阅读说明：本技术 光波导结构及其制备方法 (Optical waveguide structure and preparation method thereof ) 是由 王子诙 于 2020-05-27 设计创作，主要内容包括：本发明提供一种光波导结构及其制备方法,光波导结构包括第一光波导主体结构及第二光波导主体结构,第一光波导主体结构的第二表面具有第一阵列结构,第二光波导主体结构的第二表面具有第二阵列结构,且第一光波导主体结构的第二表面与第二光波导主体结构的第二表面相贴合后,在第一阵列结构与第二阵列结构之间具有平行设置的间隙。本发明在光波导结构中形成平行设置的低折射率的间隙,从而可选择性地使一部分入射光线耦合出光波导结构,同时使另一部分入射光线继续在光波导结构中传播,以扩大光波导结构的出瞳范围,降低光波导结构的厚度；同时,光波导结构简单、制备步骤简单、成本较低、适用于大规模低成本生产。(The invention provides an optical waveguide structure and a preparation method thereof, wherein the optical waveguide structure comprises a first optical waveguide main body structure and a second optical waveguide main body structure, the second surface of the first optical waveguide main body structure is provided with a first array structure, the second surface of the second optical waveguide main body structure is provided with a second array structure, and after the second surface of the first optical waveguide main body structure is attached to the second surface of the second optical waveguide main body structure, a gap arranged in parallel is formed between the first array structure and the second array structure. The invention forms the parallel gap with low refractive index in the optical waveguide structure, thus selectively coupling one part of incident light out of the optical waveguide structure, and simultaneously enabling the other part of incident light to continuously propagate in the optical waveguide structure, so as to expand the exit pupil range of the optical waveguide structure and reduce the thickness of the optical waveguide structure; meanwhile, the optical waveguide has the advantages of simple structure, simple preparation steps and lower cost, and is suitable for large-scale low-cost production.)

1. An optical waveguide structure, comprising:

the optical waveguide device comprises a first optical waveguide main body structure, a second optical waveguide main body structure and a light source, wherein the first optical waveguide main body structure comprises a first surface and a second surface which are opposite, the first surface of the first optical waveguide main body structure is a plane, and the second surface of the first optical waveguide main body structure is provided with a first array structure;

the optical waveguide device comprises a first optical waveguide body structure, a second optical waveguide body structure and a light source, wherein the first optical waveguide body structure comprises a first surface and a second surface which are opposite, the first surface of the second optical waveguide body structure is a plane, and the second surface of the second optical waveguide body structure is provided with a second array structure;

the second surface of the first optical waveguide main body structure is attached to the second surface of the second optical waveguide main body structure, and a gap arranged in parallel is formed between the first array structure and the second array structure.

2. The optical waveguide structure of claim 1, wherein: the width of the gap is in the range of 1-100 μm.

3. The optical waveguide structure of claim 1, wherein: the first array structure is a saw-toothed structure, the second array structure is a saw-toothed structure, and the first array structure and the second array structure have the same appearance; the sawtooth structure comprises a plurality of tooth parts which are connected in sequence, and the tooth tip intervals of the adjacent tooth parts are the same as the tooth root intervals of the tooth parts.

4. According toThe optical waveguide structure of claim 1 wherein: the gap further comprises a light angle selective reflection film with a refractive index smaller than that of the first optical waveguide body structure and the second optical waveguide body structure, wherein the light angle selective reflection film comprises MgF₂Film or SiO₂A film; the structure of the light angle selective reflection film comprises a hollow nano-structure film; the material of the first optical waveguide body structure comprises resin or glass; the material of the second optical waveguide body structure includes resin or glass.

5. The optical waveguide structure of any one of claims 1 to 4, wherein: the optical waveguide structure further comprises lenses, and the lenses are attached to two ends of an attaching structure formed after the first optical waveguide main body structure and the second optical waveguide main body structure are attached.

6. The optical waveguide structure of claim 5, wherein: the attaching structure comprises an attaching structure protruding part, the lens comprises a lens protruding part, and the attaching structure protruding part is attached to the lens protruding part to form a stepped combination structure.

7. The optical waveguide structure of any one of claims 1 to 4, wherein: the first optical waveguide body structure or the second optical waveguide body structure is a lens.

