阅读说明：本技术 一种石英玻璃拉制过程中在线监测温度的测温系统及方法 (Temperature measurement system and method for online monitoring temperature in quartz glass drawing process ) 是由 方海生 陈浩 马千里 聂圻春 于 2021-08-31 设计创作，主要内容包括：本发明属于非接触式红外测温相关技术领域,并公开了一种石英玻璃拉制过程中在线监测温度的测温系统及方法。该系统包括吊拉炉和红外热像仪,吊拉炉用于石英玻璃的吊拉成形,该吊拉炉中石英玻璃发生初始塑性变形的区域的一侧设置有观察窗口,红外热像仪设置在该观察窗口外,用于监测吊拉炉中保温层上的温度和石英玻璃融化区域的温度；红外热像仪与控制器连接,当其测量获得保温层的温度后,将测量获得的温度传递给控制器,并在该控制器中进行多物理场模拟,以此获得模拟的石英玻璃融化区域的模拟温度,利用该模拟温度对监测的融化区域温度进行修正,以此作为真实的融化区温度。通过本发明,解决吊拉炉内温度测量不准确以及测量困难的问题。(The invention belongs to the technical field related to non-contact infrared temperature measurement, and discloses a temperature measurement system and method for monitoring temperature on line in a quartz glass drawing process. The system comprises a hanging and pulling furnace and an infrared thermal imager, wherein the hanging and pulling furnace is used for hanging and pulling and forming quartz glass, an observation window is arranged on one side of an area where the initial plastic deformation of the quartz glass occurs in the hanging and pulling furnace, and the infrared thermal imager is arranged outside the observation window and is used for monitoring the temperature of an insulating layer in the hanging and pulling furnace and the temperature of a melting area of the quartz glass; and the thermal infrared imager is connected with the controller, when the thermal infrared imager measures the temperature of the insulating layer, the measured temperature is transmitted to the controller, multi-physical-field simulation is carried out in the controller, so that the simulated temperature of the simulated quartz glass melting area is obtained, and the monitored temperature of the melting area is corrected by utilizing the simulated temperature and is used as the real temperature of the melting area. The invention solves the problems of inaccurate temperature measurement and difficult measurement in the dragline furnace.)

1. The temperature measurement system for on-line monitoring of the temperature in the quartz glass drawing process is characterized by comprising a suspension furnace and a thermal infrared imager (3), wherein:

the hanging and pulling furnace is used for hanging, pulling and forming the quartz glass, an observation window is arranged on one side of an area where the initial plastic deformation of the quartz glass occurs in the hanging and pulling furnace, and the thermal infrared imager (3) is arranged outside the observation window and used for monitoring the temperature on an insulating layer in the hanging and pulling furnace and the temperature of a melting deformation area of the quartz glass;

the thermal infrared imager (3) is connected with the controller (4), when the temperature of the heat-insulating layer is obtained through measurement, the measured temperature is transmitted to the controller, multi-physical-field simulation is carried out in the controller, so that the simulated temperature of the simulated quartz glass melting deformation area is obtained, the monitored temperature of the melting deformation area is corrected by utilizing the simulated temperature, the corrected temperature is the real deformation temperature of the melting area, and the temperature in the quartz glass drawing process is monitored on line.

2. The temperature measuring system for on-line monitoring of the temperature in the quartz glass drawing process according to claim 1, wherein the draw furnace comprises a furnace shell (1), a heater (8) and an induction coil (5), the quartz glass to be heated is suspended in the center of the draw furnace, the heater (8) is arranged at the upper part of the draw furnace and surrounds the suspended quartz glass, the induction coil (5) is arranged opposite to the heater, an alternating current is introduced into the induction coil (5) to generate a strong electromagnetic field, an induced current is generated, the heater (8) generates the induced current in the strong electromagnetic field, and the induced current generates heat to heat the quartz glass, and the quartz glass is drawn after being melted at a high temperature.

3. The temperature measuring system for the on-line temperature monitoring in the quartz glass drawing process according to claim 1 or 2, wherein an insulating layer (7) is arranged between the heater (8) and the induction coil (5), and an insulating material is arranged in the insulating layer.

