阅读说明：本技术 一种光学元件离子束抛光加工系统 (Ion beam polishing system for optical element ) 是由 黄智� 杨兴 闵杰 陈贵科 王洪艳 蒋劲茂 于 2021-09-07 设计创作，主要内容包括：本发明公开了一种光学元件离子束抛光加工系统,解决现有三轴运动或五轴运动平台抛光设备操作复杂、制造昂贵的技术问题。本发明包括支撑底座,设于支撑底座上用于提供真空环境的真空室,设于真空室内的工作平台,分别设于工作平台上的支撑板和机器人底座,设于支撑板上用于夹取待抛光光学工件的光学工件夹具单元,设于机器人底座上的六轴关节机器人,以及设于六轴关节机器人末端关节为待抛光光学工件提供离子束的离子源。本发明结构简单、设计科学合理,使用方便,采用了六轴关节机器人为运动平台,可灵活用于各种类型光学元件表面的加工,尤其是对非球面光学元件和自由曲面光学元件抛光上,具有广泛的普适性。(The invention discloses an ion beam polishing system for optical elements, which solves the technical problems of complex operation and expensive manufacture of the existing three-axis motion or five-axis motion platform polishing equipment. The invention comprises a supporting base, a vacuum chamber arranged on the supporting base and used for providing a vacuum environment, a working platform arranged in the vacuum chamber, a supporting plate and a robot base which are respectively arranged on the working platform, an optical workpiece clamp unit arranged on the supporting plate and used for clamping an optical workpiece to be polished, a six-axis joint robot arranged on the robot base, and an ion source arranged at the tail end joint of the six-axis joint robot and used for providing ion beams for the optical workpiece to be polished. The six-axis joint robot motion platform is simple in structure, scientific and reasonable in design and convenient to use, adopts a six-axis joint robot motion platform, can be flexibly used for processing the surfaces of various optical elements, and particularly has wide universality on polishing of aspheric optical elements and free-form surface optical elements.)

1. An ion beam polishing system for optical elements, comprising: including supporting base (12), locate and be used for providing vacuum environment's real empty room (7) on supporting base (12), locate work platform (9) in real empty room (7), backup pad (1) and robot base (8) on work platform (9) are located respectively, locate and be used for pressing from both sides the optical work piece anchor clamps unit (2) of getting optical work piece (3) of treating polishing on backup pad (1), locate six joint robot (6) on robot base (8) to and locate six joint robot (6) end joint and provide ion source (4) of ion beam for treating polishing optical work piece (3).

2. An optical element ion beam polishing system as recited in claim 1, wherein: the optical workpiece clamp unit (2) comprises a chuck (15) vertically fixed on the supporting plate (1) and a plurality of clamps which are uniformly distributed on the chuck (15) and used for clamping the optical workpiece (3) to be polished.

3. An optical element ion beam polishing system as recited in claim 2, wherein: the chuck (15) is provided with a plurality of threaded holes, the supporting plate (1) is provided with a plurality of threaded blind holes matched with the threaded holes, and the chuck (15) is connected with the supporting plate (1) through bolts.

4. An optical element ion beam polishing system as recited in claim 2, wherein: the clamps are three in number, and the angle between adjacent clamps is 120 degrees.

5. An optical element ion beam polishing system as recited in claim 4, wherein: the fixture comprises a threaded rod (16) and a clamping block (14) sleeved on the threaded rod (16), the chuck (15) is provided with embedded grooves (17) used for mounting the threaded rod (16) and the clamping block (14), and the embedded grooves (17) correspond to the fixture one to one.

6. An optical element ion beam polishing system as recited in claim 1, wherein: the tail end joint of the six-axis joint robot (6) is provided with a connecting flange (5), and the ion source (4) is detachably connected with the connecting flange (5).

7. An optical element ion beam polishing system as recited in claim 1, wherein: the ion source (4) is an ion gun.

8. An optical element ion beam polishing system as recited in claim 1, wherein: the vacuum chamber (7) is provided with a vacuum chamber door (11) which can be opened and closed.