8. A method for preparing an optical waveguide structure, comprising the steps of:

preparing a first optical waveguide main body structure and a second optical waveguide main body structure; the first optical waveguide main body structure comprises a first surface and a second surface which are opposite, the first surface of the first optical waveguide main body structure is a plane, and the second surface of the first optical waveguide main body structure is provided with a first array structure; the second optical waveguide body structure comprises a first surface and a second surface which are opposite, the first surface of the second optical waveguide body structure is a plane, and the second surface of the second optical waveguide body structure is provided with a second array structure;

and attaching the second surface of the first optical waveguide main body structure to the second surface of the second optical waveguide main body structure, and forming a gap arranged in parallel between the first array structure and the second array structure.

9. The method of manufacturing an optical waveguide structure according to claim 8, wherein: the first optical waveguide main body structure and the second optical waveguide main body structure are prepared on the basis of the same mold, the first array structure and the second array structure are saw-toothed structures, each saw-toothed structure comprises a plurality of tooth parts which are connected in sequence, and the tooth tip intervals of the adjacent tooth parts are the same as the tooth root intervals of the tooth parts.

10. The method of manufacturing an optical waveguide structure according to claim 8, wherein: the width range of the formed gap comprises 1-100 mu m; further comprising a step of forming a light angle selective reflection film having a refractive index smaller than that of the first and second optical waveguide body structures in the gap, wherein the light angle selective reflection film comprises MgF₂Film or SiO₂A film; the structure of the light angle selective reflection film comprises a hollow nano-structure film; the material of the first optical waveguide body structure comprises resin or glass; the material of the second optical waveguide body structure includes resin or glass.

11. The method for producing an optical waveguide structure according to any one of claims 8 to 10, further comprising the steps of:

providing a lens;

and attaching the lens to two ends of an attaching structure formed after the first optical waveguide main body structure and the second optical waveguide main body structure are attached.

12. The method for producing an optical waveguide structure according to any one of claims 8 to 10, wherein: the first optical waveguide body structure or the second optical waveguide body structure is a lens.

Technical Field

The invention belongs to the technical field of optical waveguides, and particularly relates to an optical waveguide structure and a preparation method thereof.

Background

Augmented Reality (AR) technology is a technology for projecting a virtual image to the real world to enhance the perception effect of a user, and has important applications in a plurality of fields. In the augmented reality technology, the optical waveguide is a key element, and functions to transmit and project a virtual image to the eyes of a user through the optical waveguide to form a virtual image. Along with the improvement of the computing power of electronic products, the use of the AR technology is more and more extensive.

At present, optical waveguide technologies mainly include an array optical waveguide and a holographic optical waveguide, but the preparation of the array optical waveguide generally requires that facets parallel to each other are respectively manufactured, then dielectric films with up to tens of layers are plated on the facets, after the plating is completed, the facets are bonded to each other, and the complicated plating and bonding requirements thereof cause high manufacturing cost and low manufacturing yield, so that large-scale production with low cost is difficult, while the preparation of the holographic optical waveguide is more complicated, thousands of grooves need to be engraved on the surface of the waveguide, and different groove pitches need to be corresponded to light with different colors, so that the manufacture of the multicolor holographic optical waveguide is more expensive, and thus the application thereof is limited to a smaller range. Therefore, the preparation schemes of the existing optical waveguide technology have the problems of complex processing steps and high cost, thereby restricting the popularization of the augmented reality technology in the common consumption field.

Therefore, it is necessary to provide a novel optical waveguide structure and a method for manufacturing the same.

Disclosure of Invention

In view of the above-mentioned shortcomings of the prior art, the present invention aims to provide an optical waveguide structure and a method for manufacturing the same, which are used to solve the problems of complicated processing steps, high cost, etc. of the optical waveguide in the prior art.

To achieve the above and other related objects, the present invention provides an optical waveguide structure comprising:

the optical waveguide device comprises a first optical waveguide main body structure, a second optical waveguide main body structure and a light source, wherein the first optical waveguide main body structure comprises a first surface and a second surface which are opposite, the first surface of the first optical waveguide main body structure is a plane, and the second surface of the first optical waveguide main body structure is provided with a first array structure;

the optical waveguide device comprises a first optical waveguide body structure, a second optical waveguide body structure and a light source, wherein the first optical waveguide body structure comprises a first surface and a second surface which are opposite, the first surface of the second optical waveguide body structure is a plane, and the second surface of the second optical waveguide body structure is provided with a second array structure;

the second surface of the first optical waveguide main body structure is attached to the second surface of the second optical waveguide main body structure, and a gap arranged in parallel is formed between the first array structure and the second array structure.