4. The temperature measuring system for on-line monitoring of the temperature during the drawing process of the quartz glass according to claim 1 or 2, wherein the pulling furnace is filled with nitrogen gas to prevent the quartz glass from being oxidized during the heating process.

5. The temperature measuring system for on-line monitoring of the temperature during the drawing process of the quartz glass according to claim 3, wherein the furnace shell (1) is made of stainless steel, the induction coil (5) is made of copper, the insulating layer (7) is made of carbon felt, and the heater is made of graphite.

6. The temperature measurement system for on-line temperature monitoring in the quartz glass drawing process as claimed in claim 1 or 2, wherein the thermal infrared imager (3) measures temperature in a range of-40 ℃ to 2000 ℃ with an accuracy of ± 2%.

7. The temperature measurement system for on-line temperature monitoring in the quartz glass drawing process as claimed in claim 1 or 2, wherein the observation window (2) and the thermal infrared imager (3) are located at the same horizontal line, thereby ensuring the accuracy of temperature measurement.

8. A measuring method of a thermometric system according to any one of claims 1-7, comprising the steps of:

s1, measuring the temperature of the heat-insulating layer and the melting deformation area of the quartz glass by the thermal infrared imager, and feeding back to the controller;

the S2 controller adopts multi-physical field simulation according to the measured temperature of the heat preservation layer, so as to obtain the simulation temperature of the melting deformation area of the quartz glass;

s3, correcting the measured temperature of the melting deformation area according to the simulated temperature, wherein the corrected temperature is the real temperature of the melting deformation area.

Technical Field

The invention belongs to the technical field of non-contact infrared temperature measurement, and particularly relates to a temperature measurement system and method for monitoring temperature on line in a quartz glass drawing process.

Background

With the development and progress of the state advanced science and technology, higher requirements are put forward on the performance of a base material, and quartz glass as special photoelectric functional glass has the advantages of better spectral transmittance and chemical stability, low thermal expansion coefficient and electric conductivity, longer working life under extreme conditions and the like, and is widely applied to the fields of optical, semiconductor and other national strategic emerging enterprises and national defense science and technology. In the practical industrial application process, quartz glass is often required to be modified for use, for example, secondary modification products such as quartz glass tubes, quartz glass rods and the like are often required in the semiconductor industry, and the current modification method mainly focuses on a thermal modification method, namely, a quartz glass mother rod is heated and melted at a high temperature and then drawn into a required shape, so that the control of a temperature field in the practical production process is very important for the forming process of the quartz glass product.

Most of traditional production equipment adopts a metal thermocouple for measuring temperature, the temperature in a furnace cavity can reach 2000 ℃ in the production process of quartz glass, and the limitation of process materials makes the quartz glass necessary to adopt non-contact high-temperature measurement. The existing non-contact optical temperature measurement method mostly adopts infrared radiation temperature measurement, and the temperature of a certain single point is calculated by measuring radiation light with a certain wave band, but the requirement of the measurement method on the measurement environment is very high, and in the practical application process, because the temperature change of a temperature measurement point is influenced by various factors, such as deformation of quartz glass melting interface characteristics, pull-down of a formed glass rod and the like, the temperature of the measurement preset point becomes very difficult, the measured temperature fluctuation is obvious, and the temperature measurement error is large, so that the uniformity adjustment of the temperature in the heating furnace cavity is influenced.

Disclosure of Invention

Aiming at the defects or the improvement requirements of the prior art, the invention provides a temperature measuring system and a temperature measuring method for on-line temperature monitoring in the drawing process of quartz glass, and solves the problems of inaccurate temperature measurement and difficult measurement in a drawbench.

In order to achieve the above object, according to the present invention, there is provided a temperature measuring system for online monitoring temperature during quartz glass drawing, the system comprising a suspension furnace and a thermal infrared imager, wherein:

the hanging and pulling furnace is used for hanging, pulling and forming the quartz glass, an observation window is arranged on one side of an area where the initial plastic deformation of the quartz glass occurs in the hanging and pulling furnace, and the thermal infrared imager is arranged outside the observation window and used for monitoring the temperature on the heat insulation layer in the hanging and pulling furnace and the temperature of the melting deformation area of the quartz glass;

and the thermal infrared imager is connected with the controller, when the temperature of the heat-insulating layer is obtained by measurement, the temperature obtained by measurement is transmitted to the controller, multi-physical-field simulation is carried out in the controller, so that the simulated temperature of the simulated quartz glass melting deformation area is obtained, and the monitored temperature of the melting deformation area is corrected by utilizing the simulated temperature and is taken as the final temperature of the melting deformation area, so that the temperature in the quartz glass drawing process is monitored on line.