9. An optical element ion beam polishing system as recited in claim 8, wherein: the vacuum chamber door (11) is provided with an observation window (10) for facilitating observation of the internal polishing operation.

10. An optical element ion beam polishing system as recited in claim 1, wherein: the bottom of the supporting base (12) is provided with a plurality of sizing blocks (13) used for leveling and enhancing the bearing stability.

Technical Field

The invention belongs to the technical field of ion beam polishing equipment, and particularly relates to an ion beam polishing processing system for an optical element.

Background

Plasma, also known as the fourth state of matter, is an electromagnetic gaseous discharge phenomenon that partially ionizes gaseous particles, such ionized gas comprising atoms, molecules, radicals, ions, and electrons. When plasma is at high temperature and high pressure, electrons can escape from atomic nucleus, the atomic nucleus forms a positively charged ion, when the ions reach a certain amount, the ions can become plasma state, the energy of the plasma state is very large, and when the plasma rubs with an object to be polished, the object can achieve the effect of surface brightness at a moment.

The ion beam polishing technology is characterized in that the ion sputtering principle is utilized, the ion source is used for guiding a beam to generate a plasma energy beam in a vacuum state, and the beam bombards the surface of a workpiece to generate an atomic-level material to be removed, so that the high-precision processing of an optical element is realized. The traditional ion beam polishing equipment mostly adopts a linear motion unit to form a three-axis motion platform or adopts a five-axis linkage motion platform to control the motion and the posture of an ion source in real time, however, the traditional five-axis motion platform is complex, the manufacturing cost is high, and the installation and the debugging are complex and inconvenient.

Therefore, the present invention provides an ion beam polishing system for optical elements, which facilitates simplified installation and debugging and flexible polishing angle change, and achieves a polishing system with higher cost performance and more universality, and thus, the present invention is a technical problem to be solved by those skilled in the art.

Disclosure of Invention

The technical problem to be solved by the invention is as follows: the ion beam polishing system for the optical element is provided, and the technical problems of complex operation and expensive manufacture of the existing polishing equipment adopting a three-axis motion platform or a five-axis motion platform are solved.

In order to achieve the purpose, the technical scheme adopted by the invention is as follows:

the utility model provides an optical element ion beam polishing system includes and supports the base, locates the real empty room that is used for providing vacuum environment on supporting the base, locates the work platform in the real empty room, locates backup pad and the robot base on the work platform respectively, is used for pressing from both sides the optical work piece anchor clamps unit of getting the optical work piece of treating polishing on locating the backup pad, locates the six joint robot on the robot base to and locate six joint robot end joint and provide the ion source of ion beam for treating polishing the optical work piece.

Furthermore, the optical workpiece clamp unit comprises a chuck vertically fixed on the supporting plate and a plurality of clamps uniformly distributed on the chuck and used for clamping the optical workpiece to be polished.

Furthermore, the chuck is provided with a plurality of threaded holes, the supporting plate is provided with a plurality of threaded blind holes matched with the threaded holes, and the chuck is connected with the supporting plate through bolts.

Further, there are three clamps, and the angle between adjacent clamps is 120 °.

Furthermore, the fixture comprises a threaded rod and a clamping block sleeved on the threaded rod, an embedded groove used for mounting the threaded rod and the clamping block is formed in the chuck, and the embedded groove corresponds to the fixture one to one.

Furthermore, a connecting flange is arranged at the tail end joint of the six-axis joint robot, and the ion source is detachably connected with the connecting flange.

Further, the ion source is an ion gun.

Further, the vacuum chamber is provided with an openable and closable vacuum chamber door.

Further, the vacuum chamber door is provided with an observation window for facilitating observation of the internal polishing operation.

Furthermore, the bottom of the supporting base is provided with a plurality of sizing blocks used for leveling and enhancing the bearing stability.