Optionally, the width of the gap ranges from 1 μm to 100 μm.

Optionally, the first array structure is a saw-toothed structure, the second array structure is a saw-toothed structure, and the first array structure and the second array structure have the same morphology; the sawtooth structure comprises a plurality of tooth parts which are connected in sequence, and the tooth tip intervals of the adjacent tooth parts are the same as the tooth root intervals of the tooth parts.

Optionally, the gap further includes an optical angle selective reflection film having a refractive index smaller than that of the first optical waveguide body structure and the second optical waveguide body structure, wherein the optical angle selective reflection film includes MgF₂Film or SiO₂A film; the structure of the light angle selective reflection film comprises a hollow nano-structure film; the material of the first optical waveguide body structure comprises resin or glass; the material of the second optical waveguide body structure includes resin or glass.

Optionally, any of the optical waveguide structures further includes lenses, and the lenses are attached to two ends of an attachment structure formed after the first optical waveguide main body structure and the second optical waveguide main body structure are attached to each other.

Optionally, the attaching structure includes an attaching structure protrusion, the lens includes a lens protrusion, and the attaching structure protrusion is attached to the lens protrusion to form a stepped combination structure.

Optionally, in any of the above optical waveguide structures, the first optical waveguide body structure or the second optical waveguide body structure is a mirror.

The invention also provides a preparation method of the optical waveguide structure, which comprises the following steps:

preparing a first optical waveguide main body structure and a second optical waveguide main body structure; the first optical waveguide main body structure comprises a first surface and a second surface which are opposite, the first surface of the first optical waveguide main body structure is a plane, and the second surface of the first optical waveguide main body structure is provided with a first array structure; the second optical waveguide body structure comprises a first surface and a second surface which are opposite, the first surface of the second optical waveguide body structure is a plane, and the second surface of the second optical waveguide body structure is provided with a second array structure;

and attaching the second surface of the first optical waveguide main body structure to the second surface of the second optical waveguide main body structure, and forming a gap arranged in parallel between the first array structure and the second array structure.

Optionally, the first optical waveguide main body structure and the second optical waveguide main body structure are prepared on the basis of the same mold, the first array structure and the second array structure are saw-toothed structures, each saw-toothed structure comprises a plurality of tooth portions connected in sequence, and the tooth tip interval of each adjacent tooth portion is the same as the tooth root interval of each tooth portion.

Optionally, the width of the gap is formed in a range including 1 μm to 100 μm; further comprising a step of forming a light angle selective reflection film having a refractive index smaller than that of the first and second optical waveguide body structures in the gap, wherein the light angle selective reflection film comprises MgF₂Film or SiO₂A film; the structure of the light angle selective reflection film comprises a hollow nano-structure film; the material of the first optical waveguide body structure comprises resin or glass; the material of the second optical waveguide body structure includes resin or glass.

Optionally, the method for manufacturing an optical waveguide structure described above further includes the following steps:

providing a lens;

and attaching the lens to two ends of an attaching structure formed after the first optical waveguide main body structure and the second optical waveguide main body structure are attached.

Optionally, in any of the above methods for manufacturing an optical waveguide structure, the first optical waveguide body structure or the second optical waveguide body structure is a lens.

As described above, the optical waveguide structure and the method for manufacturing the same of the present invention includes: the optical waveguide device comprises a first optical waveguide main body structure, a second optical waveguide main body structure and a light source, wherein the first optical waveguide main body structure comprises a first surface and a second surface which are opposite, the first surface of the first optical waveguide main body structure is a plane, and the second surface of the first optical waveguide main body structure is provided with a first array structure; the optical waveguide device comprises a first optical waveguide body structure, a second optical waveguide body structure and a light source, wherein the first optical waveguide body structure comprises a first surface and a second surface which are opposite, the first surface of the second optical waveguide body structure is a plane, and the second surface of the second optical waveguide body structure is provided with a second array structure; the second surface of the first optical waveguide main body structure is attached to the second surface of the second optical waveguide main body structure, and a gap arranged in parallel is formed between the first array structure and the second array structure. The optical waveguide structure can form a gap with low refractive index arranged in parallel in the optical waveguide structure by the joint of the first optical waveguide main body structure with the first array structure and the second optical waveguide main body structure with the second array structure, so that a part of incident light can be selectively coupled out of the optical waveguide structure, and the other part of the incident light can be continuously transmitted in the optical waveguide structure, thereby expanding the exit pupil range of the optical waveguide structure and reducing the thickness of the optical waveguide structure; meanwhile, the optical waveguide has the advantages of simple structure, simple preparation steps and lower cost, and is suitable for large-scale low-cost production.

