioxide laser 1, the rotating motor 3 and the stepping displacement table 5 are respectively controlled to operate according to the preparation parameters until the micro rod cavity is prepared.

The invention provides a preparation method of an ultrahigh-quality factor micro rod cavity, which specifically comprises the following steps:

assembling a silica quartz rod on the rotating shaft 4, and ensuring that the end surface of the quartz rod is parallel to the end surface of the rotating shaft 4, namely, coaxially assembling;

inputting preparation parameters through the touch display screen 11, and sending the preparation parameters to the controller 6, wherein the preparation parameters comprise position parameters of the optical microscope, initial position parameters of the quartz rod, rotating speed of the rotating motor 3 and the number of micro rod cavities to be prepared, and the controller 6 sends corresponding adjusting instructions to the rotating motor 3 and the stepping motor respectively according to the preparation parameters;

the controller 6 sends a starting instruction to the electromagnetic valve 10, the nitrogen storage tank conveys nitrogen to the reaction chamber 8, after the time is set, the controller 6 sends a starting instruction to the rotating motor 3, so that the quartz rod stably rotates at a high speed, the controller 6 sends a starting instruction to the carbon dioxide laser 1, and the carbon dioxide laser 1 emits fused laser to act on a first position to be processed of the quartz rod;

the CCD camera collects images amplified by the optical microscope, transmits image information to the controller 6, and finally displays the images by the touch display screen 11, so that real-time imaging of the preparation process and the micro-rod cavity is realized;

after the first micro rod cavity is prepared, the controller 6 sends a stop instruction to the carbon dioxide laser 1 and the rotating motor 3, and then sends a start instruction to the stepping motor, and the stepping motor drives the lead screw to rotate, so that the displacement seat drives the rotating motor 3 to move for a set distance, wherein the set distance is the set distance between two adjacent micro rod cavities;

repeating the first step of preparing the micro rod cavities to complete the preparation of a second micro rod cavity, and repeating the steps in the same manner until the micro rod cavities with the set number are processed and prepared;

the controller 6 sends a closing instruction to the electromagnetic valve 10, the nitrogen storage tank stops conveying nitrogen to the reaction bin 8, and the quartz rod is taken out.

The invention provides a device and a method for preparing a micro rod cavity with an ultra-high quality factor, which comprises a carbon dioxide laser for emitting melting laser to a sample rod; the output end of the rotating motor is provided with a rotating shaft, and the rotating shaft is used for coaxially assembling the sample rod; the rotating motor is arranged on the stepping displacement table, and the stepping displacement table can move along the axial direction of the rotating shaft; the controller is respectively electrically connected with the carbon dioxide laser, the rotating motor and the stepping displacement table, the carbon dioxide laser, the rotating motor and the stepping displacement table are automatically controlled through the controller, the structure is simple, the micro rod cavity is automatically processed and prepared on the sample rod, the robustness of the micro rod cavity is guaranteed, and the preparation efficiency is improved.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; and such modifications or substitutions do not depart from the spirit and scope of the corresponding technical solutions of the embodiments of the present invention.