Compared with the prior art, the invention has the following beneficial effects:

the polishing device has the advantages of simple structure, scientific and reasonable design and convenient use, solves the technical problems of complex operation and expensive manufacture of the existing three-axis motion or five-axis motion platform polishing equipment, adopts the six-axis joint robot as the motion platform, can be flexibly used for processing the surfaces of various optical elements, and particularly has wide universality on the polishing of aspheric optical elements and free-form surface optical elements.

The invention comprises a supporting base, a vacuum chamber, a working platform, a supporting plate, a robot base, an optical workpiece clamp unit, a six-axis joint robot and an ion source, wherein except the supporting base, other structures are positioned in the vacuum chamber, and the vacuum chamber provides necessary vacuum conditions for polishing. When the ion source device is used, an optical workpiece to be polished is fixedly clamped on the optical workpiece clamp unit, then the ion source is started, the joint motion of the six-axis joint robot is controlled at the moment, the motion and the posture of the ion source are controlled in real time, the ion beam emitted by the ion source is irradiated on any position of the optical surface, and the constant material removal rate is kept.

The invention can process the surfaces of various optical elements, especially the surfaces of aspheric optical elements and free-form surface optical elements, and has wide universality; the equipment composition is flexible, the industrial robot supplies goods conveniently, and the cost performance is high; the installation and debugging are convenient, and the use reliability is higher.

Drawings

FIG. 1 is a schematic view of the structure of the present invention.

Fig. 2 is an external view of the present invention.

Fig. 3 is an enlarged view of the optical workholding unit.

Wherein, the names corresponding to the reference numbers are:

1-support plate, 2-optical workpiece clamping unit, 3-optical workpiece to be polished, 4-ion source, 5-connecting flange, 6-six-axis robot, 7-vacuum chamber, 8-robot base, 9-working platform, 10-observation window, 11-vacuum chamber door, 12-supporting base, 13-sizing block, 14-clamping block, 15-clamping disc, 16-threaded rod and 17-embedded groove.

Detailed Description

In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, but do not indicate or imply that the device or element being referred to must have a particular orientation or be constructed and operated in a particular orientation, and thus, it should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; of course, mechanical connection and electrical connection are also possible; alternatively, they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.

As shown in fig. 1-3, the ion beam polishing system for optical elements provided by the invention has the advantages of simple structure, scientific and reasonable design and convenient use, solves the technical problems of complex operation and expensive manufacture of the existing three-axis motion or five-axis motion platform polishing equipment, adopts a six-axis joint robot as a motion platform, can be flexibly used for processing the surfaces of various optical elements, and particularly has wide universality on the polishing of aspheric optical elements and free-form surface optical elements.

The polishing device comprises a supporting base 12, a vacuum chamber 7 arranged on the supporting base 12 and used for providing a vacuum environment, a working platform 9 arranged in the vacuum chamber 7, a supporting plate 1 and a robot base 8 which are respectively arranged on the working platform 9, an optical workpiece clamp unit 2 arranged on the supporting plate 1 and used for clamping an optical workpiece 3 to be polished, a six-axis joint robot 6 arranged on the robot base 8, and an ion source 4 arranged at the tail end joint of the six-axis joint robot 6 and used for providing ion beams for the optical workpiece 3 to be polished. The above-mentioned structures except the supporting base 12 are all located inside the vacuum chamber 7, and the vacuum chamber 7 can generate a vacuum closed space to provide necessary conditions for polishing. When the device is used, an optical workpiece 3 to be polished is fixedly clamped on the optical workpiece clamp unit 2, then the ion source 4 is started, ion beams emitted by the ion source form plasma energy beam current under vacuum, and the ion beams continuously bombard the surface of the optical workpiece 3 to be polished, which is opposite to the ion beam current; in the polishing process, the joint motion of the six-axis joint robot 6 can be controlled to control the motion and the posture of the ion source 4 in real time, so that the ion beam emitted by the ion source 4 is irradiated on any position of the optical surface and the constant material removal rate is kept.