Drawings

FIG. 1 is a flow chart of a process for fabricating an optical waveguide structure according to the present invention.

FIG. 2 is a schematic diagram of a first optical waveguide body structure and a second optical waveguide body structure in accordance with the present invention.

FIG. 3 is a schematic structural view of a first optical waveguide body structure and a second optical waveguide body structure after they are bonded together.

Fig. 4 is a schematic diagram of a light transmission path in an enlarged area a in fig. 3.

Fig. 5 is a schematic view of another light transmission path in the enlarged region a of fig. 3.

FIG. 6 is a schematic view showing the light transmission of the optical waveguide of the present invention.

FIG. 7 is a schematic view showing the structure of an optical waveguide having an optical angle selective reflection film according to the present invention.

Fig. 8 is a schematic view illustrating a bonding structure of the present invention bonded to a lens.

Fig. 9 is a schematic structural view of the bonded structure and the lens of the invention after bonding.

FIG. 10 is a schematic view of the structure of the convex portion of the bonding structure and the convex portion of the lens according to the present invention.

FIG. 11 is a schematic view of the second optical waveguide body structure of the present invention when the lens is attached.

Fig. 12 is a schematic structural view of the second optical waveguide body structure after being bonded to a lens according to the present invention.

FIG. 13 is a schematic view of the second optical waveguide body structure of the present invention when it is an elliptical lens.

FIG. 14 is a schematic structural view of the second optical waveguide body structure after being bonded to an elliptical lens according to the present invention.

Description of the element reference numerals

1. 11, 18, 23 first optical waveguide body structure

101 first surface of a first optical waveguide body structure

102 second surface of the first optical waveguide body structure

1021 first tooth surface

1022 second flank surface

2. 12 second optical waveguide body structure

201 first surface of second optical waveguide body structure

202 second surface of the second optical waveguide body structure

2021 first tooth flank

2022 second flank

3. 13, 20 clearance

301 gap first surface

302 gap second surface

4. 6 incident light

5 outgoing ray

7 penetrating light

8 light angle selective reflection film

9. 10, 14, 15, 19, 21 lenses

22 groove

d1 tooth tip spacing

d2 root spacing

A enlarged region

B step-shaped combination structure

Detailed Description

The embodiments of the present invention are described below with reference to specific embodiments, and other advantages and effects of the present invention will be easily understood by those skilled in the art from the disclosure of the present specification. The invention is capable of other and different embodiments and of being practiced or of being carried out in various ways, and its several details are capable of modification in various respects, all without departing from the spirit and scope of the present invention.

Please refer to fig. 1 to 14. It should be noted that the drawings provided in the present embodiment are only for illustrating the basic idea of the present invention, and the components related to the present invention are only shown in the drawings rather than drawn according to the number, shape and size of the components in actual implementation, and the type, quantity and proportion of the components in actual implementation may be changed freely, and the layout of the components may be more complicated.

Referring to fig. 2 and 3, the present invention provides an optical waveguide structure, including: a first optical waveguide body structure 1, where the first optical waveguide body structure 1 includes a first surface 101 and a second surface 102 opposite to each other, the first surface 101 of the first optical waveguide body structure is a plane, and the second surface 102 of the first optical waveguide body structure includes a first array structure; a second optical waveguide body structure 2, wherein the second optical waveguide body structure 2 includes a first surface 201 and a second surface 202 opposite to the first surface 201, the first surface 201 of the second optical waveguide body structure is a plane, and the second surface 202 of the second optical waveguide body structure includes a second array structure; the second surface 102 of the first optical waveguide body structure is attached to the second surface 202 of the second optical waveguide body structure, and a gap 3 is formed between the first array structure and the second array structure.