Further preferably, the draw furnace comprises a furnace shell, a heater and an induction coil, the quartz glass to be heated is suspended in the center of the draw furnace, the heater is arranged at the upper part of the draw furnace and surrounds the suspended quartz glass, the induction coil is arranged opposite to the heater, alternating current is introduced into the induction coil to generate a strong electromagnetic field, induction current is generated, the heater generates induction current in the strong electromagnetic field, heat is generated to heat the quartz glass, and the quartz glass is melted and drawn at high temperature.

Further preferably, a heat insulation layer is arranged between the heater and the induction coil, and heat insulation materials are arranged in the heat insulation layer.

Further preferably, the draw furnace is filled with nitrogen gas to prevent oxidation of the quartz glass during heating.

Preferably, the furnace shell is made of stainless steel, the induction coil is made of copper, the heat insulation layer is made of carbon felt, and the heater is made of graphite.

Further preferably, the temperature measuring range of the thermal infrared imager is-40-2000 ℃, and the precision is +/-2%.

Further preferably, the observation window and the thermal infrared imager are located on the same horizontal line, so that the temperature measurement accuracy is guaranteed.

According to another aspect of the present invention, a measuring method of the thermometric system described above comprises the steps of:

s1, measuring the temperature of the heat-insulating layer and the melting deformation area of the quartz glass by the thermal infrared imager, and feeding back to the controller;

the S2 controller adopts multi-physical field simulation according to the measured temperature of the heat preservation layer, so as to obtain the simulation temperature of the melting deformation area of the quartz glass;

s3, correcting the measured temperature of the melting deformation area according to the simulated temperature, wherein the corrected temperature is the real temperature of the melting deformation area.

Generally, compared with the prior art, the technical scheme of the invention has the following beneficial effects:

1. the invention adopts the thermal infrared imager to measure the temperature of the heat-insulating layer, because the temperature of the deformation area is influenced by the glass melting interface in the actual drawing process of the quartz glass rod, the temperature fluctuation measured by the traditional temperature measuring method is larger, the measuring result has larger error, and the heat-insulating layer area is less influenced in the whole process, and the temperature measuring environment is more stable, so the temperature of the area is easy to measure and has higher precision;

2. the thermal infrared imager and the observation window in the drawbench are matched and are on the same horizontal line, and the thermal infrared imager adopts non-contact measurement, so that the measurement accuracy can be ensured, and the measurement process can not interfere with the deformation process of the quartz glass;

3. the infrared detection adopted in the invention realizes the real-time detection of the temperature in the drawbench, and can output the measurement result in real time, thereby facilitating the external real-time detection of the melting process of the quartz glass, carrying out real-time adjustment and improving the operation stability of the equipment.

Drawings

FIG. 1 is an elevation view of an infrared temperature on-line monitoring feedback system based on environmental and process signature identification constructed in accordance with a preferred embodiment of the present invention;

FIG. 2 is a schematic view of a viewing window temperature sensing point constructed in accordance with a preferred embodiment of the present invention;

fig. 3 is a schematic diagram of a principle constructed in accordance with a preferred embodiment of the present invention.

The same reference numbers will be used throughout the drawings to refer to the same or like elements or structures, wherein:

the method comprises the following steps of 1-furnace shell, 2-observation window, 3-thermal infrared imager, 4-controller, 5-induction coil, 6-quartz glass mother rod, 7-heat preservation layer, 8-heater, 9-deformation zone, 10-formed glass rod, 11-deformation zone temperature measurement point and 12-heat preservation layer temperature measurement point.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. In addition, the technical features involved in the embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.