The optical workpiece clamp unit 2 comprises a chuck 15 vertically fixed on a support plate 1 and a plurality of clamps which are uniformly distributed on the chuck 15 and used for clamping an optical workpiece 3 to be polished; the chuck 15 is provided with a plurality of threaded holes, the supporting plate 1 is provided with a plurality of threaded blind holes matched with the threaded holes, the chuck 15 is connected with the supporting plate 1 through bolts, and the detachable connection of the bolts is convenient for replacing the optical workpiece clamp unit 2 and carrying the device.

The number of the clamps is three, and the angle between every two adjacent clamps is 120 degrees; the fixture comprises a threaded rod 16 and a clamping block 14 sleeved on the threaded rod 16, an embedded groove 17 used for mounting the threaded rod 16 and the clamping block 14 is formed in the chuck 15, and the embedded grooves 17 correspond to the fixture one by one. When the polishing clamp is used, an optical workpiece 3 to be polished is placed on the chucks 15 in the three clamping blocks 14, the end parts of the threaded rods 16 are respectively rotated to drive the clamping blocks 14 on the threaded rods 16 to move relatively until the three clamping blocks 14 tightly clamp the optical workpiece 3 to be polished without loosening and dropping, the clamp can play a stabilizing role, and the number of the clamps can be increased according to the actual situation. The threaded rod 16 not only facilitates the adjustment of the movement of the clamping block 14 by the user, but also locks the clamping block 14.

The six-axis joint robot 6 is provided with the connecting flange 5 at the tail end joint, the ion source 4 is detachably connected with the connecting flange 5, the ion source 4 is convenient to replace and carry, and the ion source 4 adopts an ion gun. The motion and the posture of the ion source 4 are controlled by a six-axis joint robot 6, the six-axis joint robot 6 has 6 degrees of freedom and usually comprises a rotating S axis, a lower arm L axis, an upper arm U axis, a wrist rotating R axis, a wrist swinging B axis and a wrist rotating T axis, and 6 joints are synthesized to realize the motion of 6 degrees of freedom at the tail end. Compared with the traditional three-axis motion platform, the six-axis joint robot 6 has stronger ion beam space operability, greatly improves the flexibility and universality and can process various optical element surfaces, particularly the surfaces of aspheric optical elements and free-form surface optical elements. The six-axis joint robot 6 can be purchased and used directly from the market, and has the advantages of flexible equipment composition, convenient installation and supply and extremely high cost performance; meanwhile, the debugging is convenient, and the use reliability and the stability are higher.

The vacuum chamber 7 of the present invention is provided with an openable and closable vacuum chamber door 11 for disassembling and assembling various internal structures and placing and taking out a polishing workpiece. The observation window 10 is arranged on the vacuum chamber door 11, which is convenient for the external personnel to observe the polishing process in the vacuum chamber 7, and the observation window 10 is preferably made of high-strength and high-temperature resistant glass material.

The bottom of the supporting base 12 of the invention is provided with a plurality of sizing blocks 13 which are used for adjusting and balancing the supporting base 12 on one hand and used for enhancing the bearing stability of the supporting base 12 on the other hand.

The six-axis robot 6 and the ion gun used in the present invention are all known electric devices, and can be purchased and used directly in the market, and the structure, circuit, and control principle thereof are all known in the art, and therefore, the structure, circuit, and control principle of the six-axis robot 6 and the ion gun are not described herein again.

Finally, it should be noted that: the above embodiments are only preferred embodiments of the present invention to illustrate the technical solutions of the present invention, but not to limit the technical solutions, and certainly not to limit the patent scope of the present invention; while the invention has been described in detail and with reference to the foregoing embodiments, it will be understood by those skilled in the art that: the technical solutions described in the foregoing embodiments may still be modified, or some or all of the technical features may be equivalently replaced; the modifications or the substitutions do not make the essence of the corresponding technical solutions depart from the scope of the technical solutions of the embodiments of the present invention; that is, the technical problems to be solved by the present invention, which are not substantially changed or supplemented by the spirit and the concept of the main body of the present invention, are still consistent with the present invention and shall be included in the scope of the present invention; in addition, the technical scheme of the invention is directly or indirectly applied to other related technical fields, and the technical scheme is included in the patent protection scope of the invention.