The optical waveguide structure of the present invention has the gap 3 with the low refractive index arranged in parallel, so that a part of incident light can be selectively coupled out of the optical waveguide structure, and another part of incident light can be continuously transmitted in the optical waveguide structure, thereby expanding the exit pupil range of the optical waveguide structure and reducing the thickness of the optical waveguide structure.

Specifically, referring to fig. 4 to 6, when the angle between the incident light 4 and the first surface 301 of the gap is small, the light 4 is totally reflected at the first surface 301 of the gap, and is coupled out of the optical waveguide to form the outgoing light 5. When another set of incident light rays 6 has a larger angle with the first surface 301 of the gap, the incident light rays 6 will pass through the second surface 302 of the gap to form transmitted light rays 7 to continue propagating in the optical waveguide body material. Wherein the critical angle of total reflection can be controlled by the refractive index of the material in the gap 3 and the refractive index of the optical waveguide body material. In this embodiment, the material medium in the gap 3 is air, so that the refractive index is close to 1, but the invention is not limited thereto.

By way of example, the width w of the gap 3 ranges from 1 μm to 100 μm.

Specifically, the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 can be directly prepared by a mold, and the gap 3 can be directly formed after the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are attached. The first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 may both have a space of a part of the gap 3, so that the gap 3 is formed after the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are attached, but the present invention is not limited thereto, and a space of the gap 3 may be reserved only in the first optical waveguide main body structure 1 or the second optical waveguide main body structure 2, so that the gap 3 is formed after the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are attached, and the preparation of the gap 3 is not limited herein. The width w of the gap 3 may include 1 μm, 5 μm, 50 μm, 100 μm, etc., and may be appropriately selected without affecting the light propagation; further, the number and distribution of the gaps 3 can be set as required. In this embodiment, it is preferable that the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 have the same morphology, and the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are prepared by using the same mold, so that the process difficulty can be reduced, the production cost can be saved, and the optical waveguide.

As an example, the first array structure is a saw-toothed structure, the second array structure is a saw-toothed structure, and the first array structure and the second array structure have the same topography; the sawtooth structure comprises a plurality of tooth parts which are connected in sequence, the tooth tip interval d1 of the tooth parts is the same as the tooth root interval d2 of the tooth parts, and the height of the tooth parts is smaller than the thickness of the corresponding optical waveguide main body structure, so that the process preparation is facilitated, the process difficulty is reduced, and the optical waveguide structure with a good fit structure is formed.

Specifically, the teeth include first tooth surfaces 1021, 2021 and second tooth surfaces 1022, 2022; when the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are attached, the gap 3 may be formed between the first tooth surfaces 1021 and 2021; the second tooth surfaces 1022, 2022 can be adhered as adhering surfaces for adhesion and fixation, and simultaneously, incident light can pass through without damage.

As an example, the material of the first optical waveguide body structure 1 may include, but is not limited to, resin or glass, and the material of the second optical waveguide body structure 2 may include, but is not limited to, resin or glass.

As an example, the gap 3 may further include a light angle selective reflection film 8 having a refractive index smaller than that of the first and second optical waveguide body structures 1 and 2, wherein the light angle selective reflection film 8 includes MgF₂Film or SiO₂A film; the structure of the light angle selective reflection film 8 includes a hollow nanostructure film.

Specifically, as shown in fig. 7, the critical angle of total reflection can be further changed by the light angle selective reflective film 8 to expand the application range, wherein the light angle selective reflective film 8 can be MgF filling the gap 3₂Film or SiO₂A thin film, in another embodiment, the light angle selective reflection film 8 can also be the MgF with hollow nano-structure₂Film or SiO₂A film.

In another example, as shown in fig. 8 to 10, the optical waveguide structure may further include a lens 9, a lens 10, a lens 14, and a lens 15, where the lens 9, the lens 10, the lens 14, and the lens 15 are attached to two ends of an attaching structure formed after the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are attached to each other.

As an example, the lens 9 and the lens 10 are respectively attached to two ends of the attaching structure formed by attaching the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2, and the lens 9, the lens 10 and the attaching structure form a planar combination structure.