As shown in figure 1, the infrared temperature on-line monitoring feedback system based on environment and process characteristic identification comprises a furnace shell 1, a quartz glass mother rod 6, a heater 8, a deformation zone 9, a heat preservation layer 7, a formed glass rod 10, a thermal infrared imager 3, a controller 4, an induction coil 5, an observation window 2, a deformation zone temperature measurement point 11 and a heat preservation layer temperature measurement point 12, wherein the deformation zone temperature measurement point 11 is arranged at a deformation part where the quartz glass mother rod is melted from thick to thin, the heat preservation layer temperature measurement point 12 is arranged on the heat preservation layer, the quartz glass mother rod 6 is hung on an inlet at the upper end of the furnace shell 1 in a cylindrical shape and is lowered to a heating zone at a certain speed, by applying alternating current to the induction coil 5, strong electromagnetic field appears in the space to generate induction current and high-temperature heat in the heater 8, the quartz glass mother rod 6 is softened in the deformation zone 9 at high temperature, and the formed glass rod 10 is obtained after being pulled down.

As shown in fig. 2, the thermal infrared imager 3 is connected to one side of the controller 4, the temperatures of the temperature measurement point 11 of the deformation region and the temperature measurement point 12 of the insulating layer are obtained through the observation window 2, the obtained temperature values are transmitted to the controller 4 for processing, the controller 4 obtains the analog value of the temperature measurement point 11 of the deformation region under the multi-physical-field simulation by using the temperature value of the temperature measurement point 12 of the insulating layer as a standard working condition, and corrects the temperature measurement result of the thermal infrared imager 3 by using the value, so as to improve the accuracy of the temperature measurement, wherein the correction method is various, for example, an error value is used to compensate the measurement value.

It is further preferred that the insulating layer 7 is used to keep the temperature field of the internal heating zone stable, the temperature measuring point 12 of the insulating zone is in a region relatively independent of the process technology, and the surface state is stable.

Further preferably, the thermal infrared imager 3 and the observation window 2 are located on the same horizontal plane, and it is ensured that the temperature measuring point 11 of the deformation region and the temperature measuring point 12 of the insulation region can be observed.

Further preferably, real-time temperature values of the temperature measuring point 11 of the deformation area and the temperature measuring point 12 of the heat preservation area can be obtained by using the thermal infrared imager 3, and the temperature values are transmitted to the controller for processing.

Further preferably, a multi-physical-field simulation result is preset in the controller, the temperature value of the temperature measuring point of the heat preservation area extracted by the thermal infrared imager is used as a standard working condition to obtain a temperature simulation value of the temperature measuring point of the deformation area under the working condition, and the temperature value of the temperature measuring point of the deformation area measured by the thermal infrared imager is corrected by using the temperature simulation value, so that the accuracy of temperature measurement is improved. The multi-physical-field simulation is to analyze the geometric structure of the suspension furnace, the physical property parameters of the material, the material of the heat-insulating layer, the set heating temperature of the heater and other parameters by adopting finite element software so as to obtain the simulation temperature of the deformation zone.

Further preferably, the temperature measuring range of the thermal infrared imager 3 is-40 ℃ to 2000 ℃, and the precision is +/-2%.

Further preferably, the furnace shell 1 is made of stainless steel, the induction coil 5 is made of copper, the insulating layer 7 is made of carbon felt, and the heater 8 is made of graphite.

Further preferably, the furnace chamber of the dragline furnace is filled with nitrogen gas in the working state, so that the internal materials are prevented from being oxidized at high temperature.

The following describes the principles and methods of implementation of the present invention:

as shown in figure 3, alternating current is applied to the induction coil 5, the heater 8 heats the hearth, the thermal infrared imager 3 records the temperatures of the temperature measuring point 11 of the deformation region and the temperature measuring point 12 of the heat preservation layer in the heating process, after signals are transmitted to the controller, the controller obtains a simulation value of the temperature measuring point 11 of the deformation region under the working condition corresponding to the temperature of the temperature measuring point 12 of the heat preservation layer through a multi-physical-field simulation result, and the simulation value is used for correcting the temperature of the temperature measuring point 11 of the deformation region measured by the thermal infrared imager, so that the accurate value of the temperature of the deformation region is obtained, the temperature measurement purpose in the whole quartz glass drawing process is achieved, the whole process can reach the expected temperature stability, and the method has important significance for the production of high-quality quartz glass modified products.

It will be understood by those skilled in the art that the foregoing is only a preferred embodiment of the present invention, and is not intended to limit the invention, and that any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the scope of the present invention.