Specifically, referring to fig. 8 and 9, the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 can be manufactured only by a mold, and after the first optical waveguide main body structure and the second optical waveguide main body structure are bonded, the bonding structure which can be used as a core structure is formed, so that the bonding structure can be reused, the cost is further saved, and large-scale low-cost production is facilitated.

Further, referring to fig. 10, two ends of the bonding structure formed by bonding the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 may further include a bonding structure protrusion, the lens 14 and the lens 15 include a lens protrusion, and after the bonding structure protrusion is bonded to the lens protrusion, a stepped bonding structure B may be formed to facilitate bonding and enhance structural strength.

In another embodiment, as shown in fig. 11-14, the first optical waveguide body structure or the second optical waveguide body structure can also be used directly as a lens.

Specifically, referring to fig. 11 and 12, the second optical waveguide main body structure can be directly used as the lens 19, so that the first optical waveguide main body structure 18 and the lens 19 can be bonded for only 1 time to form the optical waveguide structure with the gap 20.

Further, referring to fig. 13 and 14, the second optical waveguide main body structure can be directly used as a lens 21, and the shape of the lens 21 can be an elliptical lens with a groove 22 in the middle, but the shape of the lens 21 is not limited thereto, wherein the first optical waveguide main body structure 23 can be bonded with the lens 21 1 time through the groove 22, so as to form the optical waveguide structure.

Referring to fig. 1 to 14, the present invention further provides a method for manufacturing an optical waveguide structure, including the steps of:

preparing a first optical waveguide main body structure 1 and a second optical waveguide main body structure 2; the first optical waveguide body structure 1 includes a first surface 101 and a second surface 102 opposite to each other, the first surface 101 of the first optical waveguide body structure is a plane, and the second surface 102 of the first optical waveguide body structure has a first array structure; the second optical waveguide body structure 2 includes a first surface 201 and a second surface 202 opposite to each other, the first surface 201 of the second optical waveguide body structure is a plane, and the second surface 202 of the second optical waveguide body structure has a second array structure;

the second surface 102 of the first optical waveguide body structure is attached to the second surface 202 of the second optical waveguide body structure, and a gap 3 is formed between the first array structure and the second array structure in parallel.

As an example, the material of the first optical waveguide body structure 1 may include, but is not limited to, resin or glass, and the material of the second optical waveguide body structure 2 may include, but is not limited to, resin or glass.

As an example, the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 may be prepared based on the same mold, that is, the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 may be prepared by using the same mold and using processes such as imprinting, that is, the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 have the same structure, so that the process difficulty may be reduced, the production cost may be saved, and the method is suitable for mass production.

As an example, the first array structure and the second array structure are saw-toothed structures, each saw-toothed structure includes a plurality of teeth connected in sequence, a tooth tip interval d1 between adjacent teeth is the same as a tooth root interval d2 between the teeth, and a height of the corresponding tooth is smaller than a thickness of the corresponding optical waveguide main body structure, so as to facilitate process preparation, reduce process difficulty, and form the optical waveguide structure with a good lamination structure.

Specifically, the teeth include first tooth surfaces 1021, 2021 and second tooth surfaces 1022, 2022; when the first optical waveguide body structure 1 and the second optical waveguide body structure 2 are bonded, the gap 3 may be formed between the first tooth surfaces 1021 and 2021, and the second tooth surfaces 1022 and 2022 may be bonded as bonding surfaces for bonding and fixing, so that incident light can pass through without loss.

As an example, the width w of the gap 3 may be formed to range from 1 μm to 100 μm.

Specifically, the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 can be directly prepared by a mold, and the gap 3 can be directly formed after the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are attached, wherein the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 can both have a space of a part of the gap 3, so as to form the gap 3 after the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are attached, but not limited thereto, or a space of the gap 3 can be reserved only in the prepared first optical waveguide main body structure 1 or the prepared second optical waveguide main body structure 2, so as to form the gap 3 after the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are attached, the preparation of the gap 3 is not unduly limited herein. The width w of the gap 3 may include 1 μm, 5 μm, 50 μm, 100 μm, etc., and may be appropriately selected without affecting the light propagation; further, the number and distribution of the gaps 3 can be set as required. In this embodiment, it is preferable that the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 have the same morphology, and the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are prepared by using the same mold, so that the process difficulty can be reduced, the production cost can be saved, and the optical waveguide.

Illustratively, the method further comprises a step of forming a light angle selective reflection film 8 having a refractive index smaller than that of the first and second optical waveguide body structures 1 and 2 in the gap 3, wherein the light angle selective reflection film 8 comprises MgF₂Film or SiO₂A film; the structure of the light angle selective reflection film 8 includes a hollow nanostructure film.

Specifically, as shown in fig. 7, the critical angle of total reflection can be further changed by the light angle selective reflective film 8 to expand the application range, wherein the light angle selective reflective film 8 can be MgF filling the gap 3₂Film or SiO₂A thin film, in another embodiment, the light angle selective reflection film 8 can also be the MgF with hollow nano-structure₂Film or SiO₂A film. The method for forming the light angle selective reflection film 8 may include, but is not limited to, a physical vapor deposition process, a chemical vapor deposition process, or an atomic layer deposition process, the light angle selective reflection film 8 may cover one or a combination of the second tooth surface 1022 and the second tooth surface 2022 completely, or the light angle selective reflection film 8 may cover one or a combination of the second tooth surface 1022 and the second tooth surface 2022 partially, in an actual example, a forming position of the optical angle selective reflection film 3 may be adjusted according to actual needs, and of course, a material of the optical angle selective reflection film 3 may also be selected according to needs.

As an example, referring to fig. 8 to 9, the method further includes the steps of:

providing a lens 9 and a lens 10;

and attaching the lens 9 and the lens 10 to two ends of an attaching structure formed by attaching the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2.

Specifically, as shown in fig. 9, the end surface of the attaching structure formed after the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are attached, and the end surfaces of the lenses 9 and 10 adjacent to the attaching structure are both planar.

In another example, as shown in fig. 10, two ends of the bonding structure formed after the first optical waveguide main body structure 1 and the second optical waveguide main body structure 2 are bonded may further include a bonding structure protrusion, the lenses 14 and 15 include lens protrusions, and after the bonding structure protrusions are bonded to the lens protrusions, a stepped bonding structure B may be formed to facilitate bonding and enhance structural strength.

In another embodiment, as shown in fig. 11-14, the first optical waveguide body structure or the second optical waveguide body structure can directly act as a lens.

Specifically, referring to fig. 11 and 12, the second optical waveguide main body structure can be directly used as the lens 19, so that the first optical waveguide main body structure 18 and the lens 19 can be bonded for only 1 time to form the optical waveguide structure with the gap 20.

Further, referring to fig. 13 and 14, the second optical waveguide main body structure can be directly used as a lens 21, and the lens 21 can be shaped as an elliptical lens with a groove 22 in the middle, but not limited thereto, and the first optical waveguide main body structure 23 can be bonded with the lens 21 1 time through the groove 22 to form the optical waveguide structure.

In summary, the optical waveguide structure and the manufacturing method thereof of the present invention include: the optical waveguide device comprises a first optical waveguide main body structure, a second optical waveguide main body structure and a light source, wherein the first optical waveguide main body structure comprises a first surface and a second surface which are opposite, the first surface of the first optical waveguide main body structure is a plane, and the second surface of the first optical waveguide main body structure is provided with a first array structure; the optical waveguide device comprises a first optical waveguide body structure, a second optical waveguide body structure and a light source, wherein the first optical waveguide body structure comprises a first surface and a second surface which are opposite, the first surface of the second optical waveguide body structure is a plane, and the second surface of the second optical waveguide body structure is provided with a second array structure; the second surface of the first optical waveguide main body structure is attached to the second surface of the second optical waveguide main body structure, and a gap arranged in parallel is formed between the first array structure and the second array structure. The optical waveguide structure can form a gap with low refractive index arranged in parallel in the optical waveguide structure by the joint of the first optical waveguide main body structure with the first array structure and the second optical waveguide main body structure with the second array structure, so that a part of incident light can be selectively coupled out of the optical waveguide structure, and the other part of the incident light can be continuously transmitted in the optical waveguide structure, thereby expanding the exit pupil range of the optical waveguide structure and reducing the thickness of the optical waveguide structure; meanwhile, the optical waveguide has the advantages of simple structure, simple preparation steps and lower cost, and is suitable for large-scale low-cost production.

The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.